JP7079604B2 - Robot with an arm with unequal link length - Google Patents

Description

The disclosed embodiments relate to robots having arms with unequal link lengths, and more particularly to robots having one or more arms having unequal link lengths, each supporting one or more substrates. ..

background

Vacuum, atmospheric, and control environmental treatments for applications such as those related to the manufacture of semiconductors, LEDs (Light Emitting Diodes), sunlight, MEMS (Micro Electro Mechanical Systems) or other devices are on the substrate, and the substrate. Utilize robotic technology and other forms of automation to transport the associated carrier to or from a storage location, processing location, or other location. Such transfer of boards uses a single arm to carry one or more boards, or multiple arms to each carry one or more boards to move individual boards, groups of boards. You may. Much of the manufacturing is done in a clean or vacuum environment where footprint and volume are important, such as those related to semiconductor manufacturing. In addition, many automated transports are performed when minimizing transport times results in shorter cycle times and higher throughput and utilization of related equipment. Therefore, it is desired to provide substrate transport automation that minimizes the footprint and work space volume required for a given range of transport applications and minimizes transport time.

Description

The following abstract is intended to be merely exemplary. This abstract is not intended to limit the scope of claims.

In one embodiment of the exemplary embodiment, the transport device comprises at least one drive, a first robot arm with a first upper arm, a first forearm and a first end effector, and a second upper arm. It comprises a second forearm and a second robot arm with a second end effector. The first upper arm is connected to the at least one drive on the first axis of rotation. The second upper arm is connected to the at least one drive device on a second axis of rotation separated from the first axis of rotation. The first and second robot arms are first to stack the first and second end effectors, at least partially, on top and bottom of a plurality of substrates arranged on the first and second end effectors. It is configured to be set in the contraction position of. The first and second robot arms are the first and second end effectors in a first direction along a parallel first path that is at least partially directly up and down from the first contraction position. Is configured to stretch. The first and second robot arms extend the first and second end effectors in at least one second direction along a second path separated from each other that is not located vertically. It is composed of. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

In another aspect of the exemplary embodiment, a method is provided that comprises a first brachial arm, a first forearm and a first end effector, the first brachial arm and the first forearm being different. To provide a first robot arm having an effective length and to include a second upper arm, a second forearm and a second end effector, the second upper arm and the second forearm having different effective lengths. To provide a second robot arm having, to connect the first upper arm to at least one drive device on the first axis of rotation, and to separate the second upper arm from the first axis of rotation. The connection to the at least one drive device on the second rotating shaft is included. The first and second robot arms place the first and second end effectors in a first contraction position to stack a plurality of substrates placed on these end effectors at least partially up and down. The first and second robot arms are configured to be set, from the first contraction position to the first direction along a parallel first path that is at least partially directly up and down. The first and second robot arms are configured to extend the first and second end effectors, and the first and second robot arms are at least one second along a second path separated from each other that is not located vertically. It is configured to extend the first and second end effectors in the direction.

In another aspect of the exemplary embodiment, a method is provided in which a first end effector of a first robot arm and a second end effector of a second robot arm are placed on these end effectors. It involves setting a plurality of arranged substrates in a first contraction position for at least partially stacking up and down. Here, the first robot arm includes a first upper arm, a first forearm, and the first end effector, and the first upper arm is connected to at least one drive device on a first rotation axis. The second robot arm comprises a second upper arm, a second forearm and the second end effector, the second upper arm being a second axis of rotation separated from the first axis of rotation. Is connected to the at least one drive device. The method further moves the first and second robot arms from the first contraction position to the first direction along a parallel first path that is at least partially directly up and down. Moving the 1st and 2nd end effectors and moving the 1st and 2nd robot arms so that at least one second path along a second path that is not located up or down and is separated from each other. Includes moving these end effectors so as to extend the first and second end effectors in the direction of.

In another aspect of the exemplary embodiment, the transport device comprises a first robotic arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second forearm and a second. A second robot arm provided with two end effectors and a drive device connected to the first and second robot arms are provided. The first upper arm is connected to the drive on the first axis of rotation. The second upper arm is connected to the drive device on a second rotation shaft separated from the first rotation shaft. To rotate the first and second upper arms, the drive device comprises only three motors. The first and second robot arms place the first and second end effectors in a first contraction position to stack a plurality of substrates placed on these end effectors at least partially up and down. The first and second robot arms are configured to be set, from the first contraction position to the first direction along a parallel first path that is at least partially directly up and down. The first and second robot arms are configured to extend the first and second end effectors, and the first and second robot arms are at least one second along a second path separated from each other that is not located vertically. It is configured to extend the first and second end effectors in the direction.

In another aspect of the exemplary embodiment, the method is a plurality of substrates in which a first end effector of a first robot arm and a second end effector of a second robot arm are placed on these end effectors. Includes setting in the first contraction position to stack at least partially up and down. Here, the first robot arm includes a first upper arm, a first forearm, and the first end effector, and the first upper arm is connected to a drive device on a first rotation shaft, and the first is said. The robot arm 2 comprises a second upper arm, a second forearm and the second end effector, the second upper arm being driven by a second axis of rotation separated from the first axis of rotation. Connected to the device. The method further moves the first and second robot arms from the first contraction position in a first direction along a parallel first path that is at least partially directly up and down. Moving the first and second end effectors and moving the first and second robot arms at least one second along a second path that is not located up or down and is separated from each other. Moving these end effectors so as to extend the first and second end effectors in two directions and said around a third axis of rotation separated from the first and second axes of rotation. Includes rotating the first and second robot arms together. The movement from the first contraction position in the first direction, the movement so as to extend the first and second end effectors in the at least one second direction, and the rotation. To make it happen is by using only three motors of the drive device.

In another aspect of the exemplary embodiment, the method provides a first robotic arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second. To provide a second robot arm with a forearm and a second end effector, to connect the first upper arm to a drive device on a first axis of rotation, and to connect the second upper arm to the first. Includes connecting to the drive on a second axis of rotation separated from the axis of rotation of the robot. The first and second robot arms place the first and second end effectors in a first contraction position to stack a plurality of substrates placed on these end effectors at least partially up and down. The first and second robot arms are configured to be set, from the first contraction position to the first direction along a parallel first path that is at least partially directly up and down. The first and second robot arms are configured to be rotated to extend the first and second end effectors, and the first and second robot arms are at least along a second path away from each other that is not located up or down. It is configured to be rotated to extend the first and second end effectors in one second direction. To rotate the first and second robot arms to extend the first and second end effectors, and around a third axis of rotation separated from the first and second axes of rotation. In order to rotate the first and second robot arms, the drive device comprises only three motors.

In another aspect of the exemplary embodiment, the device comprises a first robotic arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second forearm and a second. The second robot arm provided with the end effector of the above, and a driving device connected to the first and second robot arms are provided. The first upper arm is connected to the drive on the first axis of rotation. The second upper arm is connected to the drive device on a second rotation shaft separated from the first rotation shaft. The drive device comprises five motors to rotate the first and second upper arms. The first motor of the motors is connected to the first and second robot arms and around a third axis of rotation separated from the first and second axes of rotation. The second robot arm is rotated, and the second and third motors are connected to the first robot arm, each of which rotates the first upper arm and the first forearm, and the fourth and fourth. The motor 5 is connected to the second robot arm, and each rotates the second upper arm and the second forearm independently of the first robot arm. The first and second robot arms place the first and second end effectors in a first contraction position to stack a plurality of substrates placed on these end effectors at least partially up and down. The first and second robot arms are configured to be set, from the first contraction position to the first direction along a parallel first path that is at least partially directly up and down. The first and second robot arms are configured to extend the first and second end effectors, and the first and second robot arms are at least one second along a second path separated from each other that is not located vertically. It is configured to extend the first and second end effectors in the direction.

In another aspect of the exemplary embodiment, the method is a plurality of substrates in which a first end effector of a first robot arm and a second end effector of a second robot arm are placed on these end effectors. Includes setting in the first contraction position to stack at least partially up and down. Here, the first robot arm includes a first upper arm, a first forearm, and the first end effector, and the first upper arm is connected to a drive device on a first rotation shaft, and the first is said. The robot arm 2 comprises a second upper arm, a second forearm and the second end effector, the second upper arm being driven by a second axis of rotation separated from the first axis of rotation. Connected to the device. The method further moves the first and second robot arms from the first contraction position in a first direction along a parallel first path that is at least partially directly up and down. Moving the first and second end effectors and moving the first and second robot arms at least one second along a second path that is not located up or down and is separated from each other. Moving these end effectors so as to extend the first and second end effectors in two directions and said around a third axis of rotation separated from the first and second axes of rotation. Includes rotating the first and second robot arms together. The movement from the first contraction position in the first direction, the movement so as to extend the first and second end effectors in the at least one second direction, and the rotation. The operation is performed by using the five motors of the drive device. The first motor of the motors is connected to the first and second robot arms to rotate the first and second robot arms around the third axis of rotation, the second and second robot arms. The third motor is connected to the first robot arm, each of which rotates the first upper arm and the first forearm, and the fourth and fifth motors are attached to the second robot arm. Connected and configured to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

In another aspect of the exemplary embodiment, the method provides a first robotic arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second. To provide a second robot arm with a forearm and a second end effector, to connect the first upper arm to a drive device on a first axis of rotation, and to connect the second upper arm to the first. Includes connecting to the drive on a second axis of rotation separated from the axis of rotation of the robot. The first and second robot arms place the first and second end effectors in a first contraction position to stack a plurality of substrates placed on these end effectors at least partially up and down. The first and second robot arms are configured to be set, from the first contraction position to the first direction along a parallel first path that is at least partially directly up and down. The first and second robot arms are configured to be rotated to extend the first and second end effectors, and the first and second robot arms are at least along a second path away from each other that is not located up or down. It is configured to be rotated to extend the first and second end effectors in one second direction. To rotate the first and second robot arms to extend the first and second end effectors, and around a third axis of rotation separated from the first and second axes of rotation. In order to rotate the first and second robot arms, the drive device includes five motors. The first motor of the motors is connected to the first and second robot arms to rotate the first and second robot arms around the third axis of rotation, the second and second robot arms. The third motor is connected to the first robot arm, each of which rotates the first upper arm and the first forearm, and the fourth and fifth motors are attached to the second robot arm. Connected and configured to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

In another aspect of the exemplary embodiment, the device comprises a first robotic arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second forearm and a second. The second robot arm provided with the end effector of the above, and a driving device connected to the first and second robot arms are provided. The first upper arm is connected to the drive on the first axis of rotation. The second upper arm is connected to the drive device on a second rotation shaft separated from the first rotation shaft. The drive device comprises four motors to rotate the first and second upper arms. The first motor of the motors is connected to the first upper arm, the second motor is connected to the second upper arm, the third motor is connected to the first forearm, and the fourth. The motors are connected to the second forearm, and the third and fourth motors are aligned on a common axis separated from the first and second rotation axes. The first motor is aligned with the first axis of rotation and the second motor is aligned with the second axis of rotation. The first and second robot arms place the first and second end effectors in a first contraction position to stack a plurality of substrates placed on these end effectors at least partially up and down. The first and second robot arms are configured to be set, from the first contraction position to the first direction along a parallel first path that is at least partially directly up and down. The first and second robot arms are configured to extend the first and second end effectors, and the first and second robot arms are at least one second along a second path separated from each other that is not located vertically. It is configured to extend the first and second end effectors in the direction.

The above aspects and other features will be described in the following description, with reference to the following accompanying drawings.

FIG. 1A is a top view of the transport device.

FIG. 1B is a side view of the transport device.

FIG. 2A is a schematic view of the upper surface portion of the transport device.

FIG. 2B is a schematic side view of the transport device.

FIG. 3A is a top view of the transport device.

FIG. 3B is a top view of the transport device.

FIG. 3C is a top view of the transport device.

FIG. 4 is a graph.

FIG. 5A is a top view of the transport device.

FIG. 5B is a side view of the transport device.

FIG. 6A is a schematic view of the upper surface portion of the transport device.

FIG. 6B is a schematic side view of the transport device.

FIG. 7A is a top view of the transport device.

FIG. 7B is a top view of the transport device.

FIG. 7C is a top view of the transport device.

FIG. 8 is a graph.

FIG. 9 is a schematic side view of the transport device.

FIG. 10A is a top view of the transport device.

FIG. 10B is a side view of the transport device.

FIG. 11A is a top view of the transport device.

FIG. 11B is a side view of the transport device.

FIG. 12 is a schematic side view of the transport device.

FIG. 13 is a schematic side view of the transport device.

FIG. 14A is a top view of the transport device.

FIG. 14B is a top view of the transport device.

FIG. 14C is a top view of the transport device.

FIG. 15A is a top view of the transport device.

FIG. 15B is a side view of the transport device.

FIG. 16A is a top view of the transport device.

FIG. 16B is a side view of the transport device.

FIG. 17A is a top view of the transport device.

FIG. 17B is a side view of the transport device.

FIG. 18 is a schematic side view of the transport device.

FIG. 19 is a schematic side view of the transport device.

FIG. 20A is a top view of the transport device.

FIG. 20B is a top view of the transport device.

FIG. 20C is a top view of the transport device.

FIG. 21A is a top view of the transport device.

FIG. 21B is a side view of the transport device.

FIG. 22A is a top view of the transport device.

FIG. 22B is a side view of the transport device.

FIG. 23 is a schematic side view of the transport device.

FIG. 24A is a top view of the transport device.

FIG. 24B is a top view of the transport device.

FIG. 24C is a top view of the transport device.

FIG. 25A is a top view of the transport device.

FIG. 25B is a side view of the transport device.

FIG. 26A is a top view of the transport device.

FIG. 26B is a top view of the transport device.

FIG. 26C is a top view of the transport device.

FIG. 27A is a top view of the transport device.

FIG. 27B is a side view of the transport device.

FIG. 28A is a top view of the transport device.

FIG. 28B is a side view of the transport device.

FIG. 29A is a top view of the transport device.

FIG. 29B is a top view of the transport device.

FIG. 29C is a top view of the transport device.

FIG. 30A is a top view of the transport device.

FIG. 30B is a side view of the transport device.

FIG. 31A is a top view of the transport device.

FIG. 31B is a side view of the transport device.

FIG. 32A is a top view of the transport device.

FIG. 32B is a top view of the transport device.

FIG. 32C is a top view of the transport device.

FIG. 32D is a top view of the transport device.

FIG. 33A is a top view of the transport device.

FIG. 33B is a side view of the transport device.

FIG. 34A is a top view of the transport device.

FIG. 34B is a top view of the transport device.

FIG. 34C is a top view of the transport device.

FIG. 35A is a top view of the transport device.

FIG. 35B is a side view of the transport device.

FIG. 36 is a top view of the transport device.

FIG. 37A is a top view of the transport device.

FIG. 37B is a side view of the transport device.

FIG. 38A is a top view of the transport device.

FIG. 38B is a side view of the transport device.

FIG. 39 is a top view of the transport device.

FIG. 40A is a top view of the transport device.

FIG. 40B is a side view of the transport device.

FIG. 41 is a top view of the transport device.

FIG. 42 is a top view of the transport device.

FIG. 43A is a top view of the transport device.

FIG. 43B is a side view of the transport device.

FIG. 44 is a top view of the transport device.

FIG. 45 is a top view of the transport device.

FIG. 46A is a top view of the transport device.

FIG. 46B is a side view of the transport device.

FIG. 47A is a top view of the transport device.

FIG. 47B is a side view of the transport device.

FIG. 48 is a top view of the transport device.

FIG. 49 is a top view of the transport device.

FIG. 50A is a top view of the transport device.

FIG. 50B is a side view of the transport device.

FIG. 51 is a top view of the transport device.

FIG. 52A is a top view of the transport device.

FIG. 52B is a side view of the transport device.

FIG. 53 is a top view of the transport device.

FIG. 54A is a top view of the transport device.

FIG. 54B is a side view of the transport device.

FIG. 55A is a top view of the transport device.

FIG. 55B is a top view of the transport device.

FIG. 55C is a top view of the transport device.

FIG. 56A is a top view of the transport device.

FIG. 56B is a side view of the transport device.

FIG. 57A is a top view of the transport device.

FIG. 57B is a top view of the transport device.

FIG. 57C is a top view of the transport device.

FIG. 58A is a top view of the transport device.

FIG. 58B is a side view of the transport device.

FIG. 59A is a top view of the transport device.

FIG. 59B is a top view of the transport device.

FIG. 59C is a top view of the transport device.

FIG. 60A is a top view of the transport device.

FIG. 60B is a side view of the transport device.

FIG. 61A is a top view of the transport device.

FIG. 61B is a top view of the transport device.

FIG. 61C is a top view of the transport device.

FIG. 62 is a top view of the transport device.

FIG. 63 is a diagram showing an exemplary pulley.

FIG. 64 is a top view of the transport device.

FIG. 65 is a top view of the transport device.

FIG. 66A is a top view of the transport device.

FIG. 66B is an isometric view of the transport device.

FIG. 66C is an end view of the transport device.

FIG. 66D is a side view of the transport device.

FIG. 67A is a top view of the transport device.

FIG. 67B is an isometric view of the transport device.

FIG. 67C is an end view of the transport device.

FIG. 67D is a side view of the transport device.

FIG. 68A is a top view of the transport device.

FIG. 68B is a top view of the transport device.

FIGS. 69A-F are top views of the transport device.

70A-F is a top view of the transport device.

71A-E are top views of the transport device.

72A is a top view of the transport device, and FIG. 72B is a side view of the transport device.

72C is a top view of the transport device, and FIG. 72D is a side view of the transport device.

73A is a top view of the transport device, and FIG. 73B is a side view of the transport device.

73C is a top view of the transport device, and FIG. 73D is a side view of the transport device.

FIG. 74A is a top view of the transport device.

FIG. 74B is a top view of the transport device.

75A-F is a top view of the transport device.

FIG. 76A is a top view of the transport device.

FIG. 76B is a top view of the transport device.

FIG. 76C is a top view of the transport device.

FIG. 76D is a top view of the transport device.

77A is a top view of the transport device, and FIG. 77B is a side view of the transport device.

77C is a top view of the transport device, and FIG. 77D is a side view of the transport device.

78A is a top view of the transport device, and FIG. 78B is a side view of the transport device.

FIG. 79A is a top view of the transport device.

FIG. 79B is a top view of the transport device.

FIG. 80A is a top view of the transport device.

FIG. 80B is a top view of the transport device.

Detailed description of the exemplary embodiment

In addition to the embodiments disclosed below, the disclosed embodiments may be other embodiments and can be implemented or implemented in various ways. Therefore, it should be understood that the disclosed embodiments are not limited in their application to the structural details and component arrangements described in the following description or shown in the drawings. If only one embodiment is described herein, the claims relating thereto should not be limited to that embodiment. Moreover, this claim should not be read in a limited manner unless there is clear and compelling evidence to express a definitive exclusion, limitation, or abandonment.

