JP7342046B2 - Robots, conveyance devices, electronic device processing systems, and related methods - Google Patents

Description

TECHNICAL FIELD The disclosed embodiments relate to robots having arms with unequal link lengths, and more particularly, to robots having one or more arms with unequal link lengths, each supporting one or more substrates.

Vacuum, atmospheric and controlled environment processing for applications such as those associated with the manufacture of semiconductors, LEDs, solar, MEMS or other devices, including substrates and carriers associated with the substrates, storage areas, processing areas or other Utilize robotics and other forms of automation to transport vehicles to and from locations. Such transportation of substrates may involve moving individual substrates, groups of substrates, using a single arm carrying one or more substrates, or using multiple arms each carrying one or more substrates. It's okay. Much of the manufacturing takes place in clean or vacuum environments where footprint and volume are important, such as those associated with semiconductor manufacturing. Additionally, automated transport is often implemented where minimizing transport time results in reduced cycle times and increased throughput and utilization of associated equipment. Accordingly, it would be desirable to provide substrate transfer automation that minimizes the required footprint and workspace volume and minimizes transfer time for a given range of transfer applications.

Abstract

The following summary is intended to be illustrative only. The Abstract is not intended to limit the claims.
The following robot is disclosed in this application. This robot is
a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
a second upper arm that is combined with the first upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the first upper arm; a first forearm pivoting about an axis;
a third upper arm that is combined with the second upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the second upper arm; a second forearm pivoting about an axis;
a first forearm associated with the first forearm, located longitudinally between the first upper arm and the second upper arm, and at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first upper arm and the second upper arm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft secured to the first upper arm and a first wrist component drive component having a first camming surface;
a first wrist component driven component that is combined with the first wrist component and has a second cam surface;
a first wrist component transmission element combined between the first cam surface and the second cam surface;
Equipped with. The first cam surface and the second cam surface enable non-linear rotation of the first wrist component relative to the first forearm.
The following robots are also disclosed in this application. This robot is
a first upper arm rotatable about a shoulder axis and having a first cantilever;
a second upper arm vertically spaced apart from the first upper arm, rotatable about the shoulder axis, and having a second cantilever;
a second upper arm attached to the first upper arm, located between the first upper arm and the second upper arm in the longitudinal direction, and located relative to the first upper arm at a position offset from the shoulder axis; a first forearm pivoting about an axis;
a third upper arm attached to the second upper arm, located between the first upper arm and the second upper arm in the longitudinal direction, and located relative to the second upper arm at a position offset from the shoulder axis; a second forearm pivoting about an axis;
a first forearm attached to the first forearm and located longitudinally between the first forearm and the second forearm and relative to the first forearm at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
associated with the second forearm, longitudinally located between the first wrist component and the second forearm, and relative to the second forearm in a position offset from the third axis; a second wrist component that rotates about a fifth axis;
Equipped with.
Also disclosed herein is an electronic device processing system that includes a transfer chamber and a robot that is disposed at least partially in the transfer chamber and that moves substrates into and out of a process chamber that is associated with the transfer chamber. Here, the robot is any of the robots having the above-mentioned characteristics.
Also disclosed herein is a method of transporting a substrate within an electronic device processing system. The method includes providing a robot with any of the features described above, and independently rotating the first upper arm to radially extend a first end effector into a first chamber. , independently pivoting the second upper arm to radially extend a second end effector into a second chamber.

The following robots are also disclosed in this application. This robot is
a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
a second upper arm that is combined with the first upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the first upper arm; a first forearm pivoting about an axis;
a third upper arm that is combined with the second upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the second upper arm; a second forearm pivoting about an axis;
a first forearm associated with the first forearm, located longitudinally between the first upper arm and the second upper arm, and at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first upper arm and the second upper arm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft coupled to the first upper arm and a first cam having a first cam surface;
a second cam that is combined with the first wrist component and has a second cam surface;
a first belt hung between the first cam surface and the second cam surface;
Equipped with The first cam surface and the second cam surface enable non-linear rotation of the first wrist component relative to the first forearm.
Also disclosed herein is an electronic device processing system that includes a transfer chamber and a robot that is disposed at least partially in the transfer chamber and that moves substrates into and out of a process chamber that is associated with the transfer chamber. Here, the robot is a robot having the above-mentioned characteristics.
Also disclosed herein is a method of transporting a substrate within an electronic device processing system. The method includes providing a robot with the features described above and individually rotating the first upper arm to radially extend a first end effector carrying a first substrate into a first chamber. and extending a second end effector carrying the second substrate radially into the second chamber such that the second substrate does not pass over the first substrate. and independently rotating the second upper arm.

The following conveyance device is also disclosed in this application. This conveyance device is
the drive unit having a plurality of coaxial drive shafts, the number of the coaxial drive shafts being three;
a first arm connected to the drive section, the arm including a first link, a second link, and a first end effector connected to the drive section in this order; the first arm having a different effective length than the two links;
a second arm connected to the drive unit, the second arm having a third link, a fourth link, and a second end effector connected to the drive unit in order;
Equipped with and,
the mechanical connection between the first arm and the drive unit comprises a first band drive unit having at least one first non-circular pulley;
the mechanical connection between the second arm and the drive section comprises a second band drive section having at least one first non-circular pulley;
The first and second mechanical connections, each including the at least one non-circular pulley, are configured to limit movement of the link of each arm relative to the link of the other arm, thereby , the first and second mechanical connections allow only linear extension and contraction movements of the first and second end effectors when the first and second arms extend and retract.
The following conveyance device is also disclosed in this application. This conveyance device is
the drive unit having a plurality of coaxial drive shafts, the number of the coaxial drive shafts being three;
a first arm connected to the drive section, the arm including a first link, a second link, and a first end effector connected to the drive section in this order; the first arm having a different effective length from the two links;
a second arm connected to the driving section, the second arm having a third link, a fourth link, and a second end effector connected to the driving section in this order; the second arm having an effective length different from that of the four links;
Equipped with and,
The mechanical connection between the first arm and the drive unit includes a first band drive unit having a first non-circular pulley and a first band;
The mechanical connection between the second arm and the drive section includes a second band drive section having a second non-circular pulley and a second band;
The first mechanical connection, including the first non-circular pulley, limits telescopic movement of the first end effector to linear telescopic movement with respect to the drive.
The following conveyance device is also disclosed in this application. This conveyance device is
a drive unit having a drive shaft;
a first arm connected to the drive unit, the arm including a first link, a second link, and an end effector connected to the drive unit in order, the first link being connected to the second link; said first arm having an effective length greater than an effective length of;
Equipped with
The end effector has a substrate support and a leg that connects the substrate support to a wrist joint of the end effector that connects to the second link, the leg having a first portion that connects to the wrist joint. a second portion connected to the substrate support portion; and a curved portion between the first portion and the second portion, the first portion and the second portion being It is at an angle to the opponent,
a connection portion of the leg to the second link at the wrist joint portion is offset with respect to a centerline of the substrate support and offset with respect to the drive shaft;
a center line of the substrate support part is perpendicular to the drive shaft;
When the first arm extends and contracts, the end effector is configured to be able to perform only linear movement with respect to the drive section.

The following robots are also disclosed in this application. This robot is
a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
combined with the first upper arm, located on the first upper arm in the longitudinal direction, and pivoted about a second axis relative to the first upper arm at a position offset from the shoulder axis; a first forearm;
combined with the second upper arm, located above the first upper arm in the longitudinal direction, and pivoted about a third axis relative to the second upper arm at a position offset from the shoulder axis; with the second forearm;
associated with the first forearm and positioned longitudinally over the first upper arm and rotated about a fourth axis relative to the first forearm in a position offset from the second axis; a moving first wrist;
associated with the second forearm, positioned longitudinally over the first upper arm and rotated about a fifth axis relative to the second forearm in a position offset from the third axis; A second wrist that moves;
a first forearm shaft secured to the first upper arm and a first wrist component drive component, wherein the first wrist component drive component includes a first forearm shaft secured to the first forearm shaft; the first forearm shaft having a camming surface;
a first wrist driven component coupled to the first wrist and having a second cam surface;
a first wrist transmission element combined between the first cam surface and the second cam surface;
, the first cam surface, the second cam surface, and the first wrist transmission element of the first wrist component drive component are configured to move the first wrist relative to the first forearm. It is configured to allow rotation at a non-linear ratio.
Also disclosed herein is a method of transporting a substrate within an electronic device processing system. The method includes providing a robot with the features described above; independently rotating the first upper arm to radially extend a first end effector into a first chamber; independently rotating the second upper arm to radially extend the end effector into the second chamber.

According to one aspect of an exemplary embodiment, a transport device includes a drive device and a first arm connected to the drive device, the first arm being connected in series with the drive device. a first arm having a link, a second link and an end effector, the first link and the second link having different effective lengths; and a drive device when the first arm is extended or retracted. and a system for limiting rotation of the end effector relative to the second link to provide substantially only linear movement of the end effector relative to the second link.
According to another aspect of the exemplary embodiment, rotating a first link of the arm by a drive device and rotating a second link of the arm when the first link is rotated, with the proviso that: the second link is rotated on the first link; and rotating the end effector on the second link, the first and second links having different effective lengths; Rotation of the end effector on the second link is constrained and rotational such that when the arm is extended or retracted, the end effector is restricted to substantially only linear movement relative to the drive. A method is provided, including.
According to another aspect of the exemplary embodiment, a drive device and an arm connected to the drive device, the arm having a first link connected to the drive device at a first joint, a first link connected to the drive device at a second joint, and a first link connected to the drive device at a first joint; a second link connected to the first link at the joint, and an end effector connected to the second link at the third joint, the first link being connected to the second link at the third joint; a first length between the first and second joints that is different from a second length of the second link, and the movement of the end effector at the third joint is driven during extension and retraction of the arm; A transport device is provided having an arm constrained to follow in a substantially straight radial line relative to a center of rotation of the device.
According to one aspect of the exemplary embodiment:
a drive device;
A first arm connected to the drive device, the first arm having a first link, a second link, and an end effector, the first link, the second link , the end effector is sequentially connected from the drive device, and the first link and the second link have different effective lengths;
limiting rotation of the end effector relative to the second link to allow the end effector to move only linearly relative to the drive when the first arm is extended or retracted; A system that does;
A transport device comprising:
The system is configured to connect the first link, the second link, and the a link, having a band drive for controlling relative rotation of the end effector;
The band driving device includes a plurality of pulleys and at least one band, and the plurality of pulleys includes at least one non-circular pulley, and the first arm of the non-circular pulley is extended or contracted. sometimes configured to cancel the effects of the different effective lengths to allow the end effector to move only linearly with respect to the drive device;
A transport device is provided.
According to one aspect of the exemplary embodiment:
a drive device;
A first arm connected to the drive device, the first arm having a first link, a second link, and an end effector, the first link, the second link , the end effector is sequentially connected from the drive device, and the first link and the second link have different effective lengths;
A conveyance device having
the drive device and the first arm and the end to allow the end effector to move only linearly relative to the drive device when the first arm is extended or retracted; a coupling portion with an effector configured to limit rotation of the end effector relative to the second link;
The coupling is configured to help limit rotation of the end effector relative to the second link to allow the end effector to move only linearly relative to the drive. has a device,
the end effector does not rotate relative to the drive device when the first arm is extended or retracted;
The band driving device includes a plurality of pulleys and at least one band, and the plurality of pulleys includes at least one non-circular pulley, and the first arm of the non-circular pulley is extended or contracted. sometimes configured to cancel the effects of the different effective lengths to allow the end effector to move only linearly with respect to the drive device;
A transport device is provided.
The above-mentioned aspects and other features are explained in the following description with reference to the accompanying drawings.

It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top part schematic diagram of a conveyance device. FIG. 3 is a partial schematic side cross-sectional view of the conveyance device. It is a top view of a conveyance device. FIG. 3 is a diagram showing a graphical plot. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top part schematic diagram of a conveyance device. FIG. 3 is a partial schematic side cross-sectional view of the conveyance device. It is a top view of a conveyance device. FIG. 3 is a diagram showing a graphical plot. FIG. 3 is a partial schematic side cross-sectional view of the conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. FIG. 3 is a partial schematic side cross-sectional view of the conveyance device. FIG. 3 is a partial schematic side cross-sectional view of the conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. FIG. 3 is a partial schematic side cross-sectional view of the conveyance device. FIG. 3 is a partial schematic side cross-sectional view of the conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. FIG. 3 is a partial schematic side cross-sectional view of the conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. 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It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a side view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. It is a top view of a conveyance device. FIG. 2 illustrates an example pulley. It is a top view of a conveyance device. FIG. 3 is a copy diagram of the transport device. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a side view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a side view of an example of a substrate transfer robot. FIG. 2 is a schematic top view of an example of a substrate transfer robot. FIG. 2 is a schematic cross-sectional view of an example of a substrate transfer robot. FIG. 2 is a schematic top view of an example of a substrate transfer robot. FIG. 2 is a schematic cross-sectional view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a side view of an example of a substrate transfer robot. FIG. 2 is a schematic top view of an example of a substrate transfer robot. FIG. 2 is a schematic cross-sectional view of an example of a substrate transfer robot. FIG. 2 is a schematic top view of an example of a substrate transfer robot. FIG. 2 is a schematic cross-sectional view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a side view of an example of a substrate transfer robot. FIG. 2 is a schematic top view of an example of a substrate transfer robot. FIG. 2 is a schematic cross-sectional view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a side view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a side view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transfer robot. FIG. 2 is a schematic top view of an example of a substrate transfer robot. FIG. 2 is a schematic cross-sectional view of an example of a substrate transfer robot. FIG. 2 is a schematic top view of an example of a substrate transfer robot. FIG. 2 is a schematic cross-sectional view of an example of a substrate transfer robot. FIG. 2 is a schematic top view of an example of a substrate transfer robot. FIG. 2 is a schematic cross-sectional view of an example of a substrate transfer robot. FIG. 2 is a top view of an example of a substrate transport device. FIG. 2 is a side view of an example of a substrate transport device. FIG. 2 is a top view of an example of a substrate transport device. FIG. 2 is a side view of an example of a substrate transfer device.

Detailed Description of Exemplary Embodiments

In addition to the embodiments disclosed below, the disclosed embodiments are capable of other embodiments and of being practiced or carried out in various ways. It is therefore to be understood that the disclosed embodiments are not limited in application to the details of construction and arrangement of components that are described in the following description or shown in the drawings. If only one embodiment is described herein, the claims herein should not be limited to that embodiment. Further, claims in this regard should not be read in a restrictive manner unless there is clear and convincing evidence expressing a certain exclusion, limitation, or disclaimer.

Referring now to FIGS. 1A and 1B, top and side views, respectively, of a robot 10 having a drive 12 and an arm 14 are shown. Arm 14 is shown in the retracted position. Arm 14 has an upper arm or first link 16 that is rotatable about a central axis of rotation 18 of drive device 12 . Arm 14 further includes a forearm or second link 20 rotatable about an elbow rotation axis 22 . Arm 14 further includes an end effector or third link 24 rotatable about wrist rotation axis 26 . End effector 24 supports substrate 28. As illustrated, the arm 14 has a radial path 30 that may coincide with a linear path 32 that coincides with the central axis of rotation 18 of the drive device 12 (as seen in FIG. 1A), or parallel to a linear path 32. The substrate 28 is configured to cooperate with the drive device 12 so that the substrate 28 is transported along a suitable path, such as paths 34, 36, or the like. In the illustrated embodiment, the inter-articular length of the forearm or second link 20 is greater than the inter-articular length of the upper arm or first link 16. In the illustrated embodiment, the lateral offset 38 of the end effector or third link 24 corresponds to the difference in interarticular length of the forearm 20 and upper arm 16. As will be explained in more detail below, the lateral offset 38 is maintained substantially constant during extension and retraction of the arm 14, such that the substrate 28 or the end effector 24 relative to the linear path is Moved along a linear path without rotation. This is accomplished using the internal structure of the arm 14 without the use of additional control axes to control the rotation of the end effector 24 at the wrist 26 relative to the forearm 20, as described. In one aspect of the embodiment disclosed with respect to FIG. 1A, the center of mass of the third link or end effector 24 may reside at the wrist centerline or axis of rotation 26. Alternatively, the center of mass of the third link or end effector 24 may lie along a path 40 that is offset (38) from the central axis of rotation 18. In this way, disturbances to the bands binding the end effector 24 to the links 16, 20 due to the applied moments as a result of the differently offset masses during arm extension and retraction are minimized. It's okay to be hit. Here, the center of mass may be determined with or without the substrate, or somewhere in between. Alternatively, the center of mass of the third link or end effector 24 may be located at any suitable location. In the illustrated embodiment, substrate transport apparatus 10 transports substrate 28 using a movable arm assembly 14 coupled to drive 12 on central rotation axis 18 . Substrate support 24 is coupled to arm assembly 14 on wrist rotation axis 26 . Here, arm assembly 14 rotates about central axis of rotation 18 during extension and retraction, as seen with respect to FIGS. 3A-C. During extension and contraction, the wrist rotation axis 26 follows a radial path relative to the central rotation axis 18, e.g., along a wrist path 40 parallel to paths 30, 34 or 36 and offset 38 or otherwise therefrom. It moves. Substrate support 24 similarly moves parallel to radial path 30 without rotation during expansion and contraction. As explained in more detail in other aspects of the disclosed embodiments, the principle of constraining the end effector to move in a substantially purely radial motion, where the length of the forearm is shorter than that of the upper arm. and structures may be applied. Furthermore, the feature that multiple substrates are handled by the end effector may be applied. Furthermore, the feature may be applied that a second arm handling one or more additional substrates is used in connection with the drive device. Therefore, all such variations may be included.

