JP4984730B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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Description
すなわち、IGBTなどのパワー半導体デバイスでは、半導体チップの接合部温度Tjに上限保証温度が規定されているのに対して、放熱用ベース(銅ベース板)に絶縁基板を介して半導体チップをマウントした片面冷却方式では、半導体チップの上面側がパッケージ内に充填した封止樹脂で封止されているのでチップ上面側からの放熱は殆ど期待できない。このために半導体チップの小型,大電流化に伴い発熱密度が増大すると、半導体チップの上面電極に接続する配線リードとしてアルミワイヤをボンディングした在来の配線構造では、チップの接合部温度を上限保証温度以下に抑えることが困難となるほか、アルミワイヤのジュール発熱も加わってワイヤ溶断のおそれもあってパワーサイクル耐量の低下が懸念される。
かかる点、半導体チップ3の上面と絶縁基板2のとの間に跨がって接続するする配線部材を、ヒートスプレッダの機能を持たせて半導体チップ2の上面主電極面に接合した板状の電極板と、該電極板と絶縁基板との間に接続する箔状導体片(リードフレーム)との2部品に分けて製作すれば前記した異形の単体部品と比べて部品製造コストの大幅な低減が可能である。
(1)前記電極板の周縁から側方に張り出した延長部を複数の条片に分岐し、各分岐条片ごとにリードフレームの接合端部との間をスポット融接する(請求項2)。
(2)前記した電極板の延長部に、リードフレームとの重ね合わせ位置を決める位置決め段部を形成する(請求項3)。
前記電極板の端面を露出して半導体チップおよびリードフレームの周域を樹脂封止し、かつリードフレームの一端を封止樹脂から外方に引出してモジュールの単位ユニットを構成した上で、該単位ユニットに対し、電極板端面に絶縁層を介して冷却体を伝熱的に組み付ける(請求項4)。
ここで、前記の冷却体は、冷媒を流す液冷式、ないし放熱フィンを備えた風冷式の冷却体で構成する(請求項6)。
一方、第2の発明によるモジュール組立構造によれば、前記の配線構造を生かして単位ユニットの封止樹脂から外方に露出させた電極板の端面に冷却体を組み付けるようにしたことにより、放熱性を大幅に向上できる。また、複数基のモジュール単位ユニットを並置して共用の冷却体と組合せた上で、各ユニットから引出したリードフレームを相互接続して所定の回路を構成することで、放熱性に優れた半導体モジュールをコンパクトに構築できる。
ここで、電極板7はヒートスプレッダの機能を持たせて半導体チップ3の上面電極3aに重ねてろう接合(例えば半田付け)し、その接合面域から左右側方に張り出した延長部をリードフレーム8に接合端部に重ね合わせてレーザ溶接法,電子ビーム溶接法などにより局所加熱して融接接合しており、9はろう接合部(半田接合部)、10はスポット融接部を表している。
このように電極板7の延長部を複数条に分けて分岐条片7aを形成しておくことにより、各分岐条片7bの断面積が小さくなってスポット融接部10から半導体チップとの間のろう接合部9に至る伝熱経路の熱抵抗が増加する。これにより、スポット融接地点の局所加熱によって半導体チップ3とのろう接合部9が高温になって再溶融するのを防ぐことができる。また、電極板7の延長部に前記の位置決め段部7bを形成しておくことにより、組立工程で電極板7とリードフレーム8の配線部品を所定位置に位置決めすることができる。
まず、半導体装置のモジュールを構築する単位ユニットの構造を図3に示す。すなわち、半導体チップ(IGBT)3の両主面(エミッタ,コレクタ)にそれぞれ電極板7を接合(ろう付け)し、さらにこの電極板7の延長部に外部導出端子となるリードフレーム8を接合(スポット融接)した上で、電極板7の端面を外方に露出させるようにして半導体チップ3,電極板7,リードフレーム8の周域を封止樹脂11で封止し、さらに封止樹脂11の凹部底面に露出している電極板7の端面に絶縁シート12を被着して単位ユニット13を構成する。また、リードフレーム8の一端は封止樹脂11から側方に引出しておき、封止樹脂11の四隅コーナー部には後記の冷却体を組み付ける際に用いる締結ボルトのボルト通し穴11aを開口しておく。
そして、前記の単位ユニット13に対し、図4で示すようにユニット13を挟んで上下に冷却体14を組み付け、さらに伝熱体15をユニット13の凹部に嵌入してその底面に露呈している電極板7の端面に絶縁シート12を介して重ね合わせた上で、ボルト16により締結して一体に組み立てる。なお、図示の冷却体14は冷媒通路14aを形成した液冷式の冷却体である。
次に、複数基の単位ユニット13に冷却体14を組合せて構築したモジュールの構成例を図5,図6に示す。ここで、図5の構成では複数基の単位ユニット13を同一面上に並置し、かつこれらユニットを挟んで上下に共有の液冷式冷却体14を組み付けた上で、各単位ユニット13から側方に引き出したリードフレームの相互間を接続して所定の半導体回路(例えば3相インバータ回路)を形成している。
