JP4981720B2 - 電離真空計 - Google Patents
電離真空計 Download PDFInfo
- Publication number
- JP4981720B2 JP4981720B2 JP2008063197A JP2008063197A JP4981720B2 JP 4981720 B2 JP4981720 B2 JP 4981720B2 JP 2008063197 A JP2008063197 A JP 2008063197A JP 2008063197 A JP2008063197 A JP 2008063197A JP 4981720 B2 JP4981720 B2 JP 4981720B2
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- electrode
- cathode
- vacuum gauge
- ionization
- ion collector
- Prior art date
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- 239000000758 substrate Substances 0.000 claims description 22
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 239000002041 carbon nanotube Substances 0.000 claims description 14
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 claims description 5
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 29
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- 230000008020 evaporation Effects 0.000 description 4
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000009191 jumping Effects 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 238000001241 arc-discharge method Methods 0.000 description 1
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- 239000000919 ceramic Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- DIEXWTMZAWQPHZ-UHFFFAOYSA-N dibutyl benzene-1,2-dicarboxylate;3,4-dibutylphthalic acid Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC.CCCCC1=CC=C(C(O)=O)C(C(O)=O)=C1CCCC DIEXWTMZAWQPHZ-UHFFFAOYSA-N 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
P=(1/k)(Ii/Ie) (式1)
102 陰極
104 ゲット電極
106 イオンコレクタ
108 基板
110 エミッタフィルム
112 スペーサー
114 筐体
116 引出線
Claims (7)
- 基板及び該基板に設置されるエミッタフィルムを含む陰極と、
前記陰極と所定の距離だけ離れて設置されるゲット電極と、
前記ゲット電極と所定の距離だけ離れて設置されるイオンコレクタと、
を備え、
前記陰極のエミッタフィルムは、カーボンナノチューブと、低融点のガラス粒子と、導電粒子と、を含むことを特徴とする電離真空計。 - 前記陰極の基板はインジウムスズ酸化物からなることを特徴とする、請求項1に記載の電離真空計。
- 前記陰極は、複数のスペーサーにより、前記ゲット電極から200μm以下の距離だけ分離されていることを特徴とする、請求項1に記載の電離真空計。
- 前記イオンコレクタは、導電金属からなり、平板型に形成されていることを特徴とする、請求項1に記載の電離真空計。
- 前記ゲット電極はリング又は孔、網の形状に設けられていることを特徴とする、請求項1に記載の電離真空計。
- 前記電離真空計は、さらに筐体と、三本の引出線と、を備え、
前記陰極と、前記ゲット電極と、前記イオンコレクタと、は全て前記筐体の内部に設置され、
前記三本の引出線は、一方の端部がそれぞれ前記基板、前記ゲット電極、前記イオンコレクタに接続され、もう一方の端部が前記筐体の外部に延出することを特徴とする、請求項1に記載の電離真空計。 - 前記ゲット電極と前記イオンコレクタとは、0.5〜2mmの距離だけ分離するように設置されていることを特徴とする、請求項1に記載の電離真空計。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710073541.7 | 2007-03-16 | ||
CNA2007100735417A CN101266180A (zh) | 2007-03-16 | 2007-03-16 | 电离规 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008233079A JP2008233079A (ja) | 2008-10-02 |
JP4981720B2 true JP4981720B2 (ja) | 2012-07-25 |
Family
ID=39762031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008063197A Active JP4981720B2 (ja) | 2007-03-16 | 2008-03-12 | 電離真空計 |
Country Status (3)
Country | Link |
---|---|
US (2) | US7755363B2 (ja) |
JP (1) | JP4981720B2 (ja) |
CN (1) | CN101266180A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019015666A (ja) * | 2017-07-10 | 2019-01-31 | 株式会社アルバック | 三極管型電離真空計及び圧力測定方法 |
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JP4881584B2 (ja) * | 2005-06-28 | 2012-02-22 | 株式会社ブリヂストン | 凹凸図形検査のためのマスターデータの作成方法 |
CN101266180A (zh) * | 2007-03-16 | 2008-09-17 | 清华大学 | 电离规 |
JP5669411B2 (ja) * | 2009-04-09 | 2015-02-12 | キヤノンアネルバ株式会社 | 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極 |
CN101894725B (zh) * | 2010-07-09 | 2011-12-14 | 清华大学 | 离子源 |
US9322262B2 (en) | 2011-12-22 | 2016-04-26 | Schlumberger Technology Corporation | Pulsed neutron generator tube design which extends the lifetime of a cathode |
CN103117205B (zh) * | 2013-01-30 | 2016-03-30 | 深圳市华星光电技术有限公司 | 显示设备、背光模组及其场发射光源装置和制造方法 |
WO2015099561A1 (en) * | 2013-12-24 | 2015-07-02 | Siemens Research Center Limited Liability Company | Arrangement and method for field emission |
EP2966236A1 (en) | 2014-07-07 | 2016-01-13 | Fundacíon Tecnalia Research & Innovation | Joining device for precast reinforced concrete columns with a dry joint |
CN104142207B (zh) * | 2014-08-05 | 2016-08-24 | 温州大学 | 基于气体吸附与碳纳米管场发射原理的真空计及其真空度检测方法 |
US10175005B2 (en) * | 2015-03-30 | 2019-01-08 | Infinera Corporation | Low-cost nano-heat pipe |
CN105070628B (zh) * | 2015-07-13 | 2017-03-08 | 兰州空间技术物理研究所 | 一种对称式碳纳米管阴极电离规 |
RU2610214C1 (ru) * | 2015-10-13 | 2017-02-08 | Федеральное государственное автономное научное учреждение "Центральный научно-исследовательский и опытно-конструкторский институт робототехники и технической кибернетики" (ЦНИИ РТК) | Разборный инверсно-магнетронный вакуумметрический преобразователь с дополнительным углеродным автоэлектронным эмиттером, защищенным от ионной бомбардировки |
CN109935508B (zh) * | 2019-03-26 | 2020-03-27 | 中山大学 | 一种集成离子收集电极的场发射器件结构及其制备方法和应用 |
CN112903183B (zh) * | 2019-11-19 | 2022-11-22 | 北京大学 | 一种片上微型电离真空传感器及其制造方法 |
CN115839795B (zh) * | 2022-12-25 | 2024-02-20 | 兰州空间技术物理研究所 | 一种基于点状碳纳米管阴极的电离真空计 |
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-
2007
- 2007-03-16 CN CNA2007100735417A patent/CN101266180A/zh active Pending
- 2007-12-29 US US11/967,116 patent/US7755363B2/en active Active
-
2008
- 2008-03-12 JP JP2008063197A patent/JP4981720B2/ja active Active
-
2010
- 2010-06-04 US US12/794,362 patent/US8242783B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019015666A (ja) * | 2017-07-10 | 2019-01-31 | 株式会社アルバック | 三極管型電離真空計及び圧力測定方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2008233079A (ja) | 2008-10-02 |
US20080224711A1 (en) | 2008-09-18 |
US7755363B2 (en) | 2010-07-13 |
US20100237874A1 (en) | 2010-09-23 |
US8242783B2 (en) | 2012-08-14 |
CN101266180A (zh) | 2008-09-17 |
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