JP5005945B2 - 基板検査装置 - Google Patents
基板検査装置 Download PDFInfo
- Publication number
- JP5005945B2 JP5005945B2 JP2006101602A JP2006101602A JP5005945B2 JP 5005945 B2 JP5005945 B2 JP 5005945B2 JP 2006101602 A JP2006101602 A JP 2006101602A JP 2006101602 A JP2006101602 A JP 2006101602A JP 5005945 B2 JP5005945 B2 JP 5005945B2
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- 238000007689 inspection Methods 0.000 title claims description 199
- 239000000758 substrate Substances 0.000 claims description 205
- 238000005339 levitation Methods 0.000 claims description 51
- 238000005286 illumination Methods 0.000 claims description 27
- 230000007246 mechanism Effects 0.000 claims description 9
- 238000003825 pressing Methods 0.000 claims description 8
- 244000126211 Hericium coralloides Species 0.000 claims description 5
- 230000000717 retained effect Effects 0.000 claims description 2
- 230000007547 defect Effects 0.000 description 16
- 239000011521 glass Substances 0.000 description 10
- 238000001514 detection method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006101602A JP5005945B2 (ja) | 2006-04-03 | 2006-04-03 | 基板検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006101602A JP5005945B2 (ja) | 2006-04-03 | 2006-04-03 | 基板検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007278715A JP2007278715A (ja) | 2007-10-25 |
| JP2007278715A5 JP2007278715A5 (enrdf_load_stackoverflow) | 2009-05-21 |
| JP5005945B2 true JP5005945B2 (ja) | 2012-08-22 |
Family
ID=38680317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006101602A Expired - Fee Related JP5005945B2 (ja) | 2006-04-03 | 2006-04-03 | 基板検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5005945B2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4964176B2 (ja) * | 2008-03-13 | 2012-06-27 | ＡｖａｎＳｔｒａｔｅ株式会社 | ガラス板の厚さ測定装置およびガラス板の厚さ測定方法 |
| JP2011141127A (ja) * | 2010-01-05 | 2011-07-21 | Avanstrate Taiwan Inc | ガラス板の欠陥部分の目視検査方法及び目視検査装置 |
| JP5722049B2 (ja) * | 2011-01-06 | 2015-05-20 | オリンパス株式会社 | 基板検査システム |
| JP5928771B2 (ja) * | 2011-10-03 | 2016-06-01 | オリンパス株式会社 | 基板検査装置および基板検査方法 |
| CN204422430U (zh) * | 2014-12-25 | 2015-06-24 | 日东电工株式会社 | 目视检查装置 |
| CN108106996B (zh) * | 2017-12-25 | 2024-05-28 | 通彩智能科技集团有限公司 | 一种玻璃检测盛放平台 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4166340B2 (ja) * | 1997-09-24 | 2008-10-15 | オリンパス株式会社 | 基板検査装置 |
| JP2001305064A (ja) * | 2000-04-27 | 2001-10-31 | Olympus Optical Co Ltd | 基板検査装置 |
| JP4307872B2 (ja) * | 2003-03-18 | 2009-08-05 | オリンパス株式会社 | 基板検査装置 |
-
2006
- 2006-04-03 JP JP2006101602A patent/JP5005945B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007278715A (ja) | 2007-10-25 |
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