JP5111427B2 - 成膜用基板および成膜方法 - Google Patents

成膜用基板および成膜方法 Download PDF

Info

Publication number
JP5111427B2
JP5111427B2 JP2009099803A JP2009099803A JP5111427B2 JP 5111427 B2 JP5111427 B2 JP 5111427B2 JP 2009099803 A JP2009099803 A JP 2009099803A JP 2009099803 A JP2009099803 A JP 2009099803A JP 5111427 B2 JP5111427 B2 JP 5111427B2
Authority
JP
Japan
Prior art keywords
substrate
film formation
region
layer
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009099803A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010251144A (ja
JP2010251144A5 (enExample
Inventor
礼奈 高橋
卓也 鶴目
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP2009099803A priority Critical patent/JP5111427B2/ja
Publication of JP2010251144A publication Critical patent/JP2010251144A/ja
Publication of JP2010251144A5 publication Critical patent/JP2010251144A5/ja
Application granted granted Critical
Publication of JP5111427B2 publication Critical patent/JP5111427B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2009099803A 2009-04-16 2009-04-16 成膜用基板および成膜方法 Expired - Fee Related JP5111427B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009099803A JP5111427B2 (ja) 2009-04-16 2009-04-16 成膜用基板および成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009099803A JP5111427B2 (ja) 2009-04-16 2009-04-16 成膜用基板および成膜方法

Publications (3)

Publication Number Publication Date
JP2010251144A JP2010251144A (ja) 2010-11-04
JP2010251144A5 JP2010251144A5 (enExample) 2012-04-19
JP5111427B2 true JP5111427B2 (ja) 2013-01-09

Family

ID=43313254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009099803A Expired - Fee Related JP5111427B2 (ja) 2009-04-16 2009-04-16 成膜用基板および成膜方法

Country Status (1)

Country Link
JP (1) JP5111427B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5323784B2 (ja) * 2009-09-15 2013-10-23 フオン・アルデンネ・アンラーゲンテヒニク・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング 微細構造を製造するための方法及び装置
EP2690682A4 (en) * 2011-03-22 2014-10-01 Oceans King Lighting Science ORGANIC ELECTROLUMINESCENCE DEVICE AND CONDUCTIVE BASIS THEREFOR
JP5913974B2 (ja) * 2011-12-28 2016-05-11 株式会社アルバック 有機ｅｌデバイスの製造装置、及び有機ｅｌデバイスの製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278576A (en) * 1990-10-31 1994-01-11 Eastman Kodak Company Intermediate receiver opaque support
US5851709A (en) * 1997-10-31 1998-12-22 Eastman Kodak Company Method for selective transfer of a color organic layer
JP4138282B2 (ja) * 2001-09-14 2008-08-27 シャープ株式会社 有機エレクトロルミネッセンス素子の製造方法
JP4071970B2 (ja) * 2002-01-25 2008-04-02 富士フイルム株式会社 パターン部材の製造方法
JP2006309995A (ja) * 2005-04-27 2006-11-09 Sony Corp 転写用基板および表示装置の製造方法ならびに表示装置
JP5013048B2 (ja) * 2006-04-06 2012-08-29 ソニー株式会社 赤色有機発光素子およびこれを備えた表示装置
JP4797889B2 (ja) * 2006-09-01 2011-10-19 ソニー株式会社 転写方法

Also Published As

Publication number Publication date
JP2010251144A (ja) 2010-11-04

Similar Documents

Publication Publication Date Title
JP5394048B2 (ja) 蒸着用基板
JP5247410B2 (ja) 蒸着用基板、蒸着用基板の作製方法、および蒸着方法
JP5433758B2 (ja) 成膜方法
JP5132516B2 (ja) 蒸着用基板
JP5244996B2 (ja) 照明装置の作製方法
JP5112281B2 (ja) 成膜用基板
JP5635737B2 (ja) 成膜方法
JP5728068B2 (ja) 成膜用基板
JP5161154B2 (ja) 発光装置の作製方法
JP5410791B2 (ja) 成膜方法および発光装置の作製方法
JP5238587B2 (ja) 発光装置の作製方法
JP2009120946A (ja) 成膜方法および発光装置の作製方法
US8409672B2 (en) Method of manufacturing evaporation donor substrate and method of manufacturing light-emitting device
JP5159689B2 (ja) 発光装置の作製方法
JP2009295574A (ja) 成膜用基板及びその基板を用いた成膜方法、発光装置、照明装置及び電子機器
JP5538642B2 (ja) 成膜方法および発光素子の作製方法
JP5111427B2 (ja) 成膜用基板および成膜方法
JP5695337B2 (ja) レーザ照射装置
JP5367415B2 (ja) 発光装置の作製方法及び成膜用基板

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120306

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120306

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120912

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20121002

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121009

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151019

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151019

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees