JP5136278B2 - シリコン単結晶の製造方法 - Google Patents

シリコン単結晶の製造方法 Download PDF

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JP5136278B2
JP5136278B2 JP2008209793A JP2008209793A JP5136278B2 JP 5136278 B2 JP5136278 B2 JP 5136278B2 JP 2008209793 A JP2008209793 A JP 2008209793A JP 2008209793 A JP2008209793 A JP 2008209793A JP 5136278 B2 JP5136278 B2 JP 5136278B2
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silicon
single crystal
quartz crucible
silicon single
pulling
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JP2010042968A (ja
JP2010042968A5 (enExample
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純 古川
裕文 榎本
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Sumco Corp
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Sumco Corp
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JP2008209793A 2008-08-18 2008-08-18 シリコン単結晶の製造方法 Active JP5136278B2 (ja)

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JP2008209793A JP5136278B2 (ja) 2008-08-18 2008-08-18 シリコン単結晶の製造方法

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JP2008209793A JP5136278B2 (ja) 2008-08-18 2008-08-18 シリコン単結晶の製造方法

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JP2010042968A JP2010042968A (ja) 2010-02-25
JP2010042968A5 JP2010042968A5 (enExample) 2011-09-22
JP5136278B2 true JP5136278B2 (ja) 2013-02-06

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6451333B2 (ja) * 2015-01-14 2019-01-16 株式会社Sumco シリコン単結晶の製造方法
KR101733698B1 (ko) 2015-11-30 2017-05-08 한국세라믹기술원 용액성장용 도가니 및 도가니 내의 용액성장 방법
JP7359720B2 (ja) 2020-02-28 2023-10-11 信越石英株式会社 測定冶具及び測定方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003104711A (ja) * 2001-09-28 2003-04-09 Mitsubishi Materials Polycrystalline Silicon Corp ルツボ型多結晶シリコン
US6605149B2 (en) * 2002-01-11 2003-08-12 Hemlock Semiconductor Corporation Method of stacking polycrystalline silicon in process for single crystal production
JP4454003B2 (ja) * 2002-07-05 2010-04-21 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 単結晶引上げ装置の原料供給装置
JP4699872B2 (ja) * 2005-11-09 2011-06-15 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 単結晶の製造方法
JP2009018967A (ja) * 2007-07-12 2009-01-29 Sharp Corp 固体原料融解方法および結晶成長方法

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