JP2016505219A - Robot with arm having unequal link length - Google Patents

Abstract

A drive device and a first arm connected to the drive device, the first arm including a first link, a second link and an end effector connected in series with the drive device, The first and second links have different effective lengths to provide a substantially linear motion of the first effector and the end effector relative to the drive when the first arm is extended or retracted. A system for limiting rotation of the end effector relative to the second link. [Selection] Figure 1A

Description

  The disclosed embodiments relate to robots having arms with unequal link lengths, and more particularly to robots having one or more arms with unequal link lengths, each supporting one or more substrates.

  Vacuum, atmospheric and controlled environment processing for applications such as those associated with the manufacture of semiconductors, LEDs, sunlight, MEMS or other devices, storage locations, processing locations or other substrates, and carriages associated with substrates Utilize robot technology and other forms of automation to transport to and from the location. Such transport of substrates moves individual substrates, groups of substrates using a single arm that transports one or more substrates, or multiple arms that each transport one or more substrates. May be. Much of the manufacturing takes place in a clean or vacuum environment where footprint and volume are important, such as those associated with semiconductor manufacturing, for example. Furthermore, many automated transfers are performed when minimizing transfer times results in shorter cycle times and increased associated equipment throughput and utilization. Accordingly, it is desirable to provide a substrate transport automation that minimizes the footprint and work space volume required for a given range of transport applications and minimizes transport time.

Abstract

  The following summary is intended to be exemplary only. The abstract is not intended to limit the claims.

  According to one aspect of the exemplary embodiment, the transport device is a drive device and a first arm connected to the drive device, wherein the first arm is connected in series with the drive device. The first arm and the second link and the end effector, the first link and the second link having different effective lengths, and the drive device when the first arm is extended or contracted A system for limiting the rotation of the end effector relative to the second link to provide substantially linear movement of the end effector relative to the second link.

  According to another aspect of the exemplary embodiment, rotating the first link of the arm by the drive and rotating the second link of the arm when the first link is rotated, provided that The second link is rotated on the first link, rotating and rotating the end effector on the second link, provided that the first and second links have different effective lengths; The rotation of the end effector on the second link is constrained to rotate so that when the arm is extended or retracted, the end effector is limited to substantially linear motion relative to the drive. A method is provided.

  According to another aspect of the exemplary embodiment, a drive device and an arm connected to the drive device, wherein the arm is a first link connected to the drive device at a first joint, a second joint. A second link connected to the first link at a first end and an end effector connected to the second link at a third joint, wherein the first link is between the second and third joints. A first length between the first and second joints different from the second length of the second link, the movement of the end effector in the third joint being driven during arm extension and contraction There is provided a transfer device having arms that are constrained to follow within a substantially straight radial line relative to the center of rotation of the device.

  The above aspects and other features are described in the following description with reference to the accompanying drawings.

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It is a side view of an example of a substrate conveyance robot. It is a top view of an example of a substrate transfer robot. It is a top view of an example of a substrate transfer robot. It is the upper surface schematic of an example of a substrate conveyance robot. It is a section schematic diagram of an example of a substrate conveyance robot. It is the upper surface schematic of an example of a substrate conveyance robot. It is a section schematic diagram of an example of a substrate conveyance robot. It is the upper surface schematic of an example of a substrate conveyance robot. It is a section schematic diagram of an example of a substrate conveyance robot. It is a top view of an example of a substrate transfer device. It is a side view of an example of a substrate conveyance device. It is a top view of an example of a substrate transfer device. It is a side view of an example of a substrate conveyance device.

Detailed Description of Exemplary Embodiments

  In addition to the embodiments disclosed below, the disclosed embodiments are capable of other embodiments and can be implemented or carried out in various ways. Therefore, it is to be understood that the disclosed embodiments are not limited in their application to the details of construction and the arrangement of components set forth in the following description or illustrated in the drawings. If only one embodiment is described herein, the claims hereof should not be limited to that embodiment. In addition, claims in this regard should not be read in a limited manner unless there is clear and convincing evidence that states a certain exclusion, limitation, or waiver.

  1A and 1B, a top view and a side view of a robot 10 having a drive device 12 and an arm 14 are shown, respectively. Arm 14 is shown in the retracted position. The arm 14 has an upper arm or first link 16 that is rotatable about a central rotational axis 18 of the drive device 12. The arm 14 further includes a forearm or second link 20 that is rotatable about an elbow rotation axis 22. The arm 14 further includes an end effector or third link 24 that is rotatable about a wrist rotation axis 26. The end effector 24 supports the substrate 28. As described, the arm 14 is parallel to the linear path 32 that may coincide with the linear path 32 that coincides with the central rotational axis 18 of the drive device 12 (as seen in FIG. 1A), or parallel to the linear path 32. It is configured to cooperate with the drive device 12 such that the substrate 28 is transported along a simple path, such as the path 34, 36 or others. In the illustrated embodiment, the inter-articular length of the forearm or second link 20 is greater than the inter-articular length of the upper arm or first link 16. In the illustrated embodiment, the lateral offset 38 of the end effector or third link 24 corresponds to the difference between the joint lengths of the forearm 20 and the upper arm 16. As will be described in more detail below, the lateral offset 38 is maintained substantially constant during the extension and contraction of the arm 14 so that the substrate 28 is positioned on the substrate 28 or end effector 24 relative to a linear path. It is moved along a linear path without rotation. This is accomplished using the internal structure of the arm 14 without using an additional control axis to control the rotation of the end effector 24 at the wrist 26 relative to the forearm 20, as will be described. In one aspect of the embodiment disclosed with respect to FIG. 1A, the center of mass of the third link or end effector 24 may be at the wrist centerline or axis of rotation 26. Alternatively, the center of mass of the third link or end effector 24 may exist along a path 40 that is offset (38) from the central axis of rotation 18. In this way, disturbances to the band that binds the end effector 24 to the links 16, 20 due to the moment applied as a result of the mass being otherwise offset during arm extension and contraction are minimized. May be. Here, the center of mass may be determined with or without the substrate, or may be determined in the middle thereof. Alternatively, the center of mass of the third link or end effector 24 may be at any suitable location. In the illustrated embodiment, the substrate transport apparatus 10 transports the substrate 28 using the movable arm assembly 14 coupled to the driving unit 12 on the central rotating shaft 18. The substrate support 24 is coupled to the arm assembly 14 on the wrist rotation shaft 26. Here, the arm assembly 14 rotates about a central axis of rotation 18 during expansion and contraction, as seen with respect to FIGS. The wrist axis of rotation 26 is parallel to a radial path relative to the central axis of rotation 18 during expansion and contraction, eg, along the wrist path 40 that is 38 or otherwise offset therefrom. Move. The substrate support 24 also moves parallel to the radial path 30 without rotation during expansion and contraction. The principle of constraining the end effector to move in a substantially purely radial motion, with the length of the forearm being shorter than that of the upper arm, as will be explained in more detail in another aspect of the disclosed embodiment And structures may be applied. Furthermore, the feature that a plurality of substrates are handled by the end effector may be applied. Further, a feature that a second arm that handles one or more additional substrates is used in connection with a driving device may be applied. Accordingly, all such modifications may be included.

  Referring also to FIGS. 2A and 2B, there are shown a partial schematic top view and a side view, respectively, of the system 10 showing the internal mechanism used to drive the individual links of the arm 14 shown in FIGS. 1A and 1B. ing. The drive device 12 is coupled to the housing 60 and has first and second motors 52, 54 having corresponding first and second encoders 56, 58 that drive the first and second shafts 62, 64, respectively. Have Here, the shaft 62 may be coupled to the pulley 66, the shaft 64 may be coupled to the upper arm 16, and the shafts 62, 64 may be concentric or otherwise disposed. In alternative aspects, any suitable drive may be provided. The housing 60 may be in communication with the chamber 68, and the bellows 70, the chamber 68, and the interior portion of the housing 60 isolate the vacuum environment 72 from the atmospheric environment 74. The housing 60 may slide in the z-direction on the slide 76 as a movable platform, and a lead screw or other suitable for selectively moving the housing 60 and the arm 14 coupled thereto in the z (80) direction. A vertical or linear z drive 78 may be provided. In the illustrated embodiment, the upper arm 16 is driven about the central axis of rotation 18 by a motor 54. Similarly, the forearm is driven by a motor 52 through a band drive having pulleys 66, 82 and bands 84, 86, such as conventional circular pulleys and bands. In alternative aspects, any suitable structure for driving the forearm 20 relative to the upper arm 16 may be provided. The ratio between the pulleys 66 and 82 may be 1: 1, 2: 1, or any suitable ratio. The third link 24 having the end effector includes a pulley 88 that is grounded to the link 16, a pulley 90 that is grounded to the end effector or the third link 24, and a band 92 that binds the pulley 88 and the pulley 90. , 94 may be constrained by a band drive. As described, the ratio between the pulleys 88, 90 may not be constant because the third link 24 follows a radial path without rotation during the extension and contraction of the arm 14. . This is because the pulleys 88, 90 may be one or more non-circular pulleys, such as two non-circular pulleys, or one of the pulleys 88, 90 is circular and the other is non-circular. It may be achieved if it is good. Alternatively, any suitable coupling device or linkage may be provided to constrain the path of the third link or end effector 24 as described. In the illustrated embodiment, at least one non-circular pulley counteracts the unequal length effects of the upper arm 16 and forearm 20 so that the end effector 24 is involved in the position of the first two links 16, 20. Instead, it faces the radial direction 30. Embodiments will be described with respect to a pulley 90 that is non-circular and a pulley 88 that is circular. Alternatively, the pulley 88 may be non-circular and the pulley 90 may be circular. Alternatively, the pulleys 88 and 92 may be non-circular, or any suitable coupling device may be provided for binding the links of the arms 14 as described. By way of example, a non-circular pulley or sprocket is described in US Pat. No. 4,865,577, issued September 12, 1989 and entitled Non-Circular Drive. This patent is incorporated herein by reference in its entirety. Alternatively, any suitable coupling device for constraining the link of the arm 14 as described may be provided, such as any suitable variable ratio drive or coupling device, coupling gear or sprocket. , Cams or others may be used alone or in combination with suitable linkages or other coupling devices. In the illustrated embodiment, the elbow pulley 88 is coupled to the upper arm 16 and is shown round or circular, and the wrist pulley 90 coupled to the wrist or third link 24 is shown non-circular. The shape of the wrist pulley is non-circular and may have symmetry about a line 96 perpendicular to the radial track 30. Line 96 is also similar to that of the two pulleys 88, 90 when the forearm 20 and upper arm 16 are aligned directly above each other with the wrist shaft 26 closest to the shoulder shaft 18, for example, as seen in FIG. 3B. It may coincide with or be parallel to the line between. The shape of the pulley 90 is such that the bands 92, 94 remain taut as the arm 14 extends and retracts and contacts the opposite side of the pulley 90 with varying radial distances 102, 104 from the wrist rotation axis 26. 98, 100 are established. For example, in the orientation shown in FIG. 3B, each of the two band contacts 98, 100 on the pulley is at an equal radial distance 102, 104 from the wrist rotation axis 26. This will be further explained with respect to FIG. 4 showing the respective ratios. In order for the arm 14 to rotate, both the robot drive shafts 62, 64 need to move the same amount in the direction of arm rotation. In order for the end effector 24 to radially expand and contract along a linear path, the two drive shafts 62, 64 are coordinated according to, for example, the exemplary inverse kinematic equations presented later in this section. Need to move. Here, the substrate transport apparatus 10 is configured to transport the substrate 28. The forearm 20 is rotatably coupled to the upper arm 16 and is rotatable about an elbow axis 22 that is offset from the central axis 18 by the upper arm link length. The end effector 24 is rotatably coupled to the forearm 20 and is rotatable about a wrist axis 26 that is offset from the elbow axis 22 by the forearm link length. The wrist pulley 90 is fixed to the end effector 24 and is coupled to the elbow pulley 88 using bands 92 and 94. Here, the forearm link length is different from the upper arm link length and the end effector is constrained to the upper arm by an elbow pulley, a wrist pulley and a band so that the substrate moves along a linear radial path 30 relative to the central axis 18. Here, the substrate support 24 is coupled to the upper arm 16 using the substrate support coupling device 92, and around the wrist rotation axis 26 by the relative movement between the forearm 20 and the upper arm 16 around the elbow rotation axis 22. Driven. 3A, 3B and 3C show the extension motion of the robot of FIGS. FIG. 3A shows a top view of the robot 10 with the arm 14 in its retracted position. FIG. 3B shows the partially extended arm 14 with the forearm 20 aligned over the upper arm 16, with the end effector lateral offset 38 corresponding to the difference in joint length between the forearm 20 and upper arm 16. Illustrates that. FIG. 3C shows arm 14 in the extended position, but not fully extended.

Exemplary forward kinematics may be provided. In alternative aspects, any suitable forward kinematics may be provided to accommodate alternative structures. The following exemplary equations may be used to determine end effector position as a function of motor position.
x ₂ = l ₁ cos θ ₁ + l ₂ cos θ ₂ (1.1)
y ₂ = l ₁ sin θ ₁ + l ₂ sin θ ₂ (1.2)
R ₂ = sqrt (x ₂ ² + y ₂ ² ) (1.3)
T ₂ = atan2 (y ₂ , x ₂ ) (1.4)
α ₃ = asin (d ₃ / R ₂ ) where d ₃ = l ₂ −l ₁ (1.5)
α ₁₂ = θ ₁ −θ ₂ (1.6)
If α ₁₂ <π: R = sqrt (R ₂ ² −d ₃ ² ) + l ₃ , T = T ₂ + α ₃ , otherwise R = −sqrt (R ₂ ² −d ₃ ² ) + l ₃ , T = T ₂ -α ₃ + π (1.7)

Exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematics may be provided to accommodate alternative structures. The following exemplary equations may be utilized to determine the position of the motor to achieve the specified position of the end effector.
x ₃ = R cos T (1.8)
y ₃ = R sin T (1.9)
x ₂ = x ₃ −l ₃ cos T + d ₃ sin T (1.10)
y ₂ = y ₃ −l ₃ sin Td ₃ cos T (1.11)
R ₂ = sqrt (x ₂ ² + y ₂ ² ) (1.12)
T ₂ = atan2 (y ₂ , x ₂ ) (1.13)
α ₁ = acos ((R ₂ ² + l ₁ ² −l ₂ ² ) / (2R ₂ l ₁ )) (1.14)
α ₂ = acos ((R ₂ ² −l ₁ ² + l ₂ ² ) / (2R ₂ l ₂ )) (1.15)
If R> l ₃ : θ ₁ = T ₂ + α ₁ , θ ₂ = T ₂ −α ₂ , otherwise: θ ₁ = T ₂ −α ₁ , θ ₂ = T ₂ + α ₂ (1.16)

The following nomenclature may be used in the kinematic equations.
d ₃ = end effector lateral offset (m)
l ₁ = joint length of the first link (m)
l ₂ = inter-joint length of the second link (m)
l ₃ = length of third link with end effector measured from wrist joint to reference point on end effector (m)
R = radial position of end effector (m)
R ₂ = wrist joint radius coordinate (m)
T = angular position of end effector (rad)
T ₂ = Wrist joint angle coordinate (rad)
x ₂ = wrist joint x coordinate (m)
x ₃ = end effector x coordinate (m)
y ₂ = y coordinate of wrist joint (m)
y ₃ = y effector's y coordinate (m)
θ ₁ = angular position (rad) of the drive shaft coupled to the first link
θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

  The exemplary kinematic equation above is suitable for constraining the orientation of the third link 24 so that the end effector 24 is oriented in the radial direction 30 regardless of the position of the first two links 16, 20 of the arm 14. It may be used to design a drive device, for example a band drive device.

