JP5022563B2 - （メタ）アクリル酸エステルおよびその原料化合物 - Google Patents

（メタ）アクリル酸エステルおよびその原料化合物 Download PDF

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Publication number
JP5022563B2
JP5022563B2 JP2004314525A JP2004314525A JP5022563B2 JP 5022563 B2 JP5022563 B2 JP 5022563B2 JP 2004314525 A JP2004314525 A JP 2004314525A JP 2004314525 A JP2004314525 A JP 2004314525A JP 5022563 B2 JP5022563 B2 JP 5022563B2
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Japan
Prior art keywords
meth
formula
acrylic acid
acid ester
represented
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2004314525A
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English (en)
Japanese (ja)
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JP2005154427A5 (enExample
JP2005154427A (ja
Inventor
敦 大竹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
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Priority to JP2004314525A priority Critical patent/JP5022563B2/ja
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Publication of JP2005154427A5 publication Critical patent/JP2005154427A5/ja
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  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
JP2004314525A 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物 Expired - Lifetime JP5022563B2 (ja)

Priority Applications (1)

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JP2004314525A JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003372356 2003-10-31
JP2003372356 2003-10-31
JP2004314525A JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

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JP2011023175A Division JP2011137163A (ja) 2003-10-31 2011-02-04 （メタ）アクリル酸エステルおよびその原料化合物

Publications (3)

Publication Number Publication Date
JP2005154427A JP2005154427A (ja) 2005-06-16
JP2005154427A5 JP2005154427A5 (enExample) 2007-08-16
JP5022563B2 true JP5022563B2 (ja) 2012-09-12

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JP2004314525A Expired - Lifetime JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013028820A (ja) * 2004-03-09 2013-02-07 Rohm & Haas Electronic Materials Llc シアノアダマンチル化合物およびポリマー

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200604740A (en) * 2004-03-08 2006-02-01 Rohm & Haas Elect Mat Cyanoadamantyl compounds and polymers and photoresists comprising same
CN1780812A (zh) * 2004-04-02 2006-05-31 出光兴产株式会社 金刚烷衍生物及其生产方法
JP4810111B2 (ja) * 2005-03-22 2011-11-09 株式会社トクヤマ アルコラート化合物の製造方法
JP4991326B2 (ja) * 2006-01-24 2012-08-01 富士フイルム株式会社 ポジ型感光性組成物及びそれを用いたパターン形成方法
TWI477909B (zh) 2006-01-24 2015-03-21 Fujifilm Corp 正型感光性組成物及使用它之圖案形成方法
JP6074834B2 (ja) * 2012-03-15 2017-02-08 三菱レイヨン株式会社 レジスト材料の評価方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4296033B2 (ja) * 2003-05-15 2009-07-15 富士フイルム株式会社 ポジ型レジスト組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013028820A (ja) * 2004-03-09 2013-02-07 Rohm & Haas Electronic Materials Llc シアノアダマンチル化合物およびポリマー

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JP2005154427A (ja) 2005-06-16

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