JP4966448B2 - マイクロメカニカル素子 - Google Patents

マイクロメカニカル素子 Download PDF

Info

Publication number
JP4966448B2
JP4966448B2 JP2000552691A JP2000552691A JP4966448B2 JP 4966448 B2 JP4966448 B2 JP 4966448B2 JP 2000552691 A JP2000552691 A JP 2000552691A JP 2000552691 A JP2000552691 A JP 2000552691A JP 4966448 B2 JP4966448 B2 JP 4966448B2
Authority
JP
Japan
Prior art keywords
switching element
switching
micromechanical
electrode
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000552691A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002517320A (ja
JP2002517320A5 (enExample
Inventor
スミス，チャールズ，ゴードン
Original Assignee
キャベンディッシュ キネティクス リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by キャベンディッシュ キネティクス リミテッド filed Critical キャベンディッシュ キネティクス リミテッド
Publication of JP2002517320A publication Critical patent/JP2002517320A/ja
Publication of JP2002517320A5 publication Critical patent/JP2002517320A5/ja
Application granted granted Critical
Publication of JP4966448B2 publication Critical patent/JP4966448B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2000552691A 1998-06-04 1999-06-01 マイクロメカニカル素子 Expired - Lifetime JP4966448B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP98304445.4 1998-06-04
EP98304445 1998-06-04
PCT/GB1999/001740 WO1999063559A1 (en) 1998-06-04 1999-06-01 Micro-mechanical elements

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010022421A Division JP5475487B2 (ja) 1998-06-04 2010-02-03 マイクロメカニカル素子

Publications (3)

Publication Number Publication Date
JP2002517320A JP2002517320A (ja) 2002-06-18
JP2002517320A5 JP2002517320A5 (enExample) 2011-04-28
JP4966448B2 true JP4966448B2 (ja) 2012-07-04

Family

ID=8234858

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000552691A Expired - Lifetime JP4966448B2 (ja) 1998-06-04 1999-06-01 マイクロメカニカル素子
JP2010022421A Expired - Lifetime JP5475487B2 (ja) 1998-06-04 2010-02-03 マイクロメカニカル素子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010022421A Expired - Lifetime JP5475487B2 (ja) 1998-06-04 2010-02-03 マイクロメカニカル素子

Country Status (9)

Country Link
US (1) US6441405B1 (enExample)
EP (1) EP1082740B1 (enExample)
JP (2) JP4966448B2 (enExample)
AT (1) ATE227882T1 (enExample)
AU (1) AU4275699A (enExample)
DE (1) DE69903943T2 (enExample)
ES (1) ES2189463T3 (enExample)
PT (1) PT1082740E (enExample)
WO (1) WO1999063559A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6377383B1 (en) * 1997-09-04 2002-04-23 The University Of British Columbia Optical switching by controllable frustration of total internal reflection
US6587021B1 (en) * 2000-11-09 2003-07-01 Raytheon Company Micro-relay contact structure for RF applications
DE10056656C2 (de) * 2000-11-15 2003-01-09 Little Things Factory Gmbh Mikroschalter mit verstärkter Kontaktkraft
JP4487460B2 (ja) * 2001-09-05 2010-06-23 ソニー株式会社 薄膜光学装置
KR100421222B1 (ko) * 2001-11-24 2004-03-02 삼성전자주식회사 저전압 구동의 마이크로 스위칭 소자
GB0413341D0 (en) * 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
KR100619110B1 (ko) 2004-10-21 2006-09-04 한국전자통신연구원 미세전자기계적 스위치 및 그 제조 방법
US7629192B2 (en) * 2005-10-13 2009-12-08 International Business Machines Corporation Passive electrically testable acceleration and voltage measurement devices
US7701754B1 (en) 2006-09-05 2010-04-20 National Semiconductor Corporation Multi-state electromechanical memory cell
US8704314B2 (en) * 2007-12-06 2014-04-22 Massachusetts Institute Of Technology Mechanical memory transistor
US8289674B2 (en) 2009-03-17 2012-10-16 Cavendish Kinetics, Ltd. Moving a free-standing structure between high and low adhesion states
US7928333B2 (en) * 2009-08-14 2011-04-19 General Electric Company Switch structures
WO2011028504A2 (en) 2009-08-24 2011-03-10 Cavendish Kinetics, Inc. Fabrication of a floating rocker mems device for light modulation
US20160091708A1 (en) * 2014-09-30 2016-03-31 Sharp Kabushiki Kaisha Reflective display device
US10481866B2 (en) * 2015-12-31 2019-11-19 Cbn Nano Technologies Inc. Mechanical computing systems
US10949166B2 (en) * 2015-12-31 2021-03-16 Cbn Nano Technologies Inc. Mechanical computing systems
IT201600078454A1 (it) * 2016-07-26 2018-01-26 St Microelectronics Srl Dispositivo microelettromeccanico, utilizzabile come modulo di memoria non volatile o rele', e memoria includente una pluralita' di dispositivi microelettromeccanici
US10678293B2 (en) * 2018-11-02 2020-06-09 Lawrence Livermore National Security, Llc Systems for mechanical logic based on additively manufacturable micro-mechanical logic gates
US20240231064A9 (en) * 2021-03-25 2024-07-11 Hitachi High-Tech Corporation Optical filtering device, method of controlling optical filtering device, and mems shutter