Referring to FIG. 4, the normalized extension of the arm measured from the center of the robot to the root of the end effector, ie, (R, of the transmission ratio r ₃₁ 122 of the band drive that constrains the orientation of the third link. A plot 120 as a function of −l ₃ ) / l ₁ is shown. The transmission ratio r ₃₁ is defined for the second link, the angular velocity of the pulley attached to the third link, ω ₃₂ , the angular velocity of the pulley attached to the first link, ω ₁₂ Defined as a ratio. The figure graphically illustrates the transmission ratio r ₃₁ for different l ₂ / l ₁ (0.5 to 1.0 in 0.1 increments and 1.0 to 2.0 in 0.2 increments). Yes. The outer shape of the non-circular pulley (s), such as the outer shape shown in FIGS. 2A, 54A and 54B, may be calculated to achieve the transmission ratio r _{31 according} to FIG.

In the disclosed embodiments, by using one or more non-circular pulley (s) or other suitable device to constrain end effector motion, compared to an equilink arm having the same storage volume Longer reach may be obtained. In alternative aspects, the first link may be driven by a motor, either directly or via any type of coupling device or transmission mechanism. Here, any suitable transmission ratio can be used. Alternatively, the band drive for actuating the second link may be any device with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism or any combination of the above It may be replaced by other mechanisms. Similarly, the band drive that binds the third link is replaced by any other suitable mechanism, such as a belt drive, cable drive, non-circular gear, linkage-based mechanism, or any combination of the above. May be. Here, the end effector may be oriented in the radial direction, but this need not be the case. For example, the end effector may be positioned with any suitable offset relative to the third link and may be oriented in any suitable direction. Further, in an alternative aspect, the third link may carry multiple end effectors or substrates. Any suitable number of end effectors and / or material holders can be carried by the third link. Further, in alternative embodiments, the forearm, for example, as seen and represented in FIG. 4 by l ₂ / l ₁ <1, and as seen and described with respect to FIGS. 25-34 and 43-53 The joint length can be smaller than the joint length of the upper arm.

  5A and 5B, there are shown a top view and a side view, respectively, of a robot 150 that incorporates several features of the robot 10. FIG. The robot 150 is shown having a drive 12 and an arm 152 shown in a retracted position. The arm 152 has the same characteristics as those of the arm 14 except for the description in this specification. As an example, the joint length of the forearm or the second link 158 is greater than the joint length of the upper arm or the first link 154. Similarly, the lateral offset 168 of the end effector or third link 162 corresponds to the difference in joint length between the forearm 158 and the upper arm 154. Referring also to FIGS. 6A and 6B, there is shown a drive 12 having an internal mechanism used to drive individual links of the arm. In the illustrated embodiment, the upper arm 154 is driven through a shaft 64 by a single motor, as described with respect to the arm 14 of FIGS. Similarly, the end effector or third link 162 is constrained to the upper arm 154 by a non-circular pulley mechanism, as described with respect to the arm 14 of FIGS. An exemplary difference between arm 152 and arm 14 is seen where forearm 158 is coupled to shaft 62 and another motor of drive 12 via a band mechanism having at least one non-circular pulley. Here, the coupling device or band mechanism may have features as described herein or as described with respect to the pulley drive devices 88, 90 of FIGS. The coupling device or band mechanism has a non-circular pulley 202 that is coupled to the shaft 62 of the drive device 12 and is rotatable about the axis 18 with the shaft 62. The band mechanism of the arm 152 further includes a circular pulley 204 coupled to the upper arm link 154 and rotatable about the elbow axis 156. Circular pulley 204 is coupled to non-circular pulley 202 via bands 206 and 208. Here, the bands 206, 208 may be held taut thanks to the outer shape of the non-circular pulley 202. In alternative aspects, any combination of pulleys or other suitable transmission devices may be provided. Pulleys 202 and 204 and bands 206, 208 cause rotation of upper arm 154 relative to pulley 202 (eg, holding pulley 202 stationary while rotating upper arm 154) causes wrist joint 160 to become end effector. Cooperate to extend and contract along a straight line 168 that is parallel to and offset from the desired radial path 180. Here, the third link 162 with the end effector is connected to the first two links 154, 158 by the end effector by, for example, a band drive as described with respect to the arm 14 having at least one non-circular pulley. It is constrained to face in the radial direction 180 regardless of the position of. Here, any suitable coupling device for constraining the link of the arm 152 as described may be provided, such as one or more suitable variable ratio drive or coupling devices, coupling gears or Sprockets, cams or others may be used alone or in combination with suitable linkages or other coupling devices. In the illustrated embodiment, the elbow pulley 204 is coupled to the forearm 158 and shown as round or circular, and the shoulder pulley 202 coupled to the shaft 62 is shown as non-circular. The shape of the shaft pulley is non-circular and may be symmetric about a line 218 perpendicular to the radial track 180. Line 218 is also similar to that of the two pulleys 202, 204 when the forearm 158 and upper arm 154 are aligned directly above each other with the wrist shaft 160 closest to the shoulder shaft 18, for example, as seen in FIG. 7B. It may coincide with or be parallel to the line between. The shape of the pulley 202 is such that the bands 206, 208 remain taut as the arm 152 extends and retracts and contacts the opposite side of the pulley 202 with varying radial distances 214, 216 from the shoulder rotation axis 18. 210 and 212 are established. For example, in the orientation shown in FIG. 7B, each of the two bands of contacts 210, 212 on the pulley is at an equal radial distance 214, 216 from the shoulder rotation axis 18. This will be further explained with respect to FIG. 8 showing the respective ratios. In order for the arm 152 to rotate, both the robot drive shafts 62, 64 need to move the same amount in the direction of arm rotation. In order for the end effector 162 to radially expand and contract along a linear path, the two drive shafts 62, 64 are coordinated according to, for example, the exemplary inverse kinematic equations presented later in this section. Need to move. For example, the drive shaft coupled to the upper arm needs to move according to the inverse kinematic equation presented below while the other motor is held stationary. 7A, 7B and 7C show the extension motion of the robot 150 of FIGS. FIG. 7A shows a top view of the robot with the arm 152 in its retracted position. FIG. 7B shows a partially extended arm with the forearm aligned over the upper arm, and that the lateral offset 168 of the end effector 162 corresponds to the difference in joint length between the forearm 158 and upper arm 154. Illustrated. FIG. 7C shows the arm in the extended position, but not fully extended.

Exemplary forward kinematics may be provided. In alternative aspects, any suitable forward kinematics may be provided to accommodate alternative structures. The following exemplary equations may be used to determine end effector position as a function of motor position.
d ₁ = l ₁ sin (θ ₁ −θ ₂ ) (2.1)
If (θ ₁ −θ ₂ ) <π / 2: θ _2l = θ ₂ −l ₂ asin ((d ₁ + d ₃ ) / l ₂ ), otherwise θ _2l = θ ₂ + l ₂ asin ((d ₁ + d ₃ ) / l ₂ ) + π
(2.2)
x ₂ = l ₁ cos θ ₁ + l ₂ cos θ _2l (2.3)
y ₂ = l ₁ sin θ ₁ + l ₂ sin θ _2l (2.4)
R ₂ = sqrt (x ₂ ² + y ₂ ² ) (2.5)
T ₂ = atan2 (y ₂ , x ₂ ) (2.6)
If (θ ₁ −θ ₂ ) <π / 2: R = sqrt (R ₂ ² −d ₃ ² ) + l ₃ , T = θ ₂ , otherwise R = −sqrt (R ₂ ² −d ₃ ² ) + L ₃ , T = θ ₂ (2.7)

Exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematics may be provided to accommodate alternative structures. The following exemplary equations may be utilized to determine the position of the motor to achieve the specified position of the end effector.
x ₃ = R cos T (2.8)
y ₃ = R sin T (2.9)
x ₂ = x ₃ −l ₃ cos T + d ₃ sin T (2.10)
y ₂ = y ₃ −l ₃ sin Td ₃ cos T (2.11)
R ₂ = sqrt (x ₂ ² + y ₂ ² ) (2.12)
T ₂ = atan2 (y ₂ , x ₂ ) (2.13)
α ₁ = acos ((R ₂ ² + l ₁ ² −l ₂ ² ) / (2R ₂ l ₁ )) (2.14)
If R> l ₃ : θ ₁ = T ₂ + α ₁ , θ ₂ = T, otherwise: θ ₁ = T ₂ −α ₁ , θ ₂ = T (2.15)

The following nomenclature is used in the kinematic equations.
d ₃ = end effector lateral offset (m)
l ₁ = joint length of the first link (m)
l ₂ = inter-joint length of the second link (m)
l ₃ = length of third link with end effector measured from wrist joint to reference point on end effector (m)
R = radial position of end effector (m)
R ₂ = wrist joint radius coordinate (m)
T = angular position of end effector (rad)
T ₂ = Wrist joint angle coordinate (rad)
x ₂ = wrist joint x coordinate (m)
x ₃ = end effector x coordinate (m)
y ₂ = y coordinate of wrist joint (m)
y ₃ = y effector's y coordinate (m)
θ ₁ = angular position (rad) of the drive shaft coupled to the first link
θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

  The above kinematic equations may be used to design a band drive. Here, the band drive controls the second link 158 and rotation of the upper arm 154 causes the wrist joint 160 to expand and contract along a straight line parallel to the desired radial path 180 of the end effector 162.

Referring now to FIG. 8, the transmission ratio r ₂₀ 272 of the band drive that drives the second link is measured as the normalized extension of the arm measured from the center of the robot to the root of the end effector, ie, ( A graph 270 is shown as a function of R-l ₃ ) / l ₁ . The transmission ratio r ₂₀ is defined for the first link, the angular velocity of the pulley attached to the second link, ω ₂₁ , the angular velocity of the pulley attached to the second motor, ω ₀₁ , both defined for the first link Defined as a ratio. The figure graphically shows the transmission ratio r ₂₀ for different l ₂ / l ₁ .
The outline of the non-circular pulley (s) for the band drive that drives the second link is calculated to achieve the transmission ratio r ₂₀ 272 according to FIG. An example of a pulley profile is shown in FIG. 6A and will be described with respect to FIGS. 55A and 55B.

The transmission ratio r ₃₁ of the band drive that constrains the orientation of the third link 162 may be the same as shown in FIG. 4 for the embodiment of FIGS. The transmission ratio r ₃₁ is defined for the second link, the angular velocity of the pulley attached to the third link, ω ₃₂ , the angular velocity of the pulley attached to the first link, ω ₁₂ Defined as a ratio. The figure graphically illustrates the transmission ratio r ₃₁ for different l ₂ / l ₁ (0.5 to 1.0 in 0.1 increments and 1.0 to 2.0 in 0.2 increments). Yes. The outer shape of the non-circular pulley (s) for the band drive that binds the third link 162 may be calculated to achieve the transmission ratio r _{31 according} to FIG. An example of the pulley profile is shown in FIG. 6A.

In the illustrated embodiment, a longer reach is obtained compared to an equi-link arm having the same storage volume while using a non-circular pulley or other suitable mechanism to constrain the end effector as described. May be. Compared to the embodiment disclosed in FIGS. 1 and 2, another band drive having a non-circular pulley may replace the conventional band drive on the shoulder shaft 18. In alternative aspects, the first link may be driven either by a motor, either directly or via any type of coupling device or transmission mechanism, for example using any suitable transmission ratio. May be. Alternatively, the band drive that operates the second link and binds the third link can be a belt drive, a cable drive, a non-circular gear, a linkage-based mechanism, or any combination of the above, etc. It may be replaced by any other mechanism having equivalent functionality. In addition, the third link, as shown in FIG. 9, causes the end effector to move radially through a conventional two-band mechanism that synchronizes the third link to a pulley driven by a second motor. It may be constrained to hold. Alternatively, the two-stage band mechanism may be replaced by any other suitable mechanism, such as a belt drive, cable drive, gear drive, linkage-based mechanism or any combination of the above. In addition, the end effector may be radially oriented but need not be. For example, the end effector may be positioned with any suitable offset relative to the third link and may be oriented in any suitable direction. In alternative aspects, the third link may carry more than one end effector or substrate. Here, any suitable number of end effectors and / or material holders can be carried by the third link. Further, the joint length of the forearm may be smaller than the joint length of the upper arm, for example, as represented by l ₂ / l ₁ <1 in FIG.

