KR20210016095A - A Transport Apparatus - Google Patents

Abstract

drive; As a first arm connected to the driving device, the first arm includes a first link, a second link, and an end effector connected in series to the driving device, and the first link and the second link have different effective lengths A first arm, having a field; And a system for limiting rotation of the end effector relative to the second link such that only a linear motion of the end effector relative to the drive device is provided when the first arm is extended or retracted. Device.

Description

Transport Apparatus {A Transport Apparatus}

The disclosed embodiments relate to a robot with arms having different link lengths, and more particularly to a robot with one or more arms of different link lengths each supporting one or more substrates.

Vacuum, atmospheric and controlled environment processing for applications such as semiconductors, LEDs, solar, MEMS or other devices, can be used for substrates and carriers attached to carriers) to and from storage locations, processing locations, or other locations using robotics and other forms of automation. Such transport of substrates can move individual substrates, groups of substrates, with single arms carrying one or more substrates or multiple arms each carrying one or more substrates. Many manufacturing, such as those associated with semiconductor manufacturing, for example, takes place in a clean or vacuum environment where footprint and volume are rare. In addition, automated transport is implemented such that minimization of transport time results in reduced cycle time and increased throughput and utilization of associated equipment. Therefore, for a given range of transport applications, it is desirable to provide substrate transport automation requiring minimal trajectory and work space volume with minimized transport time.

The following summary is intended to be illustrative only. The summary is not intended to limit the claims.

According to an aspect of the exemplary embodiment, a conveying device comprises: a drive; A first arm connected to the driving device, wherein the first arm includes a first link, a second link, and an end effector connected in series to the driving device, the first link and the second link A first arm having different effective lengths; And a system for limiting rotation of the end effector relative to the second link such that only a linear motion of the end effector relative to the drive is provided when the first arm is extended or retracted. Includes;

According to another aspect of the exemplary embodiment: rotating a first link of an arm by a drive device; Rotating the second link such that the second link of the arm rotates on the first link when the first link rotates; And the first link and the second link have different effective lengths, and the end effector on the second link is limited so that when the arm is extended or retracted, the end effector can only make substantially linear motion relative to the A method comprising: rotating the end effector on the second link so that the rotation of the end effector is restricted is proposed.

According to another aspect of the exemplary embodiment, there is provided a drive device; And an arm connected to the driving device, wherein the arm comprises: a first link connected to the driving device at a first joint, a second link connected to the first link at a second joint, and a second 3 comprises an end effector connected to the second link at the joint, the first link includes a first length between the first joint and the second joint, the first length is the second joint and the Different from the second length of the second link between the third joints, and the movement of the end effector in the third joint is a substantially radial straight line with respect to the center of rotation of the driving device during the extension or contraction of the arm. A conveying device is provided that is constrained to track.

The foregoing aspects and other features are explained in the following description in connection with the accompanying drawings, among which:
1A is a top view of the conveying device;
1B is a side view of the conveying device;
2A is a schematic partial plan view of the conveying device;
Fig. 2b is a schematic view of a part of the conveying device in side section;
3A is a top view of the conveying device;
3B is a top view of the conveying device;
3C is a top view of the conveying device;
4 is a graphical illustration;
5A is a top view of the conveying device;
5B is a side view of the conveying device;
6A is a schematic partial plan view of the conveying device;
Fig. 6B is a schematic view of a part of a side section of the conveying device;
7A is a top view of the conveying device;
7B is a plan view of the conveying device;
7C is a top view of the conveying device;
8 is a graphical illustration;
Fig. 9 is a partial schematic view of a side cross-section of the conveying device;
10A is a top view of the conveying device;
10B is a side view of the conveying device;
11A is a plan view of the conveying device;
11B is a side view of the conveying device;
12 is a schematic view of a part of a side cross-section of the conveying device;
13 is a schematic view of a part of a side cross-section of the conveying device;
14A is a top view of the conveying device;
14B is a top view of the conveying device;
14C is a top view of the conveying device;
15A is a plan view of the conveying device;
15B is a side view of the conveying device;
16A is a top view of the conveying device;
16B is a side view of the conveying device;
17A is a plan view of the conveying device;
17B is a side view of the conveying device;
Fig. 18 is a partial schematic view in a side section of the conveying device;
19 is a schematic view of a part of a side cross-section of the conveying device;
20A is a plan view of the conveying device;
20B is a top view of the conveying device;
20C is a top view of the conveying device;
21A is a plan view of the conveying device;
21B is a side view of the conveying device;
22A is a top view of the conveying device;
22B is a side view of the conveying device;
Fig. 23 is a partial schematic view in a side section of the conveying device;
24A is a top view of the conveying device;
24B is a plan view of the conveying device;
24C is a plan view of the conveying device;
25A is a plan view of the conveying device;
25B is a side view of the conveying device;
26A is a top view of the conveying device;
26B is a top view of the conveying device;
26C is a top view of the conveying device;
27A is a plan view of the conveying device;
27B is a side view of the conveying device;
28A is a plan view of the conveying device;
28B is a side view of the conveying device;
29A is a top view of the conveying device;
29B is a plan view of the conveying device;
29C is a top view of the conveying device;
30A is a top view of the conveying device;
30B is a side view of the conveying device;
31A is a top view of the conveying device;
31B is a side view of the conveying device;
32A is a top view of the conveying device;
32B is a top view of the conveying device;
32C is a top view of the conveying device;
32D is a top view of the conveying device;
33A is a plan view of the conveying device;
33B is a side view of the conveying device;
34A is a plan view of the conveying device;
34B is a plan view of the conveying device;
34C is a top view of the conveying device;
35A is a plan view of the conveying device;
35B is a side view of the conveying device;
36 is a plan view of the conveying device;
37A is a top view of the conveying device;
37B is a side view of the conveying device;
38A is a top view of the conveying device;
38B is a side view of the conveying device;
39 is a plan view of the conveying device;
40A is a top view of the conveying device;
40B is a side view of the conveying device;
41 is a plan view of the conveying device;
42 is a plan view of the conveying device;
43A is a plan view of the conveying device;
43B is a side view of the conveying device;
44 is a plan view of the conveying device;
45 is a plan view of the conveying device;
46A is a plan view of the conveying device;
46B is a side view of the conveying device;
47A is a plan view of the conveying device;
47B is a side view of the conveying device;
48 is a plan view of the conveying device;
49 is a plan view of the conveying device;
50A is a plan view of the conveying device;
50B is a side view of the conveying device;
51 is a plan view of the conveying device;
52A is a top view of the conveying device;
52B is a side view of the conveying device;
53 is a plan view of the conveying device;
54A is a top view of the conveying device;
54B is a side view of the conveying device;
55A is a plan view of the conveying device;
55B is a top view of the conveying device;
55C is a top view of the conveying device;
56A is a plan view of the conveying device;
56B is a side view of the conveying device;
57A is a plan view of the conveying device;
57B is a top view of the conveying device;
57C is a top view of the conveying device;
58A is a top view of the conveying device;
58B is a side view of the conveying device;
59A is a plan view of the conveying device;
59B is a plan view of the conveying device;
59C is a top view of the conveying device;
60A is a top view of the conveying device;
60B is a side view of the conveying device;
61A is a plan view of the conveying device;
61B is a plan view of the conveying device;
61C is a top view of the conveying device;
62 is a plan view of the conveying device;
63 is a diagram illustrating exemplary pulleys;
64 is a plan view of the conveying device;
Figure 65 is a copy view of the transport device;
66A is a top view of an exemplary substrate transport robot;
66B is a side view of an exemplary substrate transport robot;
67A-67C are top views of an exemplary substrate transport robot;
68A-68B are top views of an exemplary substrate transport robot;
69A is a top view of an exemplary substrate transport robot;
69B is a side view of an exemplary substrate transport robot;
70A is a schematic top view of an exemplary substrate transport robot;
70B is a schematic cross-sectional view of an exemplary substrate transport robot;
71A is a top schematic view of an exemplary substrate transport robot;
71B is a schematic cross-sectional view of an exemplary substrate transport robot;
72A-72C are top views of an exemplary substrate transport robot;
73A-73C are plan views of an exemplary substrate transport robot;
74A is a top view of an exemplary substrate transport robot;
74B is a side view of an exemplary substrate transport robot;
75A is a schematic top view of an exemplary substrate transport robot;
75B is a schematic cross-sectional view of an exemplary substrate transport robot;
76A is a top schematic view of an exemplary substrate transport robot;
76B is a schematic cross-sectional view of an exemplary substrate transport robot;
77A-77C are top views of an exemplary substrate transport robot;
78A-78C are top views of an exemplary substrate transport robot;
79A is a top view of an exemplary substrate transport robot;
79B is a side view of an exemplary substrate transport robot;
80A is a schematic top view of an exemplary substrate transport robot;
80B is a schematic cross-sectional view of an exemplary substrate transport robot;
81A-81C are top views of an exemplary substrate transport robot;
82A-62C are top views of an exemplary substrate transport robot;
83A is a top view of an exemplary substrate transport robot;
83B is a side view of an exemplary substrate transport robot;
84A is a top view of an exemplary substrate transport robot;
84B is a side view of an exemplary substrate transport robot;
85A-85C are top views of an exemplary substrate transport robot;
86A-86C are top views of an exemplary substrate transport robot;
87A is a top schematic view of an exemplary substrate transport robot;
87B is a schematic cross-sectional view of an exemplary substrate transport robot;
88A is a schematic top view of an exemplary substrate transport robot;
88B is a schematic cross-sectional view of an exemplary substrate transport robot;
89A is a schematic top view of an exemplary substrate transport robot;
89B is a schematic cross-sectional view of an exemplary substrate transport robot;
90A is a top view of an exemplary substrate transport apparatus;
90B is a side view of an exemplary substrate transport apparatus;
91A is a plan view of an exemplary substrate transport apparatus; And
91B is a side view of an exemplary substrate transport apparatus.

In addition to the embodiments disclosed below, there may be other embodiments of the disclosed embodiments, and may be implemented or performed in various ways. Accordingly, it will be understood that the disclosed embodiments are not limited to the details of arrangement and configuration of elements presented in the description below or illustrated in the drawings, in their use cases. Although only one embodiment has been described herein, the claims of this specification are not limited to the embodiment. Furthermore, the claims of this specification are not to be read as limiting unless there is clear and convincing evidence that specifies a specific exclusion, limitation, or disclaimer.

Referring now to FIGS. 1A and 1B, a top view and a side view of a robot 10 with a drive device 12 and an arm 14 are shown, respectively. Arm 14 is shown in a retracted position. The arm 14 has an upper arm or a first link 16 which is rotatable about a rotational central axis 18 of the drive device 12. The arm 14 further includes a front arm or second link 20 which is rotatable about the rotational elbow axis 22. The arm 14 further includes an end effector or a third link 24 rotatable about the rotating wrist axis 26. The end effector 24 supports the substrate 28. As will be explained, along a radial path 30 that the substrate 28 can match (as shown in FIG. 1A ), or, for example, paths 34, 36, or of the drive device 12 The arm 14 is configured to cooperate with the drive device 12 so as to be carried parallel to the linear path 32 coincident with the rotational central axis 18. In the illustrated embodiment, the joint-to-joint length of the anterior arm or second link 20 is greater than the joint-to-joint length of the upper arm or first link 16. In the illustrated embodiment the lateral offset 38 of the end-effector or the third link 24 is the joint-to-joint length of the anterior arm 20 and the joint-to-joint length of the upper arm 14 It corresponds to the difference of. As will be explained in more detail below, the lateral offset 38 is armed so that the substrate 28 moves along the linear path without rotation of the substrate 28 or end effector 24 relative to the linear path. 14) remains substantially constant during elongation and contraction. This is the structure inside the arm 14 as will be described, without the use of an additional controlled axis that controls the rotation of the end effector 24 in the wrist 26 with respect to the anterior arm 20. Is achieved by In one aspect of the embodiment disclosed with respect to FIG. 1A, the center of mass of the third link or end effector 24 may be on the wrist center line or the rotation axis 26. Alternatively, the center of mass of the third link or end effector 24 may be located along a path 40 offset 38 from the rotation center axis 18. In another way, the disturbance due to the moment to be applied as a result of the mass being offset during the extension and contraction of the arm, and the disturbance to the bands that constrain the end effector 24 to the links 16, 18 It can be minimized in this way. Here, the center of mass may be determined to be with or not with the substrate, or may be in between. Alternatively, the center of mass of the third link or end effector 24 may be in any suitable position. In the illustrated embodiment, the substrate transport device 10 carries the substrate 28 with a movable arm assembly 14 coupled to the drive 12 on the central axis of rotation 18. A substrate support 24 is coupled to the arm assembly 14 on a rotating wrist shaft 26, where the arm assembly 14 rotates during extension and contraction as shown with respect to FIGS. 3A to 3C. It rotates around the central axis (18). During extension and contraction the rotational wrist axis 26 is along a radial path, for example the wrist path 40 that is parallel to or offset 38 with the paths 30, 34 or 36. 18) moves against. Similarly, the substrate support 24 moves parallel to the radial path 30 without rotation during stretching and contracting. As will be described in more detail in other aspects of the disclosed embodiment, the principles and structure of constraining the end effector to move in a substantially pure radial motion is such that the length of the front arm is It can be applied when it is shorter than the length. In addition, such features can be applied when more than one substrate is handled by the end effector. In addition, such features can be applied if the second arm is used in connection with the drive device handling one or more additional substrates. Accordingly, all such variations can be accommodated.