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53111464A (en) * 1977-01-04 1978-09-29 Thomson Csf Bistable electret device
JPH01130431A (ja) * 1987-11-13 1989-05-23 Fujitsu Ltd 電気接点
JPH02230619A (ja) * 1989-03-03 1990-09-13 Fujitsu Ltd リードスイッチの製造方法
JPH03128994A (ja) * 1989-10-16 1991-05-31 Nippon Kouyu:Kk 電気スイッチの摺動接点用グリース
JPH04272481A (ja) * 1990-12-25 1992-09-29 Satoshi Kawada マイクロマシーンの操作方法及び光駆動マイクロマシーン
JPH04322017A (ja) * 1991-04-22 1992-11-12 Furukawa Electric Co Ltd:The 接点材料
JPH0821967A (ja) * 1993-07-27 1996-01-23 Texas Instr Inc <Ti> 超小形モノリシック可変電気デバイスおよびそれを含む装置
JPH08140367A (ja) * 1994-11-11 1996-05-31 Toshiba Corp 静電アクチュエータおよびその駆動方法
JPH08220455A (ja) * 1995-02-14 1996-08-30 Nippon Telegr & Teleph Corp <Ntt> ２軸可動ミラー及びそれを用いた表示装置
JPH09245564A (ja) * 1996-03-07 1997-09-19 Sumitomo Electric Ind Ltd 機械式電気スイッチ素子
WO1998035258A1 (en) * 1997-02-07 1998-08-13 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
JPH11219643A (ja) * 1998-02-02 1999-08-10 Denso Corp マイクロメカニカルスイッチ及びその製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
DE4126107C2 (de) * 1991-08-07 1993-12-16 Bosch Gmbh Robert Beschleunigungssensor und Verfahren zur Herstellung
KR950010659B1 (ko) * 1992-11-10 1995-09-21 재단법인한국전자통신연구소 마이크로 광개폐 장치 및 그 제조방법
KR960001941B1 (ko) * 1992-11-10 1996-02-08 재단법인한국전자통신연구소 평면 디스플레이 장치
DE4316856A1 (de) * 1993-05-19 1994-11-24 Siemens Ag Mikromechanisches Bauteil und Verfahren zu seiner Herstellung
US5559358A (en) * 1993-05-25 1996-09-24 Honeywell Inc. Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
US5619061A (en) 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
JP3391141B2 (ja) * 1994-03-24 2003-03-31 住友電気工業株式会社 微小機械部品及びその製造方法
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US6168395B1 (en) * 1996-02-10 2001-01-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bistable microactuator with coupled membranes

