JP4982818B2 - 情報記録媒体用ガラス基板の製造方法および吸着具 - Google Patents
情報記録媒体用ガラス基板の製造方法および吸着具 Download PDFInfo
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- JP4982818B2 JP4982818B2 JP2012501483A JP2012501483A JP4982818B2 JP 4982818 B2 JP4982818 B2 JP 4982818B2 JP 2012501483 A JP2012501483 A JP 2012501483A JP 2012501483 A JP2012501483 A JP 2012501483A JP 4982818 B2 JP4982818 B2 JP 4982818B2
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- JP
- Japan
- Prior art keywords
- suction
- information recording
- glass substrate
- recording medium
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
- B24B7/241—Methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Robotics (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
Claims (3)
- 中央部に貫通孔が設けられた円盤状の情報記録媒体用ガラス基板を製造する情報記録媒体用ガラス基板の製造方法であって、
中央部に貫通孔が設けられた円盤状のガラス素材の表面を研磨装置で研磨して情報記録媒体用ガラス基板を形成する工程と、
前記研磨された情報記録媒体用ガラス基板に吸着具を当接させて、前記情報記録媒体用ガラス基板に前記吸着具を吸着させた状態で、前記情報記録媒体用ガラス基板を前記研磨装置から取り出す工程、とを有し、
前記吸着具は、吸引装置に吸引可能に接続される吸引用通気路を有する吸着具本体と、前記吸引用通気路と連通した吸引口を有し前記吸着具本体と一体的に設けられた吸着部とを備え、
前記情報記録媒体用ガラス基板を前記研磨装置から取り出す工程においては、前記吸着部を前記情報記録媒体用ガラス基板に当接させた当接状態で、前記吸引装置の作動に伴い前記吸着部の吸引口から吸引用通気路を介して吸引させることにより、前記吸着部で前記情報記録媒体用ガラス基板が吸着されており、
前記吸着具は、
前記当接状態で、前記情報記録媒体用ガラス基板に設けられた貫通孔と外部とを連通し得るように構成された外部連通用通気路を備え、
前記外部連通用通気路は、前記吸着部に開口されて前記当接状態で前記貫通孔に連通するように配設される連通口と、その連通口と外部とを連通した連通路とを備えており、
前記吸着部は、前記情報記録媒体用ガラス基板に当接する当接パッドを備え、
前記当接パッドは、その中心部に形成された中心孔と、前記当接状態で前記中心孔と外部とを連通できるように、前記中心孔から当該当接パッドの外周端に延ばされた溝とを備え、
前記連通口は、前記中心孔から構成され、
前記連通路は、前記溝から構成されており、
前記当接状態で、前記情報記録媒体用ガラス基板に設けられた貫通孔が外部と連通されていることを特徴とする情報記録媒体用ガラス基板の製造方法。 - 前記研磨装置は、前記円盤状のガラス素材の表面を研磨する研磨パッドを備え、
前記研磨パッドとして、前記円盤状のガラス素材が重ね合わされた際に、前記貫通孔を前記円盤状のガラス素材の一面側から塞ぎ得るものを用いることを特徴とする請求項1に記載の情報記録媒体用ガラス基板の製造方法。 - 吸引装置に吸引可能に接続される吸引用通気路を有する吸着具本体と、前記吸引用通気路と連通した吸引口を有し前記吸着具本体と一体的に設けられた吸着部とを備え、
前記吸着部を貫通孔を有する円盤状の被吸着部材に当接させた当接状態で前記吸引装置の作動に伴い前記吸着部の吸引口から吸引用通気路を介して吸引させることにより、吸着部で被吸着部材を吸着可能とした吸着具であって、
前記吸着具は、
前記当接状態で、前記被吸着部材に設けられた貫通孔と外部とを連通し得るように構成された外部連通用通気路を備え、
前記外部連通用通気路は、前記吸着部に開口されて前記当接状態で前記貫通孔に連通するように配設される連通口と、その連通口と外部とを連通した連通路とを備え、
前記吸着部は、前記被吸着部材に当接する当接パッドを備え、
前記当接パッドは、その中心部に形成された中心孔と、前記当接状態で前記中心孔と外部とを連通できるように、前記中心孔から当該当接パッドの外周端に延ばされた溝とを備え、
前記連通口は、前記中心孔から構成され、
前記連通路は、前記溝から構成されており、
前記当接状態で、前記被吸着部材に設けられた貫通孔が外部と連通し得るように構成されたことを特徴とする吸着具。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012501483A JP4982818B2 (ja) | 2010-06-30 | 2011-06-21 | 情報記録媒体用ガラス基板の製造方法および吸着具 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010148937 | 2010-06-30 | ||
JP2010148937 | 2010-06-30 | ||
PCT/JP2011/003546 WO2012001913A1 (ja) | 2010-06-30 | 2011-06-21 | 情報記録媒体用ガラス基板の製造方法および吸着具 |
JP2012501483A JP4982818B2 (ja) | 2010-06-30 | 2011-06-21 | 情報記録媒体用ガラス基板の製造方法および吸着具 |
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JP2012096247A Division JP2012155842A (ja) | 2010-06-30 | 2012-04-20 | 情報記録媒体用ガラス基板の製造方法および吸着具 |
Publications (2)
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JP4982818B2 true JP4982818B2 (ja) | 2012-07-25 |
JPWO2012001913A1 JPWO2012001913A1 (ja) | 2013-08-22 |
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JP2012501483A Active JP4982818B2 (ja) | 2010-06-30 | 2011-06-21 | 情報記録媒体用ガラス基板の製造方法および吸着具 |
JP2012096247A Withdrawn JP2012155842A (ja) | 2010-06-30 | 2012-04-20 | 情報記録媒体用ガラス基板の製造方法および吸着具 |
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Country Status (3)
Country | Link |
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US (1) | US20130102230A1 (ja) |