Referring also to Figs. 2A and 2B, a partial schematic plan view and a schematic side view of the system 10, respectively, showing the internal configuration used to drive the individual links of the arm 14 shown in Figs. Has been. The drive device 12 is provided with a first motor 52 and a second motor 54 having a corresponding first encoder 56 and a second encoder 58, the first encoder 56 and the second encoder. 2 The encoder 58 is coupled to the housing 60 and drives the first shaft 62 and the second shaft 64, respectively. Here, the shaft 62 may be coupled to a pulley 66, and the shaft 64 may be coupled to the upper arm 64, and the shafts 62 and 64 are concentric or It is placed differently. In alternative aspects, any suitable drive arrangement may be provided. The housing 60 may be in communication with a chamber 68, wherein the bellows 70, the chamber 68 and the inner portion of the housing 60 provide the vacuum environment 72 to the atmospheric environment ( 74). The housing 60 is slidable in the z direction as a carriage on the slides 76, wherein a lead screw or other suitable vertical or linear Z drive 78 ) May be provided to selectively move the housing 60 and arm 14 coupled thereto in the z (80) direction. In the illustrated embodiment, the upper arm 16 is driven about the rotational central axis 18 by a motor 54. Similarly the front arm is driven by the motor 52 via a band drive with pulleys 66, 82 and bands 84, 86, such as, for example, conventional circular pulleys and bands. . Any suitable structure may be provided to drive the front arm 20 relative to the upper arm 16 in alternative aspects. The ratio between the pulleys 66 and 82 can be 1:1, 2:1 or any suitable ratio. The third link 24 with the end-effector can be constrained by a band drive, in which a pulley 88 grounded with respect to the link 16, end The pulley 90 based on the effector or the third link 24, and the pulley 88 as the bands 92 and 94 and the bands 92 and 94 for restraining the pulley 90 are provided. As will be explained, the ratio between the pulleys 88 and 90 may not be constant such that the third link 24 follows a radial path without rotation of the arm 14 during extension and contraction. This is when the pulleys 88, 90 can be one or more non-circular pulleys, for example two non-circular pulleys, or when one of the pulleys 88, 90 can be circular and the other can be non-circular. Can be achieved. Alternatively, any suitable coupling or linkage may be provided to constrain the path of the third link or end effector 24 as described. In the illustrated embodiment, at least one non-circular pulley is provided with the upper arm (regardless of the position of the two first links 16, 20) so that the end-effector 24 faces the radial direction 30 16) and the effect of the different lengths of the anterior arm 20 are compensated. The embodiment will be described for a non-circular pulley 90 and a circular pulley 88. Alternatively, pulley 88 can be non-circular and pulley 90 can be circular. As an alternative, pulleys 88 and 92 may be non-circular or any suitable coupling may be provided to constrain the links of arm 14 as described. By way of example, non-circular pulleys or sprockets are described in U.S. Patent No. 4,865,577 filed September 12, 1989 entitled "Noncircular Drive", the entirety of which is incorporated herein by reference. Is explained. As an alternative, any suitable coupling may be provided to constrain the links of the arm 14 as described, for example any suitable variable ratio drive or coupling, interlocking gears ( linkage gears) or sprockets, cams, or others used alone or with suitable linkages or other couplings may be provided. In the illustrated embodiment the elbow pulley 88 is coupled to the upper arm 16 and is shown to be round or circular, wherein the wrist or the wrist coupled to the third link 24 The pulley 90 is shown non-circular. The wrist pulley shape is non-circular and can have symmetry around a line 96 orthogonal to the radial trajectory 30, for example, the front arm 20 and the upper portion as shown in FIG. 3B. When the arms 16 are aligned with each other and the wrist axis 26 is closest to the shoulder axis 18, the radial trajectory 30 is also coincident or parallel with the line between the two pulleys 88, 90. can do. By the shape of the pulley 90, the arm 14 extends and contracts so that the points of tangency (98, 100) established on opposite surfaces of the pulley 90 are changed from the rotating wrist axis 26. Bands 92, 94 remain tight when having radial distances 102, 104. For example in the orientation shown in FIG. 3B, each of the contact points 98, 100 of the two bands on the pulley is at the same radial distance 102, 104 from the rotating wrist axis 26. This will be further explained with respect to FIG. 4 in which the individual proportions are shown. In order for the arm 14 to rotate, both of the drive shafts 62 and 64 of the robot need to move the same amount in the direction of rotation of the arm. In order for the end-effector 24 to extend and contract radially along a straight path, the two drive shafts 62, 64 are, for example, an exemplary reverse kinematic It needs to move in a coordinated manner according to the inverse kinematic equations. Here the substrate transport device 10 is adapted to transport the substrate 28. The front arm 20 is rotatably coupled to the upper arm 16 and is rotatable about an elbow axis 22 offset from the central axis 18 by the length of the upper arm link. The end effector 24 is rotatably coupled to the front arm 20 and is rotatable about the wrist axis 26 offset from the elbow axis 22 by the length of the front arm link. The wrist pulley 90 is fixed to the end effector 24 and is coupled to the elbow pulley 88 with bands 92 and 94. Here, the front arm link length is different from the upper arm link length, and the end effector is constrained with respect to the upper arm by the elbow pulley, the wrist pulley, and the band, so that the substrate is the central axis 18 It moves along a linear radial path 30 for. Here, the substrate support 24 is coupled to the upper arm 16 as a substrate support coupling portion 92 and between the front arm 20 and the upper arm 16 centered on the rotating elbow shaft 22 It is driven around the rotating wrist shaft 26 by the relative movement of. 3A, 3B and 3C illustrate the extension motion of the robot of FIGS. 1 and 2. 3A shows a top view of the robot 10 with the arm 14 in a retracted position. In FIG. 3B, an arm 14 partially extending with the front arm 20 aligned on the top of the upper arm 16 is depicted, which is a lateral offset of the end-effector ( It is illustrated that 38) corresponds to the difference between the joint-to-joint length of the anterior arm 20 and the joint-to-joint length of the upper arm 16. 3C shows the arm 14 in an extended position, but not fully elongated.

Exemplary direct kinematics may be provided. In alternative aspects, any suitable direct kinematic properties corresponding to the alternative structure may be provided. The following exemplary equations can be used to determine the position of the end-effector as a function of the position of the motors:

x ₂ = l ₁ cos θ ₁ + l ₂ cos θ ₂ (1.1)

y ₂ = l ₁ sin θ ₁ + l ₂ sin θ ₂ (1.2)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (1.3)

T ₂ = atan2(y ₂ ,x ₂ ) (1.4)

α ₃ = asin(d ₃ /R ₂ ), where d ₃ = l ₂ -l ₁ (1.5)

α ₁₂ = θ ₁ -θ ₂ (1.6)

If α ₁₂ <π: R = sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = T ₂ +α ₃ , otherwise R = -sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = T ₂ -α ₃ +π (1.7)

Exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematic properties corresponding to the alternative structure may be provided. The following exemplary equations can be utilized to determine the position of the motors to achieve the specified position of the end-effector:

x ₃ = R cos T (1.8)

y ₃ = R sin T (1.9)

x ₂ = x ₃ -l ₃ cos T+d ₃ sin T (1.10)

y ₂ = y ₃ -l ₃ sin Td ₃ cos T (1.11)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (1.12)

T ₂ = atan2(y ₂ ,x ₂ ) (1.13)

α ₁ = acos((R ₂ ² +l ₁ ² -l ₂ ² )/(2 R ₂ l ₁ )) (1.14)

α ₂ = acos((R ₂ ² -l ₁ ² +l ₂ ² )/(2 R ₂ l ₂ )) (1.15)

If R>l _3, then θ ₁ = T ₂ + α ₁ , θ ₂ = T ₂ -α ₂ , otherwise: θ ₁ = T ₂ -α ₁ , θ ₂ = T ₂ + α ₂ (1.16)

The following nomenclature can be used in the kinematic equations:

d ₃ = lateral offset of the end-effector (m)

l ₁ = joint-to-joint length of the first link (m)

l ₂ = joint-to-joint length of the second link (m)

l ₃ = length of the third link with end-effector, measured from the wrist joint to the reference point on the end-effector (m)

R = radial position of the end-effector (m)

R ₂ = radial coordinate of wrist joint (m)

T = angular position of the end-effector (rad)

T ₂ = angular coordinate of wrist joint (rad)

x ₂ = x-coordinate of wrist joint (m)

x3 = x-coordinate of the end-effector (m)

y ₂ = y-coordinate of wrist joint (m)

y ₃ = y-coordinate of the end-effector (m)

θ ₁ = Angular position of the drive shaft coupled to the first link (rad)

θ ₂ = Angular position of the drive shaft coupled to the second link (rad).

The above exemplary kinematic equations are the third link so that the end-effector 24 faces the radial direction 30 regardless of the position of the two first links 16, 20 of the arm 14. (24) It can be used to design a suitable drive device that constrains the orientation, for example a band drive device. Referring to FIG. 4, a graph (plot) 120 of a transmission ratio (r ₃₁ ) 122 of the band driving device is shown. The band driving device includes the end-effector from the center of the robot. The orientation of the third link is constrained as a function of the normalized extension of the arm, i.e. (Rl ₃ )/l ₁ measured to the root of. The transmission ratio (r ₃₁ ) is defined as the ratio of the angular velocity (ω ₃₂ ) of the pulley attached to the third link to the angular velocity (ω ₁₂ ) of the pulley attached to the first link, both of which Is defined relative to the second link. The figure graphically depicts the transfer ratio (r ₃₁ ) for different l ₂ /l ₁ (from 0.5 to 1.0 with increments of 0.1 and from 1.0 to 2.0 with increments of 0.2). The profile of the non-circular pulley(s) to achieve the transmission ratio r ₃₁ according to FIG. 4 can be calculated, for example the profiles drawn in FIGS. 2A, 54A and 54B.

In the disclosed embodiment, the use of one or more non-circular pulley(s) or other suitable device to constrain the operation of the end effector, even with the same containment volume, the equal-link arm Longer reach can be obtained compared to. In alternative aspects the first link may be driven directly by a motor or through any kind of coupling or transmission configuration. Here, any suitable delivery ratio can be used. Alternatively, the band drive device for actuating the second link may be of any other configuration with equal functionality, such as a belt drive device, a cable drive device, a gear drive device, a linkage-based mechanism. ) Or any combination of the above. Similarly, the band drive device restraining the third link may be replaced by any other suitable configuration, such as a belt drive device, a cable drive device, non-circular gears, an interlock-based mechanism or any combination of the foregoing. I can. However, here the end-effector need not be oriented radially. For example, the end effector can be positioned with any suitable offset relative to the third link and oriented in any suitable direction. In addition, in alternative aspects the third link may carry more than one end-effector or substrate. Any suitable number of end-effectors and/or material holders may be held by the third link. Furthermore, in alternative aspects, the joint-to-joint length of the anterior arm may be smaller than the joint-to-joint length of the upper arm, for example, expressed as l ₂ /l ₁ <1 in FIG. And as shown and described with respect to FIGS. 25 to 34 and 43 to 53.

Referring now to 5a and 5b, a top view and a side view of robot 150, respectively, including several features of robot 10 are shown. The robot 150 is shown to have a drive device 12 with an arm 152 shown in a retracted position. Arm 152 has features similar to those of arm 14 except as described herein. As an example, the joint-to-joint length of the anterior arm or second link 158 is greater than the joint-to-joint length of the upper arm or first link 154. Similarly, the lateral offset 168 of the end-effector or third link 162 is the difference between the joint-to-joint length of the anterior arm 158 and the joint-to-joint length of the upper arm 154. Corresponds to. Referring also to Figures 6A and 6B, a drive device 150 is shown with internal arrangements used to drive the individual links of the arm. In the illustrated embodiment, the upper arm 154 is driven by one motor through the shaft 64 as described for the arm 14 of FIGS. 1 and 2. Similarly, the end effector or third link 162 is constrained to the upper arm 154 by a non-circular pulley configuration, as described for the arm 14 of FIGS. 1 and 2. An exemplary difference between arm 152 and arm 14 is shown, where the front arm 158 is a shaft 62 and a drive device through a band arrangement with at least one non-circular pulley. 12 is coupled to another motor. Here, the combination or band configuration may have features as described herein or with respect to the pulley drive devices 88 and 90 of FIGS. 1 and 2. The combined or banded configuration has a non-circular pulley 202 coupled to the shaft 62 of the drive device 12 and is rotatable about a shaft 18 with a shaft 62. The band configuration of the arm 152 further includes a circular pulley 204 coupled to the upper arm link 158 and rotatable about the elbow axis 156. The circular pulley 204 is coupled to the non-circular pulley 202 through bands 206 and 208, where the bands 206 and 208 will be held taut thanks to the profile of the non-circular pulley 202. I can. In alternative aspects any combination of pulleys or other suitable transmission may be provided. As pulleys 202 and 204 and bands 206, 208 cooperate, rotation of the upper arm 154 relative to the pulley 202 (e.g., while the upper arm 154 rotates, the pulley 202 Remains stationary) causing the wrist joint 160 to extend and contract along a straight line that is parallel to the desired radial path 180 of the end-effector and is offset 168 from the path 180. Here, the third link 162 with the end-effector is constrained by a band drive as described for an arm 14 with at least one non-circular pulley, for example, so that the end-effector Is directed in the radial direction 18 regardless of the positions of the two first links 154, 158. Here, any suitable coupling may be provided to constrain the links of the arm 14 as described, for example any suitable variable ratio drive or coupling, interlocking gears or sprockets, cams, Or other suitable linkages or other couplings may be provided, either alone or in combination. In the illustrated embodiment the elbow pulley 204 is shown to be rounded or circular and coupled to the front arm 158, wherein the shoulder pulley 202 coupled to the shaft 62 is shown non-circular. The shaft pulley shape is non-circular and may have symmetry around a line 218 orthogonal to the radial trajectory 180, for example, the front arm 158 and the upper portion as shown in FIG. 7B. When the arms 154 are aligned with each other so that the wrist axis 160 is closest to the shoulder axis 18, the radial trajectory 180 is also coincident or parallel with the line between the two pulleys 202 and 204. can do. By the shape of the pulley 202, the arm 152 extends and contracts so that the contact points 210 and 212 established on the opposite surfaces of the pulley 202 change from the shoulder axis of rotation 18 to radial distances ( When having 214, 216, the bands 206, 208 remain tight. For example, in the orientation shown in FIG. 7B, each of the contact points 210, 212 of the two bands on the pulley are at the same radial distance 210, 212 from the shoulder axis of rotation 18. This will be further explained with respect to FIG. 8 in which the individual proportions are shown. In order for the arm 152 to rotate, both of the drive shafts 62 and 64 of the robot need to move the same amount in the direction of rotation of the arm. In order for the end-effector 162 to extend and contract radially along a straight path, the two drive shafts 62, 64 are, for example, in accordance with the exemplary inverse kinematic equations presented later in this section. It needs to move in a manner that is adjusted accordingly, for example the drive shaft coupled to the upper arm needs to move according to the inverse kinematic equations presented below while the other motor is held stationary. 7A, 7B, and 7C illustrate the stretching operation of the robot 150 of FIGS. 5 and 6. 7A shows a top view of the robot with the arm 152 in a retracted position. In Fig. 7B, an arm that partially extends with the front arm aligned on the upper end of the upper arm is drawn, which means that the lateral offset 168 of the end-effector 162 is the front arm 158. It is illustrated that it corresponds to the difference between the joint-to-joint length of and the joint-to-joint length of the upper arm 154. In FIG. 7C the arm is shown in an extended position, but not fully elongated.

Exemplary direct kinematic properties can be provided. In alternative aspects, any suitable direct kinematic properties corresponding to the alternative structure may be provided. The following exemplary equations can be used to determine the position of the end-effector as a function of the position of the motors:

d ₁ = l ₁ sin(θ ₁ -θ ₂ ) (2.1)

If (θ ₁ -θ ₂ )<π/2: θ _2l = θ ₂ -l ₂ asin((d ₁ + d ₃ )/l ₂ ), otherwise θ _2l = θ ₂ + l ₂ asin((d ₁ + d ₃ )/l ₂ )+ π (2.2)

x ₂ = l ₁ cos θ ₁ + l ₂ cos θ _2l (2.3)

y ₂ = l ₁ sin θ ₁ + l ₂ sin θ _2l (2.4)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (2.5)

T ₂ = atan2(y ₂ ,x ₂ ) (2.6)

If (θ ₁ -θ ₂ )<π/2: R = sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = θ ₂ , otherwise R = -sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = θ ₂ (2.7)

Exemplary inverse kinematic properties can be provided. In alternative aspects, any suitable inverse kinematic properties corresponding to the alternative structure may be provided. The following exemplary equations can be utilized to determine the position of the motors to achieve the intrinsic position of the end-effector:

x ₃ = R cos T (2.8)

y ₃ = R sin T (2.9)

x ₂ = x ₃ -l ₃ cos T+d ₃ sin T (2.10)

y ₂ = y ₃ -l ₃ sin Td ₃ cos T (2.11)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (2.12)

T ₂ = atan2(y ₂ ,x ₂ ) (2.13)

α ₁ = acos((R ₂ ² +l ₁ ² -l ₂ ² )/(2 R ₂ l ₁ )) (2.14)

If R>l ₃ : θ ₁ = T ₂ + α ₁ , θ ₂ = T, otherwise: θ ₁ = T ₂ -θ ₁ , θ ₂ = T (2.15)

In the above kinematic equations the following notation can be used:

d ₃ = lateral offset of the end-effector (m)

l ₁ = joint-to-joint length of the first link (m)

l ₂ = joint-to-joint length of the second link (m)

l ₃ = length of the third link with end-effector, measured from the wrist joint to the reference point on the end-effector (m)

R = radial position of the end-effector (m)

R ₂ = radial coordinate of wrist joint (m)

T = angular position of the end-effector (rad)

T ₂ = angular coordinate of wrist joint (rad)

x ₂ = x-coordinate of wrist joint (m)

x ₃ = x-coordinate of the end-effector (m)

y ₂ = y-coordinate of wrist joint (m)

y ₃ = y-coordinate of the end-effector (m)

θ ₁ = Angular position of the drive shaft coupled to the first link (rad)

θ ₂ = Angular position of the drive shaft coupled to the second link (rad).

The exemplary kinematic equations above are that the wrist joint 160 extends and contracts along a straight line parallel to the desired radial path 180 of the end-effector 162 by the rotation of the upper arm 154. It can be used to design a band driving device that controls the second link 158 so that this is caused.

Referring now to FIG. 8, a graph 270 showing a transmission ratio (r ₂₀ ) 272 of the band driving device is shown, the band driving device is the end-from the center of the robot. The second link is driven as a function of the normalized extension of the arm, i.e. (Rl ₃ )/l ₁ measured to the base of the effector. The transmission ratio (r ₂₀ ) is defined as the ratio of the angular velocity (ω ₂₁ ) of the pulley attached to the second link to the angular velocity (ω ₀₁ ) of the pulley attached to the second motor, both of which are It is defined relative to the first link. In the figure, the transfer ratios (r ₂₀ ) for different l ₂ /l ₁ are shown graphically.

The profile of the non-circular pulley(s) for the band drive device driving the second link is calculated to achieve a transmission ratio (r ₂₀ ) 272 according to FIG. 8. An exemplary pulley profile is drawn in FIG. 6A, as will be described with respect to FIGS. 55A and 55B.

