KR20230062681A - A Robot, An electronic device processing system, and A method of transporting substrates - Google Patents

Abstract

drive; A first arm connected to the driving device, the first arm including a first link, a second link and an end effector connected in series to the driving device, wherein the first link and the second link have different effective lengths. a first arm having arms; and a system for limiting rotation of the end effector relative to the second link such that substantially only linear motion of the end effector relative to the drive is provided when the first arm is extended or retracted. Device.

Description

A Robot, An electronic device processing system, and A method of transporting substrates}

The disclosed embodiment relates to a robot with arms having different link lengths, and more particularly to a robot with one or more arms of different link lengths, each supporting one or more substrates.

Vacuum, atmospheric and controlled environment processing for applications such as semiconductors, LEDs, Solar, MEMS or other devices is a process for substrates and carriers attached to substrates ( carriers) to and from storage locations, processing locations, or other locations. Such transport of substrates can move groups of substrates, individual substrates, either with single arms carrying one or more substrates or with multiple arms each carrying one or more substrates. BACKGROUND OF THE INVENTION Much manufacturing, for example as associated with semiconductor manufacturing, takes place in clean or vacuum environments where footprint and volume are precious. Moreover, automated transport is practiced such that minimization of transport time results in reduced cycle time and increased throughput and utilization of associated equipment. Thus, for a given range of transport applications, it is desirable to provide substrate transport automation that requires minimal trajectory and workspace volume along with minimized transport time.

The following summary is intended to be illustrative only. The summary is not intended to limit the claims.

According to one aspect of the exemplary embodiment, a transport device includes a drive; A first arm connected to the driving device, the first arm including a first link, a second link and an end effector connected in series to the driving device, the first link and the second link has different effective lengths, the first arm; and a system for limiting rotation of the end effector relative to the second link such that substantially only linear motion of the end effector relative to the drive is provided when the first arm is extended or retracted. ;

According to another aspect of the exemplary embodiment: rotating the first link of the arm by the driving device; rotating the second link such that the second link of the arm rotates on the first link as the first link rotates; and wherein the first link and the second link have different effective lengths, such that the end effector is limited to only substantially linear motion relative to the drive when the arm is extended or retracted. rotating the end effector on the second link such that rotation of the end effector is constrained.

According to another aspect of an exemplary embodiment, a driving device; and an arm connected to the driving device, wherein the arm includes a first link connected to the driving device at a first joint, a second link connected to the first link at a second joint, and a second link connected to the first link at a second joint. 3 includes an end effector connected to the second link at a joint portion, wherein the first link includes a first length between the first joint portion and the second joint portion, wherein the first length includes the second joint portion and the second joint portion. different from the second length of the second link between the third joints, wherein movement of the end effector at the third joints is substantially radially straight with respect to the center of rotation of the drive unit during extension or retraction of the arm. A transport device that is constrained to track is provided.

The foregoing aspects and other features are set forth in the following description in connection with the accompanying drawings, of which:
1A is a plan view of a conveying device;
Figure 1b is a side view of the conveying device;
Fig. 2a is a schematic plan view of a part of a conveying device;
Fig. 2b is a schematic diagram of a conveying device in a side cross section;
3A is a plan view of the conveying device;
Figure 3b is a plan view of the conveying device;
3c is a plan view of the conveying device;
4 is a graphical representation;
5A is a plan view of the conveying device;
5b is a side view of the conveying device;
Fig. 6a is a schematic plan view of a part of a conveying device;
Fig. 6b is a schematic view of a side cross-section part of the conveying device;
Fig. 7a is a plan view of the conveying device;
Figure 7b is a plan view of the conveying device;
Figure 7c is a plan view of the conveying device;
8 is a graphical representation;
Fig. 9 is a partial schematic view of the conveying device in cross-section;
10A is a plan view of the conveying device;
10B is a side view of the conveying device;
11a is a plan view of the conveying device;
Figure 11b is a side view of the conveying device;
Fig. 12 is a side cross-sectional partial schematic view of the conveying device;
Fig. 13 is a schematic view of a conveying device in cross section;
14a is a plan view of the conveying device;
14b is a plan view of the conveying device;
14c is a plan view of the conveying device;
15A is a plan view of the conveying device;
15B is a side view of the conveying device;
16A is a plan view of the conveying device;
16B is a side view of the conveying device;
17A is a plan view of the conveying device;
Figure 17b is a side view of the conveying device;
Fig. 18 is a side cross-sectional partial schematic view of the conveying device;
Fig. 19 is a schematic view of a part of a conveying device in cross section;
20A is a plan view of the conveying device;
20B is a plan view of the conveying device;
20c is a plan view of the conveying device;
21A is a plan view of the conveying device;
Figure 21b is a side view of the conveying device;
22a is a plan view of the conveying device;
Figure 22b is a side view of the conveying device;
Fig. 23 is a side cross-sectional partial schematic view of the conveying device;
24A is a plan view of the conveying device;
Figure 24b is a plan view of the conveying device;
Figure 24c is a plan view of the conveying device;
25A is a plan view of the conveying device;
Figure 25b is a side view of the conveying device;
26A is a plan view of the conveying device;
26B is a plan view of the conveying device;
Figure 26c is a plan view of the conveying device;
27A is a plan view of the conveying device;
27B is a side view of the conveying device;
28A is a plan view of the conveying device;
28B is a side view of the conveying device;
29A is a plan view of the conveying device;
29B is a plan view of the conveying device;
Figure 29c is a plan view of the conveying device;
30A is a plan view of the conveying device;
30B is a side view of the conveying device;
31A is a plan view of the conveying device;
31B is a side view of the conveying device;
32A is a plan view of the conveying device;
32B is a plan view of the conveying device;
32C is a plan view of the conveying device;
32D is a plan view of the conveying device;
33A is a plan view of the conveying device;
33B is a side view of the conveying device;
34A is a plan view of the conveying device;
34B is a plan view of the conveying device;
34C is a plan view of the conveying device;
35A is a plan view of the conveying device;
35B is a side view of the conveying device;
36 is a plan view of the conveying device;
37A is a plan view of the conveying device;
37B is a side view of the conveying device;
38A is a plan view of the conveying device;
38B is a side view of the conveying device;
39 is a plan view of the conveying device;
40A is a plan view of the conveying device;
40B is a side view of the conveying device;
41 is a plan view of the conveying device;
42 is a plan view of the conveying device;
43A is a plan view of the conveying device;
43B is a side view of the conveying device;
44 is a plan view of the conveying device;
45 is a plan view of the conveying device;
46A is a plan view of the conveying device;
46B is a side view of the transport device;
47A is a plan view of the conveying device;
47B is a side view of the conveying device;
48 is a plan view of the conveying device;
49 is a plan view of the conveying device;
50A is a plan view of the conveying device;
50B is a side view of the conveying device;
51 is a plan view of the conveying device;
52A is a plan view of the conveying device;
52B is a side view of the conveying device;
53 is a plan view of the conveying device;
54A is a plan view of the conveying device;
54B is a side view of the conveying device;
55A is a plan view of the conveying device;
55B is a plan view of the conveying device;
55C is a plan view of the conveying device;
56A is a plan view of the conveying device;
56B is a side view of the conveying device;
57A is a plan view of the conveying device;
57B is a plan view of the conveying device;
57C is a plan view of the conveying device;
58A is a plan view of the conveying device;
58B is a side view of the conveying device;
59A is a plan view of the conveying device;
59B is a plan view of the conveying device;
59C is a plan view of the conveying device;
60A is a plan view of the conveying device;
60B is a side view of the conveying device;
61A is a plan view of the conveying device;
61B is a plan view of the conveying device;
61C is a plan view of the conveying device;
62 is a plan view of the conveying device;
63 is a diagram illustrating exemplary pulleys;
64 is a plan view of the conveying device;
65 is a copy view of the transport device;
66A is a plan view of an exemplary substrate transfer robot;
66B is a side view of an exemplary substrate transfer robot;
67A-67C are top views of an exemplary substrate transfer robot;
68A-68B are top views of an exemplary substrate transfer robot;
69A is a top view of an exemplary substrate transfer robot;
69B is a side view of an exemplary substrate transfer robot;
70A is a schematic plan view of an exemplary substrate transfer robot;
70B is a cross-sectional schematic of an exemplary substrate transfer robot;
71A is a schematic plan view of an exemplary substrate transfer robot;
71B is a cross-sectional schematic of an exemplary substrate transfer robot;
72A-72C are top views of an exemplary substrate transfer robot;
73A-73C are top views of an exemplary substrate transfer robot;
74A is a plan view of an exemplary substrate transfer robot;
74B is a side view of an example substrate transfer robot;
75A is a schematic plan view of an exemplary substrate transfer robot;
75B is a cross-sectional schematic of an exemplary substrate transfer robot;
76A is a schematic top view of an exemplary substrate transfer robot;
76B is a cross-sectional schematic of an exemplary substrate transfer robot;
77A-77C are top views of an exemplary substrate transfer robot;
78A-78C are top views of an exemplary substrate transfer robot;
79A is a top view of an exemplary substrate transfer robot;
79B is a side view of an exemplary substrate transfer robot;
80A is a schematic plan view of an exemplary substrate transfer robot;
80B is a cross-sectional schematic of an exemplary substrate transfer robot;
81A-81C are top views of an exemplary substrate transfer robot;
82A-62C are top views of an exemplary substrate transfer robot;
83A is a top view of an exemplary substrate transfer robot;
83B is a side view of an exemplary substrate transfer robot;
84A is a top view of an exemplary substrate transfer robot;
84B is a side view of an exemplary substrate transfer robot;
85A-85C are top views of an exemplary substrate transfer robot;
86A-86C are top views of an exemplary substrate transfer robot;
87A is a schematic plan view of an exemplary substrate transfer robot;
87B is a cross-sectional schematic of an exemplary substrate transfer robot;
88A is a schematic plan view of an exemplary substrate transfer robot;
88B is a cross-sectional schematic of an exemplary substrate transfer robot;
89A is a schematic plan view of an exemplary substrate transfer robot;
89B is a cross-sectional schematic of an exemplary substrate transfer robot;
90A is a plan view of an exemplary substrate transport apparatus;
90B is a side view of an exemplary substrate transport apparatus;
91A is a plan view of an exemplary substrate transport apparatus; and
91B is a side view of an exemplary substrate transport apparatus.

In addition to the embodiments disclosed below, there may be other embodiments in the disclosed embodiments, and may be practiced or performed in various ways. It is therefore to be understood that the disclosed embodiments are not limited in their application to the details of arrangement and construction of components set forth in the description below or shown in the drawings. Even if only one embodiment is described herein, the claims in this specification are not limited to the embodiment. Moreover, the claims in this specification are not to be read as limiting unless there is clear and conclusive evidence stating a particular exclusion, limitation, or disclaimer.

Referring now to FIGS. 1A and 1B , a top view and a side view respectively of a robot 10 with drive unit 12 and arm 14 are shown. Arm 14 is shown in a retracted position. The arm 14 has an upper arm or first link 16 rotatable about the central axis of rotation 18 of the driving device 12 . The arm 14 further includes a forearm or second link 20 rotatable about a rotational elbow axis 22 . Arm 14 further includes an end effector or third link 24 rotatable about a rotational wrist axis 26 . End effector 24 supports substrate 28 . As will be explained, the substrate 28 follows a conformable radial path 30 (as shown in FIG. 1A), or along a path, such as paths 34 and 36, or of the drive unit 12. The arm 14 is configured to cooperate with the drive device 12 so as to be carried parallel to a linear path 32 coinciding with the central axis of rotation 18 . In the illustrated embodiment, the joint-to-joint length of the forearm or second link 20 is greater than the joint-to-joint length of the upper arm or first link 16 . In the illustrated embodiment, the lateral offset 38 of the end-effector or third link 24 is the joint-to-joint length of the forearm 20 and the joint-to-joint length of the upper arm 14. corresponds to the difference in As will be described in more detail below, the lateral offset 38 is provided by the arm ( 14) remains substantially constant during elongation and retraction. This is possible without the use of an additional controlled axis that controls the rotation of the wrist 26 of the end effector 24 relative to the forearm 20, as will be described in the internal structure of the arm 14. is achieved as In one aspect of the embodiment disclosed with respect to FIG. 1A , the center of mass of the third link or end effector 24 may be at the wrist centerline or axis of rotation 26 . Alternatively, the center of mass of the third link or end effector 24 may be located along path 40 offset 38 from the central axis of rotation 18 . Disturbances due to moments to be applied as a result of offset masses during extension and retraction of the arm, otherwise disturbances to the bands that constrain end effector 24 relative to links 16, 18 can be minimized in this way. Here, the center of mass can be determined to be with or without the substrate, or it can be in between. Alternatively, the center of mass of the third link or end effector 24 may be at any suitable location. In the illustrated embodiment, the substrate transport device 10 transports the substrate 28 with a movable arm assembly 14 coupled to a drive unit 12 on a central axis 18 of rotation. A substrate support 24 is coupled to the arm assembly 14 on a rotational wrist axis 26, wherein the arm assembly 14 rotates during extension and retraction as shown with respect to FIGS. 3A-C. It rotates about the central axis 18. During extension and retraction, the wrist axis of rotation 26 follows a radial path, for example a wrist path 40 parallel to or offset 38 from paths 30, 34 or 36, the central axis of rotation ( 18) moves against. Similarly, substrate support 24 moves parallel to radial path 30 without rotation during extension and retraction. As will be described in more detail in other aspects of the disclosed embodiment, the principles and structures for constraining the end effector to move in a substantially purely radial motion are such that the length of the forearm is equal to the length of the upper arm. It can be applied if it is shorter than the length. Moreover, such features may be applied where more than one substrate is handled by the end effector. Moreover, such features may be applied where the second arm is used in conjunction with the drive device for handling one or more additional substrates. Accordingly, all such variants can be accommodated.