  Referring now to FIG. 9, an alternative robot 300 is shown. In robot 300, the third link is constrained to hold the end effector radially through a conventional two-stage band mechanism that synchronizes the third link to a pulley driven by a second motor. May be. The robot 300 is shown having a drive 12 and an arm 302. The arm 302 may have an upper arm or first link 304 that is coupled to the shaft 64 and is rotatable about the central or shoulder axis 18. The arm 302 has a forearm or second link 308 that is rotatably coupled to the upper arm 304 at an elbow axis 306. The links 304, 308 may have different lengths as described above. The third link or end effector 312 is rotatably coupled to the second link or forearm 308 at the wrist axis 310, and the end effector 312 is rotated by links 304, 308 having unequal link lengths as described above. The substrate 28 may be transported along a radial path without being accompanied. In the illustrated embodiment, the shaft 62 is coupled to two pulleys 314, 316. Here, the pulley 314 may be circular, and the pulley 316 may be non-circular. Here, the circular pulley 314 holds the end effector 312 radially via a conventional two-stage (318, 320) circular band mechanism that synchronizes the third link 312 to the pulley driven by the shaft 62. Thus, the third link 312 is bound. The two-stage mechanism 318, 320 has a pulley 314 that is coupled to an elbow pulley 324 by a band 322. The elbow pulley 324 is coupled to the elbow pulley 326, and the elbow pulley 326 is coupled to the wrist pulley 328 via the band 330. The forearm 308 may further include an elbow pulley 332 that is circular and may be coupled to the shoulder pulley 316 through a band 334. The shoulder pulley is non-circular and may be coupled to pulley 314 and shaft 62.

  The disclosed embodiment is a robot having a robot drive with additional axes, wherein an arm coupled to the robot drive is independently operable with the ability to carry one or more substrates. It may be further embodied with respect to a robot that may have additional end effectors. By way of example, two independently operable arm linkages or arms having a “dual arm” configuration, each independently operable arm being one, two or any suitable number of substrates An arm may be provided that may have an end effector adapted to support the. As described herein and below, each independently operable arm may have first and second links having different link lengths, and an end effector and support coupled to the link. The processed substrate operates as described above and follows the path. Here, the substrate transport apparatus may include first and second independently movable arm assemblies that transport the first and second substrates and are coupled to a drive unit on a common rotation axis. First and second substrate supports are coupled to the first and second arm assemblies on first and second wrist rotation axes, respectively. One or both of the first and second arm assemblies rotate about a common axis of rotation during expansion and contraction. The first and second wrist rotation axes move along first and second wrist paths offset from the radial path during extension and contraction, parallel to the radial path relative to the common rotation axis. The first and second substrate supports move parallel to the radial path without rotation during expansion and contraction. In the following, variations of the disclosed embodiments having a plurality of independently operable arms are provided. Here, in alternative aspects, any suitable combination of features may be provided.

  10A and 10B, there are shown a top view and a side view, respectively, of a robot 350 having a dual arm mechanism. The robot 350 has a common upper arm 354 and an arm 352 having independently operable forearms 356, 358 each having a respective end effector 360, 362. In the illustrated embodiment, both linkages are shown in their retracted positions. The end effector lateral offset 366 corresponds to the difference in length between the joints of the upper arm 354 and the forearms 356, 358. In the illustrated embodiment, the upper arms have the same length and may be longer than the forearms. Further, the end effectors 360, 362 are positioned above the forearms 356, 358. 11A and 11B, there are shown a top view and a side view, respectively, of a robot 375 having an alternative configuration of arms. In the illustrated embodiment, the arm 377 may have features as described with respect to FIGS. 10A and 10B, both linkages being shown in their retracted positions. In this configuration, a third link with an upper linkage end effector 382 is provided under the forearm 380 to reduce the vertical spacing between the two end effectors 382, 384. Here, a similar effect may be achieved by stepping (368) and lowering the upper end effector 362 in the configuration of FIGS. 10A and 10B. Referring also to FIGS. 12 and 13, the internal mechanisms of robots 350 and 375, respectively, used to drive the individual links of the arms of FIGS. 10 and 11 are shown. In the illustrated embodiment, the drive 390 may be a first and second rotor stator mechanism that respectively drive concentric shafts 398, 400, and 402 and have position encoders 404, 406, and 408, respectively. And third drive motors 392, 394, and 396. The Z driving device 410 may drive the motor in the vertical direction. In this case, the motor may be partially or fully contained within the housing 412 and the bellows 414 seals the internal volume of the housing 412 to the chamber 416 and the internal volume and the interior of the chamber 416 may be vacuum or other It may operate in an isolated environment such as things. In the illustrated embodiment, the common upper arm 354 is driven by a single motor 396. Each of the two forearms 356, 358 pivots on a common shaft 420 at the elbow of the upper arm 354 and is respectively driven by motors 394, 396 through band drives 422, 424, which may have conventional pulleys, respectively. Driven independently. The third links with end effectors 360, 362 are respectively constrained by band drives 426, 428, each having at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. Here, the band drive within each of the linkages may be designed using the methodology described for FIGS. 1 and 2, and the kinematic equations presented for FIGS. It may be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts 398, 400, 402 of the robot need to move the same amount in the direction of arm rotation. The common upper arm drive shaft and the drive shaft coupled to the forearm associated with the active end effector for one of the end effectors to radially expand and contract along a linear path are shown in FIG. It is necessary to move in accordance with the inverse kinematic equation for 2. At the same time, the drive shaft coupled to the other forearm needs to rotate in synchrony with the common upper arm drive shaft in order for the inactive end effector to remain contracted. Referring also to FIGS. 14A, 14B and 14C, the arms of FIGS. 11A and 11B are shown as the upper and lower linkages extend. Here, the inactive linkages 356, 360 rotate while the active linkages 358, 362 extend. As an example, the upper linkages 358, 362 rotate as the lower linkages 356, 360 extend, and the lower linkages 356, 360 rotate as the upper linkages 358, 362 extend. In the disclosed embodiment of FIGS. 10 and 11, assembly and control can be simplified, in which case the arm mechanism may be used on a coaxial drive without a motion seal, On the other hand, it provides a longer reach compared to an equal link length arm having the same storage volume. Here, no bridge is used to support any of the end effectors. In the illustrated embodiment, the inactive arm rotates while the active arm extends. One of the wrist joints moves above the lower end effector (closer to the wafer than in the case of an equal link mechanism).

  Referring now to FIGS. 15A and 15B, there are shown a top view and a side view, respectively, of a robot 450 having a dual arm mechanism. The robot 450 has a common upper arm 454 and an arm 452 having independently operable forearms 456, 458 each having a respective end effector 460, 462. In the illustrated embodiment, both linkages are shown in their retracted positions. The lateral offsets 466, 486 of the end effectors 460, 462 correspond to the difference between the joint lengths of the upper arm 454 and the forearms 456, 458. In the illustrated embodiment, the upper arms have the same length and may be longer than the forearms. Further, the end effectors 460, 462 are positioned above the forearms 456, 458. Referring also to FIGS. 16A and 16B, top and side views, respectively, of a robot 475 having an alternative configuration of arms are shown. Again, as before, both linkages are shown in their contracted positions. In this configuration, the third linkage and end effector 482 of the left linkage is provided under the forearm 480 to reduce the vertical spacing between the two end effectors 482, 484. Similar effects can be achieved by stepping (468) the upper end effector of the configuration of FIGS. 15A and 15B. Alternatively, a bridge can be used to support one of the end effectors. The integrated upper arm link 454 may be a single piece, as shown in FIGS. 15 and 16, or two or more portions 470, 472 as shown in the examples of FIGS. 17A and 17B. May be formed. Here, the two-part design may be provided as lighter and with less material, and the left 472 and right 470 parts may be the same component. Here, the two-part design may also have provisions for adjusting the angular offset between the left and right parts. These facilities can be useful when different contraction positions need to be supported. Referring also to FIGS. 18 and 19, the internal mechanisms used to drive the individual links of the arms of FIGS. 15 and 16 are shown, respectively. The integrated upper arm 454 is shown to be driven with the shaft 402 by a single motor. Each of the two forearms 456, 458 is independently driven by a single motor through shafts 400, 398, respectively, through band drives 490, 492 having conventional pulleys, respectively. Here, the links 456, 458 rotate on separate axes 494, 496, respectively. The third links with end effectors 460, 462 are respectively constrained by band drives 498, 500 each having at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. Here, the band drives 498, 500 within each of the linkages 456, 460 and 458, 462 are designed using the methodology described for FIGS. Here, the kinematic equations presented for FIGS. 1 and 2 may be used for each of the dual arm two linkages 456, 460 and 458, 462 as well. In order for the arm 452 to rotate, all three drive shafts 398, 400, 402 of the robot need to move the same amount in the direction of arm rotation. The common upper arm drive shaft and the drive shaft coupled to the forearm associated with the active end effector for one of the end effectors to radially expand and contract along a linear path are shown in FIG. It is necessary to move in accordance with the inverse kinematic equation presented for 2. At the same time, the drive shaft coupled to the other forearm needs to rotate in synchrony with the common upper arm drive shaft in order for the inactive end effector to remain contracted. Referring also to FIGS. 20A, 20B, and 20C, the arms of FIGS. 16A and 16B are shown as the left 458,462 and right 456,460 linkages extend. Note that inactive linkages 456, 460 rotate while active linkages 458, 462 extend. Here, the right linkage 456, 460 rotates as the left linkage 458, 462 extends, and the left linkage 458, 462 rotates as the right linkage 456, 460 extends. The illustrated embodiment takes advantage of the fact that the three-dimensional link design is easy to assemble and control, and the advantage of a coaxial drive, for example, without a motion seal, while the same storage volume. Provides a longer reach compared to an equal link arm having Here, no bridge is used to support any of the end effectors. Here, the inactive arm rotates while the active arm extends. One of the wrist joints moves above the lower end effector closer to the wafer than in the case of an equal link mechanism. This can be avoided by using a bridge (not shown) for supporting the upper end effector. In this case, the unsupported length of the bridge can be longer compared to the equilink arm design. Further, the angle of contraction is more difficult to change compared to a configuration with a common elbow joint as seen in FIGS. 10 and 11, and an independent dual arm as seen in FIGS. 21 and 22, for example. Can be.

  Referring now to FIGS. 21A and 21B, there are shown a top view and a side view, respectively, of a robot 520 having independent dual arms 522, 524. In the illustrated embodiment, both linkages 522, 524 are shown in their retracted positions. Arm 522 has a third link with independently operable upper arm 526, forearm 528, and end effector 530. Arm 524 has a third link with independently operable upper arm 532, forearm 534, and end effector 536. In the illustrated embodiment, forearms 528, 534 are shown longer than upper arms 526, 532, and end effectors 530, 536 are positioned above forearms 528, 534, respectively. Referring also to FIGS. 22A and 22B, there is shown a top view and a side view of a robot 550 having features similar to that of robot 520 with an alternative configuration of arms, both of which are their contractions. Shown in position. In this configuration, the third linkage of the left linkage and the end effector 552 are provided under the forearm 554 to reduce the vertical spacing between the two end effectors. Similar effects can be achieved by lowering the upper end effector of the configuration of FIG. Alternatively, a bridge can be used to support one of the end effectors. 21 and 22, the right upper arm 532 is disposed below the left upper arm 526. Alternatively, for example, the upper left side may be located above the right upper arm, in which case one linkage can be nested within the other. Referring also to FIG. 23, the internal mechanism used to drive the individual links of the arms of FIGS. 21A and 21B is shown. Here, for the sake of clarity of illustration, the height of the link is adjusted in order to avoid overlapping of components. Each of the two upper arms 526, 532 is independently driven by a single motor through a respective shaft 398, 402. The forearms 528, 534 are coupled to the third motor via the shaft 400 via band mechanisms 570, 572 each having at least one non-circular pulley. Third links 530, 536 having end effectors are constrained by band drives 574, 576 each having at least one non-circular pulley. The band drive causes one rotation of the upper arms 526, 532 to cause the corresponding linkages 528, 530 and 534, 536, respectively, to expand and contract along a straight line while the other linkage remains stationary. Designed to. The band drive within each of the linkages may be designed using the methodology described with respect to FIGS. 5 and 6, and the kinematic equations presented for FIGS. Can be used for each of the linkages. In order for the arm to rotate, all three drive shafts 398, 400, 402 of the robot need to move the same amount in the direction of arm rotation. In order for one of the end effectors to radially expand and contract along a linear path, the upper arm drive shaft associated with the active end effector needs to be rotated according to the inverse kinematic equations for FIGS. Yes, the other two drive shafts need to be held stationary. Referring also to FIGS. 24A, 24B and 24C, the arm of FIG. 22 is shown as the left and right 522 and 524 linkages extend. Note that the inactive linkage 524 remains stationary while the active linkage 522 extends. That is, the left linkage 522 does not move while the right linkage 524 extends, and the right linkage 524 does not move when the left linkage 522 extends. The illustrated embodiment provides longer reach compared to an equilink arm design having the same storage volume. Here, no bridge is used to support any of the end effectors, and the inactive linkage remains stationary while the active linkage extends. An active linkage can stretch or contract faster without loading, potentially resulting in higher throughput. The illustrated embodiment has two more band drives with non-circular pulleys instead of the conventional one and can be more complex than shown in FIGS. 15 and 16. One of the wrist joints moves over the lower end effector as seen in FIG. This can be avoided by using a bridge (not shown) for supporting the upper end effector. In this case, the unsupported length of the bridge is longer compared to the equilink arm design.

  Referring now to FIGS. 25A and 25B, a top view and a side view of a robot 600 having an arm 602 is shown, respectively. In the illustrated embodiment, both linkages are shown in their retracted positions. The end effector lateral offset 604 corresponds to the difference between the joint lengths of the upper arm 606 and the forearms 608, 612. Here, in this embodiment, the forearms 608 and 612 are shorter than the common upper arm 606. The internal mechanism used to drive the individual links of the arms may be similar to FIGS. 10-13, for example, as in FIG. 13, but the forearm in this example is shorter than the common upper arm . Here, the common upper arm is driven by one motor. Each of the two forearms is independently driven by a motor through a band drive having a conventional pulley. The third links 614, 616 having end effectors are constrained by a band drive, each having at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. The band drive in each of the linkages may be designed using the methodology described for FIGS. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. Referring also to FIGS. 26A, 26B, and 26C, the arms of FIGS. 25A and 25B are shown as the upper linkages 612, 616 extend. The end effector lateral offset 604 corresponds to the difference between the joint lengths of the upper arm and the forearm, and the wrist joint moves along a straight line offset by this difference with respect to the center trajectory of the wafer. Note that inactive linkage 608, 614 rotates while active linkage 612, 616 extends. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Here, FIG. 26A shows the arm with both linkages in the retracted position. FIG. 26B shows partially extended upper linkages 612, 616 where the upper linkage wrist joint is closest to the wafer carried by the lower linkage. It is observed that the wrist joint of the upper linkage does not move directly above the wafer (although it moves in a plane above the wafer). FIG. 26C shows further extension of the upper linkages 612, 616. FIG. The illustrated embodiment can provide ease of assembly and control, and may be used on a coaxial or triaxial drive without a motion seal, or other suitable drive. Here, the bridge need not be used to support any of the end effectors. The wrist joint of the upper linkage does not move directly over the wafer on the lower end effector as in the case of an equilink design (although it moves in a plane above the wafer on the lower end effector). Here, the inactive arm rotates while the active arm extends. The elbow joint can become more complex, which can lead to a larger turning radius or shorter reach. Here, the arms may be higher than the arms shown in FIGS. 30 and 31 and FIG. 33 due to the overlap of the forearms 608,612.