Referring also to FIGS. 2A and 2B, there are shown partially schematic top and side views, respectively, of system 10 showing the internal mechanisms used to drive the individual links of arm 14 shown in FIGS. 1A and 1B. ing. The drive device 12 includes first and second motors 52, 54 coupled to the housing 60 and having corresponding first and second encoders 56, 58 for driving first and second shafts 62, 64, respectively. has. Here, shaft 62 may be coupled to pulley 66 and shaft 64 may be coupled to upper arm 16, and shafts 62, 64 may be concentric or otherwise arranged. In alternative aspects, any suitable drive device may be provided. Housing 60 may communicate with chamber 68, with bellows 70, chamber 68, and an interior portion of housing 60 isolating vacuum environment 72 from atmospheric environment 74. The housing 60 may slide in the z-direction on a slide 76 as a movable platform, and a lead screw or other suitable mechanism may be used to selectively move the housing 60, and the arm 14 coupled thereto, in the z (80) direction. A vertical or linear z drive 78 may also be provided. In the illustrated embodiment, upper arm 16 is driven about central axis of rotation 18 by motor 54 . Similarly, the forearm is driven by motor 52 through a band drive having pulleys 66, 82 and bands 84, 86, such as conventional circular pulleys and bands. In alternative aspects, any suitable structure for driving forearm 20 relative to upper arm 16 may be provided. The ratio between pulleys 66 and 82 may be 1:1, 2:1 or any suitable ratio. The third link 24 having an end effector includes a pulley 88 that is grounded relative to the link 16, a pulley 90 that is grounded relative to the end effector or third link 24, and a band 92 that constrains the pulley 88 and pulley 90. , 94 may be restrained by a band drive. As illustrated, the ratio between pulleys 88, 90 may not be constant in order for third link 24 to follow a radial path without rotation during extension and retraction of arm 14. . This is where the pulleys 88, 90 may be one or more non-circular pulleys, such as two non-circular pulleys, or where one of the pulleys 88, 90 is circular and the other is non-circular. This may be achieved in appropriate cases. Alternatively, any suitable coupling device or linkage may be provided to constrain the third link or path of the end effector 24 as described. In the illustrated embodiment, at least one non-circular pulley counteracts the effects of the unequal lengths of the upper arm 16 and forearm 20 such that the end effector 24 engages the position of the first two links 16, 20. It is made to face in the radial direction 30 without any problem. Embodiments will be described with respect to pulley 90 being non-circular and pulley 88 being circular. Alternatively, pulley 88 may be non-circular and pulley 90 may be circular. Alternatively, pulleys 88 and 92 may be non-circular, or any suitable coupling device may be provided to constrain the links of arm 14 as described. As an example, a non-circular pulley or sprocket is described in US Pat. No. 4,865,577, issued September 12, 1989 and entitled Noncircular Drive. This patent is incorporated herein by reference in its entirety. Alternatively, any suitable coupling device may be provided for constraining the links of arm 14 as described, such as any suitable variable ratio drive or coupling device, coupling gears or sprockets. , cams or the like may be used alone or in combination with suitable linkages or other coupling devices. In the illustrated embodiment, the elbow pulley 88 is coupled to the upper arm 16 and is shown to be round or circular, and the wrist pulley 90 coupled to the wrist or third link 24 is shown to be non-circular. The shape of the wrist pulley is non-circular and may have symmetry about a line 96 perpendicular to the radial trajectory 30. Line 96 similarly corresponds to the position of two pulleys 88, 90 when forearm 20 and upper arm 16 are lined up directly above each other with wrist axis 26 closest to shoulder axis 18, as seen, for example, in FIG. 3B. It may coincide with or be parallel to the line between. The shape of the pulley 90 is such that the bands 92, 94 remain taut as the arm 14 extends and retracts, and the contact points on opposite sides of the pulley 90 have varying radial distances 102, 104 from the wrist rotation axis 26. It is like establishing 98 and 100. For example, in the orientation shown in FIG. 3B, each of the two band contacts 98, 100 on the pulley are at equal radial distances 102, 104 from the wrist rotation axis 26. This will be further explained with respect to FIG. 4, which shows the respective ratios. In order for arm 14 to rotate, both robot drive shafts 62, 64 must move the same amount in the direction of arm rotation. In order for the end effector 24 to radially extend and retract along a straight path, the two drive shafts 62, 64 coordinate, e.g., according to the exemplary inverse kinematics equations presented later in this section. I need to move. Here, the substrate transport device 10 is adapted to transport the substrate 28. Forearm 20 is rotatably coupled to upper arm 16 and is rotatable about an elbow axis 22 offset from central axis 18 by a humeral link length. End effector 24 is rotatably coupled to forearm 20 and is rotatable about a wrist axis 26 that is offset from elbow axis 22 by a forearm link length. Wrist pulley 90 is secured to end effector 24 and coupled to elbow pulley 88 using bands 92, 94. Here, the forearm link length is different from the upper arm link length, and the end effector is constrained to the upper arm by the elbow pulley, wrist pulley, and band such that the substrate moves along a linear radial path 30 relative to the central axis 18. Here, the substrate support 24 is coupled to the upper arm 16 using a substrate support coupling device 92 and rotated about the wrist rotation axis 26 by relative movement between the forearm 20 and the upper arm 16 about the elbow rotation axis 22. Driven. 3A, 3B and 3C show the extension motion of the robot of FIGS. 1 and 2. FIG. 3A shows a top view of robot 10 with arm 14 in its retracted position. FIG. 3B shows arm 14 partially extended with forearm 20 aligned over upper arm 16, with end effector lateral offset 38 corresponding to the difference in interarticular length of forearm 20 and upper arm 16. This is illustrated. FIG. 3C shows arm 14 in an extended, but not fully extended, position.

Exemplary forward kinematics may be provided. In alternative aspects, any suitable forward kinematics may be provided to accommodate alternative structures. The following example equation may be used to determine end effector position as a function of motor position.
x ₂ = l ₁ cos θ ₁ + l ₂ cos θ ₂ (1.1)
y ₂ = l ₁ sin θ ₁ +l ₂ sin θ ₂ (1.2)
R ₂ = sqrt(x ₂ ² +y ₂ ² ) (1.3)
T ₂ = atan2(y ₂ , x ₂ ) (1.4)
α ₃ =asin(d ₃ /R ₂ ) where d ₃ =l ₂ -l ₁ (1.5)
α ₁₂ = θ ₁ - θ ₂ (1.6)
If α ₁₂ <π: R=sqrt(R ₂ ² -d ₃ ² )+l ₃ ,T=T ₂ +α ₃ , otherwise R=-sqrt(R ₂ ² -d ₃ ² )+l ₃ ,T =T ₂ -α ₃ +π (1.7)

Exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematics may be provided to accommodate alternative structures. The following example equations may be utilized to determine the position of the motor to achieve a specified position of the end effector.
x ₃ = R cos T (1.8)
_y3 =R sin T (1.9)
x ₂ = x ₃ - l ₃ cos T+d ₃ sin T (1.10)
y ₂ = y ₃ - l ₃ sin T-d ₃ cos T (1.11)
R ₂ = sqrt(x ₂ ² +y ₂ ² ) (1.12)
T ₂ = atan2(y ₂ , x ₂ ) (1.13)
α ₁ = acos((R ₂ ² + l ₁ ² - l ₂ ² )/(2R ₂ l ₁ )) (1.14)
α ₂ = acos((R ₂ ² -l ₁ ² +l ₂ ² )/(2R ₂ l ₂ )) (1.15)
If R>l ₃ : θ ₁ = T ₂ + α ₁ , θ ₂ = T ₂ - _{α 2} , otherwise: θ ₁ = T ₂ - α ₁ , θ ₂ = T ₂ + α ₂ (1.16)

The following nomenclature may be used in the kinematic equations.
_d3 = lateral offset of end effector (m)
l ₁ = inter-joint length of the first link (m)
l ₂ = length between joints of second link (m)
l ₃ = length of the third link with the end effector, measured from the wrist joint to the reference point on the end effector (m)
R = radial position of end effector (m)
R ₂ = radius coordinate of wrist joint (m)
T = angular position of end effector (rad)
T ₂ = angular coordinate of wrist joint (rad)
x ₂ = x coordinate of wrist joint (m)
x ₃ = x-coordinate of end effector (m)
y ₂ = y-coordinate of wrist joint (m)
y ₃ = y-coordinate of end effector (m)
θ ₁ = angular position of the drive shaft connected to the first link (rad)
θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

The above exemplary kinematics equations are suitable for constraining the orientation of the third link 24 such that the end effector 24 is oriented radially 30 regardless of the position of the first two links 16, 20 of the arm 14. It may be used to design a drive device, for example a band drive device.

Referring to FIG. 4, the normalized extension of the arm measured from the center of _the robot to the root of the end effector, i.e., (R A plot 120 as a function of −l ₃ )/l ₁ is shown. The transmission ratio r ₃₁ is the angular velocity of the pulley attached to the third link, ω ₃₂ , relative to the angular velocity of the pulley attached to the first link, ω ₁₂ , both defined with respect to the second link. defined as the ratio. The figure graphically shows the transmission ratio r ₃₁ for different l ₂ /l ₁ (0.5 to 1.0 in increments of 0.1 and 1.0 to 2.0 in increments of 0.2). There is. The contours of the non-circular pulley(s), for example the contours shown in FIGS. 2A, 54A and 54B, may be calculated to achieve the transmission ratio r ₃₁ according to FIG. 4.

In the disclosed embodiments, by using one or more non-circular pulley(s) or other suitable device to constrain end effector motion, compared to equi-linked arms with the same storage volume. A longer reach may be obtained. In alternative aspects, the first link may be driven by a motor, either directly or through any type of coupling or transmission mechanism. Any suitable transmission ratio can be used here. Alternatively, the band drive actuating the second link can be any device with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the above. It may also be replaced by other mechanisms. Similarly, the band drive binding the third link may be replaced by any other suitable mechanism, such as a belt drive, a cable drive, a non-circular gear, a linkage-based mechanism, or any combination of the above. may be done. Here, the end effector may be, but need not be, radially oriented. For example, the end effector may be positioned with any suitable offset and oriented in any suitable direction relative to the third link. Additionally, in alternative aspects, the third link may carry multiple end effectors or substrates. Any suitable number of end effectors and/or material retainers may be carried by the third link. Additionally, in alternative _embodiments , the forearm _may be The interarticular length of can be smaller than that of the upper arm.

5A and 5B, top and side views, respectively, of a robot 150 incorporating several features of robot 10 are shown. Robot 150 is shown with drive 12 and arm 152 shown in a retracted position. Arm 152 has features similar to those of arm 14 except as described herein. As an example, the inter-articular length of the forearm or second link 158 is greater than the inter-articular length of the upper arm or first link 154. Similarly, the lateral offset 168 of the end effector or third link 162 corresponds to the difference in interarticular length of the forearm 158 and upper arm 154. Referring also to FIGS. 6A and 6B, a drive system 12 is shown having internal mechanisms used to drive the individual links of the arm. In the illustrated embodiment, upper arm 154 is driven through shaft 64 by a single motor as described with respect to arm 14 of FIGS. 1 and 2. Similarly, end effector or third link 162 is constrained to upper arm 154 by a non-circular pulley mechanism as described with respect to arm 14 of FIGS. 1 and 2. An exemplary difference between arm 152 and arm 14 is that forearm 158 is coupled to shaft 62 and another motor of drive 12 via a band mechanism having at least one non-circular pulley. Here, the coupling device or band mechanism may have features as described herein or with respect to pulley drives 88, 90 of FIGS. 1 and 2. The coupling device or band mechanism includes a non-circular pulley 202 coupled to the shaft 62 of the drive device 12 and rotatable therewith about the axis 18 . The band mechanism of arm 152 further includes a circular pulley 204 coupled to upper arm link 154 and rotatable about elbow axis 156. Circular pulley 204 is coupled to non-circular pulley 202 via bands 206, 208. Here, bands 206, 208 may be held taut due to the contour of non-circular pulley 202. In alternative embodiments, any combination of pulleys or other suitable transmission devices may be provided. Pulleys 202 and 204 and bands 206, 208 ensure that rotation of upper arm 154 relative to pulley 202 (e.g., holding pulley 202 stationary while rotating upper arm 154) causes wrist joint 160 to move toward the end effector. cooperate to extend and contract along a straight line parallel to and offset from the desired radial path 180 (168). Here, the third link 162 with the end effector is connected to the first two links 154, 158, for example by a band drive as described with respect to the arm 14, having at least one non-circular pulley. is constrained to point in the radial direction 180 regardless of its position. Any suitable coupling device may be provided herein for constraining the links of arm 152 as described, such as one or more suitable variable ratio drives or couplings, coupling gears or Sprockets, cams or the like may be used alone or in combination with suitable linkages or other coupling devices. In the illustrated embodiment, elbow pulley 204 is coupled to forearm 158 and is shown as round or circular, and shoulder pulley 202 coupled to shaft 62 is shown as non-circular. The shape of the shaft pulley is non-circular and may have symmetry about a line 218 perpendicular to the radial trajectory 180. Line 218 similarly represents the position of the two pulleys 202, 204 when the forearm 158 and upper arm 154 are directly above each other with the wrist axis 160 closest to the shoulder axis 18, as seen, for example, in FIG. 7B. It may coincide with or be parallel to the line between. The shape of pulley 202 is such that bands 206, 208 remain taut as arm 152 extends and retracts, and contact points are formed on opposite sides of pulley 202 with varying radial distances 214, 216 from shoulder rotation axis 18. 210 and 212. For example, in the orientation shown in FIG. 7B, each of the two band contacts 210, 212 on the pulley are at equal radial distances 214, 216 from the shoulder rotation axis 18. This will be further explained with respect to FIG. 8 which shows the respective ratios. In order for arm 152 to rotate, both robot drive shafts 62, 64 must move the same amount in the direction of arm rotation. In order for the end effector 162 to radially extend and retract along a straight path, the two drive shafts 62, 64 coordinate, e.g., according to the exemplary inverse kinematics equations presented later in this section. I need to move. For example, a drive shaft coupled to the upper arm needs to move according to the inverse kinematics equations presented below, while the other motor is held stationary. 7A, 7B and 7C illustrate the extension motion of the robot 150 of FIGS. 5 and 6. FIG. FIG. 7A shows a top view of the robot with arm 152 in its retracted position. FIG. 7B shows the partially extended arm with the forearm aligned over the upper arm and shows that the lateral offset 168 of the end effector 162 corresponds to the difference in interarticular length of the forearm 158 and the upper arm 154. Illustrated. Figure 7C shows the arm in an extended, but not fully extended, position.

Exemplary forward kinematics may be provided. In alternative aspects, any suitable forward kinematics may be provided to accommodate alternative structures. The following example equation may be used to determine end effector position as a function of motor position.
d ₁ = l ₁ sin(θ ₁ - θ ₂ ) (2.1)
If (θ ₁ −θ ₂ )<π/2: θ _2l =θ ₂ −l ₂ asin((d ₁ +d ₃ )/l ₂ ), otherwise θ _2l =θ ₂ +l ₂ asin((d ₁ + d ₃ )/l ₂ ) + π
(2.2)
x ₂ = l ₁ cos θ ₁ + l ₂ cos θ _2l (2.3)
y ₂ = l ₁ sin θ ₁ + l ₂ sin θ _2l (2.4)
R ₂ = sqrt(x ₂ ² +y ₂ ² ) (2.5)
T ₂ = atan2(y ₂ , x ₂ ) (2.6)
If (θ ₁ −θ ₂ )<π/2: R=sqrt(R ₂ ² −d ₃ ² )+l ₃ , T=θ ₂ , otherwise R=−sqrt(R ₂ ² −d ₃ ² )+l ₃ , T=θ ₂ (2.7)

Exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematics may be provided to accommodate alternative structures. The following example equations may be utilized to determine the position of the motor to achieve a specified position of the end effector.
x ₃ = R cos T (2.8)
_y3 =R sin T (2.9)
x ₂ = x ₃ - l ₃ cos T+d ₃ sin T (2.10)
y ₂ = y ₃ - l ₃ sin T-d ₃ cos T (2.11)
R ₂ = sqrt(x ₂ ² +y ₂ ² ) (2.12)
T ₂ = atan2(y ₂ , x ₂ ) (2.13)
α ₁ = acos((R ₂ ² + l ₁ ² - l ₂ ² )/(2R ₂ l ₁ )) (2.14)
If R>l ₃ : θ ₁ = T ₂ + α ₁ , θ ₂ = T, otherwise: θ ₁ = T ₂ - α ₁ , θ ₂ = T (2.15)

The following nomenclature is used in kinematic equations:
_d3 = lateral offset of end effector (m)
l ₁ = inter-joint length of the first link (m)
l ₂ = length between joints of second link (m)
l ₃ = length of the third link with the end effector, measured from the wrist joint to the reference point on the end effector (m)
R = radial position of end effector (m)
R ₂ = radius coordinate of wrist joint (m)
T = angular position of end effector (rad)
T ₂ = angular coordinate of wrist joint (rad)
x ₂ = x coordinate of wrist joint (m)
x ₃ = x-coordinate of end effector (m)
y ₂ = y-coordinate of wrist joint (m)
y ₃ = y-coordinate of end effector (m)
θ ₁ = angular position of the drive shaft connected to the first link (rad)
θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

The above kinematic equations may be used to design a band drive. Here, the band drive controls a second link 158 such that rotation of the upper arm 154 causes the wrist joint 160 to extend and retract along a straight line parallel to the desired radial path 180 of the end effector 162.

Referring now to FIG. 8, we define the transmission ratio r ₂₀ 272 of the band drive driving the second link as the normalized extension of the arm measured from the center of the robot to the root of the end effector, i.e., ( A graph 270 is shown as a function of R−l ₃ )/l ₁ . The transmission ratio r ₂₀ is the angular velocity of the pulley attached to the second link, ω ₂₁ , relative to the angular velocity of the pulley attached to the second motor, ω ₀₁ , both defined with respect to the first link. defined as the ratio. The figure graphically shows the transmission ratio r ₂₀ for different l ₂ /l ₁ .
The contour of the non-circular pulley(s) for the band drive driving the second link is calculated to achieve the transmission ratio r ₂₀ 272 according to FIG. An example of a pulley profile is shown in FIG. 6A and will be described with respect to FIGS. 55A and 55B.