The transmission ratio r ₃₁ of the band driving device for constraining the orientation of the third link 168 may be as shown in FIG. 4 with respect to the embodiments of FIGS. 1 and 2. The transmission ratio (r ₃₁ ) is defined as the ratio of the angular velocity (ω ₃₂ ) of the pulley attached to the third link to the angular velocity (ω ₁₂ ) of the pulley attached to the first link. All are defined relative to the second link. The figure graphically depicts the transfer ratio (r ₃₁ ) for different l ₂ /l ₁ (from 0.5 to 1.0 with increments of 0.1 and from 1.0 to 2.0 with increments of 0.2). The profile of the non-circular pulley(s) for the band driving device constraining the third link 162 to achieve a transmission ratio r ₃₁ according to FIG. 4 may be calculated. An exemplary pulley profile is plotted in FIG. 6A.

In the illustrated embodiment, the use of non-circular pulleys or other suitable mechanism to constrain the end effector, as described, in an equal-link arm having the same containment volume. In comparison, a longer reach can be obtained. Compared to the embodiments disclosed in FIGS. 1 and 2, one or more band drives with non-circular pulleys can replace the conventional drive devices on the shoulder shaft 18. In alternative aspects the first link can be driven directly by a motor or through any kind of coupling or transmission configuration, for example any suitable transmission ratio can be used. . Alternatively, the band drive devices actuating the second link and restraining the third link may be of any other configuration with equal functionality, such as belt drive, cable drive, non-circular gears, interlock-based mechanism or It can be replaced by any combination of the above. In addition, the third link, through a conventional two stage band arrangement (synchronize) the third link to the pulley driven by the second motor, the end-effector in the radial direction. Bars that can be constrained to hold, as shown in FIG. 9. Alternatively, the two-stage band configuration may be replaced by any other suitable configuration, such as, for example, a belt drive, a cable drive, a gear drive, an interlock-based mechanism or any combination of the foregoing. However, in addition, the end-effector may not need to be oriented radially. For example, the end effector can be positioned with any suitable offset relative to the third link and oriented in any suitable direction. In alternative aspects the third link may carry more than one end-effector or substrate. Here any suitable number of end-effectors and/or material holders may be held by the third link. In addition, the joint-to-joint length of the anterior arm may be smaller than the joint-to-joint length of the upper arm, for example, as expressed by l ₂ /l ₁ <1 in FIG. 8.

Referring now to Fig. 9, an alternative robot 300 is shown, wherein the third link is through a conventional two-stage band configuration that synchronizes the third link to a pulley driven by a second motor. It can be constrained to keep the end-effector radially. The robot 300 is shown with a drive device 12 and an arm 302. The arm 302 may have an upper arm or first link 304 that is coupled to the shaft 64 and is rotatable about a central or shoulder axis 18. The arm 302 is provided with a front arm or second link 308 that is rotatably coupled to the upper arm 304 at the elbow shaft 306. Links 304 and 308 may have different lengths as described above. The third link or end effector 312 is rotatably coupled to the second link or the front arm 308 at the wrist axis 310, where the end effector 312 has a different link length as described above. With the links 304 and 308 having the beams it is possible to transport the substrate 28 along the radial path without rotation. In the illustrated embodiment, the shaft 62 is coupled to two pulleys 314 and 316, where the pulley 314 may be circular and the pulley 316 may be non-circular. Here, the circular pulley 314 is the end-effector 312 through a conventional two-stage (318, 320) circular band configuration that synchronizes the third link 312 to the pulley driven by the shaft 314. ) Is constrained to the third link 312 in a radial direction. The two-stage configuration 318, 320 includes a pulley 314 coupled to the elbow pulley 324 by bands 322, and the elbow pulley 324 is connected to the elbow pulley 326, The elbow pulley 326 is coupled to the wrist pulley 328 through bands 330. The front arm 308 may further include an elbow pulley 332 that is circular and can be coupled to the shoulder pulley 316 through the bands 334, wherein the shoulder pulley is non-circular and the pulley 314 And may be coupled to the shaft 62.

The disclosed embodiment can be further embodied for robots with robot drive devices with an additional axis, wherein the arms coupled to the robot drive device are independently capable of holding one or more substrates. It can have additional end-effectors operable. By way of example, arms with two independently operable arm linkages or “dual arm” configurations may be provided, wherein each independently operable arm is one, two, or It can have an end effector adapted to support any suitable number of substrates. Here, and as will be described below, each independently operable arm may have a first link and a second link having a different link length, wherein the end effector and the support coupled to the links The substrate being actuated and tracked as described above. Here, the substrate transport apparatus is capable of carrying a first substrate and a second substrate, and has a first independently moveable arm assembly and a second independently moveable arm assembly coupled to the drive on a common axis of rotation. The first substrate support and the second substrate support are respectively coupled to the first arm assembly and the second arm assembly on a first rotating wrist axis and a second rotating wrist axis. During stretching and contracting, one or both of the first arm assembly and the second arm assembly rotate about a common axis of rotation. During extension and contraction the first and second rotating wrist axes are offset from a radial path with respect to the common axis of rotation and move along a first wrist path and a second wrist path parallel to the radial path. During stretching and contracting, the first substrate support and the second substrate support move parallel to the radial path without rotation. Variations with multiple independently operable arms are provided below with respect to the disclosed embodiment, where any suitable combination of features may be provided in alternative aspects.

Referring now to FIGS. 10A and 10B, a top view and a side view of a robot 350 with a dual arm configuration are shown, respectively. The robot 350 is provided with an arm 352 having a common upper arm 354, and independently operable front arms 356, 358, each of the front arms 356, 358 individually. It has end effectors (360, 362). In the illustrated embodiment both linkages are shown in a retracted position. The lateral offset 366 of the end-effectors corresponds to a difference between the joint-to-joint length of the anterior arm 354 and the joint-to-joint length of the upper arms 356 and 358. In the illustrated embodiment the upper arms may have the same length and are longer than the front arm. In addition, the end effectors 360, 362 are located above the front arms 356, 358. Referring now to FIGS. 11A and 11B, top and side views, respectively, of a robot 375 equipped with an arm in an alternative configuration are shown. In the illustrated embodiment arm 377 may have features as described with respect to FIGS. 10A and 10B, with both linkages shown in retracted positions. In this configuration, the end-effector 382 of the upper linkage and the third link are suspended from the lower surface of the front arm 380, so that the vertical spacing between the two end-effectors 382 and 384 is reduced. . Here, a similar effect can be achieved by stepping down 368 the top end-effector 360 of the configuration of FIGS. 10A and 10B. In addition, referring to FIGS. 12 and 13, internal configurations of robots 350 and 375 used to drive individual links of the arms of FIGS. 10 and 11, respectively, are shown. In the illustrated embodiment, the drive device 390 may include a first drive motor 392, a second drive motor 394, and a third drive motor 396, the first drive motor and the second drive. The motor and the third drive motor may be rotor stator arrangements that drive concentric shafts 398, 400, 402, respectively, and position encoders 404, 406, 408 respectively. Equipped. The Z driving device 410 can drive the motors in a vertical direction, where the motors can be partially or completely contained within the housing 412, and the bellows 414 is the inner volume of the housing 412. Is sealed to the chamber 416, and the interior volume and interior of the chamber 416 may operate within an isolated environment such as a vacuum or otherwise isolated environment. In the illustrated embodiment, the common upper arm 354 is driven by one motor 396. Each of the two front arms 356 and 358 is pivoted on a common shaft 420 at an elbow of the upper arm 354, and band driving devices 422 and 424 that may have conventional pulleys It is independently driven by each of the motors 394 and 396 through each. The third links with the end-effectors 360 and 362 are constrained by band driving devices 426 and 428, respectively, each equipped with at least one non-circular pulley, which is the upper arm and the front side It compensates for the effect of different lengths of arms. Here, the band driving devices of each of the linkages may be designed using the methodology described with respect to FIGS. 1 and 2, and the kinematic equations presented with respect to FIGS. 1 and 2 are also the two linkages of the double arm. Can be used for each. In order for the arm to rotate, all three drive shafts 398, 400, 402 of the robot need to move the same amount in the direction of rotation of the arm. In order for one of the end-effectors to extend and contract radially along a straight path, a drive shaft coupled to a front arm coupled to an active end effector, and a drive shaft of the common upper arm are shown in Fig. It needs to move in a way that is adjusted according to the inverse kinematic equations for 2. At the same time, the drive shaft coupled to the other front arm needs to rotate in synch with the drive shaft of the common upper arm so that the inactive end-effector remains retracted. Also referring to FIGS. 14A, 14B and 14C, the arms of FIGS. 11A and 11B are shown as the upper linkage and the lower linkage extend. Here, while the active linkages 358, 362 are elongated, the inactive linkages 356, 360 rotate. As an example, as the lower linkages 356 and 360 are elongated, the upper linkages 358 and 362 rotate, and as the upper linkages 358 and 362 are elongated, the lower linkages 356 and 360 Rotates. In the disclosed embodiments of Figs. 10 and 11, set up and control can be simplified, where the arm configuration can be used on a concentric shaft drive device without dynamic seals, while the same A longer reach is provided compared to equal-link length arms with containment volume. Here, no bridge is used to support any of the end-effectors. In the illustrated embodiment the inactive arm rotates while the active arm is elongated. One of the wrist joints travels over the lower end-effector (closer to the wafer than in an equal-link arrangement).

Referring now to FIGS. 15A and 15B, a top view and a side view of a robot 450 with a dual arm configuration are shown, respectively. The robot 450 is provided with an arm 452 having a common upper arm 454, and independently operable front arms 456, 458, wherein the independently operable front arms 456, 458 ) Each has end effectors 460 and 462. In the illustrated embodiment, both linkages are shown in a retracted position. The lateral offset 466 of the end-effectors corresponds to a difference between the joint-to-joint length of the anterior arm 454 and the joint-to-joint length of the upper arms 456 and 458. In the illustrated embodiment, the upper arms may have the same length and may be longer than the front arms. In addition, end effectors 460 and 462 are located above the front arms 456 and 458. Referring also to Figures 16A and 16B, a top view and a side view of a robot 475 with an arm in an alternative configuration are shown. Again, both linkages are shown in a retracted position. In this configuration, the end-effector 482 and the third link of the left linkage are suspended from the lower surface of the front arm 480 to reduce the vertical separation between the two end-effectors 482 and 484. A similar effect can be achieved by tapping 468 the top end-effector of the configuration of FIGS. 15A and 15B. As an alternative, a bridge can be used to support one of the end-effectors. The combined upper arm link 454 may be a single piece as depicted in FIGS. 15 and 16, or the combined upper arm link 454 may be 2, as shown in the example of FIGS. 17A and 17B. It may be formed by more than one section (470, 472). Here the two-site design can be provided as a lighter material that uses less material, so the left portion 472 and the right portion 470 may be the same components. Here, in a two piece design there may be a provision for an adjustment of an angular offset between the left side and the right side, which means that different retraction positions need to be supported. It can be convenient at the time. Referring also to Figs. 18 and 19, the internal configurations used to drive the individual links of the arms of Figs. 15 and 16 are shown, respectively. The combined upper arm 554 is shown as a shaft 402 driven by one motor. Each of the two front arms (456, 458) is independently, by shafts (400, 398), individually through band drive devices (490, 492) having conventional pulleys, by one motor. Driven by. Here, the links 456 and 458 rotate on separate axes 494 and 496, respectively. The third links with the end-effectors 460 and 462 are each constrained by band drive devices 498 and 500 each having at least one non-circular pulley, which is the upper arm and the front arm. Compensates for the effect of different lengths of fields. Here, the band driving devices 498 and 500 of the linkages 456, 460 and 458, 462, respectively, are designed using the methodology described with respect to FIGS. 1 and 2. Here, the kinematic equations presented for Figs. 1 and 2 may also be used for each of the two linkages 456, 460 and 458, 462 of the double arm. In order for the arm 452 to rotate, all of the three drive shafts 398, 400, 402 of the robot need to move by the same amount in the direction of rotation of the arm. The drive shaft of the common upper arm and the drive shaft coupled to the front arm attached to the active end effector, such that one of the end-effectors extends and contracts radially along a straight path, are shown with respect to FIGS. It needs to move in a way that is adjusted according to the inverse kinematic equations. At the same time, the drive shaft coupled to the other front arm needs to rotate in line with the drive shaft of the common upper arm so that the inactive end-effector remains retracted. Also, referring to FIGS. 20A, 20B and 20C, the arms of FIGS. 16A and 16B are shown as the left linkages 458 and 462 and the right linkages 456 and 460 are extended. It is noted that the inactive linkages 456 and 460 rotate while the active linkages 458 and 462 are elongated. Here, as the left linkages 458 and 462 are extended, the right linkages 456 and 460 rotate, and as the right linkages 456 and 460 are extended, the left linkages 458 and 462 ) Rotates. The illustrated embodiment brings the advantages of a solid link design that is easy to prepare and control, and for example a concentric drive without dynamic sealing, while at the same time having an equal-link length arm with the same containment volume. A longer reach is provided compared to the field. Here, no bridge is used to support any of the end-effectors. Here, the inactive arm rotates while the active arm is elongated. One of the wrist joints passes over the lower end-effector, closer to the wafer than in the co-link configuration. This can be avoided by using a bridge (not shown) to support the top end-effector. In this case the unsupported length of the bridge may be longer compared to the same-link arm design. In addition, its retract angle can be varied, compared to a configuration with a common elbow joint, for example as shown in Figures 10 and 11 and independent double arms as shown in Figures 21 and 22, for example. It can be more difficult.

Referring now to FIGS. 21A and 21B, top and side views of a robot 520 with independent dual arms 522 and 524 are shown, respectively. In the illustrated embodiment, both linkages 522 and 524 are shown in a retracted position. Arm 522 has a third link with an independently operable upper arm 526, a front arm 528, and an end effector 530. The arm 524 has an independently operable upper arm 532, a front arm 534, and a third link with an end effector 536. In the illustrated embodiment, the front arms 528 and 534 are shown to be longer than the upper arms 526 and 532, where the end effectors 530 and 536 are the front arms 528 and 534, respectively. Is located above. Referring also to Figures 22A and 22B, a plan view and a side view of a robot 550 having features similar to those of a robot 520 having an arm in an alternative configuration and with two linkages shown in a retracted position are shown. have. In this configuration, the end-effector 552 of the left linkage and the third link are suspended from the lower surface of the front arm 554 to reduce the vertical separation between the two end effectors. A similar effect can be achieved by tapping the top end-effector of the configuration of FIG. 21. As an alternative, a bridge can be used to support one of the end-effectors. 21 and 22 the upper right arm 532 is disposed below the upper left arm 526. As an alternative, for example, the upper left arm can be arranged above the upper right arm, wherein one linkage can be nested within another linkage. Referring also to Fig. 23, the internal configurations used to drive the individual links of the arm of Figs. 21A and 21B are shown. Here the elevations of the links have been adjusted to avoid overlap of components for graphical clarity. Each of the two upper arms 526 and 532 is independently driven by one motor, individually through respective shafts 398 and 402. The front arms 528 and 534 are coupled to the third motor through the shaft 400 by band configurations 570 and 572 each equipped with at least one non-circular pulley. The third links 530 and 536 with end-effectors are constrained by band drive devices 574 and 576 each equipped with at least one non-circular pulley. The band driving devices, while the rotation of one of the upper arms 526, 532 causes the corresponding linkages 528, 530 and 534, 536 to extend and contract along a straight line, while the other linkages are stopped. It is designed to remain in the state. The band driving devices in each of the linkages can be designed using the methodology described with respect to Figs. 5 and 6, wherein the kinematic equations presented for Figs. 5 and 6 are the two linkages of the double arm. It can also be used for each. In order for the arm to rotate, all of the three drive shafts 398, 400, 402 of the robot need to move by the same amount in the direction of rotation of the arm. The drive shaft of the upper arm coupled to the active end-effector needs to be rotated according to the inverse kinematic equations for Figs. However, the other two drive shafts need to be kept stationary. Also, referring to FIGS. 24A, 24B and 24C, the arm of FIG. 22 is shown as the left linkage 522 and the right linkage 524 are extended. It is noted that the inactive linkage 524 remains stationary while the active linkage 522 is elongated. That is, while the right linkage 524 is extended, the left linkage 522 does not move, and the right linkage 524 does not move while the left linkage 522 is extended. The illustrated embodiment provides a longer reach compared to a co-link arm design with the same containment volume. Here, a bridge is not used to support any of the end-effectors, and as the active linkage can stretch or contract faster with no load, the active linkage is stretched and potentially The inactive linkage remains stationary while leading to higher throughput. The illustrated embodiment may be more complex than that shown in FIGS. 15 and 16 with two more band drives with non-circular pulleys instead of conventional pulleys. One of the wrist joints passes under the lower end-effector as shown in FIG. 24. This can be avoided by using a bridge (not shown) to support the top end-effector. In this case the unsupported length of the bridge is longer compared to the same-link arm design.