Next, with reference to FIGS. 1A and 1B, a top view and a side view of the robot 10 having the drive device 12 and the arm 14 are shown, respectively. The arm 14 is shown in the contracted position. The arm 14 has an upper arm or a first link 16 that is rotatable around the central rotation axis 18 of the drive device 12. The arm 14 further has a forearm or a second link 20 that is rotatable around the elbow rotation axis 22. The arm 14 further comprises an end effector or a third link 24 that is rotatable around the wrist rotation axis 26. The end effector 24 supports the substrate 28. As described, the arm 14 is parallel to a linear path 32, or a linear path 32, which may coincide (as seen in FIG. 1A) with a linear path 32 that coincides with the central axis of rotation 18 of the drive device 12. It is configured to cooperate with the drive device 12 so that the substrate 28 is conveyed along such a path, for example, a path 34, 36 or the like. In the illustrated embodiment, the inter-articular length of the forearm or the second link 20 is greater than the inter-articular length of the upper arm or the first link 16. In the illustrated embodiment, the lateral offset 38 of the end effector or third link 24 corresponds to the difference in inter-articular length between the forearm 20 and the brachial arm 14. As described in more detail below, the lateral offset 38 remains substantially constant during extension and contraction of the arm 14, whereby the substrate 28 is the substrate 28 or end effector 24 with respect to the linear path. It is moved along a linear path without rotation. This is accomplished using the internal structure of the arm 14 without the use of additional control axes to control the rotation of the end effector 24 at the wrist 26 with respect to the forearm 20, as described. In one aspect of the embodiment disclosed with respect to FIG. 1A, the center of mass of the third link or end effector 24 may be on the wrist centerline or axis of rotation 26. Alternatively, the center of mass of the third link or end effector 24 may be along the (38) path 40 offset from the central axis of rotation 18. In this way, the moments applied as a result of the mass being offset differently between the extension and contraction of the arm minimize the disturbance to the band that constrains the end effector 24 to the links 16 and 20. be able to. Here, the center of mass may be determined with or without the substrate, or may be determined in the middle. Alternatively, the center of mass of the third link or end effector 24 may be at any suitable location. In the illustrated embodiment, the substrate transfer device 10 transports the substrate 28 on the central rotation shaft 18 using the movable arm assembly 14 coupled to the drive unit 12. As can be seen from FIGS. 3A-3C, the substrate support 24 is coupled to the arm assembly 14 on the wrist rotation axis 26, which rotates around the central rotation axis 18 during extension and contraction. The wrist rotation axis 26 is parallel to, for example, a path 30, 34, or 36 with respect to the central rotation axis 18 during extension and contraction, from which it moves along the wrist path 40 offset 38 and the like. The substrate support 24 also moves parallel to the radial path 30 during extension and contraction without rotation. As described in more detail in other embodiments of the disclosed embodiments, the end effector is constrained to move in a nearly purely radial motion when the length of the forearm is shorter than the length of the upper arm. Principles and structures may be applied. Further, this feature may be applied when a plurality of substrates are handled by the end effector. Further, this feature may be applied when a second arm that handles one or more additional boards is used in connection with a drive device. Therefore, all such variations may be included.

With reference to FIGS. 2A and 2B as well, partial schematic top views and side views of the system 10 showing the internal configuration used to drive the individual links of the arms 14 shown in FIGS. 1A and 1B are shown, respectively. ing. The drive device 12 is coupled to the housing 60 and has the corresponding first and second encoders 56, 58 to drive the first and second shafts 62, 64, respectively, the first and second motors 52, 54. Has. Here, the shaft 62 may be coupled to the pulley 66, the shaft 64 may be coupled to the upper arm 16, and the shafts 62, 64 may be concentric or otherwise disposed. In an alternative aspect, any suitable drive may be provided. The housing 60 may communicate with the chamber 68, and the bellows 70, the chamber 68, and the internal portion of the housing 60 isolate the vacuum environment 72 from the atmospheric environment 74. The housing 60 may slide on the slide 76 in the z direction as a movable base, and a lead screw or other screw may be used to selectively move the housing 60 and the arm 14 coupled thereto in the z (80) direction. A suitable vertical or linear z drive 78 may be provided. In the illustrated embodiment, the upper arm 16 is driven around a central rotation axis 18 by a motor 54. Similarly, the forearm is driven by a motor 52 through a band drive device having pulleys 66, 82 and bands 84, 86, such as conventional circular pulleys and bands. In an alternative embodiment, any suitable structure for driving the forearm 20 with respect to the upper arm 16 may be provided. The ratio of pulleys 66 to 82 may be 1: 1, 2: 1, or any suitable ratio. The third link 24 having the end effector has a pulley 88 grounded to the link 16, a pulley 90 grounded to the end effector or the third link 24, and a band 92 that constrains the pulley 88 and the pulley 90. , 94 may be constrained by the band drive device. As described, the ratio between pulleys 88, 90 does not have to be constant so that the third link 24 follows a radial path without rotation during extension and contraction of the arm 14. .. This is when the pulleys 88, 90 may be one or more non-circular pulleys, such as two non-circular pulleys, or one of the pulleys 88, 90 is circular and the other is non-circular. It may be achieved if it is good. Alternatively, any suitable coupling device or linkage may be provided to constrain the path of the third link or end effector 24 as described. In the illustrated embodiment, at least one non-circular pulley offsets the effects of unequal length of the upper arm 16 and forearm 20 thereby the end effector 24 regardless of the position of the first two links 16 and 20. Is oriented in the radial direction 30. The present embodiment describes a non-circular pulley 90 and a circular pulley 88. Alternatively, the pulley 88 may be non-circular and the pulley 90 may be circular. Alternatively, the pulleys 88 and 92 may be non-circular, or any suitable coupling device for constraining the links of the arms 14 as described may be provided. As an example, US Pat. No. 4,865,577, published September 12, 1989, entitled "Noncircular Drive," describes a non-circular pulley or sprocket. The patent is incorporated herein by reference in its entirety. Alternatively, any suitable coupling device for constraining the link of the arm 14 as described may be provided, eg, any suitable variable ratio drive or coupling device, coupling gear or sprocket. , Cams or others may be used alone or in combination with suitable linkages or other coupling devices. In the illustrated embodiment, the elbow pulley 88 is coupled to the upper arm 16 and is shown in a round or circular shape, and the wrist pulley 90 coupled to the wrist or the third link 24 is shown in a non-circular shape. The shape of the wrist pulley is non-circular and may be symmetrical with respect to the line 96 perpendicular to the radial orbit 30. Line 96 is also similarly a line between the two pulleys 88, 90 when the forearm 20 and upper arm 16 overlap each other with the wrist shaft 26 closest to the shoulder shaft 18, for example, as seen in FIG. 3B. May match or be parallel to it. The shape of the pulley 90 is such that the bands 92 and 94 remain taut as the arm 14 expands and contracts, and the radial distances 102 and 104 from the wrist rotation shaft 26 change on the opposing sides of the pulley 90. It is like establishing contacts 98 and 100. For example, in the orientation shown in FIG. 3B, each of the contacts 98, 100 of the two bands on the pulley is at equal radial distances 102, 104 from the wrist rotation axis 26. This will be further described in FIG. 4, which shows the respective ratios. In order for the arm 14 to rotate, both the drive shafts 62 and 64 of the robot need to move by the same amount in the rotation direction of the arm. In order for the end effector 24 to extend and contract radially along a linear path, the two drive shafts 62, 64 coordinate, for example, according to the exemplary inverse kinematics equations presented later in this section. I need to move. Here, the substrate transfer device 10 is configured to convey the substrate 28. The forearm 20 is rotatably coupled to the upper arm 16 and is rotatable around the elbow shaft 22 offset by the upper arm link length from the central axis 18. The end effector 24 is rotatably coupled to the forearm 20 and is rotatable around the wrist shaft 26 offset by the forearm link length from the elbow shaft 22. The wrist pulley 90 is fixed to the end effector 24 and is coupled to the elbow pulley 88 using the bands 92 and 94. Here, the forearm link length is different from the brachial link length, where the end effector is constrained to the upper arm by the elbow pulley, wrist pulley, and band so that the substrate moves along the linear radial path 30 with respect to the central axis 18. .. Here, the substrate support 24 is coupled to the upper arm 16 by using the substrate support connecting device 92, and is around the wrist rotation axis 26 by the relative movement between the forearm 20 and the upper arm 16 around the elbow rotation axis 22. Driven. 3A, 3B, and 3C show the stretching motion of the robot of FIGS. 1 and 2. FIG. 3A shows a top view of the robot 10 in a state where the arm 14 is in the contracted position. FIG. 3B shows a partially extended arm 14 with the forearm 20 aligned on the brachial arm 16, where the lateral offset 38 of the end effector corresponds to the difference in inter-articular length between the forearm 20 and the brachial arm 16. It illustrates that. FIG. 3C shows an arm 14 in an extended position, although not fully extended.

An exemplary forward kinematics may be provided. In an alternative embodiment, any suitable forward kinematics may be provided to accommodate the alternative structure. The following exemplary equations may be used to determine the position of the end effector as a function of the position of the motor.
x ₂ = l ₁ cos θ ₁ + l ₂ cos θ ₂ (1.1)
y ₂ = l ₁ sinθ ₁ + l ₂ sinθ ₂ (1.2)
R ₂ = square (x ₂ ² + y ₂ ² ) (1.3)
T ₂ = atan2 (y ₂ , x ₂ ) (1.4)
α ₃ = asin (d ₃ / R ₂ ) where d ₃ = l ₂ -l ₁ (1.5)
α ₁₂ = θ ₁ -θ ₂ (1.6)
If α ₁₂ <π, then R = sqrt (R 22 − d _{3 2} ) + l ₃ , T = T ₂ + α ₃ , otherwise R = − sqrt (R ₂ ² − d ^{3 2} ) ⁺ l _{3 ,} T = T ₂ -α ₃ + π (1.7)

Illustrative inverse kinematics may be provided. In an alternative embodiment, any suitable inverse kinematics may be provided to accommodate the alternative structure. The following exemplary equations may be used to determine the position of the motor to achieve the specified position of the end effector.
x ₃ = RcosT (1.8)
y ₃ = RsinT (1.9)
x ₂ = x ₃ -l ₃ cosT + d ₃ sinT (1.10)
y ₂ = y ₃ -l ₃ sinT-d ₃ cosT (1.11)
R ₂ = square (x ₂ ² + y ₂ ² ) (1.12)
T ₂ = atan2 (y ₂ , x ₂ ) (1.13)
α ₁ = acos ((R ₂ ² + l ₁ ² − l ₂ ² ) / (2R ₂ l ₁ )) (1.14)
α ₂ = acos ((R 22 − l ₁ ² _{+ l 2 2) / (2R 2 l} ² ₎ ⁾ ₍ 1.15)
If R> l ₃ , θ ₁ = T ₂ + α ₁ , θ ₂ = T ₂ -α ₂ , otherwise θ ₁ = T ₂ -α ₁ , θ ₂ = T ₂ + α ₂ (1.16).

The following terms may be used in kinematic equations.
d ₃ = Lateral offset of end effector (m)
l ₁ = inter-articular length of the first link (m)
l ₂ = inter-articular length of the second link (m)
l ₃ = Length of third link with end effector measured from wrist joint to reference point on end effector (m)
R = Radial position of end effector (m)
R ₂ = Radial coordinates of wrist joint (m)
T = angular position of end effector (rad)
T ₂ = Wrist joint angular coordinates (rad)
x ₂ = x coordinate of wrist joint (m)
x ₃ = x coordinate of end effector (m)
y ₂ = y coordinate of the wrist joint (m)
y ₃ = y coordinate of the end effector (m)
θ ₁ = angular position (rad) of the drive shaft coupled to the first link
θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

The above exemplary kinematic equation is a third link 24 such that the end effector 24 is oriented radially 30 regardless of the position of a suitable drive, eg, the first two links 16 and 20 of the arm 14. It may be used to design a band drive device that constrains the orientation of the.

Referring to FIG. 4, plot 120 of the band drive transmission ratio r ₃₁ 122 constraining the orientation of the third link is a function of the normalized extension of the arm measured from the center of the robot to the base of the end effector. That is, it is shown as (R-l ₃ ) / l ₁ . The transmission ratio r ₃₁ is defined as the ratio of the angular velocity ω ₃₂ of the pulley attached to the third link to the angular velocity ω ₁₂ of the pulley attached to the first link. Both angular velocities are defined for the second link. The figure graphically illustrates the transfer ratio r ₃₁ for different l ₂ / l ₁ (0.5 to 1.0 with 0.1 increments and 1.0 to 2.0 with 0.2 increments). There is. The outer shape of the non-circular pulley (s) may be calculated to achieve the transmission ratio r ₃₁ according to FIG. 4, examples of the outer shape are shown in FIGS. 2A, 54A, and 54B.

In the disclosed embodiments, a longer reach is obtained compared to an equal link arm having the same storage volume while using one or more non-circular pulleys or other suitable devices to constrain the movement of the end effector. May be done. In an alternative embodiment, the first link may be driven either directly by a motor or via any type of coupling or transmission mechanism. Here, any suitable transmission ratio can be used. Alternatively, the band drive that activates the second link is any combination of equivalent functionality, such as a belt drive, a cable drive, a gear drive, a linkage-based mechanism or any combination of the above. It may be replaced by other mechanisms. Similarly, the band drive that constrains the third link is replaced by any other suitable mechanism, such as a belt drive, cable drive, non-circular gear, linkage-based mechanism or any combination of the above. May be done. Here, the end effector may or may not be radially oriented. For example, the end effector may be positioned with an arbitrary suitable offset with respect to the third link and may be oriented in any suitable direction. Further, in an alternative embodiment, the third link may support multiple end effectors or substrates. Any suitable number of end effectors and / or material holders can be transported by the third link. Further, in an alternative embodiment, as can be seen, for example, in FIG. 4 by l ₂ / l ₁ <1, and as can be seen and described from FIGS. 25-34 and 43-53. In addition, the inter-articular length of the forearm can be smaller than the inter-articular length of the upper arm.

Next, with reference to FIGS. 5A and 5B, a top view and a side view of the robot 150 incorporating some features of the robot 10 are shown, respectively. The robot 150 is shown to have a drive device 12 and an arm 152 indicated in a retracted position. The arm 152 has the same characteristics as those of the arm 14 except for the description here. As an example, the inter-articular length of the forearm or second link 158 is greater than the inter-articular length of the upper arm or first link 154. Similarly, the lateral offset 168 of the end effector or third link 162 corresponds to the difference in inter-articular length between the forearm 158 and the brachial arm 154. With reference to FIGS. 6A and 6B as well, a drive device 150 having an internal configuration used to drive individual links of the arm is shown. In the illustrated embodiment, the upper arm 154 is driven via the shaft 64 by a single motor, as described for arm 14 in FIGS. 1 and 2. Similarly, the end effector or third link 162 is constrained to the brachial arm 154 by a non-circular pulley mechanism, as described for arm 14 in FIGS. 1 and 2. An exemplary difference between the arm 152 and the arm 14 is that the forearm 158 is coupled to another motor of the shaft 62 and drive 12 via a band mechanism having at least one non-circular pulley. Here, the coupler or band mechanism may have features as described herein or as described for the pulley drives 88, 90 of FIGS. 1 and 2. The coupling or band mechanism has a non-circular pulley 202 coupled to the shaft 62 of the drive device 12 and is rotatable around the shaft 18 with the shaft 62. The band mechanism of the arm 152 is coupled to the brachial link 158 and further has a circular pulley 204 rotatable around the elbow shaft 156. The circular pulley 204 is coupled to the non-circular pulley 202 via the bands 206, 208. Here, the bands 206, 208 can be held taut by the outer shape of the non-circular pulley 202. In an alternative embodiment, any combination of pulleys or other suitable transmission devices may be provided. The pulleys 202 and 204 and the bands 206, 208 rotate the upper arm 154 with respect to the pulley 202 (eg, keep the pulley 202 stationary while rotating the upper arm 154), which causes the wrist joint 160 to end effector. Cooperate to extend and contract along a (168) straight line offset from the path 180, parallel to the desired radial path 180. Here, the third link 162 with the end effector is located at the position of the first two links 154 and 158 by, for example, the band drive as described for the arm 14 having at least one non-circular pulley. Regardless, the end effector is constrained to face the radial direction 180. Here, any suitable coupling device for constraining the link of the arm 14 as described may be provided, eg, one or more suitable variable ratio drives or coupling devices, coupling gears or Sprockets, cams or the like may be used alone or in combination with suitable linkages or other coupling devices. In the illustrated embodiment, the elbow pulley 204 is coupled to the forearm 158 and is shown round or circular, and the shoulder pulley 202 coupled to the shaft 62 is shown non-circular. The shape of the shaft pulley is non-circular and may be symmetrical with respect to line 218 perpendicular to the radial orbit 180. Line 218 is also a line between the two pulleys 202, 204 when the forearm 158 and the upper arm 154 overlap each other with the wrist axis 160 closest to the shoulder axis 18, for example, as seen in FIG. 7B. May match or be parallel to it. The shape of the pulley 202 is such that the bands 206, 208 remain taut as the arm 152 expands and contracts, and the radial distances 214 and 216 from the shoulder rotation axis 18 change on the opposite sides of the pulley 202. It is like establishing contacts 210 and 212. For example, in the orientation shown in FIG. 7B, each of the contacts 210, 212 of the two bands on the pulley is at equal radial distances 214, 216 from the shoulder rotation axis 18. This will be further described in FIG. 8, which shows the respective ratios. In order for the arm 152 to rotate, both the drive shafts 62 and 64 of the robot need to move by the same amount in the rotation direction of the arm. As the end effector 162 extends and contracts radially along a linear path, the two drive shafts 62, 64 coordinate, for example, according to the exemplary inverse kinematics equations presented later in this section. I need to move. For example, a drive shaft coupled to the upper arm needs to move according to the inverse kinematics equation presented below, while the other motor is held stationary. 7A, 7B, and 7C show the stretching motion of the robot 150 of FIGS. 5 and 6. FIG. 7A shows a top view of the robot with the arm 152 in its contracted position. FIG. 7B shows a partially extended arm with the forearm aligned on top of the upper arm, indicating that the lateral offset 168 of the end effector 162 corresponds to the difference in inter-articular length between the forearm 158 and the upper arm 154. Illustrated. FIG. 7C shows an arm in an extended position, although not fully extended.

