JP5022563B2 - （メタ）アクリル酸エステルおよびその原料化合物 - Google Patents

（メタ）アクリル酸エステルおよびその原料化合物 Download PDF

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Publication number
JP5022563B2
JP5022563B2 JP2004314525A JP2004314525A JP5022563B2 JP 5022563 B2 JP5022563 B2 JP 5022563B2 JP 2004314525 A JP2004314525 A JP 2004314525A JP 2004314525 A JP2004314525 A JP 2004314525A JP 5022563 B2 JP5022563 B2 JP 5022563B2
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Japan
Prior art keywords
meth
formula
acrylic acid
acid ester
represented
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Expired - Lifetime
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JP2004314525A
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English (en)
Japanese (ja)
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JP2005154427A5 (enrdf_load_stackoverflow
JP2005154427A (ja
Inventor
敦 大竹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
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Priority to JP2004314525A priority Critical patent/JP5022563B2/ja
Publication of JP2005154427A publication Critical patent/JP2005154427A/ja
Publication of JP2005154427A5 publication Critical patent/JP2005154427A5/ja
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  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Materials For Photolithography (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2004314525A 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物 Expired - Lifetime JP5022563B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004314525A JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003372356 2003-10-31
JP2003372356 2003-10-31
JP2004314525A JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

Related Child Applications (1)

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JP2011023175A Division JP2011137163A (ja) 2003-10-31 2011-02-04 （メタ）アクリル酸エステルおよびその原料化合物

Publications (3)

Publication Number Publication Date
JP2005154427A JP2005154427A (ja) 2005-06-16
JP2005154427A5 JP2005154427A5 (enrdf_load_stackoverflow) 2007-08-16
JP5022563B2 true JP5022563B2 (ja) 2012-09-12

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JP2004314525A Expired - Lifetime JP5022563B2 (ja) 2003-10-31 2004-10-28 （メタ）アクリル酸エステルおよびその原料化合物

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013028820A (ja) * 2004-03-09 2013-02-07 Rohm & Haas Electronic Materials Llc シアノアダマンチル化合物およびポリマー

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005258438A (ja) * 2004-03-08 2005-09-22 Rohm & Haas Electronic Materials Llc シアノアダマンチル化合物およびポリマーおよびこれを含有するフォトレジスト
EP1731504A4 (en) * 2004-04-02 2007-11-28 Idemitsu Kosan Co ADAMANTAN DERIVATIVE AND METHOD FOR THE PRODUCTION THEREOF
JP4810111B2 (ja) * 2005-03-22 2011-11-09 株式会社トクヤマ アルコラート化合物の製造方法
TWI477909B (zh) 2006-01-24 2015-03-21 Fujifilm Corp 正型感光性組成物及使用它之圖案形成方法
JP4991326B2 (ja) * 2006-01-24 2012-08-01 富士フイルム株式会社 ポジ型感光性組成物及びそれを用いたパターン形成方法
JP6074834B2 (ja) * 2012-03-15 2017-02-08 三菱レイヨン株式会社 レジスト材料の評価方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4296033B2 (ja) * 2003-05-15 2009-07-15 富士フイルム株式会社 ポジ型レジスト組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013028820A (ja) * 2004-03-09 2013-02-07 Rohm & Haas Electronic Materials Llc シアノアダマンチル化合物およびポリマー

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JP2005154427A (ja) 2005-06-16

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