JP5123690B2 - 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム - Google Patents

画面データ処理装置、画面データ処理方法、及びコンピュータプログラム Download PDF

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Publication number
JP5123690B2
JP5123690B2 JP2008046900A JP2008046900A JP5123690B2 JP 5123690 B2 JP5123690 B2 JP 5123690B2 JP 2008046900 A JP2008046900 A JP 2008046900A JP 2008046900 A JP2008046900 A JP 2008046900A JP 5123690 B2 JP5123690 B2 JP 5123690B2
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JP
Japan
Prior art keywords
screen data
event
display
screen
unit
Prior art date
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Expired - Fee Related
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JP2008046900A
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English (en)
Japanese (ja)
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JP2009205426A (ja
JP2009205426A5 (enExample
Inventor
好伯 新藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008046900A priority Critical patent/JP5123690B2/ja
Priority to US12/371,964 priority patent/US20090217197A1/en
Publication of JP2009205426A publication Critical patent/JP2009205426A/ja
Publication of JP2009205426A5 publication Critical patent/JP2009205426A5/ja
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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0267—Fault communication, e.g. human machine interface [HMI]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35291—Record history, log, journal, audit of machine operation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35502—Display picture, image of place of error

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • User Interface Of Digital Computer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2008046900A 2008-02-27 2008-02-27 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム Expired - Fee Related JP5123690B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008046900A JP5123690B2 (ja) 2008-02-27 2008-02-27 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム
US12/371,964 US20090217197A1 (en) 2008-02-27 2009-02-17 Screen data processing apparatus, screen data processing method, and computer program

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008046900A JP5123690B2 (ja) 2008-02-27 2008-02-27 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム

Publications (3)

Publication Number Publication Date
JP2009205426A JP2009205426A (ja) 2009-09-10
JP2009205426A5 JP2009205426A5 (enExample) 2011-04-07
JP5123690B2 true JP5123690B2 (ja) 2013-01-23

Family

ID=40999596

Family Applications (1)

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JP2008046900A Expired - Fee Related JP5123690B2 (ja) 2008-02-27 2008-02-27 画面データ処理装置、画面データ処理方法、及びコンピュータプログラム

Country Status (2)

Country Link
US (1) US20090217197A1 (enExample)
JP (1) JP5123690B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5664103B2 (ja) * 2010-10-08 2015-02-04 ソニー株式会社 情報処理装置、情報処理方法及びプログラム
US8949179B2 (en) 2012-04-23 2015-02-03 Google, Inc. Sharing and synchronizing electronically stored files
US9244934B2 (en) 2012-04-23 2016-01-26 Google Inc. Sharing and synchronizing electronically stored files
US9529818B2 (en) 2012-04-23 2016-12-27 Google Inc. Sharing and synchronizing electronically stored files
US9239846B2 (en) 2012-04-23 2016-01-19 Google Inc. Sharing and synchronizing electronically stored files
US20130282830A1 (en) * 2012-04-23 2013-10-24 Google, Inc. Sharing and synchronizing electronically stored files
JP6649756B2 (ja) * 2015-11-26 2020-02-19 アズビル株式会社 表示装置および方法

