KR200422315Y1 - Dual arm robot - Google Patents

Abstract

The invention relates to a dual arm, cylindrical coordinate robot assembly, and more particularly to a manipulator, a system of links and joints that cooperate to position a pair of end effectors for such a robot assembly. The dual arm robot assembly according to the present invention has a vertical motion mechanism with two arms with a set of joint / link pairs that form at least three degrees of freedom to provide independent horizontal translation and rotation of the last link in conjunction with the actuator assembly. Also characterized by providing.

Description

Dual Arm Robots {DUAL ARM ROBOT}

1 illustrates a prior art dual arm atmospheric pressure robot.

2 shows a first embodiment of a dual arm robot with two rims providing a total of four degrees of freedom (4 DOF) according to the present invention.

3 is a side view of the robot of FIG. 2;

4 is a schematic view of the robot of FIG.

5A is a schematic representation of another embodiment of the robot of FIG. 2.

5B is a schematic representation of another embodiment of the robot of FIG. 2.

6 is a mechanism diagram of the robot of FIG.

7 is a schematic representation of an actuator assembly of the robot of FIG. 2.

7A is a schematic representation of an embodiment of an atmospheric pressure actuator assembly of the robot of FIG. 2.

7B is a schematic representation of another embodiment of an atmospheric pressure actuator assembly of the robot of FIG. 2.

8 is a schematic representation of another embodiment of a vacuum compatible actuator assembly of the robot of FIG. 2.

9 is a schematic representation of another embodiment of a vacuum compatible actuator assembly of the robot of FIG. 2.

10 shows the function performed by the individual end effector mounting flanges of the arm with a 2: 1 inner link pulley diameter ratio for the robot of FIG. 2, as a result of the angular displacement of one motor or the simultaneous displacement of multiple motors. Table describing the.

FIG. 11 is a table illustrating the functions performed by the individual end effector mounting flanges of the arm with a 1: 1 inner link pulley diameter ratio for the robot of FIG. 2 as a result of the simultaneous angular displacement of multiple motors. FIG.

12 is an isometric view of the rim of an arm according to the present invention.

13 is a partial view of the rim of FIG. 12.

14 is a partial view of the inner link assembly of FIG. 12 including an inner link joint and an outer link joint.

15 is an isometric view of the belt and pulley of the rim of FIG.

16 is an exploded view of the rim of FIG. 12.

17 is an exploded view of the inner link assembly of FIG. 12 including an end effector mounting flange.

18 is an exploded view of an outer link assembly including the end effector mounting flange joint of FIG. 12.

19 is a side view of another embodiment of a dual arm robot having rims of different lengths, providing a total of 4 degrees of freedom (4 DOF).

20 is a top view of the robot of FIG. 19.

FIG. 21 is an isometric view of a dual arm robot with two rims providing a total of three degrees of freedom (3 DOF) with a co-directional end effector mounting flange.

22 is a mechanism diagram of the robot of FIG. 21.

FIG. 23 shows the function performed by the individual end effector mounting flange of the arm with a 2: 1 inner link pulley diameter ratio for the robot of FIG. 21 as a result of the angular displacement of one motor or the simultaneous displacement of multiple motors. Table describing the.

24A shows a sequence of motion of one of the end effector mounting flanges of the robot of FIG. 21.

 24B shows a sequence of simultaneous movements of the two end effector mounting flanges of the robot of FIG. 21.

25 is a schematic representation of an actuator assembly of the robot of FIG. 21.

FIG. 26 is an isometric view of a dual arm robot with two rims providing a total of three degrees of freedom (3 DOF) with opposite facing end effector mounting flanges.

FIG. 27 shows the function performed by the individual end effector mounting flanges of the arm with a 2: 1 inner link pulley diameter ratio for the robot of FIG. 26 as a result of the angular displacement of one motor or the simultaneous displacement of multiple motors. Table describing the.

FIG. 28 is an isometric view of a dual arm robot with two rims providing a total of three degrees of freedom (3 DOF), with an angled end effector.

FIG. 29 is an isometric view of a dual arm robot with two rims, with angular internal links combined in one housing, providing a total of three degrees of freedom (3 DOF).

30 is a side view of the robot of FIG. 29;

FIG. 31 is a mechanism diagram of the robot of FIG. 29.

32 is a function performed by separate end effector mounting flanges of an arm with a 2: 2 inner link pulley diameter ratio for the robot of FIG. 29 as a result of angular displacement of one motor or simultaneous displacement of multiple motors. Table describing the.

FIG. 33 illustrates the function performed by the individual end effector mounting flanges of the arm with a 1: 1 ratio of inner link pulley diameter for the robot of FIG. 29 as a result of angular displacement of one motor or simultaneous displacement of multiple motors. Table to explain.

33A and 33B illustrate the stretching of one end effector of the robot of FIG. 29.

FIG. 33C illustrates the extension of both end effectors of the robot of FIG. 29. FIG.

34 illustrates the integration of the arm of the robot of FIG. 2 with a carriage for vertical movement.

FIG. 35 is a side view of a motor stack mounted on a carriage assembled with a straight joint on a column of the robot of FIG. 2; FIG.

FIG. 36 is a partial isometric view of a linear vertical motion system incorporating columns and straight joint linkages into the body of the robot of FIG.

37 is a side view illustrating the integration of the arm of the robot of FIG. 2 with the body of the robot.

38 is an isometric view of the column of the robot of FIG. 2 further illustrating a vertical straight joint.

FIG. 39 is an isometric view of a linear motion bearing and carriage forming a vertical straight joint of the robot of FIG.

40 is another isometric view of the carriage and linear motion bearing forming a vertical straight joint of the robot of FIG.

FIG. 41 is a side view of a column with the Z-axis actuator and straight joints of the robot of FIG. 2; FIG.

42 is an exploded view of the column assembly of FIG. 41 with a carriage.

43 is an assembled view of the element of FIG. 42.

44 is a side view of the Z-axis actuator of the robot of FIG. 2.

45 is a side view of a brake assembly for use with the robot of FIG. 45.

46A is an isometric view of a dual arm robot with two opposing oriented end effectors using two actuators in which the inner link is in a fixed angular relationship.

46B is a side view of the robot of FIG. 46A.

FIG. 47A is a partial view of the robot of FIG. 46A;

FIG. 47B is another partial view of the robot of FIG. 46A;

FIG. 47C is a partial view of the rim of the robot of FIG. 46A;

FIG. 48 illustrates the stretching sequence of one end effector of the robot of FIG. 46A.

FIG. 49 illustrates the operation of two motors to effect translation and rotation of the end effector of the robot of FIG. 46A.

50A is an isometric view of a dual arm robot with two coaxial end effectors using two actuators in which the inner link is in a fixed angular relationship.

50B is another isometric view of FIG. 50A;

FIG. 51A is a partial view of the robot of FIG. 50A;

FIG. 51B is another partial view of the robot of FIG. 50A;

FIG. 51C is a partial view of the rim of the robot of FIG. 50A;

FIG. 52 illustrates a stretch sequence of one end effector of the robot of FIG. 50A. FIG.

FIG. 53 illustrates the operation of two motors for performing rotation and translation of the end effector of the robot of FIG. 50A.

54A is an isometric view of a dual arm robot with two acute angled end effectors using two actuators in which the inner link is in a fixed angular relationship.

54B is a side view of the robot of FIG. 54A.

FIG. 55 illustrates the operation of two motors for performing translation and rotation of the end effector of the robot of FIG. 54A.

56A-56E show Geneva allowing selection of stretching or contraction of the end effector for use in conjunction with the robot of the embodiments of FIGS. 46A-55, 57, 58A-61C and 65A-75. Partial diagram of the Geneva-type coupling mechanism.

56F-56J illustrate the motion of the coupling of FIGS. 56A-56E when one end effector is extended.

FIG. 57 conceptually illustrates the integration of the coupling of FIGS. 56A-56J into a robotic assembly. FIG.

58A is an isometric view of a robotic assembly with dual end effectors using two actuators.

58B is a side view of the robot of FIG. 58A.

59A is a partial view of the robot of FIG. 58A;

59B is a partial view of the rim of the robot of FIG. 58B.

60A and 60B illustrate the stretching of one end effector of the robot of FIG. 58A.

FIG. 61A illustrates the operation of two motors to effect translation and rotation of the end effector of the robot of FIG. 58A. FIG.

FIG. 61B illustrates a concentric arrangement of two motors for use with the robot of FIG. 58A. FIG.

FIG. 61C illustrates a series arrangement of two motors for use with the robot of FIG. 58A. FIG.

FIG. 62 illustrates a transformation process from a robot with end effectors in opposite directions to a robot with end effectors in co-orientation.

