KR20180001602A - Robot having arm with unequal link lengths - Google Patents

Abstract

At least one driver; An apparatus is provided having a first upper arm, a first pawl arm and a first robot having a first end effector. The first upper arm is connected to at least one driver at a first rotational axis. The second robot arm has a second upper arm, a second pillar arm, and a second end effector. And the second upper arm is connected to at least one drive unit at a second rotational axis spaced from the first rotational axis. The first and second robotic arms are configured to position the end actuators in the first retracted positions such that the end actuators are positioned such that the substrates are at least partially on one another. The first and second robotic arms are configured to stretch the end actuators from the first retraction positions in a first direction along at least partially parallel first paths located one above the other.

Description

[0001] ROBOT HAVING ARM WITH UNEQUAL LINK LENGTHS [0002]

The disclosed embodiments relate to a robot having arms with unequal link lengths, and more particularly to a robot having one or more arms with unequal link lengths, .

Vacuum, atmospheric, and controlled environments for applications such as those associated with the fabrication of semiconductors, LEDs, solar cells, MEMS, or other devices may include carriers associated with the substrates and substrate at storage, processing, or other locations, Processing locations, or other forms of robotics and automation to transfer from other locations. Such transfer of substrates can move a single arm carrying one or more substrates, or a group of individual substrates, substrates, with a plurality of arms each carrying one or more substrates. Much automated transfer is performed while minimizing transfer time resulting in reduced cycle times and increased throughput and utilization of associated equipment. Thus, there is a need to provide a substrate transfer automation that requires a minimum footprint and workspace volume for a given range of transfer applications with a minimized transfer time.

It is an object of the present invention to provide an apparatus and a method such as a robot which can solve the above problems.

The following summary is exemplary. The summary is not intended to limit the scope of the claims.

According to one aspect of the exemplary embodiment, the transfer device comprises at least one driver; And a first robot arm including a first upper arm, a first pawl arm and a first end effector. The first upper arm is connected to at least one driver at a first rotational axis. The second robot arm includes a first robot arm; And a second upper arm, a second pillar arm, and a second end operative member. And the second upper arm is connected to at least one drive unit at a second rotational axis spaced from the first rotational axis. The first and second robotic arms are configured to position the end actuators in the first retracted positions such that the substrates positioned on the end actuators are at least partially loaded on top of one another. The first and second robotic arms are configured to stretch the end actuators from the first retraction positions in a first direction along at least partially parallel first paths directly on one another. The first and second robotic arms are configured to stretch the end actuators in at least one second direction along second spaced apart paths that are not located above each other. The first upper arm and the first pillar arm have different effective lengths. The second upper arm and the second pillar arm have different effective lengths.

According to another aspect of the exemplary embodiment, the method includes providing a first robot having a first upper arm, a first pawl arm and a first end effector, wherein the first upper arm and the first pawl arm are of different effective Having a length; Providing a second robot arm including a second upper arm, a second pawl arm and a second end effector, wherein the second upper arm and the second pawl arm have different effective lengths; Connecting the first upper arm to the at least one driver at a first rotational axis; And connecting the second upper arm to the at least one driving unit at a second rotational axis spaced from the first rotational axis, wherein the substrates positioned on the end actuators are at least partially loaded onto one another The first and second robot arms are configured to position the end actuators in the first retraction locations to position the end actuators in the first retracted positions, One of the first and second robotic arms is configured to extend the end actuators from the first retraction positions in a first direction along parallel first paths located directly on top of the other, And extend the end actuators in at least one second direction along second paths spaced from each other that are not located.

According to another aspect of the exemplary embodiment, the method further includes the steps of: first and second end actuating the first and second separate robotic arms to load the substrates located on the end actuators, at least partially, Wherein the first upper arm includes a first upper arm, a first pawl arm, and a first end effector, wherein the first upper arm comprises at least one drive portion at a first rotational axis, And the second upper arm includes a second upper arm, a second pillar arm, and a second end arm, wherein the second upper arm is connected to at least one drive unit at a second rotational axis spaced from the first rotational axis , step; Moving the first and second robotic arms such that at least partially one of the parallel first paths directly on top of the other moves the end actuators from the first retracted positions in the other first direction; And moving the first and second robotic arms to move the end actuators to stretch the end actuators in at least one second direction along second paths spaced from each other and not above each other do.

According to another aspect of the exemplary embodiment, the transfer device comprises: a first robot arm having a first upper arm, a first pawl arm and a first end effector; A second robot arm having a second upper arm, a second pawl arm and a second end effector; And a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at the first rotation axis, and the second upper arm is connected to the driving unit at the second rotation axis spaced from the first rotation axis And the drive portion includes only three motors for rotating the first and second upper arms, the first and second robotic arms being configured to allow the substrates positioned on the end actuators to be at least partially loaded onto one another, Wherein the first and second robotic arms are configured to position the end effector from the first retraction positions such that the first and second robotic arms are configured to move from the first retraction positions to the first retract position in a first direction along first parallel paths, Wherein the first and second robotic arms are configured to extend the end effectors from the positions along the second paths spaced from each other, It is also configured to stretching end effector in a first direction.

According to another aspect of the exemplary embodiment, the method further includes positioning the substrates positioned on the end actuators at least partially one on top of the other, in a first retracted position so that the first and second Positioning the end effector and the second end effector, wherein the first robot arm includes a first upper arm, a first pawl arm, and a first end effector, And the second upper arm includes a second upper arm, a second pillar arm, and a second end actuator, and the second upper arm is connected to the driving unit at a second rotation axis spaced from the first rotation axis; Moving the first and second robotic arms to move the end actuators from the first retraction positions in a first direction along one of the parallel first paths that are at least partially located directly on top of the other; Moving the first and second robot arms to move the end actuators to stretch the end actuators in at least one second direction along one of the second paths spaced from each other that are not located on the other; Rotating the first and second robotic arms together about a third rotational axis spaced from the first and second rotational axes, the method comprising moving from a first retracted position in a first direction, The step of moving and rotating the end actuators in two directions to stretch is accomplished using only the three motors of the drive.

According to another aspect of the exemplary embodiment, a method includes providing a first robotic arm having a first upper arm, a first pawl arm, and a first end effector; Providing a second robot arm having a second upper arm, a second pawl arm and a second end effector; Connecting the first upper arm to the driving unit at a first rotational axis; And connecting a second upper arm to a drive unit at a second rotation axis spaced from the first rotation axis, wherein the first and second upper arms are mounted on the end actuators such that the substrates positioned on the end actuators are at least partially Wherein the first and second robot arms are configured to position the end actuators in the retracted positions, and wherein the first and second robot arms are configured such that at least partially in one direction along the first parallel paths, To extend the end effectors in at least one second direction along second spaced apart second paths that are not located above each other and are configured to cause the first and second robot arms to rotate The first and second robot arms are configured to be rotated, and the drive has only three motors, which extend the end actuators Claim is for rotating the first and the second rotation of the robot arm and the second and the first and the first and second robot arm in the third rotational axis spaced from the second axis of rotation.

According to another aspect of the exemplary embodiment, the apparatus includes a first robot arm having a first upper arm, a first pawl arm and a first end effector; A second robot arm having a second upper arm, a second pawl arm and a second end effector; And a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at the first rotation axis, and the second upper arm is connected to the driving unit at the second rotation axis spaced from the first rotation axis , And the driving unit includes five motors for rotating the first and second upper arms, the first one of the motors being connected to the first and second robotic arms such that the first and second arms are connected to the first and second arms, The second and third motors of the motors are connected to the first robot arm to rotate the first upper arm and the first paw arm, respectively, and the fourth and fifth motors of the motors, respectively, rotate about the third rotation axis, And fifth motors are connected to the second robot arm to rotate the second upper arm and the second pillar arm independently from the first robot arm, respectively, and the first and second robot arms are connected to the substrate Enemy Wherein the first and second robotic arms are configured to position the end actuators in the first retracted positions such that the first and second robotic arms are partially positioned over the other, and wherein the first and second robotic arms are parallel to each other, Wherein the first and second robotic arms are configured to extend the end effectors from the first retraction positions in a first direction along one of the paths, And extend the end actuators in a second direction.

According to another aspect of the exemplary embodiment, the method further comprises the step of moving the first and second individual robotic arms from the first retraction positions to at least partially load the substrates located on the end actuators, Positioning the first and second end actuators, wherein the first robot arm includes a first upper arm, a first pawl arm, and a first end effector, wherein the first upper arm is connected to the drive at a first rotational axis The second robot arm including a second upper arm, a second pillar arm, and a second end actuator, the second upper arm being connected to the drive at a second rotational axis spaced from the first rotational axis; Moving the first and second robotic arms to move the end effector from the first retracted positions in a first direction along at least partially parallel first paths located above the other; Moving the first and second robotic arms to move the end actuators to stretch the end actuators in at least one second direction along second paths spaced from each other that are not located above each other; Rotating the first and second robotic arms together about a third rotational axis spaced from the first and second rotational axes, moving from the first retracted positions in a first direction, moving at least one second Wherein the first motor of the motors is connected to the first and second robot arms to rotate the third rotary shaft around the third rotary shaft, And the second and third motors of the motors are connected to the first robot arm to rotate the first upper arm and the first pillar arm respectively and to rotate the first and second arms of the robot arms, 5 is connected to the second robot arm to independently rotate the second upper arm and the second pillar arm from the first robot arm, respectively.

According to another aspect of the exemplary embodiment, a method includes providing a first robot arm having a first upper arm, a first pawl arm, and a first end effector; Providing a second robot arm having a second upper arm, a second pawl arm, and a second end effector; Connecting the first upper arm to the driving unit at a first rotational axis; And connecting a second upper arm to a drive unit at a second rotational axis spaced from the first rotational axis, wherein the first and second upper arms are mounted on the end actuators such that at least partially one on top of the other, The first and second robotic arms are configured to position the end actuators in the retracted positions and the first retracted positions in the first direction along the first parallel paths, at least partially one on the other, To extend the end effectors in at least one second direction along the second spaced apart second paths that are not located above each other and configured to cause the first and second robot arms to rotate Wherein the first and second robot arms are configured to rotate, and the drive unit has five motors, Wherein the first one of the motors is for rotating the first and second robotic arms and for rotating the first and second robotic arms about a third rotational axis spaced from the first and second rotational axes, The second and third motors of the motors are connected to the first robot arm to rotate the first upper arm and the first pillar arm, respectively, so as to rotate the first and second arms. And the fourth and fifth of the robot arms are connected to the second robot arm to rotate the second upper arm and the second pillar arm independently of the first robot arm, respectively.

According to another aspect of the exemplary embodiment, an apparatus includes a first robot arm including a first upper arm, a first pawl arm, and a first end effector; A second robot arm including a second upper arm, a second pawl arm and a second end effector; And a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at the first rotation axis, and the second upper arm is connected to the driving unit at the second rotation axis spaced from the first rotation axis And the driving unit has four motors for rotating the first and second upper arms, the first one of the motors being connected to the first upper arm, and the second one of the motors connected to the second upper arm A third one of the motors is connected to a first pillar arm, a fourth one of the motors is connected to a second pillar arm, and the third and fourth motors are connected to a common axis , The first motor is aligned with the first axis, the second motor is aligned with the second axis, and the substrates placed on the end actuators are aligned so that at least partially one on top of the other, 1 and the third robot arms The end actuators being configured to position the sub-actuators in the first retracted positions, wherein the end actuators are configured to extend from the first retracted positions in a first direction along at least partially parallel first paths directly on the other, Wherein the first and second robotic arms are configured to extend the end actuators in at least one second direction along second spaced apart second paths that are not located above each other, do.

The aspects and other aspects will be described in the following description with reference to the accompanying drawings.
1A is a plan view of a transfer device.
1B is a side view of the transfer device.
2A is a schematic plan view of a transfer device.
Figure 2b is a schematic, partial side cross-sectional view of the transfer device.
3A is a plan view of the transfer device.
3B is a plan view of the transfer device.
3C is a plan view of the transfer device.
Figure 4 is a graphical plot.
5A is a plan view of the transfer device.
5B is a side view of the transfer device.
Figure 6a is a schematic and partial top view of the transfer device.
Figure 6b is a schematic, partial side cross-sectional view of the transfer device.
7A is a plan view of the transfer device.
7B is a plan view of the transfer device.
7C is a plan view of the transfer device.
Figure 8 is a graphical plot.
Figure 9 is a schematic, partial side cross-sectional view of the transfer device.
10A is a plan view of the transfer device.
10B is a side view of the transfer device.
11A is a plan view of the transfer device.
11B is a side view of the transfer device.
Figure 12 is a schematic, partial side cross-sectional view of the transfer device.
Figure 13 is a schematic, partial side cross-sectional view of the transfer device.
14A is a plan view of the transfer device.
14B is a plan view of the transfer device.
14C is a plan view of the transfer device.
15A is a plan view of the transfer device.
15B is a side view of the transfer device.
16A is a plan view of the transfer device.
16B is a side view of the transfer device.
17A is a plan view of the transfer device.
17B is a side view of the conveying device.
Figure 18 is a schematic, partial side cross-sectional view of the transfer device.
Figure 19 is a schematic, partial side cross-sectional view of the transfer device.
20A is a plan view of the transfer device.
20B is a plan view of the transfer device.
20C is a plan view of the transfer device.
21A is a plan view of the transfer device.
21B is a side view of the conveying device.
22A is a plan view of the transfer device.
22B is a side view of the transfer device.
Figure 23 is a schematic, partial side cross-sectional view of the transfer device.
24A is a plan view of the transfer device.
24B is a plan view of the conveying device.
24C is a plan view of the transfer device.
25A is a plan view of the transfer device.
25B is a side view of the transfer device.
26A is a plan view of the transfer device.
26B is a plan view of the transfer device.
26C is a plan view of the transfer device.
27A is a plan view of the transfer device.
27B is a side view of the conveying device.
28A is a plan view of the transfer device.
28B is a side view of the transfer device.
29A is a plan view of the transfer device.
29B is a plan view of the transfer device.
29C is a plan view of the transfer device.
30A is a plan view of the transfer device.
30B is a side view of the transfer device.
31A is a plan view of the transfer device.
31B is a side view of the conveying device.
32A is a plan view of the transfer device.
32B is a plan view of the transfer device.
32C is a plan view of the conveying device.
32D is a plan view of the transfer device.
33A is a plan view of the conveying device.
33B is a side view of the transfer device.
34A is a plan view of the transfer device.
34B is a plan view of the transfer device.
34C is a plan view of the transfer device.
35A is a plan view of the transfer device.
35B is a side view of the conveying device.
36 is a plan view of the transfer device.
37A is a plan view of the transfer device.
37B is a side view of the transfer device.
38A is a plan view of the transfer device.
Fig. 38B is a side view of the transfer device. Fig.
39 is a plan view of the transfer device.
40A is a plan view of the transfer device.
40B is a side view of the conveying device.
41 is a plan view of the transfer device.
42 is a plan view of the transfer device.
43A is a plan view of the transfer device.
43B is a side view of the conveying device.
44 is a plan view of the transfer device.
45 is a plan view of the transfer device.
46A is a plan view of the transfer device.
46B is a side view of the conveying device.
47A is a plan view of the transfer device.
47B is a side view of the transfer device.
48 is a plan view of the transfer device.
49 is a plan view of the transfer device.
50A is a plan view of the transfer device.
50B is a side view of the transfer device.
51 is a plan view of the transfer device.
52A is a plan view of the transfer device.
52B is a side view of the conveying device.
53 is a plan view of the transfer device.
54A is a plan view of the transfer device.
54B is a side view of the conveying device.
55A is a plan view of the transfer device.
55B is a plan view of the transfer device.
55C is a plan view of the transfer device.
56A is a plan view of the transfer device.
56B is a side view of the transfer device.
57A is a plan view of the transfer device.
57B is a plan view of the conveying device.
57C is a plan view of the conveying device.
58A is a plan view of the transfer device.
58B is a side view of the conveying device.
59A is a plan view of the transfer device.
59B is a plan view of the transfer device.
59C is a plan view of the conveying device.
60A is a plan view of the transfer device.
60B is a side view of the transfer device.
61A is a plan view of the transfer device.
61B is a plan view of the transfer device.
61C is a plan view of the transfer device.
62 is a plan view of the transfer device.
63 is a schematic view showing an exemplary pulley;
64 is a plan view of the transfer device.
65 is a plan view of the transfer device.
66A is a plan view of the transfer device.
66B is a perspective view of the conveying device. ;
66C shows an end of the conveying device.
66D is a side view of the transfer device. ;
67A is a plan view of the transfer device.
67B is a perspective view of the transfer device.
67C shows the end of the transfer device.
67D is a side view of the transfer device.
68A is a plan view of the transfer device.
68B is a plan view of the conveying device.
Figure 69 is a plan view of the transfer device AF.
Fig. 70 AF is a plan view of the transfer device.
71 AE is a plan view of the transfer device.
72 AB is a plan view and a side view of the conveying device.
72 CD is a plan view and a side view of the conveying device.
73B is a plan view and a side view of the conveying device.
73 CD is a plan view and a side view of the conveying device.
74A is a plan view of the transfer device.
74B is a plan view of the transfer device.
75 AF is a plan view of the transfer device.
76A is a plan view of the transfer device.
76B is a plan view of the transfer device.
76C is a plan view of the transfer device.
76D is a plan view of the transfer device.
77B is a plan view and a side view of the conveying device.
77 CD is a plan view and a side view of the conveying device.
78 AB is a plan view and a side view of the conveying device.
79A is a plan view of the transfer device.
79B is a plan view of the transfer device.
80A is a plan view of the transfer device.
80B is a plan view of the transfer device.

With the exception of the embodiments described below, the disclosed embodiments enable other embodiments and may be performed or implemented in various ways. It is therefore to be understood that the disclosed embodiments are not limited to the construction and construction of the components set forth in the following description or illustrated in the drawings in the present application. If only one embodiment is described herein, the claims are not limited to that embodiment. Furthermore, the claims should not be construed as limiting, unless there is clear and definitive evidence specifying specific exclusions, limitations or abstractions.