An exemplary forward kinematics may be provided. In an alternative embodiment, any suitable forward kinematics may be provided to accommodate the alternative structure. The following exemplary equations may be used to determine the position of the end effector as a function of the position of the motor.
d ₁ = l ₁ sin (θ ₁ − θ ₂ ) (2.1)
If (θ ₁ − θ ₂ ) <π / 2, θ ₂₁ = θ ₂ −l ₂ asin ((d ₁ + d ₃ ) / l ₂ ), otherwise θ ₂₁ = θ ₂ + l ₂ asin (((d 1 + d 3) / l 2). d ₁ + d ₃ ) / l ₂ ) + π (2.2)
x ₂ = l ₁ cos θ ₁ + l ₂ cos θ ₂₁ (2.3)
y ₂ = l ₁ sinθ ₁ + l ₂ sinθ ₂₁ (2.4)
R ₂ = square (x ₂ ² + y ₂ ² ) (2.5)
T ₂ = atan2 (y ₂ , x ₂ ) (2.6)
If (θ ₁ − θ ₂ ) <π / ² , R = sqrt (R 22 − d _{3 2} ) + l ₃ , T _{= θ 2} ^, otherwise R ₌ − sqrt _{(R 22 − d 3} ⁾ . ² ) + l ₃ , T = θ ₂ (2.7)

Illustrative inverse kinematics may be provided. In an alternative embodiment, any suitable inverse kinematics may be provided to accommodate the alternative structure. The following exemplary equations may be used to determine the position of the motor to achieve the specified position of the end effector.
x ₃ = RcosT (2.8)
y ₃ = RsinT (2.9)
x ₂ = x ₃ -l ₃ cosT + d ₃ sinT (2.10)
y ₂ = y ₃ -l ₃ sinT-d ₃ cosT (2.11)
R ₂ = square (x ₂ ² + y ₂ ² ) (2.12)
T ₂ = atan2 (y ₂ , x ₂ ) (2.13)
α ₁ = acos ((R ₂ ² + l ₁ ² − l ₂ ² ) / (2R ₂ l ₁ )) (2.14)
If R> l ₃ , θ ₁ = T ₂ + α ₁ , θ ₂ = T, otherwise θ ₁ = T ₂ -α ₁ , θ ₂ = T (2.15).

The following terms may be used in kinematic equations.
d ₃ = Lateral offset of end effector (m)
l ₁ = inter-articular length of the first link (m)
l ₂ = inter-articular length of the second link (m)
l ₃ = Length of third link with end effector measured from wrist joint to reference point on end effector (m)
R = Radial position of end effector (m)
R ₂ = Radial coordinates of wrist joint (m)
T = angular position of end effector (rad)
T ₂ = Wrist joint angular coordinates (rad)
x ₂ = x coordinate of wrist joint (m)
x ₃ = x coordinate of end effector (m)
y ₂ = y coordinate of the wrist joint (m)
y ₃ = y coordinate of the end effector (m)
θ ₁ = angular position (rad) of the drive shaft coupled to the first link
θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

The above kinematic equations may be used to design a band drive. Here, the band drive controls the second link 158 such that the rotation of the upper arm 154 extends and contracts the wrist joint 160 along a straight line parallel to the desired radial path 180 of the end effector 162. do.

Next, referring to FIG. 8, the transmission ratio r ₂₀ 272 of the band drive that drives the second link is a function of the normalized extension of the arm measured from the center of the robot to the base of the end effector, ie. , (R-l ₃ ) / l ₁ is shown in graph 270. The transmission ratio r ₂₀ is defined as the ratio of the angular velocity ω ₂₁ of the pulley attached to the second link to the angular velocity ω ₀₁ of the pulley attached to the second motor. Both angular velocities are defined for the first link. The figure graphically shows the transmission ratio r ₂₀ for different l ₂ / l ₁ .

The outer shape of the non-circular pulley (s) for the band drive that drives the second link is calculated to achieve the transmission ratio r ₂₀ 272 according to FIG. An example of the outer shape of the pulley is shown in FIG. 6A and will be described with reference to FIGS. 55A and 55B.

The transmission ratio r ₃₁ of the band drive device that constrains the orientation of the third link 162 may be the same as the transmission ratio shown in FIG. 4 for the embodiments of FIGS. 1 and 2. The transmission ratio r ₃₁ is defined as the angular velocity of the pulley attached to the third link, ω ₃₂ , to the angular velocity of the pulley attached to the first link, ω ₁₂ . Both angular velocities are defined for the second link. The figure graphically illustrates the transfer ratio r ₃₁ for different l ₂ / l ₁ (0.5 to 1.0 with 0.1 increments and 1.0 to 2.0 with 0.2 increments). There is. The outer shape of the non-circular pulley (s) for the band drive that constrains the third link 162 may be calculated to achieve the transmission ratio r ₃₁ according to FIG. An example of the outer shape of the pulley is shown in FIG. 6A.

In the embodiments shown, a longer reach compared to an equal link arm having the same storage volume, while using a non-circular pulley or other suitable mechanism to constrain the end effector, as described. May be obtained. Compared to the embodiments disclosed in FIGS. 1 and 2, another band drive device having a non-circular pulley may be provided on the shoulder shaft 18 instead of the conventional band drive device. In an alternative embodiment, the first link may be driven either directly by a motor or via any type of coupling or transmission mechanism, eg, any suitable transmission ratio is used. May be done. Alternatively, the band drive that activates the second link and constrains the third link is a belt drive, cable drive, non-circular gear, linkage-based mechanism or any combination of the above. It may be replaced by any other mechanism with equivalent functionality. In addition, the third link holds the end effector radially via a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by a second motor, as shown in FIG. You may be constrained to do so. Alternatively, the two-stage band mechanism may be replaced by any other suitable mechanism, such as a belt drive, cable drive, gear drive, linkage based mechanism or any combination of the above. In addition, the end effector may, but does not have to, be radially oriented. For example, the end effector may be positioned with an arbitrary suitable offset with respect to the third link and may be oriented in any suitable direction. In an alternative embodiment, the third link may carry more than one end effector or substrate. Here, any suitable number of end effectors and / or material holders can be supported by the third link. Further, the inter-articular length of the forearm may be smaller than the inter-articular length of the upper arm, for example, as represented by l ₂ / l ₁ <1 in FIG.

Next, referring to FIG. 9, an alternative robot 300 is shown. In the robot 300, the third link is constrained to hold the end effector in the radial direction via a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by a second motor. May be good. The robot 300 is shown to have a drive device 12 and an arm 302. The arm 302 may have an upper arm or first link 304 that is coupled to the shaft 64 and is rotatable around a central axis or shoulder axis 18. The arm 302 has a forearm or a second link 308 rotatably coupled to the upper arm 304 on the elbow axis 306. The links 304 and 308 may have different lengths as described above. The third link or end effector 312 is rotatably coupled to the second link or forearm 308 on the wrist axis 310 and the end effector 312 is rotated by links 304, 308 having unequal link lengths as described above. The substrate 28 can be conveyed along the radial path without accompanying. In the illustrated embodiment, the shaft 62 is coupled to two pulleys 314 and 316, the pulley 314 may be circular and the pulley 316 may be non-circular. Here, the circular pulley 314 holds the end effector 312 in the radial direction via a conventional two-stage (318, 320) circular band mechanism that synchronizes the third link 312 with the pulley driven by the shaft 62. The third link 312 is constrained to. The two-stage mechanism 318, 320 has a pulley 314 coupled to the elbow pulley 324 by a band 322. The elbow pulley 324 is coupled to the elbow pulley 326, and the elbow pulley 326 is coupled to the wrist pulley 328 via a band 330. The forearm 308 may further have an elbow pulley 332, the elbow pulley 332 may be circular, and may be coupled to the shoulder pulley 316 through a band 334. The shoulder pulley 316 may be non-circular or may be coupled to the pulley 314 and the shaft 62.

The disclosed embodiment is a robot having a robot drive with an additional axis, the arm coupled to the robot drive can operate independently with the ability to transport one or more boards. It may be further embodied with respect to a robot that may have additional end effectors. As an example, two independently operable arm linkages or arms having a "dual arm" configuration may be provided, each independently operable arm being one, two, or any suitable. It may have end effectors configured to support any number of substrates. Here, and as described below, each independently operable arm may have first and second links with different link lengths, end effectors and supports coupled to the links. The resulting substrate operates as described above and follows a path. Here, the substrate transfer device may have first and second arm assemblies that transport the first and second substrates and are coupled to a drive on a common axis of rotation and can operate independently. The first and second substrate supports are coupled to the first and second arm assemblies on the first and second wrist rotation axes, respectively. One or both of the first and second arm assemblies rotate about a common axis of rotation during extension and contraction. The first and second wrist rotation axes move parallel to the radial path to the common axis of rotation along the first and second wrist paths offset from this radial path during extension and contraction. The first and second substrate supports move parallel to the radial path during extension and contraction without rotation. Below are variants of the disclosed embodiments that have a plurality of independently operable arms. Here, in an alternative embodiment, any suitable combination of features may be provided.

Next, with reference to FIGS. 10A and 10B, a top view and a side view of the robot 350 having the dual arm mechanism are shown, respectively. The robot 350 has an arm 352 with a common upper arm 354 and an independently operable forearm 356, 358 having the respective end effectors 360, 362, respectively. In the illustrated embodiment, both linkages are shown in their contraction position. The lateral offset 366 of the end effector corresponds to the difference in inter-articular length between the upper arm 354 and the forearm 356, 358. In the illustrated embodiment, the upper arm has the same length and may be longer than the forearm. Further, the end effectors 360 and 362 are positioned above the forearms 356 and 358. Next, with reference to FIGS. 11A and 11B, a top view and a side view of the robot 375 having an arm of an alternative configuration are shown, respectively. In the illustrated embodiment, the arm 377 may have the characteristics as described with respect to FIGS. 10A and 10B, both of which are shown in their contraction positions. In this configuration, a third link with the end effector 382 of the upper linkage is provided under the forearm 380 to reduce the vertical spacing between the two end effectors 382, 384. Here, the same effect may be obtained by stepping (368) lowering the upper end effector 362 of the configurations of FIGS. 10A and 10B. Similarly with reference to FIGS. 12 and 13, the internal configurations of the robots 350 and 375, which are used to drive the individual links of the arms of FIGS. 10 and 11, respectively, are shown. In the illustrated embodiment, the drive device 390 may be a rotor stator mechanism that drives concentric shafts 398, 400, 402, respectively, and has position encoders 404, 406, 408, respectively. And may have a third drive motor 392, 394, 396. The Z drive device 410 may drive the motor in the vertical direction. In this case, the motor may be partially or completely housed in the housing 412, the bellows 414 seals the internal volume of the housing 412 in the chamber 416, and the internal volume and the interior of the chamber 416 are vacuumed or otherwise. It may operate in an isolated environment such as a thing. In the illustrated embodiment, the common upper arm 354 is driven by one motor 396. Each of the two forearms 356, 358 is pivoted on a common axis 420 at the elbow of the upper arm 354, by motors 394, 396, respectively, through band drives 422, 424, which may have conventional pulleys, respectively. Driven independently. The third link with the end effectors 360, 362 is constrained by band drives 426, 428, respectively, each having at least one non-circular pulley that offsets the effects of unequal length on the upper and forearms. Here, the band drive within each linkage may be designed using the methodology described for FIGS. 1 and 2, as well as the kinematic equations presented for FIGS. 1 and 2. It may be used for each of the two linkages of the dual arm. In order for the arm to rotate, the three drive shafts 398, 400, and 402 of the robot all need to move by the same amount in the rotation direction of the arm. The drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the active end effector are shown in FIGS. 1 and 1 because one of the end effectors extends and contracts radially along a linear path. It is necessary to move cooperatively according to the inverse kinematics equation for 2. At the same time, the drive shaft coupled to the other forearm needs to rotate synchronously with the common upper arm drive shaft in order for the inactive end effector to remain contracted. With reference to FIGS. 14A, 14B, and 14C as well, the arms of FIGS. 11A and 11B as the upper and lower linkages extend are shown. Here, the inactive linkages 356 and 360 rotate while the active linkages 358 and 362 extend. As an example, the upper linkages 358 and 362 rotate as the lower linkages 356 and 360 extend, and the lower linkages 356 and 360 rotate as the upper linkages 358 and 362 extend. In the disclosed embodiments of FIGS. 10 and 11, assembly and control can be simplified, in which case the arm mechanism may be used on a coaxial drive without a motion seal. On the other hand, it provides a longer reach compared to equilink length arms with the same storage volume. No bridge is used here to support any of the end effectors. In the illustrated embodiment, the inactive arm rotates while the active arm extends. One of the wrist joints moves above the lower end effector (closer to the wafer than with the equal link mechanism).

Next, with reference to FIGS. 15A and 15B, a top view and a side view of the robot 450 having the dual arm mechanism are shown, respectively. The robot 450 has a common upper arm 454 and an arm 452 with independently operable forearms 456 and 458, respectively, with end effectors 460 and 462, respectively. In the illustrated embodiment, both linkages are shown in their contraction position. The lateral offset 466 of the end effector corresponds to the difference in inter-articular length between the upper arm 454 and the forearm 456, 458. In the illustrated embodiment, the upper arm has the same length and may be longer than the forearm. Further, the end effector 460 is positioned above the forearm 456, and the end effector 462 is positioned above the forearm 458. Similarly, with reference to FIGS. 16A and 16B, a top view and a side view of the robot 475 with an arm of alternative configuration are shown, respectively. Again, both linkages are shown in their contraction position. In this configuration, the third link of the left linkage and the end effector 482 are provided under the forearm 480 to reduce the vertical spacing between the two end effectors 482, 484. Similar effects can be obtained by stepping (468) lowering the upper end effectors of the configurations of FIGS. 15A and 15B. Alternatively, a bridge can be used to support one of the end effectors. The integrated brachial link 454 may be a single component, as shown in FIGS. 15 and 16, or two or more portions 470, as shown in the examples of FIGS. 17A and 17B. , 472 may be formed. Here, the two-part design may be provided as lighter and with less material, and the left 472 and right 470 parts may be the same component. Here, the two-part design may also have equipment for adjusting the angular offset between the left and right parts. These facilities can be useful when different contraction positions need to be supported. With reference to FIGS. 18 and 19 as well, the internal configurations used to drive the individual links of the arms of FIGS. 15 and 16, respectively, are shown. The integrated upper arm 454 is shown to be driven with the shaft 402 by a single motor. Each of the two forearms 456 and 458 is independently driven by one motor, via shafts 400 and 398, respectively, and through band drives 490, 492 with conventional pulleys, respectively. Here, the links 456 and 458 rotate on separate axes 494 and 494, respectively. The third link with end effectors 460, 462 is constrained by band drives 498, 500, respectively, having at least one non-circular pulley that offsets the effects of unequal length on the upper and forearms. Here, the band drives 498, 500 within each linkage 456, 460 and 458, 462 are designed using the methodology described for FIGS. 1 and 2. Here, the kinematic equations presented for FIGS. 1 and 2 may be used for each of the two linkages 456, 460 and 458, 462 of the dual arm as well. In order for the arm 452 to rotate, the three drive shafts 398, 400, and 402 of the robot all need to move by the same amount in the rotation direction of the arm. The drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the active end effector are shown in FIG. 1 and because one of the end effectors extends and contracts radially along a linear path. It is necessary to move cooperatively according to the inverse kinematics equation presented with respect to FIG. At the same time, the drive shaft coupled to the other forearm needs to rotate synchronously with the common upper arm drive shaft in order for the inactive end effector to remain contracted. With reference to FIGS. 20A, 20B, and 20C as well, the arms of FIGS. 16A and 16B as the linkages of left 458, 462 and right 456, 460 extend are shown. Note that the inactive linkages 456 and 460 rotate while the active linkages 458 and 462 extend. Here, the right linkages 456 and 460 rotate as the left linkages 458 and 462 extend, and the left linkages 458 and 462 rotate as the right linkages 456 and 460 extend. The illustrated embodiment takes advantage of the three-dimensional link design being easy to assemble and control, and, for example, the advantage of a coaxial drive without a motion seal, while the same storage volume. Provides a longer reach compared to a link arm that has. No bridge is used here to support any of the end effectors. Here, the inactive arm rotates while the active arm extends. One of the wrist joints moves above the lower end effector closer to the wafer than in the case of the equal link mechanism. This can be avoided by using a bridge (not shown) to support the upper end effector. In this case, the unsupported length of the bridge can be longer than in the equilink arm design. In addition, the contraction angle varies compared to, for example, a configuration having a common elbow joint as seen in FIGS. 10 and 11, and an independent dual arm as seen, for example, FIGS. 21 and 22. It can be more difficult.

Next, with reference to FIGS. 21A and 21B, top and side views of the robot 520 with independent dual arms 522 and 524 are shown, respectively. In the illustrated embodiment, both linkages 522 and 524 are shown in their contraction positions. The arm 522 has a third link with an independently movable upper arm 526, a forearm 528, and an end effector 530. The arm 524 has a third link with an independently movable upper arm 532, a forearm 534, and an end effector 536. In the illustrated embodiment, the forearms 528 and 534 are shown longer than the upper arms 526 and 532, and the end effectors 530 and 536 are positioned above the forearms 528 and 534, respectively. Similarly with reference to FIGS. 22A and 22B, top and side views of robot 550 with similar characteristics to those of robot 520, with arms of alternative configuration, are shown, both of which have linkages of theirs. Shown in the contraction position. In this configuration, the third link of the left linkage and the end effector 552 are provided under the forearm 554 to reduce the vertical spacing between the two end effectors. A similar effect can be obtained by stepping and lowering the upper end effector having the configuration of FIG. 21. Alternatively, a bridge can be used to support one of the end effectors. In FIGS. 21 and 22, the right upper arm 532 is located below the left upper arm 526. Alternatively, for example, the left upper arm may be placed below the right upper arm, in which case one linkage can be nested within the other linkage. With reference to FIG. 23 as well, the internal configuration used to drive the individual links of the arms of FIGS. 21A and 21B is shown. Here, for clarity of illustration, the height of the links is adjusted to avoid overlapping of the components. Each of the two upper arms 526 and 532 is independently driven by one motor through the respective shafts 398 and 402, respectively. The forearm 528, 534 is coupled to a third motor via a shaft 400 via band mechanisms 570, 572, each with at least one non-circular pulley. The third links 530, 536 with end effectors are constrained by band drives 574, 576, each with at least one non-circular pulley. The band drive is such that one rotation of the upper arm 526 and 532 stretches and contracts the corresponding linkages 528, 530 and 534, 536, respectively, along a straight line while the other linkage remains stationary. Designed to. The band drive within each linkage may be designed using the methodology described with respect to FIGS. 5 and 6, and the kinematic equations presented for FIGS. 5 and 6 are similarly dual-armed. It can be used for each of the linkages. In order for the arm to rotate, the three drive shafts 398, 400, and 402 of the robot all need to move by the same amount in the rotation direction of the arm. In order for one of the end effectors to extend and contract radially along a linear path, the drive shaft of the upper arm associated with the active end effector needs to be rotated according to the inverse kinematics equations for FIGS. 5 and 6. Yes, the other two drive shafts need to be kept stationary. With reference to FIGS. 24A, 24B, and 24C as well, the arm of FIG. 22 as the linkages of left 522 and right 524 extend is shown. Note that the inactive linkage 524 remains stationary while the active linkage 522 elongates. That is, the left linkage 522 does not move while the right linkage 524 extends, and the right linkage 524 does not move when the left linkage 522 extends. The illustrated embodiment provides a longer reach compared to an equal link arm design with the same storage volume. No bridge is used here to support any of the end effectors, and the inactive linkage remains stationary while the active linkage extends. Active linkages can expand or contract faster with no load, potentially resulting in higher throughput. The illustrated embodiment has two additional band drives with non-circular pulleys instead of the conventional ones, which can be more complex than shown in FIGS. 15 and 16. One of the wrist joints moves above the lower end effector, as seen in FIG. This can be avoided by using a bridge (not shown) to support the upper end effector. In this case, the unsupported length of the bridge is longer than in the equilink arm design.

