JP2010042968A5 - - Google Patents

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Publication number
JP2010042968A5
JP2010042968A5 JP2008209793A JP2008209793A JP2010042968A5 JP 2010042968 A5 JP2010042968 A5 JP 2010042968A5 JP 2008209793 A JP2008209793 A JP 2008209793A JP 2008209793 A JP2008209793 A JP 2008209793A JP 2010042968 A5 JP2010042968 A5 JP 2010042968A5
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JP
Japan
Prior art keywords
silicon
single crystal
quartz crucible
silicon single
diameter
Prior art date
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Application number
JP2008209793A
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English (en)
Japanese (ja)
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JP2010042968A (ja
JP5136278B2 (ja
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Priority to JP2008209793A priority Critical patent/JP5136278B2/ja
Priority claimed from JP2008209793A external-priority patent/JP5136278B2/ja
Publication of JP2010042968A publication Critical patent/JP2010042968A/ja
Publication of JP2010042968A5 publication Critical patent/JP2010042968A5/ja
Application granted granted Critical
Publication of JP5136278B2 publication Critical patent/JP5136278B2/ja
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JP2008209793A 2008-08-18 2008-08-18 シリコン単結晶の製造方法 Active JP5136278B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008209793A JP5136278B2 (ja) 2008-08-18 2008-08-18 シリコン単結晶の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008209793A JP5136278B2 (ja) 2008-08-18 2008-08-18 シリコン単結晶の製造方法

Publications (3)

Publication Number Publication Date
JP2010042968A JP2010042968A (ja) 2010-02-25
JP2010042968A5 true JP2010042968A5 (enExample) 2011-09-22
JP5136278B2 JP5136278B2 (ja) 2013-02-06

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ID=42014682

Family Applications (1)

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JP2008209793A Active JP5136278B2 (ja) 2008-08-18 2008-08-18 シリコン単結晶の製造方法

Country Status (1)

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JP (1) JP5136278B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6451333B2 (ja) * 2015-01-14 2019-01-16 株式会社Sumco シリコン単結晶の製造方法
KR101733698B1 (ko) 2015-11-30 2017-05-08 한국세라믹기술원 용액성장용 도가니 및 도가니 내의 용액성장 방법
JP7359720B2 (ja) 2020-02-28 2023-10-11 信越石英株式会社 測定冶具及び測定方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003104711A (ja) * 2001-09-28 2003-04-09 Mitsubishi Materials Polycrystalline Silicon Corp ルツボ型多結晶シリコン
US6605149B2 (en) * 2002-01-11 2003-08-12 Hemlock Semiconductor Corporation Method of stacking polycrystalline silicon in process for single crystal production
JP4454003B2 (ja) * 2002-07-05 2010-04-21 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 単結晶引上げ装置の原料供給装置
JP4699872B2 (ja) * 2005-11-09 2011-06-15 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 単結晶の製造方法
JP2009018967A (ja) * 2007-07-12 2009-01-29 Sharp Corp 固体原料融解方法および結晶成長方法

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