JP5114881B2 - 半導体装置及びその製造方法 - Google Patents

半導体装置及びその製造方法 Download PDF

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Publication number
JP5114881B2
JP5114881B2 JP2006186460A JP2006186460A JP5114881B2 JP 5114881 B2 JP5114881 B2 JP 5114881B2 JP 2006186460 A JP2006186460 A JP 2006186460A JP 2006186460 A JP2006186460 A JP 2006186460A JP 5114881 B2 JP5114881 B2 JP 5114881B2
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Japan
Prior art keywords
gate electrode
gate
film
misfet
insulating film
Prior art date
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Expired - Fee Related
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JP2006186460A
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English (en)
Japanese (ja)
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JP2007059881A (ja
JP2007059881A5 (https=
Inventor
裕之 大田
秀暢 福留
和郎 川村
公彦 保坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Semiconductor Ltd
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Fujitsu Semiconductor Ltd
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Publication date
Application filed by Fujitsu Semiconductor Ltd filed Critical Fujitsu Semiconductor Ltd
Priority to JP2006186460A priority Critical patent/JP5114881B2/ja
Priority to US11/492,199 priority patent/US7977194B2/en
Publication of JP2007059881A publication Critical patent/JP2007059881A/ja
Publication of JP2007059881A5 publication Critical patent/JP2007059881A5/ja
Application granted granted Critical
Publication of JP5114881B2 publication Critical patent/JP5114881B2/ja
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0212—Manufacture or treatment of FETs having insulated gates [IGFET] using self-aligned silicidation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/601—Insulated-gate field-effect transistors [IGFET] having lightly-doped drain or source extensions, e.g. LDD IGFETs or DDD IGFETs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H10D30/792—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions comprising applied insulating layers, e.g. stress liners
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01304—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H10D64/01318—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN
    • H10D64/0132—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN the conductor being a metallic silicide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/021—Manufacture or treatment using multiple gate spacer layers, e.g. bilayered sidewall spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0135—Manufacturing their gate conductors
    • H10D84/0137—Manufacturing their gate conductors the gate conductors being silicided
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0135—Manufacturing their gate conductors
    • H10D84/0142—Manufacturing their gate conductors the gate conductors having different shapes or dimensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0223—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate
    • H10D30/0227—Manufacture or treatment of FETs having insulated gates [IGFET] having source and drain regions or source and drain extensions self-aligned to sides of the gate having both lightly-doped source and drain extensions and source and drain regions self-aligned to the sides of the gate, e.g. lightly-doped drain [LDD] MOSFET or double-diffused drain [DDD] MOSFET

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP2006186460A 2005-07-26 2006-07-06 半導体装置及びその製造方法 Expired - Fee Related JP5114881B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006186460A JP5114881B2 (ja) 2005-07-26 2006-07-06 半導体装置及びその製造方法
US11/492,199 US7977194B2 (en) 2005-07-26 2006-07-25 Method for fabricating semiconductor device with fully silicided gate electrode

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005215479 2005-07-26
JP2005215479 2005-07-26
JP2006186460A JP5114881B2 (ja) 2005-07-26 2006-07-06 半導体装置及びその製造方法

Publications (3)

Publication Number Publication Date
JP2007059881A JP2007059881A (ja) 2007-03-08
JP2007059881A5 JP2007059881A5 (https=) 2009-07-02
JP5114881B2 true JP5114881B2 (ja) 2013-01-09

Family

ID=37694892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006186460A Expired - Fee Related JP5114881B2 (ja) 2005-07-26 2006-07-06 半導体装置及びその製造方法

Country Status (2)

Country Link
US (1) US7977194B2 (https=)
JP (1) JP5114881B2 (https=)