Referring now to FIGS. 25A and 25B, a top and side view of a robot 600 with an arm 602 is shown, respectively. In the illustrated embodiment, both linkages are shown in a retracted position. The lateral offset 604 of the end-effectors corresponds to the difference between the joint-to-joint length of the upper arm 606 and the joint-to-joint length of the anterior arms 608 and 612, in this embodiment. The front arms 608 and 612 are shorter than the common upper arm 606. The internal configurations used to drive the individual links of the arm may be similar to those in FIGS. 10 to 13, for example, as in FIG. 13, but in this case, the front arms are shorter than the common upper arm. . Here, the common upper arm is driven by one motor. Each of the two front arms is independently driven by one motor through a band drive with conventional pulleys. The third links (614, 616) with the end-effectors are constrained by band driving devices each equipped with at least one non-circular pulley, which compensates for the effect of different lengths of the upper arms and the front arms. do. Band driving devices in each of the linkages may be designed using the methodology described with respect to FIGS. 1 and 2. The kinematic equations presented for Figs. 1 and 2 can also be used for each of the two linkages of the double arm. Referring also to Figures 26A, 26B and 26C, the arms of Figures 25A and 25B are shown as the upper linkages 612 and 616 are elongated. The lateral offset 604 of the end-effector corresponds to the difference between the joint-to-joint length of the upper arm and the joint-to-joint length of the anterior arm, and the wrist joint portion is equal to the trajectory of the center of the wafer. Travel along a straight line offset by the difference. It is noted that the inactive linkages 608, 614 rotate while the active linkages 612, 616 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Here, in Figure 26A an arm with both linkages in a retracted position is depicted. In Fig. 26B, the upper linkage is shown partially elongated at a position where the wrist joint of the upper linkages 612 and 616 is closest to the wafer held by the lower linkage. It is observed that the wrist joint of the upper linkage does not pass over the wafer (but the wrist joint of the upper linkage moves in a plane above the wafer). In FIG. 26C an additional extension of the upper linkages 612 and 616 is depicted. The illustrated embodiment can provide ease of preparation and control, and can be used on a coaxial or tri axial drive or other suitable drive without dynamic sealing. Here, no bridge is used to support any of the end-effectors. The wrist joint of the upper linkage does not pass over the wafer on the lower end-effector, which is the case for the same-link design (but the wrist joint of the upper linkage is in a plane above the wafer on the lower end-effector. Move). Here the inactive arm rotates while the active arm is elongated. Elbow joints that can translate to a larger swing radius or shorter reach can be more complex. Here, the arm may be taller than that shown in Figs. 30 and 31, and 33 due to the overlapping front arms 608, 612.

Referring now to FIGS. 27A and 27B, top and side views of a robot 630 with an arm 632 are shown, respectively. Arm 630 may have features similar to those disclosed with respect to FIGS. 15-19 except that the front arms 636 and 640 are shown as having a shorter length than the upper arm 636. The two linkages are shown in the retracted position. The lateral offset 634 of the end-effectors 642 and 646 corresponds to the difference between the joint-to-joint length of the upper arm 636 and the joint-to-joint length of the anterior arms 638 and 640. do. The combined upper arm link 636 may be a single piece as depicted in FIGS. 27A and 27B, or the combined upper arm link 636 may have two, as shown in the example of FIGS. 28A and 28B. It may be formed by the above portions 636 ′ and 636 ″. A two-section design can be lighter with less material, where the left portion 636' and the right portion 636'' can be the same components. For example, if different retracted positions need to be supported, it may be provided to enable adjustment of the angular offset between the left portion 636' and the right portion 636''. The internal configurations used to drive the individual links of the arm 632 may be similar to those shown in FIGS. 15 to 19, for example, as shown in FIG. 19. The common upper arm 636 is driven by one motor. Each of the two front arms 638 and 640 is independently driven by one motor through a band drive with conventional pulleys. The third links with the end-effectors 642 and 646 can be constrained by band driving devices each equipped with at least one non-circular pulley, which is the upper arm 636 and the front arms ( 638, 640) to compensate for the effect of the different lengths. Band driving devices in each of the linkages may be designed using the methodology described with respect to FIGS. 1 and 2. The kinematic equations presented for Figs. 1 and 2 can also be used for each of the two linkages of the double arm. Also, referring to FIGS. 29A, 29B and 29C, the arms of FIGS. 27A and 27B are shown as the right and upper linkages 640 and 646 are extended. The lateral offset 634 of the end-effector corresponds to the difference between the joint-to-joint length of the upper arm and the joint-to-joint length of the anterior arm, and the wrist joint portion is equal to the trajectory of the center of the wafer. Travel along a straight line offset by the difference. Here, the inactive linkages 638, 642 rotate while the active linkages 640, 646 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. 29A, 29B and 29C depict the arm with both linkages in the retracted position. 29B, the wrist joint portion of the right upper linkage 640, 646 is partially elongated at the position closest to the wafer held by the left lower linkage 638, 642. Is shown. Here, the wrist joints of the right upper linkages 640 and 646 do not pass over the wafer, but move within a plane on the wafer. In FIG. 29C an additional extension of the right upper linkage 640, 646 is depicted. The illustrated embodiment brings the advantages of a rigid link design, ease of preparation and control, and, for example, a concentric shaft drive without dynamic sealing. No bridge is used to support any of the end-effectors. The wrist joint of the upper linkage does not pass over the wafer on the lower end-effector, but this is the case for the same-link design, but the wrist joint of the upper linkage moves within a plane above the wafer on the lower end-effector. . Inactive arms 638, 642 rotate while active arms 640, 646 are elongated. The angle of retraction may be more difficult to change compared to a configuration with a common elbow joint as shown in, for example, FIGS. 25A and 25B, and independent double arms as shown in, for example, FIGS. 33A and 33B. In addition, as the anterior arm 640 is shown to be at a higher elevation than the anterior arm 638, the arm is shown to be taller than in FIGS. 30 and 31, and 33A and 33B.

Referring now to FIGS. 30A and 30B, top and side views of a robot 660 with an arm 662 are shown, respectively. The arm 662 may have features as described with respect to FIGS. 27 to 29, but a bridge is employed in the arm 662 and the two front arms are at the same elevation as will be described. Both linkages are shown in a retracted position. The lateral offset 664 of the end-effectors corresponds to the difference between the joint-to-joint length of the upper arm 66 and the joint-to-joint length of the anterior arms 668 and 670. The combined upper arm link 666 may be a single fragment as depicted in FIGS. 30A and 30B, or the combined upper arm link 666 may contain two or more regions (as shown in the example of FIGS. 31A and 31B). 666', 666''). The internal configurations used to drive the individual links of the arm may be the same as shown for FIGS. 15 to 19, but here the front arms 668, 670 are shorter than the upper arm 666. . The common upper arm 666 is driven by one motor. Each of the two front arms 668 and 670 is independently driven by a single motor through a band drive with conventional pulleys. The third links with the end-effectors 672, 674 can be constrained by band drive devices each equipped with at least one non-circular pulley, which means that the upper arms and the front arms are of different lengths. Compensate the effect. Band driving devices in each of the linkages may be designed using the methodology described with respect to FIGS. 1 and 2. The kinematic equations presented for Figs. 1 and 2 can also be used for each of the two linkages of the double arm. The third link and the end effector 674 is provided with a bridge 680, the bridge 680 is a side offset from the wrist axis between the upper end effector portion 682, the link 670 and the link 674 It has a side offset support portion 684 and further includes a lower support portion 686 that couples the wrist axis to the offset support portion 684. The bridge 680 includes interleaved portions of the bridge 680 (which may include a wafer) and the third link and end effector 672 as can be seen below with respect to FIG. This allows the front arms 668 and 670 to be packaged at the same level while providing clearance for. The bridge 680 further provides a configuration such that any moving parts associated with the two wrist joints are below the wafer surface, for example during transport. Also referring to FIGS. 32A, 32B, 32C and 32D, a plan view of the robot arm of FIGS. 30A and 30B is shown as the right linkages 670 and 674 are extended. The lateral offset 664 of the end-effector corresponds to a difference between the joint-to-joint length of the upper arm 666 and the joint-to-joint length of the anterior arm 670, and the wrist joint portion 690 ) Travels along a straight line offset by this difference with respect to the trajectory of the center of the wafer 692. It is noted that the inactive linkages 668, 672 rotate while the active linkages 670, 674 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Among FIGS. 32A, 32B, 32C and 32D, an arm with both linkages in a retracted position is depicted in FIG. 32A. In Fig. 32b, it corresponds to the worst-case clearance between the bridge 680 of the right linkages 670, 674 and the end-effector 672 of the left linkages 668, 672 ( Or the right linkage 670, 674 partially elongated at a location (adjacent to its worst case spacing) is shown. 32C shows the right linkages 670 and 674 partially elongated in a position when the front arm 670 is aligned with the upper arm 666. The lateral offset of the end-effector corresponds to a difference between the joint-to-joint length of the upper arm and the joint-to-joint length of the anterior arm. The axis of the wrist joint 690 travels along a straight line offset by this difference with respect to the trajectory of the center of the wafer 692. In FIG. 32D an additional extension of the right upper linkage 670, 674 is depicted. The illustrated embodiment is a side-by-side dual scara arrangement, e.g., a slim profile resulting in a shallow chamber with a small volume, a rigid link design, and It combines the advantages of concentric drive units The bridge 680 on the right linkage 670, 674 is much lower than in the prior art coaxial dual scara arm, with a vertical member 684 and wrist 690. Between, the unsupported length of the bridge 680 is shorter than in the prior art concentric double scara arm, and all of the joints are under the end-effectors. Here, the inactive arms 668, 672 rotate while the active arms 670, 674 are elongated. As will be described below, in other aspects of the disclosed embodiment, as an arm that does not exhibit this behavior, an arm equipped with various band drive devices with non-circular pulleys in place of the conventional pulleys disclosed herein may be provided. . As an alternative, by utilizing a configuration similar to the configurations described with respect to FIGS. 25A and 25B and FIGS. 27 and 28 above, the bridge supporting the upper end-effector can be removed.

Referring now to FIGS. 33A and 33B, a top view and a side view of a robot 700 with an arm 702 are shown, respectively. The arm 702 has features similar to those of the arms shown in FIGS. 21 to 23, but the length of the front arms is shorter than the length of the upper arms, and as an example, a bridge as described for the bridge 680 is adopted. And the front arms are arranged at the same elevation. Both linkages are shown in a retracted position. 33A and 33B the upper right arm 708 is disposed above the upper left arm 706. Alternatively, the upper left arm 706 may be disposed above the upper right arm 708. Similarly, the end-effector 716 and the third link of the right linkages 712, 716 are extended over the end-effector 714 and the third link of the left linkages 710, 714. It features a bridge. As an alternative, the end-effector 714 and the third link of the left linkage 710, 714 may extend above the end-effector 716 and the third link of the right linkage 712, 716. It can have a characteristic bridge. The internal configurations used to drive the individual links of the arm may be similar to the embodiment shown in FIGS. 21 to 23. Each of the two upper arms 706 and 708 is independently driven by one motor. The front arms 710 and 712 are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links 714 and 716 with the end-effectors are constrained by band drive devices each equipped with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 706 and 708 causes the corresponding linkage to extend and contract along a straight line while the other linkages remain stationary. Band driving devices in each of the linkages may be designed using the methodology described for the embodiment shown in FIGS. 5 and 6. The kinematic equations presented for the embodiment shown in Figures 5 and 6 may also be used for each of the two linkages of the double arm. Also, referring to FIGS. 34A, 34B and 34C, the arms of FIGS. 33A and 33B are shown as the right linkages 708, 712, and 716 are extended. Here, the inactive linkages 706, 710, 714 remain stationary while the active linkages 712, 716 are elongated. That is, the left linkage does not move while the right linkage is extended, and the right linkage does not move while the left linkage is extended. The illustrated embodiment combines the advantages of a side-by-side dual scara configuration, for example a slim profile resulting in a shallow chamber with a small volume, and a concentric drive arrangement. The bridge on the right linkage is much lower than in the existing concentric double scara arm, the unsupported length of the bridge is shorter than in the existing concentric double scara arm, and all of the joints are the end-effectors. It is below. As the active linkage can stretch or contract faster without load, the inactive linkage remains stationary while the active linkage is stretched and potentially leads to higher throughput. As an alternative, by utilizing a configuration similar to the configurations described with respect to Figs. 25, 27 and 28 above, the bridge supporting the top end-effector can be removed.

Referring now to FIGS. 35A and 35B, a top view and a side view of a robot 730 with an arm 732 with both linkages shown in a retracted position are shown, respectively. Each linking portion is provided with a double-holder end-effector 740, 742, and each of the double-holder end-effectors supports two substrates offset from each other, so that a total of four substrates can be supported. The internal configurations used to drive the individual links of the arm 732 may be the same as those of FIGS. 10 and 11, for example, FIG. 13. The common upper arm 734 is driven by one motor. Each of the two front arms 73736 and 738 is independently driven by one motor through a band drive with conventional pulleys. The third links with the end-effectors 740 and 742 are constrained by band drive devices each equipped with at least one non-circular pulley, which has the effect of different lengths of the upper arms and front arms. Compensate. The illustrated embodiment has front arms that are longer than the upper arm. As an alternative, the anterior arms can be shorter. Band driving devices in each of the linkages are designed using the methodology described with respect to FIGS. 1 and 2. The kinematic equations presented for Figs. 1 and 2 can also be used for each of the two linkages of the double arm. Referring also to FIG. 36, the arms of FIGS. 35A and 35B are shown as one linkage 738, 742 is elongated. It is noted that the inactive linkages 736, 740 rotate while the active linkages 738, 742 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Compared to FIGS. 37 and 38, the end-effector need not be shaped to avoid interference with opposing elbows.

Referring now to FIGS. 37A and 37B, a top and side view of a robot with arm 750 is shown, respectively. Both linkages are shown in a retracted position, with dual-holder end effectors 758 and 760 at each linkage. The combined upper arm link 752 may be a single fragment as depicted in FIGS. 37A and 37B, or the combined upper arm link 752 may have two or more regions (as shown in the example of FIGS. 752', 752''). The internal configurations used to drive the individual links of the arm may be the same as those of FIGS. 15 to 19, for example, may be the same as those of FIG. 19. The combined upper arms 752 are driven by one motor. Each of the two front arms 754, 756 is independently driven by one motor through a band drive with conventional pulleys. The third links (758, 760) with the end-effectors can be constrained by band drive devices each equipped with at least one non-circular pulley, which is of different lengths of the upper arms and the front arms. Compensate the effect. In the illustrated embodiment, front arms longer than the upper arm are provided. Alternatively, the front arms can be shorter. The band driving devices in each of the linkages are designed using the methodology described with respect to FIGS. 1 and 2. The kinematic equations presented for Figs. 1 and 2 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. The drive shaft of the common upper arm, and the drive shaft coupled to the front arm coupled to the active linkage, are in reverse motion relative to FIGS. It needs to move in a way that is adjusted according to the mathematical equations. At the same time, the drive shaft coupled to the other front arm needs to rotate in line with the drive shaft of the common upper arm so that the inactive linkage remains retracted. Referring also to Figure 39, the arms of Figures 37A and 37B are shown as one linkage 756, 760 is elongated. Here, the inactive linkages 754 and 758 rotate while the active linkage is elongated. For example, the right linkage rotates as the left linkage extends, and the left linkage rotates as the right linkage extends. In the illustrated embodiment, no bridge is provided. The upper wrist portion passes over one of the wafers on the lower end-effector. Here, the arm and end-effectors need to be designed so that the top elbow does not touch the lower end-effector and is cleared.

