JP4936211B2 - Surface-coated cutting tool whose hard coating layer exhibits excellent wear resistance in high-speed cutting - Google Patents
Surface-coated cutting tool whose hard coating layer exhibits excellent wear resistance in high-speed cutting Download PDFInfo
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Description
この発明は、各種の鋼や鋳鉄などの切削加工を高速で行った場合にも、硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具（以下、被覆工具という）に関するものである。 The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits excellent wear resistance with a hard coating layer even when various types of steel and cast iron are cut at high speed.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、いずれも化学蒸着形成された、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）中間層が、１〜１５μｍの平均層厚を有し、かつ化学蒸着した状態でα型の結晶構造を有するＡｌ２Ｏ３層（以下、α型Ａｌ２Ｏ３層という）、
（ｃ）上部層が、１〜１０μｍの平均層厚を有し、かつ、組成式：（Ｔｉ１−Ｘ−ＹＡｌＸＭＹ）Ｎ（ただし、原子比で、０．３０≦Ｘ≦０．７０、かつ、Ｙ＝０あるいは０．０１≦Ｙ≦０．１０であり、また、Ｍは、Ｓｉ、Ｃｒ、Ｖ、Ｙ、Ｂから選ばれた１種または２種以上の添加成分を示す）を満足する物理蒸着により形成されたＴｉとＡｌ（とＭ）の複合窒化物（以下、（Ｔｉ，Ａｌ，Ｍ）Ｎで示す）層、
以上（ａ）〜（ｃ）で構成された硬質被覆層を、化学蒸着法と物理蒸着法とを組み合わせて蒸着形成した被覆工具が知られており、そして、化学蒸着法と物理蒸着法とを組み合わせたことにより、硬質被覆層の密着性を高めるとともに硬質被覆層に圧縮残留応力を付与することができ、この被覆工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition of the lower layers. A Ti compound comprising one or more of a carbon oxide (hereinafter referred to as TiCO) layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer and having an overall average layer thickness of 3 to 20 μm layer,
(B) Al 2 O 3 layer (hereinafter referred to as α-type Al 2 O 3 layer) having an average layer thickness of 1 to 15 μm and having an α-type crystal structure in a state where chemical vapor deposition is performed,
(C) The upper layer has an average layer thickness of 1 to 10 μm and a composition formula: (Ti 1-XY Al X MY ) N (however, the atomic ratio is 0.30 ≦ X ≦ 0) .70 and Y = 0 or 0.01 ≦ Y ≦ 0.10, and M represents one or more additive components selected from Si, Cr, V, Y, and B ) Ti and Al (and M) composite nitride (hereinafter referred to as (Ti, Al, M) N) layers formed by physical vapor deposition satisfying
A coating tool is known in which a hard coating layer composed of (a) to (c) above is formed by a combination of chemical vapor deposition and physical vapor deposition, and chemical vapor deposition and physical vapor deposition are performed. By combining, it is possible to increase the adhesion of the hard coating layer and to apply compressive residual stress to the hard coating layer, and this coated tool should be used for continuous cutting and intermittent cutting of various steels and cast iron, for example. Is well known.
また、上記の被覆工具の下部層を構成するＴｉ化合物層や、中間層を構成するα型Ａｌ２Ｏ３層が粒状結晶組織を有し、そして、前記Ｔｉ化合物層を構成するＴｉＣＮ層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、７００〜９５０℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
さらに、上記被覆工具の上部層を構成するＴｉとＡｌ（とＭ）の複合窒化物層（（Ｔｉ，Ａｌ，Ｍ）Ｎ層）が、例えば、図１の概略説明図で示される物理蒸着装置の１種であるアークイオンプレーティング装置に工具基体を装入し、ヒータで装置内を、例えば５００℃の温度に加熱した状態で、アノード電極と所定組成を有するＴｉ−Ａｌ（−Ｍ）合金がセットされたカソード電極（蒸発源）との間に、例えば電流：９０Ａの条件でアーク放電を発生させ、同時に装置内に反応ガスとして窒素ガスを導入して、例えば２Ｐａの反応雰囲気とし、そして、上記工具基体に、例えば−１００Ｖのバイアス電圧を印加することにより、工具基体の表面に、上記（Ｔｉ，Ａｌ，Ｍ）Ｎ層を蒸着することにより製造されることも知られている。
Further, the Ti and Al (and M) composite nitride layer ((Ti, Al, M) N layer) constituting the upper layer of the coated tool is, for example, the physical vapor deposition apparatus shown in the schematic explanatory diagram of FIG. A Ti-Al (-M) alloy having a predetermined composition with an anode electrode in a state in which a tool base is inserted into an arc ion plating apparatus which is one of the above and the inside of the apparatus is heated to a temperature of, for example, 500 ° C. with a heater Is generated between the cathode electrode (evaporation source), for example, at a current of 90 A, and simultaneously, nitrogen gas is introduced as a reaction gas into the apparatus to form a reaction atmosphere of 2 Pa, for example. It is also known that the tool base is manufactured by evaporating the (Ti, Al, M) N layer on the surface of the tool base by applying a bias voltage of, for example, −100 V to the tool base.