1A and 1B, a top view and a side view of a robot 10 having a driving unit 12 and an arm 14, respectively, are shown. The arm 14 is shown in its retracted position. The arm 14 has an upper arm or first link 16 which is rotatable about the central rotational axis 18 of the driving portion 12. [ The arm 14 further has a forearm or second link 20 rotatable about an elbow rotational axis 22. The arm 14 further has an end effector or a third link 24 rotatable about a wrist rotational axis 26. The end effector 24 supports the substrate 28. The arm 14 is configured to act in conjunction with the drive 12 such that the substrate 28 is parallel to the linear path 32 coinciding with the central axis of rotation 18 of the driver 12, Along a path such as path 34, 36, or along a radial path 30 that may coincide with the path as shown in FIG. 1A. In the illustrated embodiment, the joint-to-joint length of the forearm or second link 20 is greater than the joint-to-joint length of the upper arm or first link 16. In the illustrated embodiment, the lateral offset 38 of the end effector or third link 24 corresponds to the difference in joint-to-joint length of the pawl arm 20 and the upper arm 14. The lateral offset 38 is maintained substantially constant during extension and retraction of the arm 14 such that the substrate 28 or end effector 24 does not rotate relative to the linear path The substrate 28 moves along a linear path. This is achieved with the inner structure for the arm 14 to be described below, without the use of an additional control axis to control the rotation of the end effector 24 in the list 26 relative to the forearm 20. [ In one aspect of the disclosed embodiment, with respect to FIG. 1A, the center of gravity of the third link or end effector 24 may be on the list centerline or on the axis of rotation 26. Alternatively, the center of gravity of the third link or end effector 24 may be along a path 40 that is offset 38 from the central axis of rotation 18. In this manner, interference to bands that limit the end effector 24 with respect to the links 16, 18 may be affected by the moment applied as a result of the mass being offset differently during arm extension and contraction Can be minimized. Here, the center of gravity may be determined without or with the substrate, or the center of gravity may be between. Alternatively, the center of gravity of the third link or end effector 24 may be in any suitable position. The substrate transfer apparatus 10 transfers the substrate 28 with the movable arm assembly 14 coupled to the drive section 12 on the central rotational axis 18. In the illustrated embodiment, The substrate support 24 is coupled to the arm assembly 14 on the list rotation axis 26 wherein the arm assembly 14 is rotated about a central axis of rotation 18 ). The list rotary axis 26 moves along a wrist path 40 that is parallel to and offset 38 or otherwise offset from the radial path to the central rotational axis 18 during stretching and retraction, (30, 34, 36). The substrate support 24 similarly moves parallel to the radial path 30 without rotation during stretching and retraction. As described in detail in another aspect of the disclosed embodiment, the principle and structure that restricts the end effector to move in a substantially pure radial motion can be applied when the length of the forearm is shorter than the length of the upper arm . In addition, the features may be applied when one or more substrates are being handled by the end effector. The features may also be applied when a second arm is used in connection with a driver handling one or more additional substrates. Accordingly, all such modifications can be encompassed.

2a and 2b, there is shown a partial, schematic top and side view, respectively, of a system 10 that includes an inner configuration used to drive the individual links of the arm 14 shown in Figs. 1a and 1b, . The drive unit 12 has first and second motors 52 and 54 that have corresponding first and second encoders 56 and 58 coupled to the housing 60, And drives the two shafts 62 and 64, respectively. Wherein the shaft 62 may be coupled to the pulley 66 and the shaft 64 may be coupled to the upper arm 64 and the shafts 62 and 64 may be concentric or otherwise disposed . In an alternative aspect, any suitable driver may be provided. The housing 60 can be in communication with the chamber 68 wherein the bellows 70, the chamber 68 and the inner portion of the housing 60 isolate the vacuum environment 72 from the ambient environment 74 . The housing 60 may slide in the z direction as a carrier on the slide 76 and may be provided with a lead screw or other suitable vertical or linear z drive 78 to move the housing 60 and its associated arm 14 in the z direction (80). In the illustrated embodiment, the upper arm 16 is driven by a motor 54 about a central rotational axis 18. Similarly, the forearm is driven by the motor 52 via a band drive having pulleys 66, 82 and bands 84, 86, such as conventional circular pulleys and bands. In an alternative aspect, any suitable structure may be provided to drive the forearm 20 relative to the upper arm 16. The ratio between the pulleys 66, 82 may be 1: 1, 2: 1 or any suitable ratio. The third link 24 with the end effector is configured to include a pulley 88 based on the link 16, a pulley 90 based on the end effector or third link 24, Lt; RTI ID = 0.0 > 88, 90). ≪ / RTI > As will be described, the ratio between the pulleys 88, 90 may not be constant for the third link 24 to follow the radial path without rotation while the arm 14 is stretching and contracting. This can be achieved if the pulleys 88, 90 are one or more non-circular pulleys such as two non-circular pulleys, or if one of the pulleys 88, 90 is circular and the other is not circular . Alternatively, any suitable coupling or linkage device may be provided to limit the path of the third link or end effector 24 as described above. In the illustrated embodiment, at least one non-circular unwound upper arm 16 and a second lower arm 16 are oriented such that the end effector 24 is oriented in the radial direction 30 regardless of the position of the two first links 16, Compensates for the effect of the unequal length of the forearm 20. The embodiment will be described in connection with the fact that the pulley 90 is not circular and the pulley 88 is circular. Alternatively, the pulley 88 may not be circular or the pulley 90 may be circular. Alternatively, the pulleys 88,92 may not be circular or any suitable coupling is provided to limit the links of the arm 14 as described. As an example, a non-circular pulley or sprocket is described in US Patent 4,865,577 (Sep. 9, 1989) "Non-circular drive", which is incorporated herein by reference. Any suitable coupling as described may alternatively be provided to limit the links of the arm 14 as described above, for example, any suitable variable ratio driver or coupling, Gears or sprockets, cams or others are used alone or in combination with appropriate linkages or other engagement parts. In the illustrated embodiment, an elbow pulley 88 is coupled to the upper arm 16, which is shown as being round or circular, with a wrist pulley 88 coupled to the list or third link 24, 90 are shown as being non-circular. The wrist pulley shape may be symmetrical about a line 96 that is not circular but perpendicular to the radial locus 30, for example, as shown in FIG. 3B, May be parallel to or coincident with the line between the two pulleys 88,90 when the forearm 20 and the upper arm 16 are closest to the axis 18 and are straight across each other. The shape of the pulley 90 is such that the bands 92 and 94 are tightly supported when the arm 14 is stretched and retracted to establish contact points 98 and 100 on the opposite sides of the pulley 90, The radial distances 102 and 104 are changed. For example, in the orientation shown in FIG. 3B, each of the contact points 98, 100 of the two bands on the pulley is at an equivalent radial distance 102, 104 from the list rotary axis 26. This will be further explained with reference to FIG. 4 which shows the individual proportions. In order to rotate the arm 14, the drive shafts 62 and 64 of the robot need to move in the same direction in the rotational direction of the arm. In order for the end effector 24 to contract and extend radially along the straight path, the two drive shafts 62,64 need to move in a harmonious manner, for example, It is necessary to move according to inverse kinematic equations. Here, the substrate transfer apparatus 10 is adapted to transfer the substrate 28. The forearm 20 is rotatably coupled to the upper arm 16 and is rotatable about an elbow shaft 22 that is offset from the central axis 18 by an upper arm link length. The end effector 24 is rotatably coupled to the pawl arm 20 and is rotatable about a list axis 26 that is offset from the elbow shaft 22 by a forearm link length. The wrist pulley 90 is secured to the end effector 24 and is coupled to the elbow pulley 88 by bands 92, Here, the forearm link length is different from the upper arm link length, and the end effector is limited with respect to the upper arm by the elbow pulley, the list pulley, and the band so that the substrate is moved in a linear radial path (30). Here, the substrate support 24 is coupled to the upper arm 16 with the substrate support engagement portion 92 and is configured to move relative to the relative movement between the upper arm 16 and the pawl arm 20 about the elbow rotation axis 22 And is driven around the list rotary shaft 26. Figures 3a, 3b and 3c illustrate the extension movement of the robot of Figures 1 and 2. Figure 3a shows a top view of the robot 10 in which the arm 14 is in the retracted position. 3B shows an arm 14 partially stretched with a paw arm 20 aligned on top of the upper arm 16 so that the lateral offset 38 of the end effector is parallel to the paw arm 20 and / Corresponds to the difference in joint-to-joint length of upper arm 16. 3C shows that the arm 14 is in the extended position, although not fully extended.

Exemplary direct kinematics can be provided. In an alternative aspect, any suitable direct kinematics can be provided to correspond to the structure of an alternative. The following exemplary equations can be used to determine the position of the end effector as a function of the position of the motors.

x ₂ = l ₁ cosθ ₁ + l ₂ cos? ₂ (1.1)

y ₂ = l ₁ sin θ ₁ + l ₂ sin ? ₂ (1.2)

R ₂ = sqrt (x ₂ ² + y ₂ ² ) (1.3)

T ₂ = atan ₂ (y ₂ , x ₂ ) (1.4)

α ₃ = asin (d ₃ / R ₂ ) where d ₃ = l ₂ -l ₁ (1.5)

? ₁₂ =? _{1 -} ? ₂ (1.6)

If _{α 12 <π: R = sqrt} (R 2 2 -d 3 2) + l 3, T = T 2 + α 3, else ^{_{R = -sqrt (R 2 2 -d}} 3 2) + l 3, T = T _{2 -} ? ₃ +? (1.7)

Exemplary inverse kinematics can be provided. In alternative aspects, any suitable inverse kinematics can be provided to correspond to an alternative structure. The following exemplary equations can be used to determine the position of the motors to achieve a particular position of the end effector.

x ₃ = R cos T (1.8)

y ₃ = R sin T (1.9)

x ₂ = x ₃ -l ₃ cos T + d ₃ sin T (1.10)

y ₂ = y ₃ -l ₃ sin Td ₃ cos T (1.11)

R ₂ = sqrt (x ₂ ² + y ₂ ² ) (1.12)

T ₂ = atan ₂ (y ₂ , x ₂ ) (1.13)

? ₁ = acos ((R ₂ ² + l ₁ ² -l ₂ ² ) / (2 R ₂ l ₁ )) (1.14)

? ₂ = acos ((R ₂ ² -l ₁ ² + l ₂ ² ) / (2 R ₂ l ₂ )) (1.15)

If _{R> l 3: θ 1 =} T 2 + α 1, θ 2 = T 2 -α 2, _{Other: θ 1 = T 2 -α 1} , θ 2 = T 2 + α 2 (1.16)

The following names may be used in the kinematic equations.

d ₃ = lateral offset of end effector (m)

l ₁ = joint-to-joint length of the first link (m)

l ₂ = joint-to-joint length of the second link (m)

l ₃ = length (m) of the third link with the end effector, measured from the list joint to the reference point on the end effector,

R = radial position of end effector (m)

R ₂ = radial coordinate of list joint (m)

T = angular position of the end effector (rad)

T ₂ = angular coordinate of list joint (rad)

x ₂ = x coordinate of list joint (m)

x ₃ = x coordinate of end effector (m)

y ₂ = y coordinate of list joint (m)

y ₃ = y coordinate of the end effector (m)

θ ₁ = angular position of the drive shaft coupled to the first link (rad)

θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

The exemplary kinematic equations can be used to design a band drive that limits the orientation of a suitable drive, e. G., The third link 24, so that the two first links 16 of the arm 14 The end effector 24 is oriented in the radial direction 30 regardless of the position of the end effector 24,

Referring to Figure 4, as a function of the normalized extension from the center of the robot to the root of the end effector, i.e., (Rl ₃ ) / l ₁ , a band limiting the orientation of the third link there is a plot (plot, 1200 for the transmission ratio of the drive r ₃₁ (122) is illustrated. transmission rate (r _31), the angular velocity of the pulley attached to the first link defined for the second link both (ω ₁₂ (R ₃₂ ) of the pulley attached to the third link (r ₃₁ ) for different l ₂ / l ₁ (the ratios r ₃₁ from 0.5 to 1.0 are defined as 0.1 The increment of 0.2, the increment from 1.0 to 2.0). The profile of the non-circular pulley (s) can be calculated to achieve a transmission ratio r ₃₁ according to FIG. 4, And so on.

In the disclosed embodiment, a longer reach can be achieved compared to an equivalent link arm having the same limiting volume by using one or more of the other suitable devices or non-circular pulley (s) to limit end effector movement. In alternate aspects, the first link may be directly driven by the motor, or it may be driven through any type of coupling or transmission device. Here, any suitable transmission ratio can be used. Alternatively, the band driver for actuating the second link may be replaced by any other configuration with equivalent functionality, such as a belt drive, a cable drive, a linkage-based mechanism, or any combination thereof Can also be replaced. Likewise, the band driver for limiting the third link may be replaced by any other suitable configuration, for example a belt drive, a cable drive, non-circular gears, a linkage-based mechanism or any combination thereof Is replaced. Here, the end effector may be oriented radially, but not necessarily. For example, the end effector may be positioned relative to the third link with any suitable offset and may be oriented in any appropriate direction. Further, in an alternative aspect, the third link may hold one or more end effectors or substrates. Any suitable number of end actuators and / or material holders may be carried by the third link. Moreover, in an alternative aspect, the joints of fore arm-to-joint lengths of the upper arm joint-to-represented by l ₂ / l _{1 <1,} and be smaller than the joint length, for example, in Figure 4 as As shown and described with reference to FIGS. 25 to 34 and 43 to 53. FIG.

Referring now to FIGS. 5A and 5B, a top view and a side view respectively of a robot 150 including some features of the robot 10 are shown. The robot 150 is shown having a drive 12 with an arm 152 shown in the retracted position. The arm 152 has features similar to those of the arm 14, except as described herein. As an example, the joint-to-joint length of the forearm or second link 158 is greater than the joint-to-joint length of the upper arm or first link 154. Similarly, the lateral offset 168 of the end effector or third link 162 corresponds to the difference in joint-to-joint length of the forearm 158 and the upper arm 154. Referring to Figs. 6A and 6B, a driver 150 having inner configurations used to drive individual links of the arm is shown. In the illustrated embodiment, the upper arm 154 is driven by a single motor through the shaft 64 described in connection with the arm 14 of Figs. Likewise, the end effector or third link 162 is limited with respect to the upper arm 154 by the non-circular pulley configuration described with respect to the arm 14 of FIGS. An exemplary difference between the arm 152 and the arm 14 appears to be that the forearm 158 is coupled to the shaft 62 and to another motor of the drive 12 through a band configuration with at least one non- . Here, the engaging portion or the band forming portion has the characteristics described or explained herein with respect to the pulley driving portions 88 and 90 in Figs. 1 and 2. The engaging or banding portion has a non-circular pulley 202 coupled to the shaft 62 of the drive 12 and is rotatable about an axis 18 having the shaft 62. The band component of the arm 152 further includes a circular pulley 204 which is coupled to the upper arm link 158 and is rotatable about the elbow shaft 156. The circular pulley 204 is coupled to the non-circular pulley 202 through the bands 206,208 wherein the bands 206,208 can be held tight by the profile of the non-circular pulley 202. [ In alternative aspects, any combination of pulleys or other suitable transmissions may be provided. The rotation of the upper arm 154 relative to the pulley 202 (e.g., the retention pulley 202 is stationary while the upper arm 154 rotates) expands the wrist joint 160 along the straight line, And the bands 206,208 cooperate together to shrink the radial path 180 and the line is offset from the path 180 and parallel to the desired radial path 180 of the end effector. Here, the third link 162 with the end effector is limited by the band drive described with respect to the arm 14, for example with at least one non-circular pulley, The end effector is oriented in the radial direction 180 irrespective of the position of the end effector. Here, any suitable coupling may be provided to limit the links of the arm 14, as described, and may include, for example, one or more suitable variable proportions of drive or coupling portions, linkage gears or sprockets, Or others are used alone or in combination with an appropriate linkage or other engagement. In the illustrated embodiment, the elbow pulley 204 is coupled to a forearm 158 and appears circular or circular, wherein the shoulder pulley 204 coupled to the shaft 62 appears to be non-circular. The shaft pulley shape may be symmetrical with respect to a line 218 that is not circular and perpendicular to the radial locus 180 and may be symmetrical about the radial locus 180 as shown in Figure 7B, The trajectory may be parallel to or coincident with the line between the two pulleys 202, 204 when the forearms 158 and the upper arms 154 are nearest and lined on top of each other. The shape of the pulley 202 is such that the bands 206 and 208 are tightly held when the arm 152 is stretched and contracted to establish contact points 210 and 212 on the opposite sides of the pulley 202, 215 &lt; / RTI &gt; from &lt; / RTI &gt; For example, in the orientation shown in FIG. 7B, each of the contact points 210, 212 of the two bands on the pulley is at the same radial distance 214, 216 from the shoulder rotational axis 18. This will be described with reference to FIG. In order for the arm 152 to rotate, both drive shafts 62 and 64 of the robot need to move in the same amount in the direction of rotation of the arm. In order to allow the end effector 162 to extend and contract in the radial direction along the straight path, the two drive shafts 62,64 need to move in a harmonious manner, for example, It is necessary to move according to the kinematic reciprocal equations, for example, the drive shaft coupled to the upper arm needs to move according to the kinematic reciprocal equations presented below while the other motor remains stationary. Figs. 7A, 7B and 7C illustrate the extension movement of the robot 150 of Figs. 5 and 6. Fig. 7A shows a top view of the robot in which the arm 152 is in the retracted position. 7B shows that the arms are partially extended with the pawl arms aligned on top of the upper arms and the end actuators 158 corresponding to the difference in joint- Gt; 168 &lt; / RTI &gt; Figure 7c shows an arm that is not fully extended but is in the extended position.

