JP5125327B2 - 加速度センサ - Google Patents

加速度センサ Download PDF

Info

Publication number
JP5125327B2
JP5125327B2 JP2007224102A JP2007224102A JP5125327B2 JP 5125327 B2 JP5125327 B2 JP 5125327B2 JP 2007224102 A JP2007224102 A JP 2007224102A JP 2007224102 A JP2007224102 A JP 2007224102A JP 5125327 B2 JP5125327 B2 JP 5125327B2
Authority
JP
Japan
Prior art keywords
detection
axis
substrate
acceleration sensor
torsion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007224102A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008139282A5 (zh
JP2008139282A (ja
Inventor
伸顕 紺野
善明 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2007224102A priority Critical patent/JP5125327B2/ja
Priority to US11/933,685 priority patent/US7624638B2/en
Priority to DE102007052804A priority patent/DE102007052804B4/de
Priority to CN2007103062616A priority patent/CN101231303B/zh
Publication of JP2008139282A publication Critical patent/JP2008139282A/ja
Publication of JP2008139282A5 publication Critical patent/JP2008139282A5/ja
Application granted granted Critical
Publication of JP5125327B2 publication Critical patent/JP5125327B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

JP2007224102A 2006-11-09 2007-08-30 加速度センサ Active JP5125327B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007224102A JP5125327B2 (ja) 2006-11-09 2007-08-30 加速度センサ
US11/933,685 US7624638B2 (en) 2006-11-09 2007-11-01 Electrostatic capacitance type acceleration sensor
DE102007052804A DE102007052804B4 (de) 2006-11-09 2007-11-06 Beschleunigungssensor
CN2007103062616A CN101231303B (zh) 2006-11-09 2007-11-09 加速度传感器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006303838 2006-11-09
JP2006303838 2006-11-09
JP2007224102A JP5125327B2 (ja) 2006-11-09 2007-08-30 加速度センサ

Publications (3)

Publication Number Publication Date
JP2008139282A JP2008139282A (ja) 2008-06-19
JP2008139282A5 JP2008139282A5 (zh) 2010-03-04
JP5125327B2 true JP5125327B2 (ja) 2013-01-23

Family

ID=39600889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007224102A Active JP5125327B2 (ja) 2006-11-09 2007-08-30 加速度センサ

Country Status (2)

Country Link
JP (1) JP5125327B2 (zh)
CN (1) CN101231303B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013167507A (ja) * 2012-02-15 2013-08-29 Mitsubishi Electric Corp 加速度センサと加速度センサの自己診断方法

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101999081B (zh) * 2008-04-11 2013-01-02 三菱电机株式会社 加速度传感器
WO2010001947A1 (ja) * 2008-07-04 2010-01-07 アルプス電気株式会社 静電容量検出型の可動センサ
JP2010066231A (ja) * 2008-09-12 2010-03-25 Mitsubishi Electric Corp 加速度センサ
CN102216789A (zh) * 2008-11-13 2011-10-12 三菱电机株式会社 加速度传感器
WO2010140574A1 (ja) * 2009-06-03 2010-12-09 アルプス電気株式会社 物理量センサ
JP5223003B2 (ja) * 2009-06-03 2013-06-26 アルプス電気株式会社 物理量センサ
JP2011022018A (ja) * 2009-07-16 2011-02-03 Mitsubishi Electric Corp 静電容量型加速度センサー
ITTO20090597A1 (it) * 2009-07-31 2011-02-01 St Microelectronics Srl Struttura di rilevamento microelettromeccanica ad asse z con ridotte derive termiche
JP5292600B2 (ja) * 2009-11-30 2013-09-18 三菱電機株式会社 加速度センサ
KR101283683B1 (ko) * 2009-12-14 2013-07-08 한국전자통신연구원 수직축 방향 가속도계
JP2012073049A (ja) * 2010-09-28 2012-04-12 Mitsubishi Electric Corp 加速度センサ及び加速度センサシステム
CN102466736B (zh) * 2010-11-19 2014-06-11 美新半导体（无锡）有限公司 Z轴电容式加速度计
JP2014041007A (ja) * 2010-12-20 2014-03-06 Mitsubishi Electric Corp 加速度センサ
CN102721831B (zh) * 2012-05-29 2013-11-13 北京航空航天大学 基于折叠梁结构的一体差动式石英振梁加速度计
JP5714648B2 (ja) * 2012-11-16 2015-05-07 株式会社豊田中央研究所 力学量ｍｅｍｓセンサ及び力学量ｍｅｍｓセンサシステム
US9470709B2 (en) 2013-01-28 2016-10-18 Analog Devices, Inc. Teeter totter accelerometer with unbalanced mass
US9297825B2 (en) 2013-03-05 2016-03-29 Analog Devices, Inc. Tilt mode accelerometer with improved offset and noise performance
JP2015072188A (ja) * 2013-10-03 2015-04-16 セイコーエプソン株式会社 物理量検出素子、および物理量検出装置、電子機器、移動体
US10371715B2 (en) 2013-12-23 2019-08-06 Invensense, Inc. MEMS accelerometer with proof masses moving in an anti-phase direction
US8973439B1 (en) * 2013-12-23 2015-03-10 Invensense, Inc. MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate
CN110058051B (zh) * 2014-12-11 2021-08-06 意法半导体股份有限公司 具有减少漂移功能的z轴微机电检测结构
CN104407172A (zh) * 2014-12-11 2015-03-11 歌尔声学股份有限公司 一种新型的加速度计的z轴结构
US10073113B2 (en) 2014-12-22 2018-09-11 Analog Devices, Inc. Silicon-based MEMS devices including wells embedded with high density metal
CN104459203B (zh) * 2014-12-25 2017-08-25 歌尔股份有限公司 一种加速度计中的z轴结构及三轴加速度计
JP6354603B2 (ja) * 2015-01-21 2018-07-11 株式会社デンソー 加速度センサおよび加速度センサの実装構造
CN107407694B (zh) * 2015-02-24 2020-08-07 三菱电机株式会社 半导体装置及其制造方法
US10078098B2 (en) 2015-06-23 2018-09-18 Analog Devices, Inc. Z axis accelerometer design with offset compensation
WO2017061640A1 (ko) * 2015-10-06 2017-04-13 주식회사 스탠딩에그 Mems 장치, 이를 포함하는 mems 패키지 및 사용자 단말기
WO2021181618A1 (ja) * 2020-03-12 2021-09-16 三菱電機株式会社 光走査装置、測距装置および光走査装置の製造方法
JP2022014567A (ja) * 2020-07-07 2022-01-20 セイコーエプソン株式会社 慣性センサー及び慣性計測装置
CN116601500A (zh) 2020-12-18 2023-08-15 美国亚德诺半导体公司 具有质量平移运动的加速度计