63A illustrates another embodiment of a six-axis robotic assembly of the present invention incorporating a quad end effector.

FIG. 63B illustrates a first configuration of the six-axis robot of FIG. 63A. FIG.

63C is a diagram illustrating another configuration of the six-axis robot of FIG. 63A.

FIG. 63D is an instrument diagram of a six axis quad end effector robot using six actuators. FIG.

63E illustrates the independent stretching of the end effector of a six axis robot.

63F illustrates a sequence of simultaneous stretching of all end effectors of a six axis robot.

64 illustrates six motor drive modules for use with a six axis robot.

65A is an isometric view of a three axis quad end effector robot with a co-linear end effector.

FIG. 65B is a diagram illustrating a first configuration of the three-axis robot of FIG. 65A. FIG.

FIG. 65C is a diagram illustrating another configuration of the three-axis robot of FIG. 65A. FIG.

FIG. 65D illustrates the stretching sequence of the individual end effectors of the three-axis robot of FIG. 65A.

65E illustrates a simultaneous stretching sequence of two end effectors of each individual dual external link module.

66A is a partial view of the three-axis robot of FIG. 65B.

FIG. 66B is another partial view of the triaxial robot of FIG. 65B;

FIG. 67 is a table illustrating the function performed by the individual end effector mounting flange of the robot of FIG. 65B as a result of the state of the coupling mechanism and the various angular displacements of the three motors. FIG.

68A is a partial view of the three-axis robot of FIG. 65C.

FIG. 68B is another partial view of the triaxial robot of FIG. 65C;

FIG. 69 is a table illustrating the function performed by the individual end effector mounting flange of the robot of FIG. 65C as a result of the state of the coupling mechanism and the various angular displacements of the three motors. FIG.

FIG. 70 illustrates an extension sequence of one end effector of the three axis robot of FIG. 68A.

FIG. 71 illustrates a stretching sequence for simultaneous stretching of adjacent end effectors for the three axis robot of FIG. 68A. FIG.

FIG. 72A is an isometric view of a three axis quad end effector robot assembly with opposed oriented end effectors. FIG.

FIG. 72B is a diagram showing a first configuration of the three-axis robot of FIG. 72A. FIG.

FIG. 72C is a diagram showing another configuration of the three-axis robot of FIG. 72A. FIG.

FIG. 72D is a diagram showing another configuration of the three-axis robot of FIG. 72A. FIG.

FIG. 72E illustrates the stretching sequence of the individual end effectors of the three-axis robot of FIG. 72A.

FIG. 72F illustrates a simultaneous stretching sequence of two end effectors of each individual dual outer link module. FIG.

73A is a partial view of the three-axis robot of FIG. 72A;

73B is another partial view of the three-axis robot of FIG. 72A;

FIG. 74 is a table illustrating the function performed by the individual end effector mounting flanges of the robot of FIG. 72A as a result of the state of the coupling mechanism and the various angular displacements of the three motors.

75 illustrates three motor drive modules for use with a three axis robot.

The invention relates to a dual arm, cylindrical coordinate robot assembly, and more particularly to a manipulator, a system of links and joints that cooperate to position a pair of end effectors for such a robot assembly.

Cross Reference to Related Application

The applicant is 35 U.S.C. .sten. Under 119 (e), all claim priority to prior US Provisions 60 / 378,983, 60 / 379,095, and 60 / 379,063, filed May 9, 2002, the contents of which are incorporated herein by reference. It is included by reference.

Robots are used in the semiconductor industry to perform various tasks, such as automated handling of substrate media or other objects. In the semiconductor industry, typical media and other objects include individual silicon wafers or wafer carriers, flat panel displays, and hard disk media. The robot may, for example, deliver media in wafer processing cluster tools, wafer inspection equipment, metrology equipment and equipment for hard disk thin film deposition, and in media transfer between automated material handling systems and production equipment in semiconductor factories. Used to handle The robot can be used in both atmospheric and vacuum environments.

One class of robots is known as articulated arm robots, or more specifically articulated cylindrical coordinate robots. Cylindrical coordinate robots include a configuration consisting of an arm having a limb attached to a rotating joint while being movable in a horizontal plane. The rotating joint is mounted on the carriage, which is provided with a reciprocating vertical movement along the axis of the vertical column. The rim can move in and out in the radial or R-direction. The arm can also rotate as a unit on the carriage in theta direction. The arm design is based on a multi-link open kinematic chain.

In general, the basic components of a robotic system are manipulators, power conversion modules, sensor devices and controllers. Manipulators consist of links and joints (including gears, couplings, pulleys, belts, etc.). The manipulator can be described as a system of solid links connected by joints. Links and joints together form a kinematic chain. Kinematic pairs comprising joints and adjacent links may also be referred to as linkages.

Two types of joints are used in the manipulator mechanism, which are rotating and straight joints. Rotating or rotary joints allow rotation of one link around the articulation axis of the preceding link. Straight joints allow translation between the links.

Movement of the joints is achieved by an actuator mechanism. The movement of a particular joint causes the subsequent link attached thereto to move relative to the link containing the actuator of the joint. The actuator can be connected to the link directly or via a mechanical transmission when the desired output characteristics of the actuator (force, torque, speed, resolution, etc.) need to be changed according to the required performance.

The manipulator generally terminates at a link that can support the tool. In semiconductor wafer processing equipment, this tool is generally referred to as an end effector. The interface between the final link and the end effector is called the end effector mounting flange. The links connected to the actuators through the joints move relative to each other to position the end effectors within the X-Y-Z coordinate system.

The commercially available construction of a single arm robot has three parallel rotating joints, which allow for arm movement and in-plane orientation. Often, the first rotating joint is called a shoulder, the second rotating joint is called an elbow, and the third rotating joint is called a wrist. The fourth, straight joint is used to move the end effector perpendicular to the plane in the vertical or Z direction. An actuator (eg, closed loop control servomotor) and a motion conversion mechanism are included in this mechanism to enable movement of the joints. Controlled movement of each link, ie placement and orientation of the end effector in the X-Y-θ-Z coordinate system, can only be achieved when the actuator controls each joint of the manipulator. The actuator can control the joint directly or via a motion conversion mechanism when a reduction in force and torque is needed.

For serial kinematic link clauses, the number of joints is equal to the required number of degrees of freedom. Thus, to move and orient the end effector of a single arm, four joints (three rotations and one vertical straight) are required per set of X-Y-θ-Z coordinates required. In some multi-link joint cylindrical coordinated robots, often the end effector needs to be drawn along the end effector and oriented so that the centerline projected towards the column of the robot always intersects the axis of rotation of the first rotating joint (the shoulder joint). . In this case, the manipulator needs only three degrees of freedom (R-θ-Z). The individual actuators do not control the joints of the end effector, only three actuators are needed.

This type of known dual arm robot for handling substrate media is illustrated in FIG. 1. The robot has two shoulder joints, two elbow joints and two wrist joints. The arm can also move a predetermined distance in the vertical direction along the translational axis of the straight joint of the carriage supporting the first rotating joint (the shoulder joint of the arm). The individual links of both arms are at the same level, the shoulder joints are adjacent to each other, and it is necessary to use a C-shaped bracket between one of the arms and its end effector so that both end effectors can pass through each other. However, the robot cannot be used in vacuum transfer modules constructed in accordance with SEMI MESC standards, because the isolation valves of these vacuum transfer modules are equipped with C-shaped brackets according to SEMI resources, which form wafer transfer planes in process modules and cassettes. This is because it is too narrow to allow passage of the containing arm. Also, the arm cannot rotate independently in cylindrical coordinates. The angular relationship between the vectors of the linear radial translation of the individual end effectors of each arm (in a currently commercially available robot) is permanent and is formed during the assembly of the robot. Often, the individual arms of a dual arm robot are directed along the same vector.

The present invention is a dual arm robot in which two arms each have a set of joint / link pairs that form at least three degrees of freedom to provide independent horizontal translation (extension and contraction) and rotation of the distal link in association with the actuator assembly. To provide. The innermost or proximal joint of the inner link is aligned on a common vertical axis for rotation. The outermost links of each arm are horizontally biased with each other by spacers provided in the joints within the joint / link pair to prevent collision between the outermost links.

In the semiconductor field, the outermost link includes end effector mounting flanges, which are associated with various types of end effectors for manipulating substrate media such as semiconductor wafers. If dual pedal end effectors are used on each arm, up to four substrates can be placed simultaneously in the transfer chamber. Thus, system throughput is increased. In addition, since the two arms have the ability to independently stretch, retract and rotate, the robotic assembly enables wafer replacement when the wafer is moved into or out of a load lock or process module attached to the transfer chamber. Depending on the choice of components and materials designed for the robot structure, the robot can be used in atmospheric and vacuum environments.