Exemplary direct kinematics can be provided. In an alternative aspect, any suitable direct kinematics may be provided to correspond to the structure of the alternative. The following exemplary equations can be used to determine the position of the end effector as a function of the position of the motors.

d ₁ = l ₁ sin (? ₁ -? ₂ ) (2.1)

If (θ ₁ - θ ₂ ) <π / 2: θ _2l = θ ₂ - l _{2 asin ((d 1 + d 3} ) / l 2), else θ 2l = θ 2 + l 2 as ((d ₁ + d ₃ ) / l ₂ ) + π (2.2)

x ₂ = l ₁ cos θ ₁ + l ₂ cos [theta] _2l (2.3)

y ₂ = l ₁ sin θ ₁ + l ₂ sin ? _2l (2.4)

R ₂ = sqrt (x ₂ ² + y ₂ ² ) (2.5)

T ₂ = atan ₂ (y ₂ , x ₂ ) (2.6)

If _{(θ 1 - θ 2) <} π / 2: R = sqrt (R 2 2 -d 3 2) + l 3, T = θ 2, in addition to the ^{_{R = -sqrt (R 2 2 -d}} 3 2) + l ₃ , T =? ₂ (2.7)

Exemplary inverse kinematics can be provided. In alternate aspects, any suitable inverse kinematics can be provided to correspond to an alternative structure. The following exemplary equations can be used to determine the position of the motors to achieve a particular position of the end effector.

x ₃ = R cos T (2.8)

y ₃ = R sin T (2.9)

x ₂ = x ₃ -l ₃ cos T + d ₃ sin T (2.10)

y ₂ = y ₃ -l ₃ sin Td ₃ cos T (2.11)

R ₂ = sqrt (x ₂ ² + y ₂ ² ) (2.12)

T ₂ = atan ₂ (y ₂ , x ₂ ) (2.13)

? ₁ = acos ((R ₂ ² + l ₁ ² -l ₂ ² ) / (2 R ₂ l ₁ )) (2.14)

( ₂ ) where θ ₁ = T ₂ -α ₁ and θ ₂ = T (2.15), where R> l ₃ : θ ₁ = T ₂ + α ₁ and θ ₂ =

The following names are used in the kinematic equations:

d ₃ = lateral offset of end effector (m)

l ₁ = joint-to-joint length of the first link (m)

l ₂ = joint-to-joint length of the second link (m)

l ₃ = length (m) of the third link with the end effector, measured from the wrist joint to the reference point on the end effector,

R = radial position of end effector (m)

R ₂ = radial coordinate of list joint (m)

T = angular position of the end effector (rad)

T ₂ = angular coordinate of list joint (rad)

x ₂ = x-coordinate of list joint (m)

x ₃ = x-coordinate of the end effector (m)

y ₂ = y coordinate of list joint (m)

y ₃ = y-coordinate of the end effector (m)

θ ₁ = angular position of the drive shaft coupled to the first link (rad)

θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

The kinematic equation can be used to design the band driver to control the second link 158 such that rotation of the upper arm 154 causes the list joint 160 to move to the desired radial path of the end effector 162 Lt; RTI ID = 0.0 &gt; 180 &lt; / RTI &gt;

8, the root (root) a function of the normalized height of the arm measured from the end effector from the center of the robot, that is, (Rl ₃₎ / l the transmission ratio of the band driving unit driving the second link as ₁ (r &lt; / RTI &gt; ₂₀ 272). The transmission ratio r ₂₀ is defined as the ratio of the angular speed (? ₂₁ ) of the pulley attached to the second link to the angular speed? ₀₁ of the pulley attached to the second motor, all defined for the first link do. The figure shows the transmission ratio (r ₂₀ ) for different l ₂ / l ₁ .

The profile of the non-circular pulley (s) for the band drive that drives the second link is calculated to achieve a transmission ratio (r ₂₀ 272) according to FIG. An exemplary pulley profile is shown in Figure 6a and will be described with reference to Figures 55a and 55b.

The transmission ratio r ₃₁ of the band driver that limits the orientation of the third link 168 may be as shown in FIG. 4 for the embodiment of FIGS. 1 and 2. The transmission ratio r ₃₁ is defined as the ratio of the angular speed (ω ₃₂ ) of the pulley attached to the third link to the angular speed (ω ₁₂ ) of the pulley attached to the first link, all defined for the second link do. The plot shows the transmission ratio (r ₃₁ ) for different l ₂ / l ₁ (from 0.5 to 1.0 in increments of 0.1, from 1.0 to 2.0 in increments of 0.2). The profile of the non-circular pulley (s) of the band drive limiting the third link 162 can be calculated to achieve a transmission ratio r ₃₁ according to FIG. An exemplary pulley profile is shown in Figure 6a.

In the illustrated embodiment, a longer reach can be obtained compared with an equivalent link arm having the same limiting volume while using other suitable mechanisms or non-circular pulleys to limit the end effector as described. Compared to the embodiment shown in Figures 1 and 2, one or more band drive units with non-circular pulleys can replace the conventional one in the shoulder axle 18. [ In alternate aspects, the first link may be driven directly by the motor or through any type of coupling or transmission configuration, for example any suitable transmission ratio may be used. Alternatively, the band driver for actuating the second link and for limiting the third link may be replaced by any other configuration having equivalent functionality, such as a belt drive, a cable drive, a non-circular gear, a link- Mechanism or any combination of the above. Moreover, the third link can be limited to radially hold the end effector through a conventional two-stage band configuration that synchronizes the third link to the pulley driven by the second motor as shown in Figure 9 . Alternatively, the two stage band arrangement may be replaced by any suitable configuration, such as a belt drive, a cable drive, a gear drive, a linkage-based mechanism, or any combination thereof. Also, the end effector may not need to be directed radially. For example, the end effector may be positioned relative to the third link with any appropriate offset and may be oriented in any appropriate direction. In an alternative aspect, the third link may hold more than one end effector or substrate. Here, any suitable number of end actuators and / or material holders may be carried by the third link. Furthermore, the joint-to-joint length of the forearm may be less than the joint-to-joint length of the upper arm, for example, as represented by l ₂ / l ₁ <1 in FIG.

Referring to Fig. 9, an alternative robot 300 is shown in which the third link is coupled to a pulley driven by a second motor through a conventional two- In a radial direction. The robot 300 is shown having a drive 12 and an arm 302. The arm 302 may have an upper arm or first link 304 which is coupled to the shaft 64 and is rotatable about a central axis or a shoulder axis 18. The arm 302 has a paw arm or second link 308 rotatably coupled to the upper arm 304 at the elbow shaft 306. Links 304 and 308 may have non-equivalent lengths as previously described. The third link or end effector 312 may be rotatably coupled to the second link or forearm 308 at the list axis 310 such that the end effector 312 is not equivalent It is possible to transport the substrate 28 along the radial path without rotation of the links 304 and 308 having unlinked lengths. In the illustrated embodiment, the shaft 62 is coupled to two pulleys 314, 315, which may be circular and the pulleys 316 may not be circular. Wherein the circular pulley 314 is configured to rotate the end effector 312 in a radial direction through a conventional two stage circular band configuration 318,320 synchronizing the third link 312 to a pulley driven by the shaft 314. [ The third link 312 is limited. The two-step configuration 318,320 has a pulley 314 coupled by bands 322 to an elbow pulley 324 coupled to an elbow pulley 326 and an elbow pulley 326 is coupled And is coupled to the pulley 328. The pawl arm 308 may further have an elbow pulley 332 which may be circular and may be coupled to the shoulder pulley 316 through a band 334 wherein a shoulder pulley And may be coupled to the pulley 314 and the shaft 62.

The disclosed embodiments may further be implemented in connection with robots having robot actuators with additional axes and the arms coupled to the robot actuators may have additional end actuators capable of independently operating which can carry one or more substrates . As an example, arms with two independently operable arm links or "dual arm" configurations may be provided, wherein each independently operable arm may have one, two, And may have an end effector adapted to support an appropriate number of substrates. As described herein and hereinafter, each independently operable arm may have first and second links having different link lengths, and the substrate coupled to and supported by the end actuators and links may have a first, And performs tracking. Wherein the substrate transfer apparatus has first and second independently moveable arm assemblies capable of transferring the first and second substrates and coupled to the drive section on a common rotational axis. The first and second substrate supports are coupled to the first and second arm assemblies on the first and second list rotation axes, respectively. One or both of the first and second arm assemblies rotate about a common axis of rotation during stretching and retraction. The first and second list rotation axes move along first and second list paths that are parallel to and offset from the radial path with respect to the common axis of rotation during stretching and retraction. The first and second substrate supports move parallel to the radial path during stretching and retraction without rotation. Variations of the disclosed embodiment with a plurality of independently operable arms are provided below, although any suitable combination of features may be provided in an alternative aspect.

10A and 10B, a top view and a side view respectively of a robot 350 having a dual arm configuration are shown. The robot 350 has an arm 352 having a common upper arm 356 and independently operable pawl arms 356 and 358, each pawl arm having a respective end effector 360,362. In the illustrated embodiment, both links are shown in its retracted position. The lateral offset of the end effectors 366 corresponds to the difference in joint-to-joint lengths of the upper arms 356,358 and the forearm 354. In the illustrated embodiment, the upper arms may have the same length and are longer than the paw arms. In addition, the end effectors 360,362 are positioned above the pawl arms 356,358. 11A and 11B now show a top view and a side view respectively of a robot 375 in which the arms are in an alternative configuration. In the illustrated embodiment, the arm 377 may have the features described with respect to Figures 10A and 10B while both linkages are in their retracted positions. In this configuration, the third link with the end effector 382 of the upper link device is suspended under the forearm 380 to reduce the vertical spacing between the two end effectors 382, 384. Here, a similar effect can be achieved by stepping down 368 the end effector 360 at the top of the configuration of Figures 10A and 10B. Referring to Figs. 12 and 13, the inner configurations of the robots 350, 375, respectively, used to drive the individual links of the arms of Figs. 10 and 11 are shown. In the illustrated embodiment, the drive 390 may have first, second, and third drive motors 392, 394, 396, which drive the concentric shafts 398, 400, 402 respectively, Stator configurations. The Z drive 410 may drive the motors in a vertical direction wherein the motors may be partially or wholly contained within the housing 412 and the bellows 414 may move the inner volume of the housing 412 to the chamber 416 And the interior and interior spaces of chamber 416 may be operated in an isolation environment such as vacuum or otherwise. In the illustrated embodiment, the common upper arm 354 is driven by a single motor 396. Each of the two forearms 356 and 358 is pivoted on a common axis 420 at the elbow of the upper arm 354 and connected to the motors 394 and 396 through band drivers 422 and 424, Lt; / RTI &gt; The third links with end actuators 360,362 are each limited by band drives 426 and 428, each of which has at least one non-circular pulley, which is equivalent to the upper arms and the pawl arms It compensates for the effect of the length not. Here, the band drivers in each of the link devices can be designed using the methodology illustrated in Figures 1 and 2, and the kinematic equations presented for Figures 1 and 2 are based on two links of a dual arm May be used for each of the devices. In order to rotate the arm, all three drive shafts 398, 400, 402 of the robot need to move in the same amount in the direction of rotation of the arm. To extend and contract one of the end actuators in a radial direction along a straight path, the drive shaft coupled to the pawl arm associated with the activated end effector and the drive shaft of the common upper arm are shown in kinematic It is necessary to move in a coordinated manner according to reciprocal equations. At the same time, the drive shaft coupled to the other forearm needs to rotate in synchronism with the drive shaft of the common upper arm so that the deactivated end effector is maintained without retraction. Referring to Figures 14a, 14b and 14c, the arms of Figures 11a and 11b are shown when the upper and lower links are elongated. Here, the inert link devices 356, 360 rotate while the active link devices 358, 362 are stretched. As an example, the upper link devices 358 and 362 are elongated when the lower link devices 356 and 360 are elongated and the lower link devices 356 and 360 are rotated when the upper link devices 358 and 362 are elongated. In the embodiment disclosed in Figures 10 and 11, set up and control can be simplified where arm configuration provides longer reach compared to arms of equivalent link length with the same receiving volume Can be used on a coaxial drive without a dynamic seal. Here no bridge is used to support either of the end actuators. In the illustrated embodiment, the inert arm rotates while the active arm is stretched. One of the list joints moves over the lower end effector (moves closer to the wafer than in an equal-link arrangement).

Referring now to FIGS. 15A and 15B, a top view and a side view respectively of a robot 450 having a dual arm configuration are shown. The robot 450 has an arm 452 having a common upper arm 454 and independently operable paw arms 456 and 458 and each paw arm has a respective end effector 460 and 462. In the illustrated embodiment, both link devices are shown in the retracted position. The lateral offset of end effector 466 corresponds to the difference in joint-to-joint lengths of forearm 454 and upper arms 456,458. In the illustrated embodiment, the upper arms may have the same length and are longer than the paw arms. In addition, the end effectors 460, 462 are located above the pawl arms 456, 458. 16A and 16B show a plan view and a side view respectively of a robot 475 having an arm in an alternative configuration. Again, both linkages are shown in retracted positions. In this configuration, the end effector 482 and the third link of the left linkage device are suspended under the forearm 480 to reduce the vertical spacing between the two end effectors 482, 484. A similar effect can be obtained by stepping down 468 the upper end actuators of the constructions of Figures 15A and 15B. Alternatively, a bridge may be used to support one of the end actuators. The combined upper arm link 454 can be a single member as shown in Figs. 15 and 16, or can be coupled to two or more sections 470, 472 as shown in the example of Figs. 17a and 17b . Here, the two section design may be provided as a lightweight and less used material, the left 472 section and the right 470 section being the same component. Here, the two-part design can also be prepared for adjustment of the angular offset between the left and right sections, which can be convenient when different contraction positions need to be supported. Referring to Figures 18 and 19, inner structures utilized to drive the individual links of the arms of Figures 15 and 16, respectively, are shown. The combined upper arm 554 is shown driven by one motor having a shaft 402. Each of the two forearms 456 and 458 is independently driven by a single motor via shafts 400 and 398 via band drivers 490 and 492 having conventional pulleys. Here, the links 456 and 458 rotate on separate shafts 494 and 496, respectively. The third links having the end actuators 460, 462 are each limited by band drives 498, 500, each of which has at least one non-circular pulley, which are not equal in length to the upper arm and the forearm, To compensate for the effect of. Here, the band drivers 498, 500 in each of the link devices 456, 460 and 458, 462 are designed using the methodology described with respect to Figures 1 and 2. Here, the kinematic equations presented for Figs. 1 and 2 may be used for each of the two link devices 456, 460 and 458, 462 of the dual arm. In order to allow the arm 452 to rotate, all three drive shafts 398, 400, 402 of the robot need to move in the same amount in the direction of rotation of the arm. In order to allow one of the end actuators to extend and contract in the radial direction along the straight path, a drive shaft coupled to the forearm associated with the drive shaft of the common upper arm and the end effector is described with reference to Figures 1 and 2 It is necessary to move in a harmonious manner according to the inverse kinematic equations presented. At the same time, the drive shaft coupled to the other forearm needs to rotate in synchronism with the drive shaft of the common upper arm so that the inert end actuator remains in the retracted state. 20A, 20B and 20C, the arms of FIGS. 16A and 16B are shown when the left link devices 458 and 462 and the right link devices 456 and 460 are extended. It should be noted that while the inert link devices 456 and 460 are rotating, the active link devices 458 and 462 are stretched. Here, the right link devices 456 and 460 rotate when the left link devices 458 and 462 are extended, and the left link devices 458 and 462 rotate when the right link devices 456 and 460 are extended. The illustrated embodiment utilizes the advantages of a solid link design and a coaxial drive that are easy to set up and control, which provides a longer reach as compared to equivalent link arms having the same receiving volume A dynamic seal is not required. Here, no bridge is needed to support any of the end actuators. The inert arm rotates while the active arm is stretched. One of the list joints moves on the lower end actuator, more closely to the wafer than in the equivalent link configuration. In this case, the unsupported length of the bridge can be longer compared to the equivalent link arm design. Further, as compared to, for example, a common elbow joint shown in Figs. 10 and 11 and a configuration with independent dual arms as shown, for example, in Figs. 21 and 22, the angle of contraction may be more difficult have.

Referring now to FIGS. 21A and 21B, a top view and a side view, respectively, of a robot 520 with independent dual arms 522, 524 are shown. In the illustrated embodiment, both link devices 522, 524 are shown in the retracted position. The arm 522 has a third link with an independently operable upper arm 526, a forearm 528 and an end effector 530. In the illustrated embodiment, the pawl arms 528, 534 are shown as being longer than the upper arms 526, 532 and the end actuators 530, 536 are located on the pawarms 528, 534, respectively. 22A and 22B, there is shown a top view and a side view of a robot 550 having features similar to those of the robot 520, with the arms having an alternative configuration, with both link devices shown in retracted positions have. In this configuration, the end effector 552 and the third link of the left linkage are suspended under the forearm 554 to reduce the vertical spacing between the two end effectors. Similar effects can be obtained by stepping down the upper end actuators of the Fig. 21 configuration. Alternatively, a bridge can be used to support one of the end actuators. 21 and 22, the upper right arm 532 is positioned below the upper left arm 526. [ Alternatively, for example, the left upper arm may be located on the upper right arm, and one link device may be accommodated in another link device. Referring to Fig. 23, there are shown inner configurations used to drive the individual links of the arms of Figs. 21A and 21B. Here, in order to clearly show the figure, the rise of the links is adjusted to avoid overlap of the components. Each of the two upper arms 526, 532 is independently driven by shafts 398, 402 via a single motor. Fore arms 528 and 534 are coupled to the third motor through shaft 400 through band components 570 and 572, respectively, having at least one non-circular pulley. The third link devices 530, 536 with end actuators are limited by band drives 574, 566, each of the band drivers having at least one non-circular pulley. The band drive units are designed so that the rotation of one of the upper arms 526, 532 causes the corresponding link devices 528, 530 and 534, 536 to stretch and contract along a straight line, respectively, while the other link device remains stationary. The band drivers in each of the link devices can be designed using the methodology described with respect to Figures 5 and 6 wherein the kinematic equations presented for Figures 5 and 6 are applied to the two link devices of the dual arm May be used for each. In order for the arm to rotate, all three drive shafts 398, 400, 402 of the robot need to move in the same amount in the direction of rotation of the arm. The drive shaft of the upper arm associated with the active end effector needs to be rotated according to the kinematic inverse equation for Figures 5 and 6 so that one of the end effectors is stretched and contracted in the radial direction along the straight path, The other two drive shafts need to be kept stationary. 24A, 24B and 24C, the arm of FIG. 22 is shown when the left linkage 522 and the right linkage 524 are stretched. It should be noted that the inactive link device 524 is kept stationary when the active link device 522 is elongated. That is, the left link device 522 does not move while the right link device 524 is stretched, and the right link device 524 does not move when the left link device 522 is stretched. The illustrated embodiment provides a longer reach compared to an equivalent link arm having the same receiving volume. Here, the bridge is not used to support any of the end actuators, and the active link device is held stationary while the active link device is stretched, potentially leading to higher throughputs, load, without the use of force. The illustrated embodiment has two or more band drivers with non-circular pulleys instead of the usual ones that may be more complex than those shown in Figs. 15 and 16. Fig. One of the list joints moves on the lower end actuators as shown in FIG. This can be avoided by using a bridge (not shown) supporting the end effector on top. In this case, the unsupported length of the bridge is longer compared to the equivalent link arm design.