Referring also to FIGS. 2A and 2B , partial schematic plan and schematic side views of system 10 are shown, respectively, showing the internal configuration used to drive the individual links of arm 14 shown in FIGS. 1A and 1B . has been The driving unit 12 is provided with a first motor 52 and a second motor 54 having corresponding first encoders 56 and second encoders 58, the first encoders 56 and the second Two encoders 58 are coupled to the housing 60 and drive the first shaft 62 and the second shaft 64, respectively. Here, the shaft 62 may be coupled to a pulley 66, and the shaft 64 may be coupled to the upper arm 64, so that the shafts 62 and 64 are concentric, or placed differently. In alternate aspects, any suitable drive arrangement may be provided. The housing 60 may be in communication with a chamber 68, where the bellows 70, the chamber 68 and the interior portion of the housing 60 separate the vacuum environment 72 from the atmospheric environment ( 74). Housing 60 can slide in the z direction as a carriage on slides 76, where a lead screw or other suitable vertical or linear Z drive 78 ) may be provided to selectively move the housing 60 and arm 14 coupled thereto in the z(80) direction. In the illustrated embodiment, the upper arm 16 is driven by a motor 54 about a central axis of rotation 18 . Similarly the forearm is driven by the motor 52 through a band drive with pulleys 66, 82 and bands 84, 86, for example conventional circular pulleys and bands. . Any suitable structure may be provided to drive the forearm 20 relative to the upper arm 16 in alternative aspects. The ratio between pulleys 66 and 82 may be 1:1, 2:1 or any suitable ratio. The third link 24 with the end-effector may be constrained by a band drive, which includes a pulley 88 grounded with respect to the link 16, an end A pulley 90 based on the effector or third link 24, and a pulley 88 as bands 92, 94 and bands 92, 94 constraining the pulley 90 are provided. As will be explained, the ratio between pulleys 88 and 90 may not be constant such that third link 24 follows a radial path without rotation of arm 14 during extension and retraction. This is in case pulleys 88 and 90 may be one or more non-circular pulleys, such as two non-circular pulleys, for example, or in case one of pulleys 88 and 90 may be circular and the other non-circular. can be achieved Alternatively, any suitable coupling or linkage may be provided to constrain the path of the third link or end effector 24 as described. In the illustrated embodiment, at least one non-circular pulley is provided on the upper arm (to direct the end-effector 24 in the radial direction 30 regardless of the position of the two first links 16, 20). 16) and compensates for the effect of the different lengths of the forearm 20. The embodiment will be described with respect to a pulley 90 that is non-circular and a pulley 88 that is circular. Alternatively, pulley 88 may be non-circular and pulley 90 circular. Alternatively, pulleys 88 and 92 may be non-circular or provided with any suitable coupling to constrain the links of arm 14 as described. By way of example, noncircular pulleys or sprockets are described in U.S. Patent No. 4,865,577 issued Sep. 12, 1989 entitled "Noncircular Drive", incorporated herein by reference in its entirety. explained Alternatively, any suitable coupling may be provided to restrain the links of arm 14 as described, for example any suitable variable ratio drive or coupling, interlocking gears ( linkage gears) or sprockets, cams, or others used alone or with suitable linkages or other couplings may be provided. In the illustrated embodiment an elbow pulley 88 is coupled to the upper arm 16 and is shown to be round or circular, wherein the wrist or wrist coupled to the third link 24 Pulley 90 is shown as non-circular. The shape of the wrist pulley may be non-circular and symmetric about a line 96 orthogonal to the radial trajectory 30, for example, as shown in FIG. 3B, the forearm 20 and the upper When the arms 16 are aligned with each other so that the wrist axis 26 is closest to the shoulder axis 18, its radial trajectory 30 also coincides with or parallels the line between the two pulleys 88 and 90. can do. The shape of the pulley 90 causes the arm 14 to extend and contract so that points of tangency 98, 100 established on opposite surfaces of the pulley 90 are shifted away from the rotational wrist axis 26. The bands 92 and 94 are held tight when having radial distances 102 and 104 . In the orientation shown, for example, in FIG. 3B , each of the points of contact 98, 100 of the two bands on the pulley are at the same radial distance 102, 104 from the wrist axis of rotation 26. This will be further explained with respect to FIG. 4 where the individual proportions are shown. In order for arm 14 to rotate, both drive shafts 62 and 64 of the robot need to move the same amount in the direction of rotation of the arm. In order for the end-effector 24 to extend and contract radially along a straight path, the two drive shafts 62, 64 may, for example, use the exemplary inverse kinematics presented later in this section. It needs to move in a coordinated manner according to inverse kinematic equations. The substrate transport device 10 is here adapted to transport a substrate 28 . The forearm 20 is rotatably coupled to the upper arm 16 and is rotatable about an elbow axis 22 offset from the central axis 18 by an upper arm link length. The end effector 24 is rotatably coupled to the forearm 20 and is rotatable about a wrist axis 26 offset from the elbow axis 22 by a forearm link length. A wrist pulley 90 is fixed to the end effector 24 and coupled to the elbow pulley 88 by bands 92 and 94. Here, the forearm link length is different from the upper arm link length, and the end effector is restrained with respect to the upper arm by the elbow pulley, the wrist pulley, and the band, so that the substrate moves along the central axis 18 It moves along a linear radial path 30 for Here, the substrate support 24 is coupled to the upper arm 16 with the substrate support coupling part 92 and is between the forearm 20 and the upper arm 16 centered on the rotational elbow axis 22. It is driven about the rotating wrist axis 26 by the relative motion of. Figures 3a, 3b and 3c show the extension motion of the robot of Figures 1 and 2 (extension motion). Figure 3a shows a top view of the robot 10 with the arm 14 in a retracted position. In FIG. 3B , a partially extending arm 14 is depicted with the forearm 20 aligned on the top of the upper arm 16, which is the lateral offset of the end-effector ( 38) corresponds to the difference between the joint-to-joint length of the forearm 20 and the joint-to-joint length of the upper arm 16. Figure 3c shows the arm 14 in an extended position, but not fully extended.

Exemplary direct kinematics may be provided. In alternative aspects, any suitable direct kinematic properties pertaining to the alternative structure may be provided. The following example equations can be used to determine the position of the end-effector as a function of the position of the motors:

x ₂ = l ₁ cos θ ₁ + l ₂ cos θ ₂ (1.1)

y ₂ = l ₁ sin θ ₁ + l ₂ sin θ ₂ (1.2)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (1.3)

T ₂ = atan2(y ₂ ,x ₂ ) (1.4)

α ₃ = asin(d ₃ /R ₂ ), where d ₃ = l ₂ -l ₁ (1.5)

α ₁₂ = θ ₁ - θ ₂ (1.6)

If α ₁₂ <π: R = sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = T ₂ +α ₃ , otherwise R = -sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = T ₂ -α ₃ +π (1.7)

Exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematic properties pertaining to the alternative structure may be provided. The following example equations can be utilized to determine the position of the motors that achieve the specified position of the end-effector:

x ₃ = R cos T (1.8)

y ₃ = R sin T (1.9)

x ₂ = x ₃ -l ₃ cos T+d ₃ sin T (1.10)

y ₂ = y ₃ -l ₃ sin Td ₃ course T (1.11)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (1.12)

T ₂ = atan2(y ₂ ,x ₂ ) (1.13)

α ₁ = acos((R ₂ ² +l ₁ ² -l ₂ ² )/(2 R ₂ l ₁ )) (1.14)

α ₂ = acos((R ₂ ² -l ₁ ² +l ₂ ² )/(2 R ₂ l ₂ )) (1.15)

If R>l ₃ , θ ₁ = T ₂ + α ₁ , θ ₂ = T ₂ - α ₂ , otherwise: θ ₁ = T ₂ - α ₁ , θ ₂ = T ₂ + α ₂ (1.16)

The following nomenclature can be used in the above kinematic equations:

d ₃ = lateral offset of the end-effector (m)

l ₁ = joint-to-joint length of the first link (m)

l ₂ = joint-to-joint length of the second link (m)

l ₃ = length of the third link with end-effector, measured from the wrist joint to the reference point on the end-effector (m)

R = radial position of the end-effector (m)

R ₂ = radial coordinates of the wrist joint (m)

T = angular position of the end-effector (rad)

T ₂ = angular coordinates of the wrist joint (rad)

x ₂ = x-coordinate of the wrist joint (m)

x3 = x-coordinate of the end-effector (m)

y ₂ = y-coordinate of the wrist joint (m)

y ₃ = y-coordinate of the end-effector (m)

θ ₁ = angular position of the drive shaft coupled to the first link (rad)

θ ₂ = angular position of the drive shaft coupled to the second link (rad).

The above exemplary kinematic equations are such that the end-effector 24 faces the third link in the radial direction 30 regardless of the position of the two first links 16, 20 of the arm 14. (24) can be used to design a suitable driving device that constrains the orientation, for example a band driving device. Referring to FIG. 4, a graph (plot 120) of a transmission ratio (r ₃₁ ) 122 of the band driving device is shown, and the band driving device is, from the center of the robot, to the end-effector. Constrain the orientation of the third link as a function of the normalized extension of the arm measured to the root of , ie (Rl ₃ )/l ₁ . The transmission ratio (r ₃₁ ) is defined as the ratio of the angular velocity (ω ₃₂ ) of the pulley attached to the third link to the angular velocity (ω ₁₂ ) of the pulley attached to the first link, both of which are angular velocities. is defined relative to the second link. The figure graphically depicts the transfer ratio (r ₃₁ ) for different l ₂ /l ₁ (from 0.5 to 1.0 with an increment of 0.1 and from 1.0 to 2.0 with an increment of 0.2). A profile of the non-circular pulley(s) to achieve the transmission ratio r ₃₁ according to FIG. 4 can be calculated, for example the profile drawn in FIGS. 2a , 54a and 54b .

In the disclosed embodiment, the use of one or more non-circular pulley(s) or other suitable device to constrain the motion of the end effector, even with the same containment volume, equal-link arm (equal-link arm). A longer reach can be obtained compared to In alternative aspects the first link may be driven directly by a motor or through any kind of coupling or transmission arrangement. Any suitable delivery ratio may be used here. Alternatively, the band drive that actuates the second link can be any other configuration with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism. ) or any combination of the foregoing. Similarly, the band drive restraining the third link may be replaced by any other suitable configuration, such as a belt drive, cable drive, non-circular gears, linkage-based mechanism, or any combination of the foregoing. can However, here the end-effector need not be radially oriented. For example, the end effector may be positioned with any suitable offset relative to the third link and oriented in any suitable direction. Moreover, in alternative aspects the third link may carry more than one end-effector or substrate. Any suitable number of end-effectors and/or material holders may be carried by the third link. Moreover, in alternative aspects, the joint-to-joint length of the forearm may be less than the joint-to-joint length of the upper arm, eg l ₂ /l ₁ < 1 in FIG. 4 . As shown, as shown and described with respect to FIGS. 25 to 34 and 43 to 53 .

Referring now to 5a and 5b, top and side views, respectively, of robot 150 including some features of robot 10 are shown. The robot 150 is shown with a drive unit 12 with an arm 152 shown in a retracted position. Arm 152 has features similar to those of arm 14 except as described herein. As an example, the joint-to-joint length of the forearm or second link 158 is greater than the joint-to-joint length of the upper arm or first link 154 . Similarly, the lateral offset 168 of the end-effector or third link 162 is the difference between the joint-to-joint length of the forearm 158 and the joint-to-joint length of the upper arm 154. applies to Referring also to Figs. 6a and 6b, there is shown a drive arrangement 150 with internal arrangements used to drive the individual links of the arm. In the illustrated embodiment, upper arm 154 is driven by a single motor through shaft 64 as described for arm 14 of FIGS. 1 and 2 . Similarly, the end effector or third link 162 is constrained to the upper arm 154 by a non-circular pulley configuration, as described for the arm 14 of FIGS. 1 and 2 . An exemplary difference between arm 152 and arm 14 is shown, where forearm 158 is connected to shaft 62 and drive unit via a band arrangement with at least one non-circular pulley. (12) is coupled to another motor. Here, the combination or band configuration may have features as described herein or as described for the pulley drive devices 88 and 90 of FIGS. 1 and 2 . The combination or band configuration has a non-circular pulley 202 coupled to a shaft 62 of a drive unit 12 and is rotatable about an axis 18 having a shaft 62 . The band configuration of the arm 152 further includes a circular pulley 204 coupled to the upper arm link 158 and rotatable about an elbow axis 156 . Circular pulley 204 is coupled to non-circular pulley 202 via bands 206 and 208, where bands 206 and 208 will be held taut by virtue of the profile of non-circular pulley 202. can In alternative aspects any combination of pulleys or other suitable transmission may be provided. By cooperating pulleys 202 and 204 and bands 206 and 208, rotation of upper arm 154 relative to pulley 202 (e.g., rotation of pulley 202 while upper arm 154 rotates) remains stationary) causes the wrist joint 160 to expand and contract along a straight line parallel to and offset 168 from the desired radial path 180 of the end-effector. Here, the third link 162 with the end-effector is constrained, for example by a band drive as described for the arm 14 with at least one non-circular pulley, so that the end-effector is directed in the radial direction 18 regardless of the positions of the two first links 154, 158. Any suitable coupling may be provided to restrain the links of arm 14 as described herein, for example any suitable variable ratio drive or coupling, interlocking gears or sprockets, cams, or others used alone or in combination with suitable linkages or other couplings may be provided. In the illustrated embodiment, the elbow pulley 204 is coupled to the forearm 158 and is shown as being round or circular, where the shoulder pulley 202 coupled to the shaft 62 is shown as non-circular. The shaft pulley shape can be non-circular and symmetric about a line 218 orthogonal to the radial trajectory 180, for example, as shown in FIG. 7B, the forearm 158 and the upper When the arms 154 are aligned with each other so that the wrist axis 160 is closest to the shoulder axis 18, its radial trajectory 180 also coincides with or parallels the line between the two pulleys 202 and 204. can do. Due to the shape of the pulley 202, the arm 152 extends and contracts so that the contact points 210, 212 established on opposite surfaces of the pulley 202 change radial distances from the shoulder axis of rotation 18 ( 214, 216) the bands 206, 208 are kept tight. In the orientation shown, for example in FIG. 7B , each of the points of contact 210 , 212 of the two bands on the pulley are at the same radial distance 210 , 212 from the shoulder axis of rotation 18 . This will be further explained with respect to FIG. 8 where the individual proportions are shown. In order for arm 152 to rotate, both drive shafts 62 and 64 of the robot need to move the same amount in the direction of rotation of the arm. In order for the end-effector 162 to extend and contract radially along a straight path, the two drive shafts 62 and 64 may, for example, be dependent on the exemplary inverse kinematic equations presented later in this section. For example, the drive shaft coupled to the upper arm needs to move according to the inverse kinematic equations presented below while the other motor remains stationary. 7a, 7b and 7c show the extension operation of the robot 150 of FIGS. 5 and 6 . 7A shows a top view of the robot with the arm 152 in a retracted position. In FIG. 7B , a partially extending arm is depicted with the forearm aligned on the upper end of the upper arm, indicating that the lateral offset 168 of the end-effector 162 is equal to the forearm 158. It is illustrated that it corresponds to the difference between the joint-to-joint length of and the joint-to-joint length of the upper arm 154. 7C shows the arm in an extended position, but not fully extended.

Exemplary direct kinematic properties may be provided. In alternative aspects, any suitable direct kinematic properties pertaining to the alternative structure may be provided. The following example equations can be used to determine the position of the end-effector as a function of the position of the motors:

d ₁ = l ₁ sin(θ ₁ - θ ₂ ) (2.1)

If (θ ₁ - θ ₂ )<π/2: θ _2l = θ ₂ - l ₂ asin((d ₁ + d ₃ )/l ₂ ), otherwise θ _2l = θ ₂ + l ₂ asin((d ₁ + d ₃ )/l ₂ )+ π (2.2)

x ₂ = l ₁ cos θ ₁ + l ₂ cos θ _2l (2.3)

y ₂ = l ₁ sin θ ₁ +l ₂ sin θ _2l (2.4)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (2.5)

T ₂ = atan2(y ₂ ,x ₂ ) (2.6)

If (θ ₁ - θ ₂ )<π/2: R = sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = θ ₂ , otherwise R = -sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = θ ₂ (2.7)

Exemplary inverse kinematic properties may be provided. In alternative aspects, any suitable inverse kinematic properties pertaining to the alternative structure may be provided. The following exemplary equations may be utilized to determine the position of the motors that achieves the intrinsic position of the end-effector:

x ₃ = R cos T (2.8)

y ₃ = R sin T (2.9)

x ₂ = x ₃ -l ₃ cos T+d ₃ sin T (2.10)

y ₂ = y ₃ -l ₃ sin Td ₃ course T (2.11)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (2.12)

T ₂ = atan2(y ₂ ,x ₂ ) (2.13)

α ₁ = acos((R ₂ ² +l ₁ ² -l ₂ ² )/(2 R ₂ l ₁ )) (2.14)

If R>l ₃ : θ ₁ = T ₂ + α ₁ , θ ₂ = T, otherwise: θ ₁ = T ₂ - θ ₁ , θ ₂ = T (2.15)

In the above kinematic equations the following notation can be used:

d ₃ = lateral offset of the end-effector (m)

l ₁ = joint-to-joint length of the first link (m)

l ₂ = joint-to-joint length of the second link (m)

l ₃ = length of the third link with end-effector, measured from the wrist joint to the reference point on the end-effector (m)

R = radial position of the end-effector (m)

R ₂ = radial coordinates of the wrist joint (m)

T = angular position of the end-effector (rad)

T ₂ = angular coordinates of the wrist joint (rad)

x ₂ = x-coordinate of the wrist joint (m)

x ₃ = x-coordinate of the end-effector (m)

y ₂ = y-coordinate of the wrist joint (m)

y ₃ = y-coordinate of the end-effector (m)

θ ₁ = angular position of the drive shaft coupled to the first link (rad)

θ ₂ = angular position of the drive shaft coupled to the second link (rad).

