JP5035919B2 - ドライエッチング方法 - Google Patents
ドライエッチング方法 Download PDFInfo
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- JP5035919B2 JP5035919B2 JP2008533189A JP2008533189A JP5035919B2 JP 5035919 B2 JP5035919 B2 JP 5035919B2 JP 2008533189 A JP2008533189 A JP 2008533189A JP 2008533189 A JP2008533189 A JP 2008533189A JP 5035919 B2 JP5035919 B2 JP 5035919B2
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- 238000001312 dry etching Methods 0.000 title claims description 57
- 238000000034 method Methods 0.000 title claims description 37
- 239000000758 substrate Substances 0.000 claims description 56
- 239000010453 quartz Substances 0.000 claims description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 23
- 239000011521 glass Substances 0.000 claims description 15
- 239000003990 capacitor Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 9
- 239000003989 dielectric material Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000005530 etching Methods 0.000 description 60
- 238000005336 cracking Methods 0.000 description 10
- 230000007935 neutral effect Effects 0.000 description 9
- 239000013078 crystal Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 230000006698 induction Effects 0.000 description 6
- 230000035939 shock Effects 0.000 description 6
- 239000012212 insulator Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 230000005686 electrostatic field Effects 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 238000005513 bias potential Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229940072033 potash Drugs 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Substances [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 235000015320 potassium carbonate Nutrition 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PAZHGORSDKKUPI-UHFFFAOYSA-N lithium metasilicate Chemical compound [Li+].[Li+].[O-][Si]([O-])=O PAZHGORSDKKUPI-UHFFFAOYSA-N 0.000 description 1
- 229910052912 lithium silicate Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32697—Electrostatic control
- H01J37/32706—Polarising the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
実施例1記載のエッチングプロセスを繰り返した。但し、ドライエッチング装置として従来の表面が平坦の電極構造体を備えた装置を用いた。
基板として、熱膨張係数20×10−7/℃のガラスを用いた以外は実施例1記載のエッチングプロセスを繰り返した。エッチング中に、基板の熱変形が生じると共に、基板の割れが観測された。
Claims (3)
- 凸型形状の表面を有する電極構造体であって、この凸型形状が、前記電極構造体の横断面と同心円の凸型形状であり、かつ滑らかな表面を有し、この凸型形状の高さが0.2〜1.0mmであり、そしてこの凸型形状の底面の外周部外側に被加工物を固定するための平らな押さえ代が設けられている電極構造体を備えているドライエッチング装置を用いて、30×10−7/℃以上の熱膨張係数を有する材料である石英、水晶又はガラスからなる被加工物をドライエッチングすることを特徴とするドライエッチング方法。
- 真空チャンバー内の上部にプラズマ発生部及び下部に基板電極部を設け、誘電体材料で構成されたプラズマ発生部側壁の外側に第一の高周波電源に接続されたプラズマ発生用高周波アンテナコイルを設け、前記基板電極部には第二の高周波電源から高周波バイアス電力が印加される電極構造体を設け、この電極構造体に対向させて前記プラズマ発生部内に対向電極を設け、そして前記高周波アンテナコイルの外側に磁場コイルを設けてなり、前記電極構造体が凸型形状の表面を有し、この凸型形状が、前記電極構造体の横断面と同心円の凸型形状であり、かつ滑らかな表面を有し、この凸型形状の高さが0.2〜1.0mmであり、そしてこの凸型形状の底面の外周部外側に被加工物を固定するための平らな押さえ代が設けられている電極構造体を備えてなるドライエッチング装置を用いて、30×10−7/℃以上の熱膨張係数を有する材料である石英、水晶又はガラスからなる被加工物をドライエッチングすることを特徴とするドライエッチング方法。
- 真空チャンバー内の上部にプラズマ発生部及び下部に基板電極部を設け、誘電体材料で構成されたプラズマ発生部側壁の外側に第一の高周波電源に接続されたプラズマ発生用高周波アンテナコイルを設け、前記基板電極部には第二の高周波電源から高周波バイアス電力が印加される電極構造体を設け、この電極構造体に対向させて前記プラズマ発生部内に対向電極を設け、前記高周波アンテナコイルの外側に磁場コイルを設け、そして前記アンテナコイルと第一の高周波電源との間の給電路の途中に分岐デバイスとして可変コンデンサーを設けて対向電極へ接続されるように構成されてなり、前記電極構造体が凸型形状の表面を有し、この凸型形状が、前記電極構造体の横断面と同心円の凸型形状であり、かつ滑らかな表面を有し、この凸型形状の高さが0.2〜1.0mmであり、そしてこの凸型形状の底面の外周部外側に被加工物を固定するための平らな押さえ代が設けられている電極構造体を備えてなるドライエッチング装置を用いて、30×10−7/℃以上の熱膨張係数を有する材料である石英、水晶又はガラスからなる被加工物をドライエッチングすることを特徴とするドライエッチング方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008533189A JP5035919B2 (ja) | 2006-09-08 | 2007-09-05 | ドライエッチング方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006243976 | 2006-09-08 | ||
