KR0160676B1 - Robot - Google Patents

Abstract

The present invention relates to a robot for gripping a predetermined object and transporting it to a predetermined position.

The robot according to the present invention has a small space occupied by a component for driving a gripper for holding a predetermined object to a predetermined position, thereby reducing the possibility of interference between surrounding structures and installing in a narrow space. Can be.

Description

Robot

1 is a schematic structural diagram of an example of a conventional robot.

2 is a schematic structural diagram of a state in which the gripper is rotated by a predetermined angle in the robot shown in FIG.

3 is a schematic front view of an example of a robot according to the present invention.

4 is a structural plan view of the robot shown in FIG.

5 is a structural plan view of a state in which the first arm is rotated by a predetermined angle from the state shown in FIG.

6 is a structural plan view of a state in which the second arm is rotated a predetermined angle from the state shown in FIG.

FIG. 7 is a structural plan view of the gripper moved along the longitudinal direction of the guide bar from the state shown in FIG.

* Explanation of symbols for main parts of the drawings

100: robot 10: the first motor

11: Output shaft of the first motor 12: First pulley

15: timing belt 16, 17: bearing

20: second motor 21: output shaft of the second motor

22: 2nd pulley 30: 1st arm

40: second arm 41: first hinge axis

42: second hinge axis 43: third pulley

44: 4th pulley 50: linear bearing

51: third hinge axis 60: guide bar

70: gripper 80: third motor

81: output shaft of the third motor 83: cam follower

90: base 91: cam groove

92 spline shaft

The present invention relates to a robot for gripping a predetermined object such as, for example, a wafer for a semiconductor and moving the same, and more particularly, to a robot having an improved structure to reduce the occurrence of interference with surrounding structures.

BACKGROUND ART In general, a device for manufacturing or inspecting a semiconductor uses a robot for efficiently transferring a wafer to a plurality of wafer stack cassettes or stations placed at an appropriate position.

Such a robot handling the wafer is provided with a gripper 9 which is held by a linking device while holding a wafer (not shown) as structurally shown in FIG. The link device is provided with a first motor 2 and a second motor 3 which are coaxially positioned (shown in the figure as being arranged on a shaft spaced apart for a certain distance for convenience of understanding). One side end of the first link 4 and the second link 5 is fixedly coupled to the output shafts 2a and 3a of 2 and 3. One end of the third link 6 and the fourth link 7 is rotatably coupled to the free ends of the first link 4 and the second link 5 by the hinge shafts 4a and 5a. The other ends of the third link 6 and the fourth link 7 are rotatably coupled to the support member 8 supporting the gripping tool 9.

In this configuration, the output shaft 2a of the first motor 2 is rotated by a predetermined angle θ in the counterclockwise direction, and the output shaft 3a of the second motor 3 is rotated by the output shaft 2a of the first motor 2. When rotated clockwise by the rotation angle θ of), the gripper 9 is an imaginary line C connecting the gripper 9 and the motors 2 and 3 as shown in FIG. Is approached to the motors 2, 3 side. When the output shafts 2a and 3a are rotated in the opposite directions to the above, the gripper 9 is conveyed along the imaginary line C in a direction away from the motors 2 and 3. That is, by holding the output shaft 2a of the first motor 2 and the output shaft 3a of the second motor 3 at the same angle in opposite directions to each other, the gripper 9 causes the virtual line C to rotate. A linear motion is carried along.

Meanwhile, in the state shown by the solid line in FIG. 1 and the imaginary line in FIG. 2, the output shaft 2a of the first motor 2 and the output shaft 3a of the second motor 3 are equal to each other. Orientation, for example clockwise rotation, causes the gripper 9 to rotate clockwise about the motors 2 and 3 as shown in solid lines in FIG. At this time, the angle at which the gripper 9 rotates depends on the rotation angle θ1 of the first link 4 and the rotation angle θ2 of the second link 5. When the rotation angle θ1 of the first link 4 and the rotation angle θ2 of the second link 5 are different from each other, the distance between the gripper 9 and the motors 2 and 3 also changes. .