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08178952A (ja) * 1994-12-20 1996-07-12 Zexel Corp 加速度センサ
WO2003044539A1 (fr) * 2001-11-19 2003-05-30 Mitsubishi Denki Kabushiki Kaisha Accelerometre
US6955086B2 (en) * 2001-11-19 2005-10-18 Mitsubishi Denki Kabushiki Kaisha Acceleration sensor
JP3966223B2 (ja) * 2003-05-15 2007-08-29 三菱電機株式会社 加速度センサ
CN100335906C (zh) * 2006-05-16 2007-09-05 北京航空航天大学 一种扭摆式硅mems角加速度传感器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013167507A (ja) * 2012-02-15 2013-08-29 Mitsubishi Electric Corp 加速度センサと加速度センサの自己診断方法

Also Published As

Publication number Publication date
JP2008139282A (ja) 2008-06-19
CN101231303A (zh) 2008-07-30
CN101231303B (zh) 2010-09-22

Similar Documents

Publication Publication Date Title
JP5125327B2 (ja) 加速度センサ
US7624638B2 (en) Electrostatic capacitance type acceleration sensor
US8368387B2 (en) Acceleration sensor
US11808574B2 (en) Micromechanical detection structure of a MEMS multi-axis gyroscope, with reduced drifts of corresponding electrical parameters
EP2192382B1 (en) Microelectromechanical gyroscope with rotary driving motion and improved electrical properties
JP5021312B2 (ja) 角速度センサ及びその製造方法
US9846175B2 (en) MEMS rotation sensor with integrated electronics
US6955086B2 (en) Acceleration sensor
US8042394B2 (en) High sensitivity microelectromechanical sensor with rotary driving motion
EP2462408B1 (en) Micromachined inertial sensor devices
WO2010055716A1 (ja) 加速度センサ
JP5450451B2 (ja) 垂直方向に集積した電子回路およびウェハスケール密封包装を含むｘ−ｙ軸二重質量音叉ジャイロスコープ
WO2003044539A1 (fr) Accelerometre
US11015933B2 (en) Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features
JP2010127763A (ja) 半導体力学量検出センサ及びそれを用いた制御装置
TW201625953A (zh) 微機電系統感測器和半導體封裝
JP2008256578A (ja) 角速度センサ
US8573054B2 (en) Manufacturing method for a rotation sensor device and rotation sensor device
JP3421340B2 (ja) 強誘電薄膜進行波回転センサ
JP2012073049A (ja) 加速度センサ及び加速度センサシステム

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100114

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100114

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110830

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120228

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120424

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20121002

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121015

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 5125327

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151109

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250