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US8008144B2 (en) 2006-05-11 2011-08-30 Micron Technology, Inc. Dual work function recessed access device and methods of forming
US20070262395A1 (en) 2006-05-11 2007-11-15 Gibbons Jasper S Memory cell access devices and methods of making the same
US8860174B2 (en) * 2006-05-11 2014-10-14 Micron Technology, Inc. Recessed antifuse structures and methods of making the same
JP2008140854A (ja) * 2006-11-30 2008-06-19 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
JP5003515B2 (ja) * 2007-03-20 2012-08-15 ソニー株式会社 半導体装置
JP2008288364A (ja) 2007-05-17 2008-11-27 Sony Corp 半導体装置および半導体装置の製造方法
US7867835B2 (en) * 2008-02-29 2011-01-11 Chartered Semiconductor Manufacturing Ltd. Integrated circuit system for suppressing short channel effects
JP2009277849A (ja) * 2008-05-14 2009-11-26 Toshiba Corp 半導体装置及びその製造方法
US7824986B2 (en) * 2008-11-05 2010-11-02 Micron Technology, Inc. Methods of forming a plurality of transistor gates, and methods of forming a plurality of transistor gates having at least two different work functions
US8779551B2 (en) * 2012-06-06 2014-07-15 International Business Machines Corporation Gated diode structure for eliminating RIE damage from cap removal
JP6022377B2 (ja) * 2013-02-28 2016-11-09 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
CN104979198B (zh) * 2014-04-02 2018-03-30 中芯国际集成电路制造(上海)有限公司 鳍式场效应晶体管的形成方法

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US5194749A (en) 1987-11-30 1993-03-16 Hitachi, Ltd. Semiconductor integrated circuit device
JP2621805B2 (ja) * 1994-07-30 1997-06-18 日本電気株式会社 半導体装置の製造方法
JP2848481B2 (ja) 1995-02-08 1999-01-20 日本電気株式会社 半導体装置の製造方法
JP3719618B2 (ja) * 1996-06-17 2005-11-24 松下電器産業株式会社 半導体装置及びその製造方法
JP3287403B2 (ja) * 1999-02-19 2002-06-04 日本電気株式会社 Ｍｉｓ型電界効果トランジスタ及びその製造方法
JP2000269458A (ja) * 1999-03-17 2000-09-29 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP3746669B2 (ja) * 2000-10-17 2006-02-15 株式会社ルネサステクノロジ 半導体装置の製造方法
US6562718B1 (en) 2000-12-06 2003-05-13 Advanced Micro Devices, Inc. Process for forming fully silicided gates
JP2002217410A (ja) * 2001-01-16 2002-08-02 Hitachi Ltd 半導体装置
JP2003229568A (ja) * 2002-02-04 2003-08-15 Hitachi Ltd 半導体装置の製造方法および半導体装置
DE10208164B4 (de) * 2002-02-26 2006-01-12 Advanced Micro Devices, Inc., Sunnyvale Verfahren zum Steuern einer elektrischen Eigenschaft eines Feldeffekttransistors
JP4173672B2 (ja) 2002-03-19 2008-10-29 株式会社ルネサステクノロジ 半導体装置及びその製造方法
JP3634320B2 (ja) * 2002-03-29 2005-03-30 株式会社東芝 半導体装置及び半導体装置の製造方法
US7235835B2 (en) * 2002-05-14 2007-06-26 Sony Corporation Semiconductor device and its manufacturing method, and electronic device
DE10234931A1 (de) * 2002-07-31 2004-02-26 Advanced Micro Devices, Inc., Sunnyvale Verfahren zur Herstellung eines Metallsilizidgates in einer standardmässigen MOS-Prozesssequenz
JP2004315211A (ja) * 2003-04-18 2004-11-11 Tsubakimoto Chain Co ハイブリッド駆動式コンベヤ
JP4557508B2 (ja) * 2003-06-16 2010-10-06 パナソニック株式会社 半導体装置
US20050156208A1 (en) * 2003-09-30 2005-07-21 Taiwan Semiconductor Manufacturing Company, Ltd. Device having multiple silicide types and a method for its fabrication
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JP4457688B2 (ja) * 2004-02-12 2010-04-28 ソニー株式会社 半導体装置
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US7241674B2 (en) * 2004-05-13 2007-07-10 Taiwan Semiconductor Manufacturing Co., Ltd. Method of forming silicided gate structure
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Publication number Publication date
US7977194B2 (en) 2011-07-12
US20070026595A1 (en) 2007-02-01
JP2007059881A (ja) 2007-03-08

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