Therefore, if the rotation direction and the rotation angle of the 1st link 4 and the 2nd link 5 are adjusted suitably, the holding | gripping tool 9 will be located in the arbitrary position on the plane perpendicular | vertical with respect to the output shafts 2a, 3a of motors. You can do it.

By the way, since the conventional robot 1 which has such a structure employ | adopts four links 4, 5, 6, and 7 in order to position the holding | gripping tool 9 in arbitrary positions on the said plane, the holding | gripping tool 9 is carried out. The movement of the links (4, 5, 6, 7) is wide during the transfer of the interference is likely to occur with the surrounding structure. In order to avoid this, since the installation space of the robot must be secured widely, there is a problem that the robot of the above structure cannot be installed in a narrow space.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object of the present invention is to provide a robot that can be installed and operated in a narrow space by reducing the possibility of interference between components for transferring a gripper and surrounding structures.

In order to achieve the above object, the robot according to the present invention includes a base, an output shaft and a first motor and a second motor fixed on the base, and one end of the robot is rotatably coupled to the output shaft of the first motor. A first arm pivoted on a plane perpendicular to the output shaft of the first motor by the second motor, and one end of the first arm pivotably coupled to a free end of the first arm, the first motor being driven by the first motor A second arm pivoting with respect to the first arm on a plane perpendicular to the output axis of the first arm, the linear bearing being rotatably coupled to the first arm and whose rotation center axis coincides with the rotation center line of the output shaft of the first motor; One side end is slidably supported by the linear bearing in a plane perpendicular to the output shaft of the first motor, and the center end thereof is pivoted on the free end of the second arm. The guide bar being coupled coupled to the other end of the guide bar and is characterized in a point provided with a grasp for holding a predetermined object.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

3 and 4 show an example of a robot according to the present invention, wherein FIG. 3 is a schematic front view and FIG. 4 is a structural plan view.

Referring to the drawings, the first motor 10 and the second motor 20 are fixed on the base 90. The first arm 30 is rotatably coupled to the first motor 10 via the bearing 16 on the output shaft 11 of the first motor 10. The first pulley 12 is fixed to the first arm 10 by bolts 19, and the first pulley 12 has an output shaft 11 of the first motor 10 via a bearing 17. Maintaining a rotatable state around. The second pulley 22 is fixed to the output shaft 21 of the second motor 20, and the second pulley 22 and the first pulley 12 fixed to the first arm 30 are timingd. It is connected by the belt 15.

Meanwhile, a third pulley 43 is fixed to the output shaft 11 of the first motor 10, and a first hinge shaft 41 is interposed between the bearings 46 at the free end of the first arm 30. And rotatably coupled to the first arm 10. The fourth pulley 44 is fixed to the central portion of the first hinge shaft 41, and the fourth pulley 44 and the third pulley 43 are connected by the timing belt 45. In addition, one end of the second arm 40 is fixed to the first hinge shaft 41 by a bolt 49, and the second hinge shaft 42 is formed at the other end of the second arm 40. It is rotatably coupled to two arms 40.

On the other hand, a third hinge shaft 51 is rotatably installed with respect to the first arm 10 on the upper portion of the first arm 10, and the third hinge shaft 51 is the first motor 10. It is located coaxially with the output shaft 11 of (). A linear bearing 50 is fixed to the upper portion of the third hinge shaft 51, and one side end of the guide bar 60 is slidably inserted and supported by the linear bearing 50. The other end of the guide bar 60 is coupled to the holding hole 70 for holding a wafer (not shown), the central portion of the guide bar 60 is fixed to the first hinge shaft (41).

Here, the length L of the first arm 30 and the second arm 40, that is, the distance L1 and the first hinge of the output shaft 11 and the first hinge shaft 41 of the first motor 10. Preferably, the distance L2 between the shaft 41 and the second hinge shaft 42 is equal to each other. In addition, the rotation ratio between the first motor 10 and the second arm 40 and the rotation ratio between the second motor 20 and the first arm 30 are the same, that is, the second arm when the first motor 10 rotates one time. It is preferable that the angle at which the 40 is rotated and the angle at which the first arm 30 is rotated at the time of one rotation of the second motor 20 are the same.

