JP5131674B2 - 圧電体とその製造方法、圧電素子とそれを用いた液体吐出ヘッド及び液体吐出装置 - Google Patents

圧電体とその製造方法、圧電素子とそれを用いた液体吐出ヘッド及び液体吐出装置 Download PDF

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Publication number
JP5131674B2
JP5131674B2 JP2006227051A JP2006227051A JP5131674B2 JP 5131674 B2 JP5131674 B2 JP 5131674B2 JP 2006227051 A JP2006227051 A JP 2006227051A JP 2006227051 A JP2006227051 A JP 2006227051A JP 5131674 B2 JP5131674 B2 JP 5131674B2
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piezoelectric
piezoelectric body
piezoelectric element
substrate
film
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Expired - Fee Related
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JP2006227051A
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Japanese (ja)
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JP2007088443A5 (enExample
JP2007088443A (ja
Inventor
俊博 伊福
堅義 松田
活水 青木
浩 舟窪
信太郎 横山
賢 岡本
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Canon Inc
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Canon Inc
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JP2006227051A 2005-08-23 2006-08-23 圧電体とその製造方法、圧電素子とそれを用いた液体吐出ヘッド及び液体吐出装置 Expired - Fee Related JP5131674B2 (ja)

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JP2006227051A JP5131674B2 (ja) 2005-08-23 2006-08-23 圧電体とその製造方法、圧電素子とそれを用いた液体吐出ヘッド及び液体吐出装置

Applications Claiming Priority (3)

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JP2005241430 2005-08-23
JP2005241430 2005-08-23
JP2006227051A JP5131674B2 (ja) 2005-08-23 2006-08-23 圧電体とその製造方法、圧電素子とそれを用いた液体吐出ヘッド及び液体吐出装置

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JP2007088443A JP2007088443A (ja) 2007-04-05
JP2007088443A5 JP2007088443A5 (enExample) 2009-09-17
JP5131674B2 true JP5131674B2 (ja) 2013-01-30

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5181649B2 (ja) * 2007-09-18 2013-04-10 日立電線株式会社 圧電素子
JP5585178B2 (ja) * 2010-04-13 2014-09-10 いすゞ自動車株式会社 流体制御装置
JP5905192B2 (ja) * 2010-07-30 2016-04-20 コニカミノルタ株式会社 超音波探触子の製造方法
JP7025695B2 (ja) * 2018-01-31 2022-02-25 Tdk株式会社 誘電体磁器組成物、電子部品および積層セラミックコンデンサ
JP7338082B1 (ja) 2023-01-10 2023-09-04 住友精密工業株式会社 圧電体膜基板の製造方法および圧電体膜基板

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03240944A (ja) * 1990-02-17 1991-10-28 Masahiko Naoe アルミニウム薄膜形成用対向ターゲット式スパッタ法及び装置
JP3343014B2 (ja) * 1996-01-08 2002-11-11 株式会社東芝 酸化物単結晶の製造方法
JP3595098B2 (ja) * 1996-02-22 2004-12-02 株式会社東芝 薄膜キャパシタ
JP2002029838A (ja) * 2000-07-21 2002-01-29 Toyota Central Res & Dev Lab Inc 圧電材料
JP4038753B2 (ja) * 2000-07-21 2008-01-30 セイコーエプソン株式会社 強誘電体薄膜素子の製造方法
JP4182329B2 (ja) * 2001-09-28 2008-11-19 セイコーエプソン株式会社 圧電体薄膜素子およびその製造方法、ならびにこれを用いた液体吐出ヘッド及び液体吐出装置
JP4192794B2 (ja) * 2004-01-26 2008-12-10 セイコーエプソン株式会社 圧電素子、圧電アクチュエーター、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、及び電子機器
JP2006294583A (ja) * 2005-03-18 2006-10-26 Tokyo Institute Of Technology 誘電体粉末および誘電体膜
JP2006321672A (ja) * 2005-05-18 2006-11-30 Sanyo Electric Co Ltd 誘電体磁器組成物及びその製造方法並びに積層セラミック部品

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