JP4941645B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP4941645B2
JP4941645B2 JP2006284747A JP2006284747A JP4941645B2 JP 4941645 B2 JP4941645 B2 JP 4941645B2 JP 2006284747 A JP2006284747 A JP 2006284747A JP 2006284747 A JP2006284747 A JP 2006284747A JP 4941645 B2 JP4941645 B2 JP 4941645B2
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JP
Japan
Prior art keywords
prober frame
substrate
load lock
lock chamber
stocker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006284747A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008102017A (ja
Inventor
英樹 岡本
順一郎 棚瀬
晋一 黒田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2006284747A priority Critical patent/JP4941645B2/ja
Priority to CN2007101235502A priority patent/CN101165546B/zh
Priority to KR1020070066414A priority patent/KR100813868B1/ko
Priority to TW096124669A priority patent/TWI342390B/zh
Publication of JP2008102017A publication Critical patent/JP2008102017A/ja
Application granted granted Critical
Publication of JP4941645B2 publication Critical patent/JP4941645B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing
JP2006284747A 2006-10-19 2006-10-19 基板検査装置 Expired - Fee Related JP4941645B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006284747A JP4941645B2 (ja) 2006-10-19 2006-10-19 基板検査装置
CN2007101235502A CN101165546B (zh) 2006-10-19 2007-07-02 基板检查装置
KR1020070066414A KR100813868B1 (ko) 2006-10-19 2007-07-03 기판 검사 장치
TW096124669A TWI342390B (en) 2006-10-19 2007-07-06 Substrate inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006284747A JP4941645B2 (ja) 2006-10-19 2006-10-19 基板検査装置

Publications (2)

Publication Number Publication Date
JP2008102017A JP2008102017A (ja) 2008-05-01
JP4941645B2 true JP4941645B2 (ja) 2012-05-30

Family

ID=39334297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006284747A Expired - Fee Related JP4941645B2 (ja) 2006-10-19 2006-10-19 基板検査装置

Country Status (4)

Country Link
JP (1) JP4941645B2 (zh)
KR (1) KR100813868B1 (zh)
CN (1) CN101165546B (zh)
TW (1) TWI342390B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010271655A (ja) * 2009-05-25 2010-12-02 Shimadzu Corp プローバフレーム搬送台車およびプローバフレームハンドリングシステム
CN103698630B (zh) * 2013-12-12 2016-04-06 合肥京东方光电科技有限公司 一种电学阵列检测设备
JP2016023939A (ja) * 2014-07-16 2016-02-08 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5982190A (en) * 1998-02-04 1999-11-09 Toro-Lira; Guillermo L. Method to determine pixel condition on flat panel displays using an electron beam
JP4042046B2 (ja) * 2003-01-29 2008-02-06 株式会社島津製作所 液晶基板検査装置
JP4676681B2 (ja) * 2003-06-10 2011-04-27 株式会社島津製作所 Ｔｆｔアレイ検査装置、及びｔｆｔアレイ検査方法
US6833717B1 (en) * 2004-02-12 2004-12-21 Applied Materials, Inc. Electron beam test system with integrated substrate transfer module
JP4241421B2 (ja) * 2004-02-17 2009-03-18 株式会社島津製作所 液晶基板検査装置
JP4147587B2 (ja) * 2004-03-22 2008-09-10 株式会社島津製作所 基板検査装置

Also Published As

Publication number Publication date
CN101165546B (zh) 2010-09-29
JP2008102017A (ja) 2008-05-01
TW200819737A (en) 2008-05-01
KR100813868B1 (ko) 2008-03-17
TWI342390B (en) 2011-05-21
CN101165546A (zh) 2008-04-23

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