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53111464A (en) * 1977-01-04 1978-09-29 Thomson Csf Bistable electret device
JPH01130431A (ja) * 1987-11-13 1989-05-23 Fujitsu Ltd 電気接点
JPH02230619A (ja) * 1989-03-03 1990-09-13 Fujitsu Ltd リードスイッチの製造方法
JPH03128994A (ja) * 1989-10-16 1991-05-31 Nippon Kouyu:Kk 電気スイッチの摺動接点用グリース
JPH04272481A (ja) * 1990-12-25 1992-09-29 Satoshi Kawada マイクロマシーンの操作方法及び光駆動マイクロマシーン
JPH04322017A (ja) * 1991-04-22 1992-11-12 Furukawa Electric Co Ltd:The 接点材料
JPH0821967A (ja) * 1993-07-27 1996-01-23 Texas Instr Inc <Ti> 超小形モノリシック可変電気デバイスおよびそれを含む装置
JPH08140367A (ja) * 1994-11-11 1996-05-31 Toshiba Corp 静電アクチュエータおよびその駆動方法
JPH08220455A (ja) * 1995-02-14 1996-08-30 Nippon Telegr & Teleph Corp <Ntt> ２軸可動ミラー及びそれを用いた表示装置
JPH09245564A (ja) * 1996-03-07 1997-09-19 Sumitomo Electric Ind Ltd 機械式電気スイッチ素子
WO1998035258A1 (en) * 1997-02-07 1998-08-13 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
JPH11219643A (ja) * 1998-02-02 1999-08-10 Denso Corp マイクロメカニカルスイッチ及びその製造方法

Also Published As

Publication number Publication date
JP2010188517A (ja) 2010-09-02
ATE227882T1 (de) 2002-11-15
DE69903943T2 (de) 2003-03-27
AU4275699A (en) 1999-12-20
EP1082740B1 (en) 2002-11-13
JP2002517320A (ja) 2002-06-18
WO1999063559A1 (en) 1999-12-09
EP1082740A1 (en) 2001-03-14
US6441405B1 (en) 2002-08-27
ES2189463T3 (es) 2003-07-01
PT1082740E (pt) 2003-04-30
DE69903943D1 (de) 2002-12-19
JP5475487B2 (ja) 2014-04-16

Similar Documents

Publication Publication Date Title
JP5475487B2 (ja) マイクロメカニカル素子
EP0056084B1 (en) Electrostatically deformographic switches
US6757092B2 (en) Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof
US6735008B2 (en) MEMS mirror and method of fabrication
US6803534B1 (en) Membrane for micro-electro-mechanical switch, and methods of making and using it
US6473361B1 (en) Electromechanical memory cell
JP4988807B2 (ja) ミラー装置およびミラー装置の製造方法
JP2005142982A (ja) 高周波ｍｅｍｓスイッチ及びその製造方法
US6970060B2 (en) Micro relay of which movable contact remains separated from ground contact in non-operating state
JPS58176678A (ja) 検電式デイスプレイ装置
US20130194649A1 (en) Rotational Type of MEMS Electrostatic Actuator
EP1502273A1 (en) Micro-electro-mechanical switch, and methods of making and using it.
JPH06250593A (ja) 静電駆動マイクロシャッターおよびシャッターアレイ
TW200533591A (en) Microelectromechanical device with reset electrode
US7449649B2 (en) Liquid switch
EP1321957A1 (en) A micro relay device having a membrane with slits
KR100493168B1 (ko) Ｍｅｍｓ를 이용한 광 스위치
US6577431B2 (en) System of angular displacement control for micro-mirrors
US6621611B2 (en) Snap-down pivoting optical element
JP4099165B2 (ja) Ｍｅｍｓ素子及びデバイス
WO2003050889A1 (en) Micro-machine electrostatic actuator, method and system employing same, and fabrication methods thereof
JP4578543B2 (ja) 微小可動デバイス
JP2005504415A (ja) マイクロメカニカル・スイッチ及び同スイッチを製造する方法
JPH0792405A (ja) 電気毛細管光スイッチ
JP2005024966A (ja) 光変調装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060601

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090129

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090203

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090501

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090518

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090803

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090908

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20091208

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20091216

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20100108

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20100119

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100203

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100817

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20101116

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20101124

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20101215

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20101222

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20110114

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20110121

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110217

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20110217

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20110218

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110802

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20111128

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20111130

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20120105

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120306

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120402

R150 Certificate of patent or registration of utility model

Ref document number: 4966448

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150406

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term