Referring now to FIGS. 25A and 25B, a top view and side view, respectively, of a robot 600 with arms 602 are shown. In the illustrated embodiment, both link devices are shown in the retracted position. The lateral offset of the end effectors 604 corresponds to the difference in the joint-to-joint length of the upper arm 606 and the pawl arms 608, 612, and in this embodiment the pawl arms 608, Is shorter than the arm (606). The inner configurations used to drive the individual links of the arms may be similar to those of FIGS. 10-13, for example, as in FIG. 13, but in this example the fore arms are shorter than the common upper arms. Here, the common upper arm is driven by one motor. Each of the two forearms is driven independently by one motor through a band drive with conventional pulleys. The third links 614, 616 with end actuators are limited by band drive units, each having at least one non-circular pulley, which compensates for the offset of the unequal length of the upper arms and forear arms do. The band drivers of each of the links may be designed using the methodology described with respect to Figs. The kinematic equations presented for FIGS. 1 and 2 may be used for each of the two links of the dual arm. Referring to Figs. 26A, 26B and 26C, the arms of Figs. 25A and 25B are shown when the upper link devices 612, 616 are elongated. The lateral offset 604 of the end effector corresponds to the difference in joint-to-joint length of the upper arm and the forearm, and the wrist joint is offset relative to the trajectory of the center of the wafer by the difference Move along a straight line. It should be noted that the inactive link devices 608 and 614 rotate while the active link devices 612 and 616 are stretched. For example, the upper link device rotates when the lower link device is elongated, and the lower link device rotates when the upper link device is elongated. Here, FIG. 26A shows an arm in which both link devices are in the retracted position. FIG. 26B shows a top link device 612, 616 partially stretched at a position where the list joint of the upper link device is closest to the wafer held by the lower link device. It is observed that the list joint of the upper link device does not move across the wafer (but moves in the plane above the wafer). 26C shows that the upper link devices 612 and 616 are extended further. The illustrated embodiment may provide ease of set up and control and may be used on a coaxial or triaxial drive without a dynamic seal or other suitable drive. Here, the bridge may not be used to support any of the end actuators. The list joint of the upper link device does not move across the wafer on the lower end actuator, which is the case for an equivalent link design (however, it moves in a plane that overlies the wafer on the end effector). Here, the inert arm rotates while the active arm is stretched. Elbow joints can be more complex, which can translate to larger turning radii or short reach distances. Here, due to the overlapping fore arms 608, 612, the arms may be larger than those shown in Figures 30, 31 and 33. [

27A and 27B, a top view and a side view of robot 630 with arms 632 are respectively shown. The arms 630 may have features similar to those described with reference to Figures 15-19, except that the forearms 636 and 640 are shown as having a shorter link length than the upper arm 636. [ Both link devices are shown in the retracted position. The lateral offset 634 of the end effectors 642 and 646 corresponds to the difference in joint-to-joint lengths of the upper arm 636 and the pawl arms 638 and 640. [ The combined upper arm link 636 may be a single member as shown in Figures 27A and 27B or may be mounted on two or more sections 636 ', 636 "as shown in the example of Figures 28A and 28B The two-section design can be lightweight with little material and the left section 636 'and the right section 636 " can be the same component. A tolerance for adjusting the angular offset between the left section 636 'and the right section 636 "may be provided, for example, where different contraction locations need to be supported. ) May be similar to those shown in Figures 15 to 19, for example, similar to that shown in Figure 19. A common upper arm 636 is connected to one motor Each of the two forearms 638 and 640 is independently driven by a motor through a band drive with conventional pulleys. The third links with end actuators 642 and 646 are driven by a band Each of which has at least one non-circular pulley, which compensates for the effect of the unequal length of the upper arm 636 and forear arms 638, 640. Each of the link devices Van Drives may be designed using the methodology of Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may be used for each of the two link devices of the dual arm. Figures 29a, 29b, 27A and 27B when the right and upper link devices 640 and 646 are elongated. The lateral offset 634 of the end effector is the distance between the upper arm and the pawl arms The inactive link devices 638 and 642 correspond to the active link devices &lt; RTI ID = 0.0 &gt; 638 &lt; / RTI & For example, when the lower link device is extended, the upper link device is rotated, and when the upper link device is extended, the lower link device is rotated. [0064] In Figures 29A, 29B and 29C , Degree Figure 29b shows that the joints of the right upper link devices 640 and 646 are located closest to the wafer held by the left lower link devices 638 and 642 The upper right link devices 640 and 646 are partially extended. Here, the list joint of the right upper link device 640, 646 does not move across the wafer, but it moves in the plane above the wafer. FIG. 29C shows that the upper right link devices 640 and 646 are further extended. The illustrated embodiment includes the ease of design, setup and control of a solid link and the advantages of a coaxial drive without a dynamic seal, for example. The bridge is not used to support any end operators. The list joint of the upper link device does not move across the wafer on the lower end-actuator, which is the case for an equivalent link design, but it moves in a plane above the wafer on the lower end actuator. The inactive arms 638,642 rotate while the active arms 640,646 are stretched. The contraction angles are more difficult to change as compared to the common elbow joints shown in, for example, FIGS. 25A and 25B and the configuration with the independent dual arms shown in FIGS. 33A and 33B, for example. Moreover, since the pawl arm 640 is shown at a higher elevation than the pawl arm 638, the arm appears larger in Figures 30 and 31 and Figures 33a and 33b.

Referring now to FIGS. 30A and 30B, a top view and a side view of robot 660 with arms 662, respectively, are shown. The arm 662 may have the features described with respect to Figures 27-29, but employs bridges and has two forearms at the same height as will be described later. Both link devices are shown in the retracted position. The lateral offset 664 of the end effectors corresponds to the difference in the joint-to-joint lengths of the upper arm 66 and forearm 668,670. The combined upper arm link 666 can be a single piece as shown in Figs. 30A and 30B, or can be formed into two or more sections 666 ', 666 "as shown in the example of Figs. 31A and 31B 15-19, but the pawl arms 668, 670 are shorter than the upper arm 666. The common upper arm 666 may be formed from a single, Each of the two forearms 668, 670 is driven independently by a single motor via a band drive with conventional pulleys. [0064] The third links with end actuators 672, Band actuators, each of which has at least one non-circular pulley, which compensates for the effect of the unequal length of the upper arm and the pawl arms. The drive means may be designed using the methodology described with respect to Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may be used for each of the two link devices of the dual arm. 3 link and an end effector 674 has a bridge 680 that includes an upper end actuator portion 682 and a side offset support 682 that is offset from the list axis between the link 670 and the link 674. [ Portion 684 and also has a lower support portion 686 that couples the list axis to the offset support portion 684. It should be understood that the bridge 680 and The bridge 680 allows the pawl arms 668 and 670 to move in a packaged fashion at the same height while providing a clearance for the portions between the third link and the end effector 672 Can be made. Paper 680 provides a configuration that exists below the wafer surface during transport, for example, any moving parts such as two list joints. 32A, 32B, 32C and 32D, a top view of the robot arm of Figs. 30A and 30B is shown when the right linkage 670, 674 is extended. The lateral offset 664 of the end effector corresponds to the difference in the joint-to-joint length of the upper arm 666 and the forearm 670 and the list joint 690 corresponds to the difference in the length of the wafer 692 And moves along a straight line offset relative to the center locus. It should be noted that the inactive link devices 668 and 672 rotate while the active link devices 670 and 674 are elongated. For example, when the lower link device is extended, the upper link device is rotated, and when the upper link device is extended, the lower link device is rotated. In Figures 32a, 32b, 32c and 32d, Figure 32a shows an arm with both linkages in the retracted position. 32B is a schematic view of the position of the bridge 680 at the position corresponding to the worst case gap (or adjacent to the gap in the worst case) between the end effector 672 of the left link devices 668, 672 and the bridge 680 of the right links 670, And the right link devices 670 and 674 are partially extended. 32C shows the right linkage 670, 674 partially stretched in position when the forearm 670 is aligned with the upper arm 666. FIG. The lateral offset of the end effector corresponds to the difference in joint-to-joint lengths of the upper arm and the paw arm. The list joint 690 axis moves along a straight line offset with respect to the center locus of the wafer 692 due to this difference. 32D shows that the right link devices 670 and 674 are further extended. The illustrated embodiment combines the advantages of a side-by-side dual scara configuration, a solid link design, and a co-axial drive, such as a thin profile, resulting in a shallow chamber with a small volume . The bridge 680 on the right link devices 670 and 674 is lower and the unsupported length between the vertical member 684 and the list 690 is shorter than in the prior art coaxial dual scara arm, The joints are under the end effector. Here, the inactive arms 668, 672 rotate while the active arms 670, 674 are stretched. As will be described below, in another aspect of the disclosed embodiments, the arms that do not exhibit the above behavior may be provided with different band components having non-circular pulleys instead of the conventional ones disclosed herein. Alternatively, the bridge supporting the upper end actuators can be removed by using a configuration similar to that described above with respect to Figs. 25A and 25B and Figs. 27 and 28 above.

Referring now to FIGS. 33A and 33B, a top view and a side view, respectively, of a robot 700 with an arm 702 are shown. The arm 702 may have features similar to the arms shown in FIGS. 21-23, but employs a bridge arm length that is shorter than the trunk arm length and, as an example, the bridge described with respect to the bridge 680, The arms are positioned at the same height. Both link devices are shown in their retracted positions. 33A and 33B, the upper right arm 708 is positioned above the upper left arm 706. [ Alternatively, the left upper arm 706 may be located above the right upper arm 708. [ Similarly, the third link and end effector 716 of the right link devices 712, 716 feature a bridge that extends over the third link and end effector 714 of the left link devices 710, 714 . Alternatively, the third link and end effector 714 of the left link devices 710 and 714 can be characterized by a bridge that can extend across the third link and end effector 716 of the left link devices 712 and 716 have. The inner configuration used to drive the individual links of the arms may be similar to the embodiment shown in Figures 21-23. Each of the two upper arms 706, 708 is independently driven by one motor. Fore arms 710 and 712 are coupled to the third motor through a band arrangement, each of which has at least one non-circular pulley. The third links 714,716 with end actuators are limited by the band drive portions, each of the band drive portions having at least one non-circular pulley. The band drivers are designed such that rotation of one of the upper arms 706, 708 causes the corresponding link device to stretch and contract along a straight line while the other link device remains stationary. The band drivers in each of the link devices are designed using the methodology described for the embodiment shown in Figures 5 and 6. The kinematic equations presented for the embodiment shown in Figures 5 and 6 can be used for each of the two link devices of the dual arm. Referring to Figs. 34A, 34B and 34C, the arms of Figs. 33A and 33B are shown when the right link devices 708, 712 and 716 are elongated. Here, the inactive link devices 706, 710, and 714 remain stationary when the active link devices 712 and 716 are elongated. That is, the left link device does not move while the right link device is extended, and the right link device does not move when the left link device is extended. The illustrated embodiment combines the advantages of a parallel dual scalar configuration and a coaxial drive, such as a thin profile resulting in a shallow chamber with a small volume, for example. The bridge on the right linkage is much lower and its unsupported length is shorter than existing coaxial dual scalar arms and all joints are below the end actuators. While the active link device is elongated, the inactive link is kept stationary, leading to potentially high throughput because the active link device can stretch or contract without a load. Alternatively, the bridge supporting the upper end actuators may be removed by using a configuration similar to that described with respect to Figures 25, 27 and 28. [

35A and 35B, a top view and a side view of a robot 730 with an arm 732 are shown and both links are shown in a retracted position. Each link device has a dual-holder end-effector 740, 742, each of which supports two substrates that are offset from each other for four supportable substrates. The inner configurations used to drive the individual links of the arm 732 may coincide with FIGS. 10 and 11, for example, coincide with FIG. The common upper arm 734 is driven by one motor. Each of the two forearms 736 and 738 is driven independently by a single motor through a band drive having a conventional pulley. The third links with end actuators 740, 742 are limited by band drive units, each of which has at least one non-circular pulley, which compensates for the effect of the unequal length of the upper arm and the forearm. The illustrated embodiment has a pawl arm that is longer than the upper arm. Alternatively, they may be short. The band drivers of each of the link devices are designed using the methodology described with respect to Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may be used for each of the two link devices of the dual arm. Referring to FIG. 36, the arms of FIGS. 35A and 35B are shown when one link device 738, 742 is stretched. It should be noted that the inactive links 736 and 740 rotate while the active link devices 738 and 742 are elongated. For example, the upper link rotates when the lower link is extended, and the lower link rotates when the upper link is extended. 37 and 38, the end effector need not be shaped to avoid interference with the opposing elbow.

37A and 37B, a top view and a side view of the robot with the arm 750 are respectively shown. Both link devices are shown in their retracted position and each link device has dual holder end actuators 758,760. The combined upper arm link 752 may be a single member as shown in Figs. 37A and 37B or may be formed by two or more sections 752 ', 752 "as shown in the example of Figs. 38A and 38B The inner structures used to drive the individual links of the arms may be as shown in Figures 15 to 19, for example, as shown in Figure 19. The combined upper arms 752 are connected by a single motor 758. Each of the two forearms 754, 756 is driven by a motor via a band drive with conventional pulleys. The third links 758, 760 with end actuators are limited by the band drives, Each of which has at least one non-circular pulley, which compensates for the effect of the unequal length of the upper arm and of the forearm. The illustrated embodiment has a longer forearm than the upper arm. The band drivers in each of the link devices are designed using the methodology described with respect to Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 are based on two links of dual arms To enable the arm to be rotated, all three drive shafts of the robot need to move in the same amount in the direction of rotation of the arm. One of the end effector assemblies may have a radius The drive shaft of the common upper arm and the drive shaft associated with the forearm associated with the active link device need to move in a coordinated manner according to the kinematic inverse equation for Figures 1 and 2 . At the same time, the drive shaft coupled to the other forearm causes the inert linkage to remain retracted It is necessary to rotate in synchronism with the drive shaft of a common upper arm for rotation of the drive shaft of the upper arm. The inactive link devices 754 and 758 rotate while the link device is being extended. For example, when the left link device is extended, the right link device rotates, and when the right link device is extended, the left link device rotates. The illustrated embodiment has no bridges. The upper list moves across one of the wafers on the lower end actuator. Here, the arms and end actuators do not need to be designed so that the upper elbow clears the lower end actuators.

Referring to Figs. 40A and 40B, a top view and a side view respectively of a robot 750 having an arm 752 are shown. Both link devices are in the retracted position and each link device has a dual-holder end-effector 792, 794. The inner configurations used to drive the individual links of the arms may correspond to Figs. 21-23. Each of the two upper arms 784, 786 is independently driven by one motor. Fore arms 788 and 790 are coupled to the third motor through band configurations, each of the band configurations having at least one non-circular pulley. The third links with end actuators 792, 794 are limited by band drive portions, and each of the band configurations has at least one non-circular pulley. The band drivers are designed such that rotation of one of the upper arms stretches and contracts the corresponding link along a straight line while the other link device remains stationary. The illustrated embodiment has a pawl arm that is longer than the upper arm. Alternatively, they may be short. The band drivers in each of the link devices are designed using the methodology described with respect to Figures 5 and 6. The kinematic equations presented for Figures 5 and 6 may be used for each of the two link devices of the dual arm. In order to allow the arm to rotate, it is not necessary that all three drive shafts of the robot move in the same amount in the direction of rotation of the arm. In order to allow one of the end effector assemblies to extend and contract in the radial direction along the straight path, the drive shaft of the upper arm associated with the active link device needs to be rotated according to the kinematic inverse equation for Figures 5 and 6 And the other two drive shafts need to be kept stationary. Referring to Fig. 41, there is shown the arms of Figs. 40A and 40B when one link device 784, 788, 794 is elongated. It should be noted that the inactive link devices 786, 790, 792 remain stationary while the active link devices 794, 788, 794 are elongated. That is, the left link does not move while the right link device is extended, and the right link device does not move when the left link device is extended. Alternatively, the left and right link devices can move independently in the radial direction at the same time. For example, as shown in Fig. 42, the right link device is slightly elongated independently as compared with Fig. Movement of the elbow of the upper linkage device may be limited due to potential interference with the wafer on the lower end effector, which may limit the reach of the robot shown in Fig. This limitation can be mitigated by slightly stretching the lower linkage to achieve full reach and provide additional clearance as shown in FIG. The illustrated embodiment does not have a bridge. The list of upper link devices can be moved on the wafers on the lower end actuators.

Referring to Figs. 43A and 43B, a top view and a side view respectively of a robot 810 having arms 812 are shown. Both link devices are in a retracted position and each link device has dual holder end actuators 820, 822. The inner configurations used to drive the individual links of the arms can be matched with Figs. 10-13. The common upper arm 814 is driven by one motor. Each of the two forearms 816, 818 is independently driven by a single motor via a band drive having a conventional pulley. The third link with end effectors 820, 822 is limited by the band drivers, each of which has at least one non-circular pulley, which compensates for the effect of the unequal length of the upper arms and pillar arms . In the illustrated embodiment, the pawl arms are shorter than the upper arm; Alternatively, they may be longer. The band drivers in each of the link devices are designed using the methodology described with respect to Figures 1 and 2. The kinematic discharge equations presented for Figures 1 and 2 may be used for each of the two link devices of the dual arm. Referring to Figs. 44 and 45, the arms of Figs. 43A and 43B are shown when the upper link devices 818, 822 are extended. It should be noted that the inactive link devices 816, 820 rotate while the active link devices 818, 822 are extended. For example, when the lower link apparatus is extended, the upper link apparatus is rotated, and when the upper link apparatus is extended, the lower link apparatus is rotated. Figures 44 and 45 show that the list joint 824 of the upper link devices 818,822 does not move over the wafer 826 held by the lower link devices 816,820 of the arm. The illustrated embodiment does not have a bridge. 46 and 47, the end effector need not be shaped to avoid interference with the opposing elbow.

Referring to Figs. 46A and 46B, a top view and a side view respectively of a robot 840 having arms 842 are shown. Both linkages are shown in the retracted position, and each linkage has dual holder end actuators 850, 852. The combined upper arm link 844 can be a single piece as shown in Figs. 46A and 46B, or can be formed into two or more sections 844 ', 844 "as shown in the example of Figs. 47A and 47B The inner configurations used to drive the individual links of the arms may be identical to those of Figures 15-19, for example, as in Figure 19. The combined upper arm 844 may be a single Each of the two forearms 846, 848 is independently driven by a motor via a band drive with a conventional pulley. The third links with end actuators 850, 852 are driven by a band drive Each of which has at least one non-circular pulley, which compensates for the effect of the unequal length of the upper arms and pillar arms. In the illustrated embodiment, The band drivers in each of the link devices are described using the methodology described with respect to Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 are based on the dual arm &lt; RTI ID = 0.0 &gt; All of the three drive shafts of the robot need to move in the same amount in the direction of rotation of the arm. One of the end actuator assemblies In order to extend and contract in the radial direction along the straight path, the drive shaft of the drive shaft coupled to the pawl arm associated with the active link device and the drive shaft of the common upper arm 844 are shown in kinematic reciprocal equations for Figures 1 and 2 Thus, it is necessary to move in a harmonious manner. At the same time, the driving shaft, which is coupled to the other forearm, There is a need to rotate in synchronism with the drive shaft of the common upper arm to remain in the unlocked state. Referring now to Figures 48 and 49, the arms of Figures 46a and 46b are shown when the upper link devices 848, have. Here, the inactive link devices 846, 850 rotate while the active link devices 848, 852 extend. For example, the upper link device rotates when the lower link device is extended, and the lower link device rotates when the upper link device is extended. Figures 48 and 49 show that the list joint 854 of the upper link device does not move over the wafer 856 held by the lower link device of the arm. The illustrated embodiment does not have a bridge and the list joint of the upper link device does not move beyond the wafer held by the lower link. Here, the inactive arm rotates less, allowing a faster speed of motion when the active arm is contracted or elongated without a load.

