PT1082740E - Elementos micro-mecanicos - Google Patents

Elementos micro-mecanicos

Info

Publication number
PT1082740E
PT1082740E PT99939790T PT99939790T PT1082740E PT 1082740 E PT1082740 E PT 1082740E PT 99939790 T PT99939790 T PT 99939790T PT 99939790 T PT99939790 T PT 99939790T PT 1082740 E PT1082740 E PT 1082740E
Authority
PT
Portugal
Prior art keywords
micro
mechanical elements
switching element
switching
mechanical
Prior art date
Application number
PT99939790T
Other languages
English (en)
Portuguese (pt)
Inventor
Charles Gordon Smith
Original Assignee
Cavendish Kinetics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cavendish Kinetics Ltd filed Critical Cavendish Kinetics Ltd
Publication of PT1082740E publication Critical patent/PT1082740E/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
PT99939790T 1998-06-04 1999-06-01 Elementos micro-mecanicos PT1082740E (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP98304445 1998-06-04

Publications (1)

Publication Number Publication Date
PT1082740E true PT1082740E (pt) 2003-04-30

Family

ID=8234858

Family Applications (1)

Application Number Title Priority Date Filing Date
PT99939790T PT1082740E (pt) 1998-06-04 1999-06-01 Elementos micro-mecanicos

Country Status (9)

Country Link
US (1) US6441405B1 (enExample)
EP (1) EP1082740B1 (enExample)
JP (2) JP4966448B2 (enExample)
AT (1) ATE227882T1 (enExample)
AU (1) AU4275699A (enExample)
DE (1) DE69903943T2 (enExample)
ES (1) ES2189463T3 (enExample)
PT (1) PT1082740E (enExample)
WO (1) WO1999063559A1 (enExample)

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US6377383B1 (en) * 1997-09-04 2002-04-23 The University Of British Columbia Optical switching by controllable frustration of total internal reflection
US6587021B1 (en) * 2000-11-09 2003-07-01 Raytheon Company Micro-relay contact structure for RF applications
DE10056656C2 (de) * 2000-11-15 2003-01-09 Little Things Factory Gmbh Mikroschalter mit verstärkter Kontaktkraft
JP4487460B2 (ja) * 2001-09-05 2010-06-23 ソニー株式会社 薄膜光学装置
KR100421222B1 (ko) * 2001-11-24 2004-03-02 삼성전자주식회사 저전압 구동의 마이크로 스위칭 소자
GB0413341D0 (en) * 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
KR100619110B1 (ko) * 2004-10-21 2006-09-04 한국전자통신연구원 미세전자기계적 스위치 및 그 제조 방법
US7629192B2 (en) * 2005-10-13 2009-12-08 International Business Machines Corporation Passive electrically testable acceleration and voltage measurement devices
US7701754B1 (en) 2006-09-05 2010-04-20 National Semiconductor Corporation Multi-state electromechanical memory cell
US8704314B2 (en) * 2007-12-06 2014-04-22 Massachusetts Institute Of Technology Mechanical memory transistor
US8289674B2 (en) 2009-03-17 2012-10-16 Cavendish Kinetics, Ltd. Moving a free-standing structure between high and low adhesion states
US7928333B2 (en) * 2009-08-14 2011-04-19 General Electric Company Switch structures
JP5816624B2 (ja) * 2009-08-24 2015-11-18 キャベンディッシュ・キネティックス・インコーポレイテッドＣａｖｅｎｄｉｓｈ Ｋｉｎｅｔｉｃｓ， Ｉｎｃ． 光変調用浮動ロッカーｍｅｍｓデバイスの製造方法
US20160091708A1 (en) * 2014-09-30 2016-03-31 Sharp Kabushiki Kaisha Reflective display device
US10949166B2 (en) * 2015-12-31 2021-03-16 Cbn Nano Technologies Inc. Mechanical computing systems
US10481866B2 (en) 2015-12-31 2019-11-19 Cbn Nano Technologies Inc. Mechanical computing systems
IT201600078454A1 (it) 2016-07-26 2018-01-26 St Microelectronics Srl Dispositivo microelettromeccanico, utilizzabile come modulo di memoria non volatile o rele', e memoria includente una pluralita' di dispositivi microelettromeccanici
US10678293B2 (en) * 2018-11-02 2020-06-09 Lawrence Livermore National Security, Llc Systems for mechanical logic based on additively manufacturable micro-mechanical logic gates
JP7515007B2 (ja) * 2021-03-25 2024-07-11 株式会社日立ハイテク 光フィルタリングデバイス、光フィルタリングデバイスの制御方法、ｍｅｍｓシャッタ

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DE4316856A1 (de) * 1993-05-19 1994-11-24 Siemens Ag Mikromechanisches Bauteil und Verfahren zu seiner Herstellung
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JP3834862B2 (ja) * 1996-03-07 2006-10-18 住友電気工業株式会社 機械式電気スイッチ素子
US5867297A (en) * 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
JP3944990B2 (ja) * 1998-02-02 2007-07-18 株式会社デンソー マイクロメカニカルスイッチの製造方法

Also Published As

Publication number Publication date
WO1999063559A1 (en) 1999-12-09
JP2002517320A (ja) 2002-06-18
EP1082740B1 (en) 2002-11-13
DE69903943D1 (de) 2002-12-19
US6441405B1 (en) 2002-08-27
DE69903943T2 (de) 2003-03-27
EP1082740A1 (en) 2001-03-14
ATE227882T1 (de) 2002-11-15
AU4275699A (en) 1999-12-20
JP4966448B2 (ja) 2012-07-04
JP5475487B2 (ja) 2014-04-16
JP2010188517A (ja) 2010-09-02
ES2189463T3 (es) 2003-07-01

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