JP5152874B2 - 光検出器の製造方法 - Google Patents
光検出器の製造方法 Download PDFInfo
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- JP5152874B2 JP5152874B2 JP2010047582A JP2010047582A JP5152874B2 JP 5152874 B2 JP5152874 B2 JP 5152874B2 JP 2010047582 A JP2010047582 A JP 2010047582A JP 2010047582 A JP2010047582 A JP 2010047582A JP 5152874 B2 JP5152874 B2 JP 5152874B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 149
- 229910052732 germanium Inorganic materials 0.000 claims description 74
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 73
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 64
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 62
- 229910052710 silicon Inorganic materials 0.000 claims description 52
- 239000010703 silicon Substances 0.000 claims description 52
- 230000003647 oxidation Effects 0.000 claims description 14
- 238000007254 oxidation reaction Methods 0.000 claims description 14
- 238000005229 chemical vapour deposition Methods 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 7
- 238000005253 cladding Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 230000003213 activating effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 46
- 230000003287 optical effect Effects 0.000 description 18
- 239000000758 substrate Substances 0.000 description 14
- 239000007789 gas Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 230000010354 integration Effects 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Description
Claims (4)
- 酸化シリコンからなる下部クラッド層の上にシリコンからなるシリコンコアを形成する第1工程と、
一部の前記シリコンコアに第1導電型の不純物を導入して第1導電型領域を形成する第2工程と、
前記シリコンコアの表面を熱酸化することで、前記シリコンコアの表面に熱酸化膜を形成する第3工程と、
前記下部クラッド層の上に前記熱酸化膜が形成された前記シリコンコアを覆うように酸化シリコンおよび酸窒化シリコンより選択された材料から構成された上部クラッド層を形成する第4工程と、
前記シリコンコアの前記第1導電型領域の一部が露出する開口部を前記上部クラッド層および前記熱酸化膜に形成する第5工程と、
前記第1導電型領域の露出部に接してゲルマニウム層を選択的に形成する第6工程と、
前記ゲルマニウム層の上層に第2導電型の不純物を導入して第2導電型領域を形成し、前記第1導電型領域,前記ゲルマニウム層,および前記第2導電型領域より構成されたゲルマニウム受光器を形成する第7工程と
を少なくとも備え、
前記上部クラッド層は、前記シリコンコアの熱酸化が抑制される温度条件の範囲で形成する
ことを特徴とする光検出器の製造方法。 - 請求項1記載の光検出器の製造方法において、
前記第2工程における第1導電型領域の活性化のための加熱処理と、前記第3工程における熱酸化のための加熱処理とを、同一の装置内で連続的に行うことを特徴とする光検出器の製造方法。 - 請求項1または2記載の光検出器の製造方法において、
前記上部クラッド層は、CVD法で形成することを特徴とする光検出器の製造方法。 - 請求項3記載の光検出器の製造方法において、
前記CVD法は、ECRプラズマCVD法であることを特徴とする光検出器の製造方法。
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JP2010047582A JP5152874B2 (ja) | 2010-03-04 | 2010-03-04 | 光検出器の製造方法 |
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JP2010047582A JP5152874B2 (ja) | 2010-03-04 | 2010-03-04 | 光検出器の製造方法 |
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JP2011180555A JP2011180555A (ja) | 2011-09-15 |
JP5152874B2 true JP5152874B2 (ja) | 2013-02-27 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9837566B2 (en) | 2015-01-05 | 2017-12-05 | Samsung Electronics Co., Ltd. | Photodiodes including seed layer |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5761754B2 (ja) * | 2011-10-06 | 2015-08-12 | 日本電信電話株式会社 | 光モジュールおよびその製造方法 |
JP6130284B2 (ja) * | 2013-10-30 | 2017-05-17 | 日本電信電話株式会社 | 光導波路の作製方法 |
JP2015118372A (ja) * | 2013-12-19 | 2015-06-25 | アイメックImec | 放射線カプラ |
KR102279162B1 (ko) * | 2015-03-03 | 2021-07-20 | 한국전자통신연구원 | 게르마늄 온 인슐레이터 기판 및 그의 형성방법 |
JP6774792B2 (ja) * | 2016-06-22 | 2020-10-28 | 旭化成エレクトロニクス株式会社 | 赤外線デバイス |
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US6897498B2 (en) * | 2003-03-31 | 2005-05-24 | Sioptical, Inc. | Polycrystalline germanium-based waveguide detector integrated on a thin silicon-on-insulator (SOI) platform |
JP4091476B2 (ja) * | 2003-05-20 | 2008-05-28 | 日本電信電話株式会社 | 光検出器及び光検出器内蔵シリコン光導波路 |
JP2008140808A (ja) * | 2006-11-30 | 2008-06-19 | Kazumi Wada | 光検出器 |
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Cited By (1)
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US9837566B2 (en) | 2015-01-05 | 2017-12-05 | Samsung Electronics Co., Ltd. | Photodiodes including seed layer |
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