Referring to FIGS. 50A and 50B, a top view and a side view respectively of a robot 870 with arms 872 are shown. Both link devices are shown in the retracted position and each link has dual holder end actuators 880, 882. The combined upper arm link 974 can be a single member as shown in Figures 50a and 50b or can be formed by two or more sections as shown in the example of Figures 47a and 47b. The inner configurations used to drive the individual links of the arms may be the same as in Figs. 15 to 19, for example, the same as in Fig. The combined upper arms 874 are driven by a single motor. Each of the two forearms 876 and 878 is driven independently by a single motor through a band drive having a conventional pulley. The third links with the end actuators are limited by band drive units, each of which has at least one non-circular pulley, which compensates for the effect of the unequal length of the upper arms and pillar arms. In the illustrated embodiment, the pawl arms are shorter than the upper arm; Alternatively, they may be longer. The band drivers in each of the link devices can be designed using the methodology described with respect to Figures 1 and 2. [ The kinematic equations presented for Figures 1 and 2 may be used for each of the two link devices of the dual arm. In order to allow the arm to rotate, all three drive shafts of the robot need to move in the same amount in the direction of rotation of the arm. In order to allow one of the end effector assemblies to extend and contract in the radial direction along the straight path, the drive shaft of the common upper arm 874 and the drive shaft associated with the forearm associated with the active link device, It is necessary to move in a harmonious way according to the kinematic inverse equations of 2. At the same time, the drive shaft coupled to the other forearm needs to rotate in synchronism with the drive shaft of the common upper arm 874 in order to keep the inert link device contracted. Referring to Fig. 51, there is shown an arm of Figs. 50A and 50B in which one link device 878, 882 is elongated. Here, the inactive link devices 876 and 880 are rotated while the active link devices 878 and 882 are extended. For example, when the lower link device is elongated, the upper link device is rotated, and when the upper link device is elongated, the lower link device is rotated. The illustrated embodiment has short forearm links that can be strained with a short band, and the pawl arms are positioned side by side to facilitate a shallow chamber. Here, the short links can cause more rotation of the inactive arm compared to Figures 46 and 47, which can be overcome by the long upper arms. A bridge 884 is provided and the arms and end actuators can be designed such that the bridge 884 clears the inert end effector 880 during the movement of the kidney.

Referring now to Figures 52A and 52B, there is shown a top view and side view, respectively, of a robot 900 with an arm 902. Both link devices are shown in the retracted position and each link device has a dual holder end effector. The inner configurations used to drive the individual links of the arms are the same as in Figs. 21-23. Each of the two upper arms 904, 906 is independently driven by one motor. Fore arms 908 and 910 are coupled to the third motor through a band arrangement, each of the band arrangements having at least one non-circular pulley. The third links with end actuators 912, 914 are limited by band drive portions, each of which has at least one non-circular pulley. The band drivers are designed such that rotation of one of the upper arms 904, 906 stretches and contracts the corresponding link device along a straight line while the other link devices remain stationary. In the illustrated embodiment, the pawl arms are shorter than the upper arm; Alternatively, they may be longer. The band drivers in each of the link devices are designed using the methodology described with respect to Figures 5 and 6. The kinematic equations presented in Figures 5 and 6 may be used for each of the two link devices of the dual arm. In order to allow the arm to rotate, all three drive shafts of the robot need to move in the same amount in the direction of rotation of the arm. In order to allow one of the end effector assemblies to extend and contract in the radial direction along the straight path, the drive shaft of the upper arm associated with the active link device needs to be rotated according to the kinematic inverse equation for Figures 5 and 6 And the other two drive shafts need to be kept stationary. Referring to Figure 53, the arms of Figures 52A and 52B are shown in which one link device 906,910, 914 extends. While the active link devices 906,910, 914 are stretched with the bridge 916, the inactive link devices 904, 908, 912 remain stationary. That is, the left link device does not need to move while the right link device is stretched, and the right link device does not need to move when the left link device is extended, even though the left link device can move independently in the radial direction. The illustrated embodiment has short links and side by side arms that can be tightened with short bands to facilitate shallow chambers. Alternatively, the paw arms may be longer than the upper arms in the form with the bridge.

54-55, a combined dual arm 930 with opposing end actuators 938,940 is shown. Figures 54A and 54B show a top view and a side view, respectively, of a robot with arms. Both link devices are shown in the retracted position and the lateral offset of the end actuators corresponds to the difference in joint-to-joint length of the upper arm 932 and the pawl arms 934,936. The combined upper arm link 932 can be a single member as shown in FIG. 54, or can be formed of two or more sections. As an example, a two section design can be lightweight with fewer materials, with the left and right sections being the same component. The inner configurations used to drive the individual links of the arms may be based on what is shown in connection with Figs. 18 and 19 or based on something else. The common upper arm 932 is driven by one motor. Each of the two forearms 934 and 936 is independently driven by a single motor through a band drive having conventional pulleys. The third links with end actuators 938 and 940 are limited by the band drive units, each of which has at least one non-circular pulley, which is not equivalent to the upper arms 934 and 936 and the forearm 932 Compensates for the effect of length. The band drivers in each of the link devices utilize or otherwise design the methodology described in connection with FIG. The kinematic equations presented for FIG. 1 may be used for each of the two links of the dual arm. Figures 55A-55C illustrate the arm of Figure 54 when the first linkages 934,938 and second linkages 936,940 are extended from their retracted position. The lateral offset of the end effector corresponds to the difference in the joint-to-joint lengths of the upper arms 934,936 and the forearm 932 and the list joints 942,944 are offset relative to the trajectory of the center of the wafer, And moves along a straight line. It should be noted that the inactive link device is rotated while the active link device is elongated. For example, when the first link device is elongated, the second link device is rotated, and when the second link device is elongated, the first link device is rotated. 55A shows an arm in which both link devices are in the retracted position. Fig. 55B shows that the first link devices 934 and 938 are elongated. 55C shows that the second link devices 936 and 940 are elongated. The illustrated arms have a low profile, allowing a shallow vacuum chamber with a small volume, since the fore arms move in the same plane and the end actuators move in the same plane. Because the contraction position of the list of one link device is limited by the list of other links, the limiting radius of the arm can be large such that the diameter of the chamber is governed by the size of the slot valves, The arm is particularly suitable for applications with the &lt; Desc / Clms Page number 7 &gt; Due to the low profile, the arms can replace the flogleg type arms with opposite end actuators. In the illustrated embodiment, the pawl arms are shorter than the upper arm; Alternatively, they can be long, for example, when the forearms are at different heights and overlap.

56 and 57, there is shown an independent dual arm 960 having opposing end actuators 970, 972. As shown in FIG. 56A and 56B show a top view and a side view of a robot with arms. Both link devices are shown in their retracted position. 56, the upper arm 962 of the first linkage is positioned above the upper arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be located above the upper arm of the first linkage. The inner configurations used to drive the individual links of the arms may be based on FIG. 23 or based on something else. Here, each of the two upper arms 962, 964 can be independently driven by one motor. Fore arms 966 and 968 are coupled to the third motor through band configurations, each of which has at least one non-circular pulley. The third links with the end effectors 970, 972 are limited by the band drivers, each of which has at least one non-circular pulley. The band drivers are designed such that rotation of one of the upper arms stretches and contracts the corresponding link device along a straight line while the other link device remains stationary. The band drivers in each of the link devices are designed using the methodology described with respect to FIG. The kinematic equations presented for FIG. 5 may be used for each of the two link devices of the dual arm. 57A-57C illustrate the arm of FIG. 56 when the first link devices 962, 966, 970 and the second link devices 964, 968, 972 extend from the retracted position. Here, the inactive link device remains stationary (but need not be) while the active link device is elongated. That is, the second link device does not move while the second link device is extended, and the first link device does not move when the second link device is extended. Since the forearms move in the same plane and the end actuators move in the same plane, the arms have a low profile, allowing a shallow vacuum chamber with a small volume. Since the contraction position of one list of links is limited by the list of other links, the containment radius of the arms is increased, which allows a number of process modules, the diameter of the chamber being governed by the size of the slot valves For arms applications, arms are particularly suitable. Because of this low profile, the arms can replace the frogleg type arms with opposing end actuators. In the illustrated embodiment, the pawl arms are shorter than the upper arm; Alternatively, they may be longer, for example when the forearms are at different heights and overlap.

58, there is shown a combined dual arm 990 having an end effector 998, 1000 that is angularly offset. 58A and 58B show a top view and a side view of a robot with arms. Both link devices are shown in the retracted position. The lateral offsets 1002,1004 of the end actuators correspond to the difference in joint-to-joint lengths of the upper arms 994,996 and forear arms 992. [ The combined upper arm link 992 can be a single member as shown in Figure 59 or can be formed of two or more sections. The inner configurations used to drive the individual links of the arms may be based on or otherwise differ from those of FIGS. 18 and 19. Here, the common upper arm 992 can be driven by one motor. Each of the two forearms 994 and 996 can be driven independently by a single motor via a band drive having a conventional pulley. The third links with end actuators 998, 1000 are limited by band drive units, each of which has at least one non-circular pulley, which has the effect of an unequal length of upper arms and forear arms Compensate. The band drivers of each of the link devices are designed or otherwise designed using the methodology described with respect to FIG. The kinematic equations presented for FIG. 1 may be used for each of the two link devices of the dual arm. 59A to 59C, the arm of FIG. 58 is shown when the left link devices 994, 998 and the right link devices 996, 100 are elongated. The lateral offset (1002, 1004) of the end effector corresponds to the difference of the joint-to-joint lengths of the upper arm and the forearm, and the list joint has a straight line offset with respect to the trajectory of the center of the wafer Therefore, it moves. Here, the inactive link device rotates while the active link device is stretched. For example, when the left link device is extended, the right link device is rotated, and when the right link device is extended, the left link device is rotated. 59A shows an arm in which both link devices are in the retracted position. 59B shows that the left link devices 994 and 998 are extended. 59C shows that the right link devices 996 and 1000 are elongated. Here, the inert arm rotates while the active arm is stretched. In the illustrated embodiment, the pawl arms are shorter than the upper arm; Alternatively, they may be longer, for example when the forearms are at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart; Alternatively, any angle of separation may be provided.

Referring to FIG. 60, an independent dual arm 1030 is shown having angled offset end effectors 1040 and 1042. Here, Figs. 60A and 60B show a top view and a side view of a robot having arms. Both link devices are shown in the retracted position. In Fig. 60, the right upper arm 1034 is located below the left upper arm 1032. Alternatively, the left upper arm may be positioned below the right upper arm. The inner configurations used to drive the individual links of the arms may be based on Fig. Each of the two upper arms 1032 and 1034 can be independently driven by one motor. The forearms are coupled to the third motor through band arrangements, each of the band arrangements having at least one non-circular pulley. The third links with end effectors 1040 and 1042 are limited by band drive units, each of which has at least one non-circular pulley. The band drivers are designed such that rotation of one of the upper arms 1032, 1034 stretches and contracts the corresponding linkage along the straight line while the other linkage is held stationary. The band drivers of each of the link devices may be designed or otherwise configured using the methodology described with respect to FIG. The kinematic equations presented for Figure 5 may be used for each of the two link devices of the dual arm. Figs. 61A to 61C show the arm of Fig. 60 when the left link devices 1032,1036, 1040 and then the right link devices 1034,1038, 1042 are elongated. Here, the inactive link device remains (but need not be) stationary while the active link device is extended. That is, the left link device does not move while the right link device is extended, and the right link device does not move when the left link device is extended. Here, the inactive link device remains stationary while the active link device is extended. In the illustrated embodiment, the pawl arm is shorter than the upper arm; Alternatively, they may be longer, for example when the forearms are at different heights and overlap. In the illustrated embodiment, the end actuators can be spaced 90 degrees apart; Alternatively, any angle of separation may be provided.

As an example relative to Figure 62 or as an alternative, the third link and end effector 1060, 1062, each of which may be referred to as a third link assembly, are configured such that when the corresponding linkage of the arm elongates and contracts, 1064 may be designed to be on or near the linear trajectories of the list joints 1068, 1070, respectively. This reduces the load in the band configuration limiting the third link assembly by reducing the moment due to the inertia force at the mass center of the third link assembly and the reaction force at the list joint. The third link assembly may be further designed such that the center of mass of the third link assembly is on one side of the list joint locus when a load is present and on the other side of the locus when no load is present. Alternatively, as shown in FIG. 62, since the best straight-line tracking performance is typically required in the presence of a load, the center of mass of the third link assembly is substantially on the list joint locus when a load is present The third link assembly can be designed. 62, 1L is a straight line locus of the center of the list joint of the left link device, 2L is the center 1070 of the list joint of the left link device, 3L is the center of mass 1066 of the third link assembly of the left link device, , 4L is the force acting on the third link assembly of the left link when the left link device is accelerated (or decelerated at the end of the contraction movement) at the beginning of the elongation movement, and 5L is the force acting on the left link device Is the inertial force acting on the center of mass of the third link assembly of the left linkage when accelerated (or decelerated at the end of the retraction movement). Similarly, 1R is a straight line locus of the center of the list joint of the right link device, 2R is the center point 1068 of the list joint of the right link device, 3R is the center of mass 1064 of the third link assembly of the right link device, 4R is the force acting on the third link assembly of the right link device when the right link device is decelerated (or accelerated at the start of the contraction movement) at the end of the elongation movement, and 5R is the force acting on the right link device Is the inertial force acting on the center of mass of the third link assembly of the right link device when decelerating (or accelerating at the start of a contraction movement). In the illustrated embodiment, dual wafer end actuators are provided. In alternative aspects, any suitable end effector and arm or link geometry may be provided.

In alternate aspects, in some aspects of the embodiments, the upper arms may be driven by the motor directly or by any type of coupling or transmission arrangement. Any transmission ratio can be used. Alternatively, the band drivers for activating the second link and for limiting the third link may be replaced by any other configuration of equivalent functionality, for example, a belt drive, a cable drive, circular and non-circular gears, - base mechanism, or any combination thereof. Alternatively, for example, in the dual and quad arm aspects of the embodiment, similar to the single arm concept of FIG. 9, the third link of each linkage may be actuated through a conventional two stage band configuration The two stage band configuration synchronizes the third link to the pulley driven by the second motor, similar to the single arm concept of FIG. Alternatively, the two-stage band configuration can be replaced with any suitable configuration and replaced by, for example, a belt drive, a cable drive, a gear drive, a linkage-based mechanism or a combination thereof. Alternatively, in the dual arm and quad arm aspects of this embodiment, the upper arms may not be configured in a coaxial manner. This can have a separate shoulder joint. The dual link and quad arm two link devices need not have the same length of the upper arms and the same length of the forearms. The length of the upper arm of one link device may differ from the length of the upper arm of the other link device and the length of the paw arm of one link device may be different from the length of the paw arm of the other link device. The forearm-to-upper arm ratio may be different for the two link devices. In the dual and quad arm aspects of the embodiment having different heights of links of the left link device and the right link device, the left link device and the right link device can be interchanged. The two link devices of the dual and quad arms need not extend along the same direction. The arms can be configured such that each link device extends in a different direction. In any aspect of the embodiment, the two link devices may be made up of more than three links (a first link = an upper arm, a second link = a forearm, a third link = a link with an end effector). In the dual and quad arm aspects of this embodiment, each link device may have a different number of links. In single arm aspects of the embodiment, the third link may retain one or more end effectors. Any suitable number of end effectors and / or material holders may be maintained by the third link. Likewise, in the dual arm aspect of the embodiment, each link device can maintain any suitable number of end actuators. In any case, the end effectors can be placed in the same plane, placed on top of each other, placed in a combination of the two, or in any other suitable manner. Moreover, for a dual arm configuration, each arm may be independently operable and may be independently operable, for example, in rotation, extension and / or z (vertical), for example, 13 / 670,004 (filed on 2012. 11.6), which is incorporated herein by reference. Accordingly, all variations, combinations, and alterations are encompassed.

Referring to Figure 63, a graphical representation 1100 of an exemplary pulley is shown. An exemplary pulley profile may be for an arm with an unequal link length as will be described later. For example, the graph 1100 may represent a profile for a wrist pulley when the elbow pulley is circular. Here, the design of the following example is used for Re / 12 = 0.2, where Re is the radius of the elbow pulley and 12 is the joint-to-joint length of the forearm. Alternatively, any suitable ratio can be provided. For the sake of clarity, the graph represents a case of extreme design compared to a pulley for an equivalent link arm. The outermost profile 1110 is for 12/11 = 2, where 12 is the joint-to-joint length of the forearm and 11 is the joint-to-joint length of the upper arm, Represents a long pore arm. The intermediate profile 1112 is 12/11 = 1, for example, with an equivalent link length. The innermost profile 1114 is 12/11 = 0.5, for example in this case a short forearm. In the illustrated embodiment, a polar coordinate system 1120 is used. Here, the radial distance is normalized with respect to the radius of the elbow pulley and is expressed, for example, as a multiple of the radius of the elbow pulley. That is, Rw / Re is shown, where Rw represents the polar coordinate of the list pulley and Re represents the elbow pulley. The angular coordinate is deg and zero is oriented along the direction 1122 of the end effector, e.g., the end effector is oriented to the right with respect to the drawing.