  Referring now to FIGS. 27A and 27B, a top view and a side view of a robot 630 having an arm 632 is shown, respectively. Except that the forearms 638, 640 are shown to have a shorter link length than the upper arm 636, the arms 632 may have features similar to those disclosed with respect to FIGS. Both linkages are shown in their contracted positions. The lateral offset 634 of the end effector 642, 646 corresponds to the difference between the joint lengths of the upper arm 636 and the forearms 638, 640. The integrated upper arm link 636 may be a single piece, as shown in FIGS. 27A and 27B, or there may be more than one upper arm link, as shown in the example of FIGS. 28A and 28B. The two-part design may be lighter with less material, and the left 636 'and right 636 "parts may be the same component Good. For example, if different retracted positions need to be supported, allowance for adjustment of the angular offset between the left 636 'and right 636 "portions may be provided. The internal mechanism used to drive may be similar to that in Figures 15-19, for example as seen in Figure 19. The common upper arm 636 is driven by one motor. Each of the two forearms 638, 640 is independently driven by a motor through a band drive with a conventional pulley, and a third link with end effectors 642, 646 includes an upper arm 636 and a forearm 638, It may be constrained by a band drive that each has at least one non-circular pulley that offsets the 640 unequal length effect. The band drive in each of the cages may be designed using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 are similarly dual-armed. It may be used for each of the two linkages: Referring also to Figures 29A, 29B and 29C, the arms of Figures 27A and 27B are shown as the right upper linkage 640, 646 extends. The end effector lateral offset 634 corresponds to the difference in length between the upper and forearm joints, and the wrist joint moves along a straight line offset by this difference relative to the center trajectory of the wafer. Inactive linkages 638, 642 rotate while active linkages 640, 646 extend, eg, as the lower linkage extends. The upper linkage rotates and the lower linkage rotates as the upper linkage extends In Figures 29A, 29B and 29C, Figure 29A shows the arm with both linkages in the retracted position. The wrist joint of the right upper linkage 640, 646 shows the partially extended right upper linkage 640, 646 in a position closest to the wafer carried by the left lower linkage 638, 642. Here, the right side The upper joint 640, 646 wrist joint does not move directly over the wafer, but the wrist joint moves in a plane above the wafer, and Figure 29C shows the right upper linkage 640, 646 extending further away. The illustrated embodiment is a three-dimensional link design, assembly and control Easily soluble, and coaxial drive device, for example, to have no dynamic seals, take advantage of. No bridge is used to support any of the end effectors. The wrist joint of the upper linkage does not move directly over the wafer on the lower end effector as in the equilink design. However, the wrist joint moves in a plane above the wafer on the lower end effector. Inactive arms 638, 642 rotate while active arms 640, 646 extend. The contraction angle is more difficult to change compared to, for example, a configuration with a common elbow joint as seen in FIGS. 25A and 25B and an independent dual arm as seen in FIGS. 33A and 33B, for example. Further, since the forearm 640 is shown at a higher position than the forearm 638, the position of the arm is shown higher than in FIGS. 30 and 31 and FIGS. 33A and 33B.

  30A and 30B, a top view and a side view of a robot 660 having an arm 662 are shown, respectively. The arm 662 may have features as described with respect to FIGS. 27-29, but as described, uses a bridge and has two forearms at the same height. Both linkages are shown in their contracted positions. The end effector lateral offset 664 corresponds to the difference in joint length between the upper arm 666 and the forearms 668, 670. The integrated upper arm link 666 can be a single piece, as shown in FIGS. 30A and 30B, or more than one upper arm link can be used as shown in the example of FIGS. 31A and 31B. Portion 666 ', 666 ". The internal mechanism used to drive the individual links of the arms may be the same as shown for FIGS. In this case, the forearms 668, 670 are shorter than the upper arm 666. The common upper arm 666 is driven by one motor, each of the two forearms 668, 670 having a conventional pulley by one motor. Driven independently through a band drive, a third link with end effectors 672, 674 compensates for the effects of unequal length on the upper arm and forearm, and less Are also constrained by a band drive, each having one non-circular pulley, and the band drive in each of the linkages may be designed using the methodology described for FIGS. The kinematic equations presented for and 2 can similarly be used for each of the two linkages of the dual arm, the third link and end effector 674 linked to the upper end effector section 682, link 670 and 674 has a side offset support 684 offset from the wrist axis between 674 and further includes a lower support 686 that couples the wrist axis to the offset support 684. Bridge 680 is illustrated below. As can be seen with respect to 32, a third link and end effector 672 (wafer And forearms 668 and 670 can be packed at the same level while providing clearance for the interleaves of bridge 680. Bridge 680 is associated with, for example, two wrist joints , Every moving part further provides a mechanism that is located below the wafer surface during transfer, and similarly referring to Figures 32A, 32B, 32C and 32D, the right linkages 670, 674 as shown in FIGS. A top view of the robot arm at 30B is shown, where the end effector lateral offset 664 corresponds to the difference in joint length between the upper arm 666 and the forearm 670, and the wrist joint 690 is relative to the center trajectory of the wafer 692. Move along a straight line offset by the difference of the lever active linkages 670, 674 During the extension, inactive linkages 668,672 It should be noted that the rotation. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. 32A, 32B, 32C and 32D, FIG. 32A shows the arm with both linkages in the retracted position. FIG. 32B shows a partial extension in a position corresponding to (or close to the worst case gap) between the bridge 680 of the right linkage 670, 674 and the end effector 672 of the left linkage 668, 672. The right linkage 670, 674 is shown. FIG. 32C shows the partially extended right linkage 670, 674 in a position when the forearm 670 is aligned with the upper arm 666 ". The lateral offset of the end effector corresponds to the difference in joint length between the upper arm and the forearm. The axis of the wrist joint 690 moves along a straight line offset by this difference with respect to the center trajectory of the wafer 692. Figure 32D shows the further extension of the right linkage 670, 674. Embodiments that benefit from a side-by-side dual scara arrangement, such as a slim profile, a three-dimensional link design, and a coaxial drive, resulting in a shallow chamber with a small volume. Combining the advantages: the bridge 680 on the right linkage 670, 674 is much lower and the vertical member 684 and the wrist 690 Its unsupported length is shorter than in the case of prior art dual coaxial scalar arms and all of the joints are below the end effector, where the inactive arms 670, 674 are inactive while being extended. The arms 668, 672 rotate, and as described below, in another aspect of the disclosed embodiment, a different band drive with a non-circular pulley is substituted for the conventional one disclosed herein. An arm that does not exhibit this behavior may be provided, alternatively, the bridge that supports the upper end effector is similar to that described above for Figures 25A, 25B, 27, and 28. May be eliminated by utilizing this mechanism.

  Referring now to FIGS. 33A and 33B, a top view and a side view of a robot 700 having an arm 702 are shown, respectively. Arm 702 may have features similar to those of the arms shown in FIGS. 21-23, but the forearm length is shorter than the upper arm length, using a bridge as described for bridge 680 as an example, The forearms are placed at the same height. Both linkages are shown in their contracted positions. In FIGS. 33A and 33B, the right upper arm 708 is positioned above the left upper arm 706. Alternatively, the left upper portion 706 may be disposed above the right upper arm 708. Similarly, the third link and end effector 716 of the right linkage 712, 716 feature a bridge that extends directly above the third link and end effector 714 of the left linkage 710, 714. Alternatively, the third link and end effector 714 of the left linkage 710, 714 may feature a bridge that may extend directly above the third link and end effector 716 of the right linkage 712, 716. The internal mechanism used to drive the individual links of the arms may be similar to the embodiment shown in FIGS. Each of the two upper arms 706 and 708 is independently driven by one motor. The forearms 710, 712 are coupled to the third motor via a band mechanism each having at least one non-circular pulley. The third links 714, 716 having end effectors are constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms 706, 708 causes the corresponding linkage to extend and retract along a straight line while the other linkage remains stationary. The band drive within each of the linkages is designed using the methodology described for the embodiment shown in FIGS. The kinematic equations presented for the embodiment shown in FIGS. 5 and 6 can also be used for each of the dual arm two linkages. Referring also to FIGS. 34A, 34B and 34C, the arms of FIGS. 33A and 33B are shown as the right linkage 708, 712, 716 extends. Here, the inactive linkages 706, 710, 714 remain stationary while the active linkages 712, 716 extend. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. The illustrated embodiment combines the advantages of a parallel dual scalar mechanism, such as a slim profile and a coaxial drive resulting in a shallow chamber with a small volume. The bridge on the right linkage is much lower, its unsupported length is shorter than in the case of existing coaxial dual scalar arms and all of the joints are below the end effector. The inactive linkage remains stationary while the active linkage extends. An active linkage can stretch or contract faster without loading, potentially resulting in higher throughput. Alternatively, the bridge supporting the upper end effector may be eliminated by utilizing a mechanism similar to that described for FIGS.

  Referring now to FIGS. 35A and 35B, top and side views of a robot 730 having arms 732 with both linkages shown in their retracted positions are shown. Each linkage has dual-holder end-effectors 740, 742 that each support two substrates that are offset from each other for a total of four supportable substrates. The internal mechanism used to drive the individual links of arm 732 may be the same as in FIGS. 10 and 11, eg, FIG. The common upper arm 734 is driven by one motor. Each of the two forearms 736, 738 is independently driven by a motor through a band drive with a conventional pulley. The third link with end effectors 740, 742 is constrained by a band drive that each has at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. The illustrated embodiment has a forearm that is longer than the upper arm. Alternatively, the forearm may be shorter. The band drive within each of the linkages is designed using the methodology described for FIGS. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. Referring also to FIG. 36, the arms of FIGS. 35A and 35B are shown as one linkage 738, 742 extends. Note that the inactive linkage 736, 740 rotates while the active linkage 738, 742 extends. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Compared to FIGS. 37 and 38, the end effector need not be shaped to avoid interference with the opposite elbow.

  Referring now to FIGS. 37A and 37B, top and side views of a robot having an arm 750 are shown, respectively. Both linkages are shown in their retracted positions, and each linkage has a dual cage end effector 758,760. The integrated upper arm link 752 may be a single piece, as shown in FIGS. 37A and 37B, or the upper arm link may be two or more, as shown in the example of FIGS. 38A and 38B. May be formed by portions 752 ', 752 ". The internal mechanism used to drive the individual links of the arms may be the same as in FIGS. 15-19, eg, FIG. 19. Integrated. The upper arm 752 is driven by a single motor, and each of the two forearms 754, 756 is independently driven by a single motor through a band drive having a conventional pulley, a third link having an end effector 758, 760 are constrained by band drives each having at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. The embodiment shown has a longer forearm than the upper arm Alternatively, the forearm may be shorter The band drive within each of the linkages uses the methodology described for FIGS. The kinematic equations presented for Figures 1 and 2 may be used for each of the two linkages of the dual arm as well. All of the drive shafts need to move the same amount in the direction of arm rotation, so that one of the end effector assemblies extends and contracts radially along a linear path, so that the common upper arm drive shaft and the active linkage The drive shaft coupled to the forearm associated with is required to move in concert according to the inverse kinematic equations for Figures 1 and 2. At the same time, the other forearm The drive shaft coupled to the shaft needs to rotate in synchronism with the common upper arm drive shaft in order for the inactive linkage to remain contracted, referring also to FIG. 37A and 37B are shown as they extend, where the inactive linkages 754, 758 rotate while the active linkage extends, eg, the right linkage as the left linkage extends. The left linkage rotates as the right linkage extends, the illustrated embodiment has no bridge, and the upper wrist moves over one of the wafers on the lower end effector, where the arm And end effector so that the upper elbow passes without touching the lower end effector There needs to be designed.

  Referring now to FIGS. 40A and 40B, a top view and a side view of a robot 780 having an arm 782 are shown, respectively. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors 792, 794. The internal mechanism used to drive the individual links of the arms may be the same as in FIGS. Each of the two upper arms 784 and 786 is independently driven by one motor. The forearms 788, 790 are coupled to the third motor via a band mechanism each having at least one non-circular pulley. A third link having end effectors 792, 794 is constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that one rotation of the upper arm causes the corresponding linkage to extend and contract along a straight line while the other linkage remains stationary. The illustrated embodiment has a forearm that is longer than the upper arm. Alternatively, the forearm may be shorter. The band drive within each of the linkages is designed using the methodology described for FIGS. The kinematic equations presented for FIGS. 5 and 6 can similarly be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of arm rotation. In order for one of the end effector assemblies to radially extend and retract along a linear path, the upper arm drive shaft associated with the active linkage needs to be rotated according to the inverse kinematic equations for FIGS. Yes, the other two drive shafts need to be held stationary. Referring also to FIG. 41, the arms of FIGS. 40A and 40B are shown as one linkage 784, 788, 794 extends. Note that inactive linkages 786, 790, 792 may remain stationary while active linkages 784, 788, 794 extend. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. Alternatively, the left and right linkages may be independently moved simultaneously in the radial direction, as seen, for example, in FIG. 42 where the right linkage is slightly extended independently compared to FIG. The motion of the elbow of the upper linkage can be limited due to potential interference with the wafer on the lower end effector. This can limit the reach of the robot, as shown in FIG. This limitation may be relaxed by slightly extending the lower linkage to provide additional clearance and achieve full reach, as shown in FIG. The illustrated embodiment does not have a bridge. The wrist of the upper linkage may move over the wafer on the lower end effector.

