JP5093635B2 - ガス分離装置 - Google Patents

ガス分離装置 Download PDF

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Publication number
JP5093635B2
JP5093635B2 JP2001081017A JP2001081017A JP5093635B2 JP 5093635 B2 JP5093635 B2 JP 5093635B2 JP 2001081017 A JP2001081017 A JP 2001081017A JP 2001081017 A JP2001081017 A JP 2001081017A JP 5093635 B2 JP5093635 B2 JP 5093635B2
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Japan
Prior art keywords
gas
nitrogen
chromatographic
separation
pfc
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Expired - Fee Related
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JP2001081017A
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English (en)
Japanese (ja)
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JP2002273144A5 (enExample
JP2002273144A (ja
Inventor
哲也 阿部
貞光 丹澤
成治 廣木
義宣 田嶋
高志 二ツ木
直己 藤島
基志 平塚
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Japan Atomic Energy Agency
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Japan Atomic Energy Agency
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Publication date
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Priority to JP2001081017A priority Critical patent/JP5093635B2/ja
Publication of JP2002273144A publication Critical patent/JP2002273144A/ja
Publication of JP2002273144A5 publication Critical patent/JP2002273144A5/ja
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Separation Of Gases By Adsorption (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Drying Of Semiconductors (AREA)
JP2001081017A 2001-03-21 2001-03-21 ガス分離装置 Expired - Fee Related JP5093635B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001081017A JP5093635B2 (ja) 2001-03-21 2001-03-21 ガス分離装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001081017A JP5093635B2 (ja) 2001-03-21 2001-03-21 ガス分離装置

Publications (3)

Publication Number Publication Date
JP2002273144A JP2002273144A (ja) 2002-09-24
JP2002273144A5 JP2002273144A5 (enExample) 2008-01-17
JP5093635B2 true JP5093635B2 (ja) 2012-12-12

Family

ID=18937192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001081017A Expired - Fee Related JP5093635B2 (ja) 2001-03-21 2001-03-21 ガス分離装置

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JP (1) JP5093635B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005046746A (ja) * 2003-07-29 2005-02-24 Japan Organo Co Ltd ガス分離装置
JP4538622B2 (ja) 2003-07-29 2010-09-08 オルガノ株式会社 ガス分離装置
JP4212106B2 (ja) * 2005-04-19 2009-01-21 オルガノ株式会社 ガス分離装置及びガス分離方法
JP4683543B2 (ja) * 2005-06-16 2011-05-18 オルガノ株式会社 ガス分離方法及びガス分離装置
JP4787550B2 (ja) * 2005-06-16 2011-10-05 独立行政法人日本原子力研究開発機構 ガス分離方法及びガス分離装置
JP4683544B2 (ja) * 2005-06-16 2011-05-18 オルガノ株式会社 ガス分離方法及びガス分離装置
JP2009018269A (ja) * 2007-07-12 2009-01-29 Japan Organo Co Ltd ガス分離装置及びガス分離方法
JP5074132B2 (ja) * 2007-09-05 2012-11-14 エア・ウォーター株式会社 パーフルオロコンパウンドガスの精製方法および装置
JP5117797B2 (ja) * 2007-09-05 2013-01-16 エア・ウォーター株式会社 パーフルオロカーボンガスの精製方法および装置
CN108079779A (zh) * 2017-12-12 2018-05-29 宇星科技发展(深圳)有限公司 一种零气提纯仪

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183596A (ja) * 1975-01-20 1976-07-22 Hitachi Ltd Ryurokirikaesochi
JPS6133215A (ja) * 1984-07-25 1986-02-17 Iwatani Gas Kaihatsu Kenkyusho:Kk ガス精製方法
JPH0798648B2 (ja) * 1990-01-10 1995-10-25 セントラル硝子株式会社 Ｎｆ３ガスの精製方法
US5069690A (en) * 1991-02-21 1991-12-03 Air Products And Chemicals, Inc. Process for kinetic gas-solid chromatographic separations
JPH07330316A (ja) * 1994-06-01 1995-12-19 Nissan Chem Ind Ltd 三弗化窒素ガスの精製方法
JPH0819727A (ja) * 1994-07-06 1996-01-23 Central Glass Co Ltd 排ガス処理方法
US5858065A (en) * 1995-07-17 1999-01-12 American Air Liquide Process and system for separation and recovery of perfluorocompound gases

Also Published As

Publication number Publication date
JP2002273144A (ja) 2002-09-24

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