JP2006243976 | 2006-09-08 | ||
PCT/JP2007/067333 WO2008029854A1 (fr) | 2006-09-08 | 2007-09-05 | Appareil et procédé de gravure sèche |
JP2008533189A JP5035919B2 (ja) | 2006-09-08 | 2007-09-05 | ドライエッチング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2008029854A1 JPWO2008029854A1 (ja) | 2010-01-21 |
JP5035919B2 true JP5035919B2 (ja) | 2012-09-26 |
Family
ID=39157280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008533189A Active JP5035919B2 (ja) | 2006-09-08 | 2007-09-05 | ドライエッチング方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090261066A1 (ja) |
EP (1) | EP2063462A4 (ja) |
JP (1) | JP5035919B2 (ja) |
KR (1) | KR20090046955A (ja) |
CN (1) | CN101512735B (ja) |
TW (1) | TW200820342A (ja) |
WO (1) | WO2008029854A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114702246A (zh) * | 2022-04-29 | 2022-07-05 | 广东工业大学 | 基于磁场协同超声脉冲对玻璃孔的加工方法、系统及应用 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06140187A (ja) * | 1992-10-28 | 1994-05-20 | Sumitomo Metal Ind Ltd | プラズマ処理装置 |
JPH08316215A (ja) * | 1995-05-24 | 1996-11-29 | Matsushita Electric Ind Co Ltd | ガス伝熱プラズマ処理装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4297162A (en) * | 1979-10-17 | 1981-10-27 | Texas Instruments Incorporated | Plasma etching using improved electrode |
US4615755A (en) * | 1985-08-07 | 1986-10-07 | The Perkin-Elmer Corporation | Wafer cooling and temperature control for a plasma etching system |
KR970003885B1 (ko) * | 1987-12-25 | 1997-03-22 | 도오교오 에레구토론 가부시끼 가이샤 | 에칭 방법 및 그 장치 |
US6251792B1 (en) * | 1990-07-31 | 2001-06-26 | Applied Materials, Inc. | Plasma etch processes |
JPH05315881A (ja) | 1992-03-13 | 1993-11-26 | Citizen Watch Co Ltd | 水晶振動子の製造方法 |
JPH07263192A (ja) * | 1994-03-24 | 1995-10-13 | Ulvac Japan Ltd | エッチング装置 |
JP2002022919A (ja) * | 2000-07-04 | 2002-01-23 | Toppan Printing Co Ltd | カラーフィルタの製造方法 |
US7075031B2 (en) * | 2000-10-25 | 2006-07-11 | Tokyo Electron Limited | Method of and structure for controlling electrode temperature |
JP2002216945A (ja) * | 2001-01-15 | 2002-08-02 | Sony Corp | 電界発光素子 |
JP3736795B2 (ja) * | 2001-10-01 | 2006-01-18 | 株式会社アルバック | エッチング装置 |
JP4171590B2 (ja) * | 2001-05-18 | 2008-10-22 | 株式会社アルバック | エッチング方法 |
JP2002313002A (ja) * | 2002-02-07 | 2002-10-25 | Asahi Glass Co Ltd | 磁気ディスク装置用リング状スペーサ |
JP4272646B2 (ja) * | 2005-08-24 | 2009-06-03 | 株式会社アルバック | エッチング装置 |
JP4336680B2 (ja) * | 2006-01-10 | 2009-09-30 | 株式会社アルバック | 反応性イオンエッチング装置 |
-
2007
- 2007-09-05 JP JP2008533189A patent/JP5035919B2/ja active Active
- 2007-09-05 EP EP07806775A patent/EP2063462A4/en not_active Withdrawn
- 2007-09-05 WO PCT/JP2007/067333 patent/WO2008029854A1/ja active Application Filing
- 2007-09-05 KR KR1020097006097A patent/KR20090046955A/ko not_active Application Discontinuation
- 2007-09-05 US US12/440,116 patent/US20090261066A1/en not_active Abandoned
- 2007-09-05 CN CN2007800332185A patent/CN101512735B/zh active Active
- 2007-09-07 TW TW096133532A patent/TW200820342A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06140187A (ja) * | 1992-10-28 | 1994-05-20 | Sumitomo Metal Ind Ltd | プラズマ処理装置 |
JPH08316215A (ja) * | 1995-05-24 | 1996-11-29 | Matsushita Electric Ind Co Ltd | ガス伝熱プラズマ処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008029854A1 (ja) | 2010-01-21 |
EP2063462A1 (en) | 2009-05-27 |
WO2008029854A1 (fr) | 2008-03-13 |
US20090261066A1 (en) | 2009-10-22 |
CN101512735A (zh) | 2009-08-19 |
CN101512735B (zh) | 2012-02-22 |
KR20090046955A (ko) | 2009-05-11 |
EP2063462A4 (en) | 2010-11-24 |
TW200820342A (en) | 2008-05-01 |
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