  43A and 43B, a top view and a side view of a robot 810 having an arm 812 are shown, respectively. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors 820, 822. The internal mechanism used to drive the individual links of the arms may be the same as in FIGS. The common upper arm 814 is driven by one motor. Each of the two forearms 816, 818 is independently driven by a motor through a conventional band drive having a pulley. The third link with end effectors 820, 822 is constrained by a band drive that each has at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive within each of the linkages is designed using the methodology described for FIGS. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. Referring also to FIGS. 44 and 45, the arms of FIGS. 43A and 43B are shown as the upper linkages 818, 822 extend. Note that inactive linkage 816, 820 rotates while active linkage 818, 822 extends. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. 44 and 45 illustrate that the wrist joint 824 of the upper linkage 818, 822 does not move directly over the wafer 826 carried by the lower linkage 816, 820 of the arm. The illustrated embodiment does not have a bridge. Compared to FIGS. 46 and 47, the end effector need not be shaped to avoid interference with the opposite elbow.

  46A and 46B, a top view and a side view of a robot 840 having an arm 842 are shown, respectively. Both linkages are shown in their retracted positions, and each linkage has dual retainer end effectors 850, 852. The integrated upper arm link 844 can be a single piece as shown in FIGS. 46A and 46B, or more than one upper arm link can be used as shown in the example of FIGS. 47A and 47B. 844 ', 844 ". The internal mechanism used to drive the individual links of the arms may be the same as in FIGS. 15-19, eg, FIG. The upper arm 844 is driven by a single motor, and each of the two forearms 846, 848 is independently driven by a single motor through a band drive having a conventional pulley, having end effectors 850, 852. The third link is constrained by a band drive, each having at least one non-circular pulley, that counteracts the unequal length effects of the upper and forearms. In the illustrated embodiment, the forearm is shorter than the upper arm, alternatively, the forearm may be longer, a band drive within each of the linkages has been described for FIGS. Designed using a methodology, the kinematic equations presented for Figures 1 and 2 may also be used for each of the two linkages of the dual arm. All three drive shafts need to move the same amount in the direction of arm rotation, because one of the end effector assemblies extends and contracts radially along a linear path, and the common upper arm 844 drive shaft, and The drive shaft coupled to the forearm associated with the active linkage needs to move in concert according to the inverse kinematic equations for FIGS. In addition, the drive shaft coupled to the other forearm must rotate in synchrony with the common upper arm drive shaft in order for the inactive linkage to remain contracted, see also FIGS. 46A and 46B are shown as the upper linkage 848, 852 extends, where the inactive linkage 846, 850 rotates while the active linkage 848, 852 extends. The upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends FIGS. The embodiment shown is a block diagram. Tsu not have a di, wrist joint of the upper linkage do not move directly above the wafer carried by the lower linkage. Here, the inactive arm rotates smaller, allowing a higher rate of movement when the active arm extends or contracts without load.

  50A and 50B, top and side views of a robot 870 having an arm 872 are shown. Both linkages are shown in their retracted positions, and each linkage has a dual cage end effector 880,882. The integrated upper arm link 874 can be a single piece, as shown in FIGS. 50A and 50B, or there can be more than one upper arm link, as shown in the example of FIGS. 47A and 47B. It can be formed by the part. The internal mechanism used to drive the individual links of the arms may be the same as in FIGS. The integrated upper arm 874 is driven by one motor. Each of the two forearms 876, 878 is independently driven by a single motor through a band drive having a conventional pulley. The third link with the end effector is constrained by a band drive that each has at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive in each of the linkages may be designed using the methodology described for FIGS. The kinematic equations presented for FIGS. 1 and 2 may similarly be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of arm rotation. A drive shaft coupled to a common upper arm 874 drive shaft and a forearm associated with an active linkage for one of the end effector assemblies to radially expand and contract along a linear path is shown in FIGS. Need to move in accordance with the inverse kinematic equation for At the same time, the drive shaft coupled to the other forearm needs to rotate in synchrony with the drive shaft of the common upper arm 874 in order for the inactive linkage to remain contracted. Referring also to FIG. 51, the arms of FIGS. 50A and 50B are shown with one linkage 878, 882 extended. Here, the inactive linkage 876, 880 rotates while the active linkage 878, 882 extends. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. The illustrated embodiment uses shorter short bands and has short forearm links that can be more rigid, with the forearms placed in parallel to facilitate shallow chambers. Here, a short link may cause greater rotation of the inactive arm compared to FIGS. 46 and 47, which may be addressed by a longer upper arm. A bridge 884 is provided and the arm and end effector may be designed such that the bridge 884 passes through without touching the inactive end effector 880 during the extension movement. Here, the base of the end effector features an angled shape 886 as shown.

  52A and 52B, a top view and a side view of a robot 900 having an arm 902 are shown, respectively. Both linkages are shown in their retracted positions and each linkage has a dual cage end effector. The internal mechanism used to drive the individual links of the arms may be the same as in FIGS. Each of the two upper arms 904 and 906 is independently driven by one motor. The forearms 908, 910 are coupled to the third motor via a band mechanism each having at least one non-circular pulley. A third link having end effectors 912, 914 is constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that rotation of one of the upper arms 904, 906 causes the corresponding linkage to expand and contract along a straight line while the other linkage remains stationary. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer. The band drive within each of the linkages is designed using the methodology described for FIGS. The kinematic equations presented for FIGS. 5-6 may similarly be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts of the robot must move the same amount in the direction of arm rotation. In order for one of the end effector assemblies to radially expand and contract along a linear path, the upper arm drive shaft associated with the active linkage needs to be rotated according to the inverse kinematic equations for FIGS. Yes, the other two drive shafts need to be held stationary. Referring also to FIG. 53, the arms of FIGS. 52A and 52B are shown with one linkage 906, 910, 914 extended. Note that the inactive linkages 904, 908, 912 remain stationary while the active linkages 906, 910, 914 extend with the bridge 916. That is, the left linkage need not move while the right linkage is extended, and the right linkage need not move when the left linkage is extended. However, the linkage may be moved independently in the radial direction. The illustrated embodiment uses shorter bands, has shorter links that can be more rigid, and parallel forearms that facilitate shallow chambers. Alternatively, the forearm may be longer than the upper arm in a configuration with a bridge.

  54-55, a combined dual arm 930 having opposite end effectors 938, 940 is shown. 54A and 54B show a top view and a side view, respectively, of a robot having an arm. Both linkages are shown in their retracted positions, and the lateral offset of the end effector corresponds to the difference between the joint lengths of the upper arm 932 and the forearms 934,936. The integrated upper arm link 932 can be a single piece, as shown in FIG. 54, or the upper arm link can be formed by two or more parts. As an example, a two part design may be lighter with less material and the left and right parts may be the same component. The internal mechanism used to drive the individual links of the arms may be based on that shown with respect to FIGS. 18 and 19 or another. The common upper arm 932 is driven by one motor. Each of the two forearms 934 and 936 is independently driven by a single motor through a band driving device having a conventional pulley. The third link with end effectors 938, 940 is constrained by a band drive, each having at least one non-circular pulley that offsets the unequal length effects of upper arm 932 and forearms 934, 936. The band drive within each of the linkages is designed using the methodology described with respect to FIG. 1 or otherwise. The kinematic equation presented for FIG. 1 can similarly be used for each of the two linkages of the dual arm. 55A-55C show the arm of FIG. 54 as the first linkage 934, 938 and the second linkage 936, 940 extend from the retracted position. The lateral offset of the end effector corresponds to the difference between the joint lengths of the upper arm 932 and the forearms 934, 936, and the wrist joints 942, 946 are along a straight line offset by this difference with respect to the center trajectory of the wafer. Moving. Note that the inactive linkage rotates while the active linkage extends. For example, the second linkage rotates as the first linkage extends, and the first linkage rotates as the second linkage extends. FIG. 55A shows the arm with both linkages in the retracted position. FIG. 55B shows the first linkage 934, 938 extended. FIG. 55C shows the second linkage 936, 940 extended. Since the forearm moves in the same plane and the end effector moves in the same plane, the illustrated arm has a low profile, allowing a shallow vacuum chamber with a small volume. Since the retracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the containment radius of the arm may be large, and the arm has a chamber diameter determined by the size of the slot valve. It is particularly suitable for applications using a large number of process modules. Because of its low profile, the arm can replace a frog-leg type arm with an opposite end effector. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer, for example in this case the forearm is at different heights and overlaps.

  56-57, an independent dual arm 960 having opposite end effectors 970, 972 is shown. 56A and 56B show top and side views of a robot having an arm. Both linkages are shown in their contracted positions. In FIG. 56, the upper arm 962 of the first linkage is disposed above the upper arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be disposed above the upper arm of the first linkage. The internal mechanism used to drive the individual links of the arms may be based on FIG. 23 or otherwise. Here, each of the two upper arms 962 and 964 may be independently driven by one motor. The forearms 966, 968 are coupled to the third motor via a band mechanism each having at least one non-circular pulley. A third link having end effectors 970, 972 is constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that one rotation of the upper arm causes the corresponding linkage to extend and contract along a straight line while the other linkage remains stationary. The band drive within each of the linkages is designed using the methodology described for FIG. The kinematic equation presented for FIG. 5 can similarly be used for each of the two linkages of the dual arm. 57A-57C show the arm of FIG. 56 as the first linkage 962, 966, 970 and the second linkage 964, 968, 972 extend from the retracted position. Here, the inactive linkage remains stationary (but need not do so) while the active linkage extends. That is, the second linkage does not move while the first linkage extends, and the first linkage does not move when the second linkage extends. Since the forearm moves in the same plane and the end effector moves in the same plane, the arm has a low profile, allowing a shallow vacuum chamber with a small volume. The retracted position of the wrist of one linkage is constrained by the wrist of the other linkage, so the arm retract radius is large, and the arm uses multiple process modules where the slot valve size determines the chamber diameter Especially suitable for Because of its low profile, the arm can replace a frog-leg type arm with an opposite end effector. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer, for example in this case the forearm is at different heights and overlaps.

  Referring now to FIG. 58, a combined dual arm 990 having angularly offset end effectors 998, 1000 is shown. 58A and 58B show top and side views of a robot having an arm. Both linkages are shown in their contracted positions. The end effector lateral offsets 1002, 1004 correspond to the difference in joint length between the upper arm 992 and the forearms 994 996. As shown in FIG. 59, the integrated upper arm link 992 may be a single part or may be formed by two or more parts. The internal mechanism used to drive the individual links of the arms is based on FIGS. 18 and 19 or otherwise. Here, the common upper arm 992 may be driven by one motor. Each of the two forearms 994, 996 may be independently driven by one motor through a band drive having a conventional pulley. The third link with end effectors 998, 1000 is constrained by a band drive that each has at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. The band drive within each of the linkages is designed using the methodology described for FIG. 1 or otherwise. The kinematic equation presented for FIG. 1 can similarly be used for each of the two linkages of the dual arm. Referring also to FIGS. 59A-C, the arm of FIG. 58 is shown as the left 994, 998 and right 996, 1000 linkages extend. The end effector lateral offsets 1002, 1004 correspond to the difference in joint length between the upper arm and the forearm, and the wrist joint moves along a straight line offset by this difference with respect to the center trajectory of the wafer. Here, the inactive linkage rotates while the active linkage extends. For example, the right linkage rotates as the left linkage extends, and the left linkage rotates as the right linkage extends. FIG. 59A shows the arm with both linkages in the retracted position. FIG. 59B shows how the left linkages 994, 998 are extended. FIG. 59C shows the right linkages 996, 1000 extended. Here, the inactive arm rotates while the active arm extends. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer, for example in this case the forearm is at different heights and overlaps. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any separation angle may be provided.

  Referring now to FIG. 60, an independent dual arm 1030 having angularly offset end effectors 1040, 1042 is shown. Here, FIGS. 60A and 60B show a top view and a side view of a robot having an arm. Both linkages are shown in their contracted positions. In FIG. 60, the right upper arm 1034 is disposed below the left upper arm 1032. Alternatively, the upper left side may be located below the right upper arm. The internal mechanism used to drive the individual links of the arm may be based on FIG. Each of the two upper arms 1032 and 1034 may be independently driven by one motor. The forearm is coupled to the third motor via a band mechanism each having at least one non-circular pulley. A third link having end effectors 1040, 1042 is constrained by a band drive, each having at least one non-circular pulley. The band drive is designed such that one rotation of the upper arms 1032, 1034 causes the corresponding linkage to expand and contract along a straight line while the other linkage remains stationary. The band drive in each of the linkages is designed using the methodology described for FIG. 5 or otherwise. The kinematic equation presented for FIG. 5 can similarly be used for each of the two linkages of the dual arm. 61A-61C show the arm of FIG. 60 as the left linkage 1032, 1036, 1040 and then the right linkage 1034, 1038, 1042 extend. Here, the inactive linkage remains stationary (but need not do so) while the active linkage extends. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move when the left linkage extends. Here, the inactive linkage remains stationary while the active linkage extends. In the illustrated embodiment, the forearm is shorter than the upper arm. Alternatively, the forearm may be longer, for example in this case the forearm is at different heights and overlaps. In the illustrated embodiment, the end effectors may be 90 degrees apart. Alternatively, any separation angle may be provided.

  As an example with respect to FIG. 62 or another example, a third link and end effector 1060, 1062, each of which may be referred to as a third link assembly, may have a mass as the corresponding linkage of the arm extends and contracts. The centers 1064, 1066 may be designed to be on or near the linear trajectories of the wrist joints 1068, 1070, respectively. This reduces moments due to inertial forces acting at the center of mass of the third link assembly and reaction forces at the wrist joint, thus reducing the load on the band mechanism that binds the third link assembly. Here, the third link assembly is further designed so that its center of mass is on one side of the wrist joint trajectory when the payload is present and on the other side of the trajectory when no payload is present. Also good. Alternatively, typically the best linear tracking performance is required with the payload loaded, so that the third link assembly has its center of mass when the payload is present, as shown in FIG. It may be designed to be substantially on the wrist joint trajectory. 62, 1L is the straight trajectory of the center of the wrist joint of the left linkage, 2L is the center 1070 of the wrist joint of the left linkage, 3L is the center of mass 1066 of the third link assembly of the left linkage, Is the force acting on the third linkage assembly of the left linkage as the left linkage accelerates at the beginning of the extension movement (or decelerates at the end of the contraction movement) and 5L is the extension of the left linkage The inertial force acting at the center of mass of the third linkage assembly of the left linkage when accelerating at the start of (or decelerating at the end of the contraction movement). Similarly, 1R is the straight trajectory of the right linkage wrist joint center, 2R is the right linkage wrist joint center 1068, 3R is the right linkage third link assembly mass center 1064, and 4R is A force acting on the third linkage assembly of the right linkage when the right linkage is decelerated at the end of the extension movement (or when accelerating at the start of the contraction movement), and 5R is the right linkage of the extension movement. The inertial force acting at the center of mass of the third linkage assembly of the right linkage when decelerating at the end (or when accelerating at the start of the contraction movement). In the illustrated embodiment, a dual wafer end effector is provided. In alternative aspects, any suitable end effector and arm or link geometry may be provided.