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化する傾向にあり、上記の従来被覆工具においては、化学蒸着法と物理蒸着法とを組み合わせて硬質被覆層を形成することにより、硬質被覆層の密着性、耐欠損性、耐摩耗性を高めており、これを通常の条件での鋼、鋳鉄などの連続切削、断続切削に用いた場合には問題はないが、特にこれを高熱発生を伴う高速切削条件で用いた場合には、硬質被覆層を構成するα型Ａｌ２Ｏ３層の耐摩耗性が不十分となり、摩耗が急速に進行するようになり、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting, and along with this, cutting tends to be further accelerated. In the tool, the adhesion, fracture resistance, and wear resistance of the hard coating layer are improved by combining the chemical vapor deposition method and the physical vapor deposition method to form a hard coating layer. There is no problem when it is used for continuous cutting and intermittent cutting of steel, cast iron, etc. Especially when this is used under high-speed cutting conditions with high heat generation, α-type Al 2 O 3 constituting a hard coating layer At present, the wear resistance of the layer becomes insufficient, the wear proceeds rapidly, and the service life is reached in a relatively short time.
そこで、本発明者等は、上述のような観点から、上記のα型Ａｌ２Ｏ３層が硬質被覆層の中間層を構成する被覆工具に着目し、特に前記α型Ａｌ２Ｏ３層の耐摩耗性向上を図るべく研究を行った結果、
（ａ）上記の従来被覆工具の中間層を構成するα型Ａｌ２Ｏ３層（以下、従来α型Ａｌ2Ｏ3層という）は、一般に、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ3：１〜５％、ＣＯ2：３〜７％、ＨＣｌ：０．３〜３％、Ｈ2Ｓ：０．０２〜０．４％、Ｈ2：残り、
反応雰囲気温度：９５０〜１１００℃、
反応雰囲気圧力：６〜１３ｋＰａ、
の条件（以下、通常条件という）で形成されるが、この通常条件形成の従来α型Ａｌ２Ｏ３層について、電界放出型走査電子顕微鏡を用い、図２（ａ），（ｂ）に概略説明図で示される通り、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成すると、図４に例示される通り、（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的な傾斜角度数分布グラフを示すこと。
The present inventors have, from the viewpoint as described above, focuses on coated tool α type the Al 2 O 3 layer described above constituting the intermediate layer of the hard coating layer, in particular of the α-type the Al 2 O 3 layer As a result of research to improve wear resistance,
(A) An α-type Al 2 O 3 layer (hereinafter referred to as a conventional α-type Al 2 O 3 layer) constituting the intermediate layer of the above-mentioned conventional coated tool is generally used in a normal chemical vapor deposition apparatus.
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2: remainder ,
Reaction atmosphere temperature: 950-1100 ° C.
Reaction atmosphere pressure: 6-13 kPa,
The conventional α-type Al 2 O 3 layer formed under the normal conditions is schematically shown in FIGS. 2A and 2B using a field emission scanning electron microscope. As shown in the explanatory diagram, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal plane of the crystal grain is normal to the normal of the polished plane. The inclination angle formed by the normal line of the (0001) plane is measured, and among the measurement inclination angles, the measurement inclination angles within the range of 45 to 90 degrees are divided for each pitch of 0.25 degrees, and each When an inclination angle distribution graph is created by summing up the frequencies existing in the section, as shown in FIG. 4, the distribution of measured inclination angles on the (0001) plane is unbiased within the range of 45 to 90 degrees. Show the angle distribution graph.