Referring now to Figures 64 and 65, two additional configurations of arms with unequal link lengths 1140 and 1150 are shown. The arm 1140 is shown with a pawl arm 1144 that is longer than the upper arm 1142 wherein the single arm configurations have features disclosed in connection with Figures 1 through 4 and 5-8, Can be used. In the illustrated embodiment, the two end effectors 1146, 1148, which support the individual substrates 1150, 1152, are rigidly connected to one another and oriented in opposite directions. The substrates are offset from the list 1154 and move in a radial path that coincides with the center 1156 of the robot 1140, as shown. Likewise, the arm 1160 is shown having a pawl arm 1164 that is shorter than the upper arm 1162, wherein the single arm configuration is similar to the features disclosed with respect to Figs. 1-4 and 5-8, Features. In the illustrated embodiment, the two end effectors 1166, 1168 supporting the individual substrates 1170, 1172 are rigidly connected to one another and oriented in opposite directions. The substrates are offset from the list 1174 and move in a radial path that coincides with the center 1176 of the robot 1160, as shown. Here, the features of the disclosed embodiments may be shared similarly to any of the other disclosed embodiments.

Referring now to Figures 66 and 67, a dual arm robot 1310 is disclosed, which has a stacked, side-by-side actuator configuration. The device is described in U. S. Patent Application No. < 13 / 618,117 (Sep. 14, 2012). Low Variability Robot &quot; in U.S. Patent Application No. 2013/0071218 (March 31, 2013). 14 / 601,455 (May 21, 2015), the disclosure of which is incorporated herein by reference. Alternatively, the embodiment may be used in any suitable device or application. The disclosed apparatus may provide a robot 1310 with two end actuators, which may include (i) have a small footprint to rotate and move within a narrow tunnel, (ii) have both end actuators Can access the same station independently or simultaneously, and (iii) can independently or simultaneously access stations that are side by side offset.

Exemplary embodiments of the robot 1310 are schematically illustrated in Figures 66a-66d and Figures 67a-67d. The robot can be composed of a robot driving unit 1312 having a robot arm 1316 and a pivot base 1314 around the axis 1334. The robot arm 1316 features two link devices, i.e., a left link device 1318 and a right link device 1320. Figs. 66A to 66D show a robot in which both link devices are contracted, and Figs. 67A to 67D show a robot in which a left link device 1318 is extended.

The left link device 1318 may comprise a left upper arm 1322, a left forearm 1324, and a left end actuator 1326. The left upper arm 1322 can be coupled to the base via a rotary joint or shaft 1336 and the left forearm 1324 can be coupled to the left upper arm 1322 by another rotary joint or shaft 1338 And the left end effector 1326 can be coupled to the left forearm 1324 by another rotary joint or axis 1340. [

Likewise, the right link device 1320 may be comprised of a right upper arm 1328, a right forearm 1330, and a right end actuator 1332. The right upper arm 1328 can be coupled to the base via a rotary joint or shaft 1342 and the right upper arm 1330 can be coupled to the right upper arm 1328 by another rotary joint or axis 1344. [ And right end actuator 1332 can be coupled to right forearm 1330 by another rotary joint or axis 1346. [

The joint-to-joint length of the left forearm may be longer than the joint-to-joint length of the left upper arm. Alternatively, the joint-to-joint length of the left forearm may be equal to the joint-to-joint length of the left upper arm. As another alternative, the left forearm and the left upper arm may have any other suitable lengths.

Similarly, the joint-to-joint length of the right forearm may be longer than the joint-to-joint length of the right upper arm. Alternatively, the joint-to-joint length of the right forearm may be equal to the joint-to-joint length of the right upper arm. As another alternative, the right forearm and right upper arm may have any other suitable length.

In the examples of FIGS. 66A to 66D and 67A to 67D, the joint-to-joint lengths of the left and right upper arms and the left and right fore arms are shown to be the same. Likewise, the dimensions of the left and right end actuators, including length and lateral offset, are shown to be the same. However, the linkage may be characterized by any suitable dimensions of the upper arm, the forearm and the end actuators.

The distance between the joints joining the left and right upper arms to the base may be selected to satisfy the following relationship to allow the two end actuators to approach stations that are simultaneously offset in parallel.

D = 2d0 (One)

Where D = the center-to-center distance of the side offset stations, and d0 is the distance (m) between the joints joining the left and right upper arms to the base.

Furthermore, the dimensions of the link devices may be selected to satisfy the following relationship so that the two end actuators can simultaneously access the same station.

d0 = l2L-l1L + d3L + l2R-l1R + d3R (2)

The following nomenclature is used in the above equation (2): d3L = lateral offset (m) of the left end effector, d3R = lateral offset (m) of the right end actuator, 11L = joint- 12R = joint-to-joint length (m) of the left forearm, 12R = joint-to-joint length of the right forearm (m) Joint length (m).

When the robot arm is symmetrical, that is, when the left link device and the right link device have the same dimensions, equation (2) can be simplified as follows.

d0 = 2 (12 - 11 + d3) (3)

Where d3 is the lateral offset (m) of the end effector, 11 is the joint-to-joint length (m) of the upper arms, and 12 is the joint-to-joint length (m) of the forearm arms.

Figures 68A and 68B schematically illustrate exemplary configurations 1398,1438 that may be used to drive the base of the robot and individual links, i.e., upper arms, pillar arms, and end actuators. As shown in Figs. 68A and 68B, the base may be driven by the drive shafts 1400 and 1448, and may be driven by, for example, TO.

The left upper arms 1402 and 1454 can be operated by the drive shafts T1L, 1420 and 1440. [ The left forearms 1406 and 1456 may be coupled to the other drive shafts T2L, 1422 and 1442 through a band arrangement with at least one non-circular pulley. So that the rotation of the upper left arm causes the left list joint, that is, the joint joining the left end actuators to the left forearm, to extend and retract along a straight line parallel to the desired straight path of the left end actuators, Can be designed.

The left end effector 1410 may be limited by another band configuration with at least one non-circular pulley, which compensates for the effects of unequal lengths of the left upper arm and the left forearm, And can move along a straight line while maintaining the desired orientation.

Alternatively, if 11L = 12L, conventional pulleys can be used as shown in FIG. 68B. In this embodiment, a band configuration is designed to couple the left forearm to the shaft T2L so that the diameter of the pulley coupled to the shaft T2L is twice the diameter of the pulley coupled to the left forearm. The band structure is designed to limit the left end end effector so that the diameter of the pulley attached to the left upper arm is half the diameter of the pulley attached to the left end end effector.

Likewise, the left upper arms 1404,1450 can be actuated by drive shafts T1R 1424,1444. The right forearms 1408 and 1452 can be coupled to the other drive shafts T2R 1426 and 1446 through a band arrangement with at least one non-circular pulley. The rotation of the right upper arm causes the right list leg to extend and retract along the straight line parallel to the desired straight path of the right end end effector 1412, i.e., the joint that couples the right end end effector to the right forearm. , The band configuration can be designed.

The right end operation 1412 can be limited by another band configuration with at least one non-circular pulley, which compensates for the effect of the unequal length of the right upper arm and the right forearm, And can move along a straight line while maintaining the orientation.

Alternatively, if 11R = 12R, conventional pulleys can be used as shown in FIG. 68B. In this embodiment, the band configuration for coupling the right forearm to the shaft T2R is designed such that the diameter of the pulley coupled to the shaft T2R is twice the diameter of the pulley coupled to the right forearm. The band configuration is designed to limit the right end actuator so that the diameter of the pulley attached to the right upper arm is half the diameter of the pulley attached to the right end actuator.

(T0, T1L, T2L, T1R, T2R) need to move in the same amount of arm rotation direction relative to the fixed reference frame so that the entire robot arm is rotated (or other drive shafts The drive shaft T0 needs to move while it can be seen stationary with respect to the base). This is schematically shown in Figs. 69A and 69C. In this particular example, the entire robot arm rotates 180 degrees counterclockwise.

The drive shaft T1L must be moved at an angle determined based on the kinematic reciprocal equations of the left link device while the shafts TO and T2L are kept stationary such that the left end actuator extends and contracts along the straight path . A robot 1500 with left and right arms 1502 and 1504 having a left end end elongated from the initial position of Figure 69A is shown schematically in Figure 69d.

Likewise, while the shafts T0 and T2R are kept stationary, the right-hand end effector must be moved at a determined angle based on the kinematic inverse equation of the right link device, while the shafts T0 and T2R are held stationary, . The robot with the right end end extended from the initial position of Figure 69a is schematically shown in Figure 69e.

Both left and right end actuators of the robot can simultaneously stretch and contract along a straight path by rotating the drive shafts T1L and T1R in opposite directions and if the left and right link devices are characterized by the same dimensions, It is stretched and contracted in the same amount. The robot with both left and right end actuators extended from the initial position of Figure 69 (a) is schematically shown in Figure 69 (f).

The above-described movements in conjunction with Figures 69d-69f allow robots to extend / retract from the same station or from the same station independently or simultaneously. Thus, the robot can lift / lower materials such as semiconductor wafers into / from the same station, either independently or simultaneously, along the straight path 1510 with both end actuators.

The left and right link devices 1502 and 1504 can be individually rotated. In order to rotate the left linkage, the drive shafts T1L, T2L need to move in the same amount in the desired rotational direction. Similarly, in order to allow the right link device to rotate, the drive shafts T1R, T2R need to move in the same rotational direction in the same magnitude.

When the left and right link devices individually rotate 180 degrees, the left end effector and the right end implement are offset laterally, as shown in the exemplary schematic diagram shown in Figs. 70A-70C. In this particular example, the left link device 1502 rotates clockwise and the right link device 1504 simultaneously rotates counterclockwise (avoiding the risk of collision of the left and right list joints). However, the left and right link devices can rotate independently in the same direction or in any other suitable manner.

As a result of the individual rotation of the left and right link devices described above, if the dimensions of the robot satisfy the conditions of equations (1) and (2), then the centers of the left and right end actuators are offset laterally Lt; / RTI &gt;

If the end effector offset reconstruction by individual rotation of the left and right link devices is preceded or followed by the rotation of the entire arm, the motions can be conveniently mixed to minimize the overall delay.

70C, the left end actuators can again be extended and retracted along the straight path 1512 by moving the drive shaft T1L while keeping the shafts T0, T2L stationary. Similarly, by moving the drive shaft T1R while keeping the shafts T0 and T2R stationary, the right end end effector can be stretched and contracted along the straight path. Finally, both left and right end actuators of the robot can be stretched and retracted simultaneously along the straight path by rotating the drive shafts T1L, T1R in opposite directions, and if the left and right linkages have the same dimensions If it is characterized, it is made in the same amount.

The robot with the left end end extended from the initial position in Figure 70c is schematically shown in Figure 70d; The robot with the right end end extended from the initial position in Figure 70c is schematically shown in Figure 70e; The robot with the left and right end actuators extended from the initial position in Figure 70c is schematically shown in Figure 70f.

The above-described movements in conjunction with Figures 70e-70f allow the robot to extend / retract the end actuators from two side by side offset stations / stations. Thus, the robot can lift / lower materials such as semiconductor wafers from / to two stationary offset stations independently or simultaneously.

In the case of the path 1514 or 1516 in FIG. 71, for example, in the case where the access path to the parallel offset stations is not parallel, the robot may rotate the left and right link devices individually, Aligns the direction with the access path to the station. An example of such a scenario is schematically illustrated in the schematic diagram of Figures 71A-71C. Assuming the initial position of the schematic 71a, the left and right link devices can be rotated to reconstruct the arm such that the end actuators are laterally and angularly offset as shown in Figure 71b. In this particular example, the angle offset between the left end effector and the right end effector is 30 degrees. From the retracted position of Figure 71 (b), the left link devices can be stretched independently or simultaneously, as shown in Figure 71 (c).

The robot may approach the stations independently or 180 degrees apart as shown in the example of Figures 71d and 71e. In this particular example, assuming the starting position of Fig. 71A, the left and right link devices initially rotate in the configuration of Fig. 71d, and then the left and right end actuators and / Can be stretched independently or simultaneously.

Although both left and right link devices are shown schematically as elongated in Figure 71E, in an alternate aspect, only one of the two link devices can be elongated. Here, the arrival of the link devices (measured from the center of the robot, as indicated by the axis T0 of the drive shaft) is far from the configuration shown in Figure 71E, Lt; / RTI &gt;

The robots can be driven using configurations of 3-axis to 5-axis drives depending on the number of degrees of freedom required in a particular application.

The configuration of the three-axis drive may include three independently controlled motors M0, M1, M2 as shown in the two examples 1600, 1700 of Figures 72a, 72b, 72c and 72d have.

72A and 72B show a top view and a side view, respectively, of an exemplary arrangement 1600 of the robot drive unit and arm base 1618, wherein the motor M0 includes a shaft T0 1602, The motor M1 1604 is directly attached to the shaft T1L 1610 to drive the upper left arm and the motor M2 1606 is directly attached to the shaft T2R 1616 So that it is coupled to the right forearm. Furthermore, the shafts T1L 1610 and T1R 1614 are used in two belt configurations 1620 and 1622, respectively, to rotate in different directions than the shafts T2L 1612 and T2R 1616. This is accomplished through a crossover band arrangement 1620 between the shafts T1L and T1R and likewise by another crossover band arrangement 1622 between the shafts T2L and T2R.

Alternatively, the drive 1700 may have motors (M0 1702, M1 1704, M2 1706) disposed in the drive unit and the movement may be controlled by the band drivers 1720, 1722, as described in the example of Figures 71c and 72d, T1L 1710 and T1L 1712, and T2L 1712 and T2R 1716, respectively, using motors M1 and M2.

In another alternative, any suitable combination of band configuration and direct coupling between motors and drive shafts may be employed. In general, any suitable means for transferring motions between motors and drive shafts, which provide the desired motion relationship, can be used.

When the configuration of the three-axis drive according to the example of Figs. 72A to 72D is used, the robots are shown in Figs. 69 to 69 except for the independent stretching and contracting of the left and right link devices (schematic diagrams D and E in Figs. 69 and 70) It is possible to perform all the operations shown in FIG.

The configuration of the four-axis drive may include four independently controlled motors as shown in examples 1800 and 1900 of Figures 73A and 73B. 73A and 73B show a plan view and a side view of the robot drive unit and the arm base 1802. Fig. The motors M0 1804, M1L 1808, and M1R 1810 may be used to operate the shafts T0 1804, T1L 1808, T1R 1810, respectively, in an independent manner. Motors M2 and 1806 may be used to actuate shafts T2L 1812 and T2R 1814 so that the two shafts rotate in opposite directions. In a particular example of the schematic diagram of Figures 73A and 73B this includes a straight band arrangement 1820 between the shaft T2L and the pulley coupled to the motor M2 and a straight band arrangement 1820 between the shaft T2R and the motor M2 Is accomplished through a crossover band arrangement 1822 between the other pulleys combined.

Alternatively, any combination of direct coupling and band configuration that facilitates the independent operation of the shafts T0, T1L, T1R and the combined operation of the shafts T2L, T2R, or any combination of movement between the motor and drive shafts Lt; / RTI &gt; can be employed.

When the configuration of the four-axis drive is used, the robot can perform all the operations according to Figs. 69 to 71 and includes independent extension and contraction of the left and right link devices.

5-axis drive configuration 1900 includes five independently controlled (not shown) drives that can be coupled to directly drive the shafts T0, T1L, T2L, T1R, T2R, as shown in the example of schematic diagrams of Figures 73C and 73D 73C shows a top view, and FIG. 73D shows a side view of the drive unit 1900 and base 192, which can be used to drive the motor 1900, 72C and 72D through a band drive and by using a combination of direct coupling and band construction or by using any other suitable device that can facilitate transfer of motions from motors to drive shafts Can be done in an appropriate manner.

When a configuration of 5-axis drive is used, the robot can perform all the operations according to Figs. 69-71. Also, the left and right link devices can be operated in a completely independent manner, including independent rotations, which can not be supported in a three-axis and four-axis drive configuration.

Another exemplary inner configuration of the linkage and the base of the robot 2010 of Figure 66 is shown schematically in Figure 74a. Again, the base 2012 can be driven by the drive shaft T0.

The left upper arm 2014 can be actuated by the drive shaft T1L. The left forearm can be driven by another drive shaft T2L through a band arrangement with conventional pulleys. The left end end effector may be limited by another band configuration with at least one non-circular pulley, which compensates for the effects of unequal lengths of the left upper arm and the left forearm, And can move along a straight line while maintaining the orientation. Alternatively, if 11L = 12L, conventional pulleys with arm 2030 with base 2032, left arm 2034 and right arm 2036 can be used as shown in FIG. 74B.

Likewise, the right upper arm 2016 can be actuated by the drive shaft T1R. The right upper arm can be driven by the other drive shaft T2R through a band arrangement with a conventional pulley. The right end actuator can be limited by another band configuration with at least one non-circular pulley, which compensates for the effect of the unequal length of the right upper arm and the right forearm, so that the right- And can move along a straight line. Alternatively, if 11R = 12R, conventional pulleys can be used as shown in Figure 74B.

In order to allow the entire robot arm to rotate, it is necessary that all drive shafts T0, T1L, T2L, T1R, T2R move in the desired rotational direction of the arm to the same size with respect to the fixed reference frame It is necessary for the drive shaft T0 to move while being stationary with respect to the base).

In order to allow the left end implement to elongate and contract along the straight path, the drive shafts T1L, T2L need to move in a coordinated manner according to the kinematic inverse equation of the left link device. Similarly, it is necessary for the drive shafts T1R, T2R to move in a harmonious manner along the kinematic inverse equations of the right link device, so that the right end actuator will extend and contract along the straight path. An example kinematic equation can be found above.

Both end actuators of the robot can be stretched and contracted along a straight path by simultaneously rotating the drive shafts T1L, T2L and d T1R, T2R in the manner described above for independent extension of the left and right end actuators .

The left and right link devices may be rotated individually. In order to allow the left link device to be rotated, the drive shafts T1L and T2L need to move in the same amount in the desired rotational direction. Likewise, in order to allow the right link device to be rotated, the drive shafts T1R, T2R need to move in the same amount in the desired rotational direction. Similar to FIGS. 68A and 68B, when the left and right link devices individually rotate 180 degrees, the left endoperator and the right end actuator are laterally offset, as shown in FIGS. 70A to 70C.

Considering the performance of the motion, a robot having an inner configuration according to Figs. 74A to 74B can perform the same operations as those outlined in Figs. 69 to 71. Fig.

The bases and link devices having the inner configurations of Figs. 74A and 74B can be driven by the configurations of the three-axis and five-axis drives of Figs. 72, 73C and 73D, respectively.

Another exemplary embodiment of the robot 2100 is shown in the schematic view of Figures 75a and 75b. Figure 75a shows a top view of a robot with both linkages constricted and Figure 75b shows a robot with both end actuators extended.

An exemplary inner configuration of the robot is shown schematically at 2330 in Figure 76a. In the figure, a base 23332 is shown with linkages 2334, 2336 having upper arms of equal length and pawl arms and circular pulleys. However, unequal lengths and non-circular pulleys may be used.

