JP2010042968A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010042968A5 JP2010042968A5 JP2008209793A JP2008209793A JP2010042968A5 JP 2010042968 A5 JP2010042968 A5 JP 2010042968A5 JP 2008209793 A JP2008209793 A JP 2008209793A JP 2008209793 A JP2008209793 A JP 2008209793A JP 2010042968 A5 JP2010042968 A5 JP 2010042968A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- single crystal
- quartz crucible
- silicon single
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- 239000013078 crystal Substances 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008209793A JP5136278B2 (ja) | 2008-08-18 | 2008-08-18 | シリコン単結晶の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008209793A JP5136278B2 (ja) | 2008-08-18 | 2008-08-18 | シリコン単結晶の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010042968A JP2010042968A (ja) | 2010-02-25 |
| JP2010042968A5 true JP2010042968A5 (enExample) | 2011-09-22 |
| JP5136278B2 JP5136278B2 (ja) | 2013-02-06 |
Family
ID=42014682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008209793A Active JP5136278B2 (ja) | 2008-08-18 | 2008-08-18 | シリコン単結晶の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5136278B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6451333B2 (ja) * | 2015-01-14 | 2019-01-16 | 株式会社Sumco | シリコン単結晶の製造方法 |
| KR101733698B1 (ko) | 2015-11-30 | 2017-05-08 | 한국세라믹기술원 | 용액성장용 도가니 및 도가니 내의 용액성장 방법 |
| JP7359720B2 (ja) | 2020-02-28 | 2023-10-11 | 信越石英株式会社 | 測定冶具及び測定方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003104711A (ja) * | 2001-09-28 | 2003-04-09 | Mitsubishi Materials Polycrystalline Silicon Corp | ルツボ型多結晶シリコン |
| US6605149B2 (en) * | 2002-01-11 | 2003-08-12 | Hemlock Semiconductor Corporation | Method of stacking polycrystalline silicon in process for single crystal production |
| JP4454003B2 (ja) * | 2002-07-05 | 2010-04-21 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 単結晶引上げ装置の原料供給装置 |
| JP4699872B2 (ja) * | 2005-11-09 | 2011-06-15 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 単結晶の製造方法 |
| JP2009018967A (ja) * | 2007-07-12 | 2009-01-29 | Sharp Corp | 固体原料融解方法および結晶成長方法 |
-
2008
- 2008-08-18 JP JP2008209793A patent/JP5136278B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Uecker | The historical development of the Czochralski method | |
| CN202246997U (zh) | 一种双层坩埚 | |
| EP2636511A4 (en) | Modeling material for forming photoshaped article by ink-jet photoshaping method, support material for shape supporting during formation of photoshaped article by the photoshaping method, and process for producing photoshaped article by the photoshaping method | |
| EP2194166A4 (en) | QUARTZ GLASS LEVER, PROCESS FOR ITS MANUFACTURE AND PRODUCTION PROCESS | |
| EP2172432A4 (en) | METHOD FOR PRODUCING A QUARTZ GLASS TAIL AND DEVICE FOR PRODUCING THE QUARTZ GLASS TIEGEL | |
| DE602008005099D1 (de) | Hochreiner Quarzglastiegel zum Ziehen eines Einkristall-Siliciumblocks mit großem Durchmesser sowie Herstellungsverfahren | |
| EP2311585A4 (en) | THROUGHING GUSS PLATE AND METHOD FOR THE PRODUCTION THEREOF | |
| GB0708282D0 (en) | Production of single-crystal semiconductor material using a nanostructure template | |
| WO2012031022A3 (en) | High aspect ratio parts of bulk metallic glass and methods of manufacturing thereof | |
| DE602008004297D1 (de) | Hochreiner glasartiger Quarztiegel zum Ziehen eines Einkristall-Siliciumblocks mit großem Durchmesser | |
| PL394857A1 (pl) | Sposób amonotermalnego wytwarzania kryształów ciągnionych azotku galu na dużą skalę | |
| EP2067744A3 (en) | Method for manufacturing polycrystalline silicon | |
| EP2399879A4 (en) | REFRACTORY CARBON MATERIAL, METHOD FOR ITS PRODUCTION AND OVEN FLOOR OR SIDE WALL FOR A COMBUSTION OVEN | |
| JP2014521585A5 (enExample) | ||
| WO2009054529A1 (ja) | 石英ガラスルツボとその製造方法およびその用途 | |
| Rege et al. | Trace-element patterns of fibrous and monocrystalline diamonds: Insights into mantle fluids | |
| GB201208611D0 (en) | Improved production of crystalline silicon | |
| EP2138505A4 (en) | METHOD FOR PRODUCING HIGH-PURITY SOLUBLE THROMBOMODULINE | |
| EP2173658A4 (en) | PROCESS FOR PRODUCING HIGH PURITY ELEMENTARY SILICON | |
| JP2013014102A5 (enExample) | ||
| EP2264226A4 (en) | QUARTZ GLASS LEVER AND MANUFACTURING METHOD THEREFOR | |
| WO2013017687A3 (de) | Verfahren und vorrichtung zum herstellen von organischen faserstoffen oder granulaten | |
| EP2379253A4 (en) | Method of making cemented carbide products | |
| WO2012177012A3 (en) | Apparatus for fabricating ingot | |
| WO2008133205A1 (ja) | シリコン結晶素材及びこれを用いたｆｚシリコン単結晶の製造方法 |