Next, with reference to FIGS. 25A and 25B, a top view and a side view of the robot 600 having the arm 602 are shown, respectively. In the illustrated embodiment, both linkages are shown in their contraction position. The lateral offset 604 of the end effector corresponds to the difference in inter-articular length between the upper arm 606 and the forearms 608, 612. Here, in this embodiment, the forearms 608 and 612 are shorter than the common upper arm 606. The internal configuration used to drive the individual links of the arms may be similar to FIGS. 10-13, for example, as in FIG. 13, but the forearm in this example is more than the common upper arm. short. Here, the common upper arm is driven by one motor. Each of the two forearms is independently driven by a motor through a band drive with conventional pulleys. The third links 614, 616 with end effectors are constrained by a band drive, each with at least one non-circular pulley that offsets the effects of unequal length on the upper and forearms. The band drive within each linkage may be designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may be used for each of the two linkages of the dual arm as well. With reference to FIGS. 26A, 26B, and 26C as well, the arms of FIGS. 25A and 25B as the upper linkages 612, 616 extend are shown. The lateral offset 604 of the end effector corresponds to the difference in length between the brachial and forearm joints, and the wrist joint moves along a straight line offset by this difference with respect to the trajectory of the center of the wafer. Note that the inactive linkages 608, 614 rotate while the active linkages 612, 616 extend. For example, as the lower linkage elongates, the upper linkage rotates, and as the upper linkage elongates, the lower linkage rotates. Here, FIG. 26A shows an arm with both linkages in the contracted position. FIG. 26B shows the partially extended upper linkages 612, 616 where the wrist joint of the upper linkage is closest to the wafer carried by the lower linkage. It is observed that the wrist joint of the upper linkage does not move directly above the wafer (although it moves in the plane above the wafer). FIG. 26C shows the further extension of the upper linkages 612, 616. The illustrated embodiments can provide ease of assembly and control and may be used on coaxial or triaxial drives without motion seals, or other suitable drives. Here, the bridge may not be used to support any of the end effectors. The wrist joint of the upper linkage does not move directly above the wafer on the lower end effector, but this is the case for the equilink design (this wrist joint moves in the plane above the wafer on the lower end effector). Here, the inactive arm rotates while the active arm extends. The elbow joint may be more complex, which can lead to a larger turning radius or shorter reach. Here, the arm may be higher than the arm shown in FIGS. 30 and 31 and 33 due to the overlap of the forearms 608, 612.

Next, with reference to FIGS. 27A and 27B, a top view and a side view of the robot 630 having the arm 632 are shown, respectively. The arm 632 may have features similar to those disclosed with respect to FIGS. 15-19, except that the forearms 638, 640 are shown to have a shorter link length than the upper arm 636. Both linkages are shown in their contraction position. The lateral offset 634 of the end effectors 642,646 corresponds to the difference in inter-articular length between the upper arm 636 and the forearm 638, 640. The integrated brachial link 636 may be a single component, as shown in FIGS. 27A and 27B, or the brachial link may be 2 as shown in the examples of FIGS. 28A and 28B. It can be formed by one or more parts 636', 636 ". The design of the two parts may be lighter with less material, the left 636'and the right 636" parts being the same component. You may. For example, if different contraction positions need to be supported, a margin for adjusting the angular offset between the left 636'and right 636'parts may be provided, with individual links on the arm 632. The internal configuration used to drive may be similar to that in FIGS. 15-19, for example as seen in FIG. 19. The common upper arm 636 is driven by one motor. Each of the two forearms 638, 640 is independently driven by one motor through a band drive with a conventional pulley. The third link with the end effectors 642, 646 is the upper arm 636 and the forearm 638. , 640 may be constrained by a band drive, each having at least one non-circular pulley that offsets the effects of unequal length. The band drive within each linkage is described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may also be used for each of the two linkages of the dual arm. FIGS. 29A, 29B. , And FIG. 29C as well, show the arms of FIGS. 27A and 27B as the right upper linkages 640, 646 extend. The lateral offset 634 of the end effector is the interarticular length of the upper and forearms. Corresponding to the difference, the wrist joint moves along a straight line offset by this difference with respect to the orbit of the center of the wafer, where the active linkages 640, 646 are inactive while extending. The linkages 638 and 642 rotate. For example, the upper linkage rotates as the lower linkage elongates, and the lower linkage rotates as the upper linkage elongates. Of FIGS. 29A, 29B, and 29C, FIG. 29A. The arm with both linkages in the contracted position is shown. FIG. 29B shows the arm in the position where the wrist joints of the upper linkages 640, 646 on the right side are closest to the wafer conveyed by the lower linkages 638, 642 on the left side. Shows the right upper linkages 640, 646 extended to. Here, the wrist joints of the right upper linkages 640, 646 do not move directly above the wafer, but the wrist joints move in the plane above the wafer. FIG. 29C shows a further extension of the right upper linkages 640, 646. The illustrated embodiment is a three-dimensional link design, assembly and. Take advantage of ease of control, as well as, for example, a coaxial drive without a motion seal. No bridge is used to support any of the end effectors. The wrist joint of the upper linkage does not move directly above the wafer on the lower end effector, as is the case with the equilink design. However, this wrist joint moves in the plane above the wafer on the lower end effector. While the active arms 640, 646 extend, the inactive arms 638, 642 rotate. The contraction angle is more difficult to change compared to, for example, a configuration having a common elbow joint as seen in FIGS. 25A and 25B, and an independent dual arm as seen, for example, FIGS. 33A and 33B. Become. Further, since the forearm 640 is shown higher than the forearm 638, the position of the arm is shown higher than in FIGS. 30 and 31 and 33A and 33B.

Next, with reference to FIGS. 30A and 30B, a top view and a side view of the robot 660 having the arm 662 are shown, respectively. The arm 662 may have the characteristics as described with respect to FIGS. 27-29, but as described, it uses a bridge and has two forearms at the same height position. Both linkages are shown in their contraction position. The lateral offset 664 of the end effector corresponds to the difference in inter-articular length between the upper arm 666 and the forearms 668,670. The integrated brachial link 666 can be a single component, as shown in FIGS. 30A and 30B, or the brachial link can be 2 as shown in the examples of FIGS. 31A and 31B. It can be formed by one or more portions 666', 666 ". The internal configuration used to drive the individual links of the arm is identical to that shown for FIGS. 15-19. In this case, the forearms 668, 670 are shorter than the upper arm 666. The common upper arm 666 is driven by one motor. Each of the two forearms 668, 670 is conventional by one motor. Driven independently through a band drive with pulleys. A third link with end effectors 672, 674 each has a band with at least one non-circular pulley that offsets the effects of unequal length on the upper and forearms. Constrained by the drive. The band drive within each linkage may be designed using the methodology described for FIGS. 1 and 2. The kinematics presented for FIGS. 1 and 2. The equation can also be used for each of the two linkages of the dual arm. The third link and end effector 674 have a bridge 680; the bridge 680 has an upper end effector section 682, link 670 and link 674. It has a lateral offset support 684 offset from the wrist axis between and further has a lower support 686 that couples the wrist axis to the offset support 684. The bridge 680 can be seen below with respect to FIG. Allows the forearms 668 and 670 to be mounted at the same height, while providing a gap for a third link and end effector 672 (which may include wafers) as well as alternating portions of the bridge 680. The bridge 680 further provides a mechanism in which all moving parts associated with, for example, the two wrist joints are located below the surface of the wafer during transport. FIGS. 32A, 32B, 32C, and 32D. Similarly referenced are top views of the robot arm of FIGS. 30A and 30B as the right linkages 670, 674 extend. The lateral offset 664 of the end effector is the inter-articular length of the upper arm 666 and forearm 670. The wrist joint 690 moves along a straight line offset by this difference with respect to the orbit of the center of the wafer 692. Note that the inactive linkage 668, 672 rotates while the di 670, 674 elongates. For example, as the lower linkage elongates, the upper linkage rotates, and as the upper linkage elongates, the lower linkage rotates. Of FIGS. 32A, 32B, 32C, and 32D, FIG. 32A shows an arm with both linkages in the contracted position. FIG. 32B partially extends at the position corresponding to the case where the gap between the bridge 680 of the right linkages 670, 674 and the end effector 672 of the left linkages 668, 672 is the least desirable (or close to the least desirable gap). The right linkages 670 and 674 are shown. FIG. 32C shows the right linkages 670, 674 partially extended in the position where the forearm 670 is aligned with the upper arm 66 ". The lateral offset of the end effector corresponds to the difference in inter-articular length between the upper arm and the forearm. The axis of the wrist joint 690 travels along a straight line offset by this difference with respect to the orbit of the center of wafer 692. FIG. 32D shows the further extension of the right linkages 670, 674. The embodiments include the advantages of a side-by-side dual scara arrangement, for example, the slim outer shape and the advantages of a three-dimensional link design, which results in a shallow chamber with a small volume, and coaxial drive. Combined with the advantages of the device. The bridge 680 on the right linkage 670, 674 is lower and the unsupported length of the bridge 680 between the vertical member 684 and the wrist 690 is the prior art coaxial dual scalar arm. Shorter than in the case of, all of the joints are below the end effector, where the inactive arms 668, 672 rotate while the active arms 670, 674 extend, as described below. , In another aspect of the disclosed embodiments, the arm that does not exhibit this behavior may be provided with a different band drive with a non-circular pulley instead of the conventional one disclosed herein. The bridge supporting the upper end effector may be eliminated by utilizing a mechanism similar to that described above for FIGS. 25A, 25B, 27, 28.

Next, with reference to FIGS. 33A and 33B, a top view and a side view of the robot 700 having the arm 702 are shown, respectively. The arm 702 may have features similar to those of the arms shown in FIGS. 21-23, but the forearm length is shorter than the brachial length, using, for example, the bridge as described for the bridge 680. The forearms are placed at the same height. Both linkages are shown in their contraction position. In FIGS. 33A and 33B, the right upper arm 708 is located above the left upper arm 706. Alternatively, the left upper arm 706 may be placed above the right upper arm 708. Similarly, the third link and end effector 716 of the right linkages 712, 716 feature a bridge extending directly above the third link and end effector 714 of the left linkages 710, 714. Alternatively, the third link and end effector 714 of the left linkages 710, 714 may feature a bridge that may extend directly above the third link and end effector 716 of the right linkages 712, 716. The internal configuration used to drive the individual links of the arm may be similar to the embodiments shown in FIGS. 21-23. Each of the two upper arms 706 and 708 is independently driven by one motor. The forearms 710, 712 are coupled to a third motor via a band mechanism, each with at least one non-circular pulley. The third links 714, 716 with end effectors are constrained by band drives, each with at least one non-circular pulley. The band drive is designed so that the rotation of one of the upper arms 706, 708 stretches and contracts the corresponding linkage along a straight line while the other linkage remains stationary. The band drive within each linkage is designed using the methodology described for the embodiments shown in FIGS. 5 and 6. The kinematic equations presented for the embodiments shown in FIGS. 5 and 6 can also be used for each of the two linkages of the dual arm. With reference to FIGS. 34A, 34B, and 34C as well, the arms of FIGS. 33A and 33B as the right linkages 708, 712, 716 extend are shown. Here, the inactive linkages 706, 710, 714 remain stationary while the active linkages 712, 716 extend. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. The illustrated embodiment combines the advantages of a parallel dual scalar mechanism, eg, a slim outer shape that results in a shallow chamber with a small volume, and the advantages of a coaxial drive. The bridge on the right linkage is lower, the unsupported length of the bridge is shorter than with the existing coaxial dual scalar arm, and all of the joints are below the end effector. The inactive linkage remains stationary while the active linkage elongates. Active linkages can expand or contract faster with no load, potentially resulting in higher throughput. Alternatively, the bridge supporting the upper end effector may be eliminated by utilizing a mechanism similar to that described for FIGS. 25, 27, and 28.

Next, with reference to FIGS. 35A and 35B, a top view and a side view of the robot 730 with an arm 732 in which both linkages are shown in their contracted positions are shown. Each linkage has dual-holder end-effectors 740, 742. By supporting two boards offset from each other by each end effector, a total of four boards can be supported. The internal configuration used to drive the individual links of the arm 732 may be identical to FIGS. 10 and 11, for example FIG. The common upper arm 734 is driven by one motor. Each of the two forearms 736, 738 is independently driven by a single motor through a band drive with conventional pulleys. The third link with the end effectors 740, 742 is constrained by a band drive, each with at least one non-circular pulley that offsets the effects of unequal length on the upper and forearms. The illustrated embodiment has a forearm that is longer than the upper arm. Alternatively, the forearm may be shorter. The band drive within each linkage is designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may be used for each of the two linkages of the dual arm as well. With reference to FIG. 36 as well, the arms of FIGS. 35A and 35B as one linkage 738, 742 extends is shown. Note that the inactive linkages 736, 740 rotate while the active linkages 738, 742 extend. For example, as the lower linkage elongates, the upper linkage rotates, and as the upper linkage elongates, the lower linkage rotates. Compared to FIGS. 37 and 38, the end effector does not need to be shaped to avoid interference with the contralateral elbow.

Next, with reference to FIGS. 37A and 37B, a top view and a side view of the robot having the arm 750 are shown, respectively. Both linkages are shown in their contraction position, and each linkage has dual holder end effectors 758,760. The integrated brachial link 752 may be a single component, as shown in FIGS. 37A and 37B, or the brachial link may be two as shown in the examples of FIGS. 38A and 38B. It may be formed by the above portions 752', 752 ". The internal configuration used to drive the individual links of the arm may be identical to FIGS. 15-19, for example, FIG. The embodied upper arm 752 is driven by one motor. Each of the two forearms 754, 756 is independently driven by one motor through a band drive with a conventional pulley. The links 758, 760 of 3 are constrained by a band drive, each having at least one non-circular pulley that offsets the effects of unequal length on the upper arm and forearm. The illustrated embodiment is longer than the upper arm. It has a forearm. Alternatively, the forearm may be shorter. The band drive within each linkage is designed using the methodology described for FIGS. 1 and 2. The kinematic equation presented for this may be used for each of the two linkages of the dual arm as well. Due to the rotation of the arm, all three drive shafts of the robot are the same in the direction of rotation of the arm. The drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the active linkage are required to move by an amount because one of the end effector assemblies extends and contracts radially along a straight path. , Need to move coordinately according to the inverse kinematic equation for FIGS. 1 and 2. At the same time, the drive shaft coupled to the other forearm is a common upper arm for the inactive linkage to remain contracted. Needs to rotate in synchronization with the drive shaft of FIG. 39, with reference to FIG. 39 as well, showing the arms of FIGS. 37A and 37B as one linkage 756, 760 extends, where the active linkage. The inactive linkages 754, 758 rotate while elongating. For example, the right linkage rotates as the left linkage elongates, and the left linkage rotates as the right linkage elongates. Has no bridge. The upper wrist moves directly above one of the wafers on the lower end effector, where the arm and end effector allow the upper elbow to pass without touching the lower end effector. Must be designed to.

Next, with reference to FIGS. 40A and 40B, a top view and a side view of the robot 750 having the arm 752 are shown, respectively. Both linkages are shown in their contraction position, and each linkage has dual holder end effectors 792, 794. The internal configuration used to drive the individual links of the arm may be the same as in FIGS. 21-23. Each of the two upper arms 784, 786 is independently driven by one motor. The forearms 788, 790 are coupled to a third motor via a band mechanism, each with at least one non-circular pulley. The third link with the end effectors 792, 794 is constrained by a band drive with at least one non-circular pulley, respectively. The band drive is designed so that the rotation of one of the upper arms stretches and contracts the corresponding linkage along a straight line while the other linkage remains stationary. The illustrated embodiment has a forearm that is longer than the upper arm. Alternatively, the forearm may be shorter. The band drive within each linkage is designed using the methodology described for FIGS. 5 and 6. The kinematic equations presented for FIGS. 5 and 6 can also be used for each of the two dual-arm linkages. In order for the arm to rotate, all three drive shafts of the robot need to move by the same amount in the direction of rotation of the arm. In order for one of the end effector assemblies to extend and contract radially along a linear path, the drive shaft of the upper arm associated with the active linkage needs to be rotated according to the inverse kinematics equations for FIGS. 5 and 6. Yes, the other two drive shafts need to be kept stationary. With reference to FIG. 41 as well, the arms of FIGS. 40A and 40B as one linkage 784, 788, 794 extends is shown. Note that the inactive linkages 786, 790, 792 may remain stationary while the active linkages 784, 788, 794 are extended. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. Alternatively, the left and right linkages may be independently and simultaneously moved radially simultaneously, for example, as seen in FIG. 42, where the right linkage is slightly elongated independently compared to FIG. 41. Elbow movement in the upper linkage can be restricted due to potential interference with the wafer on the lower end effector. This can limit the reach of the robot, as shown in FIG. This limitation may be relaxed by slightly extending the lower linkage to provide additional clearance and achieve full reach, as shown in FIG. 42. The illustrated embodiment does not have a bridge. The wrist of the upper linkage may move above the wafer on the lower end effector.

Next, with reference to FIGS. 43A and 43B, a top view and a side view of the robot 810 having the arm 812 are shown, respectively. Both linkages are shown in their contraction position, and each linkage has dual holder end effectors 820,822. The internal configuration used to drive the individual links of the arm may be identical to FIGS. 10-13. The common upper arm 814 is driven by one motor. Each of the two forearms 816, 818 is independently driven by a single motor through a band drive with conventional pulleys. The third link with the end effectors 820, 822 is constrained by a band drive, each with at least one non-circular pulley that offsets the effects of unequal length on the upper and forearms. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive within each linkage is designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may be used for each of the two linkages of the dual arm as well. With reference to FIGS. 44 and 45 as well, the arms of FIGS. 43A and 43B as the upper linkages 818, 822 extend are shown. Note that the inactive linkages 816 and 820 rotate while the active linkages 818 and 822 extend. For example, as the lower linkage elongates, the upper linkage rotates, and as the upper linkage elongates, the lower linkage rotates. 44 and 45 show that the wrist joints 824 of the upper linkages 818 and 822 do not move directly above the wafer 826 carried by the lower linkages 816 and 820 of the arm. The illustrated embodiment does not have a bridge. Compared to FIGS. 46 and 47, the end effector does not need to be shaped to avoid interference with the contralateral elbow.