The above exemplary kinematic equations show that rotation of the upper arm 154 causes the wrist joint 160 to stretch and contract along a straight line parallel to the desired radial path 180 of the end-effector 162. To cause this, it can be used to design a band driving device that controls the second link 158.

Referring now to FIG. 8 , a graph 270 showing a transmission ratio (r ₂₀ ) 272 of the band drive device is shown, wherein the band drive device moves from the center of the robot to the end- Drive the second link as a function of the normalized extension of the arm measured to the base of the effector, ie (Rl ₃ )/l ₁ . The transmission ratio (r ₂₀ ) is defined as the ratio of the angular velocity (ω ₂₁ ) of the pulley attached to the second link to the angular velocity (ω ₀₁ ) of the pulley attached to the second motor, both of which are It is defined relative to the first link. The transfer ratio (r ₂₀ ) for different l ₂ /l ₁ is graphically shown in the figure.

The profile of the non-circular pulley(s) for the band drive driving the second link is calculated to achieve the transmission ratio (r ₂₀ ) 272 according to FIG. 8 . An example pulley profile is drawn in FIG. 6A and will be described with respect to FIGS. 55A and 55B.

The transmission ratio (r ₃₁ ) of the band driving device that constrains the orientation of the third link 168 may be as shown in FIG. 4 for the embodiment of FIGS. 1 and 2 . The transmission ratio (r ₃₁ ) is defined as the ratio of the angular velocity (ω ₃₂ ) of the pulley attached to the third link to the angular velocity (ω ₁₂ ) of the pulley attached to the first link. All are defined relative to the second link. The figure graphically depicts the transfer ratio (r ₃₁ ) for different l ₂ /l ₁ (from 0.5 to 1.0 with an increment of 0.1 and from 1.0 to 2.0 with an increment of 0.2). The profile of the non-circular pulley(s) for the band drive constraining the third link 162 can be calculated to achieve the transmission ratio r ₃₁ according to FIG. 4 . An example pulley profile is plotted in FIG. 6A.

In the illustrated embodiment, with the use of non-circular pulleys or other suitable mechanism to constrain the end effector as described, to an equal-link arm with the same containment volume. In comparison, a longer reach can be obtained. Compared to the embodiment disclosed in FIGS. 1 and 2 , one or more band drives with non-circular pulleys may replace the conventional drives on the shoulder axis 18 . In alternative aspects the first link may be driven directly by a motor or through any kind of coupling or transmission arrangement, eg any suitable transmission ratio may be used. . Alternatively, the band drives actuating the second link and restraining the third link can be any other configuration with equivalent functionality, such as belt drives, cable drives, non-circular gears, linkage-based mechanisms or Any combination of the above may be substituted. In addition, the third link may radially move the end-effector through a conventional two stage band arrangement that synchronizes the third link to a pulley driven by the second motor. It can be constrained to hold, as shown in FIG. 9 . Alternatively, the two-step band configuration may be replaced by any other suitable configuration, such as, for example, a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the foregoing. In addition, however, the end-effector may not have to be radially oriented. For example, the end effector may be positioned with any suitable offset relative to the third link and oriented in any suitable direction. In alternative aspects the third link may carry more than one end-effector or substrate. Any suitable number of end-effectors and/or material holders herein may be carried by the third link. Moreover, the joint-to-joint length of the forearm may be smaller than the joint-to-joint length of the upper arm, for example, as expressed as l ₂ /l ₁ < 1 in FIG. 8 .

Referring now to FIG. 9 , an alternative robot 300 is shown wherein the third link is via a conventional two-stage band configuration synchronizing the third link to a pulley driven by a second motor. It can be constrained to hold the end-effector radially. The robot 300 is shown with a drive unit 12 and an arm 302 . Arm 302 may have an upper arm or first link 304 coupled to shaft 64 and rotatable about a central or shoulder axis 18 . Arm 302 is provided with a forearm or second link 308 that is rotatably coupled to upper arm 304 at an elbow shaft 306 . Links 304 and 308 may have different lengths as described above. A third link or end effector 312 is rotatably coupled to the second link or forearm 308 at a wrist axis 310, wherein the end effector 312 has different link lengths as previously described. Links 304 and 308 having . . . allow rotational transport of the substrate 28 along a radial path. In the illustrated embodiment, shaft 62 is coupled to two pulleys 314 and 316, where pulley 314 may be circular and pulley 316 may be non-circular. Here, the circular pulley 314 is coupled to the end-effector 312 through a conventional two-stage (318, 320) circular band configuration that synchronizes the third link 312 to the pulley driven by the shaft 314. ) is constrained to the third link 312 to keep it in the radial direction. The two-stage configuration (318, 320) has a pulley (314) coupled to an elbow pulley (324) by bands (322), the elbow pulley (324) being connected to an elbow pulley (326), Elbow pulley 326 is coupled to wrist pulley 328 via bands 330 . The forearm 308 can further include an elbow pulley 332 that is circular and can be coupled to the shoulder pulley 316 via bands 334, wherein the shoulder pulley is non-circular and is coupled to the pulley 314. and shaft 62.

The disclosed embodiment may be further embodied for robots having robot drives with additional axes, wherein the arms coupled to the robot drives are independently capable of holding one or more substrates. May have additional end effectors operable. By way of example, arms with two independently actuable arm linkages or “dual arm” configurations may be provided, where each independently actuable arm has one, two, or It may have an end effector adapted to support any suitable number of substrates. As will be discussed herein and below, each independently operable arm may have a first link and a second link having different link lengths, wherein the end effector and support coupled to the links. The substrate to be actuated and tracked as described above. Here, the substrate transport device is capable of transporting a first substrate and a second substrate, and includes a first independently movable arm assembly and a second independently movable arm assembly coupled to a driving unit on a common rotation axis. A first substrate support and a second substrate support are coupled to the first arm assembly and the second arm assembly on a first rotational wrist axis and a second rotational wrist axis, respectively. During extension and retraction, one or both of the first arm assembly and the second arm assembly rotate about a common axis of rotation. During extension and retraction, the first and second wrist axes of rotation move along first and second wrist paths that are offset from and parallel to the radial path with respect to the common axis of rotation. During extension and retraction, the first and second substrate supports move parallel to the radial path without rotation. Variations of the disclosed embodiment with multiple independently actuable arms are provided below, however, any suitable combination of features may be provided in alternative aspects.

Referring now to FIGS. 10A and 10B , top and side views, respectively, of a robot 350 with a dual arm configuration are shown. The robot 350 is equipped with an arm 352 having a common upper arm 354, and independently operable forearms 356 and 358, each of which is individually End effectors 360 and 362 are provided. In the illustrated embodiment both linkages are shown in a retracted position. The lateral offset 366 of the end-effectors corresponds to the difference between the joint-to-joint length of the forearm 354 and the joint-to-joint length of the upper arms 356 and 358 . In the illustrated embodiment the upper arms may have the same length and are longer than the forearm. In addition, end effectors 360 and 362 are positioned above forearms 356 and 358. Referring now to FIGS. 11A and 11B , top and side views, respectively, of a robot 375 with arms in alternative configurations are shown. Arm 377 in the illustrated embodiment may have features as described with respect to FIGS. 10A and 10B with both linkages shown in retracted positions. In this configuration, the end-effector 382 of the upper linkage and the third link are suspended from the lower surface of the forearm 380, so that the vertical spacing between the two end-effectors 382 and 384 is reduced. . Here, a similar effect can be achieved by stepping down 368 the top end-effector 360 of the configuration of FIGS. 10A and 10B. Also, referring to FIGS. 12 and 13 , internal configurations of robots 350 and 375 used to drive respective links of the arms of FIGS. 10 and 11 are respectively shown. In the illustrated embodiment, the drive device 390 may include a first drive motor 392, a second drive motor 394, and a third drive motor 396, the first drive motor and the second drive. The motor, the third drive motor, can be rotor stator arrangements that drive concentric shafts 398, 400, 402, respectively, and position encoders 404, 406, 408, respectively. provide The Z drive device 410 can drive the motors in a vertical direction, wherein the motors can be partially or completely contained within the housing 412, and the bellows 414 can drive the internal volume of the housing 412. sealed to the chamber 416, the internal volume and interior of the chamber 416 may operate within an isolated environment, such as a vacuum or otherwise isolated environment. In the illustrated embodiment, the common upper arm 354 is driven by a single motor 396 . Each of the two forearms 356, 358 pivots on a common axis 420 at the elbow of the upper arm 354, band drives 422, 424 which may have conventional pulleys It is independently driven by each of the motors 394 and 396 through each. The third links with the end-effectors 360 and 362 are constrained by band drives 426 and 428 respectively equipped with at least one non-circular pulley, which are the upper arms and the forearm Compensates for the effect of different lengths of the arms. Here, the band drives of each of the linkages can be designed using the methodology described with respect to Figs. 1 and 2, wherein the kinematic equations presented with respect to Figs. can be used for each. In order for the arm to rotate, all three drive shafts 398, 400, 402 of the robot need to move the same amount in the rotational direction of the arm. For radial extension and contraction of one of the end-effectors along a straight path, a drive shaft coupled to a forearm coupled to an active end-effector, and a drive shaft of the common upper arm are provided in FIGS. It needs to move in a coordinated way according to the inverse kinematic equations for 2. At the same time, the drive shaft coupled to the other forearm needs to rotate in synch with the drive shaft of the common upper arm so that the inactive end-effector remains retracted. Referring also to FIGS. 14A, 14B and 14C, the arms of FIGS. 11A and 11B are shown as the upper and lower linkages are extended. Here, the inactive linkage 356, 360 rotates while the active linkage 358, 362 extends. By way of example, as the lower linkage 356, 360 extends, the upper linkage 358, 362 rotates, and as the upper linkage 358, 362 extends, the lower linkage 356, 360 rotates. rotates In the disclosed embodiment of FIGS. 10 and 11 , set up and control can be simplified, where the arm configuration can be used on a concentric shaft drive without dynamic seals, while the same Longer reach is provided compared to equal-link length arms with containment volume. Here, no bridge is used to support any of the end-effectors. In the illustrated embodiment, the inactive arm rotates while the active arm is extended. One of the wrist joints travels over the lower end-effector (closer to the wafer than in an equal-link arrangement).

Referring now to FIGS. 15A and 15B , top and side views, respectively, of a robot 450 with a dual arm configuration are shown. The robot 450 is equipped with an arm 452 with a common upper arm 454, and independently operable forearms 456, 458, the independently operable forearms 456, 458 ) each having end effectors 460 and 462. In the illustrated embodiment, both linkages are shown in a retracted position. The lateral offset 466 of the end-effectors corresponds to the difference between the joint-to-joint length of the forearm 454 and the joint-to-joint length of the upper arms 456 and 458 . In the illustrated embodiment, the upper arms may have the same length and be longer than the forearm. Additionally, end effectors 460 and 462 are positioned above forearms 456 and 458 . Referring also to FIGS. 16A and 16B , top and side views of a robot 475 with arms in alternative configurations are shown. Again, both linkages are shown in a retracted position. In this configuration, the end-effector 482 and the third link of the left linkage are suspended from the lower surface of the forearm 480 to reduce the vertical separation between the two end-effectors 482 and 484. A similar effect can be achieved by incrementing 468 the top end-effector of the configuration of FIGS. 15A and 15B. Alternatively, a bridge may be used to support one of the end-effectors. The combined upper arm link 454 can be a single piece as depicted in FIGS. 15 and 16 , or the combined upper arm link 454 can be a 2 piece as shown in the examples of FIGS. 17A and 17B . It may be formed by one or more sections 470 and 472 . Here, the two-part design may be provided as a lighter material using less material, so left part 472 and right part 470 may be the same components. Here, the two piece design may provide for an adjustment of the angular offset between the left side and the right side, which allows different retracted positions to be supported. It can be convenient at times. Referring also to FIGS. 18 and 19 , the internal components used to drive the individual links of the arms of FIGS. 15 and 16 , respectively, are shown. The coupled upper arm 554 is shown driven by a single motor as shaft 402 . Each of the two forearms 456 and 458 is individually driven by a single motor and individually by means of shafts 400 and 398 and by means of band driving devices 490 and 492 having conventional pulleys. driven by Here, links 456 and 458 rotate on separate axes 494 and 496, respectively. The third links with the end-effectors 460 and 462 are respectively constrained by band drives 498 and 500 each having at least one non-circular pulley, which is the upper and forearm arms. compensates for the effect of different lengths of Here, the band drives 498 and 500 of each of the linkages 456 and 460 and 458 and 462 are designed using the methodology described with respect to FIGS. 1 and 2 . Here, the kinematic equations presented for FIGS. 1 and 2 can also be used for the two linkages 456, 460 and 458, 462 of the double arm, respectively. In order for the arm 452 to rotate, all three drive shafts 398, 400, 402 of the robot need to move the same amount in the rotational direction of the arm. The drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the active end-effector are shown with respect to FIGS. It needs to move in a way that is coordinated according to the inverse kinematic equations. At the same time, the drive shaft coupled to the other forearm needs to rotate to match the drive shaft of the common upper arm so that the inactive end-effector remains retracted. Referring also to FIGS. 20A, 20B and 20C, the arms of FIGS. 16A and 16B are shown as the left linkages 458 and 462 and the right linkages 456 and 460 are extended. It is noted that the inactive linkages 456 and 460 rotate while the active linkages 458 and 462 are extended. Here, as the left linkage parts 458 and 462 extend, the right linkage parts 456 and 460 rotate, and as the right linkage parts 456 and 460 extend, the left linkage parts 458 and 462 rotate. ) rotates. The illustrated embodiment is an equal-link length arm that has the same containment volume while bringing the advantages of a solid link design that is easy to set up and control, and of a concentric shaft drive, for example without dynamic seals. Provides a longer reach compared to . Here, no bridge is used to support any of the end-effectors. Here, the inactive arm rotates while the active arm is extended. One of the wrist joints passes over the lower end-effector, closer to the wafer than in an equal-link configuration. This can be avoided by using a bridge (not shown) to support the top end-effector. In this case the unsupported length of the bridge may be longer compared to an equal-link arm design. In addition, its retract angle is less likely to change, compared to a configuration with a common elbow joint as shown in, for example, FIGS. 10 and 11 and independent double arms, as shown in, for example, FIGS. 21 and 22. can be more difficult

Referring now to FIGS. 21A and 21B , top and side views of a robot 520 with independent dual arms 522 and 524 , respectively, are shown. In the illustrated embodiment, both linkages 522 and 524 are shown in a retracted position. Arm 522 has an independently operable upper arm 526 , a forearm 528 , and a third link with end effector 530 . Arm 524 has an independently operable upper arm 532 , a forearm 534 , and a third link with an end effector 536 . In the illustrated embodiment, forearms 528 and 534 are shown as being longer than upper arms 526 and 532, where end effectors 530 and 536 are forearms 528 and 534, respectively. is located above Referring also to FIGS. 22A and 22B , top and side views of a robot 550 with arms in alternative configurations and having features similar to those of robot 520 with two linkages shown in a retracted position are shown. there is. In this configuration, the end-effector 552 of the left linkage part and the third link are suspended from the lower surface of the forearm 554 to reduce the vertical separation between the two end-effectors. A similar effect can be achieved by cascading the top end-effector of the configuration of FIG. 21 . Alternatively, a bridge may be used to support one of the end-effectors. 21 and 22 the right upper arm 532 is positioned below the left upper arm 526 . Alternatively, for example, the left upper arm may be disposed above the right upper arm, wherein one linkage may be nested within another linkage. Referring also to FIG. 23 , the internal components used to drive the individual links of the arm of FIGS. 21A and 21B are shown. Here, the elevations of the links have been adjusted to avoid overlap of components for graphical clarity. Each of the two upper arms 526, 532 is independently driven by a single motor, individually through respective shafts 398, 402. The forearms 528 and 534 are coupled to the third motor through the shaft 400 by band configurations 570 and 572 each equipped with at least one non-circular pulley. The third links 530 and 536 with the end-effectors are constrained by band drives 574 and 576 respectively equipped with at least one non-circular pulley. The band drive units allow rotation of one of the upper arms 526, 532 to cause the corresponding linkages 528, 530 and 534, 536 to extend and contract along a straight line, while the other linkages stop. designed to remain in place. The band drives in each of the linkages can be designed using the methodology described with respect to FIGS. 5 and 6 , where the kinematic equations presented with respect to FIGS. Each can also be used. In order for the arm to rotate, all three drive shafts 398, 400, 402 of the robot need to move the same amount in the rotational direction of the arm. In order for one of the end-effectors to extend and contract radially along a straight path, the drive shaft of the upper arm coupled to the active end-effector needs to be rotated according to the inverse kinematic equations for FIGS. 5 and 6 and , the other two drive shafts need to be kept stationary. Referring also to Figs. 24a, 24b and 24c, the arm of Fig. 22 is shown as the left linkage 522 and right linkage 524 are extended. It is noted that the inactive linkage 524 remains stationary while the active linkage 522 is extended. That is, while the right linkage part 524 is extended, the left linkage part 522 does not move, and while the left linkage part 522 is extended, the right linkage part 524 does not move. The illustrated embodiment provides a longer reach compared to an equal-link arm design with the same containment volume. Here, no bridge is used to support any of the end-effectors, and the active linkage is stretched as the active linkage can stretch or contract faster with no load, thereby extending the potential. The inactive linkage remains stationary while leading to higher throughput. The illustrated embodiment may be more complex than shown in FIGS. 15 and 16 with two more band drives with non-circular pulleys instead of conventional pulleys. One of the wrist joints passes under the lower end-effector as shown in FIG. 24 . This can be avoided by using a bridge (not shown) to support the top end-effector. In this case the unsupported length of the bridge is longer compared to an equal-link arm design.