In addition, it is preferable to provide a holding device for elevating means for elevating the holding device 70 in the longitudinal direction of the output shaft 11 of the first motor 10. In this embodiment, as the gripping tool lifting means, the spline shaft 92 is provided on the base 90 in the longitudinal direction of the output shaft 11 of the first motor 10, and the spline shaft 92 is a predetermined fixed body. By being coupled to the ball spline (95), the base 10 maintains a state capable of lifting in the longitudinal direction of the output shaft 11 of the first motor 10, the cam groove 91 is provided on one side of the base (90). In addition, a cam follower 83 fixed to the output shaft 80 of the third motor 80 via the disc member 82 is inserted into the cam groove 91 of the base 90. The cam follower 83 is fixed in parallel with the output shaft 81 of the third motor 80 at a predetermined distance.

In the robot 100 according to the present invention having such a structure, a process of moving the gripper 70 in each direction will be described with reference to FIGS. 3 to 7.

First, when the output shaft 11 of the first motor 10 does not rotate but only the output shaft 21 of the second motor 20 in the state shown in FIGS. The first pulley 12, the second pulley 22, and the timing belt 15 are transferred to the first arm 30. Accordingly, the first arm 30 is rotated as shown by the solid line in FIG. 5 with the output shaft 11 of the first motor 10 as the center of rotation. At this time, the second arm 40 maintains the output shaft 11 of the first motor 10 while maintaining a constant angle θ with the first arm 30 as the first arm 30 rotates. Rotate to the center of rotation. Accordingly, the guide bar 60 coupled to the second arm 40 is rotated as shown by the solid line in FIG. 5 while rotating the linear bearing 50 about the third hinge axis 51. . Therefore, the gripper 70 coupled to the end of the guide bar 60 is maintained in a state rotated by a predetermined angle (θ3) in the clockwise direction.

Contrary to the above, when the output shaft 11 of the first motor 10 rotates and the output shaft 21 of the second motor 20 does not rotate in the state shown in FIGS. 3 and 4. The rotational force of the output shaft 11 of the first motor 10 is transmitted to the first hinge shaft 41 through the third pulley 43, the fourth pulley 44, and the timing belt 45. Accordingly, in the state where the first arm 30 does not rotate, the first hinge shaft 41 rotates with respect to the first arm 30. Therefore, as shown by the solid line in FIG. 6, the second arm 40 fixed to the first hinge shaft 41 rotates the first hinge shaft 41 at a predetermined angle (θ1). do. At this time, the guide bar 60 fixed to the second hinge shaft 42 of the second arm 40 is moved by the second arm 20 rotated about the first hinge shaft 41. As shown by the solid line in the figure, the linear bearing 50 slides to the left in the drawing. At the same time, the guide bar 60 is rotated by a predetermined angle θ2 in the counterclockwise direction while the linear bearing 50 is rotated about the third hinge axis 51. Therefore, the gripper 70 coupled to the guide bar 60 is centered on the output shaft 11 of the first motor 10 from the state shown by the solid line in FIG. 4 and the virtual line in FIG. As shown by the solid line in FIG. 6, the predetermined angle θ2 is rotated in the counterclockwise direction and the distance from the output shaft 11 of the second motor 20 is also shortened.

Meanwhile, in order to transfer the gripper 70 along the longitudinal direction of the guide bar 60, the first arm 30 is driven by driving the second motor 20 in the state shown by the solid line in FIG. Rotate the predetermined angle θ1 in the counterclockwise direction as shown by the imaginary line, and rotate the second arm 20 by the predetermined angle θ2 in the clockwise direction by driving the first motor 10. The position of the second arm 40 shown in dashed lines in FIG. 7 is the position when the first arm 30 is rotated by the second motor 20 while the first motor 10 is not rotated. Seems to indicate.