The invention relates to a dual arm, cylindrical coordinate robot assembly, and more particularly to a manipulator, a system of links and joints that cooperate to position a pair of end effectors for such a robot assembly.

To illustrate the invention, the manipulator is described as a mechanical assembly and can be classified into primary link clauses, minor link clauses (list components) and end effectors. The main link clause is a set of joint-link pairs that positions the manipulator in place. In general, the primary link clause is the first three sets of joint-link pairs. The first joint-link pair includes a straight joint (eg linear bearing) and a joint (eg carriage) that allows vertical displacement of the tool. The second joint-link pair includes a rotating joint (eg radial ball bearing) and a link (eg internal link). The third joint-link pair includes a rotating joint (eg a radial ball bearing) and a link (eg an outer link). The secondary link section is a fourth joint-link pair and includes a link En that is a rotating joint (eg, a radial ball bearing) and an end effector mounting flange. Actual end effectors are attachments that can have various shapes and are mounted on a mounting flange En.

Each of the joints of the robotic assembly forms a joint axis around or along which a particular link rotates or slides. In a purely open loop joint connection multi-linked kinematic chain, all joints form a degree of freedom (DOF), so that the total number of DOF is equal to the number of joints. In addition, the number of degrees of freedom of the arm may be calculated based on the number of variables or coordinates required to describe its position or the position of the end effector (s). Thus, often the number of degrees of freedom may be less than the total number of joints. This occurs when the state of one actuator determines the state of one or more joints.

With reference to the accompanying drawings, the invention will be more clearly understood from the following detailed description.

A first embodiment of the robot assembly 10 according to the present invention is shown in FIGS. 2 and 3. The assembly includes two arms 12, 14 that share a common straight joint 20 / carriage 18 linkage. The common carriage link 18 is located within the envelope of the column 16. Each arm further comprises rims 13, 15 which are movable in the horizontal plane and mounted on top of the common carriage link 18. Referring to the kinematic chain shown schematically in FIG. 4, four joint / link pairs are clearly shown for each arm with the arms sharing a straight joint 20 / carriage 18. Referring to arm 12, these pairs are straight joints 20 / carriage 18, rotary joints T1 / internal links L1, rotary joints T2 / external links L2, and rotary joints T3. ) / Link (E1). Referring to arm 14, these pairs are straight joint 20 / carriage 18, rotary joint T6 / inner link L3, rotary joint T4 / outer link L4 and rotary joint T5. ) / Link (E2). Thus, the rims 13 and 15 are mounted for rotation about the axis of the rotary joints T1 and T6, respectively. As a result of this arrangement, an infinite length Z-axis 22 located along the axes of the joints T1 and T6 can be located and described as the common axis 22 of the carriage 18. The rims of both arms are capable of stretching and contracting radially independently of one another.

Each last link E1, E2 may support the tool. In the semiconductor industry, these links are referred to as end effector mounting flanges and are connected to the external links of the manipulator via wrist rotation joints T3 and T5 in the present invention. Tools supported by end effector mounting flanges are often referred to as end effectors. The end effector mounting flange may be the same or different depending on the application.

The movement of certain joints allows the links attached to these joints to move. In operation, each rim is capable of moving in the distal or proximal direction to provide a straight radial translational movement of the end effector, so that links L1 and L3 connected via the rotary joints T1 and T2 are circumferentially thereabout. A projection of the axis of the end effector aligned to intersect the common axis 22 of the rotating carriage 18 is maintained. To describe the present invention, the term "end" is generally a relative term referring to a direction spaced from the common axis 22. The term "base" is a relative term that generally refers to the direction toward the common axis 22.

The carriage 18 is connected to the vertical column 16 via a straight joint 20 for vertical linear movement along the axis Z20 of the vertical column 16. See FIG. 4. The axis Z20 is parallel to the common axis 22 of the carriage 18 around which the links L1 and L3 rotate. Two rims 13, 15 are supported by the carriage 18 on the column 16. The vertical column can also be mounted for rotation on the base 21 via the rotary joint T7 as schematically indicated in FIG. 5A. In this way, the column allows the vertical movement of the arm assembly and the carriage as a monolith in the Z direction, and if there is a rotary joint T7 the column is articulated relative to the base 21 of the robot, which contains the actuator of the joint. Can rotate around the axis of T7).

As described above, each of the inner links L1 and L3 is attached to the carriage 18 via a proximal end, or a shoulder, and rotary joints T1 and T6. The shoulder joints T1, T6 of the two arms 12, 14 are coaxial on the common axis 22 of the carriage 18 and overlap each other and are vertically biased. The end effector mounting flanges E1, E2 move in horizontal planes parallel to each other, and one horizontal plane is vertically biased from the other horizontal plane. The elbow joint of the at least one arm, ie the joint T2 of the arm 12 of the illustrated embodiment, is sufficient to bias each of the two end effector mounting flanges E1, E2 as best seen in FIG. 3. A spacer 24 to space the outer link L2 from the inner link L1 by an amount. In the embodiment shown in FIG. 3, where the rims are the same length, the joint T4 is also connected to the outer link (from the inner link L3 by an amount sufficient to vertically bias the two end effector mounting flanges E1, E2). A spacer 25 for spacing L4). In this way, the end effectors do not interfere with each other when the two arm assemblies move independently.

In a first embodiment, called a four-axis system, the two rims 13, 15 of the robotic assembly 10 are independently operable. In this concept, it will be understood that the term "4-axis" refers to a system of rotating joint / link pairs that allows the movement of the rim of the arm in the plane depicted by the polar R-O coordinates. The mechanism of vertical displacement of the arm is not included in the term "4-axis". Thus, the number of degrees of freedom (described as four-axis) does not consider the manipulator of the entire robot, only the rim.

In this embodiment, the rim is rotatable independently around the rotary joints T1 and T6, and the rotation of the individual rims is a change in the θ coordinate of the end effector mounting flange, the final joint of the manipulator. As a result of the coaxial position of the T1 and T6 joints, rotation occurs around the common axis 22 of the carriage 18. In addition, the end effector mounting flanges E1, E2 are depicted along the end effector and along the centerline projected toward the common axis 22 of the carriage 18, the inner links L1, L3, the outer links L2, L4. And link links formed by the rotary joints T1 to T6, which can be independently extended and contracted. Two actuator assemblies are provided for each arm to perform these stretching / retraction and rotational movements. Four actuators are received in the carriage 18 and connected to the arms via coaxially arranged shafts 34, 44, 54, 64 (see FIG. 7). Two actuators are connected to the housing of the inner links L1, L3 and the other two actuators are connected to the pulleys located at the joints T1, T6 of the inner links L1, L3. The action of the linkage and actuator assembly is discussed further below, especially when implemented as motors M1, M2, M3, M4.

In the illustrated embodiment, the movement of the end effector mounting flanges E1, E2 is produced by the manipulation of the inner and outer links with a series of belts and pulleys. The motion of the end effector mounting flange E1 of the arm 12 is discussed with reference to the schematic diagrams of FIGS. 4 and 5A and the kinematic diagram of FIG. 6. As shown in FIGS. 4 and 5A, the inner link L1 is connected to the rotary joint T1 and the additional rotary joint T7 positioned via the shoulder rotary joint T1 (or as shown in FIG. 5B). Is connected to the carriage 18. The outer link L2 is connected to the inner link L1 via an elbow rotation joint T2. The end effector mounting flange E1 is connected to the outer link L2 via the wrist rotation joint T3. The links and joints of this part of the manipulator form a kinematic chain that is open at one end and connected to the carriage 18 at the other end. The carriage 18 is an additional rotary joint positioned via a straight joint 20 as shown in FIG. 4 and also in FIG. 5B, or between the column 16 and the robot base 21 as shown in FIG. 5A. It is connected to the robot base 21 using T7. An end effector that is not part of the schematic diagram and not shown is connected to the end effector mounting flange E1.

