JP5022563B2 - (メタ)アクリル酸エステルおよびその原料化合物 - Google Patents
(メタ)アクリル酸エステルおよびその原料化合物 Download PDFInfo
- Publication number
- JP5022563B2 JP5022563B2 JP2004314525A JP2004314525A JP5022563B2 JP 5022563 B2 JP5022563 B2 JP 5022563B2 JP 2004314525 A JP2004314525 A JP 2004314525A JP 2004314525 A JP2004314525 A JP 2004314525A JP 5022563 B2 JP5022563 B2 JP 5022563B2
- Authority
- JP
- Japan
- Prior art keywords
- meth
- formula
- acrylic acid
- acid ester
- represented
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Materials For Photolithography (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004314525A JP5022563B2 (ja) | 2003-10-31 | 2004-10-28 | (メタ)アクリル酸エステルおよびその原料化合物 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003372356 | 2003-10-31 | ||
JP2003372356 | 2003-10-31 | ||
JP2004314525A JP5022563B2 (ja) | 2003-10-31 | 2004-10-28 | (メタ)アクリル酸エステルおよびその原料化合物 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011023175A Division JP2011137163A (ja) | 2003-10-31 | 2011-02-04 | (メタ)アクリル酸エステルおよびその原料化合物 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005154427A JP2005154427A (ja) | 2005-06-16 |
JP2005154427A5 JP2005154427A5 (enrdf_load_stackoverflow) | 2007-08-16 |
JP5022563B2 true JP5022563B2 (ja) | 2012-09-12 |
Family
ID=34741269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004314525A Expired - Lifetime JP5022563B2 (ja) | 2003-10-31 | 2004-10-28 | (メタ)アクリル酸エステルおよびその原料化合物 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5022563B2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013028820A (ja) * | 2004-03-09 | 2013-02-07 | Rohm & Haas Electronic Materials Llc | シアノアダマンチル化合物およびポリマー |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005258438A (ja) * | 2004-03-08 | 2005-09-22 | Rohm & Haas Electronic Materials Llc | シアノアダマンチル化合物およびポリマーおよびこれを含有するフォトレジスト |
EP1731504A4 (en) * | 2004-04-02 | 2007-11-28 | Idemitsu Kosan Co | ADAMANTAN DERIVATIVE AND METHOD FOR THE PRODUCTION THEREOF |
JP4810111B2 (ja) * | 2005-03-22 | 2011-11-09 | 株式会社トクヤマ | アルコラート化合物の製造方法 |
TWI477909B (zh) | 2006-01-24 | 2015-03-21 | Fujifilm Corp | 正型感光性組成物及使用它之圖案形成方法 |
JP4991326B2 (ja) * | 2006-01-24 | 2012-08-01 | 富士フイルム株式会社 | ポジ型感光性組成物及びそれを用いたパターン形成方法 |
JP6074834B2 (ja) * | 2012-03-15 | 2017-02-08 | 三菱レイヨン株式会社 | レジスト材料の評価方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4296033B2 (ja) * | 2003-05-15 | 2009-07-15 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
-
2004
- 2004-10-28 JP JP2004314525A patent/JP5022563B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013028820A (ja) * | 2004-03-09 | 2013-02-07 | Rohm & Haas Electronic Materials Llc | シアノアダマンチル化合物およびポリマー |
Also Published As
Publication number | Publication date |
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JP2005154427A (ja) | 2005-06-16 |
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