JP (2) | JP4982818B2 (ja) |
WO (1) | WO2012001913A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9022444B1 (en) * | 2013-05-20 | 2015-05-05 | Western Digital Technologies, Inc. | Vacuum nozzle having back-pressure release hole |
KR20200142622A (ko) * | 2019-06-12 | 2020-12-23 | 삼성디스플레이 주식회사 | 기판 이송 장치 및 이를 이용한 기판 이송 방법 |
CN114043513B (zh) * | 2021-12-06 | 2023-08-25 | 成都秦川物联网科技股份有限公司 | 适用于工业物联网制造的抓取机构、机械手、装配方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003133390A (ja) * | 2001-10-29 | 2003-05-09 | Disco Abrasive Syst Ltd | ウエーハ搬送装置 |
JP2004040011A (ja) * | 2002-07-08 | 2004-02-05 | Toyo Kohan Co Ltd | 基板の供給取出治具、供給取出装置および供給取出方法 |
US20050052041A1 (en) * | 2003-07-11 | 2005-03-10 | Bonora Anthony C. | Ultra low contact area end effector |
JP2006026856A (ja) * | 2004-07-20 | 2006-02-02 | Nakamura Tome Precision Ind Co Ltd | ディスクの周縁研削装置 |
US7292427B1 (en) * | 2004-10-12 | 2007-11-06 | Kla-Tencor Technologies Corporation | Pin lift chuck assembly for warped substrates |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3850951B2 (ja) * | 1997-05-15 | 2006-11-29 | 東京エレクトロン株式会社 | 基板搬送装置及び基板搬送方法 |
US6077026A (en) * | 1998-03-30 | 2000-06-20 | Progressive System Technologies, Inc. | Programmable substrate support for a substrate positioning system |
JP2001024051A (ja) * | 1999-07-09 | 2001-01-26 | Tokyo Seimitsu Co Ltd | ウェーハ吸着パッド |
JP2001114463A (ja) * | 1999-10-15 | 2001-04-24 | Smc Corp | 吸着パッド |
US6244641B1 (en) * | 1999-12-02 | 2001-06-12 | M.E.C. Technology, Inc. | Wafer transfer arm |
WO2001064391A2 (en) * | 2000-02-29 | 2001-09-07 | Applied Materials, Inc. | Planarization system with a wafer transfer corridor and multiple polishing modules |
JP2002015421A (ja) * | 2000-06-26 | 2002-01-18 | Fuji Electric Co Ltd | 真空チャック、該真空チャックを備えた磁気転写装置、および磁気記録媒体 |
DE60101458T2 (de) * | 2001-05-25 | 2004-10-28 | Infineon Technologies Ag | Halbleitersubstrathalter mit bewegbarer Platte für das chemisch-mechanische Polierverfahren |
US6729947B1 (en) * | 2002-11-04 | 2004-05-04 | Texas Instruments Incorporated | Semiconductor wafer handler |
US7309089B2 (en) * | 2004-02-04 | 2007-12-18 | Delaware Capital Formation, Inc. | Vacuum cup |
-
2011
- 2011-06-21 JP JP2012501483A patent/JP4982818B2/ja active Active
- 2011-06-21 WO PCT/JP2011/003546 patent/WO2012001913A1/ja active Application Filing
- 2011-06-21 US US13/807,832 patent/US20130102230A1/en not_active Abandoned
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2012
- 2012-04-20 JP JP2012096247A patent/JP2012155842A/ja not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003133390A (ja) * | 2001-10-29 | 2003-05-09 | Disco Abrasive Syst Ltd | ウエーハ搬送装置 |
JP2004040011A (ja) * | 2002-07-08 | 2004-02-05 | Toyo Kohan Co Ltd | 基板の供給取出治具、供給取出装置および供給取出方法 |
US20050052041A1 (en) * | 2003-07-11 | 2005-03-10 | Bonora Anthony C. | Ultra low contact area end effector |
JP2006026856A (ja) * | 2004-07-20 | 2006-02-02 | Nakamura Tome Precision Ind Co Ltd | ディスクの周縁研削装置 |
US7292427B1 (en) * | 2004-10-12 | 2007-11-06 | Kla-Tencor Technologies Corporation | Pin lift chuck assembly for warped substrates |
Also Published As
Publication number | Publication date |
---|---|
WO2012001913A1 (ja) | 2012-01-05 |
JP2012155842A (ja) | 2012-08-16 |
US20130102230A1 (en) | 2013-04-25 |
JPWO2012001913A1 (ja) | 2013-08-22 |
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