  In an alternative aspect, the upper arm in any of the aspects of this embodiment can be driven by a motor, either directly or via any kind of coupling device or transmission mechanism. Any transmission ratio may be used. Alternatively, the band drive that operates the second link and binds the third link can be a belt drive, a cable drive, circular and non-circular gears, a linkage-based mechanism, or any combination of the above Can be replaced by any other mechanism of equivalent functionality. Alternatively, for example, in the dual-arm and quad-arm aspects of this embodiment, the third link of each linkage is the same as the single-arm concept of FIG. The end effector can be constrained to remain radially through a conventional two-stage band mechanism that is synchronized to a pulley driven by two motors. Alternatively, the two-stage band mechanism can be replaced by any other suitable mechanism, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the above. Alternatively, the upper arms in the dual-arm and quad-arm aspects of this embodiment may not be arranged coaxially. The upper arm can have a separate shoulder joint. The two linkages, dual arm and quad arm, need not have the same length of the upper arm and the same length of the forearm. The length of the upper arm of one linkage may be different from the length of the upper arm of the other linkage, and the length of the forearm of one linkage may be different from the length of the forearm of the other linkage. The forearm to upper arm ratio can also be different for the two linkages. In the dual-arm and quad-arm aspects of this embodiment having different heights for the left and right linkage links, the left and right linkages can be interchanged. The two linkages, dual arm and quad arm, do not need to extend along the same direction. The arms can be configured so that each linkage extends in a different direction. The two linkages in any of the aspects of this embodiment are from more or less than three links (first link = upper arm, second link = forearm, third link = link with end effector). It may be. In the dual arm and quad arm aspects of this embodiment, each linkage may have a different number of links. In the single arm aspect of this embodiment, the third link can carry multiple end effectors. Any suitable number of end effectors and / or material holders can be carried by the third link. Similarly, in the dual arm aspect of this embodiment, each linkage can carry any suitable number of end effectors. In either case, the end effectors can be positioned in the same plane, stacked on top of each other, arranged in a combination of the two, or arranged in any other suitable manner. . Further, the configuration of the dual arm, for example, having a filing date of November 6, 2012, entitled “Robot System with Independent Arms”, serial number 13/670, As described with respect to pending US patent application having No. 004, each arm may be independently operable, eg, independently operable in rotation, extension and / or z (vertical) It may be. This application is incorporated herein by reference in its entirety. Accordingly, all such modifications, combinations and variations are encompassed.

  According to one aspect of the exemplary embodiment, the substrate transport apparatus is configured to transport a substrate. The substrate transfer apparatus has a movable arm assembly coupled to a drive unit on a central rotation axis. A substrate support is coupled to the arm assembly on the wrist rotation axis. The arm assembly rotates about the central axis of rotation during extension and contraction. The wrist rotation axis is parallel to the radial path relative to the central rotation axis and then moves along the offset wrist path during expansion and contraction. The substrate support moves parallel to the radial path without rotation during expansion and contraction.

  According to another aspect of the exemplary embodiment, the substrate transport apparatus is configured to transport the first and second substrates. The substrate transport apparatus has first and second independent movable arm assemblies coupled to a drive unit on a common rotation axis. First and second substrate supports are coupled to the first and second arm assemblies on first and second wrist rotation axes, respectively. The first and second arm assemblies rotate about a common axis of rotation during expansion and contraction. The first and second wrist rotation axes move along first and second wrist paths parallel to and offset from a radial path relative to the common rotation axis during extension and contraction. The first and second substrate supports move parallel to the radial path without rotation during expansion and contraction.

  According to another aspect of the exemplary embodiment, the substrate transport apparatus is adapted to transport a substrate. The substrate transfer apparatus has a drive unit and an upper arm that is rotatably coupled to the drive unit, and the upper arm is rotatable about a central axis. The elbow pulley is fixed to the upper arm. A forearm is rotatably coupled to the upper arm. The forearm is rotatable about the elbow axis, and the elbow axis is offset from the central axis by the upper arm link length. The end effector is rotatably coupled to the forearm. The end effector is rotatable about the wrist axis, and the wrist axis is offset from the elbow axis by the forearm link length. The end effector supports the substrate. The wrist pulley is fixed to the end effector. The wrist pulley is coupled to the elbow pulley using a band. The forearm link length is different from the upper arm link length. The end effector is constrained to the upper arm by elbow pulleys, wrist pulleys and bands so that the substrate moves along a linear radial path relative to the central axis.

  According to another aspect of the exemplary embodiment, the substrate transport apparatus is adapted to transport a substrate. The substrate transfer device has a drive unit having first and second rotation drive devices. The upper arm is rotatably coupled to the first rotational drive on a central rotational axis. The forearm is rotatably coupled to the upper arm. The forearm is rotatable about the elbow rotation axis of the upper arm, and the elbow rotation axis is offset from the central rotation axis by the upper arm link length. The forearm is further coupled to the second rotational drive using a forearm coupling device and is driven about the elbow rotation axis by the second rotational drive. The substrate support supports the substrate. The substrate support is rotatably coupled to the forearm and is rotatable about a wrist rotation axis of the forearm. The wrist rotation axis is offset from the elbow rotation axis by the forearm link length. The substrate support is further coupled to the upper arm using a substrate support coupling device and driven about the wrist rotation axis by relative movement between the forearm and the upper arm about the elbow rotation axis. The forearm link length is different from the upper arm link length. The substrate support is constrained by the substrate support coupling device so that the substrate moves along a linear path relative to the central rotational axis.

  According to another aspect of the exemplary embodiment, the linear path is along a direction intersecting the central rotational axis.

  According to another aspect of the exemplary embodiment, the linear path is perpendicular to the central rotational axis and along a direction offset thereto.

  According to another aspect of the exemplary embodiment, the wrist rotation axis moves along a wrist path parallel to the linear path.

  According to another aspect of the exemplary embodiment, the substrate support coupling device includes a band drive having one or more non-circular pulleys.

  According to another aspect of the exemplary embodiment, the forearm coupling device has a band drive having one or more non-circular pulleys.

  According to another aspect of the exemplary embodiment, the transport device is a drive device and a first arm connected to the drive device, wherein the first arm is connected in series with the drive device. A first arm, a second link and an end effector, the first link and the second link having different effective lengths, driven when the first arm is extended or contracted A system for limiting rotation of the end effector relative to the second link to provide substantially linear movement of the end effector relative to the device.

  According to another aspect of the exemplary embodiment, the effective length of the first link is shorter than the effective length of the second link.

  According to another aspect of the exemplary embodiment, the effective length of the first link is longer than the effective length of the second link.

  According to another aspect of the exemplary embodiment, the end effector is between the wrist joint with the second link and the center line of the substrate support, approximately equal to the difference between the effective lengths of the first and second links. With a lateral offset of.

  According to another aspect of the exemplary embodiment, the system for limiting rotation is such that when the first arm is extended or retracted, the wrist joint is offset laterally with respect to the central rotational axis of the drive. The end effector is configured to translate in a maintained state.

  According to another aspect of the exemplary embodiment, a system for limiting rotation of an end effector is substantially radially only of the end effector relative to the drive when the first arm is extended or retracted. Provide exercise.

  According to another aspect of the exemplary embodiment, a system for limiting rotation of an end effector is such that the end effector is oriented radially with respect to the drive regardless of the position of the first and second links. Configured to constrain the orientation of the.

  According to another aspect of the exemplary embodiment, the end effector is configured to support at least two spaced apart substrates thereon, the end effector wrist joint with the second link, and There is a lateral offset between the center of the linear linear motion path of the end effector when one arm is extended or contracted, and the lateral offset is the wrist when the first arm is extended or contracted Provided for substantially translational movement of the end effector with the joint maintained at a lateral offset relative to the central rotational axis of the drive.

  According to another aspect of the exemplary embodiment, a system for limiting rotation includes a band drive having a pulley and a band.

  According to another aspect of the exemplary embodiment, the pulley has at least one non-circular pulley.

  According to another aspect of the exemplary embodiment, the pulley has at least one pulley fixedly connected to the second link or end effector.

  According to another aspect of the exemplary embodiment, the end effector has a substrate support and a leg connecting the substrate support to the wrist joint of the end effector with the second link, and the leg is connected to the wrist joint. A first portion to be connected, a second portion to be connected to the substrate support, and the first and second portions are connected to each other at an angle of about 90 degrees to about 120 degrees.

  According to another aspect of the exemplary embodiment, the end effector has two substrate supports and a leg frame connecting the substrate support to the wrist joint of the end effector with the second link, the leg frame being It is substantially U-shaped with a base and two legs, each leg connected to a separate one of the substrate supports, and the wrist joint is connected to the end effector at a location offset from the center of the base. Connect to 2 links.

  According to another aspect of the exemplary embodiment, rotating the first link of the arm by the drive and rotating the second link of the arm when the first link is rotated, provided that The second link is rotated on the first link, rotating and rotating the end effector on the second link, provided that the first and second links have different effective lengths; The rotation of the end effector on the second link is constrained to rotate so that when the arm is extended or retracted, the end effector is limited to substantially linear motion relative to the drive. A method is provided.

  According to another aspect of the exemplary embodiment, the movement is a radial movement relative to the central axis of the drive.

  According to another aspect of the exemplary embodiment, the end effector is between the wrist joint with the second link and the center line of the substrate support, approximately equal to the difference between the effective lengths of the first and second links. With a lateral offset of.

  According to another aspect of the exemplary embodiment, rotating the end effector on the second link causes the wrist joint with the second link to drive when the first arm is extended or contracted. Only a translational movement of the end effector is produced while being maintained at a lateral offset with respect to the central rotational axis of the end effector.

  According to another aspect of the exemplary embodiment, rotating the end effector provides substantially only radial movement of the end effector relative to the drive device when the first arm is extended or retracted. .

  According to another aspect of the exemplary embodiment, rotating the end effector constrains the orientation of the end effector such that the end effector is oriented radially with respect to the drive regardless of the position of the first and second links. To do.

  According to another aspect of the exemplary embodiment, a drive device and an arm connected to the drive device, wherein the arm is a first link connected to the drive device at a first joint, a second joint. A second link connected to the first link at a first end and an end effector connected to the second link at a third joint, wherein the first link is between the second and third joints. A first length between the first and second joints different from the second length of the second link, the movement of the end effector in the third joint being driven during arm extension and contraction There is provided a transfer device having arms that are constrained to follow within a substantially straight radial line relative to the center of rotation of the device.

  According to an example embodiment, the transport device is a drive device and a first arm connected to the drive device, the first arm being connected in series with the drive device, a first link; A first arm having a second link and an end effector, wherein the first link and the second link have different effective lengths, and an end effector for the drive when the first arm is extended or contracted A system for limiting the rotation of the end effector relative to the second link to provide substantially linear movement of the second effector.

  The effective length of the first link may be shorter than the effective length of the second link. The effective length of the first link may be longer than the effective length of the second link. The end effector may have a lateral offset between the wrist joint with the second link and the centerline of the substrate support, approximately equal to the difference between the effective lengths of the first and second links. A system for limiting rotation translates the end effector when the first arm is extended or retracted, with the wrist joint maintained at a lateral offset relative to the central rotational axis of the drive. It may be configured as follows. A system for limiting the rotation of the end effector may provide substantially only radial movement of the end effector relative to the drive device when the first arm is extended or retracted. The system for limiting the rotation of the end effector may be configured to constrain the orientation of the end effector so that the end effector is oriented radially with respect to the drive regardless of the position of the first and second links. . The end effector may be configured to support at least two spaced apart substrates thereon, with the end effector wrist joint with the second link and the first arm extended or contracted. A lateral offset is provided between the end effector and the center of the linear linear motion path, and the lateral offset is such that when the first arm is extended or contracted, the wrist joint is at the central rotational axis of the drive device. Provided for a substantially translation-only movement of the end effector while being maintained at a lateral offset relative to it. A system for limiting rotation may have a band drive having a pulley and a band. The pulley may have at least one non-circular pulley. The pulley may have at least one pulley fixedly connected to the second link or end effector. The end effector may have a substrate support and a leg connecting the substrate support to the wrist joint of the end effector with the second link, the leg being a first portion connected to the wrist joint, the substrate The second portion is connected to the support, and the first and second portions are connected to each other at an angle of about 90 degrees to about 120 degrees. The end effector may have two substrate supports and a leg frame connecting the substrate support to the wrist joint of the end effector with the second link, the leg frame having a base and two legs Each leg is connected to a separate one of the substrate supports, and the wrist joint connects the end effector to the second link at a location offset from the center of the base.

  One type of method is to rotate the first link of the arm by the drive and to rotate the second link of the arm when the first link is rotated, provided that the second link Is rotated on the first link, rotating and rotating the end effector on the second link, provided that the first and second links have different effective lengths and the second link Rotating the end effector above includes constraining and rotating so that the end effector is limited to substantially linear motion relative to the drive when the arm is extended or retracted. Good.

  The movement may be a radial movement relative to the central axis of the drive. The end effector may have a lateral offset between the wrist joint with the second link and the centerline of the substrate support, approximately equal to the difference between the effective lengths of the first and second links. Rotating the end effector on the second link maintains the wrist joint with the second link at a lateral offset with respect to the central axis of rotation of the drive when the first arm is extended or retracted. In this state, only the translational movement of the end effector may be generated. The end effector may provide substantially only radial movement of the end effector relative to the drive device when the first arm is extended or retracted. Rotating the end effector may constrain the orientation of the end effector such that the end effector is oriented radially relative to the drive regardless of the position of the first and second links.

  One type of example embodiment is a drive device and an arm connected to the drive device, the arm being a first link connected to the drive device at a first joint and a first at a second joint. A second link connected to the second link, and an end effector connected to the second link at a third joint, the first link being a second link between the second and third joints. The end effector movement in the third joint has a first length between the first and second joints different from the second length of the link, and the rotation of the drive during arm extension and contraction An arm may be provided having an arm that is constrained to follow a substantially straight radial line relative to the center.