Next, with reference to FIGS. 46A and 46B, a top view and a side view of the robot 840 having the arm 842 are shown, respectively. Both linkages are shown in their contraction position, and each linkage has dual holder end effectors 850, 852. The integrated brachial link 844 can be a single component, as shown in FIGS. 46A and 46B, or the brachial link can be 2 as shown in the examples of FIGS. 47A and 47B. It can be formed by one or more portions 844', 844 ". The internal configuration used to drive the individual links of the arm may be identical to FIGS. 15-19, eg, FIG. The integrated upper arm 844 is driven by one motor. Each of the two forearms 846, 848 is independently driven by one motor through a band drive with a conventional pulley. End effector 850, The third link with 852 is constrained by a band drive, each having at least one non-circular pulley that offsets the effects of unequal length on the upper arm and forearm. In the illustrated embodiment, the forearm is the upper arm. Shorter. Alternatively, the forearm may be longer. The band drive within each linkage is designed using the methodology described for FIGS. 1 and 2. The kinematic equation presented for this may be used for each of the two linkages of the dual arm as well. Due to the rotation of the arm, all three drive shafts of the robot are the same in the direction of rotation of the arm. It needs to move by an amount. One of the end effector assemblies needs to extend and contract radially along a straight path, so that the drive shaft of the common upper arm 844 and the drive shaft coupled to the forearm associated with the active linkage. Must move coordinately according to the inverse kinematic equation for FIGS. 1 and 2. At the same time, the drive shaft coupled to the other forearm is common because the inactive linkage remains contracted. It needs to rotate in synchronization with the drive shaft of the upper arm. With reference to FIGS. 48 and 49 as well, the arm of FIGS. 46A and 46B as the upper linkages 848 and 852 extend is shown here. The inactive linkages 846, 850 rotate while the active linkages 848, 852 extend. For example, the upper linkage rotates as the lower linkage elongates, and the lower linkage rotates as the upper linkage elongates. 48 and 49 show that the wrist joint 854 of the upper linkage does not move directly above the wafer 856 carried by the lower linkage of the arm. The voice has no bridge and the wrist joint of the upper linkage does not move directly above the wafer carried by the lower linkage. Here, the inactive arm rotates less, allowing faster movement as the active arm expands or contracts without load.

Next, with reference to FIGS. 50A and 50B, a top view and a side view of the robot 870 having the arm 872 are shown. Both linkages are shown in their contraction position, and each linkage has dual holder end effectors 880, 882. The integrated brachial link 874 can be a single component, as shown in FIGS. 50A and 50B, or the brachial link can be 2 as shown in the examples of FIGS. 47A and 47B. It can be formed by one or more parts. The internal configuration used to drive the individual links of the arm may be identical to FIGS. 15-19, eg, 18. The integrated upper arm 874 is driven by a single motor. Each of the two forearms 876, 878 is independently driven by a single motor through a band drive with conventional pulleys. The third link with the end effector is constrained by a band drive, each with at least one non-circular pulley that offsets the effects of unequal length on the upper and forearms. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive within each linkage may be designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may be used for each of the two linkages of the dual arm as well. In order for the arm to rotate, all three drive shafts of the robot need to move by the same amount in the direction of rotation of the arm. The drive shaft of the common upper arm 874 and the drive shaft coupled to the forearm associated with the active linkage are shown in FIGS. 1 and 2 so that one of the end effector assemblies extends and contracts radially along a linear path. Need to move cooperatively according to the inverse kinematics equation for. At the same time, the drive shaft coupled to the other forearm needs to rotate synchronously with the common upper arm 874 drive shaft in order for the inactive linkage to remain contracted. With reference to FIG. 51 as well, the arms of FIGS. 50A and 50B are shown with one linkage 878, 882 extended. Here, the inactive linkages 876, 880 rotate while the active linkages 878, 882 are extended. For example, as the lower linkage elongates, the upper linkage rotates, and as the upper linkage elongates, the lower linkage rotates. The illustrated embodiment uses shorter short bands, has short forearm links that can be more rigid, and the forearms are arranged in parallel, facilitating a shallow chamber. Here, the short link can rotate the inactive arm more than in FIGS. 46 and 47, which may be addressed by a longer upper arm. A bridge 884 is provided and the arm and end effector may be designed so that the bridge 884 passes through the inactive end effector 880 during the extension movement without touching it. Here, the base of the end effector features an angled shape 886, as shown.

Next, with reference to FIGS. 52A and 52B, a top view and a side view of the robot 900 having the arm 902 are shown, respectively. Both linkages are shown in their contraction position and each linkage has a dual holder end effector. The internal configuration used to drive the individual links of the arm may be the same as in FIGS. 21-23. Each of the two upper arms 904 and 906 is independently driven by one motor. The forearms 908, 910 are coupled to a third motor via a band mechanism, each with at least one non-circular pulley. The third link with the end effectors 912, 914 is constrained by a band drive with at least one non-circular pulley, respectively. The band drive is designed so that the rotation of one of the upper arms 904, 906 extends and contracts the corresponding linkage along a straight line while the other linkage remains stationary. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive within each linkage is designed using the methodology described for FIGS. 5-6. The kinematic equations presented for FIGS. 5-6 may also be used for each of the two dual-arm linkages. In order for the arm to rotate, all three drive shafts of the robot need to move by the same amount in the direction of rotation of the arm. In order for one of the end effector assemblies to extend and contract radially along a linear path, the drive shaft of the upper arm associated with the active linkage needs to be rotated according to the inverse kinematics equations for FIGS. 5-6. Yes, the other two drive shafts need to be kept stationary. With reference to FIG. 53 as well, the arms of FIGS. 52A and 52B are shown with one linkage 906, 910, 914 extended. Note that the inactive linkages 904, 908, 912 remain stationary while the active linkages 906, 910, 914 extend with the bridge 916. That is, the left linkage does not need to move while the right linkage extends, and the right linkage does not need to move when the left linkage extends, but the linkage may be moved independently in the radial direction. The illustrated embodiment uses shorter bands, has shorter links that can be more rigid, and has parallel forearms that facilitate shallow chambers. Alternatively, the forearm may be longer than the upper arm in a configuration with a bridge.

Next, with reference to FIGS. 54-55, a coupled dual arm 930 with opposite end effectors 938, 940 is shown. 54A and 54B show a top view and a side view of a robot having an arm, respectively. Both linkages are shown in their contraction position, and the lateral offset of the end effector corresponds to the difference in inter-articular length between the brachial arm 932 and the forearm 934, 936. The integrated brachial link 932 can be a single component, as shown in FIG. 54, or the brachial link can be formed by two or more portions. As an example, the two-part design may be lighter with less material, and the left and right parts may be the same component. The internal configuration used to drive the individual links of the arm may be based on that shown with respect to FIGS. 18 and 19 or another. The common upper arm 932 is driven by one motor. Each of the two forearms 934, 936 is independently driven by one motor through a band drive with conventional pulleys. The third link with the end effectors 938, 940 is constrained by a band drive, each with at least one non-circular pulley that offsets the effects of unequal length on the upper arm 932 and forearm 934, 936. The band drive within each linkage is designed using the methodology described with respect to FIG. 1 or otherwise. The kinematic equations presented for FIG. 1 can also be used for each of the two dual-arm linkages. 55A-55C show the arm of FIG. 54 as the first linkages 934, 938 and the second linkages 936, 940 extend from the contracted position. The lateral offset of the end effector corresponds to the difference in inter-articular length between the upper arm 932 and the forearm 934, 936, and the wrist joints 942, 946 along a straight line offset by this difference with respect to the orbit of the center of the wafer. Moving. Note that the inactive linkage rotates while the active linkage elongates. For example, as the first linkage elongates, the second linkage rotates, and as the second linkage elongates, the first linkage rotates. FIG. 55A shows an arm with both linkages in the contracted position. FIG. 55B shows how the first linkages 934 and 938 are extended. FIG. 55C shows how the second linkages 936 and 940 are extended. Since the forearms move in the same plane and the end effectors move in the same plane, the arms shown have a thin profile, allowing for a shallow vacuum chamber with a small volume. Since the contraction position of the wrist of one linkage is constrained by the wrist of the other linkage, the containment radius of the arm may be large, and the arm is determined by the size of the slot valve to determine the diameter of the chamber. , Which makes it particularly suitable for applications that use a large number of process modules. Due to its thin outer shape, the arm can replace a frogleg-shaped arm with opposing end effectors. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearms may be longer, in which case, for example, the forearms are at different heights and overlap.

Referring to FIGS. 56-57, an independent dual arm 960 with opposing end effectors 970, 972 is shown. 56A and 56B show a top view and a side view of a robot having an arm. Both linkages are shown in their contraction position. In FIG. 56, the brachial arm 962 of the first linkage is located above the brachial arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be placed above the upper arm of the first linkage. The internal configuration used to drive the individual links of the arm may be based on or different from FIG. Here, each of the two upper arms 962 and 964 may be independently driven by one motor. The forearms 966, 968 are coupled to a third motor via a band mechanism, each with at least one non-circular pulley. The third link with the end effectors 970, 972 is constrained by a band drive with at least one non-circular pulley, respectively. The band drive is designed so that the rotation of one of the upper arms stretches and contracts the corresponding linkage along a straight line while the other linkage remains stationary. The band drive within each linkage is designed using the methodology described for FIG. The kinematic equations presented for FIG. 5 can also be used for each of the two dual-arm linkages. 57A-57C show the arm of FIG. 56 as the first linkages 962, 966, 970 and the second linkages 964, 968, 972 extend from the contracted position. Here, the inactive linkage remains stationary (but not necessary) while the active linkage elongates. That is, the second linkage does not move while the first linkage extends, and the first linkage does not move when the second linkage extends. Since the forearms move in the same plane and the end effectors move in the same plane, the arms have a thin outer shape, allowing for a shallow vacuum chamber with a small volume. Since the contraction position of the wrist of one linkage is constrained by the wrist of the other linkage, the storage radius of the arm is large, and the arm uses a large number of process modules whose chamber diameter is determined by the size of the slot valve. It will be particularly suitable for the application. Due to its thin outer shape, the arm can replace a frogleg-shaped arm with opposing end effectors. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearms may be longer, in which case, for example, the forearms are at different heights and overlap.

Next, referring to FIG. 58, a coupled dual arm 990 with angularly offset end effectors 998, 1000 is shown. 58A and 58B show a top view and a side view of a robot having an arm. Both linkages are shown in their contraction position. The lateral offsets 1002 and 1004 of the end effector correspond to the difference in inter-articular length between the upper arm 992 and the forearm 994 and 996. The integrated brachial link 992 may be a single component or may be formed by two or more portions, as shown in FIG. 59. The internal configuration used to drive the individual links of the arm is based on or different from FIGS. 18 and 19. Here, the common upper arm 992 may be driven by one motor. Each of the two forearms 994, 996 may be independently driven by one motor through a band drive with conventional pulleys. The third link with the end effectors 998, 1000 is constrained by a band drive, each with at least one non-circular pulley that offsets the effects of unequal length on the upper and forearms. The band drive within each linkage is designed using the methodology described for FIG. 1 or otherwise. The kinematic equations presented for FIG. 1 can also be used for each of the two dual-arm linkages. Similarly, with reference to FIGS. 59A-59C, the arm of FIG. 58 as the left linkages 994, 998 and the right linkages 996, 1000 extend is shown. The lateral offsets 1002 and 1004 of the end effector correspond to the difference in length between the brachial and forearm joints, and the wrist joint moves along a straight line offset by this difference with respect to the trajectory of the center of the wafer. Here, the inactive linkage rotates while the active linkage elongates. For example, as the left linkage elongates, the right linkage rotates, and as the right linkage elongates, the left linkage rotates. FIG. 59A shows an arm with both linkages in the contracted position. FIG. 59B shows how the left linkages 994 and 998 are extended. FIG. 59C shows how the linkages 996 and 1000 on the right side are extended. Here, the inactive arm rotates while the active arm extends. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearms may be longer, in which case, for example, the forearms are at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any separation angle may be provided.

Next, with reference to FIG. 60, an independent dual arm 1030 with angularly offset end effectors 1040, 1042 is shown. Here, FIGS. 60A and 60B show a top view and a side view of a robot having an arm. Both linkages are shown in their contraction position. In FIG. 60, the right upper arm 1034 is located below the left upper arm 1032. Alternatively, the left upper arm may be placed below the right upper arm. The internal configuration used to drive the individual links of the arm may be based on FIG. Each of the two upper arms 1032 and 1034 may be driven independently by one motor. The forearm is coupled to a third motor via a band mechanism, each with at least one non-circular pulley. The third link with the end effectors 1040, 1042 is constrained by a band drive with at least one non-circular pulley, respectively. The band drive is designed so that one rotation of the upper arm 1032, 1034 stretches and contracts the corresponding linkage along a straight line while the other linkage remains stationary. The band drive within each linkage is designed using the methodology described for FIG. 5 or otherwise. The kinematic equations presented for FIG. 5 can also be used for each of the two dual-arm linkages. 61A-61C show the arm of FIG. 60 as the left linkages 1032, 1036, 1040 and then the right linkages 1034, 1038, 1042 extend. Here, the inactive linkage remains stationary (but not necessary) while the active linkage elongates. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. Here, the inactive linkage remains stationary while the active linkage elongates. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearms may be longer, in which case, for example, the forearms are at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any separation angle may be provided.

As an example with respect to FIG. 62 or another example, the third link and end effectors 1060, 1062, which may be referred to as the third link assembly, respectively, mass as the corresponding linkage of the arm expands and contracts. The centers 1064 and 1066 may be designed to be on or near the linear orbit of the wrist joints 1068 and 1070, respectively. This reduces the moment due to the inertial force acting at the center of mass of the third link assembly and the reaction force at the wrist joint, thus reducing the load on the band mechanism that constrains the third link assembly. Here, the third link assembly may be further designed so that its center of mass is on one side of the wrist joint trajectory when the payload is present and on the other side of the trajectory when the payload is not present. .. Alternatively, the best linear tracking performance is usually required with the payload loaded, so the third link assembly is centered in its mass when the payload is present, as shown in FIG. It may be designed to be substantially in the wrist joint trajectory. In FIG. 62, 1L is the linear trajectory of the center of the wrist joint of the left linkage, 2L is the center of the wrist joint of the left linkage 1070, and 3L is the center of mass 1066 of the third link assembly of the left linkage, 4L. Is the force acting on the third link assembly of the left linkage when the left linkage accelerates at the beginning of the extension movement (or decelerates at the end of the contraction movement), and 5L is the force acting on the third link assembly of the left linkage. The inertial force acting at the center of gravity of the third link assembly of the left linkage when accelerating at the beginning of (or decelerating at the end of the contractile motion). Similarly, 1R is the linear trajectory of the center of the wrist joint of the right linkage, 2R is the center of the wrist joint of the right linkage 1068, 3R is the center of mass 1064 of the third link assembly of the right linkage, and 4R is. 5R is the force acting on the third link assembly of the right linkage as the right linkage decelerates at the end of the extension movement (or accelerates at the beginning of the contraction movement), and 5R is the force with which the right linkage is in the extension movement. The inertial force acting at the center of mass of the third link assembly of the right linkage when decelerating at the end (or accelerating at the beginning of the contraction motion). In the illustrated embodiment, dual wafer end effectors are provided. In an alternative embodiment, any suitable end effector and arm or link geometry may be provided.

In an alternative embodiment, the upper arm in any of the embodiments of this embodiment can be driven by a motor either directly or via any type of coupling or transmission mechanism. Any transmission ratio may be used. Alternatively, the band drive that activates the second link and constrains the third link is a belt drive, cable drive, circular and non-circular gears, linkage-based mechanisms or any combination of the above, etc. Can be replaced by any other mechanism of equivalent functionality. Alternatively, for example, in the dual arm and quad arm embodiments of this embodiment, the third link of each linkage is a third link, similar to the single arm concept of FIG. The end effector can be constrained to maintain in the radial direction via a conventional two-stage band mechanism synchronized with a pulley driven by two motors. Alternatively, the two-stage band mechanism can be replaced by any other suitable mechanism, such as a belt drive, cable drive, gear drive, linkage based mechanism or any combination of the above. Alternatively, the upper arms in the dual arm and quad arm embodiments of this embodiment do not have to be arranged coaxially. The upper arm can have a separate shoulder joint. The two linkages, dual arm and quad arm, do not have to have the same length upper arm and the same length forearm. The length of the upper arm of one linkage may differ from the length of the upper arm of the other linkage, and the length of the forearm of one linkage may differ from the length of the forearm of the other linkage. The forearm-to-brachial ratio may be different for the two linkages. In the dual arm and quad arm embodiments of the present embodiment, where the heights of the links on the left and right linkages are different, the left and right linkages can be interchanged. The two linkages, dual arm and quad arm, do not need to extend in the same direction. The arm can be configured such that each linkage extends in different directions. The two linkages in any of the embodiments of the present embodiment are from more than or less than three links (first link = upper arm, second link = forearm, third link = link with end effector). You may become. In the dual arm and quad arm aspects of this embodiment, each linkage may have a different number of links. In the single arm aspect of this embodiment, the third link can carry a plurality of end effectors. Any suitable number of end effectors and / or material holders can be carried by the third link. Similarly, in the dual arm aspect of this embodiment, each linkage can carry any suitable number of end effectors. In either case, the end effectors can be positioned in the same plane, stacked one above the other, placed in combination of the two, or placed in any other suitable way. Further, for dual arm configurations, for example, with a filing date of November 6, 2012, which is incorporated herein by reference in its entirety, "Robot System with Independent Arms. ) ”, As described for the pending US patent application with application number 13 / 670,004, each arm may be able to operate independently, eg, rotation, extension and /. Alternatively, it may be able to operate independently at z (vertical). Therefore, all such changes, combinations, and variations are included.

Here, with reference to FIG. 63, an exemplary pulley graph display 1100 is shown. The outer shape of the exemplary pulley may be for an arm having an unequal link length, as described below. As an example, graph 1100 may show the outer shape of a wrist pulley in which the elbow pulley is circular. Here, the following design example is used in the figure. Re / l2 = 0.2, where Re is the radius of the elbow pulley and l2 is the inter-articular length of the forearm. Alternatively, any suitable ratio may be provided. For clarity, the graph shows an extreme design example compared to equilink arm pulleys. The outermost outer shape 1110 is l ₂ / l ₁ = 2, where l2 is the inter-articular length of the forearm and l1 is the inter-articular length of the upper arm, for example, in this case the longer forearm. Represents. For example, in the case of an equal link length, the intermediate outer shape 1112 is l ₂ / l ₁ = 1. The innermost outer shape 1114 is l ₂ / l ₁ = 0.5, which in this case represents a shorter forearm, for example. In the illustrated embodiment, the polar coordinate system 1120 is used. Here, the radial distance is normalized to the radius of the elbow pulley and is expressed, for example, as a multiple of the radius of the elbow pulley. In other words, Rw / Re is shown, where Rw represents the polar coordinates of the wrist pulley and Re represents the elbow pulley. The angular coordinates are in degrees, zero points in the direction along the end effector direction 1122, for example, the end effector points to the right side of the figure.