Referring now to FIGS. 25A and 25B , top and side views, respectively, of a robot 600 with an arm 602 are shown. In the illustrated embodiment, both linkages are shown in a retracted position. The lateral offset 604 of the end-effectors corresponds to the difference between the joint-to-joint length of the upper arm 606 and the joint-to-joint length of the forearms 608 and 612, in this embodiment. The forearms 608 and 612 are shorter than the common upper arm 606. The internal configurations used to drive the individual links of the arm may be similar to FIGS. 10-13, eg as in FIG. 13, but in this case the forearms are shorter than the common upper arm. . Here, the common upper arm is driven by one motor. Each of the two forearms is independently driven by one motor through a band driving device with common pulleys. The third links 614, 616 with the end-effectors are constrained by band drives each equipped with at least one non-circular pulley, which compensates for the effect of the different lengths of the upper and forearm arms. do. The band drives in each of the linkages can be designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for Figures 1 and 2 can also be used for each of the two linkages of the double arm. Referring also to FIGS. 26A , 26B and 26C , the arms of FIGS. 25A and 25B are shown as the upper linkages 612 and 616 are extended. The lateral offset 604 of the end-effector corresponds to the difference between the joint-to-joint length of the upper arm and the joint-to-joint length of the forearm, and the wrist joint is Pass along a straight line offset by the difference. It is noted that the inactive linkages 608 and 614 rotate while the active linkages 612 and 616 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Here, in Fig. 26a, an arm is drawn with both linkages in a retracted position. In FIG. 26B, the upper linkage 612, 616 is shown partially extended at a position where the wrist joint portion is closest to the wafer held by the lower linkage. It is observed that the wrist joint of the upper linkage does not travel over the wafer (but the wrist joint of the upper linkage moves in a plane above the wafer). In Figure 26c, further extension of the upper linkage 612, 616 is depicted. The illustrated embodiment may provide ease of setup and control, and may be used on a coaxial or tri axial drive or other suitable drive without a dynamic seal. Here, no bridge is used to support any of the end-effectors. The wrist joint of the upper linkage does not pass over the wafer on the lower end-effector, which is the case for an equal-link design (but the wrist joint of the upper linkage does not pass over the wafer on the lower end-effector). move). Here, the inactive arm rotates while the active arm is extended. An elbow joint that can translate with a larger swing radius or shorter reach can be more complex. Here, the arm may be taller than shown in FIGS. 30 and 31 and 33 due to the overlapping forearms 608 and 612 .

Referring now to FIGS. 27A and 27B , top and side views, respectively, of robot 630 with arm 632 are shown. Arm 630 may have similar features as disclosed with respect to FIGS. 15-19, except that forearms 636 and 640 are shown as having a shorter length than upper arm 636. Both linkages are shown in a retracted position. The lateral offset 634 of the end-effectors 642, 646 corresponds to the difference between the joint-to-joint length of the upper arm 636 and the joint-to-joint length of the forearms 638, 640. do. The combined upper arm link 636 can be a single piece as depicted in FIGS. 27A and 27B, or the combined upper arm link 636 can be two pieces as shown in the example of FIGS. 28A and 28B. It may be formed by the above parts 636' and 636''. A two-section design may be lighter with less material, where left section 636' and right section 636'' may be identical components. Enabling adjustment of the angular offset between the left portion 636' and the right portion 636'' may be provided, for example if different retracted positions need to be supported. Internal components used to drive individual links of the arm 632 may be similar to those shown in FIGS. 15 to 19 , for example, as shown in FIG. 19 . Common upper arm 636 is driven by one motor. Each of the two forearms 638 and 640 is independently driven by one motor through a band driving device with common pulleys. The third links with the end-effectors 642 and 646 can be constrained by band drives each equipped with at least one non-circular pulley, which is the upper arm 636 and the forearm ( 638, 640) to compensate for the effect of different lengths. The band drives in each of the linkages can be designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for Figures 1 and 2 can also be used for each of the two linkages of the double arm. Referring also to FIGS. 29A, 29B, and 29C, the right, upper linkage 640, 646 is shown extending the arms of FIGS. 27A and 27B. The lateral offset 634 of the end-effector corresponds to the difference between the joint-to-joint length of the upper arm and the joint-to-joint length of the forearm, and the wrist joint is Pass along a straight line offset by the difference. Here, the inactive linkages 638 and 642 rotate while the active linkages 640 and 646 are extended. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Figures 29a, 29b and 29c depict an arm with both linkages in a retracted position. 29B, the right upper linkage 640, 646 is partially extended at the position where the wrist joint of the upper right linkage 640, 646 is closest to the wafer held by the lower left linkage 638, 642. is shown Here, the wrist joints of the upper right linkage parts 640 and 646 do not pass over the wafer, but move in a plane above the wafer. 29C shows further extension of the right upper linkage 640, 646. The illustrated embodiment brings the advantages of a rigid link design, ease of provisioning and control, and concentric drive arrangements, eg no dynamic seals. No bridge is used to support any of the end-effectors. The wrist joint of the upper linkage does not travel over the wafer on the lower end-effector, as is the case for an equal-link design, but the wrist joint of the upper linkage moves in a plane above the wafer on the lower end-effector. . Inactive arms 638 and 642 rotate while active arms 640 and 646 are extended. Its contraction angle may be more difficult to change compared to configurations with a common elbow joint, eg, as shown in FIGS. 25A and 25B, and independent double arms, eg, as shown in FIGS. 33A, 33B. Additionally, as forearm 640 is shown at a higher elevation than forearm 638, the arm is shown taller than in FIGS. 30 and 31 and FIGS. 33A and 33B.

Referring now to FIGS. 30A and 30B , top and side views, respectively, of robot 660 with arm 662 are shown. Arm 662 may have features as described with respect to FIGS. 27-29 , but a bridge is employed on arm 662 and the two forearms are at the same elevation as will be described. Both linkages are shown in a retracted position. The lateral offset 664 of the end-effectors corresponds to the difference between the joint-to-joint length of the upper arm 66 and the joint-to-joint length of the forearms 668 and 670 . The combined upper arm link 666 can be a single piece, as depicted in FIGS. 30A and 30B , or the combined upper arm link 666 can be two or more sites (as shown in the example of FIGS. 31A and 31B ). 666', 666''). The internal components used to drive the individual links of the arm can be the same as shown with respect to FIGS. 15-19 , but here the forearms 668 and 670 are shorter than the upper arm 666 . Common upper arm 666 is driven by one motor. Each of the two forearms 668 and 670 is independently driven by one motor through a band driving device with common pulleys. The third links with the end-effectors 672 and 674 can be constrained by band drives each equipped with at least one non-circular pulley, which is the length of the different lengths of the upper and forearm arms. compensate for the effect. The band drives in each of the linkages can be designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for Figures 1 and 2 can also be used for each of the two linkages of the double arm. The third link and end effector 674 is provided with a bridge 680, the bridge 680 having an upper end effector portion 682, a side offset from the wrist axis between links 670 and 674. It has a side offset support portion 684 and further includes a lower support portion 686 coupling the wrist axis to the offset support portion 684 . Bridge 680 comprises interleaved portions of bridge 680 (which may include a wafer) and a third link and end effector 672 as can be seen below with respect to FIG. allows the forearms 668 and 670 to be packaged at the same level, while providing clearance for the The bridge 680 further provides a configuration such that any moving parts associated with the two wrist joints are below the wafer surface during transport, for example. Referring also to FIGS. 32A , 32B , 32C and 32D , top views of the robot arm of FIGS. 30A and 30B are shown as the right linkages 670 and 674 are extended. The lateral offset 664 of the end-effector corresponds to the difference between the joint-to-joint length of the upper arm 666 and the joint-to-joint length of the forearm 670, and the wrist joint 690 ) passes along a straight line offset by this difference with respect to the locus of the center of wafer 692. It is noted that inactive linkages 668 and 672 rotate while active linkages 670 and 674 extend. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Of Figures 32a, 32b, 32c and 32d, the arm is drawn with both linkages in a retracted position in Figure 32a. 32B, the bridge 680 of the right linkage parts 670 and 674 and the end-effector 672 of the left linkage parts 668 and 672 correspond to the worst-case clearance ( The right linkage 670, 674 is shown partially extended at a position (or adjacent to its worst-case gap). 32C shows the right linkage 670 , 674 partially extended in position when the forearm 670 is aligned with the upper arm 666 . The lateral offset of the end-effector corresponds to the difference between the joint-to-joint length of the upper arm and the joint-to-joint length of the forearm. The axis of the wrist joint 690 travels along a straight line offset by this difference with respect to the trajectory of the center of the wafer 692 . In FIG. 32D further extension of the right upper linkage 670, 674 is depicted. The illustrated embodiment is a side-by-side dual scara arrangement, for example a slim profile resulting in a shallow chamber with a small volume, a rigid link design, and Combines the advantages of concentric shaft drives. The bridge 680 on the right linkage 670, 674 is much lower than in the prior art coaxial dual scara arm and has a vertical member 684 and wrist 690. In between, the unsupported length of the bridge 680 is shorter than in prior art concentric double scara arms, and all of the joints are below the end-effectors. Here, the inactive arms 668 and 672 rotate while the active arms 670 and 674 are extended. As will be described below, in other aspects of the disclosed embodiment, an arm equipped with various band drives having non-circular pulleys instead of the conventional pulleys disclosed herein may be provided as an arm that does not exhibit this behavior. . Alternatively, by utilizing a configuration similar to that described with respect to FIGS. 25A and 25B and FIGS. 27 and 28 above, the bridge supporting the top end-effector may be eliminated.

Referring now to FIGS. 33A and 33B , top and side views, respectively, of a robot 700 with an arm 702 are shown. Arm 702 has features similar to those of the arm shown in FIGS. 21 to 23, but the length of the forearms is shorter than the length of the upper arms, and a bridge as described for bridge 680 is employed as an example. and the forearms are disposed at the same elevation. Both linkages are shown in a retracted position. 33A and 33B right upper arm 708 is positioned above left upper arm 706 . Alternatively, the left upper arm 706 may be disposed above the right upper arm 708 . Similarly, the end-effector 716 and the third link of the right linkage 712, 716 extend over the end-effector 714 and the third link of the left linkage 710, 714. Features a bridge. Alternatively, the end-effector 714 and third link of the left linkage 710, 714 may extend over the end-effector 716 and third link of the right linkage 712, 716. It can have a bridge as a feature. Internal components used to drive individual links of the arm may be similar to the embodiment shown in FIGS. 21 to 23 . Each of the two upper arms 706, 708 is independently driven by one motor. The forearms 710 and 712 are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links 714 and 716 with the end-effectors are constrained by band drives each equipped with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 706, 708 causes the corresponding linkage to extend and contract along a straight line while the other linkages remain stationary. The band drives in each of the linkages can be designed using the methodology described for the embodiment shown in FIGS. 5 and 6 . The kinematic equations presented for the embodiment shown in Figures 5 and 6 can also be used for each of the two linkages of the double arm. Referring also to Figs. 34a, 34b and 34c, the arms of Figs. 33a and 33b are shown as the right linkages 708, 712 and 716 are extended. Here, the inactive linkage 706, 710, 714 remains stationary while the active linkage 712, 716 is extended. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move while the left linkage extends. The illustrated embodiment combines the advantages of a side-by-side double scara configuration, eg a slim profile resulting in a shallow chamber with a small volume, and a concentric drive arrangement. The bridge on the right linkage is much lower than in an existing concentric double scara arm, the unsupported length of the bridge is shorter than in an existing concentric double scara arm, and both joints are connected to the end-effectors. It is below. As the active linkage can stretch or contract faster without load, the inactive linkage remains stationary while the active linkage stretches, potentially leading to higher throughput. Alternatively, by utilizing a configuration similar to that described with respect to FIGS. 25, 27 and 28 above, the bridge supporting the top end-effector may be eliminated.

Referring now to FIGS. 35A and 35B , top and side views, respectively, of a robot 730 with arm 732 with both linkages shown in a retracted position are shown. Each linkage is provided with a dual-holder end-effector 740, 742, each supporting two substrates offset from each other, for a total of four substrates capable of being supported. Internal components used to drive individual links of the arm 732 may be the same as those of FIGS. 10 and 11, eg, FIG. 13 . Common upper arm 734 is driven by one motor. Each of the two forearms 73736, 738 is independently driven by one motor through a band drive with conventional pulleys. The third links with the end-effectors 740 and 742 are constrained by band drives each equipped with at least one non-circular pulley, which reduces the effect of the different lengths of the upper and forearm arms. compensate The illustrated embodiment has forearms that are longer than the upper arm. Alternatively, the forearms may be shorter. The band drives in each of the linkages are designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for Figures 1 and 2 can also be used for each of the two linkages of the double arm. Referring also to FIG. 36, the arms of FIGS. 35A and 35B are shown as one linkage 738, 742 is extended. It is noted that the inactive linkages 736 and 740 rotate while the active linkages 738 and 742 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. Compared to Figs. 37 and 38, the end-effector need not be shaped to avoid interference with opposing elbows.