The transmission ratio r ₃₁ of the band drive constraining the orientation of the third link 162 may be the same as shown in FIG. 4 for the embodiment of FIGS. 1 and 2. The transmission ratio r ₃₁ is the angular velocity of the pulley attached to the third link, ω ₃₂ , relative to the angular velocity of the pulley attached to the first link, ω ₁₂ , both defined with respect to the second link. defined as the ratio. The figure graphically shows the transmission ratio r ₃₁ for different l ₂ /l ₁ (0.5 to 1.0 in increments of 0.1 and 1.0 to 2.0 in increments of 0.2). There is. The profile of the non-circular pulley(s) for the band drive binding the third link 162 may be calculated to achieve the transmission ratio r ₃₁ according to FIG. 4. An example of a pulley profile is shown in FIG. 6A.

The illustrated embodiment provides a longer reach compared to an equi-linked arm with the same storage volume while using a non-circular pulley or other suitable mechanism to constrain the end effector as described. It's okay to be hit. Compared to the embodiments disclosed in FIGS. 1 and 2, another band drive with a non-circular pulley may replace the conventional band drive at the shoulder shaft 18. In alternative aspects, the first link may be driven by a motor, either directly or through any type of coupling or transmission mechanism, e.g., any suitable transmission ratio may be used. It's okay to be rejected. Alternatively, the band drive for actuating the second link and constraining the third link may include a belt drive, a cable drive, a non-circular gear, a linkage-based mechanism, or any combination of the above. Any other mechanism with equivalent functionality may be substituted. Additionally, the third link radially moves the end effector through a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by a second motor, as shown in FIG. It may be constrained to hold. Alternatively, the two-stage band mechanism may be replaced by any other suitable mechanism, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the above. Additionally, the end effector may be, but need not be, radially oriented. For example, the end effector may be positioned with any suitable offset and oriented in any suitable direction relative to the third link. In alternative aspects, the third link may carry more than one end effector or substrate. Here, any suitable number of end effectors and/or material holders may be carried by the third link. Furthermore, the inter-articular length of the forearm may be smaller than the inter-articular length of the upper arm, for example as represented by l ₂ /l ₁ <1 in FIG.

Referring now to FIG. 9, an alternative robot 300 is shown. In robot 300, the third link is constrained to radially hold the end effector via a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by a second motor. You can. Robot 300 is shown having a drive 12 and an arm 302. Arm 302 may have an upper arm or first link 304 coupled to shaft 64 and rotatable about central or shoulder axis 18 . Arm 302 has a forearm or second link 308 rotatably coupled to upper arm 304 at elbow axis 306 . Links 304, 308 may be of different lengths, as described above. A third link or end effector 312 is rotatably coupled to a second link or forearm 308 at the wrist axis 310, with the end effector 312 being rotationally coupled by links 304, 308 having unequal link lengths as described above. The substrate 28 may be transported along the radial path without any accompanying movement. In the illustrated embodiment, shaft 62 is coupled to two pulleys, 314, 316. Here, the pulley 314 may be circular, and the pulley 316 may be non-circular. Here, circular pulley 314 radially retains end effector 312 via a conventional two-stage (318, 320) circular band mechanism that synchronizes third link 312 to a pulley driven by shaft 62. The third link 312 is bound as follows. The two-stage mechanism 318, 320 has a pulley 314 coupled to an elbow pulley 324 by a band 322. Elbow pulley 324 is coupled to elbow pulley 326, and elbow pulley 326 is coupled to wrist pulley 328 via band 330. Forearm 308 is circular and may further include an elbow pulley 332 that may be coupled to shoulder pulley 316 through a band 334. The shoulder pulley may be non-circular and coupled to pulley 314 and shaft 62.

Disclosed embodiments are robots having a robot drive with an additional axis, wherein an arm coupled to the robot drive is independently movable with the ability to transport one or more substrates. Further embodiments may be made for robots that may have additional end effectors. For example, an arm having two independently operable arm linkages or a "dual arm" configuration, each independently operable arm having one, two, or any suitable number of substrates. An arm may be provided that may have an end effector adapted to support the arm. As described herein and below, each independently operable arm may have first and second links having different link lengths, and an end effector and a support coupled to the links. The substrate then operates and follows the path as described above. Here, the substrate transport apparatus may transport first and second substrates and have first and second independently movable arm assemblies coupled to a drive on a common rotation axis. First and second substrate supports are coupled to the first and second arm assemblies on first and second wrist rotation axes, respectively. One or both of the first and second arm assemblies rotate about a common axis of rotation during extension and retraction. The first and second wrist rotation axes move during extension and contraction along first and second wrist paths parallel to and offset from a radial path relative to the common rotation axis. The first and second substrate supports move parallel to the radial path without rotation during extension and contraction. Below, variations of the disclosed embodiments are provided that have multiple independently operable arms. Here, in alternative aspects any suitable combination of features may be provided.

10A and 10B, top and side views, respectively, of a robot 350 having a dual arm mechanism are shown. Robot 350 has an arm 352 with a common upper arm 354 and independently movable forearms 356, 358, each having a respective end effector 360, 362. In the illustrated embodiment, both linkages are shown in their retracted positions. End effector lateral offset 366 corresponds to the difference in interarticular length of upper arm 354 and forearm 356, 358. In the illustrated embodiment, the upper arm has the same length and may be longer than the forearm. Additionally, end effectors 360, 362 are positioned above forearms 356, 358. 11A and 11B, top and side views, respectively, of a robot 375 with an arm in an alternative configuration are shown. In the illustrated embodiment, arm 377 may have features as described with respect to FIGS. 10A and 10B, with linkages both shown in their retracted positions. In this configuration, a third link with an upper linkage end effector 382 is provided under the forearm 380 to reduce the vertical spacing between the two end effectors 382, 384. Here, a similar effect may be achieved by lowering the upper end effector 362 of the configuration of FIGS. 10A and 10B by stepping (368) it. Referring also to FIGS. 12 and 13, the internal mechanisms of the robots 350, 375 used to drive the individual links of the arms of FIGS. 10 and 11, respectively, are shown. In the illustrated embodiment, the drive device 390 has first and second rotor-stator mechanisms that drive concentric shafts 398, 400, 402, respectively, and may be rotor-stator mechanisms having position encoders 404, 406, 408, respectively. and a third drive motor 392, 394, 396. A Z drive 410 may drive the motor vertically. In this case, the motor may be partially or fully contained within housing 412, with bellows 414 sealing the interior volume of housing 412 to chamber 416, and the interior volume and interior of chamber 416 being sealed by a vacuum or other It may operate in an isolated environment such as a computer. In the illustrated embodiment, common upper arm 354 is driven by one motor 396. Each of the two forearms 356, 358 pivots on a common axis 420 at the elbow of the upper arm 354, by motors 394, 396, respectively, and through band drives 422, 424, respectively, which may have conventional pulleys. independently driven. The third links with end effectors 360, 362 are constrained by band drives 426, 428, each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. Here, the band drives within each of the linkages may be designed using the methodology described for Figures 1 and 2, and the kinematic equations presented for Figures 1 and 2 are similarly It may be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts 398, 400, 402 of the robot must move the same amount in the direction of arm rotation. In order for one of the end effectors to radially extend and retract along a straight path, a common upper arm drive shaft and a drive shaft coupled to the forearm associated with the active end effector are coupled to the drive shaft of FIGS. It is necessary to move in a coordinated manner according to the inverse kinematics equation for 2. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the common upper arm drive shaft in order for the inactive end effector to remain retracted. Referring also to FIGS. 14A, 14B and 14C, the arms of FIGS. 11A and 11B are shown as the upper and lower linkages are extended. Here, the inactive linkages 356, 360 rotate while the active linkages 358, 362 extend. By way of example, as the lower linkages 356, 360 extend, the upper linkages 358, 362 rotate, and as the upper linkages 358, 362 extend, the lower linkages 356, 360 rotate. The disclosed embodiments of FIGS. 10 and 11 may simplify assembly and control, in which case the arm mechanism may be used on a coaxial drive without a kinematic seal; On the other hand, it provides a longer reach compared to an equal link length arm with the same storage volume. Here, no bridge is used to support any of the end effectors. In the illustrated embodiment, the inactive arm rotates while the active arm extends. One of the wrist joints moves above the lower end effector (closer to the wafer than with an equal linkage).

15A and 15B, top and side views, respectively, of a robot 450 having a dual arm mechanism are shown. Robot 450 has an arm 452 with a common upper arm 454 and independently movable forearms 456, 458 each having a respective end effector 460, 462. In the illustrated embodiment, both linkages are shown in their retracted positions. The lateral offset 466, 486 of the end effectors 460, 462 corresponds to the difference in interarticular length of the upper arm 454 and forearm 456, 458. In the illustrated embodiment, the upper arm has the same length and may be longer than the forearm. Additionally, end effectors 460, 462 are positioned above forearms 456, 458. Referring also to FIGS. 16A and 16B, top and side views, respectively, of a robot 475 with an arm in an alternate configuration are shown. Again, both linkages are shown in their retracted positions. In this configuration, the third link of the left linkage and end effector 482 is provided under the forearm 480 to reduce the vertical spacing between the two end effectors 482, 484. A similar effect can be achieved by lowering (468) the upper end effector of the configuration of FIGS. 15A and 15B. Alternatively, a bridge can be used to support one of the end effectors. The integrated upper arm link 454 may be a single piece, as shown in FIGS. 15 and 16, or it may be made up of two or more parts 470, 472, as shown in the example of FIGS. 17A and 17B. It may be formed by Here, a two-part design may be provided that is lighter and uses less material, and the left 472 and right 470 parts may be the same component. Here, the two-part design may also have provision for adjustment of the angular offset between the left and right parts. These facilities can be useful when different retraction positions need to be supported. Referring also to FIGS. 18 and 19, the internal mechanisms used to drive the individual links of the arms of FIGS. 15 and 16 are shown, respectively. Integrated upper arm 454 is shown being driven with shaft 402 by one motor. Each of the two forearms 456, 458 is independently driven by one motor through a shaft 400, 398, respectively, and through a band drive 490, 492, respectively, with a conventional pulley. Here, links 456, 458 rotate on separate axes 494, 496, respectively. The third links with end effectors 460, 462 are constrained by band drives 498, 500, each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. Here, band drives 498, 500 within each of linkages 456, 460 and 458, 462 are designed using the methodology described for FIGS. 1 and 2. Here, the kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages 456, 460 and 458, 462 of the dual arm. In order for arm 452 to rotate, all three drive shafts 398, 400, 402 of the robot must move the same amount in the direction of arm rotation. In order for one of the end effectors to radially extend and retract along a straight path, a common upper arm drive shaft and a drive shaft coupled to the forearm associated with the active end effector are coupled to the drive shaft of FIGS. It is necessary to move in a coordinated manner according to the inverse kinematics equation presented for 2. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the common upper arm drive shaft in order for the inactive end effector to remain retracted. 20A, 20B and 20C, the arms of FIGS. 16A and 16B are shown as the left side 458, 462 and right side 456, 460 linkages are extended. Note that the inactive linkages 456, 460 rotate while the active linkages 458, 462 extend. Here, the right linkages 456, 460 rotate as the left linkages 458, 462 extend, and the left linkages 458, 462 rotate as the right linkages 456, 460 extend. The illustrated embodiment takes advantage of the fact that the three-dimensional linkage design is easy to assemble and control, and the advantages of coaxial drives, e.g., without dynamic seals, while using the same storage volume. Provides a longer reach compared to equi-linked arms with Here, no bridge is used to support any of the end effectors. Here, the inactive arm rotates while the active arm extends. One of the wrist joints moves over the lower end effector closer to the wafer than with an equal linkage. This can be avoided by using a bridge (not shown) to support the upper end effector. In this case, the unsupported length of the bridge may be longer compared to an equal link arm design. Additionally, the retraction angle is more difficult to vary than configurations with a common elbow joint, e.g., as seen in FIGS. 10 and 11, and independent dual arms, e.g., as seen in FIGS. 21 and 22. It can be.

21A and 21B, top and side views, respectively, of a robot 520 having dual independent arms 522, 524 are shown. In the illustrated embodiment, linkages 522, 524 are both shown in their retracted positions. Arm 522 has an independently movable upper arm 526, a forearm 528, and a third link with an end effector 530. Arm 524 has an independently movable upper arm 532, a forearm 534, and a third link with an end effector 536. In the illustrated embodiment, the forearms 528, 534 are shown to be longer than the upper arms 526, 532, and the end effectors 530, 536 are positioned above the forearms 528, 534, respectively. 22A and 22B, there are shown top and side views of a robot 550 having features similar to those of robot 520, with arms in an alternate configuration, with both linkages Indicated by location. In this configuration, the third link of the left linkage and end effector 552 is provided under the forearm 554 to reduce the vertical spacing between the two end effectors. A similar effect can be achieved by lowering the upper end effector of the configuration of FIG. 21. Alternatively, a bridge can be used to support one of the end effectors. In FIGS. 21 and 22, right upper arm 532 is positioned below left upper arm 526. Alternatively, for example, the left upper part may be placed above the right upper arm, in which case one linkage could be nested within the other. Referring also to FIG. 23, the internal mechanism used to drive the individual links of the arms of FIGS. 21A and 21B is shown. Here, for clarity of illustration, the heights of the links have been adjusted to avoid overlapping components. Each of the two upper arms 526, 532 is independently driven by one motor through respective shafts 398, 402, respectively. Forearms 528, 534 are coupled to a third motor via shaft 400 via band mechanisms 570, 572 each having at least one non-circular pulley. Third links 530, 536 with end effectors are constrained by band drives 574, 576 each having at least one non-circular pulley. The band drive is such that rotation of one of the upper arms 526, 532 causes the corresponding linkages 528, 530 and 534, 536 to extend and retract, respectively, along a straight line while the other linkage remains stationary. Designed to. The band drive within each of the linkages may be designed using the methodology described with respect to Figures 5 and 6, and the kinematic equations presented for Figures 5 and 6 similarly Can be used for each of the linkages. In order for the arm to rotate, all three drive shafts 398, 400, 402 of the robot must move the same amount in the direction of arm rotation. In order for one of the end effectors to radially extend and retract along a straight path, the upper arm drive shaft associated with the active end effector needs to be rotated according to the inverse kinematics equations for FIGS. and the other two drive shafts must be held stationary. 24A, 24B and 24C, the arm of FIG. 22 is shown as the left side 522 and right side 524 linkages are extended. Note that inactive linkage 524 remains stationary while active linkage 522 extends. That is, the left linkage 522 does not move while the right linkage 524 extends, and the right linkage 524 does not move as the left linkage 522 extends. The illustrated embodiment provides a longer reach compared to equal link arm designs with the same storage volume. Here, no bridge is used to support any of the end effectors, and the inactive linkage remains stationary while the active linkage extends. Active linkages can extend or retract faster without loading, potentially resulting in higher throughput. The illustrated embodiment has two more band drives with non-circular pulleys instead of conventional ones and can be more complex than shown in FIGS. 15 and 16. One of the wrist joints moves over the lower end effector, as seen in FIG. This can be avoided by using a bridge (not shown) to support the upper end effector. In this case, the unsupported length of the bridge is longer compared to an equal link arm design.

25A and 25B, top and side views, respectively, of a robot 600 with an arm 602 are shown. In the illustrated embodiment, both linkages are shown in their retracted positions. The end effector lateral offset 604 corresponds to the difference in interarticular length of the upper arm 606 and forearm 608, 612. Here, in this embodiment, the forearms 608, 612 are shorter than the common upper arm 606. The internal mechanisms used to drive the individual links of the arms may be similar to FIGS. 10-13, for example as in FIG. 13, but the forearm in this example is shorter than the common upper arm. . Here, the common upper arm is driven by one motor. Each of the two forearms is driven independently by one motor through a band drive with conventional pulleys. The third links 614, 616 with end effectors are constrained by band drives each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. The band drives within each of the linkages may be designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. 26A, 26B and 26C, the arms of FIGS. 25A and 25B are shown as the upper linkages 612, 616 are extended. The end effector lateral offset 604 corresponds to the difference in length between the upper arm and forearm joints, and the wrist joint moves along a straight line offset by this difference with respect to the trajectory of the center of the wafer. Note that the inactive linkages 608, 614 rotate while the active linkages 612, 616 extend. For example, as the lower linkage extends, the upper linkage rotates, and as the upper linkage extends, the lower linkage rotates. Here, FIG. 26A shows the arm with both linkages in the retracted position. FIG. 26B shows the upper linkages 612, 616 partially extended in a position where the upper linkage wrist joints are closest to the wafer carried by the lower linkage. It is observed that the wrist joint of the upper linkage does not move directly above the wafer (although it moves in a plane above the wafer). FIG. 26C shows further extension of the upper linkages 612, 616. The illustrated embodiment may provide ease of assembly and control, and may be used on coaxial or triaxial drives without dynamic seals, or other suitable drives. Here, no bridges may be used to support any of the end effectors. The wrist joint of the upper linkage does not move directly above the wafer on the lower end effector as in the equilink design (although it moves in a plane above the wafer on the lower end effector). Here, the inactive arm rotates while the active arm extends. The elbow joint may become more complex, which may lead to a larger turning radius or a shorter reach. Here, the arm may be taller than the arm shown in FIGS. 30 and 31 and 33 due to the overlap of the forearms 608, 612.