Referring to FIG. 6, the pulley d1 is provided to the shoulder rotating joint T1, and the pulley d2 is provided to the elbow rotating joint T2. A belt t1 extending along the inner link L1 is connected to the pulleys d1 and d2. The pulley d2 is mounted to the link L2 while it is physically located in the inner link L1 and rotates the link L2 around the joint axis of the preceding link L1 as part of the elbow rotary joint T2. Allow. The pulley d3 is attached to the link L1 while physically located in the link L2, and is part of the axis around which the elbow joint T2 of the link L2 rotates. The pulley d4 is attached to the end effector mounting flange E1 while physically located in the link L2 and is an end effector mounting flange around the articulation axis of the preceding link L2 as part of the wrist joint T3. Allow rotation of (E1). The belt t2 is connected to the pulleys d3 and d4. In the axis around which the elbow joint T2 of the link L2 rotates, the pulley d3 fixed to the link L1 may cause the shoulder joint T1 of the link L1 to rotate around the common axis 22. When moving with the housing of the link (L1). When the link L1 rotates, the pulley d2 is also constrained to move with the link L1, which causes the pulley d2 to move in a manner similar to the movement of the satellite gear of the planetary gearbox. The pulley d2 is rotated around the common axis 22 of the shoulder joint T1 because it is attached to the distal axis of the inner link L1 via the elbow joint T2. As part of the elbow joint T2, the pulley d2 also rotates about the distal axis of the preceding link L1. Rotation occurs as a result of pulley d2 connected to pulley d1 via belt t1, such as a timing belt, chain, or cable work.

The ratio between the diameters of the pulleys d1 and d2 is the angle provided to the actuator input (e.g. motor M1) connected to the link L1 and the actuator input (e.g. motor M2) connected to the pulley d1. According to the amount of displacement, the relative angular displacement of the pulley d2 is performed. A complete description of the orientation of the elbow joint T2 (which is part of the pulley d2) and the position of the axis in the polar coordinate system based on the polar axis located coaxially with the axis Z1 of the shoulder joint T1 It depends on the length of L1, the input angular displacement value to pulley d2 (via motor M2) and link L1 (via motor M1), and the pulley diameter ratio d1 / d2. Thus, the R-θ coordinates of the proximal end of the subsequent link L2 attached to the elbow joint T2 and the orientation of the link L2 around the T2 articulation axis of rotation are formed. The R-θ coordinate of the distal end of the link L2, which includes the axis of rotation of the wrist joint T3, depends on the length of the link L2.

The position in the R-θ coordinate system of the link E1, ie the proximal end of the end effector mounting flange, attached to the wrist joint T3 and the orientation of E1 around the T3 joint rotation axis depends on the following conditions: Angle input value (via motor M1) to link L1, angle input value (via motor M2) to pulley d2, length of link L1, pulley diameter ratio (d1 / d2), The length of the link L2, and the pulley diameter ratio d3 / d4.

The other rim is similar. Thus, as shown in FIGS. 4, 5A and 6, the inner link L3 passes through the shoulder revolving joint T6 (or a rotating joint T6 positioned as shown in FIG. 5A and additional rotation). To the carriage 18 via a joint T7. The outer link L4 is connected to the inner link L3 via an elbow rotation joint T4. The end effector mounting flange E1 is connected to the outer link L4 via the wrist rotation joint T5. The links and joints of this part of the manipulator form a kinematic chain that is open at one end and connected to the carriage 18 at the other end. The carriage 18 is an additional rotary joint positioned via a straight joint 20 as shown in FIG. 4 and also in FIG. 5B, or between the column 16 and the robot base 21 as shown in FIG. 5A. It is connected to the robot base 21 using (T7). The outer link L4 is coupled to the end effector mounting flange E2 via the wrist rotation joint T5.

The pulley d1 is provided to the shoulder rotational joint T6, and the pulley d6 is provided to the elbow rotational joint T4. A belt t3 extending along the inner link L1 is connected to the pulleys d5 and d6. The pulley d6 is attached to and becomes a part of the link L4 while being physically located in the inner link L3, and is a part of the elbow rotary joint T4, which is a link around the joint axis of the preceding link L3 ( Allow the rotation of L4). The pulley d7 is also provided at the elbow joint T4 and the pulley d8 is provided at the wrist rotation joint T5. The pulley d7 is attached to the link L3 while physically located in the link L4, and is a part of the axis around which the elbow joint T4 of the link L4 rotates. The pulley d8 is attached to the end effector mounting flange E2 while physically located in the link L4 and is an end effector mounting flange around the articulation axis of the preceding link L4 as part of the wrist joint T5. Allow rotation of (E2). The belt t4 is connected to the pulleys d7 and d8. The pulley d7 fixed to the link L3 on the axis around which the elbow joint T4 of the link L4 rotates is such that the shoulder joint T6 of the link L3 rotates around the common axis 22. When moving with the housing of the link (L3). When the link L3 rotates, the pulley d6 is also constrained to move with the link L3, which causes the pulley d6 to move in a manner similar to the movement of the satellite gears of the planetary gearbox. The pulley d6 rotates around the common axis 22 of the shoulder joint T6 because it is attached to the distal axis of the inner link L3 via the elbow joint T4. As part of the elbow joint T4, it also rotates around the distal axis of the preceding link L3. Rotation occurs as a result of pulley d6 connected to pulley d5 via belt t3, such as a timing belt, chain, or cable work.

The ratio between the diameters of the pulleys d5 and d6 is the angle provided to the actuator input (e.g. motor M3) connected to the link L3 and the actuator input (e.g. motor M4) connected to the pulley d5. In accordance with the amount of displacement, the relative angular displacement of the pulley d6 is performed. A complete description of the orientation of the elbow joint T4 (which is part of the pulley d6) and the position of the axis in the polar coordinate system based on the polar axis located coaxially with the axis Z6 of the shoulder joint T6 can be found in the link ( It depends on the length of L3, the input angular displacement value to pulley d5 (via motor M4) and link L3 (via motor M3), and the pulley diameter ratio d5 / d6. Thus, the R-θ coordinates of the proximal end of the subsequent link L4 attached to the elbow joint T4 and the orientation of the link L4 around the T4 articulation axis of rotation are defined. The R-θ coordinate of the distal end of the link L4, which includes the axis of rotation of the wrist joint T5, depends on the length of the link L4.

The position in the R-θ coordinate system of the link E2, ie the proximal end of the end effector mounting flange, attached to the wrist joint T5 and the orientation of E2 around the T5 joint rotation axis depends on the following conditions: Angle input value (via motor M3) to link L3, angle input value (via motor M4) to pulley d5, length of link L3, pulley diameter ratio (d5 / d6), The length of the link L4, and the pulley diameter ratio d7 / d8.

In the embodiment shown, the actuator is implemented as a motor. Referring to FIG. 7, the motor M1 is coupled to the inner link L1 via the shaft 34. The motor M2 is coupled to the pulley d1 via the shaft 44. The motor M3 is coupled to the inner link L3 via the shaft 54. Motor M4 is coupled to pulley d5 via shaft 64.

7A shows in more detail an arrangement of a motor suitable for use with an atmospheric robot. The motor M1 includes a stator 30 and a rotor 32 which concentrically surround the common shaft 22 of the carriage 18. The rotor is coupled to a hollow shaft 34 extending upwardly through the opening 36 in the interface flange 38 at the top of the base L0 to engage the housing 35 of the inner link L1 (see FIG. 7A). ). In this way, the shaft rotates with the rotor.

The motor M2 comprises a stator 40 and a rotor 42 which also concentrically surround the common axis 22 of the carriage 18 and are located inward of the motor M1. The rotor 42 of the motor M2 is coupled to the hollow shaft 44 extending upwardly to engage the pulley d1 (see FIG. 7). The shaft is located concentrically inward of the shaft 34 of the motor M1 and rotates with the rotor 42.

Motors M3 and M4 are located below motors M1 and M2. The motor M3 includes a stator 50 and a rotor 52 which concentrically surround the common shaft 22 of the carriage 18. The rotor 52 is coupled to a hollow shaft 54 extending upwardly to engage the housing 55 of the inner link L3 (see FIG. 7). The shaft 54 is located concentrically inward of the shafts 34, 44 of the motors M1, M2 and rotates with the rotor 52.

The motor M4 includes a stator 60 and a rotor 62 which are located outside of the motor M and also concentrically surround the common shaft 22 of the carriage 18. The rotor of the motor M4 is coupled to the shaft 64, which may or may not be hollow, extending upward to engage with the pulley d5 (see FIG. 7). The shaft 64 is located concentrically inward of the shafts 34, 44, 54 of the motors M1, M2, M3 and rotates with the rotor 62. Hollow shafts are useful to include power or signal cabling to end effectors if desired.

The four motors M1-M4 are mounted in the carriage 18 for vertical movement as indicated by arrow 72 and further described below. Power and signal cables (not shown) are provided for connection to the motor through suitable openings in the housing as can be appreciated in the art.

The shown arrangement of motors in which two motors are annularly or concentrically arranged one on the other is advantageous in the present invention. In a conventional arrangement, the motors are aligned linearly, resulting in an elongated motor package and an elongated shaft for the motor farthest away from the arm assembly. The longest shaft is subjected to greater torsional stress and limits the size of the motor. In the present invention, the size of the motor package is linearly reduced, allowing the use of larger motors and smaller shafts with greater torque. In addition, in certain applications, the space in which the motor can be placed is limited. As an example, in the manufacture of semiconductor equipment, the height of the robot arm is set to a predetermined standard height at the top of the floor. The motor arrangement of the present invention allows the use of four motors while minimizing the distance between the floor and the robot arm.

