JP2002517320A5 - - Google Patents

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Publication number
JP2002517320A5
JP2002517320A5 JP2000552691A JP2000552691A JP2002517320A5 JP 2002517320 A5 JP2002517320 A5 JP 2002517320A5 JP 2000552691 A JP2000552691 A JP 2000552691A JP 2000552691 A JP2000552691 A JP 2000552691A JP 2002517320 A5 JP2002517320 A5 JP 2002517320A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000552691A
Other languages
Japanese (ja)
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JP4966448B2 (ja
JP2002517320A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/GB1999/001740 external-priority patent/WO1999063559A1/en
Publication of JP2002517320A publication Critical patent/JP2002517320A/ja
Publication of JP2002517320A5 publication Critical patent/JP2002517320A5/ja
Application granted granted Critical
Publication of JP4966448B2 publication Critical patent/JP4966448B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000552691A 1998-06-04 1999-06-01 マイクロメカニカル素子 Expired - Lifetime JP4966448B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP98304445 1998-06-04
EP98304445.4 1998-06-04
PCT/GB1999/001740 WO1999063559A1 (en) 1998-06-04 1999-06-01 Micro-mechanical elements

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010022421A Division JP5475487B2 (ja) 1998-06-04 2010-02-03 マイクロメカニカル素子

Publications (3)

Publication Number Publication Date
JP2002517320A JP2002517320A (ja) 2002-06-18
JP2002517320A5 true JP2002517320A5 (enExample) 2011-04-28
JP4966448B2 JP4966448B2 (ja) 2012-07-04

Family

ID=8234858

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2000552691A Expired - Lifetime JP4966448B2 (ja) 1998-06-04 1999-06-01 マイクロメカニカル素子
JP2010022421A Expired - Lifetime JP5475487B2 (ja) 1998-06-04 2010-02-03 マイクロメカニカル素子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010022421A Expired - Lifetime JP5475487B2 (ja) 1998-06-04 2010-02-03 マイクロメカニカル素子

Country Status (9)

Country Link
US (1) US6441405B1 (enExample)
EP (1) EP1082740B1 (enExample)
JP (2) JP4966448B2 (enExample)
AT (1) ATE227882T1 (enExample)
AU (1) AU4275699A (enExample)
DE (1) DE69903943T2 (enExample)
ES (1) ES2189463T3 (enExample)
PT (1) PT1082740E (enExample)
WO (1) WO1999063559A1 (enExample)

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DE10056656C2 (de) * 2000-11-15 2003-01-09 Little Things Factory Gmbh Mikroschalter mit verstärkter Kontaktkraft
JP4487460B2 (ja) * 2001-09-05 2010-06-23 ソニー株式会社 薄膜光学装置
KR100421222B1 (ko) * 2001-11-24 2004-03-02 삼성전자주식회사 저전압 구동의 마이크로 스위칭 소자
GB0413341D0 (en) * 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
KR100619110B1 (ko) * 2004-10-21 2006-09-04 한국전자통신연구원 미세전자기계적 스위치 및 그 제조 방법
US7629192B2 (en) * 2005-10-13 2009-12-08 International Business Machines Corporation Passive electrically testable acceleration and voltage measurement devices
US7701754B1 (en) 2006-09-05 2010-04-20 National Semiconductor Corporation Multi-state electromechanical memory cell
US8704314B2 (en) * 2007-12-06 2014-04-22 Massachusetts Institute Of Technology Mechanical memory transistor
US8289674B2 (en) 2009-03-17 2012-10-16 Cavendish Kinetics, Ltd. Moving a free-standing structure between high and low adhesion states
US7928333B2 (en) * 2009-08-14 2011-04-19 General Electric Company Switch structures
EP2470938B1 (en) * 2009-08-24 2017-09-27 Cavendish Kinetics Inc. Fabrication of a floating rocker mems device for light modulation
US20160091708A1 (en) * 2014-09-30 2016-03-31 Sharp Kabushiki Kaisha Reflective display device
US10481866B2 (en) 2015-12-31 2019-11-19 Cbn Nano Technologies Inc. Mechanical computing systems
US10949166B2 (en) * 2015-12-31 2021-03-16 Cbn Nano Technologies Inc. Mechanical computing systems
IT201600078454A1 (it) 2016-07-26 2018-01-26 St Microelectronics Srl Dispositivo microelettromeccanico, utilizzabile come modulo di memoria non volatile o rele', e memoria includente una pluralita' di dispositivi microelettromeccanici
US10678293B2 (en) * 2018-11-02 2020-06-09 Lawrence Livermore National Security, Llc Systems for mechanical logic based on additively manufacturable micro-mechanical logic gates
US20240231064A9 (en) * 2021-03-25 2024-07-11 Hitachi High-Tech Corporation Optical filtering device, method of controlling optical filtering device, and mems shutter

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JPH01130431A (ja) * 1987-11-13 1989-05-23 Fujitsu Ltd 電気接点
JPH02230619A (ja) * 1989-03-03 1990-09-13 Fujitsu Ltd リードスイッチの製造方法
GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
JPH03128994A (ja) * 1989-10-16 1991-05-31 Nippon Kouyu:Kk 電気スイッチの摺動接点用グリース
JPH04272481A (ja) * 1990-12-25 1992-09-29 Satoshi Kawada マイクロマシーンの操作方法及び光駆動マイクロマシーン
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KR950010659B1 (ko) * 1992-11-10 1995-09-21 재단법인한국전자통신연구소 마이크로 광개폐 장치 및 그 제조방법
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US5867297A (en) * 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
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