JP5695337B2 - レーザ照射装置 - Google Patents
レーザ照射装置 Download PDFInfo
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- JP5695337B2 JP5695337B2 JP2010094656A JP2010094656A JP5695337B2 JP 5695337 B2 JP5695337 B2 JP 5695337B2 JP 2010094656 A JP2010094656 A JP 2010094656A JP 2010094656 A JP2010094656 A JP 2010094656A JP 5695337 B2 JP5695337 B2 JP 5695337B2
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- 238000007607 die coating method Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- 239000004210 ether based solvent Substances 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- WOYDRSOIBHFMGB-UHFFFAOYSA-N n,9-diphenyl-n-(9-phenylcarbazol-3-yl)carbazol-3-amine Chemical compound C1=CC=CC=C1N(C=1C=C2C3=CC=CC=C3N(C=3C=CC=CC=3)C2=CC=1)C1=CC=C(N(C=2C=CC=CC=2)C=2C3=CC=CC=2)C3=C1 WOYDRSOIBHFMGB-UHFFFAOYSA-N 0.000 description 1
- AJNJGJDDJIBTBP-UHFFFAOYSA-N n-(9,10-diphenylanthracen-2-yl)-n,9-diphenylcarbazol-3-amine Chemical compound C1=CC=CC=C1N(C=1C=C2C(C=3C=CC=CC=3)=C3C=CC=CC3=C(C=3C=CC=CC=3)C2=CC=1)C1=CC=C(N(C=2C=CC=CC=2)C=2C3=CC=CC=2)C3=C1 AJNJGJDDJIBTBP-UHFFFAOYSA-N 0.000 description 1
- UMFJAHHVKNCGLG-UHFFFAOYSA-N n-Nitrosodimethylamine Chemical compound CN(C)N=O UMFJAHHVKNCGLG-UHFFFAOYSA-N 0.000 description 1
- VZYZZKOUCVXTOJ-UHFFFAOYSA-N n-[4-[4-(n-(9,9-dimethylfluoren-2-yl)anilino)phenyl]phenyl]-9,9-dimethyl-n-phenylfluoren-2-amine Chemical group C1=C2C(C)(C)C3=CC=CC=C3C2=CC=C1N(C=1C=CC(=CC=1)C=1C=CC(=CC=1)N(C=1C=CC=CC=1)C=1C=C2C(C)(C)C3=CC=CC=C3C2=CC=1)C1=CC=CC=C1 VZYZZKOUCVXTOJ-UHFFFAOYSA-N 0.000 description 1
- COVCYOMDZRYBNM-UHFFFAOYSA-N n-naphthalen-1-yl-9-phenyl-n-(9-phenylcarbazol-3-yl)carbazol-3-amine Chemical compound C1=CC=CC=C1N1C2=CC=C(N(C=3C=C4C5=CC=CC=C5N(C=5C=CC=CC=5)C4=CC=3)C=3C4=CC=CC=C4C=CC=3)C=C2C2=CC=CC=C21 COVCYOMDZRYBNM-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- HCIIFBHDBOCSAF-UHFFFAOYSA-N octaethylporphyrin Chemical compound N1C(C=C2C(=C(CC)C(C=C3C(=C(CC)C(=C4)N3)CC)=N2)CC)=C(CC)C(CC)=C1C=C1C(CC)=C(CC)C4=N1 HCIIFBHDBOCSAF-UHFFFAOYSA-N 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- DYIZHKNUQPHNJY-UHFFFAOYSA-N oxorhenium Chemical compound [Re]=O DYIZHKNUQPHNJY-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- HRGDZIGMBDGFTC-UHFFFAOYSA-N platinum(2+) Chemical compound [Pt+2] HRGDZIGMBDGFTC-UHFFFAOYSA-N 0.000 description 1