Referring now to FIGS. 40A and 40B, top and side views of a robot 750 with an arm 752 are shown, respectively. Both linkages are shown in a retracted position, each linking with a double-holder end effector 792, 794. Internal configurations used to drive the individual links of the arm may be the same as those of FIGS. 21 to 23. The two upper arms 784 and 786 are independently driven by one motor. The front arms 788 and 790 are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links with the end-effectors 792 and 794 are constrained by band drive devices each equipped with at least one non-circular pulley. The band drive devices are designed such that rotation of one of the upper arms causes the corresponding linkage to extend and contract along a straight line while the other linkages remain stationary. In the illustrated embodiment, front arms longer than the upper arm are provided. Alternatively, the front arms can be shorter. The band driving devices in each of the linkages are designed using the methodology described with respect to Figs. The kinematic equations presented with respect to Figures 5 and 6 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. The drive shaft of the upper arm attached to the active linkage needs to be rotated according to the inverse kinematic equations for Figs. However, the other two drive shafts need to be kept stationary. Referring also to FIG. 41, the arm of FIGS. 40A and 40B is shown as one linkage 784, 788, 794 is elongated. It is noted that the inactive linkages 786, 790, and 792 may remain stationary while the active linkages 794, 788, 794 are extended. That is, the left linkage does not move while the right linkage is extended, and the right linkage does not move while the left linkage is extended. As an alternative, for example, as shown in Fig. 42, the left linkage and the right linkage can be moved independently and radially at the same time, where the right linkage is slightly independently compared to Fig. 41. ) Is elongated. The operation of the elbow of the upper linkage may be limited due to potential interference with the wafer on the lower end-effector, which may limit the reach of the robot as illustrated in FIG. 41. This limitation can be mitigated by providing additional spacing by slightly elongating the lower linkage and achieving full reach as shown in FIG. 42. In the illustrated embodiment, no bridge is provided. The wrist portion of the upper linkage may pass over the wafer on the lower end-effector.

Referring now to FIGS. 43A and 43B, top and side views of the robot 810 with arms 812 are shown, respectively. Both linkages are shown in a retracted position, with dual-holder end effectors 820 and 822 at each linkage. Internal configurations used to drive individual links of the arm may be the same as those of FIGS. 10 to 13. The common upper arm 814 is independently driven by one motor. Each of the two front arms 816 and 818 is independently driven by one motor through a band drive with conventional pulleys. The third links with the end-effectors 820 and 822 are constrained by band driving devices each equipped with at least one non-circular pulley, which compensates for the effect of different lengths of the upper arms and the front arms. do. In the illustrated embodiment the front arms are shorter than the upper arm; As an alternative, the anterior arm may be longer. The band driving devices in each of the linkages are designed using the methodology described with respect to FIGS. 1 and 2. The kinematic equations presented for Figs. 1 and 2 can also be used for each of the two linkages of the double arm. Referring also to Figures 44 and 45, the arms of Figures 43A and 43B are shown as the upper linkages 818, 822 are elongated. It is noted that the inactive linkages 816, 820 rotate while the active linkages 818, 822 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. 44 and 45, it is illustrated that the wrist joint portion 824 of the upper linkages 818, 822 does not pass over the wafers 826 held by the lower linkages 816, 820 of the arm. . In the illustrated embodiment, no bridge is provided. Compared to FIGS. 46 and 47, the end-effector need not be shaped to avoid interference with opposing elbows.

Referring now to FIGS. 46A and 46B, top and side views of a robot 840 with an arm 842 are shown, respectively. Both linkages are shown in a retracted position, with dual-holder end effectors 850 and 852 at each linkage. The combined upper arm link 844 may be a single fragment as depicted in FIGS. 46A and 46B, or the combined upper arm link 844 may contain two or more regions ( 844', 844''). The internal configurations used to drive the individual links of the arm may be the same as those of FIGS. 15 to 19, for example, may be the same as those of FIG. 19. The combined upper arms 844 are driven by one motor. Each of the two front arms 846 and 848 is independently driven by one motor through a band drive with conventional pulleys. The third links with the end-effectors 850 and 852 can be constrained by band drive devices each equipped with at least one non-circular pulley, which means that the Compensate the effect. In the illustrated embodiment the front arms are shorter than the upper arm; As an alternative, the anterior arm may be longer. The band driving devices in each of the linkages are designed using the methodology described with respect to FIGS. 1 and 2. The kinematic equations presented for Figs. 1 and 2 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. The drive shaft of the common upper arm 844, and the drive shaft coupled to the front arm coupled to the active linkage, are shown in FIGS. It needs to move in a way that is adjusted according to the inverse kinematic equations for At the same time, the drive shaft coupled to the other front arm needs to rotate in line with the drive shaft of the common upper arm so that the inactive linkage remains retracted. Referring also to Figures 48 and 49, the arms of Figures 46A and 46B are shown as the upper linkages 848, 852 are elongated. Here, the inactive linkages 846 and 850 rotate while the active linkages 848 and 852 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. 48 and 49, it is illustrated that the wrist joint 854 of the upper linkage does not pass over the wafers 856 held by the lower linkage of the arm. In the illustrated embodiment, a bridge is not provided, and the wrist joint portion of the upper linkage does not pass over the wafer held by the lower linkage. Here, the inactive arm rotates less, enabling faster operating speeds when the active arm stretches or contracts without load.

Referring now to FIGS. 50A and 50B, top and side views of a robot 870 with an arm 872 are shown. Both linkages are shown in a retracted position, with dual-holder end effectors 880 and 882 at each linkage. The combined upper arm link 974 may be a single fragment as depicted in FIGS. 50A and 50B, or the combined upper arm link 974 may be at two or more sites as shown in the example of FIGS. Can be formed by The internal configurations used to drive individual links of the arm may be the same as those of FIGS. 15 to 19, for example, the same as that of FIG. The combined upper arms 874 are driven by one motor. Each of the two front arms 876 and 878 is independently driven by one motor through a band drive with conventional pulleys. The third links with the end-effectors can be constrained by band drives each equipped with at least one non-circular pulley, which compensates for the effect of different lengths of the upper arms and the front arms. In the illustrated embodiment the front arms are shorter than the upper arm; As an alternative, the anterior arm may be longer. Band driving devices in each of the linkages may be designed using the methodology described with respect to FIGS. 1 and 2. The kinematic equations presented for Figs. 1 and 2 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. The drive shaft of the common upper arm 874, and the drive shaft coupled to the front arm coupled to the active linkage, are shown in Figs. It needs to move in a way that is adjusted according to the inverse kinematic equations for At the same time, the drive shaft coupled to the other front arm needs to rotate in line with the drive shaft of the common upper arm 874 so that the inactive linkage remains retracted. Referring also to FIG. 51, the arm of FIGS. 50A and 50B is shown with one linkage 878, 882 elongated. Here, while the active linkages 878 and 882 are extended, the inactive linkages 876 and 880 rotate. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. In the illustrated embodiment, short anterior arm links are provided that can be stiffer with shorter, shorter bands, the anterior arms being arranged side-by-side to facilitate shallow chambers. Let's do it. Here, those short links can cause more rotation of the inactive arm compared to Figs. 46 and 47, which can be handled by longer upper arms. A bridge 884 is provided, where the arms and end-effectors can be designed such that the bridge 884 passes without touching the inactive end-effector 880 during a stretch movement. Here, the base of the end-effector is characterized by an angled shape 886 as shown.

Referring now to FIGS. 52A and 52B, top and side views of robot 900 with arms 902 are shown, respectively. Both linkages are shown in a retracted position, with each linkage having a double-holder end effector. Internal configurations used to drive the individual links of the arm may be the same as those of FIGS. 21 to 23. Each of the two upper arms 904 and 906 is independently driven by one motor. The front arms 908 and 910 are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links with the end-effectors 912 and 914 are constrained by band drive devices each equipped with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 904, 906 causes the corresponding linkage to extend and contract along a straight line while the other linkage remains stationary. In the illustrated embodiment the front arms are shorter than the upper arm; As an alternative, the anterior arm may be longer. The band driving devices in each of the linkages are designed using the methodology described with respect to FIGS. The kinematic equations presented with respect to Figures 5-6 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. The drive shaft of the upper arm attached to the active linkage needs to be rotated according to the inverse kinematic equations for FIGS. 5-6 so that one of the end-effector assemblies extends and contracts radially along a straight path and However, the other two drive shafts need to be kept stationary. Referring also to FIG. 53, the arms of FIGS. 52A and 52B with one linkage 906, 910, 914 elongated are shown. It is noted that the inactive linkages 904, 908, 912 remain stationary while the active linkages 906, 910, 914 are elongated with the bridge 916. That is, although the left linkage and the right linkage may be independently moved radially, the left linkage does not need to move while the right linkage is elongated, and the right linkage does not need to move while the left linkage is elongated. In the illustrated embodiment, short links that may be stiffer with short bands, and side-by-side front arms are provided to facilitate a shallow chamber. Alternatively, the front arms can be longer than the upper arms in a bridged configuration.

Referring now to Figures 54-55, a combined dual arm 930 with opposing end effectors 938 and 940 is shown. 54A and 54B show plan and side views, respectively, of the robot equipped with the arm. Both linkages are shown in a retracted position, where the lateral offset of the end-effectors is the joint-to-joint length of the upper arm 932 and the joint-to-joint length of the anterior arms 934, 936. -It corresponds to the difference in joint length. The combined upper arm link 932 may be a single fragment as depicted in FIG. 54, or the combined upper arm link 932 may be formed by two or more regions. As an example, a two-site design may be lighter with less material, and the left and right parts may be the same components. The internal configurations used to drive the individual links of the arm may be based on what is shown with respect to Figs. 18 and 19, or otherwise. The common upper arm 932 is driven by one motor. Each of the two front arms 934 and 936 is independently driven by one motor through a band drive with conventional pulleys. The third links with the end-effectors 938 and 940 can be constrained by band drive devices each equipped with at least one non-circular pulley, which is the upper arms 934 and 936 and the front arm Compensates for the effect of the different lengths of 932. The band driving devices in each of the linkages are designed using the methodology described for FIG. 1 or others. The kinematic equations presented for FIG. 1 can also be used for each of the two linkages of the double arm. 55A-55C shows the arm of FIG. 54 as the first linkages 934 and 938 and the second linkages 936 and 940 extend from the retracted position. The lateral offset of the end-effector corresponds to a difference between the joint-to-joint length of the upper arms 934 and 936 and the joint-to-joint length of the anterior arm 932, and the wrist joint portion 942, 944) travels along a straight line offset by this difference with respect to the trajectory of the center of the wafer. It is noted that the inactive linkage rotates while the active linkage is stretched. For example, as the first linkage extends, the second linkage rotates, and as the second linkage extends, the first linkage rotates. Figure 55a depicts an arm with both linkages in a retracted position. 55B shows the elongated first linkages 934 and 938. In FIG. 55C, the elongated second linkages 936 and 940 are drawn. The illustrated arm has a low profile as the front arms pass in the same plane and the end-effectors pass in the same plane, so a shallow vacuum chamber having a small volume Becomes possible. Since the retracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the containment radius of the arm can be large, making an arm particularly suitable for applications with a large number of process modules. , Where the diameter of the chamber is dictated by the size of the slot valves. Due to the low profile of the arm the arm can replace a frogleg-type arm with opposing end-effectors. In the illustrated embodiment the front arms are shorter than the upper arm; As an alternative the anterior arms may be longer, for example here the anterior arms are at different elevations and overlap.

Referring now to Figures 56-57, a separate dual arm 960 with opposing end effectors 970 and 972 is shown. 56A and 56B show a top view and a side view of a robot equipped with the arm. Both linkages are shown in the retracted position. In FIG. 56, the upper arm 962 of the first linkage is disposed above the upper arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be disposed above the upper arm of the first linkage. The internal configurations used to drive the individual links of the arm may be based on FIG. 23 or otherwise. Here, each of the two upper arms 962 and 964 may be independently driven by one motor. The front arms 966 and 968 are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links with the end-effectors 970 and 972 are constrained by band drive devices each equipped with at least one non-circular pulley. The band drive devices are designed such that rotation of one of the upper arms causes the corresponding linkage to extend and contract along a straight line while the other linkage remains stationary. The band driving devices in each of the linkages are designed using the methodology described with respect to FIG. 5. The kinematic equations presented with respect to FIG. 5 can also be used for each of the two linkages of the double arm. 57A-57C show the arm of FIG. 56 as the first linkages 962, 966, and 970 and the second linkages 964, 968, and 972 extend from the retracted position. It is noted here that the inactive linkage remains stationary (although not necessarily) while the active linkage is stretched. That is, while the first linkage is extended, the second linkage does not move, and the first linkage does not move while the second linkage is extended. The arm has a low profile as the front arms pass in the same plane and the end-effectors pass in the same plane, thereby enabling a shallow vacuum chamber with a small volume. Since the retracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the containment radius of the arm can be large, resulting in an arm particularly suitable for applications with a large number of process modules. The diameter of the chamber is dictated by the size of the slot valves. Due to the low profile of the arm the arm can replace a frogleg-type arm with opposing end-effectors. In the illustrated embodiment the front arms are shorter than the upper arm; As an alternative the anterior arms may be longer, for example here the anterior arms are at different elevations and overlap.

Referring now to FIG. 58, a combined dual arm 990 is shown with angularly offset end effectors 998, 1000. 58A and 58B show top and side views of the robot with the arm. Both linkages are shown in a retracted position. The lateral offsets 1002 and 1004 of the end-effectors correspond to the difference between the joint-to-joint length of the upper arms 994 and 996 and the joint-to-joint length of the anterior arm 992. The combined upper arm link 992 may be a single fragment as depicted in FIG. 59, or the combined upper arm link 992 may be formed by two or more regions. The internal configurations used to drive the individual links of the arm are based on Figs. 18 and 19, or otherwise. Here, the common upper arm 992 may be driven by one motor. Each of the two front arms 994 and 996 can be independently driven by one motor through a band drive device with conventional pulleys. The third links with the end-effectors 998 and 1000 are constrained by band drive devices each equipped with at least one non-circular pulley, which compensates for the effect of different lengths of the upper arms and the front arms. do. The band driving devices in each of the linkages are designed using the methodology described for FIG. 1 or others. The kinematic equations presented for FIG. 1 can also be used for each of the two linkages of the double arm. Referring also to 59A-C, the arm of FIG. 58 is shown as the left linkages 994 and 998 and the right linkages 996 and 1000 are elongated. The lateral offsets 1002 and 1004 of the end-effector correspond to the difference between the joint-to-joint length of the upper arm and the joint-to-joint length of the anterior arm, and the wrist joint portion corresponds to the trajectory of the center of the wafer. It travels along a straight line offset by this difference. Here, the inactive linkage rotates while the active linkage is stretched. For example, as the left linkage extends, the right linkage rotates, and as the right linkage extends, the left linkage rotates. 59A depicts an arm with both linkages in a retracted position. 59B shows the elongated left linkages 994 and 998. In Fig. 59c the elongated right linkages 996 and 1000 are depicted. Here the inactive arm rotates while the active arm is elongated. In the illustrated embodiment the front arms are shorter than the upper arm; As an alternative the anterior arms may be longer, for example here the anterior arms are at different elevations and overlap. In the illustrated embodiment the end effectors may be 90 degrees apart; As an alternative, any separation angle can be provided.

Referring now to FIG. 60, an independent dual arm 1030 is shown with angled offset end effectors 1040, 1042. 60A and 60B are top and side views of a robot equipped with the arm. Both linkages are shown in a retracted position. In FIG. 60, the upper right arm 1034 is disposed below the upper left arm 1032. As an alternative, an upper left arm can be arranged below the upper right arm. The internal configurations used to drive the individual links of the arm may be based on FIG. 23. Each of the two upper arms 1032 and 1034 may be independently driven by one motor. The front arms are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links with the end-effectors 1040 and 1042 are constrained by band drive devices each equipped with at least one non-circular pulley. The band drive devices are designed such that rotation of one of the upper arms 1032 and 1034 causes the corresponding linkage to extend and contract along a straight line while the other linkage remains stationary. The band driving devices in each of the linkages are designed using the methodology described with respect to FIG. 5 or others. The kinematic equations presented with respect to FIG. 5 can also be used for each of the two linkages of the double arm. 61A-61C, the arm of FIG. 60 is shown as the left linkages 1032, 1036, 1040, and the right linkages 1034, 1038, 1042 are elongated. Here, the inactive linkage remains stationary (although not necessarily) while the active linkage is stretched. That is, the left linkage does not move while the right linkage is extended, and the right linkage does not move while the left linkage is extended. Here, the inactive linkage remains stationary while the active linkage is extended. In the illustrated embodiment the front arms are shorter than the upper arm; As an alternative the anterior arms may be longer, for example here the anterior arms are at different elevations and overlap. In the illustrated embodiment the end effectors may be 90 degrees apart; As an alternative, any separation angle can be provided.