  Referring now to FIG. 63, an exemplary pulley graph 1100 is shown. An exemplary pulley profile may be for an arm having an unequal link length, as will be described. As an example, graph 1100 may show an outline for a wrist pulley when the elbow pulley is circular. Here, the following design example was used for the diagram: Re / l2 = 0.2. Here, Re is the radius of the elbow pulley, and l2 is the joint length of the forearm. Alternatively, any suitable ratio may be provided. For the sake of clarity, the graph shows an extreme design case compared to a pulley for an equilink arm. The outermost profile 1110 is for l2 / l1 = 2. Here, l2 is the joint length of the forearm, and l1 is the joint length of the upper arm. For example, in this case, it represents a longer forearm. Intermediate profile 1112 is for l2 / l1 = 1, eg, when having equal link length. The innermost profile 1114 is for l2 / l1 = 0.5, for example in this case representing a shorter forearm. In the illustrated embodiment, a polar coordinate system 1120 is used. Here, the radial distance is normalized with respect to the radius of the elbow pulley, and is expressed, for example, as a multiple of the radius of the elbow pulley. In other words, Rw / Re is shown. Here, Rw represents the polar coordinates of the wrist pulley, and Re represents the elbow pulley. Angular coordinates are in degrees, with 0 having an orientation along the end effector direction 1122, for example, the end effector points to the right with respect to the figure.

  64 and 65, two additional configurations of arms 1140 and 1160 having unequal link lengths are shown. Arm 1140 is shown having a forearm 1144 that is longer than upper arm 1142. Here, the single arm configuration may utilize features as disclosed or otherwise with respect to FIGS. 1-4 and 5-8. In the illustrated embodiment, the two end effectors 1146, 1148 that support the respective substrates 1150, 1152 are firmly connected to each other and are oriented in opposite directions. The substrate moves in a radial path coincident with the center 1156 of the arm 1140 and offset from the wrist (1154) as shown. Similarly, arm 1160 is shown having a forearm 1164 that is shorter than upper arm 1162. Here, the single arm configuration may utilize features as disclosed or otherwise with respect to FIGS. 1-4 and 5-8. In the illustrated embodiment, the two end effectors 1166, 1168 supporting the respective substrates 1170, 1172 are firmly connected to each other and are oriented in opposite directions. The substrate moves in a radial path coincident with the center 1176 of the arm 1160 and offset from the wrist (1174) as shown. Here, features of the disclosed embodiments may be shared as well as any of the other disclosed embodiments.

  Referring to FIG. 66A, a schematic top plan view of an example of a substrate transfer robot 1200 is shown. The robot 1200 may be a vacuum-enabled or any suitable robot having a drive portion 1210 and an arm portion 1212 coupled to the drive portion 1210, as will be described in more detail below. In the embodiment shown throughout, the upper arm link length and the forearm link length are different and may be driven by, for example, a circular or non-circular pulley, as described above. In an alternative embodiment, an arm having the same link length, or an arm having unequal link length and having a circular pulley or other suitable drive mechanism, for example, using any suitable configuration disclosed , May be provided. 66A and 66B show a top view and a side view, respectively, of a robot 1200 having an arm 1212. The drive unit 1210 may provide four coaxial drive shafts, whereby the first portion 1214 and the second portion 1216 of the arm 1212 may be driven independently. A suitable drive having four coaxial axes is shown by way of example in FIG. 70B. Here, the arm 1212 features two independent linkages, an upper portion 1214 and a lower portion 1216. The upper linkage 1214 may be driven by the two innermost drive shafts of the drive device 1210 and the lower linkage 1216 may be driven by the two outermost drive shafts of the drive device 1210. In FIGS. 67A and 68A, the linkages are shown in their retracted positions. Each of the two linkages 1214, 1216 consists of a first link (upper arms 1218, 1220), a second link (forearms 1222, 1224) and a third link (end effectors 1226, 1228). The inter-joint length of the second link is shown smaller than the inter-joint length of the first link. The third link lateral offsets 1230, 1232 correspond to the forearm and upper arm inter-articular length differences and additional offsets, which add up to an offset 1234 between the two arms. The offset 1234 may correspond to the nominal center distance between substrates in a two station process module, and the lateral offsets 1230, 1232 may be half of the total center distance 1234. The offsets 1230, 1232 combined with the shorter forearm form a gap G, so that the arms 1214, 1216 can be anything in the gap G, for example, between slit valves in quad applications. Can expand or contract without physically interfering with the chamber material. Alternatively, any suitable offset (s) may be provided. Here, the end effectors 1228, 1226 may nominally expand and contract in parallel with each other without rotation. Since the end effectors 1228, 1226 can also be positioned independently, the substrates above them may be placed or picked up independently. Referring to FIGS. 68A-68B as well, a top view of an example substrate transport robot 1200 is shown. 68A shows the robot 1200 contracted, while FIG. 68B shows the robot 1200 extended. The described robot 1200 has arms 1214, 1216 that are independently positionable. In an alternative embodiment, the arms 1214, 1216 may be driven by two coaxial shafts and depend on each other. An example drive configuration is described with respect to FIG. 80B, where two coaxial sets of drive shafts drive two sets of arms. Here, one of the coaxial drive shafts may be provided as an example to drive the arms 1214, 1216. Referring also to FIGS. 67A-67C, an alternative robot configuration 1200 ′ is shown. The robot 1200 ′ has arms 1214 ′ and 1216 ′ and may have features similar to those of the robot 1200. Here, the arm of the robot 1200 'may be extended and contracted independently. However, the arms rotate together. Instead of a four coaxial shaft drive, the robot 1200 'utilizes a drive device with three coaxial shafts. A suitable drive and pulley mechanism is shown with respect to FIGS. 23 and 24 or 33 and 34. In alternative aspects, any suitable drive and pulley mechanism may be provided, for example, as disclosed, where the upper arms are tied together.

  Referring to FIG. 69A, a schematic top plan view of an example of a substrate transfer robot 1300 is shown. The robot 1300 may be a vacuum capable or any suitable robot having a drive portion 1310 and an arm portion 1312 coupled to the drive portion 1310, as will be described in more detail below. In the embodiment shown throughout, the upper arm link length and the forearm link length are different and may be driven by a circular or non-circular pulley. In alternative embodiments, arms having the same link length, or arms having unequal link lengths and having circular pulleys or other suitable drive mechanisms may be provided. FIGS. 69A and 69B show a top view and a side view, respectively, of a robot 1300 having an arm 1312. The drive unit 1310 may provide four coaxial drive shafts, whereby the first portion 1314 and the second portion 1316 of the arm 1312 may be driven independently. Here, the arm 1312 features two independent linkages, an upper portion 1314 and a lower portion 1316. The upper linkage 1314 may be driven by the two innermost drive shafts of the drive device 1310 and the lower linkage 1316 may be driven by the two outermost drive shafts of the drive device 1310. In FIG. 69A, the linkages are shown in their retracted positions. Each of the two linkages 1314, 1316 consists of a first link (upper arms 1318, 1320), a second link (forearms 1322, 1324) and a third link (end effectors 1326, 1328). The inter-joint length of the second link is smaller than the inter-joint length of the first link. The lateral offsets 1330 and 1332 of the third link correspond to the difference between the joint lengths of the forearm and the upper arm. The third link is shaped to provide space for the two innermost drive shafts 1334.

  Referring also to FIGS. 70A and 70B, an example of an internal mechanism used to drive the individual links of each linkage is shown. The mechanism will be described for the upper linkage. An equivalent mechanism may be used in the lower linkage. The upper arm 1318 of the upper linkage 1314 may be driven by one motor 1350. The forearm 1322 of the upper linkage 1314 may be driven by a separate motor 1352 through a band drive 1354 having a conventional pulley. The third link with end effector 1326 is moved to the position of the first two links by a band drive 1356 having at least one non-circular pulley that counteracts the unequal length effects of the upper and forearms. It may be constrained to face in the radial direction regardless. The design of the band drive may follow that shown in FIGS. In order for the upper linkage to rotate, both drive shafts associated with the linkage need to move the same amount in the direction of linkage rotation. In order for the end effector to radially expand and contract along a linear path, the two drive shafts may have inverse kinematic equations, for example as presented in equations (1.8)-(1.16) Need to move in concert. In alternative aspects, any suitable arm mechanism may be used, for example as disclosed or otherwise with respect to FIGS. 66-68 with offset end effectors.

  Referring also to FIGS. 71A and 71B, another example of an internal mechanism used to drive the individual links of each linkage is shown. Again, as before, the mechanism will be described for the upper linkage 1314 ′. An equivalent mechanism may be used in the lower linkage. Here, the upper arm 1318 of the upper linkage 1314 ′ is driven by one motor 1350. The forearm 1322 of the upper linkage 1314 ′ is coupled to another motor 1352 via a band mechanism 1354 ′ having at least one non-circular pulley. Band drive 1354 ′ is designed such that rotation of the upper arm causes the wrist joint to extend and retract along a straight line parallel to the desired radial path of the end effector. The third link with end effector 1326 is constrained by a band drive 1356 ′ having at least one non-circular pulley so that the end effector is oriented radially regardless of the position of the first two links. The band drive may be designed according to FIGS. Because the upper linkage 1314 ′ rotates, both drive shafts associated with the linkage may move the same amount in the direction of rotation of the linkage. Because the end effector 1326 extends and contracts radially along a straight path, the drive shaft coupled to the upper arm of the upper linkage is held while the other motor associated with the upper linkage is held stationary. In addition, it is necessary to move according to the inverse kinematic equations presented in equations (2.8) to (2.15). In alternative aspects, any suitable drive mechanism may be provided.

  72A-72C and 73A-73C show the independent operation of the two linkages of the robot of FIG. Specifically, FIGS. 72A-72C and FIGS. 73A-73C show the independent rotational and extension motions of the two linkages 1314, 1316, respectively. 72A-72C show the rotational movement of the upper linkage 1314 of the robot 1300 of FIG. FIG. 72A shows a top view of the robot with both linkages in their retracted positions. FIG. 72B shows a top view of the robot with the upper linkage 1314 rotated 90 degrees clockwise. FIG. 72C shows a top view of the robot with the upper linkage 1314 rotated by 180 degrees. 73A to 73C show the extension motion of the robot 1300 of FIG. FIG. 73A shows a top view of the robot with both linkages in their retracted positions. FIG. 73B shows a top view of the robot with the upper linkage 1314 partially extended. FIG. 73C shows a top view of the robot with the upper linkage 1314 in the extended position.

  Alternative example aspects of the disclosed embodiments are shown in FIGS. 74A and 74B. In the figure, a robot 1450 having a driving device 1310 and an arm 1452 is shown. Here, the two linkages 1454, 1456 of the arm 1452 may be arranged according to FIGS. 74A and 74B showing a top view and a side view of the robot 1450. Here, the robot drive unit 1310 provides four coaxial drive shafts. The arm 1452 features two independent linkages, an upper portion 1454 and a lower portion 1456. The upper linkage 1454 may be driven by the two innermost drive shafts 1334 and the lower linkage may be driven by the two outermost drive shafts of the drive device 1310. In FIG. 74A, the linkages are shown in their retracted positions. Each of the two linkages 1454, 1456 may consist of a first link (upper arm) 1458, 1460, a second link (forearm) 1462, 1464 and a third link (end effector) 1466, 1468. The joint length of the second link may be smaller than the joint length of the first link. The lateral offset 1470 of the third link corresponds to the difference between the joint lengths of the forearm and upper arm. The third link is shaped to provide space for the two innermost drive shafts 1334.

  75A and 75B show an example of an internal mechanism used to drive the individual links of each linkage. The mechanism will be described for the upper linkage 1454. An equivalent mechanism may be used in the lower linkage 1456. The upper arm 1458 of the upper linkage 1454 may be driven by one motor 1350. The forearm 1462 of the upper linkage 1454 may be driven by a separate motor 1352 through a band drive 1472 having a conventional pulley. The third link with end effector 1466 is moved to the position of the first two links by a band drive 1474 with at least one non-circular pulley that offsets the effects of unequal length of the upper and forearms. It may be constrained to face in the radial direction regardless. The design of the band drive may be according to FIGS. In order for the upper linkage 1454 to rotate, both drive shafts associated with the linkage need to move the same amount in the direction of linkage rotation. The two drive shafts move in concert according to the inverse kinematic equations presented in equations (1.8)-(1.16) as the end effector extends and contracts radially along a linear path. There is a need.

  FIGS. 76A and 76B show another example of an internal mechanism used to drive the individual links of each linkage. Here, the mechanism will be described for the upper linkage 1454. An equivalent mechanism may be used in the lower linkage 1456. The upper arm 1458 of the upper linkage may be driven by one motor 1350. The forearm 1462 of the upper linkage 1454 may be coupled to another motor 1352 via a band mechanism 1472 ′ having at least one non-circular pulley. The band drive is designed such that rotation of the upper arm 1458 extends and retracts the wrist joint along a straight line parallel to the desired radial path of the end effector 1466. The third link with end effector 1466 is constrained by a band drive having at least one non-circular pulley so that the end effector is oriented radially regardless of the position of the first two links. The band drive may be designed according to FIGS. Because the upper linkage 1454 rotates, both drive shafts associated with the linkage may move the same amount in the direction of linkage rotation. Because the end effector 1466 extends and contracts radially along a straight path, the drive shaft coupled to the upper arm of the upper linkage is held while the other motor associated with the upper linkage is held stationary. In addition, it is necessary to move according to the inverse kinematic equations presented in equations (2.8) to (2.15).

  77A-C and 78A-C show the independent operation of the two linkages 1454, 1456 of the robot of FIGS. 74A and 74B. Specifically, FIGS. 77A-C and FIGS. 78A-C show the independent rotational and extension motions of the two linkages 1454, 1456. FIG. 77A-C show the rotational motion of the upper linkage of the robot. FIG. 77A shows a top view of the robot with both linkages in their retracted positions. FIG. 77B shows a top view of the robot with the upper linkage 1454 rotated 90 degrees clockwise. FIG. 77C shows a top view of the robot with the upper linkage 1454 rotated by 180 degrees. 78A-C show the extension motion of the robot of FIGS. 74A and 74B. FIG. 78A shows a top view of the robot with both linkages in their retracted positions. FIG. 78B shows a top view of the robot with the upper linkage partially extended. FIG. 78C shows a top view of the robot with the upper linkage 1454 in the extended position (not fully extended).