27A and 27B, top and side views, respectively, of a robot 630 with an arm 632 are shown. Arm 632 may have similar features as disclosed with respect to FIGS. 15-19, except that forearms 638, 640 are shown having a shorter link length than upper arm 636. Both linkages are shown in their retracted positions. The lateral offset 634 of the end effectors 642, 646 corresponds to the difference in inter-articular length of the upper arm 636 and forearm 638, 640. The integrated bicep link 636 may be a single piece, as shown in FIGS. 27A and 27B, or the bicep link may be two or more pieces, as shown in the example of FIGS. 28A and 28B. The two-part design may use less material and be lighter, and the left-hand 636' and right-hand 636" parts may be the same component. good. For example, allowances may be provided for adjustment of the angular offset between the left 636' and right 636'' portions if different retracted positions need to be supported. The internal mechanisms used to drive may be similar to those in Figures 15-19, for example as seen in Figure 19. The common upper arm 636 is driven by one motor. Each of the two forearms 638, 640 is driven independently by one motor through a band drive with conventional pulleys. A third link with end effectors 642, 646 connects the upper arm 636 and the forearm 638, 640 may be constrained by band drives each having at least one non-circular pulley to offset the effects of unequal lengths of 640. The band drives within each of the linkages are as described for FIGS. The kinematic equations presented for Figures 1 and 2 may similarly be used for each of the two linkages of the dual arm. Figures 29A, 29B and 29C. Referring also to FIGS. 27A and 27B, the arms of FIGS. 27A and 27B are shown as the right upper linkages 640, 646 are extended. The lateral offset 634 of the end effector corresponds to the difference in the interarticular length of the upper arm and forearm. and the wrist joint moves along a straight line offset by this difference with respect to the trajectory of the center of the wafer, where the inactive linkages 638, 642 extend while the active linkages 640, 646 extend. For example, as the lower linkage extends, the upper linkage rotates, and as the upper linkage extends, the lower linkage rotates. In Figures 29A, 29B and 29C, Figure 29A shows the linkage with both linkages in the retracted position. 29B shows the right upper linkage 640 partially extended in the position where the wrist joint of the right upper linkage 640, 646 is closest to the wafer carried by the left lower linkage 638, 642. , 646, where the wrist joints of the right upper linkages 640, 646 do not move directly above the wafer, but the wrist joints move in a plane above the wafer. , 646. The illustrated embodiment takes advantage of the three-dimensional linkage design, ease of assembly and control, and coaxial drives, e.g., no kinematic seals. do. No bridges are used to support any of the end effectors. The wrist joint of the upper linkage does not travel directly above the wafer on the lower end effector as in the equi-link design. However, this wrist joint moves in a plane above the wafer on the lower end effector. Inactive arms 638, 642 rotate while active arms 640, 646 extend. The retraction angle is more difficult to change compared to configurations with a common elbow joint, as seen, for example, in FIGS. 25A and 25B, and independent dual arms, as seen, for example, in FIGS. 33A and 33B. Furthermore, forearm 640 is shown higher than forearm 638, thereby showing the arm in a higher position than in FIGS. 30 and 31 and 33A and 33B.

30A and 30B, top and side views, respectively, of a robot 660 with an arm 662 are shown. Arm 662 may have features as described with respect to FIGS. 27-29, but with a bridge and two forearms at the same height as described. Both linkages are shown in their retracted positions. The end effector lateral offset 664 corresponds to the difference in interarticular length of the upper arm 666 and forearm 668, 670. The integrated bicep link 666 can be a single piece, as shown in FIGS. 30A and 30B, or the bicep link can be two or more pieces, as shown in the example of FIGS. 31A and 31B. may be formed by portions 666', 666'' of the arm. The internal mechanism used to drive the individual links of the arm may be identical to that shown for FIGS. 15-19; , in this case the forearms 668, 670 are shorter than the upper arm 666. The common upper arm 666 is driven by one motor. Each of the two forearms 668, 670 has a conventional pulley by one motor. The third link with end effectors 672, 674 is independently driven through a band drive, each having at least one non-circular pulley to counteract the effects of unequal lengths of the upper arm and forearm. The band drives within each of the linkages may be designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may be similarly The third link and end effector 674 can be used for each of the two linkages of the dual arm. A bridge 680 has a support 684 and further has a lower support 686 coupling the wrist shaft to the offset support 684.The bridge 680 includes a third link, as can be seen below with respect to FIG. and end effectors 672 (which may include wafers) and bridges 680 that allow forearms 668 and 670 to be packed at the same level while providing clearance for interleaved portions of end effectors 672 (which may include wafers) and bridges 680. 32A, 32B, 32C and 32D, the right linkages 670, 674 A top view of the robotic arm of FIGS. 30A and 30B as it extends is shown. The lateral offset 664 of the end effector corresponds to the difference in length between the upper arm 666 and forearm 670 joints, and the wrist joint 690 is 692 along a straight line offset by this difference with respect to the center trajectory of 692. Note that the inactive linkages 668, 672 rotate while the active linkages 670, 674 extend. For example, as the lower linkage extends, the upper linkage rotates, and as the upper linkage extends, the lower linkage rotates. In Figures 32A, 32B, 32C and 32D, Figure 32A shows the arm with both linkages in the retracted position. FIG. 32B shows a partial extension at a location corresponding to (or near the worst case gap) between the bridge 680 of the right linkage 670, 674 and the end effector 672 of the left linkage 668, 672. The right side linkages 670, 674 are shown. FIG. 32C shows the partially extended right linkage 670, 674 in a position when the forearm 670 is aligned with the upper arm 666''. The lateral offset of the end effector corresponds to the difference in the interarticular length of the upper arm and forearm. The axis of the wrist joint 690 moves along a straight line offset by this difference with respect to the trajectory of the center of the wafer 692. Figure 32D shows further extension of the right linkages 670, 674. The embodiments described here take advantage of the advantages of a side-by-side dual SCARA arrangement, such as a slim profile resulting in a shallow chamber with a small volume, the advantages of a three-dimensional linkage design, and the advantages of a coaxial drive. Combine the advantages: the bridge 680 on the right linkage 670, 674 is much lower, its unsupported length between the vertical member 684 and the wrist 690 is shorter than in prior art coaxial dual SCARA arms, and the joint All are below the end effector, where the inactive arms 668, 672 rotate while the active arms 670, 674 extend. In other aspects, an arm that does not exhibit this behavior may be provided with a different band drive with a non-circular pulley instead of the conventional one disclosed herein. Alternatively, the upper end effector may be The supporting bridge may be eliminated by utilizing a mechanism similar to that described above for FIGS. 25A, 25B, 27, and 28.

33A and 33B, top and side views, respectively, of a robot 700 with an arm 702 are shown. Arm 702 may have features similar to those of the arms shown in FIGS. 21-23, but with a forearm length shorter than the upper arm length, using a bridge as described with respect to bridge 680, as an example; The forearms are placed at the same height. Both linkages are shown in their retracted positions. In FIGS. 33A and 33B, right upper arm 708 is positioned above left upper arm 706. Alternatively, the left upper portion 706 may be positioned above the right upper arm 708. Similarly, the third link of the right linkages 712 , 716 and the end effector 716 feature a bridge that extends directly above the third link and end effector 714 of the left linkages 710 , 714 . Alternatively, the third link of the left linkages 710, 714 and the end effector 714 may feature a bridge that may extend directly above the third link and end effector 716 of the right linkages 712, 716. The internal mechanisms used to drive the individual links of the arms may be similar to the embodiments shown in FIGS. 21-23. Each of the two upper arms 706, 708 is independently driven by one motor. The forearms 710, 712 are coupled to a third motor via a band mechanism each having at least one non-circular pulley. The third links 714, 716 with end effectors are constrained by band drives each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms 706, 708 causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The band drives within each of the linkages are designed using the methodology described for the embodiments shown in FIGS. 5 and 6. The kinematic equations presented for the embodiments shown in FIGS. 5 and 6 can similarly be used for each of the two linkages of the dual arm. 34A, 34B and 34C, the arms of FIGS. 33A and 33B are shown as the right linkages 708, 712, 716 are extended. Here, the inactive linkages 706, 710, 714 remain stationary while the active linkages 712, 716 extend. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move while the left linkage extends. The illustrated embodiment combines the advantages of a parallel dual scalar mechanism, such as a slim profile resulting in a shallow chamber with a small volume, and a coaxial drive. The bridge on the right-hand linkage is much lower, its unsupported length is shorter than that of existing coaxial dual SCARA arms, and all of the articulation is below the end effector. Inactive linkages remain stationary while active linkages extend. Active linkages can extend or retract faster without loading, potentially resulting in higher throughput. Alternatively, the bridge supporting the upper end effector may be eliminated by utilizing a mechanism similar to that described for FIGS. 25, 27 and 28.

35A and 35B, top and side views of a robot 730 having an arm 732 with linkages both shown in their retracted positions are shown. Each linkage has dual-holder end-effectors 740, 742, each supporting two substrates offset from each other for a total of four supportable substrates. The internal mechanisms used to drive the individual links of arm 732 may be the same as in FIGS. 10 and 11, eg, FIG. 13. The common upper arm 734 is driven by one motor. Each of the two forearms 736, 738 is independently driven by one motor through a band drive with conventional pulleys. The third link with end effectors 740, 742 is constrained by a band drive each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. The illustrated embodiment has a forearm that is longer than the upper arm. Alternatively, the forearm may be shorter. The band drives within each of the linkages are designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. Referring also to FIG. 36, the arms of FIGS. 35A and 35B are shown as one linkage 738, 742 is extended. Note that the inactive linkages 736, 740 rotate while the active linkages 738, 742 extend. For example, as the lower linkage extends, the upper linkage rotates, and as the upper linkage extends, the lower linkage rotates. Compared to Figures 37 and 38, the end effector does not need to be shaped to avoid interference with the opposite elbow.

37A and 37B, top and side views, respectively, of a robot with arm 750 are shown. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors 758, 760. The integrated bicep link 752 may be a single piece, as shown in FIGS. 37A and 37B, or the bicep link may be made up of two or more pieces, as shown in the example of FIGS. 38A and 38B. The internal mechanism used to drive the individual links of the arm may be the same as in FIGS. 15-19, e.g. The upper arm 752 is driven by one motor. Each of the two forearms 754, 756 is driven independently by one motor through a band drive with a conventional pulley. A third link with an end effector. 758, 760 are constrained by band drives each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. The illustrated embodiment has a longer forearm than the upper arm. Alternatively, the forearm may be shorter. The band drive within each of the linkages is designed using the methodology described for Figures 1 and 2. Presented for Figures 1 and 2. The kinematics equations given may be similarly used for each of the two linkages of the dual arm. Because the arm rotates, all three drive shafts of the robot move the same amount in the direction of arm rotation. In order for one of the end effector assemblies to extend and retract radially along a straight path, a common upper arm drive shaft, and a drive shaft coupled to the forearm associated with the active linkage, are required. 1 and 2 must move in a coordinated manner according to the inverse kinematics equations for 1 and 2. At the same time, the drive shaft coupled to the other forearm must move in unison with the drive shaft of the common upper arm in order for the inactive linkage to remain retracted. Referring also to Figure 39, the arms of Figures 37A and 37B are shown as one linkage 756, 760 is extended, where the active linkage is extended. During this time, the inactive linkages 754, 758 rotate. For example, as the left linkage extends, the right linkage rotates, and as the right linkage extends, the left linkage rotates. The illustrated embodiment has a bridge. No. The upper wrist moves directly over one of the wafers on the lower end effector, where the arm and end effector must be designed such that the upper elbow passes the lower end effector without touching it.

40A and 40B, top and side views, respectively, of a robot 780 with an arm 782 are shown. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors 792, 794. The internal mechanism used to drive the individual links of the arm may be the same as in Figures 21-23. Each of the two upper arms 784, 786 is independently driven by one motor. Forearms 788, 790 are coupled to a third motor via a band mechanism each having at least one non-circular pulley. A third link with end effectors 792, 794 is restrained by a band drive each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The illustrated embodiment has a forearm that is longer than the upper arm. Alternatively, the forearm may be shorter. The band drives within each of the linkages are designed using the methodology described for FIGS. 5 and 6. The kinematic equations presented for FIGS. 5 and 6 can similarly be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of arm rotation. In order for one of the end effector assemblies to radially extend and retract along a linear path, the upper arm drive shaft associated with the active linkage needs to be rotated according to the inverse kinematics equations for FIGS. and the other two drive shafts must be held stationary. Referring also to FIG. 41, the arms of FIGS. 40A and 40B are shown as one linkage 784, 788, 794 is extended. Note that inactive linkages 786, 790, 792 may remain stationary while active linkages 784, 788, 794 extend. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move while the left linkage extends. Alternatively, the left and right linkages may be moved independently and radially simultaneously, for example as seen in FIG. 42 where the right linkage is independently slightly elongated compared to FIG. 41. Upper linkage elbow movement may be limited due to potential interference with the wafer on the lower end effector. This may limit the robot's reach, as shown in FIG. 41. This limitation may be alleviated by slightly elongating the lower linkage to provide additional clearance and achieve full reach, as shown in FIG. 42. The illustrated embodiment does not have a bridge. The wrist of the upper linkage may move over the wafer on the lower end effector.

43A and 43B, top and side views, respectively, of a robot 810 with an arm 812 are shown. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors 820, 822. The internal mechanism used to drive the individual links of the arm may be the same as in Figures 10-13. The common upper arm 814 is driven by one motor. Each of the two forearms 816, 818 is independently driven by one motor through a band drive with conventional pulleys. The third link with end effectors 820, 822 is restrained by a band drive each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drives within each of the linkages are designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. 44 and 45, the arms of FIGS. 43A and 43B are shown as the upper linkages 818, 822 are extended. Note that the inactive linkages 816, 820 rotate while the active linkages 818, 822 extend. For example, as the lower linkage extends, the upper linkage rotates, and as the upper linkage extends, the lower linkage rotates. 44 and 45 show that the wrist joints 824 of the upper linkages 818, 822 do not move directly over the wafer 826 carried by the lower linkages 816, 820 of the arms. The illustrated embodiment does not have a bridge. Compared to Figures 46 and 47, the end effector does not need to be shaped to avoid interference with the opposite elbow.

46A and 46B, top and side views, respectively, of a robot 840 with an arm 842 are shown. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors 850, 852. The integrated bicep link 844 can be a single piece, as shown in FIGS. 46A and 46B, or the bicep link can be two or more pieces, as shown in the example of FIGS. 47A and 47B. The internal mechanism used to drive the individual links of the arm may be the same as in FIGS. 15-19, e.g. The upper arm 844 is driven by one motor. Each of the two forearms 846, 848 is driven independently by one motor through a band drive with a conventional pulley. It has end effectors 850, 852. The third link is restrained by a band drive device each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive within each of the linkages is designed using the methodology described for Figures 1 and 2. Presented for Figures 1 and 2. The kinematics equations given may be similarly used for each of the two linkages of the dual arm. Because the arm rotates, all three drive shafts of the robot move the same amount in the direction of arm rotation. In order for one of the end effector assemblies to radially extend and retract along a straight path, the common upper arm 844 drive shaft and the drive shaft coupled to the forearm associated with the active linkage must must move in concert according to the inverse kinematics equations for Figures 1 and 2. At the same time, the drive shafts coupled to the other forearm must move in a coordinated manner according to the inverse kinematics equations for Figures 1 and 2. At the same time, the drive shafts coupled to the other forearm must be driven 48 and 49, the arms of FIGS. 46A and 46B are shown as the upper linkages 848, 852 extend. Here, the active linkage 848 , 852 extend, the inactive linkages 846, 850 rotate. For example, as the lower linkage extends, the upper linkage rotates, and as the upper linkage extends, the lower linkage rotates. FIGS. , indicating that the wrist joint 854 of the upper linkage does not move directly over the wafer 856 carried by the lower linkage of the arm. Do not move directly over the wafer carried by the linkage. Here, the inactive arm rotates less, allowing a higher rate of movement as the active arm extends or retracts without load.

50A and 50B, top and side views of a robot 870 having an arm 872 are shown. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors 880, 882. The integrated bicep link 874 can be a single piece, as shown in FIGS. 50A and 50B, or the bicep link can be two or more pieces, as shown in the example of FIGS. 47A and 47B. can be formed by parts of The internal mechanism used to drive the individual links of the arm may be the same as in FIGS. 15-19, eg, FIG. 18. The integrated upper arm 874 is driven by one motor. Each of the two forearms 876, 878 is independently driven by one motor through a band drive with conventional pulleys. The third links with end effectors are constrained by band drives each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drives within each of the linkages may be designed using the methodology described for FIGS. 1 and 2. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of arm rotation. In order for one of the end effector assemblies to radially extend and retract along a linear path, the common upper arm 874 drive shaft and the drive shaft coupled to the forearm associated with the active linkage are connected to the drive shaft of FIGS. It is necessary to move in a coordinated manner according to the inverse kinematics equation for. At the same time, the drive shaft coupled to the other forearm must rotate synchronously with the drive shaft of the common upper arm 874 in order for the inactive linkage to remain retracted. Referring also to FIG. 51, the arm of FIGS. 50A and 50B is shown with one linkage 878, 882 in an extended position. Here, the inactive linkages 876, 880 rotate while the active linkages 878, 882 extend. For example, as the lower linkage extends, the upper linkage rotates, and as the upper linkage extends, the lower linkage rotates. The illustrated embodiment uses shorter short bands, has short forearm links that can be more rigid, and the forearms are arranged in parallel to facilitate shallow chambers. Here, the short link may cause greater rotation of the inactive arm compared to FIGS. 46 and 47, which may be accommodated by a longer upper arm. A bridge 884 is provided, and the arms and end effectors may be designed such that the bridge 884 passes over the inactive end effector 880 during the extension movement without touching it. Here, the base of the end effector features an angled shape 886 as shown.

52A and 52B, top and side views, respectively, of a robot 900 with an arm 902 are shown. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors. The internal mechanism used to drive the individual links of the arm may be the same as in Figures 21-23. Each of the two upper arms 904, 906 is independently driven by one motor. The forearms 908, 910 are coupled to a third motor via a band mechanism each having at least one non-circular pulley. A third link with end effectors 912, 914 is restrained by a band drive each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms 904, 906 causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drives within each of the linkages are designed using the methodology described for FIGS. 5-6. The kinematic equations presented for FIGS. 5-6 may similarly be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of arm rotation. In order for one of the end effector assemblies to radially extend and retract along a linear path, the upper arm drive shaft associated with the active linkage must be rotated according to the inverse kinematics equations for FIGS. and the other two drive shafts must be held stationary. Referring also to FIG. 53, the arm of FIGS. 52A and 52B is shown with one linkage 906, 910, 914 in an extended position. Note that while the active linkages 906, 910, 914 extend with the bridge 916, the inactive linkages 904, 908, 912 remain stationary. That is, the left linkage does not need to move while the right linkage extends, and the right linkage does not need to move when the left linkage extends. However, the linkage may also be moved independently in the radial direction. The illustrated embodiment uses short bands, has shorter links that can be more rigid, and parallel forearms that facilitate shallow chambers. Alternatively, the forearm may be longer than the upper arm in a bridged configuration.