As an example of FIG. 62 or others, the third link and end-effectors 1060, 1062, which may be referred to as a third-link assembly, respectively, are provided with a center of mass 1064 when the corresponding linkages of the arm extend and contract. , 1066 may be designed to be on or adjacent to a linear trajectory of wrist joints 1068 and 1070, respectively. This reduces an inertial force acting on the center of mass of the third link assembly and a moment due to a reaction force at the wrist joint, thereby reducing a load on a band configuration that restrains the third link assembly. Here, when there is a payload, the center of mass of the third link assembly is on one side of the trajectory of the wrist joint, and when there is no payload, the center of mass is on the other side of the trajectory. -The link assembly can be further designed. As an alternative, as best straight-line tracking performance is typically required with payload, when payload is present, the center of mass of the third link assembly is substantially above the wrist trajectory. The third-link assembly can be designed to be in the bar, as illustrated in FIG. 62. In FIG. 62, 1L is a linear trajectory of the center of the wrist joint of the left linkage, 2L is the center 1070 of the wrist joint of the left linkage, and 3L is the center of mass 1066 of the third link assembly of the left linkage. Where 4L is a force acting on the third link assembly of the left linkage when the left linkage is accelerated at the beginning of the extension movement (or when it is decelerated at the end of the contraction movement), and 5L is the left linkage It is an inertial force acting on the center of mass of the third link assembly of the left linkage when it is accelerated at the beginning of the extension motion (or when it is decelerated at the end of the retracting motion). Similarly, 1R is a linear trajectory of the center of the wrist joint of the right linkage, 2R is the center 1068 of the wrist joint of the right linkage, and 3R is the center of mass 1064 of the third link assembly of the right linkage, 4R is the force acting on the third link assembly of the right linkage when the right linkage is decelerated at the end of the extension movement (or when it is accelerated at the start of the contraction movement), and 5R is the force acting on the third link assembly of the right linkage It is an inertial force acting on the center of mass of the third link assembly of the right linkage when decelerating at the end of (or when accelerating at the start of the contraction movement). In the illustrated embodiment, dual wafer end effectors are provided. Any suitable end effector and arm, or link geometry, may be provided in alternative aspects.

In alternative aspects, the upper arms in any of the aspects of the embodiment may be driven directly by a motor or through any kind of coupling or transmission arrangement. Any delivery ratio can be used. As an alternative, the band drives actuating the second link and restraining the third link may be of any other configuration with equal functionality, such as belt drive, cable drive, circular gear and non-circular gear, interlock-based It can be replaced by mechanisms or any combination of the above. As an alternative, the third link of each linkage, for example in the dual arm aspect and the quad arm aspect of the embodiment, is a pulley driven by the second motor, similar to the single arm concept of FIG. It can be constrained to keep the end-effector radially through a conventional two-stage band configuration that synchronizes the third link. Alternatively, the two-stage band configuration may be replaced by any other suitable configuration, such as, for example, a belt drive, a cable drive, a gear drive, an interlock-based mechanism or any combination of the foregoing. As an alternative, in the double arm aspect and the quad arm aspect of the embodiment, the upper arms may not be configured in a coaxial manner. The upper arms may have separate shoulder joints. The two linkages of the double arm and quad arm need not be provided with upper arms of the same length and front arms of the same length. The length of the upper arm of one linkage may be different from the length of the upper arm of the other linkage, and the length of the front arm of one linkage may be different from the length of the front arm of the other linkage. The anterior arm-to-upper arm ratio may be different for the two linkages. The left linkage and the right linkage may be interchanged with each other in the dual arm aspect and the quad arm aspect of the embodiment in which the links of the left linkage and the right linkage have different elevations. The two linkages of the double arm and quad arm need not extend along the same direction. The arms may be configured such that each linkage extends in a different direction. In any of the aspects of the above embodiment, the two linkages may consist of fewer or more than three links (first link = upper arm, second link = front arm, third link = end. -Link with effector). In the dual arm aspect and the quad arm aspect of the above embodiment, each linkage may have a different number of links. In the single arm aspects of the above embodiment the third link may carry more than one end-effector. Any suitable number of end-effectors and/or material holders may be held by the third link. Similarly, in the dual arm aspects of the above embodiment, each linkage may have any suitable number of end-effectors. In either case, the end-effectors may be located in the same plane, stacked on top of each other, disposed in a combination of the two, or disposed in any other suitable manner. In addition, in dual arm configurations, each arm may be operable independently, e.g. in rotation, elongation and/or z (vertical), e.g. as of 6 November 2012. As described with respect to the pending U.S. Patent Application No. 13/670,004 titled "Robot System with Independent Arms" with filing date, the U.S. patent application being incorporated herein by reference in its entirety. Merged. Accordingly, all such modifications, combinations and variations are encompassed.

According to one aspect of the exemplary embodiment, a substrate transport apparatus is adapted to transport a substrate. The substrate transport apparatus is provided with a movable arm assembly coupled to a drive on a central axis of rotation. The substrate support is coupled to the arm assembly on the rotating wrist axis. During stretching and contracting, the arm assembly rotates about a central axis of rotation. During extension and contraction the rotating wrist axis moves along a wrist path parallel to and offset from the radial path with respect to the central axis of rotation. During stretching and contracting, the substrate support moves parallel to the radial path without rotation.

According to another aspect of the exemplary embodiment, a substrate transport apparatus is adapted to transport a first substrate and a second substrate. The substrate transport apparatus is provided with a first independent movable arm assembly and a second independent movable arm assembly coupled to a drive on a common axis of rotation. The first substrate support and the second substrate support are coupled to the first arm assembly and the second arm assembly on a first rotary wrist axis and a second rotary wrist axis, respectively. During stretching and contracting, the first arm assembly and the second arm assembly rotate about the common axis of rotation. During stretching and contracting, the first and second rotating wrist axes move along a first wrist path and a second wrist path parallel to and offset from the radial path relative to the common axis of rotation. During stretching and contracting, the first substrate support and the second substrate support move parallel to the radial path without rotation.

According to another aspect of the exemplary embodiment, a substrate transport apparatus is adapted to transport a substrate. The substrate transport apparatus is provided with a driving unit and an upper arm rotatably coupled to the driving unit, the upper arm being rotatable about a central axis. The elbow pulley is fixed to the upper arm. The front arm is rotatably coupled to the upper arm and the front arm is rotatable about an elbow axis, the elbow axis being offset from the central axis by an upper arm link length. The end effector is rotatably coupled to the front arm, the end effector is rotatable about a wrist axis, the wrist axis is offset from the elbow axis by the length of the front arm link, and the end effector supports the substrate. The wrist pulley is fixed to the end effector, and the wrist pulley is coupled to the elbow pulley as a band. The front arm link length is different from the upper arm link length. The end effector is constrained with respect to the upper arm by the elbow pulley, the wrist pulley and the band so that the substrate moves along a linear path radially with respect to the central axis.

According to another aspect of the exemplary embodiment, a substrate transport apparatus is adapted to transport a substrate. The substrate transport apparatus is provided with a drive unit having a first rotary drive and a second rotary drive. The upper arm is rotatably coupled to the first rotary drive device on a central axis of rotation. The front arm is rotatably coupled to the upper arm, the front arm is rotatable about a rotation elbow axis of the upper arm, and the rotation elbow axis is offset from the rotation center axis by an upper arm link length. The front arm is further coupled to the second rotary drive device as a front arm coupling part, and is driven around the rotary elbow shaft by the second rotary drive device. The substrate support supports the substrate, and the substrate support is rotatably coupled to the front arm and is rotatable about a rotary wrist axis of the front arm, and the rotary wrist axis is offset from the rotary elbow axis by a front arm link length. do. The substrate support is further coupled to the upper arm as a substrate support coupling portion, and is driven about the rotary wrist axis by a relative movement between the upper arm and the front arm around the rotary elbow axis. The front arm link length is different from the upper arm link length. The substrate support is constrained by the substrate support coupling portion so that the substrate moves along a linear path with respect to the rotation center axis.

According to another aspect of the exemplary embodiment, the linear path follows a direction intersecting the rotational central axis.

According to another aspect of the exemplary embodiment, the linear path follows a direction perpendicular to the rotation center axis, which is offset with respect to the rotation center axis.

According to another aspect of the exemplary embodiment, the rotating wrist axis moves along a wrist path parallel to the linear path.

According to another aspect of the exemplary embodiment, the substrate support coupling portion includes a band driving device provided with one or more non-circular pulleys.

According to another aspect of the exemplary embodiment, the front arm coupling portion includes a band drive device provided with one or more non-circular pulleys.

According to another aspect of the exemplary embodiment, a transport device includes: a drive device; As a first arm connected to the driving device, the first arm includes a first link, a second link, and an end effector connected in series to the driving device, and the first link and the second link have different effective lengths A first arm, having a field; And a system for limiting rotation of the end effector with respect to the second link such that only a linear motion of the end effector with respect to the driving device is provided substantially when the first arm is extended or retracted.

According to another aspect of the exemplary embodiment, the effective length of the first link is shorter than the effective length of the second link.

According to another aspect of the exemplary embodiment, the effective length of the first link is longer than the effective length of the second link.

According to another aspect of the exemplary embodiment, the end effector comprises a center line of a wrist joint portion and a substrate support portion between the second link and the second link, which is approximately equal to a difference between the effective length of the first link and the effective length of the second link. Includes the lateral offset between.

According to another aspect of the exemplary embodiment, the system for limiting rotation includes the wrist joint portion being maintained at the lateral offset relative to the rotational center axis of the drive device when the first arm is extended or contracted. As it stands, it is configured to translate the end effector.

According to another aspect of the exemplary embodiment, the system for limiting rotation of the end effector provides substantially only radial movement of the end effector relative to the drive when the first arm is extended or retracted.

According to another aspect of the exemplary embodiment, in the system for limiting rotation of the end effector, the end effector changes a radial direction with respect to the driving device regardless of the position of the first link and the position of the second link. It is configured to constrain the orientation of the end effector to be oriented.

According to another aspect of the exemplary embodiment, the end effector is configured to support at least two spaced apart substrates on the end effector, and when the first arm is extended or contracted, the wrist joint part of the driving device The end effector and the center of the path of linear movement of the end effector when the first arm is extended or contracted so that the end effector is moved substantially only in translation while being maintained at the lateral offset with respect to the rotation center A lateral offset is provided between the wrist joint and the second link of.

According to another aspect of the exemplary embodiment, the system for limiting rotation includes a band drive device including pulleys and a band.

According to another aspect of the exemplary embodiment, the pulleys include at least one non-circular pulley.

According to another aspect of the exemplary embodiment, the pulleys include at least one pulley stationarily connected to the second link or the end effector.

According to another aspect of the exemplary embodiment, the end effector includes a substrate support portion, and a leg connecting the substrate support portion to a wrist joint portion of the end effector with the second link, wherein the leg A first portion connected to the wrist joint portion and a second portion connected to the substrate support portion are provided, and the first portion and the second portion are connected to each other at an angle between about 90 degrees and about 120 degrees.

According to another aspect of the exemplary embodiment, the end effector includes two substrate support portions, and a leg frame connecting the substrate support portion to a wrist joint portion of the end effector with the second link, and the leg frame Is provided with a base and two legs in a substantially U-shape, and each leg is connected to an individual one of the substrate supports, and the wrist joint part places the end effector at a position offset from the base part. 2 Connect to the link.

According to another aspect of the exemplary embodiment, there is provided a method comprising: rotating a first link of an arm by a drive device; Rotating the second link such that the second link of the arm rotates on the first link when the first link rotates; And the first link and the second link have different effective lengths on the second link such that when the arm is extended or retracted, the end effector is limited to only a substantially linear motion relative to the driving device. There is provided a method comprising; rotating the end effector on the second link so that the rotation of the end effector is restricted.

According to another aspect of the exemplary embodiment, the movement is a radial movement about a central axis of the driving device.

According to another aspect of the exemplary embodiment, the end effector comprises a center line of a wrist joint portion and a substrate support portion between the second link and the second link, which is approximately equal to a difference between the effective length of the first link and the effective length of the second link. Includes the lateral offset between.

According to another aspect of the exemplary embodiment, when the end effector is rotated on the second link, when the first arm is extended or contracted, a wrist joint portion with the second link is a rotation center axis of the driving device. It results only in the translational motion of the end effector while being maintained at a lateral offset relative to.

According to another aspect of the exemplary embodiment, rotating the end effector substantially provides only radial movement of the end effector with respect to the driving device when the first arm is extended or contracted.

According to another aspect of the exemplary embodiment, when the end effector is rotated, the end effector faces radially with respect to the driving device regardless of the position of the first link and the position of the second link. Constrain the orientation of the end effector.

According to another aspect of the exemplary embodiment, there is provided a transport device comprising: a drive device; And an arm connected to the driving device,

The arm includes a first link connected from a first joint to the driving device, a second link connected to the first link from a second joint, and an end effector connected to the second link from a third joint, , The first link includes a first length between the first joint part and the second joint part, and the first length is different from the second length of the second link between the second joint part and the third joint part. And, the movement of the end effector in the third joint portion is constrained to follow a substantially radial straight line with respect to the center of rotation of the drive device during extension or contraction of the arm.

According to one exemplary embodiment, the conveying device comprises: a drive device; As a first arm connected to the driving device, the first arm includes a first link, a second link, and an end effector connected in series to the driving device, and the first link and the second link have different effective lengths A first arm, having a field; And a system for limiting rotation of the end effector relative to the second link such that only a linear motion of the end effector relative to the drive device is provided when the first arm is extended or retracted.

The effective length of the first link may be shorter than the effective length of the second link. The effective length of the first link may be longer than the effective length of the second link. The end effector may include a lateral offset between the center line of the wrist joint portion and the substrate support portion with the second link, which is substantially equal to a difference between the effective length of the first link and the effective length of the second link. The system for limiting rotation is configured to translate the end effector when the first arm is extended or retracted, with the wrist joint portion maintained at the lateral offset relative to the rotational center axis of the drive device. I can. The system for limiting rotation of the end effector can substantially only provide radial movement of the end effector relative to the drive when the first arm is extended or retracted. The system for limiting rotation of the end effector is configured to constrain the orientation of the end effector so that the end effector faces radially with respect to the driving device regardless of the position of the first link and the position of the second link. Can be. The end effector may be configured to support at least two spaced apart substrates on the end effector. When the first arm is extended or contracted, the wrist joint portion is in the lateral direction with respect to the rotation center axis of the driving device. Wrist between the center of the path of linear motion of the end effector when the first arm is extended or contracted and the second link of the end effector so that the end effector is moved substantially only translationally while being maintained at an offset Lateral offsets are provided between the joints. The system for limiting the rotation may include a band driving device including pulleys and a band. The pulleys may include at least one non-circular pulley. The pulleys may include at least one pulley connected to the second link or the end effector in a stopped state. The end effector may include a substrate support portion and a leg connecting the substrate support portion to a wrist joint portion of the end effector with the second link, wherein the leg includes a second member connected to the wrist joint portion. One portion and a second portion connected to the substrate support portion are provided, and the first portion and the second portion are connected to each other at an angle between about 90 degrees and about 120 degrees. The end effector may include two substrate support portions, and a leg frame connecting the substrate support portion to a wrist joint portion of the end effector with the second link, wherein the leg frame includes a base and It is provided with two legs and is substantially U-shaped, each leg is connected to a separate one of the substrate supports, and the wrist joint part connects the end effector to the second link at a position offset from the center of the base part. Connect.

One type of example method includes rotating the first link of the arm by means of a drive device; Rotating the second link such that the second link of the arm rotates on the first link when the first link rotates; And the first link and the second link have different effective lengths on the second link such that when the arm is extended or retracted, the end effector is limited to only a substantially linear motion relative to the driving device. It may include; rotating the end effector on the second link so that the rotation of the end effector is restricted.

The movement may be a radial movement about a central axis of the driving device. The end effector may include a lateral offset between the center line of the wrist joint portion and the substrate support portion with the second link, which is substantially equal to a difference between the effective length of the first link and the effective length of the second link. Rotating the end effector on the second link means that when the first arm is extended or contracted, the wrist joint portion with the second link is maintained at a lateral offset with respect to the rotational center axis of the driving device. It can only result in the translational motion of the end effector. The end effector may substantially provide only radial movement of the end effector with respect to the driving device when the first arm is extended or contracted. By rotating the end effector, the orientation of the end effector may be constrained so that the end effector faces radially with respect to the driving device regardless of the position of the first link and the position of the second link.

In one type of example embodiment a conveying device may be provided, the conveying device comprising: a drive device; And an arm connected to the driving device, wherein the arm includes a first link connected to the driving device at a first joint, a second link connected to the first link at a second joint, and a third joint And an end effector connected to the second link, wherein the first link includes a first length between the first joint and the second joint, and the first length is the second joint and the third joint It is different from the second length of the second link between, and the movement of the end effector at the third joint is constrained to follow a substantially radial straight line with respect to the center of rotation of the driving device during the extension or contraction of the arm. do.

Referring now to FIG. 63, a graphical representation 1100 of exemplary pulleys is shown. The exemplary pulley profiles may be for arms with different link lengths as will be described. As an example, the graph 1100 may show profiles of a wrist pulley having a circular elbow pulley. Here the following exemplary design was used for the figure: Re/l2 = 0.2, where Re is the radius of the elbow pulley and l2 is the joint-to-joint length of the anterior arm. As an alternative, any suitable ratio can be provided. For clarity purposes, the graph shows extreme design cases compared to the pulley for the same-link arm. The outermost profile 1110 is for l2/l1 = 2, where l2 is the joint-to-joint length of the anterior arm, and l1 is the joint-to-joint length of the upper arm. For example, this case represents a longer anterior arm. The intermediate profile 1112 is for l2/l1 = 1, for example with the same link lengths. The innermost profile 1114 is for l2/l1 = 0.5, for example in this case representing the shorter anterior arm. In the illustrated embodiment, a polar coordinate system 1120 was used. Here, the radial distance is normalized with respect to the radius of the elbow pulley, for example, expressed as a multiple of the radius of the elbow pulley. In other words, Rw/Re was shown, where Rw represents the polar coordinates of the wrist pulley, and Re represents the elbow pulley. The angular coordinates are in degrees (deg), and the zero is indicated along the direction 1122 of the end-effector, for example, the end-effector faces to the right with respect to the drawing.

Referring now to FIGS. 64 and 65, two additional configurations of an arm with different link lengths 1140 and 1150 are shown. Arm 1140 is shown with a front arm 1144 that is longer than upper arm 1142, wherein a single arm configuration may utilize features as disclosed with respect to FIGS. 1-4, and 5-8 or others. have. In the illustrated embodiment, two end-effectors 1146 and 1148 supporting individual substrates 1150 and 1152 are connected rigidly to each other and face opposite directions. The substrates travel within a radial path that coincides with the center 1156 of the robot 1140 and is offset 1154 from the wrist, as shown. Similarly, arm 1160 is shown with anterior arm 1164 shorter than upper arm 1162, wherein a single arm configuration is characterized as disclosed in FIGS. 1-4, and 5-8 or others. You can use them. In the illustrated embodiment, two end-effectors 1166 and 1168 supporting individual substrates 1170 and 1172 are rigidly connected to each other and face opposite directions. The substrates travel within a radial path that coincides with the center 1176 of the robot 1160 and is offset 1174 from the wrist as shown. Here, features of the disclosed embodiments may be shared similarly to any of the other disclosed embodiments.

Referring to FIG. 66A, a schematic plan view of an exemplary substrate transport robot 1200 is shown. Robot 1200 may be vacuum compatible, or may be any suitable robot having a drive portion 1210 and an arm portion 1212 coupled to the drive portion 1210. , As will be described in more detail below. Throughout the illustrated embodiments, the upper arm link lengths and the front arm link lengths may be different and may be driven by circular or non-circular pulleys, for example as described above. In alternative aspects, as arms having the same link lengths or different link lengths, arms equipped with circular pulleys or other suitable drive configurations may be provided, for example with any disclosed suitable configuration. In FIGS. 66A and 66B are top and side views, respectively, of a robot 1200 with an arm 1212. The drive unit 1200 may be provided with four concentric shaft drive shafts so that the first part 1214 and the second part 1216 of the arm 1212 can be independently driven. A suitable drive device with four concentric axes is shown as an example in FIG. 70B. Here, arm 1212 features two independent linkages, namely an upper linkage 1214 and a lower linkage 1216. The upper linkage 1214 may be driven by the two inner-most drive shafts of the drive device 1210, and the lower linkage part 1216 is the two outermost linkages of the drive device 1210. It can be driven by outer-most drive shafts. The linkages are shown in the retracted position in FIGS. 67A and 68A. Each of the two linkages 1214 and 1216 includes a first link (upper arms 1218, 1220), a second link (front arms 1222, 1224) and a third link (end-effectors 1226, 1228). ). The joint-to-joint length of the second link is shown to be less than the joint-to-joint length of the first link. The lateral offset of the third links 1230 and 1232 corresponds to the difference between the joint-to-joint length and the upper arm joint-to-joint length and an additional offset of the anterior arm, which is the two arms. It is summed with the offset 1234 between. The offset 1234 may correspond to a nominal center distance between substrates in a two-station process module, where lateral offsets 1230 and 1232 may be half of the total center distance 1234. The arms 1214, 1216 can be stretched or retracted without interference with anything physically within the gap G, for example with the chamber material between the slit valves in a quad application. Thus, the offsets 1230 and 1232 coupled with the shorter front arms form the gap. As an alternative, any suitable offset(s) may be provided. Here, the end effectors 1228 and 1226 are nominally parallel to each other and nominally extend and contract without rotation. Since the end effectors 1228 and 1226 are also independently positionable, the substrates thereon can be independently positioned or picked. Referring also to Figures 68A-68B, plan views of an exemplary substrate transport robot 1200 are shown. 68A shows a retracted robot 1200, while FIG. 68B shows an extended robot 1200. The described robot 1200 is provided with arms 1214 and 1216 that can be independently positioned. In an alternative embodiment, the arms 1214, 1216 can be driven by two concentric shafts and can be dependent on each other. An exemplary drive configuration is described with respect to FIG. 80B, where two coaxial sets of drive shafts drive two sets of arms. Here, as an example, one of the concentric shaft drive shafts may be provided to drive the arms 1214 and 1216. Referring also to Figures 67A-67C, an alternative robot configuration 1200' is shown. Arms 1214' and 1216' are provided in the robot 1200', and the robot 1200' may have features similar to those of the robot 1200. Here, the arms of the robot 1200' can be independently elongated and retracted, but rotate together. Instead of four concentric shaft drives, the robot 1200' utilizes a drive with three concentric shafts. Suitable drive and pulley configurations are shown with respect to FIGS. 23 and 24 or 33 and 34. In alternative aspects any suitable drive and pulley configuration may be provided, for example wherein the upper arms are constrained to each other as disclosed.

Referring to FIG. 69A, a schematic plan view of an exemplary substrate transport robot 1300 is shown. The robot 1300 may be vacuum compatible, or may be any suitable robot having a drive portion 1310 and an arm portion 1312 coupled to the drive portion 1310, below. As will be described in more detail. Throughout the illustrated embodiments, the upper arm link lengths and the front arm link lengths may be different and may be driven by circular or non-circular pulleys. In alternative aspects, as arms having the same link lengths or different link lengths, arms with circular pulleys or other suitable drive configurations may be provided. 69A and 69B are top and side views, respectively, of a robot 1300 with an arm 1312. The drive unit 1310 may be provided with four concentric shaft drive shafts so that the first part 1314 and the second part 1316 of the arm 1312 can be driven independently. Here, the arm 1312 features two independent linkages, namely an upper linkage 1314 and a lower linkage 1316. The upper linkage 1314 may be driven by the two innermost drive shafts of the drive device 1310, and the lower linkage 1316 is connected to the two outermost drive shafts of the drive device 1310. Can be driven by The linkages are shown in the retracted position in FIG. 69A. Each of the two linkages 1314 and 1316 is a first link (upper arms 1318, 1320), a second link (front arms 1322, 1324) and a third link (end-effectors 1326, 1328). ). The joint-to-joint length of the second link is smaller than the joint-to-joint length of the first link. The lateral offset of the third links 1330 and 1332 corresponds to a difference between the joint-to-joint length of the anterior arm and the upper arm joint-to-joint length. The shape of the third link may be determined to provide space for the two innermost drive shafts 1334.

Also referring to FIGS. 70A and 70B, an example internal configuration used to drive individual links of each linkage is shown. The configuration will be described with respect to the upper linkage. An equivalent arrangement can be used for the lower linkage. The upper arm 1318 of the upper linkage 1314 may be driven by one motor 1350. The front arm 1322 of the upper linkage 1314 may be driven by another motor 1352 through a band driving device 1354 equipped with conventional pulleys. The third link with end-effector 1326 can be constrained by a band drive 1356 equipped with at least one non-circular pulley, which compensates for the effect of different lengths of the upper arms and the front arms. Regardless of the position of the two first links, the end-effector faces radially. The design of the band driving device may be as shown in FIGS. 1 to 4. Both drive shafts connected to the linkage portion need to move by the same amount in the rotational direction of the linkage so that the upper linkage rotates. The two drive shafts need to move in a manner that is adjusted according to the inverse kinematic equations, e.g., as shown in equations 1.8 to 1.16 so that the end-effector extends and contracts radially along a linear path. . Any suitable arm configuration with offset end effectors may be used in alternative aspects as disclosed for example with respect to FIGS. 66-68 or others.

Also, referring to FIGS. 71A and 71B, another exemplary internal configuration used to drive individual links of each linkage is shown. Again, the configuration will be described with respect to the upper linkage 1314'. An even configuration can be used for the lower linkage. Here, the upper arm 1318 of the upper linkage 1314' is driven by one motor 1350. The front arm 1322 of the upper linkage 1314' is coupled to another motor 1352 through a band configuration 1354' equipped with at least one non-circular pulley. The band drive device 1354' is designed such that rotation of the upper arm causes the wrist joint to extend and contract along a straight line parallel to the desired radial path of the end-effector. The third link with the end-effector 1326 can be constrained by a band drive 1356' equipped with at least one non-circular pulley, whereby the end of the end regardless of the position of the two first links -The effector faces in the radial direction. The band driving devices may be designed according to FIGS. 5 to 8. Both drive shafts connected to the linking part may move by the same amount in the rotational direction of the linking part so that the upper linking part 1314 ′ rotates. The drive shaft coupled to the upper arm of the upper linkage is Equation 2.8 so that the end-effector 1326 extends and contracts in the radial direction along a straight path, while the other motor attached to the upper linkage is kept stationary. It is necessary to move according to the inverse kinematic equations as presented in equation 2.15. Any suitable drive configuration can be provided in alternative aspects.

In Figures 72a-72c and 73a-73c the independent operation of the two linkages of the robot of Figure 69 is illustrated. In particular, in 72a to 72c and 73a to 73c, independent rotational motion and extension motion of the two linkages 1314 and 1316 are shown. 72A to 72C illustrate the rotation operation of the upper linkage 1314 of the robot 1300 of FIG. 69. 72A shows a top view of a robot with both linkages in a retracted position. In FIG. 72B, a plan view of a robot with the upper linkage 1314 rotated by 90 degrees in a clockwise direction is drawn. 72C shows a top view of a robot with the upper linkage 1314 rotated by 180 degrees. 73A to 73C illustrate the stretching movement of the robot 1300 of FIG. 69. 73A shows a top view of a robot with both linkages in a retracted position. 73B shows a top view of a robot with the upper linkage 1314 partially elongated. 73C shows a top view of the robot with the upper linkage 1314 in an extended position.

An alternative exemplary aspect of the disclosed embodiment is shown in FIGS. 74A and 74B, wherein the robot 1450 is shown with a drive device 1310 and an arm 1452. Here, the two linkages 1454 and 1456 of the arm 1452 may be configured according to FIGS. 74A and 74B, and the drawings show a plan view and a side view of the robot 1450. Here, four concentric shaft drive shafts are provided to the drive unit 1310 of the robot. The arm 1452 features two independent linkages, namely an upper linkage 1454 and a lower linkage 1456. The upper linkage 1454 may be driven by two innermost drive shafts 1334, and the lower linkage may be driven by two outermost drive shafts of the drive device 1310. The linkages are shown in a retracted position in FIG. 74A. Each of the two linkages 1454, 1456 is a first link (upper arms 1458, 1460), a second link (front arms 1462, 1464) and a third link (end-effectors 1466, 1468). ). The joint-to-joint length of the second link may be smaller than the joint-to-joint length of the first link. The lateral offset 1470 of the third link corresponds to a difference between the joint-to-joint length of the anterior arm and the upper arm joint-to-joint length. The shape of the third link may be determined to provide space for the two innermost drive shafts 1334.

75A and 75B illustrate an exemplary internal configuration used to drive individual links of each linkage. The configuration will be described with respect to the upper linkage 1454. An even configuration can be used for the lower linkage 1456. The upper arm 1458 of the upper linkage 1454 may be driven by one motor 1350. The front arm 1362 of the upper linkage 1454 may be driven by another motor 1352 through a band drive 1472 equipped with conventional pulleys. The third link with end-effector 1466 can be constrained by a band drive 1474 equipped with at least one non-circular pulley, which compensates for the effect of different lengths of the upper arm and the front arm. Regardless of the positions of the first links, the end-effector faces radially. The design of the band driving device may be according to FIGS. 1 to 4. To rotate the upper linkage 1454, both drive shafts connected to the linkage need to move by the same amount in the rotational direction of the linkage. The two drive shafts need to move in a manner that is adjusted according to the inverse kinematic equations as presented in equations 1.8 to 1.16 so that the end-effector extends and contracts radially along a straight path.

76A and 76B illustrate another exemplary internal configuration used to drive individual links of each linkage. Here, the configuration will be described with respect to the upper linkage 1454. An even configuration can be used for the lower linkage 1456. The upper arm 1458 of the upper linkage may be driven by one motor 1350. The front arm 1462 of the upper linkage 1454 may be coupled to another motor 1352 through a band configuration 1472' provided with at least one non-circular pulley. The band drive is designed such that rotation of the upper arm 1458 causes the wrist joint to extend and contract along a straight line parallel to the desired radial path of the end-effector 1466. The third link with the end-effector 1466 is constrained by a band driving device equipped with at least one non-circular pulley, whereby the end-effector is in a radial direction regardless of the position of the two first links. Heading. The band driving devices may be designed according to FIGS. 5 to 8. Both drive shafts connected to the linking part may move by the same amount in the rotation direction of the linking part so that the upper linking part 1454 rotates. The drive shaft coupled to the upper arm of the upper linkage is Equation 2.8 so that the end-effector 1466 extends and contracts in the radial direction along a straight path, while the other motor attached to the upper linkage is kept stationary. It is necessary to move according to the inverse kinematic equations as presented in equation 2.15.

77A-77C and 78A-78C illustrate the independent operation of the two linkages 1454 and 1456 of the robot of FIGS. 74A and 74B. In particular, in FIGS. 77A to 77C and 78A to 78C, independent rotational movements and extension movements of the two linkages 1454 and 1456 are shown. 77A to 77C illustrate the rotation operation of the upper linkage of the robot. 77A shows a top view of the robot with both linkages in a retracted position. 77B is a plan view of a robot with the upper linkage 1454 rotated by 90 degrees in the clockwise direction. Figure 77c shows a top view of a robot with the upper linkage 1454 rotated by 180 degrees. 78A to 78C illustrate the stretching movement of the robot of FIGS. 74A and 74B. 78A shows a top view of a robot with both linkages in a retracted position. 78B is a top view of a robot with the upper linkage partially elongated. 78C shows a top view of the robot with the upper linkage 1454 in an extended position (but not fully extended).

Alternative embodiments of the above dual linkage configurations may also be provided. The first link may be driven directly by a motor or through any kind of coupling or transmission configuration. Any delivery ratio can be used. As another example, the band drive devices actuating the second link may be in any other configuration with equal functionality, such as a belt drive device, a cable drive device, a gear drive device, an interlock-based mechanism, or any combination of the foregoing. Can be replaced by Similarly, the band drive device restraining the third link may be replaced by any other suitable configuration, such as a belt drive device, a cable drive device, non-circular gears, an interlock-based mechanism or any combination of the foregoing. . Here the end-effector need not be oriented radially. The end effector can be positioned with any suitable offset relative to the third link and oriented in any suitable direction. Also, the third link may have more than one end-effector. Any suitable number of end-effectors and/or material holders may be held by the third link. As another example, any order of vertical arrangement of individual links and end-effectors may be used. For example, the end-effector of the upper linkage may be disposed above the upper linkage as opposed to being sandwiched between the two linkages.