The robot may be operated by the drive part configurations previously described with reference to Figures 72 and 73. [

An alternate inner configuration of the robot of Figures 75a and 75b is schematically shown at 2360 in Figure 76b. In the figure, link devices 2364 and 2366 with a circular pulley with upper arms and pile arms of equivalent length and base 2362 are shown; However, non-equivalent lengths and non-circular pulleys may be used.

The robot can be operated by the configuration of the driving unit according to Figs. 72, 73C and 73D.

Another exemplary embodiment of the robot 2200 is shown in the schematic view of Figures 75c and 75d. Fig. 75C shows a top view of a robot in which both link devices are retracted, and Fig. 75D shows a robot in which both end actuators are extended. 75C and 75D show a link device of a robot in a left handed configuration. Alternatively, the linkage may be configured in a right-handed arrangement, as shown in Figures 75E and 75F with the robot 2300. [

An exemplary inner configuration of the embodiments according to Figs. 75C and 75D is schematically represented by 2390 in Fig. 76C. Likewise, an exemplary inner configuration of the embodiment according to Figs. 75E and 75F is schematically represented by 2430 in Fig. 76D. 76c and 76d, linkages 2394, 2396, 2434, and 2436 are depicted having upper arms of equal length and pawl arms and a circular pulley; However, non-equivalent lengths and non-circular pulleys may be used.

The robot can be operated by the construction of the driving unit according to Figs. 77A to 77D, 78A to 78B, 73C and 73D. In Figs. 77A and 77B, the driver 2500 has a base 2504 driven by a motor M02 2502. Fig. The M1 2506 drives the T11 2510 while the M2 2508 drives the T2r 2516 and T2r 2516, which are limited by the band, and the T2r2516, which is limited by the band T1l 2510 and T1R 2514, respectively. In Figures 77C and 77D, the driver 2560 has a base 2562 driven by a motor M0 2564. M1 2566 drives T11 2570 while T2 2572 and T2r 2576 limited by bands and M2 2568 driven by T2l 2576 with T1l 2570 and t1r 2574 limited by band. 78A and 78B, the driver 2700 has a base 2702 driven by a motor (M0 2704). Mlr 2708 drives T1r while M2 2710 drives T2r 2714 and T2l 2712 by the band while M11 2706 drives T11.

For example, when the configuration of the three-axis drive portion is used according to the example of Fig. 77, the robot can perform all the operations defined in Figs. 69 and 70 except for the independent stretching and contraction of the left and right link devices 69 and 70 D and E). This can not perform simultaneous stretching and contraction along the non-parallel, opposite paths of FIG.

When a four-axis driver configuration as in the example of Fig. 78 is used, the robot can perform all operations according to Figs. 69 and 70, including independent stretching and contraction of the left and right link devices. This can not perform simultaneous stretching and contraction along the non-parallel, opposite paths of FIG.

When the configuration of the five-axis driving portion is used, the robot can perform all the operations according to Figs. Moreover, the left and right link devices can be operated in a completely independent manner, including independent rotations, which can not be supported in a three-axis and four-axis drive configuration.

The disclosed example shows a preferred reach-to-containment ratio. Combined with the configuration of the three-axis drive of Figs. 77A and 77B, provides a low profile and small complexity. Furthermore, in combination with the configuration of the four-axis driver, the disclosed example supports independent extension of the left and right links.

An alternative interior configuration for the exemplary embodiments of the schematic views of FIGS. 75A-D is schematically illustrated at 2800, 2830 in FIGS. 79A and 79B, respectively. In the figure, bases 2802, 2832 are shown with linkages 2804, 2806, 2834, 2836 with circular arms and pillar arms of equal length and with circular pulleys; However, non-equivalent lengths and non-circular pulleys may be used.

The robot can be operated by the configuration of the driving unit according to Figs. 77, 73C and 73D.

Although the left and right link devices are shown with the same dimensions in the figures, the left link device can have a different dimension than the right link device, and the drive unit can be configured to reflect the difference in dimensions.

Such that the upper arms and / or forearms, some of the links are below one or both of the end actuators, and the other links are on one or both of the end actuators, Can be designed.

When the terms band arrangements and band drivers are used, this generally refers to means for delivering motions, forces and / or torques, and may refer to means such as a band, belt, cable, .

Although the motors of a robot are shown as being directly attached to the shafts, pulleys and other driven components in the figures throughout the specification, the motors may include additional bands, belts, cables, gears, / RTI &gt; and / or any other suitable configuration capable of delivering torque. &Lt; RTI ID = 0.0 &gt;

Although the motors of the robots are depicted throughout the specification as being in the drive unit or base in the drawings, the motors may be located inside the robot arm, for example as part of the upper arm (s) or the forearm Or may be incorporated into a rotary joint of the robot.

The driving unit of the robot may further include a vertical elevation mechanism for adjusting the height of the entire robot arm. Alternatively, the drive unit may include two vertical lift mechanisms, one for the left link device and another for the right link device, to independently adjust the height of the left and right link devices. Here, the end effectors can be loaded or set at the same level, or otherwise can be positioned independently in the z-axis.

In alternative embodiments, any number and any type of appropriate mechanisms may be used within the robot driver and / or robot arm to control the height of the left and right end actuators of the robot.

The robot may further comprise a traverser mechanism, which may allow the robot to move along, for example, a tunnel in which the robot is installed.

In another embodiment, the robot may be designed in an upside-down configuration, for example, the support is provided from above, not from the bottom.

The robot can be combined with other robots of the same or similar type, for example, in a reversed configuration to provide a system with four end effectors, which can support rapid material exchange.

The robot may be designed for operation in a particular environment, such as in a vacuum, which may include the use of static seals and / or dynamic seals, and some of the components of the robot, And other means of isolating it from the operating environment.

80A shows a system 2900 with a robot. The robot drive unit 2904 can be configured to be movable relative to the stationary portion 2902 of the system indicated by arrows 2906 and 2908. [ As an example, the robotic drive unit may be on a rail, a linear bearing magnetic bearing, or may be coupled to a stationary portion of the system in any suitable manner that allows the robotic drive unit to move relative to the stationary portion of the system . As an example, the robot drive unit may be driven by an electric linear motor with windings in the drive unit, by an electric linear motor with windings in the stationary portion of the system, through a magnetic coupling, through a pneumatic or hydraulic actuator, By using a screw, through a cable or belt, or by any other suitable configuration capable of operating the robotic drive unit relative to a stationary portion of the system. As described in the original writing-up, the robot driving unit may include a pivot base and a robot arm. In the schematic view (a), the pivot base is operated with respect to the robot driving unit as indicated by an arrow.

80B illustrates a system 3000 having a configuration in which the pivot base 3004 is directly actuated relative to the stationary portion 3002 of the system as indicated by arrows 3006, 3008 on the side of the pivot base. When both sides of the pivot base are synchronously operated in the same amount in the same direction, the entire robot is translated in the corresponding direction. When the sides of the pivot base are synchronously operated in the same direction in opposite directions, the pivot base rotates while its center remains stationary. Any combination of translation and rotation can be achieved by operating the sides of the pivot base accordingly. For example, by a linear electric motor with a winding in the pivot base, by an electric linear motor with a winding in the stationary part of the system, through magnetic coupling, through a ball screw, through a cable or belt, or By using any other suitable configuration capable of operating the pivot base relative to the stationary portion of the system, the base can be operated.

According to one aspect of an exemplary embodiment, an apparatus includes at least one driver; A first robot arm including a first upper arm, a first pawl arm and a first end effector, wherein the first upper arm is connected to at least one drive at a first rotational axis; And a second robot arm including a second upper arm, a second pillar arm, and a second end effector, wherein the second upper arm is connected to at least one drive unit at a second rotational axis spaced from the first rotational axis, And a second robot arm, the first and second robot arms being adapted to position the end actuators in the first retracted positions so as to at least partially load the substrates positioned on the end actuators, Wherein the first and second robotic arms are configured to extend the end actuators from the first retraction positions in a first direction along at least partially parallel first paths that are located directly on top of the other And the first and second robotic arms are configured to extend the end actuators in at least one second direction along second spaced apart paths that are not located above each other And a first upper arm and a first fore arm has a different effective length, a second upper arm and a second arm pores has a different effective length.

According to another aspect, the apparatus includes a first band and at least one non-circular pulley connecting at least one drive to a first paw arm at a first joint between the first upper arm and the first paw arm.

According to another aspect, the apparatus includes a second band connecting the first end effector to the first joint at the list joint of the first end effector for the first paw arm.

According to another aspect, the apparatus includes the first and second end actuators each having an overall L shape.

According to another aspect, the apparatus includes a first band and a first circular pulley connecting at least one drive to a second circular pulley at a first joint between the first upper arm and the first pillar arm, 2 Pulleys have different diameters.

According to another aspect, the apparatus includes the first paths following a straight line from the first retraction locations.

According to another aspect, the apparatus includes first and second robotic arms configured to provide second retraction locations for positioning the end actuators such that one or more substrates positioned on the end actuators are not stacked on top of one another .

According to another aspect, an apparatus includes a controller, wherein the controller is configured to move first and second robot arms substantially simultaneously from first retracted positions along first paths, 1 and at least one driver to move the second robot arms.

According to another aspect, a method includes providing a first robot having a first upper arm, a first pawl arm and a first end effector, wherein the first upper arm and the first pawl arm have different effective lengths, step; Providing a second robot arm including a second upper arm, a second pawl arm and a second end effector, wherein the second upper arm and the second pawl arm have different effective lengths; Connecting the first upper arm to the at least one driver at a first rotational axis; And connecting the second upper arm to the at least one driving unit at a second rotational axis spaced from the first rotational axis, wherein the substrates positioned on the end actuators are at least partially loaded onto one another The first and second robot arms are configured to position the end actuators in the first retraction locations to position the end actuators in the first retracted positions, One of the first and second robotic arms is configured to extend the end actuators from the first retraction positions in a first direction along parallel first paths located directly on top of the other, And extend the end actuators in at least one second direction along second paths spaced from each other that are not located.

According to another aspect, a method includes providing a first band connecting at least one drive to a first pawl at a first joint between a first upper arm and a first pawl arm and at least one non-circular pulley at a first pivot axis .

According to another aspect, the method includes, in a list joint of a first end effector for a first paw arm, a second band connecting the first end effector to the first joint.

According to another aspect, a method includes a first band and a first circular pulley connecting at least one drive to a second circular pulley at a first joint between a first upper arm and a first pillar arm, 2 Pulleys have different diameters.

According to another aspect, the method includes configuring the first and second robotic arms to provide first paths along a straight line from the first retraction locations.

According to another aspect, the method includes configuring the first and second arms to provide second retraction locations for positioning the end actuators such that one of the substrates positioned on the end actuators is not stacked on top of the other .

According to another aspect, the method further includes moving the first and second robotic arms such that they move substantially simultaneously along the first paths from the first retracted positions and move the first and second arms individually or simultaneously along the second paths , And connecting at least one driver to a controller configured to control at least one driver.

According to another aspect, a method is provided for mounting first and second end actuators of first and second separate robotic arms on a first Positioning the first robot arm in a retracted position, wherein the first robot arm has a first upper arm, a first pawl arm and a first end actuator, the first upper arm connected to at least one drive at a first rotational axis, The second robot arm including a second upper arm, a second pawl arm and a second end actuator, the second upper arm being connected to at least one drive at a second rotational axis spaced from the first rotational axis; Moving the first and second robotic arms such that at least partially one of the parallel first paths directly on top of the other moves the end actuators from the first retracted positions in the other first direction; And moving the first and second robotic arms to move the end actuators to stretch the end actuators in at least one second direction along second paths spaced from each other and not above each other do.

According to another aspect, the moving step of the first and second robot arms in the method includes a first band connecting at least one drive to a first pillar arm at a first joint between the first upper arm and the first pillar arm, And includes a non-circular pulley.

According to another aspect, the moving step of the first and second robotic arms in the method includes a second band connecting the first end effector to the first joint in the list joint of the first end effector for the first paw arm do.

According to another aspect, moving the first and second robotic arms in the method includes moving a first band connecting at least one drive to a second circular pulley at a first joint between the first upper arm and the first paw arm, One circular pulley, and the first and second pulleys have different diameters.

According to another aspect, the method includes moving the first and second robot arms substantially simultaneously from the first retraction locations along the first paths, and moving the first and second robot arms along the first paths either individually or simultaneously And a controller for controlling the at least one driving unit to move.

According to another aspect, an apparatus includes a first robot arm having a first upper arm, a first pawl arm and a first end effector; A second robot arm having a second upper arm, a second pawl arm and a second end effector; And a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at the first rotation axis, and the second upper arm is connected to the driving unit at the second rotation axis spaced from the first rotation axis And the drive portion includes only three motors for rotating the first and second upper arms, the first and second robotic arms being configured to allow the substrates positioned on the end actuators to be at least partially loaded onto one another, Wherein the first and second robotic arms are configured to position the end effector from the first retraction positions such that the first and second robotic arms are configured to move from the first retraction positions to the first retract position in a first direction along first parallel paths, Wherein the first and second robotic arms are configured to extend the end effectors from the positions along the second paths spaced from each other, It is also configured to stretching end effector in a first direction.

According to another aspect, in the apparatus, the first upper arm and the first pawl arm have different effective diameters, and the second upper arm and the second pawl arms have different effective diameters.

According to another aspect, the apparatus includes a first band connecting the drive to the first pawl at the first joint between the first upper arm and the first paw arm, and at least one non-circular pulley.

According to another aspect, the apparatus includes a second band connecting the first end effector to the first joint at the list joint of the first end effector for the first paw arm.

According to another aspect, the first and second end actuators in the device each have an overall L shape.

According to another aspect, the apparatus includes a first band and a first circular pulley connecting a drive to a second circular pulley at a first joint between the first upper arm and the first pillar arm, and the first and second pulleys And have different diameters.

According to another aspect, the first paths in the apparatus follow a straight line from the first retraction locations.

In another aspect, the first and second robotic arms are configured to provide second retraction locations for positioning the end actuators such that one of the substrates positioned on the end actuators in the apparatus is not stacked on top of the other.

According to another aspect, the apparatus is configured to move the first and second robotic arms substantially simultaneously from the first retraction positions along the first paths and to move the first and second robot arms individually or simultaneously along the second paths And a controller configured to control the driving unit.

According to another aspect, the apparatus includes aligning the three motors on a common axis.

According to another aspect, the device has three motors positioned on three separate spaced axes.

According to another aspect, the apparatus includes a drive unit and a z-axis motor connected to the drive unit for vertically moving the first and second robot arms.

According to another aspect, a method is provided for moving a first end effector of a first and a second individual robot arm in a first retract position and a second end actor of a first and a second individual robotic arm in a first retract position to at least partially load substrates one on top of the other, Positioning the second end effector, wherein the first robot arm includes a first upper arm, a first pawl arm, and a first end effector, the first upper arm is connected to the drive at a first rotational axis, 2 robot arm includes a second upper arm, a second pawl arm, and a second end effector, and the second upper arm is connected to the drive at a second rotational axis spaced from the first rotational axis; Moving the first and second robotic arms to move the end actuators from the first retraction positions in a first direction along one of the parallel first paths that are at least partially located directly on top of the other; Moving the first and second robot arms to move the end actuators to stretch the end actuators in at least one second direction along one of the second paths spaced from each other that are not located on the other; Rotating the first and second robotic arms together about a third rotational axis spaced from the first and second rotational axes, the method comprising moving from a first retracted position in a first direction, The step of moving and rotating the end actuators in two directions to stretch is accomplished using only the three motors of the drive.

According to another aspect, moving the first and second robotic arms in the method includes moving a first band connecting the drive to the first paw arm at a first joint between the first upper arm and the first paw arm, But also pulleys.

According to another aspect, moving the first and second robotic arms in the method includes moving a first band end of the first end arm to a second end of the first end arm, .

According to another aspect, moving the first and second robot arms in the method includes moving a first band connecting the drive to a second circular pulley at a first joint between the first upper arm and the first pillar arm, And the first and second pulleys have different diameters.

According to another aspect, the method includes moving the first and second robotic arms substantially simultaneously from the first retraction positions along the first paths and moving the first and second robotic arms individually or simultaneously along the second paths And a controller for controlling the motors of the driving unit.

According to another aspect, a method includes providing a first robot arm having a first upper arm, a first pawl arm, and a first end effector; Providing a second robot arm having a second upper arm, a second pawl arm and a second end effector; Connecting the first upper arm to the driving unit at a first rotational axis; And connecting a second upper arm to a drive unit at a second rotation axis spaced from the first rotation axis, wherein the first and second upper arms are mounted on the end actuators such that the substrates positioned on the end actuators are at least partially Wherein the first and second robot arms are configured to position the end actuators in the retracted positions, and wherein the first and second robot arms are configured such that at least partially in one direction along the first parallel paths, To extend the end effectors in at least one second direction along second spaced apart second paths that are not located above each other and are configured to cause the first and second robot arms to rotate The first and second robot arms are configured to be rotated, and the drive has only three motors, which extend the end actuators Claim is for rotating the first and the second rotation of the robot arm and the second and the first and the first and second robot arm in the third rotational axis spaced from the second axis of rotation.

According to another aspect, in the method, the first robot arm is provided with a first upper arm and the first pawl arm has different effective lengths, the second robot arm is provided with a second upper arm, and the second pawl arm is provided with a different effective length .

According to another aspect, the method includes a first band connecting the drive to the first pawl at the first joint between the first upper arm and the first pawl arm and at least one non-circular pulley at the first pivot axis.

According to another aspect, the method includes a second band connecting the first end effector to the first joint at the list joint of the first end effector for the first paw arm.

According to another aspect, a method includes a first band and a first circular pulley connecting a drive to a second circular pulley at a first joint between a first upper arm and a first pillar arm, the first and second pulleys And have different diameters.

According to another aspect, in the method, the first and second robotic arms are configured to provide first paths along a straight line from the first retraction locations.

According to another aspect, the first and second arms are configured to provide second retraction positions for positioning the end actuators so that the substrates positioned on the end actuators are not stacked on top of one another in the method.

According to another aspect, the method includes moving the first and second robotic arms substantially simultaneously from the first retracted positions along first paths and moving the first and second arms individually or simultaneously along the second paths And connecting the controller configured to drive the driving unit to the driving unit.