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- VLRICFVOGGIMKK-UHFFFAOYSA-N pyrazol-1-yloxyboronic acid Chemical compound OB(O)ON1C=CC=N1 VLRICFVOGGIMKK-UHFFFAOYSA-N 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910003449 rhenium oxide Inorganic materials 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- UGNWTBMOAKPKBL-UHFFFAOYSA-N tetrachloro-1,4-benzoquinone Chemical compound ClC1=C(Cl)C(=O)C(Cl)=C(Cl)C1=O UGNWTBMOAKPKBL-UHFFFAOYSA-N 0.000 description 1
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 230000017105 transposition Effects 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- OYQCBJZGELKKPM-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O-2].[Zn+2].[O-2].[In+3] OYQCBJZGELKKPM-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- GWDUZCIBPDVBJM-UHFFFAOYSA-L zinc;2-(2-hydroxyphenyl)-3h-1,3-benzothiazole-2-carboxylate Chemical compound [Zn+2].OC1=CC=CC=C1C1(C([O-])=O)SC2=CC=CC=C2N1.OC1=CC=CC=C1C1(C([O-])=O)SC2=CC=CC=C2N1 GWDUZCIBPDVBJM-UHFFFAOYSA-L 0.000 description 1
- QEPMORHSGFRDLW-UHFFFAOYSA-L zinc;2-(2-hydroxyphenyl)-3h-1,3-benzoxazole-2-carboxylate Chemical compound [Zn+2].OC1=CC=CC=C1C1(C([O-])=O)OC2=CC=CC=C2N1.OC1=CC=CC=C1C1(C([O-])=O)OC2=CC=CC=C2N1 QEPMORHSGFRDLW-UHFFFAOYSA-L 0.000 description 1
Images
Description
本発明に係る薄膜作製装置、その作製工程において用いるドナー基板、および、その作製方法を、図1、図2を用いて説明する。
。レーザビームを分岐させているのは、タクトアップのためであり、レーザビームを使用する作製装置はこのような形態をとる場合が多い。特にディスプレイ作製装置のように大面積にわたり微細な処理を要するものには有効な手段である。本実施の形態では分岐数を3としたが、それ以外の分岐数でも構わない。本発明の趣旨の1つは、複数のレーザビームを高密度に配列させることにあるため、実際の分岐数はこれよりも増やす。ステージ109にドナー基板と被成膜基板を対向させたもの(これを以下、照射面111と称する)を搭載し、複数のレーザビームをドナー基板に照射することで被成膜基板に発光性の材料を転置する。照射位置の移動はステージ109をXYステージ110にて動作させることにより行う。XYステージ110は、ステージ109に対して、複数のレーザビームを照射面111に平行な面内において相対的に移動させる移動部である。このような構成により大面積基板全体に複数のレーザビームを照射することが可能となる。
本実施の形態では、上記実施の形態とは異なる構成を有するドナー基板について説明する。なお、本実施の形態に示すドナー基板において、特に記載がない場合には、上記実施の形態と同様の材料及び作製方法によって形成するものとする。
本実施の形態では、上記実施の形態で説明した薄膜作製装置およびドナー基板を用いてフルカラー表示装置を作製する方法について説明する。
本実施の形態では、本発明に係る薄膜作製装置の例について説明する。本実施の形態に係る薄膜作製装置の断面の模式図を図6に示す。
本実施の形態では、本発明を適用して、発光素子および発光装置を作製する方法について説明する。
本実施の形態では、本発明を適用して作製した発光装置を用いて完成させた様々な電子機器について、図14、図15を用いて説明する。
102 光吸収層
103 材料層
104 レーザ
105 レーザビーム
106 レーザビーム分岐装置
107 レーザビーム整形用マスク
108 投影レンズ
109 ステージ
110 XYステージ
111 照射面
112 回転軸
113 駆動部
115 ユニット
116 ミラー
117 画素マトリクス