Referring now to FIGS. 79A and 79B, top and side views of a robot 1550 with an arm 1552 and a drive device 1310 are shown. The drive unit 1310 is provided with four concentric drive shafts. The arm features two independent linkage pairs, an upper linkage pair 1554 and a lower linkage pair 1556. The upper linkage pair 1554 is driven by two innermost drive shafts 1334, and the lower linkage pair is driven by two outermost drive shafts. The linkages are shown in the retracted position in FIG. 79A. Each of the two linkages 1554 and 1556 is composed of two linkages, namely, left linkages 1558 and 1560 and right linkages 1562 and 1564. Each of the linkages includes a first link (upper arm), a second link (front arm) and a third link (end-effector). The joint-to-joint length of the second link is smaller than the joint-to-joint length of the first link. The difference between the joint-to-joint length of the second link and the joint-to-joint length of the first link is selected so that the second link passes without touching the drive shafts of the drive unit.

80A and 80B illustrate an exemplary internal configuration used to drive individual links of each linkage. Here the configuration will be described for the upper linkage pair 1554. An equivalent configuration may be used for the lower linkage pair 1556. For clarity of the side view, the front arms (and end-effectors) of the upper linkage pair are depicted at different elevations (although they may be placed in the same horizontal plane). Similarly the anterior arms of the pair of lower linkages are depicted at different elevations in the side view. The upper arm 1570 of the left upper linkage 1558 is driven by the first drive shaft 1572, and the upper arm 1574 of the right upper linkage 1562 is driven by the second drive shaft 1576 do. The front arm 1578 of the left upper linkage 1558 is driven by the second drive shaft 1576 through a band drive 1580 equipped with at least one non-circular pulley. Similarly, the front arm 1582 of the right upper linkage 1562 is driven by the first drive shaft 1572 via a band drive 1584 equipped with at least one non-circular pulley. Circular pulleys may be used in alternative aspects where the same link lengths are provided, for example. When the first driving shaft 1572 and the second driving shaft 1576 rotate equally in opposite directions, the wrist joint portion of the left linkage part and the wrist joint part of the right linkage part It is designed to move along straight paths parallel to each other. The third link/end-effector 1586 of the left upper linkage 1558 is constrained by a band drive 1558 equipped with at least one non-circular pulley, which is the left upper linkage 1558 Regardless of the position of the two first links 1570, 1578 of the left upper linkage 358 by compensating the effect of the different lengths of the upper arm 1570 and the front arm 1578 of the end-effector ( 1586) faces the radial direction. The design of the band driving device may be according to FIGS. 1 to 4. Similarly, the third link/end-effector 1590 of the right upper linkage 1562 can be constrained by a band driving device 1592 equipped with at least one non-circular pulley, which is the upper right Regardless of the position of the two first links of the right upper linkage by compensating for the effect of the different lengths of the upper arm and the front arm of the linkage, the end-effector is oriented radially. Circular pulleys may be used in alternative aspects where the same link lengths are provided, for example. Again, this band drive can be designed according to FIGS. 1 to 4. The first drive shaft and the second drive shaft may rotate in sync in a desired direction of rotation of the upper linkage pair so that the upper linkage pair rotates. The two drive shafts can rotate simultaneously in opposite directions so that the end-effectors of the upper linkage pair extend and contract along linear paths.

81A-81C and 82A-82C illustrate the independent operation of two pairs of linkages of the robot of FIGS. 79A and 79B. In particular, FIGS. 81A-81C and 82A-82C show the independent rotational and extensional movements of the two linkage pairs. 81A to 81C illustrate the rotation of the upper linkage pair 1554 of the robot. 81A shows a top view of a robot with both pairs of linkages in a retracted position. 81B shows a top view of a robot with the upper linkage pair 1554 rotated by 45 degrees clockwise. 81C shows a top view of a robot with the pair of upper linkages rotated by 180 degrees. 82A to 82C illustrate the stretching movement of the robot. 82A shows a top view of a robot with both pairs of linkages in a retracted position. 82B shows a top view of a robot with the pair of upper linkages partially elongated. The stretch shown in Figure 82A roughly corresponds to the maximum stretch of a conventional solution with rigidly coupled side-by-side end-effectors. 82C, this embodiment provides a longer reach from the same containment volume by allowing the linkages, in this particular example, the upper linkage pair to extend well beyond this point. .

Alternatively, the linkages may be arranged according to FIGS. 83A and 83B, in which a top and side view of the robot 1650 is shown. Here, the robot 1650 may have features as described with respect to FIGS. 79A and 79B with an upper arm pair 1554 and a lower arm pair 1556'. However, in this embodiment the upper right arm of the lower arm pair 1556' is located below the upper left arm of the lower arm pair.

Any suitable quad linkage configuration may be provided in alternative embodiments. As an example, the first link can be driven directly by a motor or through any kind of coupling or transmission configuration. Any delivery ratio can be used here. As an alternative, the band drive devices actuating the second link are by any other configuration with equal functionality, such as a belt drive device, a cable drive device, a gear drive device, an interlock-based mechanism, or any combination of the foregoing. Can be replaced. Similarly, the band drive device restraining the third link may be replaced by any other suitable configuration, such as a belt drive device, a cable drive device, non-circular gears, an interlock-based mechanism or any combination of the foregoing. have. Furthermore, the end-effectors can be positioned with any suitable offset and oriented in any suitable direction. Alternatively, the third link may carry more than one end-effector. Any suitable number of end-effectors and/or material holders may be held by the third link of any of the linkages. As an example, a configuration 1700 suitable for manufacturing solar cells is depicted in FIGS. 83 to 86, wherein a plurality of substrates are supported by each end effector. Here, any order of vertical arrangement of individual links and end-effectors may be used. For example, the end-effector held by the upper linkage pair may be disposed on the upper linkage pair as opposed to being fitted between the lower linkage pair and the upper linkage pair.

The dual arm configuration and the quad arm configuration described above can be driven, for example, by a robot drive unit having four concentric rotation axes as described above and illustrated in the drawings. The robot driving unit may further include a common vertical lift axis 1750 as schematically drawn in FIGS. 87A and 87B. As an alternative, the robot drive unit may comprise two independent vertical lift axes 1750a and 1750b, as schematically shown in FIGS. 88A-B and 89A-B. In this case each vertical axis is coupled to one of the two linkages of the dual linkage configurations or to one of the two linkage pairs of the quadruple linkages configuration. 88A-B, the lift shafts 1750a, 1750b are independently coupled to the rotary drive units 1806, 1808, wherein the lift shafts 1750a, 1750b are provided with independently rotatable lead screws. Similarly, in FIGS. 89A-B, the lift shafts 1750a', 1750b' are independently coupled to the rotary drive units 1806', 1808', where the lift shafts 1750a', 1750b' are common Share a fixed lead screw.

In FIGS. (1802, 1904) is equipped. In the example of FIGS. 90A and 90B, three rotation axes and an optional vertical lift shaft may be provided to each drive unit. Each robotic arm may consist of a first link (upper arm), a second link (front arm) and a third link with an end-effector. As shown in the drawing, the joint-to-joint length of the second link may be smaller than the joint-to-joint link of the first link. Each of the three links may be driven by one of the rotation axes of the corresponding robot driving unit. In general, any number of rotational axes and links may be employed. The two robotic arms and drive units of Figs. 90A and 90B, the two arms can reach above and/or below each other and access any station attached to the vacuum chamber to It can be configured to be able to transfer/remove material from/to the station. As an alternative, each of the two drive units 1902 ′ and 1904 ′ may feature an extension member, as schematically shown in FIGS. 91A and 91B, the extension member of which is It is possible to transfer the rotational motion from the rotational shafts to a given point of the vacuum chamber. Whereas the elongate member can be stationary in a horizontal plane, the elongate member can move vertically if the corresponding drive unit is mounted by a vertical lift shaft. A standard robotic arm can be driven by each of the elongate members as illustrated in the examples of FIGS. 91A and 91B. For example, each drive unit with an elongate member can provide two axes of rotation and an optional vertical lift axis. If so, each of the robot arms may be composed of a first link (upper arm), a second link (front arm) and a third link with an end-effector. In the example of FIGS. 91A and 91B, the two first links are driven by two rotation axes of a corresponding drive unit, and the third link is mechanically constrained so that the end-effector maintains orientation in the radial direction. Although three-link arms are shown in Figs. 91A and 91B, the arms may be configured with any suitable number of links. In an alternative embodiment, FIGS. 90A and 90B and FIGS. 91A and 91B or any suitable combination of other arm configurations and configuration units may be used. According to another example, a machine-readable non-transitory program storage device may be provided in which a program of instructions executable by the machine is tangible to perform operations, e.g., memory ( 1951'), wherein the operations include any of the operations performed by the controller as described herein. The methods described above may be performed or controlled at least in part by the processor 1951, the memory 1951', and the software 1951".

It should be understood that the foregoing description is only illustrative. Various alternatives and variations can be devised by one of ordinary skill in the art. Accordingly, this embodiment is intended to cover all such alternatives, modifications, and variances. For example, the features described in the various dependent claims may be combined with each other in any suitable combination(s). In addition, features from different embodiments described above may be selectively combined into new embodiments. Accordingly, this specification is intended to cover all such alternatives, modifications and variations that fall within the scope of the appended claims.

Claims (14)

A drive unit having a coaxial drive shaft including three coaxial drive shafts;
As a first arm connected to the driving unit, the first arm includes a first link, a second link, and a first end effector continuously connected to the driving unit, wherein the first link and the second link have different effective lengths Having, a first arm; And
A second arm connected to the driving unit, wherein the second arm includes a third link, a fourth link, and a second end effector continuously connected to the driving unit;
A first mechanical connection part connecting the first arm and the driving part includes a first band driving part, the first band driving part including at least one first non-circular pulley,
A second mechanical connection part connecting the second arm and the driving part includes a second band driving part having at least one second non-circular pulley,
The first and second mechanical connections, each having non-circular pulleys, limit the movement of the links of each arm relative to the other links of each arm, so that the first and second arms are extended and retracted. At this time, the transfer device, characterized in that the mechanical connection portion allows only the linear extension and retraction movement of the end effector with respect to the driving portion. The method of claim 1,
And said coaxial drive shaft comprises at least four coaxial drive shafts. The method of claim 1,
At least one first non-circular pulley of the first band drive unit, characterized in that it comprises at least two non-circular pulleys. The method of claim 3,
Transfer device, characterized in that at least two non-circular pulleys are arranged inside the second link. The method of claim 4,
At least one second non-circular pulley of the second band driving unit includes at least two non-circular pulleys, and at least two non-circular pulleys of the second band driving unit are disposed inside the fourth link. Conveying device. The method of claim 1,
An effective length of the second link is shorter than an effective length of the first link, and an effective length of the fourth link is shorter than an effective length of the third link. The method of claim 6,
The first end effector includes a first section, a second section extending at a first angle from the first section, and a first substrate support section at an end of the second section, wherein a part of the coaxial shaft is the first When the end effector is disposed in the retracted position, the transfer device, characterized in that it is located adjacent to the inside of the first angle. The method of claim 7,
The second end effector includes a first section, a second section extending at a second angle from the first section, and a second substrate support section at an end of the second section of the second end effector, wherein the coaxial shaft Some are disposed adjacent to the inside of the second angle when the second end effector is in the retracted position, and a part of the coaxial shaft is disposed between the inside of the first angle and the inside of the second angle. Conveying device. The method of claim 1,
The first link includes a first upper arm, wherein the first upper arm rotates about a shoulder axis formed by the coaxial drive shaft,
The third link includes a second upper arm vertically spaced apart from the first upper arm and rotating about the shoulder axis,
The second link is a first front arm connected to the first upper arm and vertically disposed above the first upper arm and rotated about the first upper arm about a second axis at a position offset from the shoulder axis. Including,
The fourth link is a second front arm connected to the second upper arm and disposed vertically above the first upper arm and rotated about a second upper arm about a third axis at a position offset from the shoulder axis. Includes,
The first wrist member connects the first end effector to the first front arm and is vertically disposed on the first upper arm and is offset from the second axis with respect to the first front arm around a fourth axis. Will rotate,
The second wrist member connects the second end effector to the second front arm and is vertically disposed on the second upper arm, and the second wrist member connects to the second front arm around a fifth axis at a position offset from the third axis. Rotates about,
A first front arm shaft connects the first upper arm to a first pulley of the first band drive, the first pulley includes a first cam surface,
The first band driving portion includes a second pulley forming a first wrist member driven member connected to the first wrist member, the first wrist member driven member comprising a second cam surface,
At least one first non-circular pulley includes at least one of the first pulley and the second pulley,
The first band drive includes a first wrist member transmission element connected between the first and second cam surfaces,
The first cam surface of the first wrist member drive member rigidly connected to the first front arm by a first front arm shaft, a second cam surface and a first wrist member transmission element is the first wrist member relative to the first arm. A conveying device, characterized in that the member rotates at a non-linear rotational speed. The method of claim 1,
The first link includes a first upper arm, wherein the first upper arm is rotated about a shoulder axis formed by a coaxial drive shaft,
The third link includes a second upper arm vertically spaced apart from the first upper arm and rotated about the shoulder axis,
The second link is connected to the first upper arm and is disposed perpendicularly between the first upper arm and the second upper arm and is offset from the shoulder axis with respect to the first upper arm about a second axis. Comprising a first front arm adapted to rotate,
The fourth link is connected to the second upper arm and is disposed vertically between the first upper arm and the second upper arm and is offset from the shoulder axis with respect to the second upper arm about a third axis. Comprising a second front arm adapted to rotate,
The first wrist member connects the first end effector to the first front arm and is vertically disposed between the first upper arm and the second upper arm, and is positioned about a fourth axis at a position offset from the second axis. 1 will rotate about the front arm,
The second wrist member connects the second end effector to the second front arm, and is disposed perpendicularly between the first upper arm and the second upper arm, and is about a fifth axis at a position offset from the third axis. 2 rotates about the front arm,
The first front arm shaft is rigidly connected to the first upper arm and the first wrist member driving member,
The first band driving unit includes a second pulley forming a first wrist member driven member connected to the first wrist member,
At least one first non-circular pulley comprises at least one of the first wrist member driving member and the wrist member driven member,
The first wrist member drive member comprises a first cam surface, the first wrist member driven member comprises a second cam surface,
The first band drive portion includes a first wrist member transmission element connected between the first cam surface and the second cam surface, wherein the first cam surface and the second cam surface are a first wrist with respect to the first front arm. Transfer device, characterized in that the member is configured to rotate at a non-linear rotational speed. The method of claim 1,
The first mechanical connection unit includes a third band driving unit, the third band driving unit includes at least one third non-circular pulley, the first band driving unit is located inside the second link, the third The transfer device, characterized in that the band driving unit is located inside the first link. The method of claim 11,
And the third band drive unit comprises at least two third non-circular pulleys. The method of claim 1,
When the first arm and the second arm are located in the retracted position, the first end effector and the second end effector are located at a first vertical height, and the first link and the second link are the first end effector. And a height lower than the first vertical height of the second end effector, wherein the third link and the fourth link are positioned at a position higher than the first vertical height of the first end effector and the second end effector. Conveying device. A drive unit including a coaxial drive shaft having three coaxial drive shafts;
A first arm connected to the driving unit and including a first link, a second link, and a first end effector successively connected to the driving unit, wherein the first link and the second link have different effective lengths with respect to each other, First arm; And
A second arm connected to the driving unit and including a third link, a fourth link, and a second end effector continuously connected to the driving unit, wherein the third link and the fourth link have different effective lengths with respect to each other, Including a second arm;
A first mechanical connection part connecting the first arm with respect to the driving part includes a first non-circular pulley and a first band driving part including a first band,
A second mechanical connection part connecting the second arm with respect to the driving part includes a second band driving part including a second circular pulley and a second band,
The first mechanical connection portion including the first non-circular pulley restricts the extension and retraction motions of the first end effector only by linear extension and retraction motions with respect to the driving section.

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