54-55, a coupled dual arm 930 having opposing end effectors 938, 940 is shown. Figures 54A and 54B show top and side views, respectively, of a robot with an arm. Both linkages are shown in their retracted positions, with the lateral offset of the end effector corresponding to the difference in interarticular length of the upper arm 932 and forearm 934, 936. The integrated bicep link 932 can be a single piece, as shown in FIG. 54, or the bicep link can be formed by two or more parts. As an example, a two-part design may use less material and be lighter, and the left and right parts may be the same component. The internal mechanism used to drive the individual links of the arm may be based on that shown with respect to FIGS. 18 and 19, or otherwise. The common upper arm 932 is driven by one motor. Each of the two forearms 934, 936 is independently driven by one motor through a band drive with conventional pulleys. The third link with end effectors 938, 940 is constrained by a band drive each having at least one non-circular pulley that counteracts the effects of the unequal lengths of the upper arm 932 and forearm 934, 936. The band drives within each of the linkages are designed using the methodology described with respect to FIG. 1 or otherwise. The kinematic equations presented for FIG. 1 can similarly be used for each of the two linkages of the dual arm. 55A-55C illustrate the arm of FIG. 54 with first linkages 934, 938 and second linkages 936, 940 extended from the retracted position. The lateral offset of the end effector corresponds to the difference in inter-articular length of the upper arm 932 and forearm 934, 936, and the wrist joints 942, 946 are aligned along a straight line offset by this difference with respect to the trajectory of the center of the wafer. Moving. Note that the inactive linkages rotate while the active linkages extend. For example, as the first linkage extends, the second linkage rotates, and as the second linkage extends, the first linkage rotates. Figure 55A shows the arm with both linkages in the retracted position. FIG. 55B shows the first linkages 934, 938 extended. FIG. 55C shows the second linkage 936, 940 extended. Because the forearm moves in the same plane and the end effector moves in the same plane, the illustrated arm has a low profile, allowing for a shallow vacuum chamber with a small volume. Because the retracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the containment radius of the arm may be large, and the arm has a chamber diameter dictated by the size of the slot valve. It becomes particularly suitable for applications using a large number of process modules. Because of its low profile, the arm can replace a frog-leg type arm with an opposing end effector. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearms may be longer, for example in this case the forearms are at different heights and overlap.

56-57, an independent dual arm 960 with opposing end effectors 970, 972 is shown. 56A and 56B show top and side views of a robot with arms. Both linkages are shown in their retracted positions. In FIG. 56, the upper arm 962 of the first linkage is positioned above the upper arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be positioned above the upper arm of the first linkage. The internal mechanism used to drive the individual links of the arm may be based on FIG. 23 or otherwise. Here, each of the two upper arms 962, 964 may be independently driven by one motor. Forearms 966, 968 are coupled to a third motor via a band mechanism each having at least one non-circular pulley. A third link with end effectors 970, 972 is restrained by a band drive each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The band drives within each of the linkages are designed using the methodology described for FIG. The kinematic equations presented for FIG. 5 can similarly be used for each of the two linkages of the dual arm. 57A-57C illustrate the arm of FIG. 56 with first linkage 962, 966, 970 and second linkage 964, 968, 972 extended from the retracted position. Here, the inactive linkages remain stationary while the active linkages elongate (although they are not required to do so). That is, the second linkage does not move while the first linkage extends, and the first linkage does not move when the second linkage extends. Because the forearm moves in the same plane and the end effector moves in the same plane, the arm has a low profile, allowing for a shallow vacuum chamber with a small volume. Because the retracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the retraction radius of the arm is large and the arm is suitable for applications with multiple process modules where the chamber diameter is determined by the size of the slot valve. be particularly suitable for Because of its low profile, the arm can replace a frog-leg type arm with an opposing end effector. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearms may be longer, for example in this case the forearms are at different heights and overlap.

Referring now to FIG. 58, a combined dual arm 990 with angularly offset end effectors 998, 1000 is shown. Figures 58A and 58B show top and side views of a robot with arms. Both linkages are shown in their retracted positions. The end effector lateral offset 1002, 1004 corresponds to the difference in inter-articular length of the upper arm 992 and forearm 994, 996. The integrated upper arm link 992 may be a single piece, as shown in FIG. 59, or may be formed by two or more parts. The internal mechanism used to drive the individual links of the arm may be based on FIGS. 18 and 19 or otherwise. Here, the common upper arm 992 may be driven by one motor. Each of the two forearms 994, 996 may be driven independently by one motor through a band drive with conventional pulleys. The third link with end effectors 998, 1000 is restrained by a band drive each having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. The band drives within each of the linkages are designed using the methodology described for FIG. 1 or otherwise. The kinematic equations presented for FIG. 1 can similarly be used for each of the two linkages of the dual arm. 59A-C, the arms of FIG. 58 are shown as the left side 994, 998 and right side 996, 1000 linkages are extended. The lateral offset 1002, 1004 of the end effector corresponds to the difference in length between the upper arm and forearm joints, and the wrist joint moves along a straight line offset by this difference with respect to the trajectory of the center of the wafer. Here, the inactive linkage rotates while the active linkage extends. For example, as the left linkage extends, the right linkage rotates, and as the right linkage extends, the left linkage rotates. Figure 59A shows the arm with both linkages in the retracted position. Figure 59B shows the left linkages 994, 998 extended. Figure 59C shows the right linkage 996, 1000 extended. Here, the inactive arm rotates while the active arm extends. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearms may be longer, for example in this case the forearms are at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any angle of separation may be provided.

Referring now to FIG. 60, an independent dual arm 1030 with angularly offset end effectors 1040, 1042 is shown. Here, FIGS. 60A and 60B show top and side views of a robot with an arm. Both linkages are shown in their retracted positions. In FIG. 60, right upper arm 1034 is positioned below left upper arm 1032. Alternatively, the left upper part may be placed below the right upper arm. The internal mechanism used to drive the individual links of the arm may be based on FIG. 23. Each of the two upper arms 1032, 1034 may be independently driven by one motor. The forearms are coupled to a third motor via a band mechanism each having at least one non-circular pulley. A third link with end effectors 1040, 1042 is constrained by a band drive each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms 1032, 1034 causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The band drives within each of the linkages are designed using the methodology described for FIG. 5, or otherwise. The kinematic equations presented for FIG. 5 can similarly be used for each of the two linkages of the dual arm. 61A-61C illustrate the arm of FIG. 60 as the left linkages 1032, 1036, 1040 and then the right linkages 1034, 1038, 1042 are extended. Here, the inactive linkages remain stationary while the active linkages elongate (although they are not required to do so). That is, the left linkage does not move while the right linkage extends, and the right linkage does not move while the left linkage extends. Here, the inactive linkages remain stationary while the active linkages extend. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearms may be longer, for example in this case the forearms are at different heights and overlap. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any angle of separation may be provided.

As an example with respect to FIG. 62, or as an alternative, the third link and end effector 1060, 1062, which may each be referred to as a third link assembly, has a mass The centers 1064, 1066 may be designed to be on or near the linear trajectory of the wrist joints 1068, 1070, respectively. This reduces the moment of inertia acting at the center of mass of the third link assembly and the reaction force at the wrist joint, thus reducing the load on the band mechanism restraining the third link assembly. wherein the third link assembly is further designed such that its center of mass is on one side of the wrist joint trajectory when the payload is present and on the other side of the trajectory when the payload is not present. Good too. Alternatively, since best straight-line tracking performance is typically required with a payload on board, the third link assembly may have its center of mass centered when a payload is present, as shown in FIG. It may be designed to lie substantially on the wrist joint trajectory. In FIG. 62, 1L is the linear trajectory of the wrist joint center of the left linkage, 2L is the center of the wrist joint of the left linkage 1070, 3L is the center of mass 1066 of the third link assembly of the left linkage, and 4L is the force acting on the third link assembly of the left linkage as the left linkage accelerates at the beginning of the extension motion (or decelerates at the end of the contraction motion), and 5L is the force acting on the third link assembly of the left linkage as the left linkage accelerates at the beginning of the extension motion (or decelerates at the end of the contraction motion); is the inertial force acting at the center of mass of the third link assembly of the left-hand linkage as it accelerates at the beginning of (or decelerates at the end of the retraction movement). Similarly, 1R is the linear trajectory of the center of the wrist joint of the right linkage, 2R is the center of the wrist joint of the right linkage 1068, 3R is the center of mass 1064 of the third link assembly of the right linkage, and 4R is the center of mass of the third link assembly of the right linkage. , 5R is the force acting on the third link assembly of the right-hand linkage as the right-hand linkage decelerates at the end of the extension movement (or accelerates at the beginning of the contraction movement), and 5R It is the inertial force that acts at the center of mass of the third link assembly of the right-hand linkage as it decelerates at the end (or as it accelerates at the beginning of the retraction movement). In the illustrated embodiment, a dual wafer end effector is provided. In alternative aspects, any suitable end effector and arm or link geometry may be provided.

In alternative aspects, the upper arm in any of the aspects of this embodiment may be driven by a motor, either directly or through any type of coupling or transmission mechanism. Any transmission ratio may be used. Alternatively, the band drive for actuating the second link and constraining the third link may include a belt drive, a cable drive, circular and non-circular gears, linkage-based mechanisms, or any combination of the above. can be replaced by any other mechanism of equivalent functionality. Alternatively, for example, in the dual-arm and quad-arm aspects of the present embodiments, the third link of each linkage could be similar to the single-arm concept of FIG. The end effector can be constrained to remain radial through a conventional two-stage band mechanism synchronized to pulleys driven by two motors. Alternatively, the two-stage band mechanism may be replaced by any other suitable mechanism, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the above. Alternatively, the upper arms in the dual-arm and quad-arm aspects of this embodiment may not be coaxially arranged. The upper arm can have a separate shoulder joint. The two linkages of the dual arm and quad arm do not need to have the same length of the upper arm and the same length of the forearm. The length of the upper arm of one linkage may be different from the length of the upper arm of the other linkage, and the length of the forearm of one linkage may be different than the length of the forearm of the other linkage. The forearm to upper arm ratio can also be different for the two linkages. In the dual arm and quad arm aspects of this embodiment with different heights of the links of the left and right side linkages, the left and right side linkages can be interchanged. The two linkages of the dual arm and quad arm do not need to extend along the same direction. The arms can be configured such that each linkage extends in a different direction. The two linkages in any of the aspects of this embodiment are from more or less than three links (first link = upper arm, second link = forearm, third link = link with end effector). It's okay to be. In the dual-arm and quad-arm aspects of this embodiment, each linkage may have a different number of links. In the single arm aspect of this embodiment, the third link can carry multiple end effectors. Any suitable number of end effectors and/or material retainers may be carried by the third link. Similarly, in the dual-arm aspect of this embodiment, each linkage can carry any suitable number of end effectors. In either case, the end effectors can be positioned in the same plane, stacked on top of each other, in a combination of the two, or in any other suitable manner. . Furthermore, regarding dual arm configurations, for example, the application has a filing date of November 6, 2012, entitled "Robot System with Independent Arms", serial number 13/670, Each arm may be independently movable, e.g. independently movable in rotation, extension and/or z (vertical), as described with respect to pending US patent application No. 004 It may be. This application is incorporated herein by reference in its entirety. Accordingly, all such modifications, combinations and variations are included.

According to one aspect of an exemplary embodiment, a substrate transport apparatus is adapted to transport a substrate. The substrate transport apparatus has a movable arm assembly coupled to a drive on a central rotation axis. A substrate support is coupled to the arm assembly on the wrist rotation axis. The arm assembly rotates about a central axis of rotation during extension and retraction. The wrist rotation axis moves during extension and contraction along a wrist path that is parallel to and offset from a radial path to the central rotation axis. The substrate support moves parallel to the radial path during expansion and contraction without rotation.

According to another aspect of the exemplary embodiment, a substrate transport apparatus is adapted to transport first and second substrates. The substrate transport apparatus has first and second independently movable arm assemblies coupled to a drive on a common axis of rotation. First and second substrate supports are coupled to the first and second arm assemblies on first and second wrist rotation axes, respectively. The first and second arm assemblies rotate about a common axis of rotation during extension and retraction. The first and second wrist rotation axes move during extension and contraction along first and second wrist paths that are parallel to and offset from a radial path relative to the common rotation axis. The first and second substrate supports move parallel to the radial path without rotation during extension and contraction.

According to another aspect of the example embodiment, a substrate transport apparatus is adapted to transport a substrate. The substrate transport device includes a drive part and an upper arm rotatably coupled to the drive part, and the upper arm is rotatable around a central axis. An elbow pulley is fixed to the upper arm. The forearm is rotatably coupled to the upper arm. The forearm is rotatable about an elbow axis that is offset from the central axis by a humeral link length. An end effector is rotatably coupled to the forearm. The end effector is rotatable about a wrist axis that is offset from the elbow axis by a forearm link length. The end effector supports the substrate. The wrist pulley is fixed to the end effector. The wrist pulley is coupled to the elbow pulley using a band. The forearm link length is different from the upper arm link length. The end effector is constrained to the upper arm by an elbow pulley, a wrist pulley, and a band such that the substrate moves along a linear radial path relative to the central axis.

According to another aspect of the example embodiment, a substrate transport apparatus is adapted to transport a substrate. The substrate transfer device has a drive section having first and second rotational drive devices. The upper arm is rotatably coupled to the first rotational drive on a central rotation axis. The forearm is rotatably coupled to the upper arm. The forearm is rotatable about an elbow rotation axis of the upper arm, and the elbow rotation axis is offset from the central rotation axis by the length of the upper arm link. The forearm is further coupled to the second rotational drive using the forearm coupling device and driven about the elbow rotation axis by the second rotational drive. The substrate support supports the substrate. The substrate support is rotatably coupled to the forearm and is rotatable about the wrist rotation axis of the forearm. The wrist rotation axis is offset from the elbow rotation axis by the forearm link length. The substrate support is further coupled to the upper arm using a substrate support coupling device and driven about the wrist rotation axis by relative movement between the forearm and the upper arm about the elbow rotation axis. The forearm link length is different from the upper arm link length. The substrate support is constrained by a substrate support coupling device such that the substrate moves along a linear path relative to the central axis of rotation.

According to another aspect of the exemplary embodiment, the linear path is along a direction that intersects the central axis of rotation.

According to another aspect of the exemplary embodiment, the linear path is along a direction that is perpendicular to and offset from the central axis of rotation.

According to another aspect of the exemplary embodiment, the wrist rotation axis moves along a wrist path that is parallel to the linear path.

According to another aspect of the exemplary embodiment, a substrate support coupling device has a band drive device having one or more non-circular pulleys.

According to another aspect of the exemplary embodiment, a forearm coupling device has a band drive having one or more non-circular pulleys.

According to another aspect of the exemplary embodiment, the transport device includes a drive device and a first arm connected to the drive device, the first arm being connected in series with the drive device. a first arm having a first link, a second link and an end effector, the first link and the second link having different effective lengths; and a first arm that is actuated when the first arm is extended or retracted. and a system for limiting rotation of the end effector relative to the second link to provide substantially only linear movement of the end effector relative to the device.

According to another aspect of the example embodiment, the effective length of the first link is shorter than the effective length of the second link.

According to another aspect of the example embodiment, the effective length of the first link is greater than the effective length of the second link.

According to another aspect of the exemplary embodiment, the end effector has a distance between the wrist joint and the centerline of the base support with the second link that is approximately equal to the difference in effective length of the first and second links. has a lateral offset of

According to another aspect of the exemplary embodiment, the system for limiting rotation causes the wrist joint to be laterally offset relative to the central axis of rotation of the drive device when the first arm is extended or retracted. The end effector is configured to translate in the maintained state.

According to another aspect of the exemplary embodiment, a system for limiting rotation of an end effector includes substantially only a radial direction of the end effector relative to the drive device when the first arm is extended or retracted. Provide exercise.

According to another aspect of the exemplary embodiment, a system for limiting rotation of an end effector includes a system for limiting rotation of an end effector such that the end effector is oriented radially relative to the drive device regardless of the positions of the first and second links. is configured to constrain the orientation of.

According to another aspect of the exemplary embodiment, the end effector is configured to support at least two spaced apart substrates thereon, the wrist joint of the end effector with the second link; A lateral offset is provided between the center of the straight linear motion path of the end effector when the first arm is extended or retracted, the lateral offset being the center of the linear motion path of the end effector when the first arm is extended or retracted; Provided for substantially translation-only movement of the end effector with the joint maintained at a lateral offset relative to the central axis of rotation of the drive device.

According to another aspect of an exemplary embodiment, a system for limiting rotation has a band drive having a pulley and a band.

According to another aspect of the exemplary embodiment, the pulley has at least one non-circular pulley.

According to another aspect of the exemplary embodiment, the pulley has at least one pulley fixedly connected to the second link or end effector.

According to another aspect of the exemplary embodiment, an end effector has a substrate support and a leg connecting the substrate support to a wrist joint of the end effector with a second link, the leg connecting the wrist joint to the wrist joint. a first portion connected to the substrate support, a second portion connected to the substrate support, the first and second portions being connected to each other at an angle of about 90 degrees to about 120 degrees.

According to another aspect of the exemplary embodiment, an end effector has two substrate supports and a leg frame connecting the substrate support to a wrist joint of the end effector with a second link, the leg frame It is substantially U-shaped having a base and two legs, each leg being connected to a separate one of the substrate supports, and a wrist joint that engages the end effector at a location offset from the center of the base. Connect to link 2.