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128328A (ja) * 1984-11-28 1986-06-16 Hitachi Ltd 自動表示画面記録装置
JPH0365795A (ja) * 1989-08-03 1991-03-20 Toshiba Corp プロセス監視装置
US5611059A (en) * 1994-09-02 1997-03-11 Square D Company Prelinked parameter configuration, automatic graphical linking, and distributed database configuration for devices within an automated monitoring/control system
US5832496A (en) * 1995-10-12 1998-11-03 Ncr Corporation System and method for performing intelligent analysis of a computer database
US6144962A (en) * 1996-10-15 2000-11-07 Mercury Interactive Corporation Visualization of web sites and hierarchical data structures
US6490620B1 (en) * 1997-09-26 2002-12-03 Worldcom, Inc. Integrated proxy interface for web based broadband telecommunications management
US6188403B1 (en) * 1997-11-21 2001-02-13 Portola Dimensional Systems, Inc. User-friendly graphics generator using direct manipulation
US6212524B1 (en) * 1998-05-06 2001-04-03 E.Piphany, Inc. Method and apparatus for creating and populating a datamart
US6757681B1 (en) * 1998-06-02 2004-06-29 International Business Machines Corporation Method and system for providing performance data
JP2000056826A (ja) * 1998-08-06 2000-02-25 Toshiba Corp 監視制御装置
US7734541B2 (en) * 1998-12-08 2010-06-08 Yodlee.Com, Inc. Interactive funds transfer interface
US6714219B2 (en) * 1998-12-31 2004-03-30 Microsoft Corporation Drag and drop creation and editing of a page incorporating scripts
US6353446B1 (en) * 1999-01-25 2002-03-05 Network Associates, Inc. Method and system for integrated network management applications
US6668253B1 (en) * 1999-09-08 2003-12-23 Reynolds & Reynolds Holdings, Inc. Enterprise information management system and methods
EP1098244A3 (en) * 1999-11-02 2001-06-13 CANAL + Société Anonyme Graphical user interface
US7028264B2 (en) * 1999-10-29 2006-04-11 Surfcast, Inc. System and method for simultaneous display of multiple information sources
US6421571B1 (en) * 2000-02-29 2002-07-16 Bently Nevada Corporation Industrial plant asset management system: apparatus and method
US20050071305A1 (en) * 2000-03-08 2005-03-31 Thebrain Technologies Corp. System, method and article of manufacture for a knowledge model
US7266821B2 (en) * 2000-04-27 2007-09-04 Hyperion Solutions Corporation Method and apparatus for processing jobs on an enterprise-wide computer system
US6941311B2 (en) * 2000-04-27 2005-09-06 Hyperion Solutions Corporation Aggregate navigation system
AU2002226886A1 (en) * 2000-11-09 2002-05-21 Change Tools, Inc. A user definable interface system, method and computer program product
JP2002149679A (ja) * 2000-11-10 2002-05-24 Newcom:Kk 文書閲覧システム、文書閲覧方法及び情報記録媒体
WO2002046864A2 (en) * 2000-12-07 2002-06-13 Emcore Corporation Automated wafer handling with graphic user interface
US7127409B2 (en) * 2001-03-01 2006-10-24 General Electric Company Methods and systems for aviation nonconformance component management
US20020138527A1 (en) * 2001-03-21 2002-09-26 Neider Bell System and method for a web-based venture reporting
US6678634B1 (en) * 2001-04-27 2004-01-13 Automation And Control Technology, Inc. Thickness measurement system and method
US6614540B1 (en) * 2001-06-28 2003-09-02 Advanced Micro Devices, Inc. Method and apparatus for determining feature characteristics using scatterometry
US6458605B1 (en) * 2001-06-28 2002-10-01 Advanced Micro Devices, Inc. Method and apparatus for controlling photolithography overlay registration
US6650423B1 (en) * 2001-07-02 2003-11-18 Advanced Micro Devices Inc. Method and apparatus for determining column dimensions using scatterometry
WO2003019523A1 (en) * 2001-08-23 2003-03-06 Fei Company Graphical automated machine control and metrology
US7336775B2 (en) * 2001-10-30 2008-02-26 Nikon Corporation Image storage apparatus, image storage supporting apparatus, image storage system, image management apparatus and image saving apparatus
US7178129B2 (en) * 2001-12-07 2007-02-13 Dbase, Inc. Drag-and drop dynamic distributed object model
US6737208B1 (en) * 2001-12-17 2004-05-18 Advanced Micro Devices, Inc. Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information
US6774998B1 (en) * 2001-12-27 2004-08-10 Advanced Micro Devices, Inc. Method and apparatus for identifying misregistration in a complimentary phase shift mask process
US6895409B2 (en) * 2002-06-17 2005-05-17 Adaptik Corporation Method and apparatus for creating an adaptive application
US7574652B2 (en) * 2002-06-20 2009-08-11 Canon Kabushiki Kaisha Methods for interactively defining transforms and for generating queries by manipulating existing query data
JP2004193208A (ja) * 2002-12-09 2004-07-08 Canon Inc 情報処理装置
US7228187B2 (en) * 2002-12-16 2007-06-05 Rockwell Automation Technologies, Inc. System and method for interfacing multi-agent system
US7644361B2 (en) * 2002-12-23 2010-01-05 Canon Kabushiki Kaisha Method of using recommendations to visually create new views of data across heterogeneous sources
US20040225955A1 (en) * 2003-05-08 2004-11-11 The Boeing Company Intelligent information dashboard system and method
US7464367B2 (en) * 2003-07-14 2008-12-09 Microsoft Corporation Method and system for designing customizable applications and user-interfaces based on user-defined policies and metadata
US20080163096A1 (en) * 2003-11-10 2008-07-03 Pannese Patrick D Methods and systems for controlling a semiconductor fabrication process
US7886296B2 (en) * 2004-07-22 2011-02-08 Computer Associates Think, Inc. System and method for providing alerts for heterogeneous jobs
JP2006155216A (ja) * 2004-11-29 2006-06-15 Hitachi Ltd モニタ画面表示方法
US7788592B2 (en) * 2005-01-12 2010-08-31 Microsoft Corporation Architecture and engine for time line based visualization of data
JP4778778B2 (ja) * 2005-11-04 2011-09-21 株式会社日立ハイテクノロジーズ 半導体デバイスのモニタリング方法およびモニタリング装置
JP2007241598A (ja) * 2006-03-08 2007-09-20 Mitsubishi Heavy Ind Ltd 現場保守支援システム、および現場保守支援方法
DE102006051495B4 (de) * 2006-10-31 2017-11-02 Globalfoundries Inc. Verfahren und System zur zufälligen Verteilung von Scheiben in einer komplexen Prozesslinie
US7558641B2 (en) * 2007-03-29 2009-07-07 Lam Research Corporation Recipe report card framework and methods thereof
WO2009105724A2 (en) * 2008-02-22 2009-08-27 Asyst Technologies Inc . Vao productivity suite

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JP2009205426A (ja) 2009-09-10
US20090217197A1 (en) 2009-08-27

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