The robot assembly of the present invention can be used in a vacuum environment by selecting, for example, a metal band as the belt in the arm, low vapor pressure grease in the bearing, stainless steel and aluminum as the housing material of the arm, and a vacuum compatible servo motor as the drive. have. 8 shows an embodiment of four motors M1, M2, M3, M4 suitable for use with a vacuum compatible robot.

A suitable housing 80 is provided around the stator of the motor. Preferably, motors M1 and M2 are provided as one module 82 and motors M3 and M4 are provided as second module 84. The motor is arranged in a back-to-back structure in which the end shafts of the motor module are oriented in opposite directions when the motor is assembled into a two-module unit. A vacuum isolation barrier 86, such as a thin wall cylinder, is provided between the rotors 32, 42, 52, 62 and the stator 30, 40, 50, 60 so that the stator is in an atmospheric pressure environment. Power and signal cables (not shown) are introduced through suitably sealed openings in the partition 90 of the housing 80. The bellows 92 connects the motor housing 80 and the interface flange 38. During vertical movement of the carriage, the bellows expands and contracts. In this way, the robot arm can be maintained in a vacuum environment.

9 shows another embodiment for use with a vacuum compatible robot in which the motor is arranged in a back-to-face structure, with the end shafts of the motor module oriented in the same direction when the motor is assembled into a four-module unit. . Power and signal cables extend through partition 91 under motors M1 and M2 and partition 93 under motors M3 and M4. The back-to-face motor structure can also be used for the atmospheric robot shown in FIG. 7B.

As mentioned above, the ratio of the diameters of the pulleys determines the motion of the end effector mounting flange. To achieve linear radial translation of the end effector mounting flange, in one embodiment, the pulleys d1 and d2 have a diameter ratio of 2: 1 and the pulleys d3 and d4 have a diameter ratio of 1: 2. Have Similarly, the pulleys d5 and d6 have a diameter ratio of 2: 1, and the pulleys d7 and d8 have a diameter ratio of 1: 2.

The table of FIG. 10 shows the various motions of the end effector mounting flange when the ratio of the diameters of the inner pulleys (d1: d2 and d5: d6) is 2: 1. As an example, to extend the end effector mounting flange E1, the motor M1 is rotated counterclockwise in the embodiment shown, and the other three motors remain in the fixed mode. Movement of the motor M1 rotates the inner link L1 counterclockwise. Since the outer link L2 is connected to the inner link L2 via the joint T2 as described in more detail above, the outer link rotates clockwise at the elbow joint and the end effector mounting flange is on the center column. Rotate counterclockwise at the wrist joint while maintaining its centered orientation. The result is the extension of the end effector mounting flange E1.

The ratio of the diameters of the inner pulleys (d1: d2 and d5: d6) may also be 1: 1. In this case, the motion of the end effector mounting flange is as set in the table of FIG. As can be seen, in order to extend or retract the end effector mounting flange, the motors M1 and M2 both operate in opposite directions.

One suitable embodiment of one of the rims is shown in more detail in FIGS. 12-18. The inner link 102 includes a housing 104 that can have an individual cover plate 106. The recess 108 is formed at the proximal end of the housing for the component of the pulley d1. See FIGS. 14 and 17. The opening 110 is provided through a floor which is aligned on the central axis of the recess through which the shaft of the motor M2 extends for connection to the pulley d1. The shafts of the motors M3 and M4 extend through the opening 110 for connection to the link L3 housing and the pulley d5 (not shown). A shaft (not shown) of the motor M1 is connected to the housing 104. The recess 112 is provided at the distal end of the housing 104 for the components of the pulleys d2 and d3. In the illustrated embodiment, the pulleys d1 and d2 have a diameter ratio of 1: 1. Belt t1 extends between two pulleys d1, d2 in housing 104 in channel 114 in the embodiment shown.

The outer link 116 similarly includes a housing 118 that can have a separate cover plate 120. An opening 122 is formed in the proximal end of the housing 118 for the passage of the components of the pulley d3. See FIGS. 13, 16 and 18. A recess 124 is formed at the distal end of the housing 118 for the components of the pulley d4. As indicated in more detail in FIGS. 17 and 18, the pulleys d1, d2, d3, d4 are formed of various components, such as bearings, as will be appreciated by those skilled in the art.

In the illustrated embodiment, the belts t1 and t2 are each formed as two-member metal bands. See FIGS. 16 and 17. The members are connected to their respective pulleys in any suitable manner such as by screws. One member is towed on each pulley during rotation in one direction and the other member is towed on another pulley during rotation in the opposite direction. The belt may also be a timing belt with teeth that grip a corresponding surface on the pulley as an example. However, in semiconductor applications, two-member metal bands formed of stainless steel or other high alloyed steels are preferred because they produce fewer particles.

It will be appreciated that the motion of the rim of the embodiment described above should be coordinated so that the elbow joint does not collide. This coordinate setting can be achieved immediately by a suitably programmed controller.

By alternative embodiments of the present invention, illustrated in FIGS. 19 and 20, this possibility of collision can be avoided. In the robot assembly 210 of this embodiment, the inner and outer links 212, 214 of one rim 216 are equal to or larger than the diameter of the elbow rotation joint 224 of the longer rim 222. It is shorter than the inner and outer links 218, 220 of the other rim 222. In the elbow joint 224 a spacer 226 is disposed in the longer rim 222. In this way, the rotational joints of the two rims cannot collide, as indicated by path 228 of FIG. 20.

The present invention also provides a three degree of freedom system wherein the internal links of the two arms of the robotic assembly are connected to the shoulder joint such that rotation of both arms around the axis of the central column is coupled. Rotation of both arms is operated by a single actuator. Second and third actuators are provided for stretching the arm. This configuration also prevents the collision of the elbow joint.

21 and 22 illustrate an embodiment of a three degree of freedom robotic assembly 310. In this embodiment, the end effector mounting flanges E1, E2 are oriented in the same direction. The links L1 to L4, E1 and E2 and the joints T1 to T6 are embodied with the same pulleys d1 to d8 and belts t1 to t4 as described above, and therefore the same reference numerals for these elements. Is used. However, pulleys d1 and d5 are coupled to motor M1 'on a single shaft. Thus, the rotation of the motor M1 'results in the simultaneous rotation of both pulleys d1 and d5. Motor M2 'is coupled with inner link L1, and motor M3' is coupled with inner link L3. Thus, the inner links L1 and L3 can be operated independently to extend and retract the end effector mounting flanges E1 and E2, respectively.

In Fig. 22, the ratios of the diameters of the pulleys (d1: d2 and d5: d6) are 2: 1. The ratio of the diameters of the pulleys (d3: d4 and d7: d8) is 1: 2. Table of the motion of the end effector mounting flange of this embodiment is described in FIG. For example, to extend the end effector mounting flange E1, the motor M2 ′ connected to the inner link L1 is operated to rotate counterclockwise, and the motors M1 ′ and M3 ′ remain in the fixed mode. do. Shrinkage of the end effector mounting flange E1 is caused by rotating the motor M2 'clockwise. Similarly, in order to extend the end effector mounting flange E2, the motor M3 'connected to the inner link L3 is operated to rotate clockwise, and the motors M1' and M2 'are kept in the fixed mode. . To change the orientation of the end effector, all three motors are operated. Counterclockwise rotation of all three motors causes both arms and end effectors to rotate counterclockwise. Similarly, the clockwise rotation of all three motors causes both arms and end effectors to rotate clockwise. It should also be noted that the rotation of motor M1 'alone causes elongation or contraction of the end effector. Thus, changing the orientation of the end effector without its stretching or contracting requires the operation of all three motors. 24A illustrates the stretching sequence of one end effector mounting flange independent of the motion of the other end effector mounting flange. 24B illustrates the sequence of simultaneous movement of both end effector mounting flanges.

Referring to FIG. 25, the motor M1 ′ includes a rotor 332 and a stator 330 concentrically surrounding the central axis 322 of the column. The rotor 332 is connected to the hollow shaft 334 extending upward to engage the pulleys (d1 and d5). The motor M2 'includes a rotor 342 and a stator 340 which concentrically surround the motor M1' and the central axis 322 of the column. The rotor 342 of the motor M2 'is connected to a hollow shaft 344 arranged concentrically outward of the shaft 334 of the motor M1' to engage the inner link L1.