Next, with reference to FIGS. 64 and 65, two additional configurations of arms 1140 and 1160 with unequal link lengths are shown. The arm 1140 is shown to have a forearm 1144 that is longer than the upper arm 1142, where the single arm configuration is a feature as disclosed with respect to FIGS. 1-4 and 5-8 or the like. May be used. In the illustrated embodiment, the two end effectors 1146, 1148 supporting the respective substrates 1150 and 1152 are tightly connected to each other and point in opposite directions. The substrate, as shown, coincides with the center 1156 of the robot 1140 and travels a radial path offset (1154) from the wrist. Similarly, the arm 1160 is shown to have a forearm 1164 shorter than the upper arm 1162, where the single arm configuration is disclosed with respect to FIGS. 1-4 and 5-8 or the like. Such features may be utilized. In the illustrated embodiment, the two end effectors 1166, 1168 supporting the respective substrates 1170, 1172 are tightly connected to each other and point in opposite directions. The substrate aligns with the center 1176 of the robot 1160 and travels a radial path offset (1174) from the wrist, as shown. Here, the characteristics of the disclosed embodiments may be shared in the same manner as any of the other disclosed embodiments.

Here, with reference to FIGS. 66 and 67, the present disclosure describes a dual arm robot 1310 with a stacked parallel end effector configuration. This device is a US patent entitled "Low Variability Robot" published on March 21, 2013, based on US Patent Application No. 13 / 618,117 filed September 14, 2012. Transport mechanisms and devices as disclosed in US Patent Application No. 14/601 and 455, entitled "Substrate Transport Platform" filed in Publication No. 2013/0071218 or January 21, 2015. Can be used in combination with, all of which are incorporated herein by reference in their entirety. Alternatively, the present embodiment may be used in any suitable device or in multiple applications. The disclosed device has (i) a small footprint that allows it to move and rotate in a narrow tunnel, and (ii) both end effectors can be used independently or simultaneously to access the same station. The robot 1310 may be provided with two end effectors that can (iii) access the parallel offset stations independently or simultaneously.

Exemplary embodiments of the robot 1310 are schematically shown in FIGS. 66A-66D and 67A-67D. The robot may consist of a robot drive unit 1312 having a pivot base 1314 centered on a shaft 1334, and a robot arm 1316. The robot arm 1316 may feature two linkages, namely the left linkage 1318 and the right linkage 1320. 66A-66D show a robot in which both linkages are contracted, and FIGS. 67A-67D show a robot in which the left linkage 1318 is extended.

The left linkage 1318 may consist of a left upper arm 1322, a left forearm 1324, and a left end effector 1326. The left brachial arm 1322 may be attached to the base via a rotary joint or shaft 1336, the left forearm 1324 may be coupled to the left brachial arm 1322 by another rotary joint or shaft 1338, and the left end effector 1326 may be It may be connected to the left forearm 1324 by yet another rotary joint or shaft 1340.

Similarly, the right linkage 1320 may consist of a right upper arm 1328, a right forearm 1330, and a right end effector 1332. The right brachial arm 1328 may be coupled to the base via a rotary joint or shaft 1342, the right forearm 1330 may be coupled to the right brachial arm 1328 by another rotary joint or shaft 1344, and the right end effector 1332 It may be connected to the right forearm 1330 by yet another rotary joint or shaft 1346.

The inter-articular length of the left forearm may be longer than the inter-articular length of the left upper arm. Alternatively, the inter-articular length of the left forearm may be equal to the inter-articular length of the left upper arm. In yet another alternative, the left forearm and left upper arm may have any other suitable length.

Similarly, the inter-articular length of the right forearm may be longer than the inter-articular length of the right upper arm. Alternatively, the inter-articular length of the right forearm may be equal to the inter-articular length of the right upper arm. In yet another alternative, the right forearm and right upper arm may have any other suitable length.

In the examples of FIGS. 66A-66D and 67A-67D, the interarticular lengths of the left and right forearms and the left and right forearms are shown to be the same. Similarly, the dimensions of the left end effector and the right end effector, including length and lateral offset, are shown as the same. However, the linkage may be characterized by any suitable dimensions of the upper arm, forearm and end effector.

In order for the two end effectors to be able to access the parallel offset station at the same time, the distance between the joints that connect the left and right brachii to the base may be selected to satisfy the following relationship.
D = 2d0 (1)

Here, D is the center-to-center distance (m) between the parallel offset stations, and d0 is the distance (m) between the joints connected to the left upper arm and the right upper arm as the base.

In addition, the linkage dimensions may be selected to satisfy the following relationships so that the two end effectors can access the same station at the same time.
d0 = l2L-l1L + d3L + l2R-l1R + d3R (2)

The following terms are used in the above equation (2). d3L is the lateral offset (m) of the left end effector, d3R is the lateral offset (m) of the right end effector, l1L is the inter-articular length (m) of the left forearm, and l1R is the right upper arm. The inter-articular length (m), l2L is the inter-articular length of the left forearm (m), and l2R is the inter-articular length of the right forearm (m).

If the robot arms are symmetrical, i.e., the left and right linkages have the same dimensions, equation (2) can be simplified as follows.
d0 = 2 (l2-l1 + d3) (3)

Here, d3 is the lateral offset (m) of the end effector, l1 is the inter-articular length of the upper arm (m), and l2 is the inter-articular length of the forearm (m).

FIGS. 68A and 68B schematically show exemplary mechanisms 1398, 1438 that may be used to drive the base and individual links of the robot, namely the upper arm, forearm, and end effector. As shown in FIGS. 68A and 68B, the base may be driven by drive shafts 1400, 1448, eg T0.

The left upper arm 1402, 1454 may be actuated by the drive shaft T1L 1420, 1440. The left forearm 1406, 1456 may be coupled to another drive shaft T2L 1422, 1442 via a band mechanism having at least one non-circular pulley. The band mechanism is designed to extend and contract the left wrist joint, that is, the joint that connects the left end effector to the left forearm, along a straight line parallel to the desired linear path of the left end effector by rotating the left upper arm. May be done.

The left end effector 1410 may be constrained by another band mechanism having at least one non-circular pulley that offsets the effects of unequal length on the left upper arm and left forearm, so that the left end effector is desired. You may move along a straight line while maintaining the orientation.

Alternatively, if l1L = l2L, a conventional pulley may be used, as shown in FIG. 68B. In this embodiment, the band mechanism that connects the left forearm to the shaft T2L is designed so that the diameter of the pulley coupled to the shaft T2L is twice the diameter of the pulley coupled to the left forearm. The band mechanism that constrains the left end effector is designed so that the diameter of the pulley attached to the left upper arm is half the diameter of the pulley attached to the left end effector.

Similarly, the right upper arm 1404, 1450 may be actuated by the drive shaft T1R 1424, 1444. The right forearm 1408, 1452 may be coupled to another drive shaft T2R 1426, 1446 via a band mechanism having at least one non-circular pulley. The band mechanism causes the rotation of the right upper arm to extend and contract the right wrist joint, that is, the joint that connects the right end effector to the right forearm, along a straight line parallel to the desired linear path of the right end effector 1412. It may be designed.

The right end effector 1412 is constrained by another band mechanism with at least one non-circular pulley that offsets the effects of unequal length on the right upper arm and right forearm, so that the right end effector maintains the desired orientation. You may move along a straight line while doing so.

Alternatively, if l1R = l2R, a conventional pulley can be used, as shown in FIG. 68B. In this embodiment, the band mechanism that connects the right forearm to the shaft T2R is designed so that the diameter of the pulley coupled to the shaft T2R is twice the diameter of the pulley coupled to the right forearm. The band mechanism that constrains the right end effector is designed so that the diameter of the pulley attached to the right upper arm is half the diameter of the pulley attached to the right end effector.

In order for the entire robot arm to rotate, all drive shafts, i.e. T0, T1L, T2L, T1R, and T2R, need to move in the desired direction of rotation of the arm by the same amount with respect to the fixed reference frame ( Alternatively, the drive shaft T0 needs to move, but the other drive shafts can be considered stationary with respect to the base). This is schematically shown in FIGS. 69A-69C. In this particular example, the entire robot arm rotates 180 degrees counterclockwise.

Due to the extension and contraction of the left end effector along a linear path, the drive shaft T1L moves by an angle determined based on the inverse kinematic equation of the left linkage while the shafts T0 and T2L are stationary. There is a need. A robot 1500 with a left arm 1502 and a right arm 1504 in which the left end effector extends from the initial position of FIG. 69A is schematically shown in FIG. 69D.

Similarly, because the right end effector extends and contracts along a linear path, the drive shaft T1R has an angle determined based on the inverse kinematic equation of the right linkage while the shafts T0 and T2R are stationary. You just have to move. A robot in which the right end effector extends from the initial position of FIG. 69A is schematically shown in FIG. 69E.

Both the robot's left and right end effectors are in a straight path by rotating the drive shafts T1L and T1R in opposite directions and, if the left and right linkages feature the same dimensions, by the same amount. It may expand and contract at the same time along. A robot in which both the left end effector and the right end effector extend from the initial position of FIG. 69A is schematically shown in FIG. 69F.

The above-mentioned movements with respect to FIGS. 69D-69F allow the robot to extend and contract each end effector independently or simultaneously with respect to the same station. Thus, the robot can lift and place materials such as semiconductor wafers on the same station independently or simultaneously using both end effectors along a straight path 1510.

The left linkage 1502 and the right linkage 1504 can also be rotated individually. In order for the left linkage to rotate, the drive shafts T1L and T2L need to move by the same amount in the desired rotation direction. Similarly, in order for the right linkage to rotate, the drive shafts T1R and T2R need to move by the same amount in the desired direction of rotation.

When the left and right linkages are individually rotated 180 degrees, the left and right end effectors are offset laterally, as shown in the exemplary diagrams shown in FIGS. 70A-70C. In this particular example, the left linkage 1502 rotates clockwise while the right linkage 1504 rotates counterclockwise (preventing the risk of collision between the left and right wrist joints). However, the left and right linkages may rotate independently in sequence in the same direction or in other suitable ways.

As a result of the individual rotations of the left and right linkages described above, the arm will be lateral to the center of the left and right end effectors by a distance D, as long as the robot dimensions meet the conditions of equations (1) and (2). Reconstructed to be offset in the direction.

If the above end effector offset reconstruction by individual rotations of the left and right linkages follows before or after the rotation of the entire arm, their movements are conveniently coordinated to minimize overall duration. May be good.

When it comes to the position shown in FIG. 70C, the left end effector may be extended and contracted again along the linear path 1512 by moving the drive shaft T1L while holding the shafts T0 and T2L stationary. Similarly, the right end effector may be extended and contracted along a linear path by moving the drive shaft T1R while holding the shafts T0 and T2R stationary. Finally, both the robot's left and right end effectors rotate the drive shafts T1L and T1R in opposite directions and by the same amount if the left and right linkages feature the same dimensions. It may be simultaneously extended and contracted along a linear path.

A robot with the left end effector extending from the initial position in FIG. 70C is schematically shown in FIG. 70D. A robot in which the right end effector extends from the initial position in FIG. 70C is schematically shown in FIG. 70E. A robot in which both the left end effector and the right end effector extend from the initial position of FIG. 70C is schematically shown in FIG. 70F.

The motion described above with respect to FIGS. 70E-70F allows the robot to extend and contract the end effector with respect to the two parallel offset stations. Thus, the robot can independently or simultaneously lift and place materials such as semiconductor wafers on two parallel offset stations.

For example, if the access paths to the parallel offset stations are not parallel, as in path 1514 or 1516 of FIG. 71, the robot may rotate the left and right linkages separately, thereby extending / contracting the path. Align the direction with the access route to the station. Examples of such situations are schematically shown in FIGS. 71A-71C. Assuming the initial position of FIG. 71A, the left and right linkages may be rotated to reconstruct the arm, thereby offsetting the end effector laterally and angularly, as shown in FIG. 71B. In this particular example, the angular offset between the left end effector and the right end effector is 30 degrees. From the contraction position of FIG. 71B, the left linkage may be extended independently or simultaneously, as shown in FIG. 71C.

The robot may also access stations 180 degrees apart, either independently or simultaneously, as illustrated in FIGS. 71D and 71E. In this particular example, assuming the starting position of FIG. 71A, the left and right linkages are first rotated to form the configuration of FIG. 71D, and then the left end effector and / or the right end effector, as shown in FIG. 71E. May be extended independently or simultaneously.

In FIG. 71E, both the left and right linkages are shown in an extended state, but in an alternative embodiment, only one of the two linkages may be extended. Here, in the configuration shown in FIG. 71E, the reach of the linkage (measured from the center of the robot represented by the axis of the drive shaft T0) is longer, so this configuration is at a station located far away from the robot. It may be used.

Depending on the number of degrees of freedom required for a particular application, the robot may be driven using a drive mechanism with 3 to 5 axes.

As shown in two examples 1600 and 1700 of FIGS. 72A and 72B and 72C and 72D, the triaxial drive mechanism may include three independently controlled motors M0, M1 and M2.

Of FIGS. 72A-72D, FIGS. 72A and 72B show top and side views of exemplary configuration 1600 of the robot drive unit and arm base 1618, respectively. Here, the motor M0 is directly coupled to the shaft T0 1602 to operate the base 1618, the motor M1 1604 is directly attached to the shaft T1L 1610 to drive the left upper arm, and the motor M2 1606 is coupled to the right forearm shaft T2R. Attached directly to 1616. Further, two belt mechanisms 1620 and 1622 are utilized so that the shafts T1L 1610 and T1R 1614 rotate in opposite directions and the shafts T2L 1612 and T2R 1616 rotate in opposite directions, respectively . This is similarly achieved by a crossover band mechanism 1620 between the shafts T1L and T1R and another crossover band mechanism 1622 between the shafts T2L and T2R.

Alternatively, the drive 1700 may have motors M0 1702, M1 1704, and M2 1706 located in the drive unit, band drive 1720, 1722, as shown in the examples of FIGS. 72C and 72D. May be used to transmit motion from motors M1 and M2 to shafts T1L 1710, T1R 1714, and T2L 1712, T2R 1716, respectively.

In yet another alternative, any suitable combination of direct coupling and band mechanism between the motor and the drive shaft may be employed. In general, any suitable kinetic transmission means between the motor and the drive shaft that provides the desired kinetic relationship may be used.

When the three-axis drive mechanism according to the embodiment of FIGS. 72A-72D is utilized, the robot has an independent extension and contraction of the left and right linkages (FIGS. 69D, 69E, 70D, 70E). All operations defined in FIGS. 69-71 may be performed.

The four-axis drive mechanism may include four independently controlled motors, as shown in Examples 1800 and 1900 in FIGS. 73A and 73B. 73A and 73B show a top view and a side view of the robot drive unit and the arm base 1802. Motors M0 1804, M1L 1808, and M1R 1810 may be used to independently operate the shafts T0 1804, T1L 1808, and T1R 1810, respectively. Motors M2 1806 may be used to operate the shafts T2L 1812 and T2R 1814 so that the two shafts rotate in opposite directions. In the particular example of the figures in FIGS. 73A and 73B, this is a straight band mechanism 1820 between the pulley coupled to the motor M2 and the shaft T2L, and another pulley coupled to the motor M2 and the shaft T2R. Achieved via the crossover band mechanism 1822 between.

Alternatively, a direct coupling and band mechanism or any other mechanism between the motor and drive shaft that facilitates the independent actuation of the shafts T0, T1L, and T1R and the coupled actuation of the shafts T2L and T2R. Any combination of suitable motion transmission means is employed.

When such a 4-axis drive mechanism is utilized, the robot may perform all operations of FIGS. 69-71, including independent extension and contraction of the left and right linkages.

The 5-axis drive 1900 may include five independently controlled motors M0 1904, M1L 1906, M2L 1908, M1R 1910, and M2R 1912. Each of these motors directly couples and combines band mechanisms, via a band drive, by extending the examples in FIGS. 72C and 72D, as shown in the examples in FIGS. 73C and 73D, respectively. It may be coupled to the drive shafts T0, T1L, T2L, T1R, and T2R in use or by any other suitable method that can facilitate the transmission of motion from the motor to the drive shaft. 73C shows a top view of the drive unit 1900 and the base 1902, and FIG. 73D shows a side view.

When the 5-axis drive mechanism is used, the robot may perform all the operations of FIGS. 69-71. In addition, the left and right linkages can be operated in completely independent ways, including independent rotation, which cannot be accommodated by 3-axis and 4-axis drive mechanisms.

The internal configuration of another example of the base and linkage of the robot 2010 of FIG. 66 is schematically shown in FIG. 74A. Again, the base 2012 may be driven by the drive shaft T0.

The left upper arm 2014 may be actuated by the drive shaft T1L. The left forearm may be driven by another drive shaft T2L via a band mechanism with a conventional pulley. The left end effector may be constrained by another band mechanism with at least one non-circular pulley that offsets the effects of unequal length on the left upper arm and left forearm so that the left end effector is oriented in the desired orientation. You may move along a straight line while maintaining. Alternatively, if l1L = l2L, conventional pulleys may be utilized, as shown in FIG. 74B having an arm 2030 with a base 2032, a left arm 2034, and an arm 2030 with a right arm 2036.

Similarly, the right upper arm 2016 may be actuated by the drive shaft T1R. The right forearm may be driven by another drive shaft T2R via a band mechanism with a conventional pulley. The right end effector may be constrained by another band mechanism with at least one non-circular pulley that offsets the effects of unequal length on the right upper arm and right forearm so that the right end effector is oriented in the desired orientation. You may move along a straight line while maintaining. Alternatively, if l1R = l2R, a conventional pulley may be used, as shown in FIG. 74B.

In order for the entire robot arm to rotate, all drive shafts, i.e. T0, T1L, T2L, T1R and T2R, need to move by the same amount in the desired rotation direction of the arm with respect to the fixed reference frame. The drive shaft T0 needs to move, but the other drive shafts are stationary with respect to the base).

In order for the left end effector to extend and contract along a linear path, the drive shafts T1L and T2L need to move coordinately based on the inverse kinematic equation of the left linkage. Similarly, the drive shafts T1R and T2R need to move coordinately based on the inverse kinematics equation of the right linkage in order for the right end effector to extend and contract along a linear path. Examples of kinematic equations can be found above.

Both end effectors of the robot are along a linear path by simultaneously rotating the drive shafts T1L, T2L, and T1R, T2R in the manner described above for independently extending the left and right end effectors. Can stretch and contract.

The left and right linkages can also be rotated individually. In order for the left linkage to rotate, the drive shafts T1L and T2L need to move by the same amount in the desired rotation direction. Similarly, in order for the right linkage to rotate, the drive shafts T1R and T2R need to move by the same amount in the desired direction of rotation. Similar to FIGS. 68A and 68B, when the left and right linkages are individually rotated 180 degrees, the left and right end effectors are offset laterally (see FIGS. 70A-70C).

Considering the above-mentioned motor ability, the robot having the internal configuration according to FIGS. 74A and 74B may perform the same operation as outlined in FIGS. 69-71.

The base and linkage having the internal configurations of FIGS. 74A and 74B may be driven by the 3-axis and 5-axis drive mechanisms of FIGS. 72 and 73C, 73D, respectively.

Another exemplary embodiment of Robot 2100 is shown in FIGS. 75A and 75B. FIG. 75A shows a top view of a robot with both linkages contracted, and FIG. 75B shows a robot with both end effectors extended.

An example of the internal configuration of the robot 2330 is schematically shown in FIG. 76A. Although the figure shows a base 2332 with linkages 2334, 2336 and circular pulleys of equal length for the upper and forearms, unequal length and non-circular pulleys may be utilized.