According to another aspect, an apparatus includes a first robot arm having a first upper arm, a first pawl arm and a first end effector; A second robot arm having a second upper arm, a second pawl arm and a second end effector; And a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at the first rotation axis, and the second upper arm is connected to the driving unit at the second rotation axis spaced from the first rotation axis , And the driving unit includes five motors for rotating the first and second upper arms, the first one of the motors being connected to the first and second robotic arms such that the first and second arms are connected to the first and second arms, The second and third motors of the motors are connected to the first robot arm to rotate the first upper arm and the first paw arm, respectively, and the fourth and fifth motors of the motors, respectively, rotate about the third rotation axis, And fifth motors are connected to the second robot arm to rotate the second upper arm and the second pillar arm independently from the first robot arm, respectively, and the first and second robot arms are connected to the substrate Enemy Wherein the first and second robotic arms are configured to position the end actuators in the first retracted positions such that the first and second robotic arms are partially positioned over the other, and wherein the first and second robotic arms are parallel to each other, Wherein the first and second robotic arms are configured to extend the end effectors from the first retraction positions in a first direction along one of the paths, And extend the end actuators in a second direction.

According to another aspect, in the apparatus, the first upper arm and the first pawl arm have different effective lengths, and the second upper arm and the second pawl arm have different effective lengths.

According to another aspect, the apparatus includes a first band connecting the drive to the first pawl at the first joint between the first upper arm and the first paw arm and at least one non-circular pulley.

According to another aspect, the apparatus includes a second band connecting the first end effector to the first joint in the list joint of the first end effector for the first paw arm.

According to another aspect, the first and second end actuators in the device each have an overall L shape.

According to another aspect, the apparatus includes a first band and a first circular pulley connecting the drive to a second circular pulley at a first joint between the first upper arm and the first pillar arm, the first and second pulleys And have different diameters.

According to another aspect, the first paths in the apparatus follow a straight line from the first retraction locations.

According to another aspect, first and second robotic arms are configured to provide second retraction positions for positioning the end actuators such that one of the substrates positioned on the end actuators in the apparatus is not stacked on top of one another.

According to another aspect, the apparatus is configured to move the first and second robotic arms substantially simultaneously from the first retracted positions along the first paths and to move the first and second robotic arms And a controller configured to control the driving unit to move.

According to another aspect, the apparatus includes a z-axis motor connected to the drive to move the drive and the first and second robot arms vertically.

According to another aspect, a method is provided for transferring substrates positioned on end-effectors from at least partially one-on-one to a first one of a first and a second individual robot arms from first retraction locations, Wherein the first robot arm includes a first upper arm, a first pawl arm, and a first end effector, wherein the first upper arm is connected to the drive at a first rotational axis, The robot arm including a second upper arm, a second pawl arm and a second end effector, the second upper arm being connected to the drive at a second rotational axis spaced from the first rotational axis; Moving the first and second robotic arms to move the end effector from the first retracted positions in a first direction along at least partially parallel first paths located above the other; Moving the first and second robotic arms to move the end actuators to stretch the end actuators in at least one second direction along second paths spaced from each other that are not located above each other; Rotating the first and second robotic arms together about a third rotational axis spaced from the first and second rotational axes, moving from the first retracted positions in a first direction, moving at least one second Wherein the first motor of the motors is connected to the first and second robot arms to rotate the third rotary shaft around the third rotary shaft, And the second and third motors of the motors are connected to the first robot arm to rotate the first upper arm and the first pillar arm respectively and to rotate the first and second arms of the robot arms, 5 is connected to the second robot arm to independently rotate the second upper arm and the second pillar arm from the first robot arm, respectively.

According to another aspect, a method or apparatus is provided wherein the first motor is aligned in a third axis, the second and third motors are aligned with each other in a first axis, and the fourth and fifth motors are aligned with each other in a second axis .

According to another aspect, a method includes providing a first robot arm having a first upper arm, a first pawl arm and a first end effector; Providing a second robot arm having a second upper arm, a second pawl arm, and a second end effector; Connecting the first upper arm to the driving unit at a first rotational axis; And connecting a second upper arm to a drive unit at a second rotational axis spaced from the first rotational axis, wherein the first and second upper arms are mounted on the end actuators such that at least partially one on top of the other, The first and second robotic arms are configured to position the end actuators in the retracted positions and the first retracted positions in the first direction along the first parallel paths, at least partially one on the other, To extend the end effectors in at least one second direction along the second spaced apart second paths that are not located above each other and configured to cause the first and second robot arms to rotate Wherein the first and second robot arms are configured to rotate, and the drive unit has five motors, Wherein the first one of the motors is for rotating the first and second robotic arms and for rotating the first and second robotic arms about a third rotational axis spaced from the first and second rotational axes, The second and third motors of the motors are connected to the first robot arm to rotate the first upper arm and the first pillar arm, respectively, so as to rotate the first and second arms. And the fourth and fifth of the robot arms are connected to the second robot arm to rotate the second upper arm and the second pillar arm independently of the first robot arm, respectively.

According to another aspect, an apparatus includes a first robot arm including a first upper arm, a first pawl arm, and a first end effector; A second robot arm including a second upper arm, a second pawl arm and a second end effector; And a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at the first rotation axis, and the second upper arm is connected to the driving unit at the second rotation axis spaced from the first rotation axis And the driving unit has four motors for rotating the first and second upper arms, the first one of the motors being connected to the first upper arm, and the second one of the motors connected to the second upper arm A third one of the motors is connected to a first pillar arm, a fourth one of the motors is connected to a second pillar arm, and the third and fourth motors are connected to a common axis , The first motor is aligned with the first axis, the second motor is aligned with the second axis, and the substrates placed on the end actuators are aligned so that at least partially one on top of the other, 1 and the third robot arms The end actuators being configured to position the sub-actuators in the first retracted positions, wherein the end actuators are configured to extend from the first retracted positions in a first direction along at least partially parallel first paths directly on the other, Wherein the first and second robotic arms are configured to extend the end actuators in at least one second direction along second spaced apart second paths that are not located above each other, do.

In one exemplary embodiment, there is provided an apparatus comprising at least one processor and at least one non-transitory memory comprising computer program code, wherein the at least one memory and computer program code comprises at least one A processor operable to cause the apparatus to move the first end effector of the first and second individual robotic arms at the first retracted positions and the first end effector of the first and second individual robotic arms at the first retracted positions so as to at least partially load the substrates positioned on the end actuators, Wherein the first upper arm includes a first upper arm, a first pawl arm, and a first end effector, wherein the first upper arm is connected to the drive at a first rotational axis, The robot arm includes a second upper arm, a second pawl arm, and a second end effector, and the second upper arm includes a second rotation And moves the first and second robot arms to move the end actuators from the first retraction positions in a first direction along parallel first paths located at least partially directly above each other, Moving the first and second robot arms to move the end actuators to stretch the end actuators in at least one second direction along second paths spaced from each other that are not located above the first and second robot arms, Rotating the first and second robotic arms together about a third rotational axis spaced from the two rotational axes, moving from the first retracted positions in a first direction, moving the end actuators in at least one second direction, And the rotation is performed using only three motors of the driving portion.

According to one exemplary embodiment, there is provided an apparatus comprising a non-transitory program storage device that can be read by a machine that realistically implements a program of instructions that can be executed by the machine to perform the operations, : First end actuators of the first and second individual robotic arms at the first retraction positions and second end actuators of the first and second individual robotic arms at the first retracted positions so as to at least partially load the substrates located on the end actuators, Wherein the first robot arm includes a first upper arm, a first pawl arm, and a first end effector, wherein the first upper arm is connected to the drive at a first rotational axis, and the second robot arm A second upper arm, a second upper arm, and a second upper arm, the second upper arm including a first upper arm and a second upper arm, Which is connected to the East, step; Moving the first and second robot arms to move the end actuators from the first retraction positions in a first direction along at least partially parallel first paths directly over the other; Moving the first and second robotic arms to move the end actuators to stretch the end actuators in at least one second direction along second paths spaced from each other that are not located on top of each other; Rotating the first and second robotic arms together about a third rotational axis spaced from the first and second rotational axes, moving from the first retracted positions in a first direction, moving at least one second Moving the end actuators in a direction to extend, and the rotating step is performed using only the three motors of the driving part.

In an exemplary embodiment, at least one processor; And at least one non-volatile memory including computer program code, wherein the at least one memory and computer program code is programmed to cause the apparatus to perform the steps of: Positioning the first end effector and the second end effector of the first and second separate robotic arms at the first retraction locations such that the at least partially loaded substrates are loaded one on top of the other, Wherein the first upper arm is connected to the driving portion at a first rotational axis, and the second robot arm is connected to the second upper arm, the second fore arm, and the second end arm, Wherein the second upper arm is connected to the driving unit at a second rotation axis spaced from the first rotation axis; Moving the first and second robotic arms to move the end effector from the first retracted positions in a first path along at least partially parallel first paths directly on top of the other; Moving the first and second robot arms to move the end actuators to stretch the end actuators in at least one second direction along one of the second spaced apart second paths that are not located on the other; Rotating the first and second robot arms together about a third rotational axis spaced from the first and second rotational axes; The movement from the first retracted positions in the first direction, the stretching of the end actuators in at least one second direction, and the rotation are made using the five motors of the drive, Is coupled to the first and second robotic arms to rotate the first and second arms about a third rotational axis and the second and third of the motors are connected to the first robotic arms, And the fourth and fifth motors of the robot arms are connected to the second robot arm to rotate the second upper arm and the second pillar arm independently of the first robot arm, respectively.

According to one exemplary embodiment, an apparatus is provided that includes a non-transitory program storage device that can be read by a machine, and that tangibly implements a program of instructions that can be performed by a machine that performs the operation , Said operations comprising the steps of: moving the first and second end effectors of the first and second separate robotic arms to the first retracted positions so as to at least partially load the substrates positioned on the end actuators onto one another, Wherein the first robot arm includes a first upper arm, a first pawl arm, and a first end effector, wherein the first upper arm is connected to a drive unit at a first rotational axis, And a second upper arm connected to the driving unit at a second rotation axis spaced apart from the first rotation shaft, wherein the second upper arm includes a first upper arm, a second upper arm, .; Moving the first and second robotic arms to move the end actuators from the first retracted positions in a first direction along at least partially parallel first paths located one above the other; Moving the first and second robot arms to move the end actuators to stretch the end actuators in at least one second direction along second paths spaced from each other that are not located above each other; Rotating the first and second robotic arms together about a third rotational axis spaced from the first and second rotational axes, the method comprising moving from a first retracted position in a first direction, Moving the end effectors in a direction to extend the end effectors, and the rotating step is by use of the five motors of the drive part, wherein the first one of the motors is connected to the first and second robot arms, And the second and third motors of the motors are connected to the first robot arm to rotate the first upper arm and the first pillar arm, respectively, and the fourth and fifth of the robot arms, respectively, The motor is connected to the second robot arm to rotate the second upper arm and the second pillar arm, respectively, independently from the first robot arm.

Any combination of one or more computer readable medium (s) may be used as a memory. The computer readable medium may be a computer readable signal medium or a non-transitory computer readable storage medium. Non-transitory computer readable storage media do not include signal propagation and may, for example, be electronic, magnetic, optical, electromagnetic, infrared or semiconductor systems, devices, or devices, or any other suitable combination thereof, . A more non-exhaustive list of computer readable storage media includes: an electrical connection with one or more wires, a portable computer diskette, a hard disk, a random access memory (RAM), a read only memory (ROM) Erasable programmable read only memory (EPROM or flash memory), optical fiber, portable compact disc read only memory (CD-ROM), optical storage device, magnetic storage device or any suitable combination thereof.

It should be understood that the above description is illustrative only. Various alternatives and modifications may be devised by those skilled in the art. Accordingly, the present embodiments are intended to embrace all such alternatives, modifications and variations. For example, the features described in the various dependent claims may be combined with one another in any suitable combination (s). Moreover, features from the different embodiments described above may also be selectively combined into a new embodiment. Accordingly, this description is intended to cover all such alternatives, modifications and variations that fall within the scope of the appended claims.

10. Robot 12. Drive
14. Arm 16. First link
20. Second link 24. Third link

Claims (15)

The first end robot arm and the second end robot arm of the respective first robot arm and the second robot arm are moved to the first retracted position to load the substrates positioned on the end actuators at least partly on one another, Wherein the first robot arm includes a first upper arm, a first pawl arm, and a first end effector, wherein the first upper arm is connected to the drive at a first rotational axis, and the second robot arm is at a second An upper arm, a second pawl arm, and a second end effector, wherein the second upper arm is connected to the driving unit at a second rotational axis spaced from the first rotational axis;
Moving the first robotic arm and the second robotic arm from the first retracted positions to move the end actuators in a first direction along first parallel paths that are at least partially located one on top of the other;
Moving the first robot arm and the second robot arm to move the end actuators to stretch the end actuators in at least one second direction along mutually spaced second paths that are not located above each other;
Rotating the first robotic arm and the second robotic arm together about a third rotational axis spaced from the first rotational axis and the second rotational axis,
Wherein movement in the first direction from the first retracted positions, movement to stretch the end actuators in at least one second direction, and rotation uses only the three motors of the drive. The method of claim 1, wherein moving the first robot arm and the second robot arm comprises moving a first band connecting the drive to the first pawl at the first joint between the first upper arm and the first pawl arm, Wherein the non-circular pulley comprises a non-circular pulley. The method of Claim 1 or 2, wherein moving the first robotic arm and the second robotic arm comprises moving the first end effector in a wrist joint of the first end effector relative to the first pawl arm And a second band connecting to the joint. 2. The method of claim 1, wherein moving the first robot arm and the second robot arm comprises moving a first band connecting the drive to the second circular pulley at a first joint between the first upper arm and the first pillar arm, Wherein the first pulley and the second pulley have different diameters. 5. A method according to any one of claims 1 to 4, wherein the first robot arm and the second robot arm are moved simultaneously from the first retraction positions along the first paths and the first robot arm and the second robot arm Further comprising a controller for controlling the motors of the drive to move along the second paths either individually or simultaneously. Providing a first robot arm including a first upper arm, a first pawl arm and a first end effector;
Providing a second robot arm including a second upper arm, a second pawl arm and a second end effector;
Connecting the first upper arm to the driving unit at a first rotational axis; And
And connecting the second upper arm to the driving unit at a second rotation axis spaced from the first rotation axis,
The first robotic arm and the second robotic arm are configured to position the end actuators in the first retracted positions such that the substrates positioned on the end stacks are at least partially loaded on top of one another,
The first robot arm and the second robot arm are rotated so as to stretch the end actuators from the first retraction positions in a first direction along at least partially parallel first paths directly on one another And,
The first robot arm and the second robot arm are configured to rotate so as to extend the end actuators in at least one second direction along mutually spaced second paths that are not located above each other,
The drive includes only three motors, which rotate the first robot arm and the second robot arm to stretch the end actuators and rotate the first and second robotic arms about the third rotational axis spaced apart from the first rotational axis and the second rotational axis, And rotating the robot arm and the second robot arm. 7. The method of claim 6, wherein the first robot arm is provided with a first upper arm and the first pawl arm has different effective lengths, the second robot arm is provided with a second upper arm and the second pawl arm is provided with different effective lengths How, how. 8. A method as claimed in claim 6 or 7, wherein a first band connecting the drive to the first pawl at the first joint between the first upper arm and the first pawl arm and at least one non-circular pulley at the first pivot axis Lt; / RTI &gt; 8. The method of claim 6 or 7, further comprising, in a list joint of a first end effector for a first paw arm, a second band connecting the first end effector to the first joint. 7. The apparatus of claim 6 further comprising a first band and a first circular pulley connecting the drive to the second circular pulley at a first joint between the first upper arm and the first pillar arm, Having different diameters. 11. A method according to any one of claims 6 to 10, wherein the first robotic arm and the second robotic arm are configured to provide first paths along a straight line from the first retracted positions. 12. A method according to any one of claims 6 to 11, characterized in that the substrates positioned on the end actuators are arranged so as to provide second retracting positions for positioning the end actuators such that one substrate is not stacked on top of the other, &Lt; / RTI &gt; two arms are configured. 13. A method according to any one of claims 6 to 12, wherein the first robot arm and the second robot arm are moved simultaneously from the first retraction positions along the first paths and the first and second arms Or simultaneously connecting the controller to the drive configured to control the drive to move along the second paths. The first and second robot arm arms and the second end arm actuators, respectively, at the first retracted positions so that the substrates positioned on the end actuators are at least partially loaded on top of one another Wherein the first robot arm includes a first upper arm, a first pawl arm, and a first end effector, wherein the first upper arm is connected to the drive at a first rotational axis, and the second robot arm is at a second A second pillar arm, and a second end effector, wherein the second upper arm is connected to the drive portion at a second rotation axis spaced from the first rotation axis;
Moving the first robotic arm and the second robotic arm to move the end actuators from the first retracted positions in a first direction along at least partially parallel first paths located one above the other;
Moving the first robot arm and the second robot arm to move the end actuators to stretch the end actuators in at least one second direction along second paths spaced from each other that are not located on top of each other;
Rotating the first robotic arm and the second robotic arm together about a third rotational axis spaced from the first rotational axis and the second rotational axis,
The movement from the first retracted positions in the first direction, the act of stretching the end actuators in at least the second direction, and the rotation are made using the five motors of the drive, And the second motor and the third motor of the motors rotate the first upper arm and the first pillar arm, respectively, to rotate the first arm and the second arm around the first arm and the second arm, And the fourth and fifth of the robot arms are connected to the second robot arm to rotate the second upper arm and the second pillar arm, respectively, independently from the first robot arm , Way. Providing a first robot arm including a first upper arm, a first pawl arm and a first end effector;
Providing a second robot arm including a second upper arm, a second pawl arm and a second end effector;
Connecting the first upper arm to the driving unit at a first rotational axis; And
And connecting the second upper arm to the driving unit at a second rotation axis spaced from the first rotation axis,
The first robotic arm and the second robotic arm are configured to position the end actuators at the first retracted positions such that the substrates positioned on the end actuators are at least partially loaded on top of one another, The first robotic arm and the second robotic arm are configured to rotate so as to stretch the end actuators from the first retracted positions in a first direction along one of the parallel first paths, The first robot arm and the second robot arm are configured to rotate so as to stretch the end actuators in at least one second direction along mutually spaced second paths that are not positioned above, A first robot arm and a second robot arm for rotating the first robot arm and the second robot arm around a third rotation axis spaced from the first rotation axis and the second rotation axis, The first motor of the motors includes a first robot arm and a second robot to rotate the first arm and the second arm around the third rotation axis, A second motor and a third motor of the motors are connected to the first robot arm to rotate the first upper arm and the first pillar arm respectively and the fourth and fifth robot arms of the robot arms are connected to the first robot arm, , Independently from the first robot arm, to the second robot arm to rotate the second upper arm and the second pillar arm, respectively.

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