GB8709064D0 - Wafer handling arm - Google Patents

Wafer handling arm


Publication number
GB8709064D0 GB878709064A GB8709064A GB8709064D0 GB 8709064 D0 GB8709064 D0 GB 8709064D0 GB 878709064 A GB878709064 A GB 878709064A GB 8709064 A GB8709064 A GB 8709064A GB 8709064 D0 GB8709064 D0 GB 8709064D0
United Kingdom
Prior art keywords
wafer handling
handling arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Application number
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Medical Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US85674986A priority Critical
Application filed by Varian Medical Systems Inc filed Critical Varian Medical Systems Inc
Publication of GB8709064D0 publication Critical patent/GB8709064D0/en
Application status is Pending legal-status Critical


GB878709064A 1986-04-28 1987-04-15 Wafer handling arm Pending GB8709064D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US85674986A true 1986-04-28 1986-04-28

Publications (1)

Publication Number Publication Date
GB8709064D0 true GB8709064D0 (en) 1987-05-20



Family Applications (2)

Application Number Title Priority Date Filing Date
GB878709064A Pending GB8709064D0 (en) 1986-04-28 1987-04-15 Wafer handling arm
GB08709595A Withdrawn GB2193482A (en) 1986-04-28 1987-04-23 Wafer handling arm

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB08709595A Withdrawn GB2193482A (en) 1986-04-28 1987-04-23 Wafer handling arm

Country Status (3)

Country Link
JP (1) JPS6342142A (en)
DE (1) DE3714045A1 (en)
GB (2) GB8709064D0 (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3704505A1 (en) * 1987-02-13 1988-08-25 Leybold Ag Einlegegeraet for vacuum systems
DE3716549C2 (en) * 1987-05-17 1989-12-28 Wild Leitz Gmbh, 6330 Wetzlar, De
DE3717628C2 (en) * 1987-05-26 1990-09-13 Loehr & Herrmann Gmbh, 7531 Neuhausen, De
EP0322205A3 (en) * 1987-12-23 1990-09-12 Texas Instruments Incorporated Automated photolithographic work cell
AT208961T (en) * 1988-05-24 2001-11-15 Unaxis Balzers Ag vacuum system
WO1989012907A1 (en) * 1988-06-17 1989-12-28 Epsilon Technology, Inc. Wafer handling system with bernoulli pick-up
DE3822598C2 (en) * 1988-07-04 1997-09-04 Siemens Ag Adjustment assembly and method for adjusting a gripping device of a robot arm for handling a semiconductor wafer
JP2545591B2 (en) * 1988-09-30 1996-10-23 国際電気株式会社 Wafer processing apparatus
US5064340A (en) * 1989-01-20 1991-11-12 Genmark Automation Precision arm mechanism
US5241183A (en) * 1991-03-22 1993-08-31 Nippon Telegraph And Telephone Corporation Vertical xy stage
JP2751975B2 (en) * 1991-12-20 1998-05-18 株式会社日立製作所 The load lock chamber of a semiconductor processing apparatus
CA2094208A1 (en) * 1992-04-28 1993-10-29 Richard D. Hein Prepackaged fluid-damping article for elastomeric mounts and methods of formation and installation
CH686445A5 (en) * 1992-10-06 1996-03-29 Balzers Hochvakuum Chamber and chamber combination for a vacuum system and method for passing at least one Werkstueckes.
DE4235676C2 (en) * 1992-10-22 1997-08-28 Balzers Hochvakuum Vacuum chamber for transporting disc-shaped workpieces in a vacuum system
US5516732A (en) * 1992-12-04 1996-05-14 Sony Corporation Wafer processing machine vacuum front end method and apparatus
JP2801489B2 (en) * 1992-12-17 1998-09-21 古河電気工業株式会社 Ring frame automatic cleaning device
JPH06204316A (en) * 1992-12-28 1994-07-22 Mitsubishi Electric Corp Heatproof robot hand
DE4336792A1 (en) * 1993-10-28 1995-05-04 Leybold Ag Device for transporting workpieces in vacuum coating installations
DE4430844C1 (en) * 1994-08-31 1996-02-22 Jenoptik Technologie Gmbh Loading device for semiconductor processing equipment
DE4430846C2 (en) * 1994-08-31 1997-04-10 Jenoptik Jena Gmbh Means for converting a transport object between two end positions
DE19812670A1 (en) * 1998-03-23 1999-10-07 Singulus Technologies Ag Substrate transport equipment especially for transporting substrates, e.g. CDs or DVDs, between stations in a sputter coating chamber
US6277753B1 (en) 1998-09-28 2001-08-21 Supercritical Systems Inc. Removal of CMP residue from semiconductors using supercritical carbon dioxide process
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
JP3883929B2 (en) 2001-09-25 2007-02-21 大日本スクリーン製造株式会社 The thin film forming apparatus and a thin film forming method
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
JP4098338B2 (en) 2006-07-20 2008-06-11 川崎重工業株式会社 Wafer transfer apparatus and a substrate transfer apparatus
CN101929535A (en) * 2009-10-29 2010-12-29 浙江大学 Method and device for realizing planar reciprocating motion by using cams and planar band

Also Published As

Publication number Publication date
GB2193482A (en) 1988-02-10
JPS6342142A (en) 1988-02-23
GB8709595D0 (en) 1987-05-28
DE3714045A1 (en) 1987-11-05

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