According to another aspect of the exemplary embodiment, rotating a first link of the arm by a drive device and rotating a second link of the arm when the first link is rotated, with the proviso that: the second link is rotated on the first link; and rotating the end effector on the second link, the first and second links having different effective lengths; Rotation of the end effector on the second link is constrained and rotational such that when the arm is extended or retracted, the end effector is restricted to substantially only linear movement relative to the drive. A method is provided, including.

According to another aspect of the exemplary embodiment, the movement is radial movement relative to the central axis of the drive device.

According to another aspect of the exemplary embodiment, the end effector has a distance between the wrist joint and the centerline of the base support with the second link that is approximately equal to the difference in effective length of the first and second links. has a lateral offset of

According to another aspect of the exemplary embodiment, rotating the end effector on the second link causes the wrist joint with the second link to rotate when the first arm is extended or retracted. produces only translational movement of the end effector while being maintained at a lateral offset relative to the central axis of rotation of the end effector.

According to another aspect of the exemplary embodiment, rotating the end effector provides substantially only radial movement of the end effector relative to the drive device when the first arm is extended or retracted. .

According to another aspect of the exemplary embodiment, rotating the end effector constrains the orientation of the end effector such that the end effector is radially oriented relative to the drive device regardless of the positions of the first and second links. do.

According to another aspect of the exemplary embodiment, a drive device and an arm connected to the drive device, the arm having a first link connected to the drive device at a first joint, a first link connected to the drive device at a second joint, and a first link connected to the drive device at a first joint; a second link connected to the first link at the joint, and an end effector connected to the second link at the third joint, the first link being connected to the second link at the third joint; a first length between the first and second joints that is different from a second length of the second link, and the movement of the end effector at the third joint is driven during extension and retraction of the arm; A transport device is provided having an arm constrained to follow in a substantially straight radial line relative to a center of rotation of the device.

According to an example embodiment, the transport device includes a drive device and a first arm connected to the drive device, the first arm having a first link connected in series with the drive device; a first arm having a second link and an end effector, the first link and the second link having different effective lengths, and an end effector for the drive when the first arm is extended or retracted; and a system for limiting rotation of the end effector relative to the second link to provide substantially only linear movement of the end effector.

The effective length of the first link may be shorter than the effective length of the second link. The effective length of the first link may be longer than the effective length of the second link. The end effector may have a lateral offset between the wrist joint with the second link and a centerline of the substrate support that is approximately equal to the difference in effective length of the first and second links. The system for limiting rotation translates the end effector when the first arm is extended or retracted, with the wrist joint maintained at a lateral offset with respect to the central axis of rotation of the drive device. It may be configured as follows. The system for limiting rotation of the end effector may provide substantially only radial movement of the end effector relative to the drive when the first arm is extended or retracted. The system for limiting rotation of the end effector may be configured to constrain the orientation of the end effector such that the end effector is radially oriented with respect to the drive regardless of the positions of the first and second links. . The end effector may be configured to support at least two spaced apart substrates thereon, the wrist joint of the end effector with the second link and the first arm being extended or retracted. A lateral offset is provided between the center of the straight linear motion path of the end effector when the first arm is extended or retracted; provided for substantially translation-only movement of the end effector while maintained at a lateral offset. A system for limiting rotation may include a band drive having a pulley and a band. The pulleys may include at least one non-circular pulley. The pulleys may have at least one pulley fixedly connected to the second link or end effector. The end effector may have a substrate support and a leg connecting the substrate support to a wrist joint of the end effector with a second link, the leg connecting the first portion connected to the wrist joint, the substrate a second portion connected to the support, and the first and second portions are connected to each other at an angle of about 90 degrees to about 120 degrees. The end effector may have two substrate supports and a leg frame connecting the substrate support to a wrist joint of the end effector with a second link, the leg frame having a base and two legs. is substantially U-shaped, with each leg connected to a separate one of the substrate supports, and a wrist joint connecting the end effector to the second link at a location offset from the center of the base.

An example of one type of method is to rotate a first link of the arm by means of a drive and rotate a second link of the arm when the first link is rotated, provided that the second link rotating the end effector on the first link, and rotating the end effector on the second link, where the first and second links have different effective lengths, and the second link Rotation of the end effector on the arm may include constraining and rotating such that the end effector is restricted to substantially only linear movement relative to the drive when the arm is extended or retracted. good.

The movement may be a radial movement relative to the central axis of the drive. The end effector may have a lateral offset between the wrist joint with the second link and a centerline of the substrate support that is approximately equal to the difference in effective length of the first and second links. Rotating the end effector on the second link maintains the wrist joint with the second link in a lateral offset relative to the central axis of rotation of the drive when the first arm is extended or retracted. In this state, only a translational movement of the end effector may be caused. The end effector may provide substantially only radial movement of the end effector relative to the drive when the first arm is extended or retracted. Rotating the end effector may constrain the orientation of the end effector such that the end effector is oriented radially relative to the drive regardless of the positions of the first and second links.

One type of example embodiment includes a drive device and an arm connected to the drive device, the arm having a first link connected to the drive device at a first joint, a first link connected to the drive device at a second joint, and an arm connected to the drive device. a second link connected to a link between the second and third joints, and an end effector connected to the second link at a third joint, the first link being connected to a second link between the second and third joints. a first length between the first and second joints that is different from a second length of the link, and movement of the end effector at the third joint is controlled by rotation of the drive device during extension and retraction of the arm; and an arm constrained to follow in a substantially straight radial line relative to the center.

Referring now to FIG. 63, a graphical representation 1100 of an exemplary pulley is shown. An exemplary pulley profile may be for arms with unequal link lengths, as described. As an example, graph 1100 may show a contour for a wrist pulley where the elbow pulley is circular. Here, the following design example was used for the illustration: Re/l2=0.2. Here, Re is the radius of the elbow pulley and l2 is the inter-articular length of the forearm. Alternatively, any suitable ratio may be provided. For clarity purposes, the graph shows an extreme design case compared to a pulley for an equilink arm. The outermost contour 1110 is for l2/l1=2. Here l2 is the inter-articular length of the forearm and l1 is the inter-articular length of the upper arm, for example representing a longer forearm in this case. The intermediate contour 1112 is for l2/l1=1, eg, with equal link lengths. The innermost contour 1114 is for l2/l1=0.5, for example, in this case representing a shorter forearm. In the illustrated embodiment, a polar coordinate system 1120 is used. Here, the radial distance is normalized to the radius of the elbow pulley, for example expressed as a multiple of the radius of the elbow pulley. In other words, Rw/Re is shown. Here, Rw represents the polar coordinates of the wrist pulley, and Re represents the elbow pulley. Angular coordinates are in degrees, where 0 has an orientation along the direction 1122 of the end effector, eg, the end effector points to the right relative to the figure.

64 and 65, two additional configurations of arms 1140 and 1160 with unequal link lengths are shown. Arm 1140 is shown having a forearm 1144 that is longer than upper arm 1142. Here, the single arm configuration may utilize features as disclosed with respect to FIGS. 1-4 and 5-8, or otherwise. In the illustrated embodiment, two end effectors 1146, 1148 supporting respective substrates 1150, 1152 are rigidly connected to each other and oriented in opposite directions. The substrate moves in a radial path that is coincident with the center 1156 of the arm 1140 and offset from the wrist (1154) as shown. Similarly, arm 1160 is shown having a forearm 1164 that is shorter than upper arm 1162. Here, the single arm configuration may utilize features as disclosed with respect to FIGS. 1-4 and 5-8, or otherwise. In the illustrated embodiment, two end effectors 1166, 1168 supporting respective substrates 1170, 1172 are rigidly connected to each other and oriented in opposite directions. The substrate moves in a radial path that is coincident with the center 1176 of the arm 1160 and offset from the wrist (1174) as shown. Here, features of the disclosed embodiments may be shared with any of the other disclosed embodiments.

Referring to FIG. 66A, a schematic top plan view of an example substrate transfer robot 1200 is shown. Robot 1200 may be vacuum-capable, or any suitable robot, having a drive portion 1210 and an arm portion 1212 coupled to drive portion 1210, as described in more detail below. In the embodiments shown throughout, the upper arm link length and forearm link length are different and may be driven by circular or non-circular pulleys, for example, as described above. In alternative embodiments, arms with equal link lengths or arms with unequal link lengths and circular pulleys or other suitable drive mechanisms may be used, e.g., using any suitable configuration disclosed. , may be provided. 66A and 66B show a top and side view, respectively, of a robot 1200 with an arm 1212. Drive unit 1210 may provide four coaxial drive shafts such that first portion 1214 and second portion 1216 of arm 1212 may be independently driven. A suitable drive having four coaxial shafts is shown as an example in FIG. 70B. Here, arm 1212 features two independent linkages, an upper portion 1214 and a lower portion 1216. Upper linkage 1214 may be driven by the two innermost drive shafts of drive unit 1210 and lower linkage 1216 may be driven by the two outermost drive shafts of drive unit 1210. In Figures 67A and 68A, the linkages are shown in their retracted positions. Each of the two linkages 1214, 1216 consists of a first link (upper arm 1218, 1220), a second link (forearm 1222, 1224) and a third link (end effector 1226, 1228). The inter-articular length of the second link is shown to be smaller than the inter-articular length of the first link. The lateral offset 1230, 1232 of the third link corresponds to the difference in interarticular length of the forearm and upper arm as well as an additional offset, which adds up to an offset 1234 between the two arms. The offset 1234 may correspond to the nominal center distance between substrates in a two-station process module, and the lateral offsets 1230, 1232 may be half of the total center distance 1234. The offsets 1230, 1232 in combination with the shorter forearms create a gap G such that the arms 1214, 1216 can be used for anything within the gap G, such as between slit valves in quad applications. can be expanded or contracted without physically interfering with the chamber material. Alternatively, any suitable offset(s) may be provided. Here, the end effectors 1228, 1226 may extend and retract nominally parallel to each other without rotation. The end effectors 1228, 1226 are also independently positionable so that the substrates above them may be placed or picked up independently. 68A-68B, a top view of an example substrate transfer robot 1200 is shown. FIG. 68A shows robot 1200 retracted, whereas FIG. 68B shows robot 1200 extended. The illustrated robot 1200 has arms 1214, 1216 that are independently positionable. In alternative embodiments, arms 1214, 1216 may be driven by two coaxial shafts and may be dependent on each other. An example of a drive configuration is described with respect to FIG. 80B, in which two coaxial sets of drive shafts drive two sets of arms. Here, one of the coaxial drive shafts may be provided to drive arms 1214, 1216, by way of example. Referring also to FIGS. 67A-67C, an alternative robot configuration 1200' is shown. Robot 1200' has arms 1214' and 1216' and may have features similar to those of robot 1200. Here, the arms of robot 1200' may be independently extended and retracted. However, the arms rotate together. Instead of a drive with four coaxial axes, the robot 1200' utilizes a drive with three coaxial axes. A suitable drive and pulley mechanism is shown with respect to FIGS. 23 and 24 or 33 and 34. In alternative aspects, any suitable drive and pulley mechanism may be provided, for example, as disclosed, in which the upper arms are constrained together.

Referring to FIG. 69A, a schematic top plan view of an example substrate transfer robot 1300 is shown. Robot 1300 may be vacuum-capable, or any suitable robot, having a drive portion 1310 and an arm portion 1312 coupled to drive portion 1310, as described in more detail below. In the embodiments shown throughout, the upper arm link length and forearm link length are different and may be driven by circular or non-circular pulleys. In alternative embodiments, arms with equal link lengths or arms with unequal link lengths and circular pulleys or other suitable drive mechanisms may be provided. 69A and 69B show top and side views, respectively, of a robot 1300 with an arm 1312. Drive unit 1310 may provide four coaxial drive shafts such that first portion 1314 and second portion 1316 of arm 1312 may be independently driven. Here, arm 1312 features two independent linkages, an upper portion 1314 and a lower portion 1316. Upper linkage 1314 may be driven by the two innermost drive shafts of drive unit 1310 and lower linkage 1316 may be driven by the two outermost drive shafts of drive unit 1310. In Figure 69A, the linkages are shown in their retracted position. Each of the two linkages 1314, 1316 consists of a first link (upper arm 1318, 1320), a second link (forearm 1322, 1324) and a third link (end effector 1326, 1328). The inter-articular length of the second link is smaller than the inter-articular length of the first link. The lateral offset 1330, 1332 of the third link corresponds to the difference in interarticular length of the forearm and upper arm. The third link is shaped to provide space for the two innermost drive shafts 1334.

Referring also to FIGS. 70A and 70B, one example of the internal mechanism used to drive the individual links of each linkage is shown. The mechanism will be described for the upper linkage. An equivalent mechanism may be used within the lower linkage. The upper arm 1318 of the upper linkage 1314 may be driven by one motor 1350. The forearm 1322 of the upper linkage 1314 may be driven by another motor 1352 through a band drive 1354 having a conventional pulley. The third link with end effector 1326 is brought into position in the first two links by a band drive 1356 having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. It may be constrained to be oriented in the radial direction regardless. The design of the band drive may follow that shown in FIGS. 1-4. In order for the upper linkage to rotate, both drive shafts associated with the linkage must move the same amount in the direction of rotation of the linkage. In order for the end effector to radially extend and retract along a straight path, the two drive shafts have inverse kinematic equations, e.g., as presented in equations (1.8) to (1.16). We need to act in a coordinated manner. In alternative embodiments, any suitable arm mechanism may be used, eg, as disclosed with respect to FIGS. 66-68 with offset end effectors, or otherwise.

Referring also to FIGS. 71A and 71B, another example of the internal mechanism used to drive the individual links of each linkage is shown. Again, the mechanism will be described for the upper linkage 1314'. An equivalent mechanism may be used within the lower linkage. Here, upper arm 1318 of upper linkage 1314' is driven by one motor 1350. The forearm 1322 of the upper linkage 1314' is coupled to another motor 1352 via a band mechanism 1354' having at least one non-circular pulley. Band drive 1354' is designed such that rotation of the upper arm causes the wrist joint to extend and retract along a straight line parallel to the desired radial path of the end effector. The third link with end effector 1326 is constrained by a band drive 1356' having at least one non-circular pulley such that the end effector is oriented radially regardless of the position of the first two links. The band drive may be designed according to FIGS. 5-8. Because the upper linkage 1314' rotates, both drive shafts associated with the linkage may move the same amount in the direction of rotation of the linkage. In order for the end effector 1326 to radially extend and retract along a straight path, the drive shaft coupled to the upper arm of the upper linkage is held stationary while the other motor associated with the upper linkage is held stationary. , it is necessary to move according to the inverse kinematics equations presented in equations (2.8) to (2.15). In alternative aspects, any suitable drive mechanism may be provided.

72A-72C and 73A-73C illustrate independent operation of the two linkages of the robot of FIG. 69. Specifically, FIGS. 72A-72C and 73A-73C illustrate independent rotational and extensional movement of two linkages 1314, 1316, respectively. 72A-72C illustrate rotational movement of the upper linkage 1314 of the robot 1300 of FIG. 69. Figure 72A shows a top view of the robot with both linkages in their retracted positions. FIG. 72B shows a top view of the robot with the upper linkage 1314 rotated 90 degrees clockwise. FIG. 72C shows a top view of the robot with the upper linkage 1314 rotated 180 degrees. 73A-73C illustrate the extension motion of the robot 1300 of FIG. 69. Figure 73A shows a top view of the robot with both linkages in their retracted positions. FIG. 73B shows a top view of the robot with the upper linkage 1314 partially extended. FIG. 73C shows a top view of the robot with the upper linkage 1314 in the extended position.

An alternative example aspect of the disclosed embodiment is shown in FIGS. 74A and 74B. The figure shows a robot 1450 having a drive 1310 and an arm 1452. Here, the two linkages 1454, 1456 of arm 1452 may be arranged according to FIGS. 74A and 74B showing top and side views of robot 1450. Here, the robot's drive unit 1310 provides four coaxial drive shafts. Arm 1452 features two independent linkages, an upper portion 1454 and a lower portion 1456. The upper linkage 1454 may be driven by the two innermost drive shafts 1334 and the lower linkage may be driven by the two outermost drive shafts of the drive 1310. In Figure 74A, the linkages are shown in their retracted position. Each of the two linkages 1454, 1456 may consist of a first link (upper arm) 1458, 1460, a second link (forearm) 1462, 1464, and a third link (end effector) 1466, 1468. The inter-articular length of the second link may be smaller than the inter-articular length of the first link. The lateral offset 1470 of the third link corresponds to the difference in length between the forearm and upper arm joints. The third link is shaped to provide space for the two innermost drive shafts 1334.

Figures 75A and 75B show an example of the internal mechanism used to drive the individual links of each linkage. The mechanism will be described for the upper linkage 1454. A comparable mechanism may be used within the lower linkage 1456. Upper arm 1458 of upper linkage 1454 may be driven by one motor 1350. The forearm 1462 of the upper linkage 1454 may be driven by another motor 1352 through a band drive 1472 with a conventional pulley. The third link with an end effector 1466 is moved into the position of the first two links by a band drive 1474 having at least one non-circular pulley that counteracts the effects of unequal lengths of the upper arm and forearm. It may be constrained to be oriented in the radial direction regardless. The design of the band drive may follow FIGS. 1-4. In order for the upper linkage 1454 to rotate, both drive shafts associated with the linkage must move the same amount in the direction of rotation of the linkage. In order for the end effector to radially extend and retract along a straight path, the two drive shafts move in concert according to the inverse kinematics equations presented in equations (1.8) to (1.16). There is a need.