The robot may be actuated by the drive mechanism described above with reference to FIGS. 72 and 73.

An alternative internal configuration of the robot of FIGS. 75A and 75B, 2360, is schematically shown in FIG. 76B. In this figure, the base 2362 and linkages 2364, 2366 with equal upper and forearm lengths and circular pulleys are shown, but non-circular pulleys of unequal length may be utilized.

The robot may be actuated by the drive mechanism according to FIGS. 72 and 73C, 73D.

Yet another exemplary embodiment of Robot 2200 is shown in FIGS. 75C and 75D. FIG. 75C shows a top view of a robot with both linkages contracted, and FIG. 75D shows a robot with both end effectors extended. 75C and 75D show the linkage of a left-handed robot. Alternatively, the linkage may be configured in a right-handed configuration with the robot 2300 as shown in FIGS. 75E and 75F.

An exemplary internal configuration 2390 of an embodiment according to FIGS. 75C and 75D is schematically shown in FIG. 76C. Similarly, an exemplary internal configuration 2430 of the embodiment according to FIGS. 75E and 75F is schematically shown in FIG. 76D. Although FIGS. 76C and 76D show linkages 2394, 2396, 2434, 2436 with equal upper and forearm lengths and circular pulleys, unequal length and non-circular pulleys may be utilized.

The robot may be operated by a drive mechanism according to FIGS. 77A-77D, 78A-78B, and 73C and 73D. In FIGS. 77A and 77B, the drive device 2500 has a base 2504 driven by motor M0 2502. The M1 2506 drives the T1l 2510, the M2 2508 drives the T2r 2516, the T1l 2510 and t1r 2514 are band-constrained, and the T2l 2512 and T2r 2516 are band-constrained. In FIGS. 77C and 77D, the drive device 2560 has a base 2562 driven by motor M0 2564. The M1 2566 drives the T1l 2570, the M2 2568 drives the T2r 2576, the T1l 2570 and t1r 2574 are band-constrained, and the T2l 2572 and T2r 2576 are band-constrained. In FIGS. 78A and 78B, the drive device 2700 has a base 2702 driven by motor M0 2704. M1l 2706 drives T1l, M1r 2708 drives T1r, and M2 2710 drives T2r 2714 and T2l 2712 by band.

For example, if the three-axis drive mechanism according to the embodiment of FIG. 77 is utilized, the robot will have independent extension and contraction of the left and right linkages (FIGS. 69D, 69E, 70D, 70E). All operations defined in 69 and FIG. 70 may be performed. The robot cannot simultaneously extend and contract along the non-parallel and opposite paths of FIG. 71.

When a 4-axis drive mechanism such as the embodiment of FIG. 78 is utilized, the robot may perform all operations of FIGS. 69 and 70, including independent extension and contraction of the left and right linkages. The robot cannot simultaneously extend and contract along the non-parallel and opposite paths of FIG. 71.

When the 5-axis drive mechanism is used, the robot may perform all the operations of FIGS. 69-71. In addition, the left and right linkages can be operated in completely independent ways, including independent rotation, which cannot be accommodated by 3-axis and 4-axis drive mechanisms.

The present disclosure shows a suitable ratio of reach to storage volume. Combined with the 3-axis drive mechanism of FIGS. 77A and 77B, it also achieves a thin outline and low complexity. In addition, the present disclosure corresponds to independent extension of the left and right linkages in combination with a 4-axis drive mechanism.

Alternative internal configurations 2800, 2830 of the exemplary embodiments of FIGS. 75A-75D are schematically shown in FIGS. 79A and 79B, respectively. These figures show linkages 2804, 2806, 2834, 2836 and bases 2802, 2832 with equal lengths of the upper and forearms, but unequal length and non-circular pulleys may be utilized. ..

The robot may be actuated by the drive mechanism according to FIGS. 77 and 73C and 73D.

Although the left and right linkages are shown in the figure with the same dimensions, the left linkage may have different dimensions than the right linkage and the drive unit may be configured to reflect the dimensional differences.

The robot arm may be designed such that some of its links, such as the upper arm and / or forearm, are below one or both of the end effectors and the other links are above one or both of the end effectors.

When the terms "band mechanism" and "band drive" are used, they transmit motion, force, and / or torque, including bands, belts, cables, gears, or any other suitable mechanism. Collectively refers to the means for doing so.

Robotic motors are shown throughout the text as being directly attached to the shafts, pulleys, and other driven components in the figure, but with additional bands, belts, cables, gears, or motion, forces, And / or may be coupled to the driven component via any suitable mechanism capable of transmitting torque.

The robot motor is depicted throughout the text within the drive unit or base of the drawing, but the motor may be located within the robot arm, for example as part of the upper arm or forearm, or at the robot's rotary joint. It may be incorporated.

The robot drive unit may further include a vertical lift mechanism for adjusting the height of the entire robot arm. Alternatively, the drive unit may be equipped with two vertical lift mechanisms, one for the left linkage and the other for the right linkage, in order to adjust the heights of the left and right linkages independently. Here, the end effectors may be stacked or set at the same height, or they may be arranged independently on the z-axis.

In an alternative embodiment, any number and any type of suitable mechanism may be used within the robot drive and / or robot arm to control the height of the robot's left and right end effectors. good.

The robot may further include, for example, a traverser mechanism capable of moving the robot along the tunnel if the robot is installed in a tunnel.

In another embodiment, the robot may be designed to operate in an inverted configuration, for example, with a support provided from the top rather than from the bottom.

To provide a system with four end effectors capable of rapid material exchange, the robot may be combined with another robot of the same or similar type, eg, in an inverted configuration.

The robot may be designed for operation in special environments, such as in a vacuum. This design may include static and / or dynamic sealing and the use of other means of isolating some of the robot's components from the operating environment.

FIG. 80A shows a system 2900 with a robot. The robot drive unit 2904 may be configured to be movable relative to the stationary portion 2902 of the system, as indicated by arrows 2906 and 2908. As an example, the robot drive unit may be on rails, linear bearings, magnetic bearings, or in any suitable way that allows the robot drive unit to move relative to a stationary part of the system. It may be coupled to a stationary portion. As an example, a robot drive unit is a pneumatic or hydraulic actuator via a magnetic coupling by an electric linear motor with windings in the drive unit, by an electric linear motor with windings in a stationary part of the system. Even if activated using any other suitable mechanism that can actuate the robot drive unit via a ball screw, via a cable or belt, or against a stationary part of the system. good. As described above, the robot drive unit may include a pivot base and a robot arm. In FIG. 80A, the pivot base is actuated against the robot drive unit, as indicated by the arrows.

FIG. 80B shows a system 3000 having a configuration in which the pivot base 3004 operates directly on the stationary portion 3002 of the system, as indicated by arrows 3006 and 3008 at the sides of the pivot base. When both sides of the pivot base are operated synchronously in the same direction by the same amount, the entire robot translates in the corresponding direction. When the sides of the pivot base are operated synchronously in opposite directions by the same amount, the pivot base rotates with its center fixed. Any combination of translation and rotation can be achieved by actuating the sides of the pivot base accordingly. As an example, the base is an electric linear motor with windings in the pivot base, an electric linear motor with windings in the stationary part of the system, through a magnetic coupling, through a ball screw, a cable or It may be actuated via a belt or by utilizing any other suitable mechanism capable of actuating the pivot base relative to the stationary part of the system.

In one embodiment of the exemplary embodiment, the device comprises at least one drive and a first upper arm, a first forearm and a first end effector, wherein the first upper arm is the first axis of rotation. It comprises a first robot arm connected to at least one drive, a second upper arm, a second forearm and a second end effector, the second upper arm being separated from the first axis of rotation. A second robot arm is provided with a second robot arm connected to the at least one drive device by a second rotation axis, and the first and second robot arms include the first and second end effectors. The first and second robot arms are configured to be set in a first contraction position for stacking a plurality of substrates arranged on the end effector at least partially vertically, and the first and second robot arms are the first contraction. The first and second robots are configured to extend the first and second end effectors from position in a first direction along a parallel first path that is at least partially directly up and down. The arm is configured to extend the first and second end effectors in at least one second direction along a second path separated from each other that is not located up and down, said first. The upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths.

In another aspect, the device comprises at least one non-circular pulley and the at least one drive device in the first forearm at a first joint between the first upper arm and the first forearm. It comprises a first band to connect to.

In another aspect, the device comprises a second band connecting the first end effector to the first joint in the wrist joint of the first end effector with respect to the first forearm.

In another aspect, the device includes a case where the first and second end effectors each have a substantially L-shape.

In another aspect, the device attaches the at least one drive device to a second circular pulley at a first joint between the first circular pulley and the first upper arm and the first forearm. The first and second pulleys have different diameters, with a first band to connect.

In another aspect, the device comprises the case where the first path is along a straight line from the first contraction position.

In another aspect, in the device, the first and second robot arms do not stack the first and second end effectors on top of each other and the plurality of substrates arranged on these end effectors. This includes the case where it is configured to provide a second contraction position for setting.

In another aspect, the device controls the at least one drive device to move the first and second robot arms from the first contraction position along a first path substantially simultaneously. , A controller configured to move the first and second robot arms independently or simultaneously along the second path.

In another aspect, the method comprises a first robot arm comprising a first upper arm, a first forearm and a first end effector, wherein the first upper arm and the first forearm have different effective lengths. To provide a second robot arm comprising a second upper arm, a second forearm and a second end effector, wherein the second upper arm and the second forearm have different effective lengths. The first upper arm is connected to at least one drive device on the first rotation axis, and the second upper arm is connected to the at least one on the second rotation axis separated from the first rotation axis. The first and second robot arms include connecting the first and second end effectors to at least a portion of a plurality of substrates arranged on these end effectors, including connecting to one drive device. The first and second robot arms are configured to be set in a first contraction position for stacking up and down, and the first and second robotic arms are at least partially directly vertically and vertically positioned parallel to the first contraction position. The first and second end effectors are configured to extend in a first direction along the path of 1, and the first and second robot arms are not located up and down and are separated from each other. The first and second end effectors are configured to extend in at least one second direction along the second path.

In another aspect, the method comprises the at least one drive in the at least one non-circular pulley on the first axis of rotation and the first joint between the first upper arm and the first forearm. Accompanied by a first band connecting the device to the first forearm.

In another aspect, the method involves a second band connecting the first end effector to the first joint in the wrist joint of the first end effector with respect to the first forearm.

In another aspect, the method attaches the at least one drive device to a second circular pulley in a first joint between the first circular pulley and the first upper arm and the first forearm. The first and second pulleys have different diameters, with a first band to connect.

In another aspect, the method comprises the case where the first and second robot arms are configured to provide the first path along a straight line from the first contraction position.

In another aspect, in the method, the first and second robot arms do not stack the first and second end effectors on top of each other and the plurality of substrates arranged on these end effectors. This includes the case where it is configured to provide a second contraction position for setting.

In another aspect, the method controls the at least one drive device to move the first and second robot arms from the first contraction position along the first path substantially simultaneously. It involves connecting the drive device to a controller configured to move the first and second robotic arms independently or simultaneously along the second path.

In another aspect, the method involves the first end effector of the first robot arm and the second end effector of the second robot arm, at least partially of a plurality of substrates placed on these end effectors. The first robotic arm comprises setting the first contraction position for stacking up and down, wherein the first robotic arm comprises a first upper arm, a first forearm and the first end effector, said first. The upper arm is connected to at least one drive device on a first axis of rotation, the second robot arm comprising a second upper arm, a second forearm and the second end effector, wherein the second upper arm is , Connected to the at least one drive device on a second rotating shaft separated from the first rotating shaft. The method further moves the first and second robot arms from the first contraction position in a first direction along a parallel first path that is at least partially directly up and down. Moving the first and second end effectors and moving the first and second robot arms at least one second along a second path that is not located up or down and is separated from each other. Includes extending the first and second end effectors in two directions.

In another aspect, the method is such that the first and second robot arms can be moved by a first non-circular pulley and a first between the first upper arm and the first forearm. Including the case where the joint is accompanied by a first band connecting the at least one drive device to the first forearm.

In another aspect, the method involves moving the first and second robotic arms to bring the first end effector to the first end effector at the wrist joint of the first end effector with respect to the first forearm. Including the case with a second band connecting to one joint.

In another aspect, the method comprises moving the first and second robot arms to a first circular pulley and a first joint between the first upper arm and the first forearm. With a first band connecting the at least one drive device to a second circular pulley, the first and second pulleys have different diameters.

In another aspect, the method controls the at least one drive device to move the first and second robot arms from the first contraction position along the first path substantially simultaneously. Accompanied by a controller that causes the first and second robot arms to move independently or simultaneously along the second path.

In another aspect, the device comprises a first robot arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second forearm and a second end effector. A second robot arm and a drive device connected to the first and second robot arms are provided, and the first upper arm is connected to the drive device on a first rotation axis, and the second robot arm is connected to the drive device. The upper arm is connected to the drive device on a second rotation axis separated from the first rotation axis, and the drive device has only three motors to rotate the first and second upper arms. The first and second robot arms are provided with a first contraction of the first and second end effectors to stack a plurality of substrates arranged on these end effectors at least partially up and down. The first and second robot arms are configured to be set in position, from the first contraction position in a first direction along a parallel first path that is at least partially directly up and down. The first and second robot arms are configured to extend the first and second end effectors, and the first and second robot arms are at least one second along a second path that is not located vertically and is separated from each other. It is configured to extend the first and second end effectors in two directions.

In another aspect, the device comprises the case where the first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths.

In another aspect, the device connects the drive device to the first forearm at at least one non-circular pulley and a first joint between the first upper arm and the first forearm. It has a first band.

In another aspect, the device comprises a second band connecting the first end effector to the first joint in the wrist joint of the first end effector with respect to the first forearm.

In another aspect, the device includes a case where the first and second end effectors each have a substantially L-shape.

In another aspect, the device connects the drive device to a second circular pulley at a first joint between the first circular pulley and the first upper arm and the first forearm. The first and second pulleys have different diameters.

In another aspect, the device comprises the case where the first path is along a straight line from the first contraction position.

In another aspect, in the device, the first and second robot arms do not stack the first and second end effectors on top of each other and the plurality of substrates arranged on these end effectors. This includes the case where it is configured to provide a second contraction position for setting.

In another aspect, the device controls the drive device to move the first and second robot arms from the first contraction position along the first path substantially simultaneously. It comprises a controller configured to move the first and second robot arms independently or simultaneously along the second path.

In another aspect, the device includes a case where the three motors are aligned on a common axis.

In another aspect, the device comprises the case where the three motors are arranged on three corresponding separated axes.

In another aspect, the device comprises a drive device and a z-axis motor connected to the drive device to vertically move the first and second robot arms.

In another aspect, the method involves the first end effector of the first robot arm and the second end effector of the second robot arm, at least partially of a plurality of substrates placed on these end effectors. The first robotic arm comprises setting the first contraction position for stacking up and down, wherein the first robotic arm comprises a first upper arm, a first forearm and the first end effector, said first. The upper arm is connected to a drive device on a first axis of rotation, the second robot arm comprises a second upper arm, a second forearm and the second end effector, and the second upper arm is said to be the second. It is connected to the drive device on a second rotating shaft separated from the one rotating shaft. The method further moves the first and second robot arms from the first contraction position in a first direction along a parallel first path that is at least partially directly up and down. Moving the first and second end effectors and moving the first and second robot arms at least one second along a second path that is not located up or down and is separated from each other. Moving these end effectors so as to extend the first and second end effectors in two directions and said around a third axis of rotation separated from the first and second axes of rotation. The first and second robot arms are rotated together, the first is moved from the first contraction position in the first direction, and the first in at least one second direction. And the moving and rotating the second end effector so as to extend is performed by the use of only three motors of the drive.

In another aspect, the method is such that the first and second robot arms can be moved by a first non-circular pulley and a first between the first upper arm and the first forearm. Including the case where the joint is accompanied by a first band connecting the driving device to the first forearm.

In another aspect, the method involves moving the first and second robotic arms to bring the first end effector to the first end effector at the wrist joint of the first end effector with respect to the first forearm. Including the case with a second band connecting to one joint.

In another aspect, the method comprises moving the first and second robot arms to a first circular pulley and a first joint between the first upper arm and the first forearm. With a first band connecting the drive device to a second circular pulley, the first and second pulleys have different diameters.

In another aspect, the method moves the first and second robot arms from the first contraction position substantially simultaneously along the first path to move the first and second robot arms substantially simultaneously. This includes the case of further including a controller for controlling the motor of the drive device so as to move independently or simultaneously along the second path.

In another aspect, the method provides a first robotic arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second forearm and a second. To provide a second robot arm with an end effector, to connect the first upper arm to a drive device on a first axis of rotation, and to separate the second upper arm from the first axis of rotation. The first and second robot arms include having the first and second end effectors arranged on these end effectors, including connecting to the drive device on a second rotating shaft. The plurality of substrates are configured to be set in the first contraction position for at least partially stacking up and down, and the first and second robot arms are at least partially retracted from the first contraction position. The first and second robot arms are configured to be rotated to extend the first and second end effectors in a first direction along a parallel first path located directly up and down. The first and second end effectors are configured to be rotated to extend in at least one second direction along a second path separated from each other that is not located above or below. To rotate the first and second robot arms to extend the first and second end effectors, and around a third axis of rotation separated from the first and second axes of rotation. In order to rotate the first and second robot arms, the drive device includes only three motors.

In another aspect, the method comprises the case where the first robot arm comprises the first upper arm and the first forearm having different effective lengths and the second robot arm has different effective lengths. Including the case where the second upper arm and the second forearm are provided.

In another aspect, the method comprises the drive device at at least one non-circular pulley on the first axis of rotation and at a first joint between the first upper arm and the first forearm. Accompanied by a first band connecting to the first forearm.

In another aspect, the method involves a second band connecting the first end effector to the first joint in the wrist joint of the first end effector with respect to the first forearm.

In another aspect, the method connects the drive device to a second circular pulley at a first joint between the first circular pulley and the first upper arm and the first forearm. The first and second pulleys have different diameters, with the band of.

In another aspect, the method comprises the case where the first and second robot arms are configured to provide the first path along a straight line from the first contraction position.

In another aspect, in the method, the first and second robot arms do not stack the first and second end effectors on top of each other and the plurality of substrates arranged on these end effectors. This includes the case where it is configured to provide a second contraction position for setting.

In another aspect, the method controls the drive device to move the first and second robotic arms from the first contraction position along the first path substantially simultaneously. It involves connecting the drive to a controller configured to move the first and second robotic arms independently or simultaneously along the second path.

