JP5082518B2 - 電気光学装置および電子機器 - Google Patents
電気光学装置および電子機器 Download PDFInfo
- Publication number
- JP5082518B2 JP5082518B2 JP2007064522A JP2007064522A JP5082518B2 JP 5082518 B2 JP5082518 B2 JP 5082518B2 JP 2007064522 A JP2007064522 A JP 2007064522A JP 2007064522 A JP2007064522 A JP 2007064522A JP 5082518 B2 JP5082518 B2 JP 5082518B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light
- interlayer insulating
- insulating layer
- dielectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010410 layer Substances 0.000 claims description 283
- 239000011229 interlayer Substances 0.000 claims description 116
- 239000000758 substrate Substances 0.000 claims description 89
- 239000010409 thin film Substances 0.000 claims description 41
- 239000010408 film Substances 0.000 claims description 30
- 239000011159 matrix material Substances 0.000 claims description 25
- 230000005540 biological transmission Effects 0.000 claims description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 53
- 230000015572 biosynthetic process Effects 0.000 description 25
- 239000003990 capacitor Substances 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 12
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 239000004020 conductor Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 230000007547 defect Effects 0.000 description 7
- 238000000206 photolithography Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 239000003566 sealing material Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007064522A JP5082518B2 (ja) | 2007-03-14 | 2007-03-14 | 電気光学装置および電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007064522A JP5082518B2 (ja) | 2007-03-14 | 2007-03-14 | 電気光学装置および電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008225144A JP2008225144A (ja) | 2008-09-25 |
| JP2008225144A5 JP2008225144A5 (enExample) | 2010-02-12 |
| JP5082518B2 true JP5082518B2 (ja) | 2012-11-28 |
Family
ID=39843833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007064522A Expired - Fee Related JP5082518B2 (ja) | 2007-03-14 | 2007-03-14 | 電気光学装置および電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5082518B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6417847B2 (ja) * | 2014-10-21 | 2018-11-07 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法、電子機器 |
| JP6562044B2 (ja) * | 2017-07-28 | 2019-08-21 | セイコーエプソン株式会社 | 電気光学装置、電子機器、及び電気光学装置の製造方法 |
| JP6661583B2 (ja) * | 2017-09-08 | 2020-03-11 | 株式会社ドワンゴ | チケット表示装置、鍵データサーバおよびチケットデータサーバ |
| JP6645527B2 (ja) | 2018-02-27 | 2020-02-14 | セイコーエプソン株式会社 | 透過型液晶表示装置、および電子機器 |
| JP6620839B2 (ja) * | 2018-06-05 | 2019-12-18 | セイコーエプソン株式会社 | 液晶装置および電子機器 |
| CN115036437B (zh) * | 2022-06-20 | 2025-10-21 | 武汉天马微电子有限公司 | 一种显示面板及显示装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58159520A (ja) * | 1982-03-18 | 1983-09-21 | Seiko Epson Corp | 液晶表示パネル |
| JPH09230379A (ja) * | 1996-02-27 | 1997-09-05 | Sharp Corp | 液晶表示装置とその製造方法 |
| JP3991569B2 (ja) * | 2000-09-13 | 2007-10-17 | セイコーエプソン株式会社 | 電気光学装置、それを用いた投射型液晶表示装置並びに電子機器 |
| JP3736330B2 (ja) * | 2000-10-13 | 2006-01-18 | セイコーエプソン株式会社 | 電気光学装置 |
| JP2002196362A (ja) * | 2000-12-25 | 2002-07-12 | Sharp Corp | 液晶表示装置およびその製造方法 |
| JP2005321670A (ja) * | 2004-05-11 | 2005-11-17 | Sony Corp | 薄膜半導体装置、液晶表示装置及び画像プロジェクタ装置 |
-
2007
- 2007-03-14 JP JP2007064522A patent/JP5082518B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008225144A (ja) | 2008-09-25 |
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