JP5115330B2 - 液体噴射ヘッドおよびそれを備えた液体噴射装置 - Google Patents

液体噴射ヘッドおよびそれを備えた液体噴射装置 Download PDF

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Publication number
JP5115330B2
JP5115330B2 JP2008133950A JP2008133950A JP5115330B2 JP 5115330 B2 JP5115330 B2 JP 5115330B2 JP 2008133950 A JP2008133950 A JP 2008133950A JP 2008133950 A JP2008133950 A JP 2008133950A JP 5115330 B2 JP5115330 B2 JP 5115330B2
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JP
Japan
Prior art keywords
flow path
path forming
forming substrate
liquid
protective film
Prior art date
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Active
Application number
JP2008133950A
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English (en)
Japanese (ja)
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JP2009279830A (ja
JP2009279830A5 (enExample
Inventor
亙 高橋
徹 長手
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2008133950A priority Critical patent/JP5115330B2/ja
Priority to US12/471,184 priority patent/US20090289999A1/en
Publication of JP2009279830A publication Critical patent/JP2009279830A/ja
Publication of JP2009279830A5 publication Critical patent/JP2009279830A5/ja
Application granted granted Critical
Publication of JP5115330B2 publication Critical patent/JP5115330B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2008133950A 2008-05-22 2008-05-22 液体噴射ヘッドおよびそれを備えた液体噴射装置 Active JP5115330B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008133950A JP5115330B2 (ja) 2008-05-22 2008-05-22 液体噴射ヘッドおよびそれを備えた液体噴射装置
US12/471,184 US20090289999A1 (en) 2008-05-22 2009-05-22 Liquid ejecting head and liquid ejecting apparatus including the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008133950A JP5115330B2 (ja) 2008-05-22 2008-05-22 液体噴射ヘッドおよびそれを備えた液体噴射装置

Publications (3)

Publication Number Publication Date
JP2009279830A JP2009279830A (ja) 2009-12-03
JP2009279830A5 JP2009279830A5 (enExample) 2011-05-26
JP5115330B2 true JP5115330B2 (ja) 2013-01-09

Family

ID=41341793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008133950A Active JP5115330B2 (ja) 2008-05-22 2008-05-22 液体噴射ヘッドおよびそれを備えた液体噴射装置

Country Status (2)

Country Link
US (1) US20090289999A1 (enExample)
JP (1) JP5115330B2 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5632643B2 (ja) * 2010-04-21 2014-11-26 パナソニック株式会社 強誘電体デバイス
US9056986B2 (en) 2010-11-09 2015-06-16 Seiko Epson Corporation Ultraviolet curable type ink-jet ink composition, recording method and recording apparatus using same
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
EP3205511B1 (en) 2012-03-28 2020-12-09 Seiko Epson Corporation Ink jet recording method, and ink jet recording apparatus
JP6191120B2 (ja) 2012-03-29 2017-09-06 セイコーエプソン株式会社 インクジェット記録方法、インクジェット記録装置
US10029483B2 (en) 2012-04-25 2018-07-24 Seiko Epson Corporation Ink jet recording method, ultraviolet-ray curable ink, and ink jet recording apparatus
JP6236768B2 (ja) 2012-04-27 2017-11-29 セイコーエプソン株式会社 インクジェット記録方法、インクジェット記録装置
JP6065535B2 (ja) 2012-11-15 2017-01-25 セイコーエプソン株式会社 紫外線硬化型インクジェット記録用インク組成物、インク収容体、及びインクジェット記録装置
JP6201313B2 (ja) * 2012-12-27 2017-09-27 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6318473B2 (ja) 2013-06-07 2018-05-09 セイコーエプソン株式会社 インクジェット記録方法
JP6319625B2 (ja) 2014-03-27 2018-05-09 セイコーエプソン株式会社 インクジェット方法およびインクジェット装置
JP6932519B2 (ja) * 2016-05-26 2021-09-08 キヤノン株式会社 液体吐出ヘッドおよびその製造方法、並びに記録方法
JP7523987B2 (ja) * 2020-07-31 2024-07-29 キヤノン株式会社 液体吐出ヘッド及びその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW417025B (en) * 1997-04-10 2001-01-01 Sumitomo Chemical Co Front plate for plasma display
JP2003320663A (ja) * 2002-05-02 2003-11-11 Ricoh Co Ltd 液滴吐出ヘッド及びその製造方法、インクカートリッジ並びにインクジェット記録装置
JP3726909B2 (ja) * 2002-07-10 2005-12-14 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP2007050673A (ja) * 2005-08-19 2007-03-01 Seiko Epson Corp 液体噴射ヘッドの製造方法
JP2007112075A (ja) * 2005-10-24 2007-05-10 Seiko Epson Corp 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置並びに静電デバイスの各製造方法

Also Published As

Publication number Publication date
JP2009279830A (ja) 2009-12-03
US20090289999A1 (en) 2009-11-26

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