JP4972674B2 - 試料を光学的に検査する方法 - Google Patents
試料を光学的に検査する方法 Download PDFInfo
- Publication number
- JP4972674B2 JP4972674B2 JP2009169716A JP2009169716A JP4972674B2 JP 4972674 B2 JP4972674 B2 JP 4972674B2 JP 2009169716 A JP2009169716 A JP 2009169716A JP 2009169716 A JP2009169716 A JP 2009169716A JP 4972674 B2 JP4972674 B2 JP 4972674B2
- Authority
- JP
- Japan
- Prior art keywords
- gain
- detection signal
- signal
- sensor
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
Claims (1)
- 試料上の欠陥を検出する方法であって、
入射ビームを試料表面に向けて導くこと、
第1検出ビームをセンサで検出すること、および前記第1検出ビームに基づいて第1検出信号を発生することであって、前記第1検出ビームは、前記入射ビームに応答して前記第1試料表面から来るものであること、
第1非線形検出信号を前記第1検出信号に基づいて発生すること、
前記非線形検出信号を第1ディジタル化検出信号にディジタル化すること、
前記第1ディジタル化検出信号を分析することによって、それが前記第1試料表面上の欠陥に対応するかを決定すること、
前記センサの前記第1検出信号の発生のためのゲインである第1センサゲインを前記第1非線形検出信号または前記第1検出信号に基づいて自動的に調節すること、
入射ビームを第2試料表面に向けて導くこと、
第2検出ビームを前記センサで検出すること、および前記第2検出ビームに基づいて第2検出信号を発生することであって、前記第2検出ビームは、前記入射ビームに応答して前記第2試料表面から来るものであること、
第2非線形検出信号を前記第2検出信号に基づいて発生すること、
前記第2非線形検出信号を第2ディジタル化検出信号にディジタル化すること、および
前記センサの前記第2検出信号の発生のためのゲインである第2センサゲインを前記第2非線形検出信号または前記第2検出信号に基づいて自動的に調節すること
を含む方法であって、
更に、
前記第1ディジタル化検出信号を分析する前に、前記第1および第2ディジタル化検出信号を較正すること、
前記第1ディジタル化検出信号を分析する前に、前記第1および第2センサゲインをディジタル化および較正すること、および
前記第1および第2ディジタル化検出信号を分析する前で、かつ前記第1および第2センサゲインがディジタル化された後に、前記第1ディジタル化および較正されたセンサゲインを、前記第1ディジタル化および較正された検出信号から引き、前記第2ディジタル化および較正されたセンサゲインを、前記第2ディジタル化および較正された検出信号から引くこと
を含み、
前記第1および第2ディジタル化検出信号は対数値であり、
前記第1ディジタル化検出信号を分析することは、前記第2ディジタル化検出信号を引くことによって達成され、前記引くことは、前記第1および第2試料表面からの強度値の対数の差を生み、前記第1ディジタル化検出信号は、前記差が所定の閾値より上のときには、前記第1試料表面上の欠陥に対応すると決定される、方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35980502P | 2002-02-26 | 2002-02-26 | |
US60/359,805 | 2002-02-26 | ||
US10/180,807 US6833913B1 (en) | 2002-02-26 | 2002-06-24 | Apparatus and methods for optically inspecting a sample for anomalies |
US10/180,807 | 2002-06-24 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003572074A Division JP4619005B2 (ja) | 2002-02-26 | 2003-02-26 | 異常を発見するために試料を光学的に検査するシステム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009282036A JP2009282036A (ja) | 2009-12-03 |
JP4972674B2 true JP4972674B2 (ja) | 2012-07-11 |
Family
ID=27767461
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003572074A Expired - Lifetime JP4619005B2 (ja) | 2002-02-26 | 2003-02-26 | 異常を発見するために試料を光学的に検査するシステム |
JP2009169716A Expired - Lifetime JP4972674B2 (ja) | 2002-02-26 | 2009-07-21 | 試料を光学的に検査する方法 |
JP2009169717A Expired - Lifetime JP4972675B2 (ja) | 2002-02-26 | 2009-07-21 | 検査システム |
JP2010167223A Expired - Lifetime JP4972701B2 (ja) | 2002-02-26 | 2010-07-26 | 異常を発見するために試料を光学的に検査する装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003572074A Expired - Lifetime JP4619005B2 (ja) | 2002-02-26 | 2003-02-26 | 異常を発見するために試料を光学的に検査するシステム |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009169717A Expired - Lifetime JP4972675B2 (ja) | 2002-02-26 | 2009-07-21 | 検査システム |
JP2010167223A Expired - Lifetime JP4972701B2 (ja) | 2002-02-26 | 2010-07-26 | 異常を発見するために試料を光学的に検査する装置 |
Country Status (3)
Country | Link |
---|---|
US (2) | US6833913B1 (ja) |
JP (4) | JP4619005B2 (ja) |
WO (1) | WO2003073476A2 (ja) |
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-
2002
- 2002-06-24 US US10/180,807 patent/US6833913B1/en not_active Expired - Lifetime
-
2003
- 2003-02-26 WO PCT/US2003/006182 patent/WO2003073476A2/en active Application Filing
- 2003-02-26 JP JP2003572074A patent/JP4619005B2/ja not_active Expired - Lifetime
-
2004
- 2004-11-18 US US10/993,473 patent/US7012683B2/en not_active Expired - Lifetime
-
2009
- 2009-07-21 JP JP2009169716A patent/JP4972674B2/ja not_active Expired - Lifetime
- 2009-07-21 JP JP2009169717A patent/JP4972675B2/ja not_active Expired - Lifetime
-
2010
- 2010-07-26 JP JP2010167223A patent/JP4972701B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2003073476A3 (en) | 2005-03-17 |
US20050092899A1 (en) | 2005-05-05 |
JP2009282036A (ja) | 2009-12-03 |
WO2003073476A2 (en) | 2003-09-04 |
US7012683B2 (en) | 2006-03-14 |
JP2009282037A (ja) | 2009-12-03 |
JP4972701B2 (ja) | 2012-07-11 |
JP2005526239A (ja) | 2005-09-02 |
JP4972675B2 (ja) | 2012-07-11 |
US6833913B1 (en) | 2004-12-21 |
JP4619005B2 (ja) | 2011-01-26 |
JP2011022148A (ja) | 2011-02-03 |
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