Referring now to FIGS. 37A and 37B , top and side views, respectively, of a robot with arm 750 are shown. Both linkages are shown in a retracted position, with each linkage having a dual-holder end effector 758, 760. The combined upper arm link 752 can be a single piece, as depicted in FIGS. 37A and 37B, or the combined upper arm link 752 can be formed at two or more sites (as shown in the examples of FIGS. 38A and 38B). 752', 752''). Internal configurations used to drive individual links of the arm may be the same as those of FIGS. 15 to 19 , eg, FIG. 19 . The combined upper arms 752 are driven by a single motor. Each of the two forearms 754 and 756 is independently driven by one motor through a band driving device with common pulleys. The third links (758, 760) with the end-effectors can be constrained by band drives each equipped with at least one non-circular pulley, which is the length of the different lengths of the upper and forearm arms. compensate for the effect. The illustrated embodiment has forearms that are longer than the upper arm. Alternatively, the forearms may be shorter. The band drives in each of the linkages are designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for Figures 1 and 2 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. The drive shaft of the common upper arm, and the drive shaft coupled to the forearm associated with the active linkage, cause reverse motion relative to FIGS. It needs to move in a way that adjusts according to the mathematical equations. At the same time, the drive shaft coupled to the other forearm needs to rotate in sync with the drive shaft of the common upper arm so that the inactive linkage remains retracted. Referring also to FIG. 39, the arms of FIGS. 37A and 37B are shown as one linkage 756, 760 is extended. Here, the inactive linkage 754, 758 rotates while the active linkage extends. For example, as the left linkage extends, the right linkage rotates, and as the right linkage extends, the left linkage rotates. The illustrated embodiment does not have a bridge. The upper wrist passes over one of the wafers on the lower end-effector. Here, the arms and end-effectors need to be designed so that the top elbow clears the bottom end-effector.

Referring now to FIGS. 40A and 40B , top and side views, respectively, of a robot 750 with an arm 752 are shown. Both linkages are shown in a retracted position, with each linkage having a dual-holder end effector 792, 794. Internal components used to drive individual links of the arm may be the same as those of FIGS. 21 to 23 . The two upper arms 784 and 786 are independently driven by a single motor. The forearms 788 and 790 are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links with the end-effectors 792 and 794 are constrained by band drives each equipped with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms causes the corresponding linkage to extend and contract along a straight line while the other linkages remain stationary. The illustrated embodiment has forearms that are longer than the upper arm. Alternatively, the forearms may be shorter. The band drives in each of the linkages are designed using the methodology described with respect to FIGS. 5 and 6 . The kinematic equations presented for FIGS. 5 and 6 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. In order for one of the end-effector assemblies to extend and contract radially along a straight path, the drive shaft of the upper arm coupled to the active linkage needs to be rotated according to the inverse kinematic equations for FIGS. 5 and 6 and , the other two drive shafts need to be kept stationary. Referring also to FIG. 41 , the arms of FIGS. 40A and 40B are shown as one linkage 784, 788, 794 is extended. It is noted that the inactive linkage 786 , 790 , 792 may remain stationary while the active linkage 794 , 788 , 794 is extended. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move while the left linkage extends. Alternatively, the left linkage and the right linkage can be simultaneously and independently moved radially, for example as shown in FIG. 42 , where the right linkage is slightly independently compared to FIG. 41 . ) is elongated. The motion of the elbow of the upper linkage may be limited due to potential interference with the wafer on the lower end-effector, which may limit the reach of the robot as illustrated in FIG. 41 . This limitation can be alleviated by slightly elongating the lower linkage to provide additional spacing and achieve full reach as shown in FIG. 42 . The illustrated embodiment does not have a bridge. A wrist of the upper linkage may pass over a wafer on the lower end-effector.

Referring now to FIGS. 43A and 43B , top and side views, respectively, of a robot 810 with an arm 812 are shown. Both linkages are shown in a retracted position, with each linkage having a dual-holder end effector 820, 822. Internal components used to drive individual links of the arm may be the same as those of FIGS. 10 to 13 . The common upper arm 814 is independently driven by one motor. Each of the two forearms 816, 818 is independently driven by one motor through a band driving device with common pulleys. The third links with the end-effectors 820, 822 are constrained by band drives each equipped with at least one non-circular pulley, which compensates for the effect of different lengths of the upper and forearm arms. do. In the illustrated embodiment the forearms are shorter than the upper arms; Alternatively, the forearm may be longer. The band drives in each of the linkages are designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for Figures 1 and 2 can also be used for each of the two linkages of the double arm. Referring also to FIGS. 44 and 45 , the arms of FIGS. 43A and 43B are shown as the upper linkages 818 and 822 are extended. It is noted that the inactive linkages 816 and 820 rotate while the active linkages 818 and 822 are elongated. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. 44 and 45 it is illustrated that the wrist joint 824 of the upper linkage 818, 822 does not pass over the wafers 826 held by the lower linkage 816, 820 of the arm. . The illustrated embodiment does not have a bridge. Compared to Figs. 46 and 47, the end-effector need not be shaped to avoid interference with opposing elbows.

Referring now to FIGS. 46A and 46B , top and side views, respectively, of a robot 840 with an arm 842 are shown. Both linkages are shown in a retracted position, with each linkage having a dual-holder end effector 850, 852. The combined upper arm link 844 can be a single piece, as depicted in FIGS. 46A and 46B, or the combined upper arm link 844 can be two or more sites (as shown in the examples of FIGS. 47A and 47B). 844', 844''). Internal configurations used to drive individual links of the arm may be the same as those of FIGS. 15 to 19 , eg, FIG. 19 . The combined upper arms 844 are driven by a single motor. Each of the two forearms 846, 848 is independently driven by one motor through a band driving device with common pulleys. The third links with the end-effectors 850 and 852 can be constrained by band drives each equipped with at least one non-circular pulley, which is the length of the different lengths of the upper and forearm arms. compensate for the effect. In the illustrated embodiment the forearms are shorter than the upper arms; Alternatively, the forearm may be longer. The band drives in each of the linkages are designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for Figures 1 and 2 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. The drive shaft of the common upper arm 844 and the drive shaft coupled to the forearm associated with the active linkage are shown in FIGS. It needs to move in a way that is coordinated according to the inverse kinematic equations for At the same time, the drive shaft coupled to the other forearm needs to rotate in sync with the drive shaft of the common upper arm so that the inactive linkage remains retracted. Referring also to FIGS. 48 and 49 , the arms of FIGS. 46A and 46B are shown as the upper linkages 848 and 852 are extended. Here, the inactive linkage 846, 850 rotates while the active linkage 848, 852 extends. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. 48 and 49 it is illustrated that the wrist joint 854 of the upper linkage does not pass over the wafers 856 held by the lower linkage of the arm. In the illustrated embodiment, no bridge is provided, and the wrist joint of the upper linkage does not pass over the wafer held by the lower linkage. Here, the inactive arm rotates less, allowing a higher operating speed when the active arm extends or retracts without load.

Referring now to FIGS. 50A and 50B , top and side views of a robot 870 with an arm 872 are shown. Both linkages are shown in a retracted position, with each linkage having a dual-holder end effector 880, 882. The combined upper arm link 974 can be a single piece, as depicted in FIGS. 50A and 50B , or the combined upper arm link 974 can be in two or more locations, as shown in the examples of FIGS. 47A and 47B . can be formed by Internal configurations used to drive individual links of the arm may be the same as those of FIGS. 15 to 19, eg, FIG. 18. The combined upper arms 874 are driven by a single motor. Each of the two forearms 876 and 878 is independently driven by one motor through a band driving device with common pulleys. The third links with the end-effectors can be constrained by band drives each equipped with at least one non-circular pulley, which compensates for the effect of the different lengths of the upper arms and forearms. In the illustrated embodiment the forearms are shorter than the upper arms; Alternatively, the forearm may be longer. The band drives in each of the linkages can be designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for Figures 1 and 2 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. The drive shaft of the common upper arm 874 and the drive shaft coupled to the forearm associated with the active linkage are shown in FIGS. It needs to move in a way that is coordinated according to the inverse kinematic equations for At the same time, the drive shaft coupled to the other forearm needs to rotate to match the drive shaft of the common upper arm 874 so that the inactive linkage remains retracted. Referring also to FIG. 51 , there is shown the arm of FIGS. 50A and 50B with one linkage 878, 882 extended. Here, the inactive linkage 876, 880 rotates while the active linkage 878, 882 extends. For example, the upper linkage rotates as the lower linkage extends, and the lower linkage rotates as the upper linkage extends. In the illustrated embodiment, short forearm links are provided which can be stiffer with shorter, shorter bands, and the forearms are placed side-by-side to facilitate shallow chambers. let it Here, the short links can cause more rotation of the inactive arm compared to FIGS. 46 and 47 which can be handled by the longer upper arms. A bridge 884 is provided wherein the arm and end-effectors can be designed such that the bridge 884 passes over the inactive end-effector 880 during an extension movement. Here, the base of the end-effector has an angled shape 886 as shown.

Referring now to FIGS. 52A and 52B , top and side views, respectively, of a robot 900 with an arm 902 are shown. Both linkages are shown in a retracted position, with each linkage having a dual-holder end effector. Internal components used to drive individual links of the arm may be the same as those of FIGS. 21 to 23 . Each of the two upper arms 904, 906 is independently driven by one motor. The forearms 908 and 910 are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links with the end-effectors 912 and 914 are constrained by band drives each equipped with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 904, 906 causes the corresponding linkage to extend and contract along a straight line while the other linkage remains stationary. In the illustrated embodiment the forearms are shorter than the upper arms; Alternatively, the forearm may be longer. The band drives in each of the linkages are designed using the methodology described with respect to FIGS. 5-6. The kinematic equations presented for FIGS. 5-6 can also be used for each of the two linkages of the double arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. In order for one of the end-effector assemblies to extend and contract radially along a straight path, the drive shaft of the upper arm coupled to the active linkage needs to be rotated according to the inverse kinematic equations for FIGS. 5-6 and , the other two drive shafts need to be kept stationary. Referring also to FIG. 53, there is shown the arm of FIGS. 52A and 52B with one linkage 906, 910, 914 extended. It is noted that the inactive linkage 904 , 908 , 912 remains stationary while the active linkage 906 , 910 , 914 is extended with the bridge 916 . That is, although the left linkage and the right linkage can be moved radially independently, the left linkage need not move while the right linkage is extended, and the right linkage need not move while the left linkage is extended. The illustrated embodiment is equipped with short links that can be stiffer with short bends, and side-by-side forearms that facilitate shallow chambers. Alternatively, the forearms may be longer than the upper arms in a bridged configuration.

Referring now to FIGS. 54-55 , a coupled dual arm 930 with opposing end effectors 938 and 940 is shown. 54a and 54b show top and side views of the robot with the arm, respectively. Both linkages are shown in a retracted position, where the lateral offset of the end-effectors is the joint-to-joint length of upper arm 932 and the joint-to-joint length of forearms 934, 936. - Corresponds to differences in joint length. The combined upper arm link 932 may be a single piece as depicted in FIG. 54 , or the combined upper arm link 932 may be formed by two or more segments. As an example, a two-part design may be lighter with less material, and the left and right parts may be identical components. The internal components used to drive the individual links of the arm may be based on that shown with respect to FIGS. 18 and 19 or otherwise. Common upper arm 932 is driven by one motor. Each of the two forearms 934 and 936 is independently driven by one motor through a band driving device with common pulleys. The third links with the end-effectors 938 and 940 may be constrained by band drives each equipped with at least one non-circular pulley, which comprises the upper arms 934 and 936 and the forearm (932) to compensate for the effect of different lengths. The band drives in each of the linkages are designed using the methodology described with respect to FIG. 1 or otherwise. The kinematic equations presented for FIG. 1 can also be used for each of the two linkages of the double arm. 55A-55C show the arm of FIG. 54 as the first linkage 934, 938 and the second linkage 936, 940 are extended from their retracted positions. The lateral offset of the end-effector corresponds to the difference between the joint-to-joint length of the upper arms 934 and 936 and the joint-to-joint length of the forearm 932, and the wrist joint portion 942, 944) passes along a straight line offset by this difference with respect to the locus of the center of the wafer. It is noted that the inactive linkage rotates while the active linkage extends. For example, as the first linkage extends, the second linkage rotates, and as the second linkage extends, the first linkage rotates. 55A depicts the arm with both linkages in a retracted position. 55B shows the first linkage 934, 938 extended. 55C shows the second linkages 936 and 940 extended. The arm shown has a low profile as the forearms pass in the same plane and the end-effectors pass in the same plane, a shallow vacuum chamber with a small volume. becomes possible Since the contracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the containment radius of the arm can be large, making the arm particularly suitable for applications with a large number of process modules. , where the diameter of the chamber is dictated by the size of the slot valves. The arm's low profile allows it to replace a frogleg-type arm with opposing end-effectors. In the illustrated embodiment the forearms are shorter than the upper arms; As an alternative, the forearm can be longer, eg here the forearms are at different elevations and overlap.

Referring now to FIGS. 56-57 , an independent dual arm 960 with opposing end effectors 970 and 972 is shown. 56a and 56b show top and side views of the robot equipped with the arm. Both linkages are shown in a retracted position. In FIG. 56 the upper arm 962 of the first linkage is disposed above the upper arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be disposed above the upper arm of the first linkage. The internal configurations used to drive the individual links of the arm may be based on FIG. 23 or otherwise. Here, each of the two upper arms 962 and 964 may be independently driven by one motor. The forearms 966 and 968 are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links with the end-effectors 970 and 972 are constrained by band drives each equipped with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms causes the corresponding linkage to extend and contract along a straight line while the other linkage remains stationary. The band drives in each of the linkages are designed using the methodology described with respect to FIG. 5 . The kinematic equations presented with respect to FIG. 5 can also be used for each of the two linkages of the double arm. 57A-57C show the arm of FIG. 56 as the first linkage 962, 966, 970 and the second linkage 964, 968, 972 are extended from their retracted positions. It is noted herein that the inactive linkage remains stationary (although it need not be) while the active linkage extends. That is, the second linkage does not move while the first linkage extends, and the first linkage does not move while the second linkage extends. The arms have a low profile as the forearms travel in the same plane and the end-effectors travel in the same plane, allowing shallow vacuum chambers with small volumes. Since the contracted position of the wrist of one linkage is constrained by the wrist of the other linkage, the arm's containment radius can be large, making the arm particularly suitable for applications with a large number of process modules. The diameter of the chamber is dictated by the size of the slot valves. The arm's low profile allows it to replace a frogleg-type arm with opposing end-effectors. In the illustrated embodiment the forearms are shorter than the upper arms; As an alternative, the forearm can be longer, eg here the forearms are at different elevations and overlap.

Referring now to FIG. 58 , a coupled dual arm 990 is shown with angularly offset end effectors 998 and 1000 . 58A and 58B show top and side views of the robot with the arm. Both linkages are shown in a retracted position. The lateral offset of the end-effectors 1002, 1004 corresponds to the difference between the joint-to-joint length of the upper arms 994, 996 and the joint-to-joint length of the forearm 992. Combined upper arm link 992 may be a single piece as depicted in FIG. 59 , or combined upper arm link 992 may be formed by two or more segments. The internal configurations used to drive the individual links of the arm are based on Figs. 18 and 19, or otherwise. The common upper arm 992 here may be driven by a single motor. Each of the two forearms 994 and 996 may be independently driven by one motor through a band driving device with common pulleys. The third links with the end-effectors 998 and 1000 are constrained by band drives each equipped with at least one non-circular pulley, which compensates for the effect of different lengths of the upper and forearm arms. do. The band drives in each of the linkages are designed using the methodology described with respect to FIG. 1 or otherwise. The kinematic equations presented for FIG. 1 can also be used for each of the two linkages of the double arm. Referring also to 59a-c, the arms of FIG. 58 are shown as the left linkages 994, 998 and right linkages 996, 1000 are extended. The lateral offset (1002, 1004) of the end-effector corresponds to the difference between the joint-to-joint length of the upper arm and the joint-to-joint length of the forearm, and the wrist joint is located on the trajectory of the center of the wafer. travels along a straight line offset by this difference. Here, the inactive linkage rotates while the active linkage extends. For example, as the left linkage extends, the right linkage rotates, and as the right linkage extends, the left linkage rotates. 59A depicts the arm with both linkages in the retracted position. 59B shows the left linkage 994, 998 extended. 59C shows the right linkage 996, 1000 extended. Here, the inactive arm rotates while the active arm is extended. In the illustrated embodiment the forearms are shorter than the upper arms; As an alternative, the forearm can be longer, eg here the forearms are at different elevations and overlap. In the illustrated embodiment the end effectors may be 90 degrees apart; As an alternative, any separation angle may be provided.