In another aspect, the device comprises a first robot arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second forearm and a second end effector. A second robot arm and a drive device connected to the first and second robot arms are provided, and the first upper arm is connected to the drive device on a first rotation axis, and the second robot arm is connected to the drive device. The upper arm is connected to the drive device on a second rotation axis separated from the first rotation axis, and the drive device includes five motors for rotating the first and second upper arms. , The first motor of the motors is connected to the first and second robot arms and around a third axis of rotation separated from the first and second axes of rotation. And the second robot arm is rotated, and the second and third motors are connected to the first robot arm, each of which rotates the first upper arm and the first forearm, and the fourth and third. The fifth motor is connected to the second robot arm, and each rotates the second upper arm and the second forearm independently of the first robot arm, and the first and second robots are used. The robot arm 2 is configured to set the first and second end effectors in a first contraction position for stacking a plurality of substrates arranged on these end effectors at least partially up and down. The first and second robot arms are placed in a first direction along a parallel first path that is at least partially directly up and down from the first contraction position. The first and second robot arms are configured to extend the end effector, and the first and second robot arms are located in at least one second direction along a second path separated from each other and not located vertically. And is configured to extend the second end effector.

In another aspect, the device comprises the case where the first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths.

In another aspect, the device connects the drive device to the first forearm at at least one non-circular pulley and a first joint between the first upper arm and the first forearm. It has a first band.

In another aspect, the device comprises a second band connecting the first end effector to the first joint in the wrist joint of the first end effector with respect to the first forearm.

In another aspect, the device includes a case where the first and second end effectors each have a substantially L-shape.

In another aspect, the device connects the drive device to a second circular pulley at a first joint between the first circular pulley and the first upper arm and the first forearm. The first and second pulleys have different diameters.

In another aspect, the device comprises the case where the first path is along a straight line from the first contraction position.

In another aspect, in the device, the first and second robot arms do not stack the first and second end effectors on top of each other and the plurality of substrates arranged on these end effectors. This includes the case where it is configured to provide a second contraction position for setting.

In another aspect, the device controls the drive device to move the first and second robot arms from the first contraction position along a first path substantially simultaneously, said first. It comprises a controller configured to move the first and second robot arms independently or simultaneously along the second path.

In another aspect, the device comprises a drive device and a z-axis motor connected to the drive device to vertically move the first and second robot arms.

In another aspect, the method involves the first end effector of the first robot arm and the second end effector of the second robot arm, at least partially of a plurality of substrates placed on these end effectors. The first robotic arm comprises setting the first contraction position for stacking up and down, wherein the first robotic arm comprises a first upper arm, a first forearm and the first end effector, said first. The upper arm is connected to a drive device on a first axis of rotation, the second robot arm comprises a second upper arm, a second forearm and the second end effector, and the second upper arm is said to be the second. It is connected to the drive device on a second rotating shaft separated from the one rotating shaft. The method further moves the first and second robot arms from the first contraction position in a first direction along a parallel first path that is at least partially directly up and down. Moving the first and second end effectors and moving the first and second robot arms at least one second along a second path that is not located up or down and is separated from each other. Moving these end effectors so as to extend the first and second end effectors in two directions and said around a third axis of rotation separated from the first and second axes of rotation. Includes rotating the first and second robot arms together. The movement from the first contraction position in the first direction, the movement so as to extend the first and second end effectors in the at least one second direction, and the rotation. The operation is performed by using the five motors of the drive device. The first motor of the motors is connected to the first and second robot arms to rotate the first and second robot arms around the third axis of rotation, the second and second robot arms. The third motor is connected to the first robot arm, each of which rotates the first upper arm and the first forearm, and the fourth and fifth motors are attached to the second robot arm. Connected to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

In another aspect, the method or apparatus is such that the first motor is aligned with the third axis of rotation, the second and third motors are aligned with each other with the first axis of rotation, and the fourth. And the case where the fifth motors are aligned with each other on the second rotation axis.

In another aspect, the method provides a first robotic arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second forearm and a second. To provide a second robot arm with an end effector, to connect the first upper arm to a drive device at the first axis of rotation, and to connect the second upper arm from the first axis of rotation. The first and second robotic arms place the first and second end effectors on these end effectors, including connecting to the drive on a second axis of rotation separated. The plurality of substrates are configured to be set in the first contraction position for stacking at least partially vertically, and the first and second robot arms are at least partially from the first contraction position. The first and second robot arms are configured to be rotated to extend the first and second end effectors in a first direction along a parallel first path located directly above and below. Is configured to be rotated to extend the first and second end effectors in at least one second direction along a second path separated from each other that is not located vertically. To rotate the first and second robot arms to extend the first and second end effectors, and around a third axis of rotation separated from the first and second axis of rotation. In order to rotate the first and second robot arms, the drive device comprises five motors, the first motor of the motors being connected to the first and second robot arms. The first and second robot arms are rotated around a third axis of rotation, and the second and third motors are connected to the first robot arm, which are the first upper arm and the first, respectively. The forearm of 1 is rotated, and the fourth and fifth motors are connected to the second robot arm, and are independent of the first robot arm, respectively, of the second upper arm and the second robot arm. Rotate the forearm.

In another aspect, the device comprises a first robot arm with a first upper arm, a first forearm and a first end effector, and a second upper arm, a second forearm and a second end effector. A second robot arm and a drive device connected to the first and second robot arms are provided, and the first upper arm is connected to the drive device on a first rotation axis, and the second robot arm is connected to the drive device. The upper arm is connected to the drive device on a second rotation axis separated from the first rotation axis, and the drive device includes four motors for rotating the first and second upper arms. The first motor of the motors is connected to the first upper arm, the second motor is connected to the second upper arm, the third motor is connected to the first forearm, and the fourth. The motors are connected to the second forearm, the third and fourth motors are aligned on a common axis separated from the first and second rotation axes, and the first motor is the first. The second motor is aligned with the axis of rotation, the first and second robot arms are aligned with the second axis of rotation, and the first and second robot arms place the first and second end effectors on these end effectors. The plurality of arranged boards are configured to be set in the first contraction position for at least partially stacking up and down, and the first and second robot arms are at least partially from the first contraction position. The first and second robot arms are configured to extend the first and second end effectors in a first direction along a parallel first path that is directly up and down, and the first and second robot arms are up and down. The first and second end effectors are configured to extend in at least one second direction along a second path that is not located and is isolated from each other.

In one exemplary embodiment, a device comprising at least one processor and at least one non-temporary memory containing computer program code is provided. The at least one memory and the computer program code, together with the at least one processor, provide the device with a first end effector of the first robot arm and a second end effector of the second robot arm. A plurality of substrates arranged on the first and second end effectors are set in the first contraction position for stacking at least partially up and down, and the first robot arm is a first upper arm and a first. It comprises a forearm and the first end effector, the first upper arm is connected to a drive on a first axis of rotation, and the second robot arm is a second upper arm, a second forearm and the second. The second upper arm is connected to the drive device on a second rotation axis separated from the first rotation axis to move the first and second robot arms. The first and second end effectors are moved from the first contraction position in a first direction along a parallel first path that is at least partially directly up and down, and the first and second end effectors are moved. These ends are moved to move the robot arm to extend the first and second end effectors in at least one second direction along a second path away from each other that is not located up or down. The effector is moved to rotate the first and second robot arms together around a third axis of rotation separated from the first and second axes of rotation, from the first contraction position to the first. The movement of the drive device, the movement of the first and second end effectors so as to extend in the at least one second direction, and the rotation of the first and second end effectors in one direction are described in the driving device. It is configured to be done by the use of only three motors.

According to an exemplary embodiment, there is provided a device comprising a non-temporary program storage device readable by a machine and specifically executing a program of instructions executable by the machine to perform an operation. The program. In this operation, the first end effector of the first robot arm and the second end effector of the second robot arm are at least partially placed on a plurality of substrates arranged on the first and second end effectors. Includes setting in the first contraction position for stacking up and down. Here, the first robot arm includes a first upper arm, a first forearm, and the first end effector, and the first upper arm is connected to a drive device on a first rotation shaft, and the second. The robot arm comprises a second upper arm, a second forearm and the second end effector, wherein the second upper arm is the drive device on a second axis of rotation separated from the first axis of rotation. Connected to. The operation further moves the first and second robot arms from the first contraction position to a first direction along a parallel first path that is at least partially directly up and down. Moving the first and second end effectors and moving the first and second robot arms at least one second along a second path that is not located up or down and is separated from each other. Moving these end effectors so as to extend the first and second end effectors in two directions and said around a third axis of rotation separated from the first and second axes of rotation. Includes rotating the first and second robot arms together. The movement from the first contraction position in the first direction, the movement so as to extend the first and second end effectors in the at least one second direction, and the rotation. To make it happen is by using only three motors of the drive device.

In one exemplary embodiment, a device comprising at least one processor and at least one non-temporary memory containing computer program code is provided. The at least one memory and the computer program code, together with the at least one processor, provide the device with a first end effector of the first robot arm and a second end effector of the second robot arm. A plurality of substrates arranged on the end effector are set in the first contraction position for stacking at least partially up and down, and the first robot arm is a first upper arm, a first forearm and the first. The first upper arm is connected to a drive device at a first rotation axis, and the second robot arm includes a second upper arm, a second forearm and the second end effector. The second upper arm is connected to the drive device on the second rotation axis separated from the first rotation axis, and the first and second robot arms are moved to move the first and second robot arms to the first contraction position. From, move the first and second end effectors in a first direction along a parallel first path that is at least partially directly up and down, and move the first and second robot arms. Extend the first and second end effectors in at least one second direction along a second path away from each other that is not located up or down and from the first and second axes of rotation. Rotating the first and second robot arms together around a separated third axis of rotation to move the first and second robot arms in the first direction from the first contraction position and at least one first. The movement and rotation of the first and second end effectors so as to extend in two directions are performed by using five motors of the drive device, and the first of the motors is used. The motor 1 is connected to the first and second robot arms to rotate the first and second robot arms around the third axis of rotation, and the second and third motors are Connected to the first robot arm, each rotates the first upper arm and the first forearm, and the fourth and fifth motors are connected to the second robot arm and said the first. Independent of the robot arm of 1, each is configured to rotate the second upper arm and the second forearm.

According to an exemplary embodiment, there is provided a device comprising a non-temporary program storage device readable by a machine and specifically executing a program of instructions executable by the machine to perform an operation. The program. The operation is to stack the first end effector of the first robot arm and the second end effector of the second robot arm at least partially up and down on a plurality of boards arranged on these end effectors. Includes setting in the first contraction position. Here, the first robot arm includes a first upper arm, a first forearm, and the first end effector, and the first upper arm is connected to a drive device on a first rotation shaft, and the second. The robot arm comprises a second upper arm, a second forearm and the second end effector, wherein the second upper arm is the drive device on a second axis of rotation separated from the first axis of rotation. Connected to. The operation further moves the first and second robot arms from the first contraction position to a first direction along a parallel first path that is at least partially directly up and down. Moving the first and second end effectors and moving the first and second robot arms at least one second along a second path that is not located up or down and is separated from each other. Moving these end effectors so as to extend the first and second end effectors in two directions and said around a third axis of rotation separated from the first and second axes of rotation. Includes rotating the first and second robot arms together. The movement from the first contraction position in the first direction, the movement so as to extend the first and second end effectors in the at least one second direction, and the rotation. The operation is performed by using the five motors of the drive device. The first motor of the motors is connected to the first and second robot arms to rotate the first and second robot arms around the third axis of rotation, the second and second robot arms. The third motor is connected to the first robot arm, each of which rotates the first upper arm and the first forearm, and the fourth and fifth motors are attached to the second robot arm. Connected and configured to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

Any combination of one or more computer-readable media may be utilized as memory. The computer-readable medium may be a computer-readable signal medium or a non-temporary computer-readable storage medium. The non-temporary computer-readable storage medium does not include propagating signals and may be, for example, electronic, magnetic, light, electromagnetic, infrared, or any suitable combination of semiconductor systems, devices, or devices, or the like. However, it is not limited to these. More specific examples (non-comprehensive lists) of computer-readable storage media include electrical connections with one or more wires, portable computer diskettes, hard disks, Random Access Memory (RAM), and read-only memory. Dedicated Memory (Read-Only Memory), Erasable Programmable Read-Only Memory (EPROM or Flash Memory), Fiber Optic, Portable Disc Read-Only Memory (Compact Disc Read-Only) Memory: CD-ROM), optical storage, magnetic storage, or any suitable combination of the above.

You will find that the above description is only exemplary. Various alternatives and variants can be devised by those of skill in the art. Accordingly, this embodiment is intended to include all such alternatives, variants, and variants. For example, the features listed in the various dependent claims can be combined with each other in any suitable combination. In addition, the features of the various embodiments described above may be selectively combined into a new embodiment. Accordingly, the description is intended to include all such alternatives, variants, and variants within the scope of the appended claims.

Claims (25)

A first robot arm with a first upper arm, a first forearm and a first end effector,
A second robot arm with a second upper arm, a second forearm and a second end effector,
The drive device connected to the first and second robot arms, and
It is a device equipped with
The first upper arm is connected to the drive on the first axis of rotation.
The second upper arm is connected to the drive device on a second axis of rotation separated from the first axis of rotation.
In order to rotate the first and second robot arms, the drive device comprises only three motors.
One of the three motors can simultaneously rotate the first upper arm and the second upper arm, and the other one of the three motors simultaneously rotates the first forearm and the second forearm. By being provided so as to be capable, the first and second robot arms are provided by the only three motors.
-The first and second end effectors are set in the first contraction position in order to stack a plurality of substrates arranged on these end effectors at least partially up and down .
Extending the first and second end effectors from the first contraction position in a first direction along a parallel first path that is at least partially directly up and down .
-Extending the first and second end effectors in at least one second direction along a second path separated from each other that is not located above or below .
Is configured to be able to do
Device. The device according to claim 1, wherein the first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths. Further comprising at least one non-circular pulley and a first band connecting the drive device to the first forearm at a first joint between the first upper arm and the first forearm. The device according to claim 1 or 2. 13. Equipment. The device according to any one of claims 1 to 4, wherein the first and second end effectors each have a substantially L-shape. Further comprising a first circular pulley and a first band connecting the drive device to the second circular pulley in a first joint between the first upper arm and the first forearm.
The device of claim 1, wherein the first and second pulleys have different diameters. The device according to any one of claims 1 to 6, wherein the first path is along a straight line from the first contraction position. The first and second robot arms set the first and second end effectors so that the plurality of substrates arranged on the end effectors are not stacked vertically. The device according to any one of claims 1 to 7, which is configured to provide a contraction position. By controlling the drive device, the first and second robot arms are moved from the first contraction position substantially simultaneously along the first path, and the first and second robot arms are moved. The device according to any one of claims 1 to 8, further comprising a controller configured to move independently or simultaneously along the second path. The device according to any one of claims 1 to 9, wherein the three motors are aligned on a common axis. The device according to any one of claims 1 to 9, wherein the three motors are arranged on three corresponding separated axes. The device according to any one of claims 1 to 9, further comprising a z-axis motor connected to the drive device for vertically moving the drive device and the first and second robot arms. It ’s a method,
The first end effector of the first robot arm and the second end effector of the second robot arm are first for stacking a plurality of substrates arranged on these end effectors at least partially on the top and bottom. Including setting in the contracted position
Here, the first robot arm includes a first upper arm, a first forearm, and the first end effector, and the first upper arm is connected to a drive device on a first rotation shaft, and the first is said. The robot arm 2 comprises a second upper arm, a second forearm and the second end effector, the second upper arm being driven by a second axis of rotation separated from the first axis of rotation. Connected to the device,
The method further
The first and second robot arms are moved from the first contraction position to the first and second directions along a parallel first path that is at least partially directly up and down. To move the end effector of
Move the first and second robot arms to move the first and second end effectors in at least one second direction along a second path away from each other that is not located up or down. By moving these end effectors to stretch,
Rotating the first and second robot arms together around a third axis of rotation separated from the first and second axes of rotation.
Including
One of the three motors of the drive device can rotate the first upper arm and the second upper arm at the same time, and the other one of the three motors is the first forearm and the second forearm. The first and second end effectors can be moved from the first contraction position to the first direction and the first and second end effectors in at least one second direction by being provided so as to be able to rotate at the same time. The method of moving the motor and rotating the motor so as to extend the motor is performed by using only the three motors. Moving the first and second robot arms causes the drive device to move the drive device to at least one non-circular pulley and a first joint between the first upper arm and the first forearm. 13. The method of claim 13, comprising a first band connecting to one forearm. Moving the first and second robot arms is a second method of connecting the first end effector to the first joint in the wrist joint of the first end effector with respect to the first forearm. 13. The method of claim 13 or 14, with a band. Moving the first and second robot arms causes the drive device to be second in the first circular pulley and in the first joint between the first upper arm and the first forearm. With a first band connecting to the circular pulley,
13. The method of claim 13, wherein the first and second pulleys have different diameters. The first and second robot arms are moved from the first contraction position substantially simultaneously along the first path, and the first and second robot arms are moved independently or simultaneously along the first path. The method according to any one of claims 13 to 16, further comprising a controller for controlling the motor of the driving device so as to move along the path of the above. To provide a first robotic arm with a first upper arm, a first forearm and a first end effector.
To provide a second robot arm with a second upper arm, a second forearm and a second end effector.
Connecting the first upper arm to the drive device on the first axis of rotation,
To connect the second upper arm to the drive device on a second rotation axis separated from the first rotation axis.
Is a method that includes
The first and second robot arms are first to stack the first and second end effectors, at least partially, on top and bottom of a plurality of substrates arranged on the first and second end effectors. The first and second robot arms are configured to be set in the contraction position of, and the first and second robot arms are located along a parallel first path that is at least partially directly up and down directly from the first contraction position. The first and second robot arms are configured to be rotated to extend the first and second end effectors in a direction, and the first and second robot arms are not located vertically and are separated from each other. It is configured to be rotated to extend the first and second end effectors in at least one second direction along the path.
To rotate the first and second robot arms to extend the first and second end effectors, and around a third axis of rotation separated from the first and second axes of rotation. In order to rotate the first and second robot arms, the drive device comprises only three motors, one of the three motors simultaneously having the first upper arm and the second upper arm. A method that is capable of turning and the other one of the three motors is provided so that the first forearm and the second forearm can be turned at the same time .
The first robot arm comprises the first upper arm and the first forearm having different effective lengths, and the second robot arm comprises the second upper arm and the second forearm having different effective lengths. 18. The method of claim 18, comprising the forearm. At least one non-circular pulley on the first axis of rotation and a first joint between the first upper arm and the first forearm, a first connecting the drive device to the first forearm. The method of claim 18 or 19, with the band of. 17. the method of. Further accompanied by a first circular pulley and a first band connecting the drive device to the second circular pulley in a first joint between the first upper arm and the first forearm.
18. The method of claim 18, wherein the first and second pulleys have different diameters. The method according to any one of claims 18 to 22, wherein the first and second robot arms are configured to provide the first path along a straight line from the first contraction position. The first and second robot arms set the first and second end effectors so that the plurality of substrates arranged on the end effectors are not stacked vertically. The method according to any one of claims 18 to 23, which is configured to provide a contraction position. By controlling the drive device, the first and second robot arms are moved from the first contraction position substantially simultaneously along the first path, and the first and second robot arms are moved. The method of any of claims 18-24, further comprising connecting the drive to a controller configured to move independently or simultaneously along the second path.

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