201 基板
203 反射層
205 光吸収層
209 材料層
211 基板
217 EL層
300 基板
302 電極層
304 発光層
306 電極層
308 EL層
322 正孔注入層
324 正孔輸送層
326 電子輸送層
328 電子注入層
411 絶縁物
412 第一の電極層
421 膜(R)
422 膜(G)
423 膜(B)
431 反射層
432 開口部
441 膜(R)
442 膜(G)
443 膜(B)
801 成膜室
802 ゲート弁
803 ゲート弁
804 基板支持手段
805 基板支持手段
807 基板
808 材料層
809 基板
810 光源
811 XYステージ
812 窓
106a ハーフミラー
106c ミラー
1301 投影レンズ
1501 基板
1504 絶縁層
1513 電極層
1514 隔壁
1516 電極層
1521 発光領域
1522 隔壁
1601 基板
1602 データ線
1603 走査線
1604 隔壁
1605 領域
1606 入力端子
1607 入力端子
1608 接続配線
1700 EL層
1701 駆動回路部(ソース側駆動回路)
1702 画素部
1703 駆動回路部(ゲート側駆動回路)
1704 封止基板
1705 シール材
1707 空間
1708 配線
1709 FPC(フレキシブルプリントサーキット)
1710 素子基板
1711 スイッチング用TFT
1712 電流制御用TFT
1713 電極層
1714 絶縁物
1715 発光素子
1716 電極層
1723 nチャネル型TFT
1724 pチャネル型TFT
1801 画素マトリクス
1802 光
1803 光
1901 光整形用マスク
1902 回転機構
1903 開口部
8001 筐体
8002 支持台
8003 表示部
8004 スピーカー部
8005 ビデオ入力端子
8101 本体
8102 筐体
8103 表示部
8104 キーボード
8105 外部接続ポート
8106 ポインティングデバイス
8201 本体
8202 表示部
8203 筐体
8204 外部接続ポート
8205 リモコン受信部
8206 受像部
8207 バッテリー
8208 音声入力部
8209 操作キー
8210 接眼部
8301 照明部
8302 傘
8303 可変アーム
8304 支柱
8305 台
8306 電源
8401 本体
8402 筐体
8403 表示部
8404 音声入力部
8405 音声出力部
8406 操作キー
8407 外部接続ポート
8408 アンテナ
8500 携帯電話
8501 筐体
8502 筐体
8511 表示部
8512 スピーカー
8513 マイクロフォン
8514 操作キー
8515 ポインティングデバイス
8516 カメラ用レンズ
8517 外部接続端子
8518 イヤホン端子
8521 キーボード
8522 外部メモリスロット
8523 カメラ用レンズ
8524 ライト
1515B EL層
1515G EL層
1515R EL層
1609a FPC
1609b FPC
Claims (1)
- レーザと、
前記レーザから出力された第1のレーザビームを複数の第2のレーザビームとする複数のハーフミラーと、
複数の前記第2のレーザビームのそれぞれを通過させる複数の開口部を有するレーザビーム整形用マスクと、
前記レーザビーム整形用マスクの前記開口部を通過した複数の前記第2のレーザビームを、複数の第3のレーザビームとする投影レンズと、
前記投影レンズと照射面を有する照射対象との距離を変化させる駆動部と、
前記照射対象を搭載するステージと、
前記ハーフミラーと前記レーザビーム整形用マスクと前記投影レンズとに結合し、前記照射面と重ならない位置に前記照射面に垂直な回転軸を有する回転部と、
前記ステージに対し、複数の前記第3のレーザビームを前記照射面に平行な面内において相対的にX方向及びY方向に移動させる移動部と、を有し、
前記投影レンズは前記レーザビーム整形用マスクの像を投影し、
前記投影レンズを通過することで、複数の前記第3のレーザビーム同士の間隔は、複数の前記第2のレーザビーム同士の間隔よりも狭くなり、
前記レーザビーム整形用マスクの前記開口部の大きさを変えることで、前記照射面における前記第3のレーザビームのサイズを変更し、
前記回転部を回転することで、前記照射面の前記X方向に対する複数の前記第3のレーザビーム同士の間隔を調整することを特徴とするレーザ照射装置。
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JP4315119B2 (ja) * | 2005-03-29 | 2009-08-19 | セイコーエプソン株式会社 | 液滴吐出装置、パターン形成方法、及び電気光学装置の製造方法 |
JP5114943B2 (ja) * | 2006-12-25 | 2013-01-09 | ソニー株式会社 | 欠陥修正装置及び欠陥修正方法 |
JP5140303B2 (ja) * | 2007-04-04 | 2013-02-06 | 日立住友重機械建機クレーン株式会社 | カウンタウエイトの取付装置 |
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