The motor M3 'is disposed below the motors M1' and M2 '. Motor M3 'includes a rotor 352 and a stator 350 that concentrically surround the central axis 322 of the column. The rotor 352 is connected to the hollow shaft 354 extending upwardly to engage the inner link (L3). The shaft 354 is located concentrically inward of the shafts 334, 344 of the motors M1 ′ and M2 ′.

In the above three degrees of freedom embodiment, the end effector mounting flanges are oriented in the same direction. In addition, the end effector mounting flange may be oriented to face in the opposite direction, as illustrated in FIG. 26. In this case, both motors M2 ', M3' are rotated in the same direction, counterclockwise in the illustrated embodiment, to extend the end effector mounting flange, as shown in the table of FIG.

In other embodiments, the end effector mounting flanges may be oriented at an acute angle with respect to each other. See FIG. 28. The elongation, retraction and rotational movement of the end effector mounting flange is the same as described above with respect to the co-op 3 degree of freedom system in the table of FIG.

In another embodiment illustrated in FIGS. 29 to 31, the inner links L1, L3 are aligned and arranged in a single inner link housing. The outer links L2 and L4 are coaxially mounted on the inner links at the elbow joints T2 and T4. The inner link housing is mounted to rotate about the rotary joint T1 on the shaft of the motor M1 ". Within the inner link housing, the belt t1 is connected to the pulley d1 and the pulley d2, and the belt A t3 is connected to the pulley d5 and the pulley d6. The motor M2 "is coupled with the outer link L2 via the pulley d1. The motor M3 "is connected to the outer link L4 via the pulley d5. For the configuration where the diameter ratios d1: d2 and d5: d6 of the inner pulley are 2: 1, the movement of the end effector mounting flange is It is described in the table of Fig. 32. For the configuration where the diameter ratios d1: d2 and d5: d6 of the inner pulley are 1: 1, the movement of the end effector mounting flange is described in the table of FIG.

34-45 illustrate an embodiment for providing vertical movement of the arm assembly. Preferably the motor housed in the housing 80 forms a motor stack 404 supported on the carriage 18. The motor stack and carriage are mounted to column 16 for vertical movement with respect to the column. The protective cage 406 is preferably mounted to work together in the column to completely receive the carriage. In the final assembly, an outer covering (not shown) is also disposed around the entire assembly to receive the vertical motion assembly.

Column 16 supports an externally threaded rotary lead screw 410 and a Z-axis actuator 412 to effect rotation of the lead screw. An internal threaded nut 414 is secured to the carriage 18 and disposed on the lead screw 410 such that rotation of the lead screw causes vertical translation of the nut 414 and carriage 18. Two vertically extending linear guide rails 418 are mounted on the column! 6. The linear bearing 422, which forms the straight joint 20, is fixed to the carriage and engages with the linear guide rail for vertical movement along the guide rail. In this way, as described above, the carriage in which the robot arms 12, 14 are mounted thereon can move in the vertical direction.

More specifically, referring to FIG. 38, column 16 includes two vertically extending side members 426, to which two linear rails 418, a master rail and an auxiliary rail are secured. The two rails are parallel to the vertical axis Z20 of the straight joint. For purposes of illustration, four linear motion bearings 422 are illustrated in FIG. 28. However, it will be appreciated that the bearing is fixedly attached to the carriage 18 and can move vertically along the rail 418.

39 and 40 illustrate the carriage 18. The carriage supports and integrates a linear motion bearing 422 that forms a straight joint 20. Linear motion bearings are mounted along the master and auxiliary rails 418 at column 16 to provide vertical movement along the rails. Although any suitable number can be provided, it is preferred that four bearings be used.

The nut housing 430 extends from one side of the stage 428 of the carriage 18, and the ball nut 414 is fixed in the nut housing so that it does not rotate relative to the carriage. The ball nut acts as a transmission mechanism between the Z-axis actuator 412 and the straight joint 20.

Brackets 432 for mounting and supporting the motor stack 404 are attached to the stage 428 of the carriage 18 on opposite sides from the linear motion bearings 422. The bracket is preferably formed separately from the stage so that the bracket can be designed to support various motor stacks without affecting the stage design. Thus, the carriage can be reconfigured to meet different requirements by just replacing one motor stack bracket with a different motor stack bracket.

Lead screw 410 is mounted on column 16 by, for example, angler contact ball bearings 436 to rotate about an axis parallel to axis Z20. Referring to FIG. 44, a Z-axis actuator 412 is mounted to the base of the column to provide rotation to the lead screw. In the illustrated embodiment, the Z-axis actuator includes a servo motor that includes a stator 440 supported by column 16 and a rotor 438 coupled to lead screw 410. An optical position encoder 442 is disposed at the base.

The lead screw 410 passes through a ball nut 414 that is secured to the carriage 18 to prevent rotation. Thus, the rotation of the lead screw is converted to the linear motion of the nut. In this way, the carriage supported by the linear bearing moves up and down in the vertical direction in accordance with the rotation of the lead screw.

A brake assembly 450 is provided at the top of the column. See FIG. 45. The brake assembly holds the arm in its vertical position in the event of a power failure. The brake assembly includes a brake coil 452 secured to the column 16 by a coil mounting plate 454. A permanent magnet (not shown in FIG. 45) is disposed in the coil. A brake pad 456 formed of magnetic material and adsorbed to the permanent magnet is fixed to the hub 458 and biased in a direction away from the coil 452 by any suitable biasing mechanism, such as a spring (not shown in FIG. 45). It is. In addition, when the coil is excited, the magnetic field from the coil overcomes the magnetic field of the permanent magnet in the coil and, in conjunction with the biasing mechanism, pushes the brake pad away from the coil. Hub 458 is secured to lead screw 410 to rotate with it via two square keys 460 that transfer torque from the lead screw to the hub. Thus, when the coil is excited, there is a gap 462 between the brake pad 456 and the coil 452. The brake pads rotate with the hub and lead screws, and no braking effect is provided.

When power is lost, coil 452 is no longer excited. At this time, the brake pad 456 is adsorbed to contact the coil by a permanent magnet in the coil. The friction between the pad and the coil is associated with a key that holds the hub fixed to the lead screw, thereby preventing movement of the hub and lead screw. In this way, the lead screw cannot rotate when power is lost, and the arm is held in its vertical position. It will be appreciated that other braking structures may be provided.

In another aspect of the present invention, a dual arm robot is provided that employs a modular design using only two motors. In these embodiments, the inner links of each of the two arms are attached together in a fixed angular relationship. The angle between the inner links can be any suitable angle. Once the robot is assembled, no change can be made by disassembling the robot and reassembling it into a different structure.

A first actuator, such as a motor, activates the rotation of the inner link around the vertical axis. A second actuator, such as another motor, actuates the extension of one end effector mounting flange at one time with an associated end effector. Couplings are provided that allow the selection of specific end effectors to stretch or contract.

The robot according to this aspect can be assembled in a number of configurations. 46A-49 illustrate a configuration in which the inner links are linearly aligned and the end effectors are oriented in opposite directions. The movement of one end effector is illustrated in FIG. 48, where it can be seen that the inner link remains aligned during the stretching of the first end effector. Rotation of only one of the outer links around its “elbow” joint results in elongation of the end effector attached thereto. The other outer link is temporarily fixed to its elbow joint, thus causing the rotation of the other end effector.

50A-53 illustrate a configuration in which the inner link is oriented at an angle and the end effector is oriented in the same direction. Figure 52 illustrates the movement of this configuration during the stretching of one of the end effectors. Similarly, it is apparent that the inner links remain aligned in the same angular relationship, and the second end effector rotates passively during the stretching of the first end effector.

54A-55 illustrate a configuration in which the inner links are oriented at an angle with respect to each other and the end effectors are oriented at an acute angle with respect to each other.

58A-61C illustrate a dual end effector arm with two actuators that can be operated in a manner similar to that of the embodiment of FIGS. 46A-49. 60A, 60B and 60C illustrate various stretch options. 60A and 60B, when one end effector is extended, the other end effector is manually rotated. In Figure 60C, both end effectors are stretched. 61A illustrates the operation of two motors to effect stretching or rotation. 61B illustrates two motors arranged concentrically. 61C illustrates two motors arranged in a straight line.

Suitable couplings that allow the selection of end effectors to be stretched or shrunk are illustrated in FIGS. 56A-56J. This coupling includes a Geneva type mechanism. The Geneva mechanism produces an intermittent rotation from a continuous rotation.

Referring to FIG. 56A, the inner link L1 and the inner link L3 are attached together at a fixed angle α. In the illustrated embodiment, the link L3 is above the link L1 and both links are mounted to the rotary joint T1. The joint T1 is the connecting joint between the link and the carriage 18 (or directly to the base LO if no vertical motion function is included). Thus, both links are attached to a shaft 532 coupled to the rotor of motor M1, both links rotating together as a single member.

Referring to FIGS. 56B-56E, the lever A1 is attached to the inner link L1 at the rotary joint T100, and the lever A2 is attached to the inner link L3 at the rotary joint T200. The lever also includes slots 510, 512 having circular portions 514, 516 and linear portions 518, 520, respectively. The axis of rotation of the pulleys d1 and d5 is coaxial with the center of the circular part of each slot in the levers A1 and A2.

The rotor of the motor M2 is attached to a shaft 522 comprising two coupling members R1, R2 extending at a fixed angle β at the end of the shaft. The angle between the coupling members is fixed during assembly. The coupling member has rollers 528, 530 on its ends moving in the slots 510, 520 of the levers A1 and A2. The torque from the motor M2 is transmitted to the pulleys d1 and d5 via the rollers R1 and R2. The linear portion of the slot functions as a partial Geneva sphere eastern part, and as best shown in FIGS. 56G-56J, when the coupling member is rotated by the motor M2, one of the two levers is connected to the motor M2 shaft ( 522 relative to the displacement.

Referring to FIG. 56D, the lever A1 only oscillates around the axis of the joint T100 only when the coupling R1 rotates counterclockwise with respect to the inner link L1. In this case, the rotary roller 528 of the coupling member R1 is mounted in the linear portion 518 of the slot 510 of the lever A1, causing the lever A1 to swing in the direction indicated by the arrow 540. Similarly, the lever A2 oscillates around the axis of the joint T200 only when the rotating roller 530 of the coupling member R2 rotates clockwise with respect to the inner link L3. In this case, the rotating roller of the coupling member R2 is mounted in the linear portion 520 of the slot 512 of the lever A2, causing the lever A2 to swing in the direction indicated by the arrow 542.

56F-56J illustrate an example using the coaxial configuration of end effectors E1 and E2. When the motor M1 is rotated counterclockwise, the motor M2 is rotated clockwise, the end effector E1 is extended, the end effector E2 is rotated, and the lever A2 is illustrated. You can see that it is displaced together. When E1 extends, the inner link L1 rotates counterclockwise. The lever A1 remains in the same position.

57 conceptually illustrates how the coupling is integrated into the robotic assembly.

As described above, embodiments of this aspect of the present invention can function modularly so that various configurations can be provided by disassembling and reassembling the arms. 62 illustrates an example of modifying a dual end effector arm with end effectors in opposite orientations to an arm with end effectors in collinear orientations.

In another aspect of the present invention, four end effectors are provided on a dual arm robot. More specifically, two outer links are associated with a single inner link of each rim. The robot according to this aspect can be assembled in a number of embodiments with various degrees of freedom, depending on the number of actuators used.

63A-64 illustrate an embodiment using six actuators that can be motors to provide independent rotation and translation of each end effector. Each arm functions as in the triaxial embodiment described above in connection with FIGS. 29-33. (As noted above, the vertical or Z-axis is not included in this application of the term "axis".)

A triaxial embodiment using three actuators is illustrated in FIGS. 65A-75. In this embodiment, the inner links are attached together in a fixed angular relationship. The Geneva type coupling described above in connection with FIGS. 56 and 57 is provided for selecting the arm to be moved. Thus, stretching one or two end effectors results in passive rotation of the other end effector.

65A illustrates a triaxial embodiment employing quad end effectors oriented in the same direction. 65B and 65C illustrate two configurations for spacing end effectors in the vertical direction to avoid collisions. 65D illustrates the sequential stretching of the individual end effectors. 65E illustrates the simultaneous stretching of two end effectors associated with two arms. 66A and 66B illustrate the control of various end effectors by three motors M1, M2, M3, and FIG. 67 is a table of motion for this configuration.

68A-69 are similar diagrams for another triaxial embodiment employing a quad ended effector oriented in the same direction.

70 illustrates a stretch sequence for a single end effector of the triaxial embodiment. 71 illustrates a stretch sequence for simultaneous stretching of adjacent end effectors for a triaxial embodiment.

72A-74 illustrate another triaxial embodiment in which pairs of end effectors are oriented in opposite directions.

75 illustrates the three axis drive module in more detail.

The robotic assembly includes a suitable controller in communication with the motor. The robot controller is a control circuit in the form of a general purpose computer. Computers include input / output devices such as keyboards, mice, monitors, printers, and the like, for engaging with a robot. Control signals to and from the robot are exchanged through input / output devices. The control signal includes a detected object signal from the object sensor, when present and a vacuum sensor signal from the vacuum sensor, when present. These signals are delivered to the central processing unit (CPU) via the bus. The bus is also connected to memory (e.g., RAM, disk memory, etc.) to allow the CPU to execute programs stored in the memory. The memory preferably stores the substrate loading sequence controller program, if necessary, the vacuum signal interrupter program and the motion control unit program. Appropriate operation of the computer in conjunction with the input / output device, CPU, and memory is understood by those skilled in the art.

The dual arm robot of the present invention is particularly suitable for increasing the throughput of wafers in vacuum transfer modules. In the vacuum transfer module, the wafer is held on the robot's end effector only by friction. Thus, the acceleration of the wafer during robot rotation and arm stretching is limited by the amount of friction coefficient of the pad material of the end effector. In low temperature applications, materials such as VITON, KALREZ and red silicone compounds are used. In high temperature applications, ceramics and quartz are used. In any case, the frictional force limits the total transfer time of the wafer, preventing full utilization of the ability of the prior art, single arm robot to deliver wafers quickly. The dual arm robot of the present invention does not require rotation of the robot by 180 ° when the wafer is replaced in the process module. Once the wafer is picked up from the stage disposed in the process module by one of the arms and contracted into the central transfer chamber, the other arm stretches and places the next wafer on the stage of the process module. This sequence can be used when the wafer is transferred from the load lock to the transfer chamber. If each rotating joint of the link of the arm is independently controlled by its actuator, two load locks or one load lock and a process station or two process stations in the cluster can be served simultaneously, still with slower acceleration and transfer Enable speed.

Many variations of the present invention are possible. By way of example, the end effector may be a single pedal end effector or a dual pedal end effector. The dual pedal end effector enables time reduction by approaching the object on opposite sides of the polar coordinate system by reversing the direction of movement of the arm assembly. The pedals of the dual pedal end effector may be the same or different, depending on the intended use.

The actuator mechanism can be connected directly to the link, such as by means of motor-driven pulleys and belts, or via mechanical transmission if one or more output characteristics of the actuator mechanism, such as force, torque, speed, resolution, etc., are changed according to the required performance. Can be. The specific mechanism used is not critical and one skilled in the art will recognize that any configuration can be used.

The invention is not to be limited to what has been particularly illustrated and described, except as indicated in the appended claims.

The present invention provides a dual arm robot in which each of the two arms has a set of joint / link pairs that form at least three degrees of freedom to provide independent horizontal translation (extension and contraction) and rotation of the distal link in association with the actuator assembly. to provide. The innermost or proximal joint of the inner link is aligned on a common vertical axis for rotation. The outermost links of each arm are deviated horizontally from each other by spacers provided in the joints within the joint / link pair to prevent collisions between the outermost links.

In the semiconductor field, the outermost link also includes end effector mounting flanges, which are associated with various types of end effectors for manipulating substrate media such as semiconductor wafers. If dual pedal end effectors are used on each arm, up to four substrates can be placed simultaneously in the transfer chamber. Thus, system throughput is increased. In addition, since the two arms have the ability to independently stretch, retract and rotate, the robotic assembly enables wafer replacement when the wafer is moved into or out of a load lock or process module attached to the transfer chamber. Depending on the choice of components and materials designed for the robot structure, the robot also has the advantages of being able to be used in atmospheric and vacuum environments.