Figures 76A and 76B show another example of the internal mechanism used to drive the individual links of each linkage. Here, the mechanism will be described for the upper linkage 1454. A comparable mechanism may be used within the lower linkage 1456. The upper arm 1458 of the upper linkage may be driven by one motor 1350. The forearm 1462 of the upper linkage 1454 may be coupled to another motor 1352 via a band mechanism 1472' having at least one non-circular pulley. The band drive is designed such that rotation of the upper arm 1458 causes the wrist joint to extend and retract along a straight line parallel to the desired radial path of the end effector 1466. The third link with end effector 1466 is constrained by a band drive having at least one non-circular pulley such that the end effector is oriented radially regardless of the position of the first two links. The band drive may be designed according to FIGS. 5-8. Because the upper linkage 1454 rotates, both drive shafts associated with the linkage may move the same amount in the direction of rotation of the linkage. In order for the end effector 1466 to radially extend and retract along a straight path, a drive shaft coupled to the upper arm of the upper linkage is held stationary while the other motor associated with the upper linkage is held stationary. , it is necessary to move according to the inverse kinematics equations presented in equations (2.8) to (2.15).

Figures 77A-C and 78A-C illustrate the independent operation of the two linkages 1454, 1456 of the robot of Figures 74A and 74B. Specifically, FIGS. 77A-C and 78A-C illustrate independent rotational and extensional movement of the two linkages 1454, 1456. Figures 77A-C show the rotational movement of the upper linkage of the robot. Figure 77A shows a top view of the robot with both linkages in their retracted positions. FIG. 77B shows a top view of the robot with the upper linkage 1454 rotated 90 degrees clockwise. FIG. 77C shows a top view of the robot with the upper linkage 1454 rotated 180 degrees. Figures 78A-C illustrate the extension motion of the robot of Figures 74A and 74B. Figure 78A shows a top view of the robot with both linkages in their retracted positions. FIG. 78B shows a top view of the robot with the upper linkage partially extended. FIG. 78C shows a top view of the robot with the upper linkage 1454 in an extended position (not fully extended).

Alternative embodiments of the dual-arm linkage mechanism described above may be provided as well. For example, the first link may be driven by a motor, either directly or through any type of coupling or transmission mechanism. Any transmission ratio can be used. As a further example, the band drive actuating the second link may be any device with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the above. It may also be replaced by other mechanisms. Similarly, the band drive binding the third link may be replaced by any other suitable mechanism, such as a belt drive, a cable drive, a non-circular gear, a linkage-based mechanism, or any combination of the above. may be done. Here, the end effector need not be radially oriented. The end effector can be positioned with any suitable offset and oriented in any suitable direction relative to the third link. Similarly, the third link may carry multiple end effectors. Any suitable number of end effectors and/or material retainers may be carried by the third link. As a further example, any order of vertical placement of individual links and end effectors may be used. For example, the end effector of the upper linkage may be positioned above the upper linkage, as opposed to being sandwiched between the two linkages.

79A and 79B, top and side views of a robot 1550 having an arm 1552 and drive 1310 are shown. Drive unit 1310 provides four coaxial drive shafts. The arm features two independent pairs of linkages, an upper linkage pair 1554 and a lower linkage pair 1556. The upper linkage pair 1554 is driven by the two innermost drive shafts 1334 and the lower linkage pair is driven by the two outermost drive shafts. In Figure 79A, the linkages are shown in their retracted position. Each of the two linkage pairs 1554, 1556 consists of two linkages, a left linkage 1558, 1560 and a right linkage 1562, 1564. Each of the linkages includes a first link (upper arm), a second link (forearm) and a third link (end effector). The inter-articular length of the second link is smaller than the inter-articular length of the first link. The difference in the inter-articular length of the second link and the first link is selected such that the second link passes the drive shaft of the drive unit without touching it.

Figures 80A and 80B show an example of the internal mechanism used to drive the individual links of each linkage. The mechanism will be described for upper linkage pair 1554. A comparable mechanism may be used within the lower linkage pair 1556. For clarity of the side view, the forearms (and end effectors) of the upper linkage pair are shown at different heights (although they may be placed in the same horizontal plane). Similarly, the forearms of the lower linkage pair are shown at different heights in side view. The upper arm 1570 of the left upper linkage 1558 is driven by a first drive shaft 1572 and the upper arm 1574 of the right upper linkage 1562 is driven by a second drive shaft 1576. The forearm 1578 of the left upper linkage 1558 is driven by a second drive shaft 1576 through a band drive 1580 having at least one non-circular pulley. Similarly, the forearm 1582 of the right upper linkage 1562 is driven by the first drive shaft 1572 through a band drive 1584 having at least one non-circular pulley. For example, in an alternative embodiment where equal link lengths are provided, circular pulleys may be used. The two forearm band drives are designed such that when the first and second drive shafts 1572, 1576 rotate equally in opposite directions, the wrist joints of the left and right linkages move along linear paths parallel to each other. be done. The third link/end effector 1586 of the left upper linkage 1558 is driven by a band drive 1588 having at least one non-circular pulley that counteracts the effects of the unequal lengths of the upper arm 1570 and forearm 1578 of the left upper linkage 1558. , the end effector 1586 is constrained to point radially regardless of the position of the first two links 1570, 1578 of the left upper linkage 1558. The design of the band drive may follow FIGS. 1-4. Similarly, the third link/end effector 1590 of the right upper linkage 1562 is driven by a band drive 1592 having at least one non-circular pulley that counteracts the effects of the unequal lengths of the upper arm and forearm of the right upper linkage. , the end effector may be constrained to point radially regardless of the position of the first two links of the right upper linkage. For example, in an alternative embodiment where equal link lengths are provided, circular pulleys may be used. Again, this band drive may be designed according to FIGS. 1-4. In order to rotate the upper linkage pair, the first and second drive shafts may rotate synchronously with a desired direction of rotation of the upper linkage pair. The two drive shafts may rotate synchronously in opposite directions so that the end effectors of the upper linkage pair extend and retract along a linear path.

Figures 81A-C and 82A-C illustrate the independent operation of the two linkage pairs of the robot of Figures 79A and 79B. Specifically, Figures 81A-C and 82A-C illustrate independent rotational and extensional movement of two linkage pairs. 81A-C illustrate the rotational movement of the upper linkage pair 1554 of the robot. FIG. 81A shows a top view of the robot with both linkage pairs in their retracted positions. FIG. 81B shows a top view of the robot with the upper linkage pair 1554 rotated 45 degrees clockwise. FIG. 81C shows a top view of the robot with the upper linkage pair rotated by 180 degrees. Figures 82A-C show the robot's extension motion. Figure 82A shows a top view of the robot with both linkage pairs in their retracted positions. FIG. 82B shows a top view of the robot with the upper linkage pair partially extended. The elongation shown in FIG. 82A roughly corresponds to the maximum elongation of conventional solutions with tightly coupled parallel end effectors. As shown in FIG. 82C, this embodiment allows the linkage, in this particular example, the upper linkage pair, to extend well beyond this point, thus providing a longer reach from the same storage volume. I will provide a.

Alternatively, the linkage can be arranged according to FIGS. 83A and 83B, which show top and side views of robot 1650. Here, the robot 1650 may have features as described with respect to FIGS. 79A and 79B having an upper arm pair 1554 and a lower arm pair 1556'. However, in this embodiment, the right upper arm of the lower arm pair 1556' is disposed below the left upper arm of the lower arm pair.

In alternative embodiments, any suitable four-arm linkage mechanism may be provided. By way of example, the first link can be driven by a motor, either directly or via any type of coupling or transmission mechanism. Any transmission ratio can be used here. Alternatively, the band drive actuating the second link can be any device with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the above. It may also be replaced by other mechanisms. Similarly, the band drive binding the third link may be replaced by any other suitable mechanism, such as a belt drive, a cable drive, a non-circular gear, a linkage-based mechanism, or any combination of the above. may be done. Additionally, the end effector may be positioned with any suitable offset and oriented in any suitable direction. Alternatively, the third link can carry multiple end effectors. Any suitable number of end effectors and/or material retainers may be carried by any third link of the linkage. By way of example, a mechanism 1700 suitable for manufacturing solar cells is shown in FIGS. 83-86 in which a plurality of substrates are supported by each end effector. Any order of vertical arrangement of individual links and end effectors may be used herein. For example, the end effector carried by the upper linkage pair may be located above the upper linkage pair, as opposed to being sandwiched between the lower and upper linkage pairs.

The dual-arm and quad-arm configurations described above may be driven by a robot drive unit having four coaxial rotation axes, for example, as shown above and in the figures. The robot drive unit may further include a common vertical lift axis 1750, as shown schematically in Figures 87A and 87B. Alternatively, the robot drive unit may include two independent vertical lift axes 1750A and 1750B, as shown schematically in Figures 88A-B and 89A-B. In this case, each vertical axis is coupled to one of two linkages in a dual-arm linkage arrangement, or to one of a pair of two linkages in a four-arm linkage arrangement. In FIGS. 88A-B, lift shafts 1750A, 1750B are independently coupled to rotary drive units 1806, 1808. Here, the lift shafts 1750A, 1750B have independently rotatable leadscrews. Similarly, in FIGS. 89A-B, lift shafts 1750A', 1750B' are independently coupled to rotary drive units 1806', 1808'. Here, the lift shafts 1750A', 1750B' share a common fixed lead screw.

90A and 90B show an example of a top and side view schematic depiction of a vacuum chamber 1900 having independent robotic arms 1902, 1904 driven by non-collocated drive units. In the example of FIGS. 90A and 90B, each drive unit may provide three axes of rotation and an optional additional vertical lift axis. Each robot arm may consist of a first link (upper arm), a second link (forearm), and a third link having an end effector. As shown, the inter-articular length of the second link may be less than the inter-articular length of the first link. Each of the three links may be driven by one of the rotation axes of the corresponding robot drive unit. Generally, any number of rotation axes and links may be used. The two robot arms and drive units of FIGS. 90A and 90B are designed such that the two arms extend directly above and/or below each other to reach any station attached to the vacuum chamber and to/from the station. It may be configured to allow material to be delivered/removed. Alternatively, as shown schematically in FIGS. 91A and 91B, each of the two drive units 1902', 1904' transmits rotational motion from the rotation axis of the drive unit to a given point within the vacuum chamber. It may also feature an extension member that can be The extension member may be stationary in a horizontal plane, whereas it may also move vertically if the corresponding drive unit is provided with a vertical lifting axis. A standard robotic arm may be driven by each of the extension members, as shown in the example of FIGS. 91A and 91B. For example, each drive unit with an extension member may provide two axes of rotation and an optional additional vertical lift axis. Each of the robot arms may then consist of a first link (upper arm), a second link (forearm), and a third link having an end effector. In the example of FIGS. 91A and 91B, the first two links are driven by the two rotation axes of the corresponding drive unit, and the third link is mechanically driven so that the end effector maintains its radial orientation. be bound by. Although a three-link arm is shown in FIGS. 91A and 91B, the arm may consist of any suitable number of links. In alternative embodiments, any suitable combination of the arm mechanisms and drive units of FIGS. 90A and 90B and FIGS. 91A and 91B or others may be used. According to one further example, a machine-readable non-transitory program storage device, such as a memory 1951', that tangibly embodies a program of machine-executable instructions to perform the operations may be provided. good. Here, operations include any of the operations performed by a controller as described herein. The methods described above may be at least partially performed or controlled using processor 1951, memory 1951' and software 1951''.

The above description should be considered as illustrative only. Various alternatives and modifications can be devised by those skilled in the art. Accordingly, the present embodiments are intended to include all such alternatives, modifications, and variations. For example, the features recited in the various dependent claims could be combined with each other in any suitable combination(s). Additionally, features from the different embodiments described above could be selectively combined to create new embodiments. Accordingly, this description is intended to cover all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims (55)