  Alternative embodiments of the dual arm linkage mechanism described above may be provided as well. For example, the first link may be driven by a motor, either directly or via any kind of coupling device or transmission mechanism. Any transmission ratio can be used. As a further example, a band drive that operates the second link can be any device with equivalent functionality, such as a belt drive, a cable drive, a gear drive, a linkage-based mechanism, or any combination of the above. It may be replaced by other mechanisms. Similarly, the band drive that binds the third link is replaced by any other suitable mechanism, such as a belt drive, cable drive, non-circular gear, linkage-based mechanism, or any combination of the above. May be. Here, the end effector need not be oriented in the radial direction. The end effector can be positioned with any suitable offset relative to the third link and can be oriented in any suitable direction. Similarly, the third link may carry multiple end effectors. Any suitable number of end effectors and / or material holders can be carried by the third link. As a further example, any order of vertical placement of individual links and end effectors may be used. For example, the end effector of the upper linkage may be placed above the upper linkage as opposed to being sandwiched between the two linkages.

  79A and 79B, top and side views of a robot 1550 having an arm 1552 and a drive 1310 are shown. The drive unit 1310 provides four coaxial drive shafts. The arm features two independent pairs of linkages, an upper linkage pair 1554 and a lower linkage pair 1556. The upper linkage pair 1554 is driven by two innermost drive shafts 1334 and the lower linkage pair is driven by two outermost drive shafts. In FIG. 79A, the linkages are shown in their retracted positions. Each of the two linkage pairs 1554, 1556 consists of two linkages, a left linkage 1558, 1560 and a right linkage 1562, 1564. Each of the linkages includes a first link (upper arm), a second link (forearm), and a third link (end effector). The inter-joint length of the second link is smaller than the inter-joint length of the first link. The difference between the joint lengths of the second link and the first link is selected so that the second link passes without touching the drive shaft of the drive unit.

  80A and 80B show an example of an internal mechanism used to drive the individual links of each linkage. The mechanism will be described for the upper linkage pair 1554. An equivalent mechanism may be used in the lower linkage pair 1556. For clarity of the side view, the forearms (and end effectors) of the upper linkage pair are shown at different heights (although they may be located in the same horizontal plane). Similarly, the forearms of the lower linkage pair are shown at different heights in the side view. The upper arm 1570 of the left upper linkage 1558 is driven by a first drive shaft 1572 and the upper arm 1574 of the right upper linkage 1562 is driven by a second drive shaft 1576. The forearm 1578 of the left upper linkage 1558 is driven by a second drive shaft 1576 through a band drive 1580 having at least one non-circular pulley. Similarly, the forearm 1582 of the right upper linkage 1562 is driven by a first drive shaft 1572 through a band drive 1584 having at least one non-circular pulley. For example, in an alternative embodiment where equal link lengths are provided, circular pulleys may be used. The two forearm band drives are designed so that the wrist joints of the left and right linkages move along straight paths parallel to each other when the first and second drive shafts 1572, 1576 rotate equally in opposite directions. Is done. The third link / end effector 1586 of the left upper linkage 1558 is provided by a band drive 1588 having at least one non-circular pulley that offsets the unequal length effects of the upper arm 1570 and forearm 1578 of the left upper linkage 1558. The end effector 1586 is constrained to face radially regardless of the position of the first two links 1570, 1578 of the left upper linkage 1558. The design of the band drive may be according to FIGS. Similarly, the third link / end effector 1590 of the right upper linkage 1562 is provided by a band drive 1592 having at least one non-circular pulley that counteracts the unequal length effects of the upper arm and forearm of the right upper linkage. The end effector may be constrained to face radially regardless of the position of the first two links of the right upper linkage. For example, in an alternative embodiment where equal link lengths are provided, circular pulleys may be used. Again, as before, the band drive may be designed according to FIGS. In order for the upper linkage pair to rotate, the first and second drive shafts may rotate in synchronism with the desired direction of rotation of the upper linkage pair. The two drive shafts may rotate synchronously in opposite directions so that the end effector of the upper linkage pair extends and retracts along a linear path.

  81A-C and 82A-C show the independent operation of the two linkage pairs of the robot of FIGS. 79A and 79B. Specifically, FIGS. 81A-C and FIGS. 82A-C show the independent rotational and extension motions of the two linkage pairs. 81A-C show the rotational movement of the upper linkage pair 1554 of the robot. FIG. 81A shows a top view of the robot with both linkage pairs in their retracted positions. FIG. 81B shows a top view of the robot with the upper linkage pair 1554 rotated 45 degrees clockwise. FIG. 81C shows a top view of the robot with the upper linkage pair rotated by 180 degrees. 82A-C show the robot's extension motion. FIG. 82A shows a top view of the robot with both linkage pairs in their retracted positions. FIG. 82B shows a top view of the robot with the upper linkage pair partially extended. The extension shown in FIG. 82A roughly corresponds to the maximum extension of the conventional solution with tightly coupled parallel end effectors. As shown in FIG. 82C, this embodiment allows the linkage, in this particular example, the upper linkage pair, to extend far beyond this point, and therefore a longer reach from the same storage volume. I will provide a.

  Alternatively, the linkage can be arranged according to FIGS. 83A and 83B, which show top and side views of the robot 1650. Here, the robot 1650 may have features as described with respect to FIGS. 79A and 79B having an upper arm pair 1554 and a lower arm pair 1556 ′. However, in this embodiment, the right upper arm of the lower arm pair 1556 ′ is disposed below the left upper arm of the lower arm pair.

  In alternate embodiments, any suitable four-arm linkage mechanism may be provided. As an example, the first link can be driven by a motor, either directly or via any kind of coupling device or transmission mechanism. Here, any transmission ratio can be used. Alternatively, the band drive for actuating the second link may be any device with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism or any combination of the above It may be replaced by other mechanisms. Similarly, the band drive that binds the third link is replaced by any other suitable mechanism, such as a belt drive, cable drive, non-circular gear, linkage-based mechanism, or any combination of the above. May be. Further, the end effector may be positioned with any suitable offset and may be oriented in any suitable direction. Alternatively, the third link can carry multiple end effectors. Any suitable number of end effectors and / or material holders can be carried by any third link of the linkage. By way of example, a mechanism 1700 suitable for manufacturing solar cells in which multiple substrates are supported by each end effector is shown in FIGS. Here, any sequence of vertical placement of the individual links and end effectors may be used. For example, the end effector carried by the upper linkage pair may be located above the upper linkage pair as opposed to being sandwiched between the lower and upper linkage pairs.

  The dual arm and quad arm configurations described above may be driven, for example, by a robot drive unit having four coaxial rotation axes as described above and as illustrated. The robot drive unit may further include a common vertical lift axis 1750, as schematically shown in FIGS. 87A and 87B. Alternatively, the robot drive unit may include two independent vertical ascending axes 1750A and 1750B, as schematically shown in FIGS. 88A-B and 89A-B. In this case, each vertical axis is coupled to one of the two linkages of the dual-arm linkage mechanism or one of the two linkage pairs of the four-arm linkage mechanism. 88A-B, the ascending shafts 1750A, 1750B are independently coupled to the rotary drive units 1806, 1808. Here, ascending shafts 1750A and 1750B have lead screws that can rotate independently. Similarly, in FIGS. 89A-B, the ascending shafts 1750A ′, 1750B ′ are independently coupled to the rotary drive units 1806 ′, 1808 ′. Here, the lift shafts 1750A ′, 1750B ′ share a common fixed lead screw.

  FIGS. 90A and 90B show an example of a schematic depiction of a top view and a side view of a vacuum chamber 1900 having independent robotic arms 1902, 1904 driven by non-collocated drive units. In the example of FIGS. 90A and 90B, each drive unit may provide three axes of rotation and any additional vertical lift axis. Each robot arm may consist of a first link (upper arm), a second link (forearm), and a third link having an end effector. As shown in the figure, the joint length of the second link may be smaller than the joint length of the first link. Each of the three links may be driven by one of the rotation axes of the corresponding robot drive unit. In general, any number of rotational axes and links may be used. The two robot arms and the drive unit of FIGS. 90A and 90B extend to and from any station where the two arms extend directly above and / or below each other and attached to the vacuum chamber. It may be configured to be able to deliver / remove material. Alternatively, as schematically shown in FIGS. 91A and 91B, each of the two drive units 1902 ′, 1904 ′ transmits rotational motion from the rotational axis of the drive unit to a given point in the vacuum chamber. An extension member that can be featured. The extension member may be stationary in a horizontal plane, while the extension member may move vertically if the corresponding drive unit has a vertical lifting axis. As shown in the example of FIGS. 91A and 91B, a standard robot arm may be driven by each of the extension members. For example, each drive unit having an extension member may provide two axes of rotation and an optional additional vertical lift axis. At this time, each of the robot arms may include a first link (upper arm), a second link (forearm), and a third link having an end effector. In the example of FIGS. 91A and 91B, the first two links are driven by the two axes of rotation of the corresponding drive unit, and the third link is mechanical so that the end effector maintains the radial orientation. Be bound by Although FIGS. 91A and 91B show a three-link arm, the arm may consist of any suitable number of links. In alternative embodiments, any suitable combination of the arm mechanism and drive unit of FIGS. 90A and 90B and FIGS. 91A and 91B or others may be used. According to one further example, a machine-readable non-transitory program storage device may be provided that tangibly incorporates a program of instructions executable by the machine to perform an operation, such as a memory 1951 ′, for example. Good. Here, the operations include any of the operations performed by the controller as described herein. The methods described above may be performed or controlled at least in part using a processor 1951, memory 1951 ′, and software 1951 ″.

  The above description should be regarded as illustrative only. Various alternatives and modifications can be devised by those skilled in the art. Accordingly, the present embodiment is intended to encompass all such alternatives, modifications, and variations. For example, the features recited in the various dependent claims may be combined with each other in any suitable combination (s). In addition, features from the different embodiments described above could be selectively combined to create new embodiments. Accordingly, the description is intended to embrace all such alternatives, modifications and variances that fall within the scope of the appended claims.

Claims (20)

A driving device;
A first arm connected to the drive device, the first arm comprising a first link, a second link and an end effector connected in series with the drive device; The first arm and the second link have different effective lengths, and the first arm;
For limiting rotation of the end effector relative to the second link to provide substantially linear movement of the end effector relative to the drive when the first arm is extended or contracted. With the system;
A conveying device comprising:   The transport apparatus according to claim 1, wherein the effective length of the first link is shorter than the effective length of the second link.   The transport apparatus according to claim 1, wherein the effective length of the first link is longer than the effective length of the second link.   The end effector has a lateral offset between a wrist joint with the second link and a centerline of the substrate support, approximately equal to the difference between the effective lengths of the first and second links. Item 2. The transfer device according to Item 1.   The system for limiting rotation, wherein the wrist joint is maintained at the lateral offset relative to a central rotational axis of the drive device when the first arm is extended or contracted; The transport apparatus of claim 4, configured to translate the end effector.   The system for limiting rotation of the end effector provides substantially only radial movement of the end effector relative to the drive when the first arm is extended or contracted. 2. The transfer device according to 1.   The system for limiting rotation of the end effector constrains the orientation of the end effector so that the end effector is oriented radially relative to the drive device regardless of the position of the first and second links. The transport apparatus according to claim 1, which is configured as follows. The end effector is configured to support at least two spaced apart substrates thereon;
A lateral offset is provided between a wrist joint of the end effector with the second link and a center of a linear linear motion path of the end effector when the first arm is extended or contracted;
The lateral offset is the position of the end effector in a state where the wrist joint is maintained at the lateral offset with respect to the central rotation axis of the driving device when the first arm is extended or contracted. The transport device according to claim 1, provided for substantially translational movement only.   The transport device of claim 1, wherein the system for limiting rotation comprises a band drive having a pulley and a band.   The conveying device according to claim 9, wherein the pulley has at least one non-circular pulley.   The conveying device according to claim 9, wherein the pulley has at least one pulley fixedly connected to the second link or the end effector. The end effector has a substrate support, and a leg connecting the substrate support to a wrist joint of the end effector with the second link;
The leg has a first part connected to the wrist joint, a second part connected to the substrate support part,
The transport apparatus of claim 1, wherein the first and second portions are connected to each other at an angle of about 90 degrees to about 120 degrees. The end effector has two substrate supports and a leg frame connecting the substrate support to a wrist joint of the end effector with the second link;
The leg frame is substantially U-shaped with a base and two legs;
The leg of claim 1, wherein each leg is connected to a separate one of the substrate supports, and the wrist joint connects the end effector to the second link at a location offset from the center of the base. Conveying device. Rotating the first link of the arm by a drive;
Rotating the second link of the arm when the first link is rotated, wherein the second link is rotated on the first link;
Rotating an end effector on the second link, wherein the first and second links have different effective lengths, and rotation of the end effector on the second link causes the arm to extend Or the rotation, constrained such that, when contracted, the end effector is limited to substantially linear motion relative to the drive;
Including a method.   The method of claim 14, wherein the movement is a radial movement relative to a central axis of the drive.   The end effector has a lateral offset between a wrist joint with the second link and a centerline of the substrate support, approximately equal to the difference between the effective lengths of the first and second links. Item 15. The method according to Item 14.   Rotating the end effector on the second link means that when the first arm is extended or contracted, the wrist joint with the second link is relative to the central rotational axis of the drive device. 15. The method of claim 14, wherein only a translational movement of the end effector is produced while maintained at a lateral offset.   15. The method of claim 14, wherein rotating the end effector provides a substantially radial only movement of the end effector relative to the drive device when the first arm is extended or retracted. .   The rotation of the end effector constrains the orientation of the end effector such that the end effector is oriented radially with respect to the drive device regardless of the position of the first and second links. the method of. A driving device;
An arm connected to the drive device, wherein the arm is a first link connected to the drive device at a first joint, and a second link connected to the first link at a second joint. A link, and an end effector connected to the second link at a third joint, the first link being a second of the second link between the second and third joints. The first effector has a first length between the first and second joints different from the length, and movement of the end effector in the third joint causes rotation of the drive device during extension and contraction of the arm. Said arm constrained to follow a substantially straight radial line relative to the center;
A transport apparatus comprising:

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