Referring now to FIG. 60 , an independent dual arm 1030 is shown with angularly offset end effectors 1040 , 1042 . 60a and 60b show top and side views of the robot with the arm. Both linkages are shown in a retracted position. In FIG. 60 , right upper arm 1034 is positioned below left upper arm 1032 . Alternatively, the left upper arm may be disposed below the right upper arm. The internal configurations used to drive the individual links of the arm may be based on FIG. 23 . Each of the two upper arms 1032 and 1034 may be independently driven by one motor. The forearms are coupled to the third motor through band configurations each equipped with at least one non-circular pulley. The third links with the end-effectors 1040 and 1042 are constrained by band drives each equipped with at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 1032, 1034 causes the corresponding linkage to extend and contract along a straight line while the other linkage remains stationary. The band drives in each of the linkages are designed using the methodology described with respect to FIG. 5 or otherwise. The kinematic equations presented with respect to FIG. 5 can also be used for each of the two linkages of the double arm. 61A-61C show the arms of FIG. 60 as the left linkages 1032, 1036, 1040, and the right linkages 1034, 1038, 1042 are extended. Here the inactive linkage is (but need not be) held stationary while the active linkage is stretched. That is, the left linkage does not move while the right linkage extends, and the right linkage does not move while the left linkage extends. Here, the inactive linkage remains stationary while the active linkage extends. In the illustrated embodiment the forearms are shorter than the upper arms; As an alternative, the forearm can be longer, eg here the forearms are at different elevations and overlap. In the illustrated embodiment the end effectors may be 90 degrees apart; As an alternative, any separation angle may be provided.

62 or otherwise, the third link and end-effector 1060, 1062, which may be referred to as a third-link assembly, respectively, has a center of mass 1064 as the corresponding linkage of the arm extends and contracts. , 1066 may be designed to be on or adjacent to the linear trajectory of the wrist joints 1068 and 1070, respectively. This reduces the moment due to the inertial force acting on the center of mass of the third link assembly and the reaction force at the wrist joint, thereby reducing the load on the band configuration that restrains the third link assembly. The third - Link assemblies can be further designed. Alternatively, as best straight-line tracking performance is typically required in the presence of a payload, the center of mass of the third-link assembly is substantially above the wrist joint trajectory when a payload is present. The third-link assembly can be designed so that it is as illustrated in FIG. 62 . 62, 1L is the linear locus of the center of the wrist joint of the left linkage, 2L is the center of the wrist joint of the left linkage 1070, and 3L is the center of mass 1066 of the third-link assembly of the left linkage. where 4L is the force acting on the third-link assembly of the left linkage when the left linkage accelerates at the start of the extension movement (or decelerates at the end of the contraction movement), and 5L is the force acting on the left linkage at It is the inertial force acting on the center of mass of the third-link assembly of the left linkage when it accelerates at the start of the extension movement (or when it decelerates at the end of the retraction movement). Similarly, 1R is the linear locus of the center of the wrist joint of the right linkage, 2R is the center of the wrist joint of the right linkage 1068, 3R is the center of mass 1064 of the third-link assembly of the right linkage, 4R is the force acting on the third-link assembly of the right linkage when the right linkage decelerates at the end of the extension movement (or accelerates at the start of the contraction movement), and 5R is the force acting on the right linkage at the end of the extension movement is the inertial force acting on the center of mass of the third-link assembly of the right linkage when decelerating at the end of (or accelerating at the start of the contraction movement). In the illustrated embodiment dual wafer end effectors are provided. In alternative aspects any suitable end effector and arm or link geometry may be provided.

In alternative aspects, the upper arms in any of the embodiments aspects may be driven directly by a motor or through some kind of coupling or transmission arrangement. Any delivery ratio may be used. Alternatively, the band drives actuating the second link and restraining the third link can be any other configuration with equivalent functionality, such as belt drives, cable drives, circular gears and non-circular gears, linkage-based mechanisms or any combination of the foregoing. Alternatively, for example in the double arm and quad arm aspects of the embodiment, the third link of each linkage is connected to a pulley driven by the second motor, similar to the single arm concept of FIG. 9 . It can be constrained to hold the end-effector radially through a conventional two-stage band configuration that synchronizes the third link. Alternatively, the two-step band configuration may be replaced by any other suitable configuration, such as, for example, a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the foregoing. Alternatively, the upper arms in the double arm and quad arm aspects of the embodiment may not be configured in a coaxial manner. The upper arms may have separate shoulder joints. The two linkages of the double and quad arms need not have forearms of the same length as the upper arms of the same length. The length of the upper arm of one linkage can be different from the length of the upper arm of the other linkage, and the length of the forearm of one linkage can be different than the length of the forearm of the other linkage. The forearm-to-upper arm ratio may be different for the two linkages. The left linkage and the right linkage can be interchanged in the double-arm and quad-arm aspects of the embodiment where the links of the left linkage and the right linkage have different elevations. The two linkages of the double arm and quadruple arm need not extend along the same direction. The arms may be configured such that each linkage extends in a different direction. In any of the aspects of the above embodiment the two linkages may consist of fewer or more than three links (first link = upper arm, second link = forearm, third link = end). - Links with effectors). Each linkage in the double-arm and quad-arm aspects of the above embodiment may have a different number of links. In single arm aspects of the above embodiment the third link may hold more than one end-effector. Any suitable number of end-effectors and/or material holders may be carried by the third link. Similarly, each linkage in the dual arm aspects of the above embodiment may have any suitable number of end-effectors. In either case, the end-effectors may be positioned in the same plane, stacked on top of each other, a combination of the two, or in any other suitable manner. Additionally, in dual arm configurations each arm may be independently actuable, eg in rotation, extension and/or z (vertical), see eg Nov. 6, 2012 As described with respect to pending US patent application Ser. No. 13/670,004, entitled "Robot System with Independent Arms", having the filing date, which application is hereby incorporated by reference in its entirety. merged All such variations, combinations and variations are hereby embraced.

According to one aspect of the exemplary embodiment, a substrate transport device is adapted to transport substrates. The substrate transport device is provided with a movable arm assembly coupled to a drive unit on a rotation center axis. A substrate support is coupled to the arm assembly on a rotational wrist axis. During extension and retraction, the arm assembly rotates about a central axis of rotation. During extension and retraction, the wrist axis of rotation moves along a wrist path that is parallel to and offset from the radial path with respect to the central axis of rotation. During extension and retraction the substrate support moves parallel to the radial path without rotation.

According to another aspect of an exemplary embodiment, a substrate transport device is adapted to transport a first substrate and a second substrate. The substrate transport device includes a first independent movable arm assembly and a second independent movable arm assembly coupled to a drive unit on a common rotational axis. A first substrate support and a second substrate support are coupled to the first arm assembly and the second arm assembly on a first rotational wrist axis and a second rotational wrist axis, respectively. During extension and retraction, the first arm assembly and the second arm assembly rotate about the common axis of rotation. During extension and retraction, the first and second wrist axes of rotation move along first and second wrist paths that are parallel to and offset from the radial path with respect to the common axis of rotation. During extension and retraction, the first and second substrate supports move parallel to the radial path without rotation.

According to another aspect of an exemplary embodiment, a substrate transport device is adapted to transport substrates. The substrate carrying device includes a driving unit and an upper arm rotatably coupled to the driving unit, and the upper arm is rotatable about a central axis. An elbow pulley is fixed to the upper arm. A forearm is rotatably coupled to the upper arm and the forearm is rotatable about an elbow axis, the elbow axis being offset from the central axis by an upper arm link length. An end effector is rotatably coupled to the forearm, the end effector is rotatable about a wrist axis, the wrist axis is offset from the elbow axis by a forearm link length, and the end effector supports a substrate. A wrist pulley is fixed to the end effector, and the wrist pulley is coupled to the elbow pulley as a band. The forearm link length is different from the upper arm link length. The end effector is constrained relative to the upper arm by the elbow pulley, the wrist pulley and the band so that the substrate moves along a linear path radially about the central axis.

According to another aspect of an exemplary embodiment, a substrate transport device is adapted to transport substrates. The substrate transport device includes a drive unit having a first rotary drive and a second rotary drive. An upper arm is rotatably coupled to the first rotational driving device on a central axis of rotation. A forearm is rotatably coupled to the upper arm, the forearm is rotatable about an axis of an elbow of rotation of the upper arm, and the axis of the elbow is offset from the central axis of rotation by an upper arm link length. The forearm is further coupled to the second rotational driving device by a forearm coupling portion and driven about the rotational elbow axis by the second rotational driving device. A substrate support supports the substrate, the substrate support being rotatably coupled to the forearm and rotatable about a wrist axis of rotation of the forearm, the wrist axis of rotation being offset from the rotation elbow axis by a forearm link length. do. The substrate support is further coupled to the upper arm as a substrate support coupling part and is driven about the rotation wrist axis by a relative movement between the upper arm and the forearm about the rotation elbow axis. The forearm link length is different from the upper arm link length. The substrate support is constrained by the substrate support coupling portion so that the substrate moves along a linear path with respect to the central axis of rotation.

According to another aspect of an exemplary embodiment, the linear path follows a direction intersecting the central axis of rotation.

According to another aspect of an exemplary embodiment, the linear path follows a direction perpendicular to the central axis of rotation, which is offset with respect to the central axis of rotation.

According to another aspect of the exemplary embodiment, the rotational wrist axis moves along a wrist path parallel to the linear path.

According to another aspect of the exemplary embodiment, the substrate support coupling part includes a band driving device equipped with one or more non-circular pulleys.

According to another aspect of the exemplary embodiment, the forearm coupling part includes a band driving device equipped with one or more non-circular pulleys.

According to another aspect of the exemplary embodiment, the conveying device includes: a driving device; A first arm connected to the drive device, the first arm including a first link, a second link and an end effector connected in series to the drive device, wherein the first link and the second link have different effective lengths. a first arm having arms; and a system for limiting rotation of the end effector relative to the second link so that only substantially linear motion of the end effector relative to the driving device is provided when the first arm is extended or retracted.

According to another aspect of an exemplary embodiment, an effective length of the first link is shorter than an effective length of the second link.

According to another aspect of an exemplary embodiment, an effective length of the first link is longer than an effective length of the second link.

According to another aspect of an exemplary embodiment, the end effector may include a center line between a wrist joint part and a substrate support part with the second link, which is substantially equal to a difference between an effective length of the first link and an effective length of the second link. includes the lateral offset between

According to another aspect of the exemplary embodiment, the system for limiting the rotation includes maintaining the wrist joint at the lateral offset with respect to a central axis of rotation of the drive as the first arm is extended or retracted. Still, it is configured to translate the end effector.

According to another aspect of the exemplary embodiment, the system for limiting rotation of the end effector provides substantially only radial motion of the end effector relative to the drive mechanism when the first arm is extended or retracted.

According to another aspect of the exemplary embodiments, a system for limiting rotation of the end effector may cause the end effector to rotate radially with respect to the drive unit regardless of the position of the first link and the position of the second link. It is configured to constrain the orientation of the end effector so that it faces.

According to another aspect of the exemplary embodiment, the end effector is configured to support at least two spaced substrates on the end effector, and when the first arm is extended or contracted, the wrist joint part of the driving device. The end effector and the center of the path of linear motion of the end effector when the first arm is extended or retracted such that the end effector moves substantially only in translation while remaining at the lateral offset with respect to the central axis of rotation. A lateral offset is provided between the wrist joint and the second link of the second link.

According to another aspect of the exemplary embodiment, the system for limiting rotation includes a band driving device including pulleys and a band.

According to another aspect of an exemplary embodiment, the pulleys include at least one non-circular pulley.

According to another aspect of the exemplary embodiment, the pulleys include at least one pulley stationarily connected to the second link or the end effector.

According to another aspect of the exemplary embodiment, the end effector includes a substrate support and a leg connecting the substrate support to a wrist joint with the second link of the end effector, wherein the leg includes A first part connected to the wrist joint part and a second part connected to the substrate support part are provided, and the first part and the second part are connected to each other at an angle between about 90 degrees and about 120 degrees.

According to another aspect of the exemplary embodiment, the end effector includes two substrate support parts, and a leg frame connecting the substrate support part to a wrist joint with the second link of the end effector, wherein the leg frame is substantially U-shaped with a base and two legs, each leg connected to a respective one of the substrate supports, and the wrist joint holding the end-effector at a position offset from the center of the base; 2 Connect to the link.

According to another aspect of the exemplary embodiment, a method comprising: rotating a first link of an arm by a driving device; rotating the second link such that the second link of the arm rotates on the first link as the first link rotates; and wherein the first link and the second link have different effective lengths, such that the end effector is limited to only substantially linear motion relative to the drive when the arm is extended or retracted. rotating the end effector on the second link such that rotation of the end effector is constrained.

According to another aspect of the exemplary embodiment, the movement is a radial movement about a central axis of the drive device.

According to another aspect of an exemplary embodiment, the end effector may include a center line between a wrist joint part and a substrate support part with the second link, which is substantially equal to a difference between an effective length of the first link and an effective length of the second link. includes the lateral offset between

According to another aspect of the exemplary embodiment, rotating the end effector on the second link is such that when the first arm is extended or contracted, the wrist joint with the second link is the central axis of rotation of the driving device. This results in only the translational motion of the end effector, while remaining at a lateral offset with respect to .

According to another aspect of an exemplary embodiment, rotating the end effector provides substantially only radial motion of the end effector relative to the drive mechanism when the first arm is extended or retracted.

According to another aspect of an exemplary embodiment, rotating the end effector causes the end effector to face radially with respect to the driving device regardless of the position of the first link and the position of the second link. Constrain the orientation of the end effector.

According to another aspect of an exemplary embodiment, a conveying device includes: a driving device; And an arm connected to the driving device; includes,

The arm includes a first link connected to the driving device at a first joint, a second link connected to the first link at a second joint, and an end effector connected to the second link at a third joint, , The first link includes a first length between the first joint and the second joint, and the first length is different from a second length of the second link between the second joint and the third joint. and the movement of the end effector at the third joint is constrained to substantially follow a radial straight line with respect to the center of rotation of the driving device during extension or contraction of the arm.

According to one exemplary embodiment, the transport device includes: a drive device; A first arm connected to the driving device, the first arm including a first link, a second link and an end effector connected in series to the driving device, wherein the first link and the second link have different effective lengths. a first arm having arms; and a system for limiting rotation of the end effector relative to the second link such that only substantially linear motion of the end effector relative to the drive is provided when the first arm is extended or retracted.

