JP5040452B2 - アクチュエータ、光スキャナおよび画像形成装置 - Google Patents

アクチュエータ、光スキャナおよび画像形成装置 Download PDF

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Publication number
JP5040452B2
JP5040452B2 JP2007151223A JP2007151223A JP5040452B2 JP 5040452 B2 JP5040452 B2 JP 5040452B2 JP 2007151223 A JP2007151223 A JP 2007151223A JP 2007151223 A JP2007151223 A JP 2007151223A JP 5040452 B2 JP5040452 B2 JP 5040452B2
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Prior art keywords
movable plate
actuator
permanent magnet
magnetic field
regulating
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Japanese (ja)
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JP2008304667A5 (enExample
JP2008304667A (ja
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雅彦 仙道
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Seiko Epson Corp
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Seiko Epson Corp
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JP2007151223A 2007-06-07 2007-06-07 アクチュエータ、光スキャナおよび画像形成装置 Expired - Fee Related JP5040452B2 (ja)

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JP2007151223A JP5040452B2 (ja) 2007-06-07 2007-06-07 アクチュエータ、光スキャナおよび画像形成装置

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JP2007151223A JP5040452B2 (ja) 2007-06-07 2007-06-07 アクチュエータ、光スキャナおよび画像形成装置

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JP2008304667A JP2008304667A (ja) 2008-12-18
JP2008304667A5 JP2008304667A5 (enExample) 2010-06-24
JP5040452B2 true JP5040452B2 (ja) 2012-10-03

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013076845A1 (ja) * 2011-11-24 2013-05-30 パイオニア株式会社 アクチュエータの製造方法及びアクチュエータ
JP5266411B2 (ja) * 2012-05-17 2013-08-21 パイオニア株式会社 アクチュエータの製造方法及びアクチュエータ
JP5266410B2 (ja) * 2012-05-17 2013-08-21 パイオニア株式会社 アクチュエータの製造方法及びアクチュエータ
JP5250134B2 (ja) * 2012-05-17 2013-07-31 パイオニア株式会社 アクチュエータの製造方法及びアクチュエータ
JP6349851B2 (ja) 2014-03-27 2018-07-04 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
JP2017003744A (ja) * 2015-06-09 2017-01-05 セイコーエプソン株式会社 光学デバイスおよび画像表示装置
DE102016200599A1 (de) * 2016-01-19 2017-07-20 Robert Bosch Gmbh MEMS-Vorrichtung und Betriebsverfahren für eine MEMS-Vorrichtung
WO2018179041A1 (ja) * 2017-03-27 2018-10-04 オリンパス株式会社 光偏向器
US12105221B2 (en) * 2018-03-09 2024-10-01 Pioneer Corporation Reflector with actuator, optical scanner, and mirror actuator
JP2020003629A (ja) * 2018-06-28 2020-01-09 パイオニア株式会社 光走査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006323001A (ja) * 2005-05-17 2006-11-30 Canon Inc 揺動体装置、およびそれを用いた光偏向器
JP2007052256A (ja) * 2005-08-18 2007-03-01 Fujifilm Corp 回転変位型光変調素子及びこれを用いた光学装置

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JP2008304667A (ja) 2008-12-18

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