3 半導体チップ
7 電極板
7a 分岐条片
7b 位置決め段部
8 リードフレーム
9 ろう接合部
10 スポット融接部
11 封止樹脂
12 絶縁シート
13 モジュール単位ユニット
14,17 冷却体
14a 冷媒通路
14b 放熱フィン
Claims (6)
- ヒートスプレッダとして機能する電極板を半導体チップの主面にろう付けした後、前記電極板の周縁の少なくとも一部を前記半導体チップとの接合面域から側方に延在させた延長部に、配線部材としてのリードフレームの接合端部を重ね合わせて融接接合したことを特徴とする半導体装置。
- 請求項1に記載の半導体装置において、電極板の周縁から側方に張り出した延長部を複数の条片に分岐し、各分岐条片ごとにリードフレームの接合端部との間をスポット融接したことを特徴とする半導体装置。
- 請求項1または2のいずれかに記載の半導体装置において、電極板の延長部に、リードフレームとの重ね合わせ位置を決める位置決め段部を形成したことを特徴とする半導体装置。
- 電極板を半導体チップの主面にろう付けした後、前記電極板の周縁の少なくとも一部を前記半導体チップとの接合面域から側方に延在させた延長部に、配線部材としてのリードフレームの接合端部を重ね合わせて融接接合し、さらに、
前記電極板の端面を露出して半導体チップおよびリードフレームの周域を樹脂封止し、かつリードフレームの一端を封止樹脂から外方に引出してモジュールの単位ユニットを構成した上で、該単位ユニットの電極板端面に絶縁層を介して冷却体を伝熱的に組み付けたことを特徴とする半導体装置。 - 請求項4に記載の半導体装置において、複数基の単位ユニットを並置し、かつ各単位ユニットに共用の冷却体を組合せた上で、単位ユニットのリードフレームを相互接続してモジュールを構築したことを特徴とする半導体装置。
- 請求項4または5に記載の半導体装置において、冷却体が液冷式、ないし放熱フィンを備えた風冷式の冷却体であることを特徴とする半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2006216324A JP4984730B2 (ja) | 2006-08-09 | 2006-08-09 | 半導体装置 |
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JP2006216324A JP4984730B2 (ja) | 2006-08-09 | 2006-08-09 | 半導体装置 |
Publications (2)
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JP2008042039A JP2008042039A (ja) | 2008-02-21 |
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JP5511621B2 (ja) | 2010-10-13 | 2014-06-04 | 三菱電機株式会社 | 半導体装置 |
JP5633581B2 (ja) * | 2011-01-07 | 2014-12-03 | 富士電機株式会社 | 半導体装置およびその製造方法 |
JP6354415B2 (ja) | 2013-08-14 | 2018-07-11 | 富士電機株式会社 | レーザ溶接機とそれを用いたレーザ溶接方法 |
JP2015119072A (ja) * | 2013-12-19 | 2015-06-25 | 富士電機株式会社 | レーザ溶接方法、レーザ溶接治具、半導体装置 |
JP2016099127A (ja) | 2014-11-18 | 2016-05-30 | 富士電機株式会社 | パワー半導体モジュールの製造方法及びその中間組立ユニット |
US10741478B2 (en) | 2016-03-30 | 2020-08-11 | Mitsubishi Electric Corporation | Power module and method of manufacturing the same, and power electronic apparatus and method of manufacturing the same |
JP7278077B2 (ja) * | 2019-01-10 | 2023-05-19 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
DE112020003541T5 (de) | 2019-07-25 | 2022-06-09 | Hitachi Energy Switzerland Ag | Leistungshalbleitermodul |
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