Claims (41)

A robot assembly for manipulating one or more substrates, First and second arms supported by the column, the first arm further comprising a first rim, the first rim configured to provide translation and rotation of the last link of the first rim in a horizontal plane. A first set of rotary joint / link pairs, the second arm further comprising a second rim, the second rim configured to provide translation and rotation of the last link of the second rim in a horizontal plane A second set of rotary joint / link pairs, the first and second rims having first and second arms having proximal rotary joints having a common vertical axis of rotation; An actuator assembly coupled to the first set of rotating joints / link pairs and the second set of rotating joints / link pairs to effect rotation and translation of the last link of the first and second rims, The first rim and the second rim, in association with the actuator assembly, form four degrees of freedom, whereby the end links of the first and second rims are independently horizontally translatable for stretching and contracting, and common vertical Robot assembly independently rotatable on the axis of rotation. The robotic assembly of claim 1, wherein the first arm and the second arm further comprise shared straight joints and links configured to provide vertical displacement. 3. The robotic assembly of claim 2, wherein the straight joints and links are supported by the column. The robotic assembly of claim 2, wherein the straight joints and links are rotatably mounted on the support surface. The robotic assembly of claim 2, wherein the straight joints and links are fixedly mounted on a support surface. 2. The terminal of claim 1 wherein the first set of rotary joint / link pairs comprises a first end effector mounting flange and the second set of rotary joint / link pairs comprises a second end effector mounting flange. And the first set of rotary joint / link pairs and the second set of rotary joint / link pairs are configured to vertically bias the first end effector mounting flange from the second end effector mounting flange. The joint of claim 1, wherein the first set of joint / link pairs of the first rim comprises a first shoulder rotational joint and a first inner link, a first elbow rotational joint and a first external link, a first wrist rotational joint, and a first set. A second set of joint / link pairs of the second rim, the second end rotating joint and the second inner link, the second elbow rotating joint and the second outer link, and a second wrist rotation; A robotic assembly comprising a joint and a second end effector mounting flange. 8. The robotic assembly of claim 7, wherein the actuator assembly comprises a first actuator assembly coupled to the first shoulder joint and the first inner link and a second actuator assembly coupled to the second shoulder joint and the second inner link. 10. The system of claim 7, wherein the first inner link comprises a belt fixed at the shoulder joint, the first pulley at the shoulder joint, and a movement around the second pulley at the elbow joint, the first outer link at the elbow joint, And a belt in which movement around the fourth pulley at the wrist joint is fixed. 10. The robotic assembly of claim 9 wherein the ratio of the diameter of the first pulley to the second pulley is 2: 1. 10. The robotic assembly of claim 9 wherein the ratio of the diameter of the first pulley to the second pulley is 1: 1. 10. The robotic assembly of claim 9 wherein the ratio of the diameter of the third pulley to the fourth pulley is 1: 2. 8. The method of claim 7, wherein the second inner link comprises a belt with a fifth pulley at the shoulder joint and a belt fixed around the sixth pulley at the elbow joint, the second outer link at the seventh pulley at the elbow joint, And a belt in which movement around the eighth pulley at the wrist joint is fixed. The robotic assembly of claim 13, wherein the ratio of the diameter of the fifth pulley to the sixth pulley is 2: 1. The robotic assembly of claim 13, wherein the ratio of the diameter of the fifth pulley to the sixth pulley is 1: 1. The robotic assembly of claim 13, wherein the ratio of the diameter of the seventh pulley to the eighth pulley is 1: 2. 8. The vertical range of claim 7 wherein one of the first and second elbow joints is larger than the other of the first and second elbow joints, sufficient to vertically bias the end effector mounting flanges of the first and second rims. And a robot assembly, thereby avoiding collision of the end effector mounting flange. 8. The method of claim 7, wherein one of the first and second rims is sufficient to avoid collisions between the middle portion of the first and second rims during rotation about a shared vertical axis of the first and second shoulder joints. Robot assembly shorter than the remaining one of the first and second rims. 8. The robotic assembly of claim 7, wherein the actuator assembly comprises a first motor operably coupled to the first shoulder joint and a second motor operatively coupled to the first internal link. 20. The robotic assembly of claim 19, wherein the actuator assembly further comprises a third motor rotatably coupled to the second shoulder joint and a fourth motor rotatably coupled to the second internal link. 21. The robotic assembly of claim 20, wherein the third and fourth motors are disposed below the first and second motors in the motor package enclosure. 22. The robotic assembly of claim 21, wherein the motor package enclosure is sealed to maintain a vacuum therein. The robotic assembly of claim 1, wherein the actuator assembly comprises a hollow shaft disposed concentrically about a common vertical axis of the proximal rotary joint. The robotic assembly of claim 1, wherein the terminal link comprises an end effector mounting flange configured to support an end effector for supporting the substrate. The robotic assembly of claim 1, wherein the last link comprises an end effector mounting flange configured to support a semiconductor wafer handling end effector. The robotic assembly of claim 1, further comprising a housing arranged to maintain a vacuum environment for receiving the actuator assembly. The robotic assembly of claim 1, further comprising a controller operably connected to the actuator assembly. In a robotic assembly for transferring a substrate, A first arm and a second arm supported by the column, the first arm further comprising a first rim, the first rim configured to provide translation and rotation of the last link of the first rim in a horizontal plane A rotational joint / link pair comprising a first set of / line pairs, the second arm further comprising a second rim, the second rim configured to provide translation and rotation of the last link of the second rim in a horizontal plane. A second set of first and second rims comprising: first and second arms having a proximal internal joint and a proximal rotary joint having a common vertical axis of rotation contained within a common housing;  An actuator assembly coupled to the first set of rotary joint / link pairs and the second set of rotary joint / link pairs to effect rotation and translation of the last link of the first and second rims, Each of the first and second rims forms at least three degrees of freedom per rim in conjunction with the actuator assembly, whereby the end links of the first and second rims can independently translate horizontally for stretching and contracting. Robotic assembly. 29. The joint of claim 28 wherein the first set of joint / link pairs of the first rim comprises a first shoulder rotational joint and a first inner link, a first elbow rotational joint and a first outer link, a first wrist rotational joint and a first set. A second set of joint / link pairs of the second rim, the second end rotating joint and the second inner link, the second elbow rotating joint and the second outer link, and a second wrist rotation; A robotic assembly comprising a joint and a second end effector mounting flange. 30. The actuator assembly of claim 29, wherein the actuator assembly is rotatably coupled to a first motor rotatably coupled to the first inner link and the second inner link, a second motor rotatably coupled to the first shoulder joint, and a second shoulder joint. A robot assembly comprising a coupled third motor. 31. The robotic assembly of claim 30, wherein the first motor concentrically surrounds the second motor and the third motor is disposed below the first motor and the second motor. 31. The robotic assembly of claim 30, wherein the first motor, second motor and third motor are disposed within the motor package enclosure. 33. The robotic assembly of claim 32, wherein the motor package enclosure is sealed to maintain a vacuum therein. 29. The robotic assembly of claim 28, further comprising a controller operably coupled to the actuator assembly. A robot assembly comprising a vertical motion assembly, the robot assembly comprising: Vertical movement assembly A column supported on the base, A pair of vertical extension rails disposed on the column, A rotatable drive member mounted to the column to rotate about a vertical axis parallel to the vertically extending rail, A carriage mounted to reciprocate along the rail, the carriage including a stage configured to support a motor stack thereon and a straight joint capable of engaging with the column, the stage rotating to transfer the rotational movement of the drive member to the linear movement of the carriage A carriage comprising a transmission mechanism that can engage a possible drive member, At least one robot arm having an end effector mounting flange at its distal end, and And a motor stack disposed on the stage of the carriage, the motor stack operatively communicating with the robot arm to provide translation and rotation of the end effector mounting flange. 36. The robotic assembly of claim 35, wherein the rotatable drive member comprises a rotatable lead screw and the transmission mechanism includes a nut secured to the stage and disposed to engage with the lead screw in rotation. 36. The robotic assembly of claim 35, wherein the stage comprises a motor stack mounting bracket and the motor stack is disposed on the motor stack mounting bracket. 36. The robotic assembly of claim 35, further comprising a braking mechanism operable to maintain the vertical position of the carriage in response to a power failure. A robot assembly for manipulating one or more substrates, A first arm and a second arm supported by the column, the first arm further comprising a first rim having a first end effector mounting flange pair disposed at the distal end, the first rim in a horizontal plane; A first set of rotary joint / link pairs configured to provide translation and rotation of the pair of end effectors in the second arm, wherein the second arm adds a second rim having a second end effector mounting flange pair disposed at the distal end; Wherein the second rim comprises a second set of rotary joint / link pairs configured to provide translation and rotation of the second end effector pair in a horizontal plane, the first rim and the second rim having a common vertical axis of rotation. First and second arms having proximal rotational joints, And an actuator assembly coupled to the first set of rotary joint / link pairs and the second set of rotary joint / link pairs to effect rotation and translation of the end effectors of the first and second rims. 40. The system of claim 39, wherein the first and second rims, in conjunction with the actuator assembly, form six degrees of freedom, whereby the end effector mounting flanges of the first and second rims are independently rotatable on a common vertical axis of rotation. And independently translatable horizontally for stretching and contracting. 40. The apparatus of claim 39, wherein the first and second rims form three degrees of freedom in conjunction with the actuator assembly, whereby the end effector mounting flanges of the first and second rims are independently horizontal for extension and retraction. Robotic assembly capable of translation.

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