An effective length of the first link may be shorter than an effective length of the second link. An effective length of the first link may be longer than an effective length of the second link. The end effector may include a lateral offset between a wrist joint with the second link and a centerline of the substrate support that is substantially equal to a difference between an effective length of the first link and an effective length of the second link. The system for limiting rotation may be configured to translate the end effector as the first arm is extended or retracted while the wrist joint remains at the lateral offset with respect to a central axis of rotation of the drive mechanism. can The system for limiting rotation of the end effector may provide substantially only radial motion of the end effector relative to the drive mechanism when the first arm is extended or retracted. The system for limiting rotation of the end effector is configured to constrain an orientation of the end effector such that the end effector is oriented radially relative to the drive device regardless of the position of the first link and the position of the second link. It can be. The end effector may be configured to support at least two substrates spaced apart on the end effector, wherein the wrist joint moves in the lateral direction with respect to a central axis of rotation of the driving device when the first arm is extended or contracted. The wrist between the second link of the end effector and the center of the path of linear motion of the end effector when the first arm is extended or retracted so that the end effector moves substantially only in translation while remaining at an offset. A lateral offset is provided between the joints. The system for limiting the rotation may include a band driving device including pulleys and a band. The pulleys may include at least one non-circular pulley. The pulleys may include at least one pulley connected to the second link or the end effector in a stationary state. The end effector may include a substrate support and a leg connecting the substrate support to a wrist joint of the second link of the end effector, wherein the leg is connected to the wrist joint. A first part and a second part connected to the substrate support are provided, and the first part and the second part are connected to each other at an angle between about 90 degrees and about 120 degrees. The end effector may include two substrate supports and a leg frame connecting the substrate support to a wrist joint with the second link of the end effector, wherein the leg frame includes a base and Equipped with two legs and substantially U-shaped, each leg connected to a respective one of the substrate supports, the wrist joint attaching the end-effector to the second link at a position offset from the center of the base. connect

One type of exemplary method includes rotating the first link of the arm by means of a driving device; rotating the second link such that the second link of the arm rotates on the first link as the first link rotates; and wherein the first link and the second link have different effective lengths, such that the end effector is limited to only substantially linear motion relative to the drive when the arm is extended or retracted. Rotating the end effector on the second link so that rotation of the end effector is constrained; may include.

The movement may be a radial movement about a central axis of the driving device. The end effector may include a lateral offset between a wrist joint with the second link and a centerline of the substrate support that is substantially equal to a difference between an effective length of the first link and an effective length of the second link. Rotating the end effector on the second link causes the wrist joint with the second link to remain at a lateral offset with respect to the central axis of rotation of the drive when the first arm is extended or retracted. It can result in only the translational motion of the end effector. The end effector may provide substantially only radial movement of the end effector relative to the driving device when the first arm is extended or retracted. Rotating the end effector may constrain the orientation of the end effector so that the end effector is oriented radially with respect to the driving device regardless of the position of the first link and the position of the second link.

One type of exemplary embodiment may provide a conveying device, which includes: a driving device; and an arm connected to the driving device, wherein the arm includes a first link connected to the driving device at a first joint, a second link connected to the first link at a second joint, and a third joint. and an end effector connected to the second link, the first link including a first length between the first joint and the second joint, the first length being the second joint and the third joint. and the motion of the end effector at the third joint is constrained to follow substantially a radial straight line with respect to the center of rotation of the drive unit during extension or retraction of the arm. do.

Referring now to FIG. 63 , a graphical representation 1100 of exemplary pulleys is shown. The example pulley profiles may be for arms with different link lengths as will be described. As an example, the graph 1100 may show profiles of a wrist pulley having a circular elbow pulley. Here, the following example design was used for the drawing: Re/l2 = 0.2, where Re is the radius of the elbow pulley and l2 is the joint-to-joint length of the forearm. Alternatively, any suitable ratio may be provided. For clarity purposes, the graph shows extreme design cases compared to a pulley for an equal-link arm. Outermost profile 1110 is for l2/l1 = 2, where l2 is the joint-to-joint length of the forearm and l1 is the joint-to-joint length of the upper arm, e.g. For example, this case represents a longer forearm. The intermediate profile 1112 is for 12/11 = 1, e.g. with equal link lengths. The innermost profile 1114 is for 12/11 = 0.5, ie this case represents a shorter forearm. In the illustrated embodiment, a polar coordinate system 1120 is used. Here the radial distance is normalized with respect to the radius of the elbow pulley, eg expressed as a multiple of the radius of the elbow pulley. In other words, Rw/Re is shown, where Rw represents the polar coordinates of the wrist pulley and Re represents the elbow pulley. The angular coordinates are in degrees, and the zero points along the direction 1122 of the end-effector, eg, the end-effector faces to the right with respect to the drawing.

Referring now to FIGS. 64 and 65 , two additional configurations of an arm with different link lengths 1140 and 1150 are shown. Arm 1140 is shown with a forearm 1144 that is longer than upper arm 1142, where a single arm configuration may utilize features as disclosed with respect to FIGS. 1-4, and 5-8 or otherwise. there is. The two end-effectors 1146, 1148 supporting separate substrates 1150, 1152 in the illustrated embodiment are rigidly connected to each other and face in opposite directions. The substrates traverse in a radial path coincident with the center 1156 of the robot 1140 and offset 1154 from the wrist as shown. Similarly, arm 1160 is shown with a forearm 1164 that is shorter than upper arm 1162, where the single arm configuration is as disclosed with respect to FIGS. 1-4, and 5-8 or other features. can utilize them. In the illustrated embodiment the two end-effectors 1166 and 1168 supporting separate substrates 1170 and 1172 are rigidly connected to each other and face in opposite directions. The substrates traverse in a radial path coincident with the center 1176 of the robot 1160 and offset 1174 from the wrist as shown. Here, features of the disclosed embodiments may be similarly shared with any of the other disclosed embodiments.

Referring to FIG. 66A , a schematic plan view of an exemplary substrate transfer robot 1200 is shown. The robot 1200 may be vacuum compatible or may be any suitable robot having a drive portion 1210 and an arm portion 1212 coupled to the drive portion 1210. , as will be described in more detail below. Throughout the illustrated embodiments, the upper arm link lengths and forearm link lengths can be different and can be driven by circular or non-circular pulleys, eg as described above. In alternative aspects, arms with identical link lengths or arms with different link lengths, equipped with circular pulleys or other suitable drive configurations, for example any suitable disclosed configuration, may be provided. 66A and 66B show top and side views of robot 1200 with arm 1212, respectively. The drive unit 1200 may be provided with four concentric drive shafts so that the first part 1214 and the second part 1216 of the arm 1212 can be independently driven. A suitable drive arrangement with four concentric axes is shown as an example in FIG. 70B. Here, arm 1212 features two independent linkages, an upper linkage 1214 and a lower linkage 1216 . The upper linkage 1214 can be driven by the two inner-most drive shafts of drive device 1210 and the lower linkage 1216 can be driven by the two inner-most drive shafts of drive device 1210. It can be driven by outer-most drive shafts. The linkages are shown in a retracted position in FIGS. 67A and 68A. Each of the two linkages 1214 and 1216 includes a first link (upper arm 1218 and 1220), a second link (forearm 1222 and 1224) and a third link (end-effector 1226 and 1228). ) is composed of The joint-to-joint length of the second link is shown as being smaller than the joint-to-joint length of the first link. The lateral offset of the third link 1230, 1232 corresponds to the difference between the joint-to-joint length of the forearm and the joint-to-joint length of the upper arm, and the additional offset, which corresponds to the difference between the two arms are added to the offset 1234 between. The offset 1234 may correspond to a nominal center distance between substrates in a two station process module, where the lateral offsets 1230 and 1232 may be half the total center distance 1234 . Arms 1214, 1216 can be extended or retracted without interfering with anything physically within gap G, for example without interfering with chamber material between slit valves in a quad application. The offsets 1230 and 1232 combined with the shorter forearms form the gap. Alternatively, any suitable offset(s) may be provided. Here, end effectors 1228 and 1226 can extend and contract nominally parallel to each other and nominally without rotation. Since the end effectors 1228 and 1226 are also independently positionable, the substrates thereon can be independently positioned or picked. Referring also to FIGS. 68A-68B , top views of an example substrate transfer robot 1200 are shown. FIG. 68A shows the robot 1200 retracted, while FIG. 68B shows the robot 1200 extended. The described robot 1200 is equipped with independently positionable arms 1214 and 1216 . In an alternative embodiment, arms 1214 and 1216 may be driven by two concentric shafts and may be dependent on each other. An example drive configuration is described with respect to FIG. 80B , where two coaxial sets of drive shafts drive two sets of arms. Here, as an example, one of the concentric drive shafts may be provided to drive the arms 1214 and 1216. Referring also to Figs. 67A-67C, an alternative robot configuration 1200' is shown. The robot 1200' is equipped with arms 1214' and 1216', and the robot 1200' may have features similar to those of the robot 1200. Here, the arms of the robot 1200' can extend and contract independently, but rotate together. Instead of a four concentric axis drive, the robot 1200' utilizes a drive with three concentric axes. A suitable drive and pulley configuration is shown with respect to FIGS. 23 and 24 or 33 and 34 . In alternative aspects any suitable drive and pulley configuration may be provided, for example wherein the upper arms are constrained to each other as disclosed herein.

Referring to FIG. 69A , a schematic plan view of an exemplary substrate transfer robot 1300 is shown. The robot 1300 may be vacuum compatible or may be any suitable robot having a driving part 1310 and an arm part 1312 coupled to the driving part 1310, as described below. As will be explained in more detail. Throughout the illustrated embodiments, the upper arm link lengths and forearm link lengths can be different and can be driven by circular or non-circular pulleys. In alternative aspects, arms with identical link lengths or arms with different link lengths, equipped with circular pulleys or other suitable drive arrangements may be provided. 69A and 69B show top and side views of robot 1300 with arm 1312, respectively. The drive unit 1310 may be provided with four concentric drive shafts so that the first part 1314 and the second part 1316 of the arm 1312 can be independently driven. Here, arm 1312 features two independent linkages, an upper linkage 1314 and a lower linkage 1316 . The upper linkage 1314 can be driven by the two innermost drive shafts of the drive unit 1310, and the lower linkage 1316 can be driven by the two outermost drive shafts of the drive unit 1310. can be driven by The linkages are shown in a retracted position in FIG. 69A. Each of the two linkages 1314 and 1316 includes a first link (upper arm 1318 and 1320), a second link (forearm 1322 and 1324) and a third link (end-effector 1326 and 1328). ) is composed of The joint-to-joint length of the second link is less than the joint-to-joint length of the first link. The lateral offset of the third links 1330 and 1332 corresponds to the difference between the joint-to-joint length of the forearm and the joint-to-joint length of the upper arm. The third link may be shaped to provide space for the two innermost drive shafts 1334 .

Referring also to FIGS. 70A and 70B , an example internal configuration used to drive the individual links of each linkage is shown. The configuration will be described with respect to the upper linkage. An equivalent arrangement may be used for the lower linkage. The upper arm 1318 of the upper linkage 1314 may be driven by one motor 1350 . The forearm 1322 of the upper linkage 1314 may be driven by another motor 1352 through a band driving device 1354 equipped with common pulleys. The third link with end-effector 1326 can be constrained by a band drive 1356 with at least one non-circular pulley, which compensates for the effect of different lengths of the upper and forearm arms. Regardless of the position of the two first links, the end-effector is radially oriented. The design of the band driving device may be as shown in FIGS. 1 to 4 . In order for the upper linkage to rotate, both drive shafts associated with the linkage need to move the same amount in the rotational direction of the linkage. In order for the end-effector to extend and contract radially along a straight path, the two drive shafts need to move in a coordinated manner according to inverse kinematic equations, e.g. . Any suitable arm configuration with offset end-effectors in alternative aspects, for example as disclosed with respect to FIGS. 66-68 or otherwise, may be used.

Referring also to FIGS. 71A and 71B , another example internal configuration used to drive the individual links of each linkage is shown. Again, the configuration will be described for the upper linkage 1314'. An equivalent configuration may be used for the lower linkage. Here, the upper arm 1318 of the upper linkage 1314' is driven by one motor 1350. The forearm 1322 of the upper linkage 1314' is coupled to another motor 1352 via a band configuration 1354' with at least one non-circular pulley. The band drive device 1354' is designed such that rotation of the upper arm causes the wrist joint to extend and contract along a straight line parallel to the desired radial path of the end-effector. The third link with the end-effector 1326 can be constrained by a band drive device 1356' with at least one non-circular pulley, so that the end effector 1326 is independent of the position of the two first links. -The effector is oriented radially. The band drives may be designed according to FIGS. 5 to 8 . Both drive shafts coupled to the linkage to cause the upper linkage 1314' to rotate can move the same amount in the rotational direction of the linkage. A drive shaft coupled to the upper arm of the upper linkage while the other motor coupled to the upper linkage remains stationary, causes the end-effector 1326 to extend and contract radially along a straight path according to Eq. to the inverse kinematic equations as given in Equations 2.15. Any suitable driving configuration may be provided in alternative aspects.

Figures 72a-72c and 73a-73c illustrate the independent operation of the two linkages of the robot of Figure 69. In particular, in 72a to 72c and 73a to 73c, independent rotational and extensional movements of the two interlocking units 1314 and 1316 are shown. 72A to 72C illustrate the rotational motion of the upper linkage 1314 of the robot 1300 of FIG. 69 . 72A shows a top view of the robot with both linkages in a retracted position. 72B shows a top view of the robot with the upper linkage 1314 rotated clockwise by 90 degrees. 72C shows a top view of the robot with the upper linkage 1314 rotated by 180 degrees. In Figures 73a to 73c, the extension movement of the robot 1300 of Figure 69 is drawn. 73A shows a top view of the robot with both linkages in a retracted position. 73B shows a top view of the robot with the upper linkage 1314 partially extended. 73C shows a top view of the robot with the upper linkage 1314 in an extended position.

An alternative illustrative aspect of the disclosed embodiment is shown in FIGS. 74A and 74B , where a robot 1450 is shown with a drive unit 1310 and an arm 1452 . Here, the two linkages 1454 and 1456 of the arm 1452 can be configured according to Figs. 74a and 74b, which show a top view and a side view of the robot 1450. Here, the drive unit 1310 of the robot is provided with four concentric drive shafts. The arm 1452 features two independent linkages, an upper linkage 1454 and a lower linkage 1456. The upper linkage 1454 can be driven by the two innermost drive shafts 1334 and the lower linkage can be driven by the two outermost drive shafts of the drive unit 1310 . The linkages are shown in a retracted position in FIG. 74A. Each of the two linkages 1454 and 1456 includes a first link (upper arm 1458 and 1460), a second link (forearm 1462 and 1464) and a third link (end-effector 1466 and 1468). ) can be configured. A joint-to-joint length of the second link may be smaller than a joint-to-joint length of the first link. The lateral offset 1470 of the third link corresponds to the difference between the forearm joint-to-joint length and the upper arm joint-to-joint length. The third link may be shaped to provide space for the two innermost drive shafts 1334 .

75A and 75B show example internal configurations used to drive the individual links of each linkage. The configuration will be described for the upper linkage 1454. An equivalent configuration may be used for the lower linkage 1456. Upper arm 1458 of upper linkage 1454 may be driven by one motor 1350 . The forearm 1362 of the upper linkage 1454 may be driven by another motor 1352 through a band driving device 1472 equipped with common pulleys. The third link with end-effector 1466 can be constrained by a band drive 1474 with at least one non-circular pulley, which compensates for the effect of the different lengths of the upper and forearm arms to The end-effector is radially oriented regardless of the position of the first links. The design of the band drive device may be according to FIGS. 1 to 4 . In order for the upper linkage 1454 to rotate, both drive shafts coupled to the linkage need to move the same amount in the rotational direction of the linkage. In order for the end-effector to extend and contract radially along a straight path, the two drive shafts need to move in a coordinated manner according to the inverse kinematic equations given in Equations 1.8 to 1.16.

76A and 76B show another exemplary internal configuration used to drive the individual links of each linkage. Here, the configuration will be described for the upper linkage 1454. An equivalent configuration may be used for the lower linkage 1456. The upper arm 1458 of the upper linkage may be driven by a single motor 1350 . The forearm 1462 of the upper linkage 1454 can be coupled to another motor 1352 through a band configuration 1472' with at least one non-circular pulley. The band drive mechanism is designed such that rotation of the upper arm 1458 causes the wrist joint to extend and contract along a straight line parallel to the desired radial path of the end-effector 1466 . The third link with the end-effector 1466 is constrained by a band drive with at least one non-circular pulley, so that regardless of the position of the two first links, the end-effector rotates radially. Headed. The band drives may be designed according to FIGS. 5 to 8 . Both drive shafts coupled to the linkage to cause the upper linkage 1454 to rotate can move the same amount in the rotational direction of the linkage. A drive shaft coupled to the upper arm of the upper linkage while the other motor coupled to the upper linkage remains stationary, causes the end-effector 1466 to extend and contract radially along a straight path according to Eq. to the inverse kinematic equations as given in Equations 2.15.