a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
a second upper arm that is combined with the first upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the first upper arm; a first forearm pivoting about an axis;
a third upper arm that is combined with the second upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the second upper arm; a second forearm pivoting about an axis;
a first forearm associated with the first forearm, located longitudinally between the first upper arm and the second upper arm, and at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first upper arm and the second upper arm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft secured to the first upper arm and a first wrist component drive component having a first camming surface;
a first wrist component driven component fixed to the first wrist component and having a second cam surface;
a first wrist component transmission element spanned between the first cam surface and the second cam surface;
the first cam surface and the second cam surface enable rotation of the first wrist component relative to the first forearm in a non-linear ratio;
robot. The robot according to claim 1,
A robot further comprising: a first end effector fixed to the first wrist component; and a second end effector fixed to the second wrist component. 3. The robot according to claim 1 or 2, comprising a first upper arm drive assembly, the first upper arm drive assembly comprising:
a first motor;
a first shaft that is fixed to the rotation axis of the first motor and the first upper arm, and causes independent rotation of the first upper arm;
A robot equipped with 4. A robot according to any of claims 1 to 3, comprising a second upper arm drive assembly, the second upper arm drive assembly comprising:
a second motor;
a second shaft fixed to the rotation axis of the second motor and the second upper arm, and causing independent rotation of the second upper arm;
A robot equipped with 5. A robot according to any preceding claim, comprising a first forearm drive assembly, the first forearm drive assembly comprising:
a third motor;
a third shaft fixed to the rotation axis of the third motor and the first forearm drive component;
a first forearm driven component to which the first forearm is fixed ;
a first forearm transmission element spanning between the first forearm driving component and the first forearm driven component;
A robot equipped with 6. A robot according to any preceding claim, comprising a second forearm drive assembly, the second forearm drive assembly comprising:
a fourth motor;
a fourth shaft fixed to the rotation axis of the fourth motor and the second forearm drive component;
a second forearm driven component to which the second forearm is fixed ;
a second forearm transmission element spanning between the second forearm driving component and the second forearm driven component;
A robot equipped with The robot according to any one of claims 1 to 6,
a second wrist component drive assembly having a second forearm shaft secured to the second upper arm and a second wrist component drive component;
a second wrist component driven component to which the second wrist component is fixed ;
a second wrist component transmission element spanned between the second wrist component driving component and the second wrist component driven component;
A robot equipped with The robot according to claim 7,
The second wrist component driving component has a third cam surface, the second wrist component driven component has a fourth cam surface, and the third cam surface and the fourth cam surface. is engaged by the second wrist component transmission element to enable non-linear ratio rotation of the second wrist component relative to the second forearm. The robot according to any one of claims 1 to 8,
The first forearm and the first wrist component are located below the second forearm and the second wrist component. An electronic device process system,
a transmission chamber;
a robot that is at least partially disposed in the transfer chamber and that moves substrates into and out of a process chamber that is associated with the transfer chamber;
The robot comprises:
a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
a second upper arm that is combined with the first upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the first upper arm; a first forearm pivoting about an axis;
a third upper arm that is combined with the second upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the second upper arm; a second forearm pivoting about an axis;
a first forearm associated with the first forearm, located longitudinally between the first upper arm and the second upper arm, and at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first upper arm and the second upper arm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft secured to the first upper arm and a first wrist component drive component having a first camming surface;
a first wrist component driven component fixed to the first wrist component and having a second cam surface;
a first wrist component transmission element spanned between the first cam surface and the second cam surface;
the first cam surface and the second cam surface enable rotation of the first wrist component relative to the first forearm in a non-linear ratio;
Electronic device process system. 11. The electronic device processing system of claim 10, wherein the robot comprises a first upper arm drive assembly, the first upper arm drive assembly comprising:
a first motor;
a first shaft that is fixed to the rotation axis of the first motor and the first upper arm, and causes independent rotation of the first upper arm;
An electronic device processing system comprising: The electronic device processing system according to claim 10 or 11, wherein the robot further comprises:
a second upper arm drive assembly, the second upper arm drive assembly comprising:
a second motor;
a second shaft fixed to the rotation axis of the second motor and the second upper arm, and causing independent rotation of the second upper arm;
An electronic device processing system comprising: 13. The electronic device processing system of any of claims 10-12, wherein the robot comprises a first forearm drive assembly, the first forearm drive assembly comprising:
a third motor;
a third shaft fixed to the rotation axis of the third motor and the first forearm drive component;
a first forearm driven component to which the first forearm is fixed ;
a first forearm transmission element spanning between the first forearm driving component and the first forearm driven component;
An electronic device processing system comprising: 14. The electronic device processing system of any of claims 10-13, wherein the robot comprises a second forearm drive assembly, the second forearm drive assembly comprising:
a fourth motor;
a fourth shaft coupled to the fourth motor and the second forearm drive component;
a second forearm driven component secured to the second forearm;
a second forearm transmission element spanning between the second forearm driving component and the second forearm driven component;
An electronic device processing system comprising: A method of transporting a substrate in an electronic device processing system, the method comprising:
providing a robot, the robot comprising:
a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
a second upper arm that is combined with the first upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the first upper arm; a first forearm pivoting about an axis;
a third upper arm that is combined with the second upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the second upper arm; a second forearm pivoting about an axis;
a first forearm associated with the first forearm, located longitudinally between the first upper arm and the second upper arm, and at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first upper arm and the second upper arm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft secured to the first upper arm and a first wrist component drive component having a first camming surface;
a first wrist component driven component fixed to the first wrist component and having a second cam surface;
a first wrist component transmission element spanned between the first cam surface and the second cam surface;
the first cam surface and the second cam surface enable rotation of the first wrist component relative to the first forearm in a non-linear ratio;
The method further includes:
independently rotating the first upper arm to radially extend a first end effector into a first chamber;
independently rotating the second upper arm to radially extend a second end effector into a second chamber;
including methods. 16. The method according to claim 15,
A method comprising: independently rotating the first forearm; and/or independently rotating the second forearm. Being a robot,
a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
a second upper arm that is combined with the first upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the first upper arm; a first forearm pivoting about an axis;
a third upper arm that is combined with the second upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the second upper arm; a second forearm pivoting about an axis;
a first forearm associated with the first forearm, located longitudinally between the first upper arm and the second upper arm, and at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first upper arm and the second upper arm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft secured to the first upper arm and a first cam having a first cam surface;
a second cam fixed to the first wrist component, the second cam having a second cam surface;
a first belt stretched between the first cam surface and the second cam surface;
, wherein the first cam surface and the second cam surface enable rotation of the first wrist component with respect to the first forearm in a non-linear ratio. The robot according to claim 17,
A robot further comprising: a first end effector fixed to the first wrist component; and a second end effector fixed to the second wrist component. 19. A robot according to claim 17 or 18, comprising a first upper arm drive assembly, the first upper arm drive assembly comprising:
a first motor;
a first shaft that is fixed to the rotation axis of the first motor and the first upper arm, and causes independent rotation of the first upper arm;
A robot equipped with 20. A robot according to any of claims 17 to 19, comprising a second upper arm drive assembly, the second upper arm drive assembly comprising:
a second motor;
a second shaft fixed to the rotation axis of the second motor and the second upper arm, and causing independent rotation of the second upper arm;
A robot equipped with 21. A robot according to any of claims 17 to 20, comprising a first forearm drive assembly, the first forearm drive assembly comprising:
a third motor;
a third shaft fixed to the rotation axis of the third motor and the first forearm circular pulley;
a first forearm circular pilot to which the first forearm is secured ;
a second belt stretched between the first forearm circular pulley and the first forearm circular pilot;
A robot with a 22. A robot according to any of claims 17 to 21, comprising a second forearm drive assembly, the second forearm drive assembly comprising:
a fourth motor;
a fourth shaft fixed to the rotation axis of the fourth motor and the second forearm circular pulley;
a second forearm circular pilot to which the second forearm is secured ;
a second belt stretched between the second forearm circular pulley and the second forearm circular pilot;
A robot with a The robot according to any one of claims 17 to 22,
a second wrist component drive assembly having a second forearm shaft secured to the second upper arm and a third cam having a third cam surface;
a fourth cam to which the second wrist component is fixed , the fourth cam having a fourth cam surface;
a second belt stretched between the third cam surface and the fourth cam surface;
A robot with a 24. The robot according to claim 23,
The third cam surface and the fourth cam surface are engaged by the second belt to enable non-linear rotation of the second wrist component relative to the second forearm. The robot according to any one of claims 17 to 24,
The first forearm and the first wrist component are located below the second forearm and the second wrist component. An electronic device process system,
a transmission chamber;
a robot disposed at least partially in the transfer chamber for transporting substrates into and out of a process chamber associated with the transfer chamber;
a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
a second upper arm that is combined with the first upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the first upper arm; a first forearm pivoting about an axis;
a third upper arm that is combined with the second upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the second upper arm; a second forearm pivoting about an axis;
a first forearm associated with the first forearm, located longitudinally between the first upper arm and the second upper arm, and at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first upper arm and the second upper arm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft secured to the first upper arm and a first cam having a first cam surface;
a second cam fixed to the first wrist component, the second cam having a second cam surface;
a first belt stretched between the first cam surface and the second cam surface;
an electronic device processing system, wherein the first cam surface and the second cam surface enable rotation of the first wrist component relative to the first forearm in a non-linear ratio. 27. The electronic device processing system according to claim 26,
The robot includes a first upper arm drive assembly, the first upper arm drive assembly comprising:
a first motor;
a first shaft that is fixed to the rotation axis of the first motor and the first upper arm, and causes independent rotation of the first upper arm;
An electronic device processing system comprising: The electronic device processing system according to claim 26 or 27,
The robot further includes:
a second upper arm drive assembly, the second upper arm drive assembly comprising:
a second motor;
a second shaft fixed to the rotation axis of the second motor and the second upper arm, and causing independent rotation of the second upper arm;
An electronic device processing system comprising: The electronic device processing system according to any one of claims 26 to 28,
The robot includes a first forearm drive assembly, the first forearm drive assembly comprising:
a third motor;
a third shaft fixed to the rotation axis of the third motor and the first forearm circular pulley;
a first forearm circular pilot to which the first forearm is secured ;
a second belt stretched between the first forearm circular pulley and the first forearm circular pilot;
An electronic device processing system comprising: The electronic device processing system according to any one of claims 26 to 29,
The robot includes a second forearm drive assembly, the second forearm drive assembly comprising:
a fourth motor;
a fourth shaft fixed to the rotation axis of the fourth motor and the second forearm circular pulley;
a second forearm circular pilot to which the second forearm is secured ;
a second belt stretched between the second forearm circular pulley and the second forearm circular pilot;
An electronic device processing system comprising: A method of transporting a substrate in an electronic device processing system, the method comprising:
providing a robot, the robot comprising:
a first upper arm that is rotatable about a shoulder axis; a second upper arm that is vertically spaced apart from the first upper arm and that is rotatable about the shoulder axis;
a second upper arm that is combined with the first upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the first upper arm; a first forearm pivoting about an axis;
a third upper arm that is combined with the second upper arm, is located between the first upper arm and the second upper arm in the longitudinal direction, and is offset from the shoulder axis with respect to the second upper arm; a second forearm pivoting about an axis;
a first forearm associated with the first forearm, located longitudinally between the first upper arm and the second upper arm, and at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first upper arm and the second upper arm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft secured to the first upper arm and a first cam having a first cam surface;
a second cam fixed to the first wrist component, the second cam having a second cam surface;
a first belt stretched between the first cam surface and the second cam surface;
the first cam surface and the second cam surface enable rotation of the first wrist component relative to the first forearm in a non-linear ratio;
The method further includes:
independently rotating the first upper arm to radially extend a first end effector carrying a first substrate into a first chamber;
the second upper arm to extend a second end effector carrying the second substrate radially into the second chamber so that the second substrate does not pass over the first substrate; rotating individually;
including methods. 32. The method according to claim 31,
A method comprising: independently rotating the first forearm; and/or independently rotating the second forearm. A conveying device,
the drive unit having a plurality of coaxial drive shafts, the number of the coaxial drive shafts being at least three;
a first arm connected to the drive section, the arm including a first link, a second link, and a first end effector connected to the drive section in this order; the first arm having a different effective length than the two links;
a second arm connected to the drive unit, the second arm having a third link, a fourth link, and a second end effector connected to the drive unit in order;
Equipped with
a first mechanical connection between the first arm and the drive section comprises a first band drive section having at least one first non-circular pulley;
a second mechanical connection between the second arm and the drive section comprises a second band drive section having at least one second non-circular pulley;
The first mechanical connection and the second mechanical connection, each including the at least one non-circular pulley, are such that the first link and the second link of the first arm are connected to the second link. moving relative to the third link and the fourth link of the arm; and the third link and the fourth link of the second arm move relative to the first link of the first arm. and configured to limit movement relative to the second link , such that the first and second mechanical connections are configured to limit movement relative to the first and second links when the first and second arms extend and retract. allowing only linear telescoping movements of the first and second end effectors;
Conveyance device. 34. The conveying device according to claim 33,
The plurality of coaxial drive shafts includes at least four coaxial drive shafts. The conveying device according to claim 33 or 34,
The conveying device, wherein the at least one first non-circular pulley of the first band drive includes at least two non-circular pulleys. 36. The conveying device according to claim 35,
The conveying device, wherein the at least two non-circular pulleys are located inside the second link. 37. The conveying device according to claim 36,
The conveying device, wherein the at least one second non-circular pulley of the second band drive includes at least two non-circular pulleys, the at least two non-circular pulleys being located inside the fourth link. 38. The conveying device according to any one of claims 33 to 37,
An effective length of the second link is shorter than an effective length of the first link, and an effective length of the fourth link is shorter than an effective length of the third link. 39. The conveying device according to claim 38,
The first end effector includes a first portion, a second portion extending from the first portion at a first angle, and a first substrate support at an end of the second portion. a portion of the coaxial drive shaft is located proximate inside the first angle when the first end effector is in a retracted position. 40. The conveying device according to claim 39,
The second end effector includes a first portion, a second portion extending from the first portion at a second angle, and a second substrate support at an end of the second portion. a portion of the coaxial drive shaft is located proximate the inside of the second angle when the second end effector is in the retracted position; located between the inside of the first angle and the inside of the second angle;
Conveyance device. The conveying device according to any one of claims 33 to 40,
the first link has a first upper arm, the first upper arm being rotatable about a shoulder axis formed by the coaxial drive shaft;
the third link has a second upper arm, the second upper arm is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
the second link has a first forearm, the first forearm being associated with the first upper arm, longitudinally positioned over the first upper arm and offset from the shoulder axis; and is adapted to rotate about a second axis relative to the first upper arm in the position;
The fourth link has a second forearm, the second forearm being associated with the second upper arm, longitudinally overlying the first upper arm and offset from the shoulder axis. and is adapted to rotate about a third axis relative to the second upper arm in the position;
The first end effector is coupled to the first forearm by a first wrist, the first wrist being longitudinally positioned on the first upper arm and offset from the second axis. pivotable about a fourth axis relative to the first forearm in the position;
The second end effector is coupled to the second forearm by a second wrist, the second wrist being longitudinally located below the second upper arm and offset from the third axis. and pivotable about a fifth axis relative to the second forearm in the position;
the first upper arm is fixed to a first pulley of the first band drive by a first forearm shaft, the first pulley having a first cam surface;
The first band drive unit has a second pulley, the second pulley forming a first wrist driven part to which the first wrist is fixed , and the second pulley forming a first wrist driven part to which the first wrist is fixed. the driven component has a second cam surface;
the at least one first non-circular pulley includes at least one of the first pulley and the second pulley;
The first band driving section includes a first wrist transmission element that spans the first cam surface and the second cam surface,
the first cam surface, the second cam surface, and the first wrist transmission element enable rotation of the first wrist relative to the first forearm in a non-linear ratio;
Conveyance device. The conveying device according to any one of claims 33 to 40,
the first link has a first upper arm, the first upper arm being rotatable about a shoulder axis formed by the coaxial drive shaft;
the third link has a second upper arm, the second upper arm is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
the second link has a first forearm, the first forearm is coupled to the first upper arm and is longitudinally located between the first upper arm and the second upper arm; rotatable around a second axis relative to the first upper arm at a position offset from the shoulder axis;
the fourth link has a second forearm, the second forearm is coupled to the second upper arm and is longitudinally located between the first upper arm and the second upper arm; rotatable around a third axis relative to the second upper arm at a position offset from the shoulder axis;
The first end effector is coupled to the first forearm by a first wrist component and is longitudinally located between the first and second upper arms and offset from the second axis. rotated about a fourth axis relative to the first forearm in a position where the
The second end effector is coupled to the second forearm by a second wrist component and is longitudinally located between the first and second upper arms and offset from the third axis. rotated about a fifth axis relative to the second forearm in a position where the
a first forearm shaft is secured to the first upper arm and first wrist component drive component;
The first band driving section has a second pulley forming a first wrist component driven component to which the first wrist component is fixed ,
the at least one first non-circular pulley includes at least one of the first wrist component driving component and the first wrist component driven component;
the first wrist component driving component has a first cam surface; the first wrist component driven component has a second cam surface;
The first band driving section includes a first wrist component transmission element that is spanned between the first cam surface and the second cam surface, and the first wrist component transmission element that connects the first cam surface and the second cam surface. the cam surface is configured to allow rotation of the first wrist component with respect to the first forearm in a non-linear ratio;
Conveyance device. The conveying device according to any one of claims 33 to 42,
The first mechanical connection has a third band drive, the third band drive has at least one third non-circular pulley, and the first band drive has a third non-circular pulley. The third band driving section is located inside the second link, and the third band driving section is located inside the first link. 44. The conveying device according to claim 43,
The third band drive unit includes at least two third non-circular pulleys. The conveying device according to any one of claims 33 to 44,
The first arm and the second arm are in a retracted position, the first end effector and the second end effector are in a first vertical position, and the first link and the second A link is located at a position lower than the first vertical position, and the third link and the fourth link are located at a position higher than the first vertical position. the drive unit having a plurality of coaxial drive shafts, the number of the coaxial drive shafts being three;
a first arm connected to the drive section, the arm including a first link, a second link, and a first end effector connected to the drive section in this order; the first arm having a different effective length from the two links;
a second arm connected to the drive section, the second arm having a third link, a fourth link, and a second end effector connected to the drive section in this order; the second arm having an effective length different from that of the four links;
A transport device comprising:
a first mechanical connection between the first arm and the drive unit includes a first band drive unit having a first non-circular pulley and a first band;
a second mechanical connection between the second arm and the drive section includes a second band drive section having a second non-circular pulley and a second band;
the first mechanical connection including the first non-circular pulley limits telescopic movement of the first end effector to linear telescopic movement with respect to the drive portion;
Conveyance device. a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
combined with the first upper arm, located on the first upper arm in the longitudinal direction, and pivoted about a second axis relative to the first upper arm at a position offset from the shoulder axis; a first forearm;
combined with the second upper arm, located above the first upper arm in the longitudinal direction, and pivoted about a third axis relative to the second upper arm at a position offset from the shoulder axis; with the second forearm;
associated with the first forearm and positioned longitudinally over the first upper arm and rotated about a fourth axis relative to the first forearm in a position offset from the second axis; a moving first wrist;
associated with the second forearm, positioned longitudinally over the first upper arm and rotated about a fifth axis relative to the second forearm in a position offset from the third axis; A second wrist that moves;
a first forearm shaft fixed to the first upper arm and a first wrist component drive component, the first wrist component drive component having a first cam surface mated to the first forearm shaft; the first forearm shaft having;
a first wrist driven component to which the first wrist is fixed and having a second cam surface;
a first wrist transmission element spanned between the first cam surface and the second cam surface;
, the first cam surface, the second cam surface, and the first wrist transmission element of the first wrist component drive component are configured to move the first wrist relative to the first forearm. configured to allow rotation in a non-linear ratio;
robot. 48. The robot according to claim 47,
The first upper arm has an effective length that is longer than an effective length of the first forearm. The robot according to claim 47 or 48,
The first wrist has a first end effector rotatably connected to the first forearm, and the first end effector includes a substrate support and a substrate support that connects the substrate support to the first end effector. a leg that connects to the wrist; the leg includes a first portion that connects to the first wrist; a second portion that connects to the substrate support; and a second portion that connects the first portion and the second portion. a curved portion between the first portion and the second portion, the first portion and the second portion being at an angle with respect to each other. 50. The robot according to claim 49,
The robot, wherein the curved portion forms a concave pocket between the first portion and the second portion on a side surface of the curved portion. The robot according to claim 49 or 50,
The robot wherein a connection of the leg to the first forearm at the first wrist is offset with respect to a centerline of the substrate support and offset with respect to the shoulder axis. The robot according to any one of claims 49 to 51,
A center line of the substrate support part is perpendicular to the shoulder axis. The robot according to any one of claims 49 to 52,
The robot is configured such that the first end effector can only move linearly relative to the shoulder axis when the first end effector is extended or retracted. a drive unit having a drive shaft;
A first arm connected to the drive unit, the arm including a first link, a second link, and an end effector connected to the drive unit in this order, and the first link is connected to the second link. said first arm having an effective length greater than an effective length of;
Equipped with
The end effector has a substrate support and a leg that connects the substrate support to a wrist joint of the end effector that connects with the second link, the leg having a first portion that connects to the wrist joint. a second portion connected to the substrate support portion; and a curved portion between the first portion and the second portion, the first portion and the second portion being It is at an angle to the opponent,
a connection portion of the leg to the second link at the wrist joint portion is offset with respect to a centerline of the substrate support and offset with respect to the drive shaft;
a center line of the substrate support part is perpendicular to the drive shaft;
When the first arm expands and contracts, the end effector is configured to only move linearly with respect to the drive unit.
A conveying device,
a second arm connected to the drive unit, the second arm having a third link, a fourth link, and a second end effector;
the third link is vertically spaced apart from the first link and is rotatable about the drive shaft;
The second link is associated with the first link, is longitudinally positioned above the first link, and has a second axis relative to the first link at a position offset from the drive axis. is made to rotate around the
The fourth link is coupled to the third link, is longitudinally located above the first link, and has a third axis relative to the third link at a position offset from the drive axis. is made to rotate around the
The conveyance device further includes:
coupled to the second link, located above the first link in the longitudinal direction and rotated about a fourth axis relative to the second link at a position offset from the second axis; a moving first wrist;
coupled to the fourth link, located above the first link in the longitudinal direction, and rotated about a fifth axis with respect to the fourth link at a position offset from the third axis; A second wrist that moves;
a fourth link shaft fixed to the first link and the first wrist component drive component, the first wrist component drive component having a first cam surface that is combined with the fourth link shaft; the fourth link shaft having;
a first wrist driven component to which the first wrist is fixed and having a second cam surface;
a first wrist transmission element spanned between the first cam surface and the second cam surface;
The first cam surface, the second cam surface, and the first wrist transmission element of the first wrist component drive component are configured to move the first wrist relative to the second link. configured to allow rotation in a non-linear ratio;
Conveyance device. A method of transporting a substrate in an electronic device processing system, the method comprising: providing a robot, the robot comprising:
a first upper arm rotatable around a shoulder axis;
a second upper arm that is vertically spaced apart from the first upper arm and is rotatable about the shoulder axis;
combined with the first upper arm, located on the first upper arm in the longitudinal direction, and pivoted about a second axis relative to the first upper arm at a position offset from the shoulder axis; a first forearm;
combined with the second upper arm, located above the first upper arm in the longitudinal direction, and pivoted about a third axis relative to the second upper arm at a position offset from the shoulder axis; with the second forearm;
a first forearm associated with the first forearm, located longitudinally between the first forearm and the second forearm, and relative to the first forearm at a position offset from the second axis; a first wrist component that rotates about an axis of 4;
a second forearm associated with the second forearm, located longitudinally between the first forearm and the second forearm, and relative to the second forearm at a position offset from the third axis; a second wrist component that rotates around an axis of 5;
a first forearm shaft secured to the first upper arm and a first wrist component drive component having a first camming surface;
a first wrist component driven component fixed to the first wrist component and having a second cam surface;
a first wrist component transmission element spanned between the first cam surface and the second cam surface;
the first cam surface and the second cam surface enable rotation of the first wrist component relative to the first forearm in a non-linear ratio;
The method further includes:
independently rotating the first upper arm to radially extend a first end effector into a first chamber;
independently rotating the second upper arm to radially extend a second end effector into a second chamber;
including methods.

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