Here, the rotation angles θ1 and θ2 of the first arm 30 and the second arm 20 depend on the length ratio of the first arm 30 and the second arm 40, and The rotation ratio between the first motor 10 and the second arm 40 and the rotation ratio between the second motor 20 and the first arm 30 may be varied. For example, the rotation ratio between the first motor 10 and the second arm 40 and the rotation ratio between the second motor 20 and the first arm 30 are the same, that is, when one rotation of the first motor 10 is performed. The angle at which the second arm 40 is rotated and the angle at which the first arm 30 is rotated at the time of one rotation of the second motor 20 are the same, and the lengths of the first arm 30 and the second arm 40 are the same. That is, the distance L1 between the output shaft 11 of the first motor 10 and the first hinge shaft 41 and the distance L2 between the first hinge shaft 41 and the second hinge shaft 42 are In the case where they are the same, the rotation angle θ1 of the first arm 10 and the rotation angle θ2 of the second arm 20 are required to transfer the gripper 70 along the longitudinal direction of the guide bar 60. Since has the same value, the operation can be simplified.

As can be seen from the above description, the robot 100 according to the present embodiment includes the first link 4 and the third link, which were required by the conventional robot 1 described with reference to FIGS. 1 and 2. Since it has a shape without (6), the space occupied by the component for driving the gripper 70 to be positioned at an arbitrary position on a plane perpendicular to the output shaft 11 of the first motor 10 is small. Therefore, the possibility of interference with the surrounding structure is reduced and can be installed in a narrow space.

On the other hand, when it is necessary to elevate the gripper 70 in the longitudinal direction of the output shaft 11 of the first motor 10, for example, by holding or loading wafers positioned at different heights, the third motor ( The output shaft 81 of 80 is rotated. When the output shaft 81 is rotated, the disc member 82 is rotated, the cam follower 83 is fixed to one side of the disc member 82 and inserted into the cam groove 91 of the base 90 is the third motor ( The output shaft 81 of 80 is rotated as the center of rotation. Accordingly, the base 90 which is splined to the predetermined fixture 95 is raised or lowered, so that the gripper 70 is raised and lowered.

As described above, the robot according to the present invention has a small space occupied by a component for driving a gripper for holding a predetermined object to a predetermined position on a plane perpendicular to the output axis of the first motor. The possibility of interference with the structure is reduced and can be installed in tight spaces.

Claims (5)

A first motor and a second motor having a base, an output shaft and fixed on the base, and one end of which is rotatably coupled to the output shaft of the first motor, and perpendicular to the output shaft of the first motor by the second motor. A first arm that rotates on an in-plane and one end portion that is rotatably coupled to the free end of the first arm and is rotated with respect to the first arm on a plane perpendicular to the output axis of the first motor by the first motor A second arm and a linear bearing rotatably coupled to the first arm and whose rotation center axis coincides with the rotation center line of the output shaft of the first motor, and one side end of the first motor by the linear bearing. A guide bar is slidably supported on a plane perpendicular to the output shaft, and a central part thereof is coupled to the free end of the second arm so as to be pivotally coupled to the other end of the guide bar. And a robot, characterized in that a provided with a grasp for holding a predetermined object. The robot according to claim 1, further comprising means for conveying the gripping tool in the longitudinal direction of the output shaft of the first motor. The angle of rotation of the second arm when the output shaft of the first motor is rotated by one rotation, and the angle of the rotation of the first arm when the output shaft of the second motor rotates by one rotation is the same. Robot. According to claim 1, wherein the first hinge axis is rotatably coupled to any one of the free end of the first arm and one side end of the second arm and the other is fixed to the first hinge axis so that the second arm is Rotating with respect to the first arm, the second hinge axis is rotatably coupled to any one of the end of the second arm and the central portion of the guide bar, and the other is fixed to the second hinge axis to guide the Robot, characterized in that rotatable about two arms. The robot of claim 4, wherein a distance between the output shaft of the first motor and the first hinge shaft is equal to a distance between the first output shaft and the second output shaft.