77A-77C and 78A-78C illustrate independent operation of the two linkages 1454 and 1456 of the robot of FIGS. 74A and 74B. In particular, FIGS. 77A-77C and 78A-78C show independent rotational and extensional movements of the two linkages 1454 and 1456 . 77A to 77C illustrate the rotational motion of the upper linkage of the robot. 77A shows a top view of the robot with both linkages in a retracted position. 77B shows a top view of the robot with the upper linkage 1454 rotated clockwise by 90 degrees. 77C shows a top view of the robot with the upper linkage 1454 rotated by 180 degrees. Figures 78a to 78c show the extension movement of the robot of Figures 74a and 74b. 78A shows a top view of the robot with both linkages in a retracted position. 78B shows a top view of the robot with the upper linkage partially extended. 78C shows a top view of the robot with the upper linkage 1454 in an extended position (but not fully extended).

Alternative embodiments of the above dual linkage configurations may also be provided. The first link may be driven directly by a motor or through any kind of coupling or transmission arrangement. Any delivery ratio may be used. As another example, the band drives that actuate the second link can be configured in any other configuration with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the foregoing. can be replaced by Similarly, the band drive restraining the third link may be replaced by any other suitable configuration, such as a belt drive, cable drive, non-circular gears, linkage-based mechanism, or any combination of the foregoing. . The end-effector here need not be radially oriented. The end effector may be positioned with any suitable offset relative to the third link and oriented in any suitable direction. Also, the third link may have more than one end-effector. Any suitable number of end-effectors and/or material holders may be carried by the third link. As another example, any sequence of vertical arrangements of individual links and end-effectors may be used. For example, an end-effector of an upper linkage may be disposed over the upper linkage as opposed to being sandwiched between the two linkages.

Referring now to FIGS. 79A and 79B , top and side views of a robot 1550 with arms 1552 and drives 1310 are shown. The drive unit 1310 is provided with four concentric drive shafts. The arm features two independent linkage pairs, an upper linkage pair 1554 and a lower linkage pair 1556. The upper linkage pair 1554 is driven by the two innermost drive shafts 1334 and the lower linkage pair is driven by the two outermost drive shafts. The linkages are shown in a retracted position in FIG. 79A. Each of the two linkages 1554 and 1556 is composed of two linkages, a left linkage 1558 and 1560 and a right linkage 1562 and 1564. Each of the linkages includes a first link (upper arm), a second link (forearm) and a third link (end-effector). The joint-to-joint length of the second link is less than the joint-to-joint length of the first link. A difference between the joint-to-joint length of the second link and the joint-to-joint length of the first link is selected such that the second link passes without touching the drive shafts of the drive unit.

80A and 80B show an example internal configuration used to drive the individual links of each linkage. Here, the configuration will be described for the upper linkage pair 1554. Equivalent configurations may be used for the lower linkage pair 1556. For clarity of the side view, the forearms (and end-effectors) of the upper linkage pair are drawn at different elevations (although they can be placed in the same horizontal plane). Similarly the forearms of the lower linkage pair are drawn at different elevations in side view. The upper arm 1570 of the upper left linkage 1558 is driven by a first drive shaft 1572 and the upper arm 1574 of the upper right linkage 1562 is driven by a second drive shaft 1576 do. The forearm 1578 of the left upper linkage 1558 is driven by the second drive shaft 1576 through a band drive device 1580 equipped with at least one non-circular pulley. Similarly, the forearm 1582 of the right upper linkage 1562 is driven by the first drive shaft 1572 through a band drive device 1584 equipped with at least one non-circular pulley. Circular pulleys may be used in alternative aspects, for example provided with equal link lengths. In the band drive devices of the two forearms, when the first drive shaft 1572 and the second drive shaft 1576 rotate equally in opposite directions, the wrist joint of the left linkage and the wrist joint of the right linkage are They are designed to move along straight paths parallel to each other. The third link/end-effector 1586 of the left upper linkage 1558 is constrained by a band drive 1558 with at least one non-circular pulley, which is the left upper linkage 1558. Regardless of the position of the two first links 1570, 1578 of the left upper linkage 358, the end-effector ( 1586) is directed radially. The design of the band drive device may be according to FIGS. 1 to 4 . Similarly, the third link/end-effector 1590 of the upper right linkage 1562 can be constrained by a band drive 1592 with at least one non-circular pulley, which is the upper right linkage. Regardless of the position of the two first links of the right upper linkage, the end-effector is radially oriented by compensating for the effect of the different lengths of the upper and forearm of the linkage. Circular pulleys may be used in alternative aspects, for example provided with equal link lengths. Again, this band drive can be designed according to FIGS. 1 to 4 . To cause the upper linkage pair to rotate, the first drive shaft and the second drive shaft can rotate in sync in a desired rotational direction of the upper linkage pair. The two drive shafts can rotate simultaneously in opposite directions so that the end-effectors of the upper linkage pair extend and contract along straight paths.

81A-81C and 82A-82C illustrate the independent actuation of the two linkage pairs of the robot of FIGS. 79A and 79B. In particular, FIGS. 81a to 81c and 82a to 82c show independent rotational and extensional movements of the two linkage pairs. 81A-81C illustrate the rotational motion of the upper linkage pair 1554 of the robot. 81A shows a top view of the robot with both linkage pairs in a retracted position. 81B shows a top view of the robot with the upper linkage pair 1554 rotated 45 degrees clockwise. 81C shows a top view of the robot with the upper linkage pair rotated by 180 degrees. 82a to 82c show the extension movement of the robot. 82A shows a top view of the robot with both linkage pairs in a retracted position. 82B shows a top view of the robot with the upper linkage pair partially extended. The extension shown in FIG. 82A corresponds approximately to the maximum extension of a conventional solution with rigidly coupled side-by-side end-effectors. As shown in FIG. 82C, this embodiment allows the linkages, in this particular example the upper linkage pair, to extend well beyond this point, thereby providing a longer reach from the same containment volume. .

Alternatively, the linkages can be arranged according to FIGS. 83A and 83B , which show top and side views of robot 1650 . Here, the robot 1650 may have features as described with respect to FIGS. 79A and 79B with an upper arm pair 1554 and a lower arm pair 1556'. However, in this embodiment, the right upper arm of the lower arm pair 1556' is positioned below the left upper arm of the lower arm pair.

Any suitable quadruple linkage configuration may be provided in alternative embodiments. By way of example, the first link may be driven directly by a motor or through any kind of coupling or transmission arrangement. Any delivery ratio may be used here. Alternatively, the band drives actuating the second link may be by any other configuration with equivalent functionality, such as a belt drive, cable drive, gear drive, linkage-based mechanism, or any combination of the foregoing. can be replaced Similarly, the band drive restraining the third link may be replaced by any other suitable arrangement, such as a belt drive, cable drive, non-circular gears, linkage-based mechanism, or any combination of the foregoing. there is. Moreover, the end-effectors may be positioned with any suitable offset and oriented in any suitable direction. Alternatively, the third link may carry more than one end-effector. Any suitable number of end-effectors and/or material holders may be carried by the third link of any of the linkages. As an example, a configuration 1700 suitable for the manufacture of solar cells is depicted in FIGS. 83-86, where multiple substrates are supported by each end effector. Here, any vertical arrangement of individual links and end-effectors may be used. For example, an end-effector carried by the upper linkage pair may be disposed over the upper linkage pair as opposed to being sandwiched between the lower linkage pair and the upper linkage pair.

The double-arm configuration and quad-arm configuration described above may be driven by a robot drive unit having four concentric axes of rotation, for example as described above and illustrated in the drawings. The robot drive unit may further include a common vertical lift axis 1750 as schematically depicted in FIGS. 87A and 87B. Alternatively, the robot drive unit may include two independent vertical lift axes 1750a and 1750b, as shown schematically in FIGS. 88A-B and 89A-B. In this case each vertical axis is coupled to one of the two linkages of a double linkage configuration or to one of the two linkage pairs of a quadruple linkage configuration. 88A-B, lift shafts 1750a and 1750b are independently coupled to rotary drive units 1806 and 1808, where lift shafts 1750a and 1750b are provided with independently rotatable lead screws. Similarly, in FIGS. 89A-B lift axes 1750a' and 1750b' are independently coupled to rotary drive units 1806' and 1808', where lift axes 1750a' and 1750b' share a common They share a fixed lead screw.

90A and 90B show exemplary schematic depictions of top and side views of a vacuum chamber 1900, which includes independent robotic arms driven by non-collocated drive units. (1802, 1904). In the example of FIGS. 90A and 90B each drive unit may be provided with three rotation axes and an optional vertical lift axis. Each robot arm may consist of a first link (upper arm), a second link (forearm) and a third link with an end-effector. As depicted in the figure, the joint-to-joint length of the second link may be smaller than that of the joint-to-joint link of the first link. Each of the three links may be driven by one of the rotational axes of the corresponding robot driving unit. In general, any number of rotational axes and links may be employed. The two robot arms and drive units of FIGS. 90A and 90B can reach above and/or below each other and approach any station attached to the vacuum chamber to It may be configured to transfer/remove material from/to the station. Alternatively, each of the two drive units 1902', 1904' as schematically shown in FIGS. 91A and 91B may feature an extension member, which extends the drive unit It is possible to transmit a rotational motion from rotational axes to a given point in the vacuum chamber. Whereas the elongate member may remain stationary in a horizontal plane, the elongate member may move vertically if the corresponding drive unit is mounted by means of a vertical lift shaft. As illustrated in the example of FIGS. 91A and 91B a standard robotic arm can be driven by each of the elongate members. For example each drive unit with an elongate member may provide two rotation axes and an optional vertical lift axis. Then each of the robot arms may consist of a first link (upper arm), a second link (forearm) and a third link with an end-effector. In the example of FIGS. 91A and 91B the two first links are driven by the two rotational axes of the corresponding drive unit and the third link is mechanically constrained to keep the end-effector radially oriented. Although three-link arms are shown in FIGS. 91A and 91B , the arms may consist of any suitable number of links. In an alternative embodiment, any suitable combination of the arm configurations and units of FIGS. 90A and 90B and 91A and 91B or other may be used. According to another example, a non-transitory program storage device readable by a machine may be provided, in which a program of instructions executable by a machine to perform operations is tangible, such as a memory ( 1951'), where the operations include any of the operations performed by a controller as described herein. The methods described above may be performed or controlled at least in part by the processor 1951, the memory 1951', and the software 1951''.

It should be understood that the foregoing description is only an exemplary description. Various alternatives and modifications can be devised by those skilled in the art. Accordingly, this embodiment is intended to encompass all such alternatives, modifications, and variances. For example, the features recited in the various dependent claims may be combined with one another in any suitable combination(s). Additionally, features from different embodiments described above may be selectively combined into a new embodiment. Accordingly, this specification is intended to embrace all such alternatives, modifications and variations falling within the scope of the appended claims.

Claims (20)

robot driving unit;
an upper arm connected to the robot drive unit;
a plurality of forearms including a first forearm and a second forearm and connected to the upper arm;
a first end effector positioned in a first horizontal plane and having two spaced apart first substrate support regions, the first end effector coupled to the first forearm;
a second end-effector having two spaced apart second substrate support regions positioned in another second horizontal plane and connected to the second forearm;
The robot drive unit, the upper arm, the first forearm, and the second forearm hold the first end-effector and the second end-effector in a position in which the two spaced apart first substrate support areas are stacked on the two spaced apart second substrate support areas. In the positioned state, the device is configured to position in retracted positions. According to claim 1,
The upper arm includes a first upper arm and a second upper arm, a first end of the first upper arm is rotatably connected to the robot driving unit, and a first end of the second upper arm is rotatably connected to the robot driving unit. wherein the first upper arm and the second upper arm can be rotated independently relative to each other by means of a robot drive. According to claim 2,
wherein the first forearm is connected to the second end of the first upper arm and the second forearm is connected to the second end of the second upper arm. According to claim 1,
The first end effector has a base section and two extensions from both ends of the base section, a first of the two spaced apart first substrate supporting areas is located at an end of the first of the extensions and includes two spaced apart first substrate supporting areas. The apparatus of claim 1 , wherein a second one of the regions is located at an end of a second one of the extensions, and a gap is provided between the two first substrate support regions and between the two extensions. According to claim 4,
wherein the base section of the first end effector is rotatably connected to the first forearm at a position closer to the first extension than to the second extension. According to claim 2,
wherein the first and second forearms are located in the same horizontal plane. According to claim 6,
wherein the second end-effector has a gap, the gap adapted to permit a substrate on the first end-effector to pass through the gap. According to claim 1,
The upper arm has a general V shape, the middle section of the general V shape is connected to the robot drive, the first forearm is connected to the first end of the general V shape, and the second forearm is connected to the first end of the general V shape. Device, connected at 2 ends. According to claim 1,
wherein the robot drive, the upper arm, and the first forearm and the second forearm are configured to extend the first and second endeffectors along a straight path from retracted positions in a translational movement without rotation while being stretched. . According to claim 1,
The apparatus of claim 1 , wherein the robot drive has coaxial drive shafts connected to the upper arm and the first forearm and the second forearm. According to claim 1,
wherein the first end effector is positioned on top of the first forearm and the second end effector is positioned on the bottom of the second forearm. According to claim 11,
wherein the first end effector and the second end effector are located in planes between the first forearm and the second forearm. According to claim 2,
wherein the second upper arm is located in a plane between the first upper arm and the first forearm. According to claim 2,
The second upper arm is positioned on a plane between the first upper arm and the first forearm, and the first forearm is connected to the upper arm with a gap between the first upper arm and the second upper arm to move a part of the second upper arm within the gap. device that can. connecting the upper arm to the robot drive unit;
connecting a plurality of forearms including a first forearm and a second forearm to the upper arm;
connecting a first end effector having two spaced apart first substrate support regions positioned in a first horizontal plane to the first forearm;
connecting a second end-effector to the second forearm, the second end-effector having two spaced apart second substrate support regions positioned in another second horizontal plane;
The first end-effector and the second end-effector are formed by moving the upper arm, the first forearm, and the second forearm relative to each other, the two spaced apart first substrate supporting areas and the two spaced apart second substrate supporting areas. while positioned in the overstowed position, positioning in retracted positions. According to claim 15,
moving the robot drive to move the upper arm and the first forearm so that the first end effector is extended along a straight path from the retracted positions in a translational motion without rotation while the first end effector is extended. According to claim 15,
The first end effector has a base section and two extensions from both ends of the base section, a first of the two spaced apart first substrate supporting areas is located at an end of the first of the extensions and includes two spaced apart first substrate supporting areas. A second one of the regions is located at an end of a second one of the extensions, a gap is provided between the two first substrate support regions and between the two extensions, and the connection of the first end effector to the first forearm is connected to the first end effector. and rotatably connecting the base section of the first forearm to the first forearm at a location closer to the first extension than to the second extension. According to claim 15,
wherein the first forearm and the second forearm are positioned in the same horizontal plane. According to claim 15,
wherein the second end-effector has a gap, the gap adapted to allow a substrate on the first end-effector to pass through the gap. According to claim 15,
The upper arm has a general V shape, the middle section of the general V shape is connected to the robot drive, the first forearm is connected to the first end of the general V shape, and the second forearm is connected to the first end of the general V shape. 2 connected at the end, way.

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