（ｂ）一方、上記の従来α型Ａｌ２Ｏ３層に代って、同じく通常の化学蒸着装置を用い、
反応ガス組成：容量％で、ＡｌＣｌ3：１〜５％、ＣＯ2：３〜７％、ＨＣｌ：０．３〜３％、ＳＦ６：０．１〜１％、Ｈ2：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：５５〜８０ｋＰａ、
の相対的に低温高圧条件で、かつ反応ガスとして、Ｈ2Ｓに代ってＳＦ６を使用する条件で形成すると、この結果形成されたα型Ａｌ２Ｏ３層（以下、改質α型Ａｌ２Ｏ３層という）は、同じく電界放出型走査電子顕微鏡を用い、図２（ａ），（ｂ）に示される通り、同じく表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表した場合、図３に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、試験結果によれば、化学蒸着装置における反応雰囲気圧力を、上記の通り５５〜８０ｋＰａの範囲内で変化させると、上記シャープな最高ピークの現れる位置が傾斜角区分の８３〜９０度の範囲内で変化すると共に、前記８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占めるようになり、この結果の傾斜角度数分布グラフにおいて８３〜９０度の範囲内に傾斜角区分の最高ピークが現れる改質α型Ａｌ２Ｏ３層は、上記の通常条件形成の従来α型Ａｌ２Ｏ３層に比して、一段とすぐれた耐摩耗性を示すこと。
(B) On the other hand, instead of the conventional α-type Al 2 O 3 layer, a normal chemical vapor deposition apparatus is used,
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, SF 6: 0.1~1%, H 2: remainder,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 55-80 kPa,
The α-type Al 2 O 3 layer (hereinafter referred to as a modified α-type) formed as a result is formed under conditions of relatively low temperature and high pressure, and using SF 6 instead of H 2 S as a reaction gas. The Al 2 O 3 layer) also has a hexagonal crystal lattice that is also present in the measurement range of the surface polished surface, as shown in FIGS. 2A and 2B, using a field emission scanning electron microscope. Each crystal grain is irradiated with an electron beam, an inclination angle formed by a normal line of the (0001) plane that is a crystal plane of the crystal grain is measured with respect to the normal line of the polished surface, When the measured tilt angle within the range of 45 to 90 degrees is divided into pitches of 0.25 degrees and the frequency existing in each section is tabulated and represented by a tilt angle number distribution graph, FIG. As shown in the figure, a sharp peak appears at a specific position in the tilt angle section, According to the experimental results, when the reaction atmosphere pressure in the chemical vapor deposition apparatus is changed within the range of 55 to 80 kPa as described above, the position where the sharpest peak appears is within the range of 83 to 90 degrees of the inclination angle section. In addition, the sum of the frequencies existing in the range of 83 to 90 degrees occupies a ratio of 45% or more of the entire frequencies in the tilt angle frequency distribution graph. The modified α-type Al 2 O 3 layer in which the highest peak of the tilt angle section appears in a range of ˜90 degrees is more excellent in wear resistance than the conventional α-type Al 2 O 3 layer formed under the above normal conditions. Show gender.
（ｃ）したがって、化学蒸着により形成されたＴｉ化合物層からなる下部層、同じく化学蒸着により形成されたＡｌ２Ｏ３層からなる中間層、物理蒸着により形成された（Ｔｉ，Ａｌ，Ｍ）Ｎ層からなる上部層によって構成された硬質被覆層において、中間層である従来α型Ａｌ２Ｏ３層に代えて、表面研磨面の測定で、（０００１）面の測定傾斜角の分布が８３〜９０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示す改質α型Ａｌ２Ｏ３層で構成してなる被覆工具は、高速切削条件で切削加工を行っても、前記硬質被覆層の中間層が、同じく（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的な傾斜角度数分布グラフを示す前記従来α型Ａｌ２Ｏ３層で構成された従来被覆工具に比して、一段とすぐれた耐摩耗性を長期に亘って発揮するようになること。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) Therefore, a lower layer composed of a Ti compound layer formed by chemical vapor deposition, an intermediate layer composed of an Al 2 O 3 layer also formed by chemical vapor deposition, and (Ti, Al, M) N formed by physical vapor deposition. In the hard coating layer constituted by the upper layer composed of layers, the distribution of the measured inclination angle of the (0001) plane is 83 to 83 in the measurement of the surface polished surface instead of the conventional α-type Al 2 O 3 layer as the intermediate layer. The highest peak exists in the inclination angle section within the range of 90 degrees, and the total of the frequencies existing in the range of 83 to 90 degrees occupies a ratio of 45% or more of the entire degrees in the inclination angle frequency distribution graph. Even if the coated tool formed of the modified α-type Al 2 O 3 layer showing the angle distribution graph is cut under high-speed cutting conditions, the intermediate layer of the hard coating layer has the same (0001) plane. Minute of measurement tilt angle Compared with the conventional coated tool composed of the above-mentioned conventional α-type Al 2 O 3 layer, which shows an unbiased inclination angle number distribution graph within a range of 45 to 90 degrees, the wear resistance is further improved over a long period of time. To come to life.
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、工具基体の表面に、
（ａ）下部層が、いずれも化学蒸着により形成された、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）中間層が、化学蒸着により形成された１〜１５μｍの平均層厚を有するα型Ａｌ2Ｏ3層、
（ｃ）上部層として、１〜１０μｍの平均層厚を有し、かつ、
組成式：（Ｔｉ１−Ｘ−ＹＡｌＸＭＹ）Ｎ（ただし、原子比で、０．３０≦Ｘ≦０．７０、かつ、Ｙ＝０あるいは０．０１≦Ｙ≦０．１０であり、また、Ｍは、Ｓｉ、Ｃｒ、Ｖ、Ｙ、Ｂから選ばれた１種または２種以上の添加成分を示す）を満足する物理蒸着により形成されたＴｉとＡｌの複合窒化物層あるいはＴｉとＡｌとＭの複合窒化物層、
以上（ａ）〜（ｃ）で構成された硬質被覆層を５〜３０μｍの全体平均層厚で蒸着形成してなる表面被覆切削工具において、
中間層を構成する酸化アルミニウム層を、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表した場合、８３〜９０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示す酸化アルミニウム層（改質α型Ａｌ２Ｏ３層）で構成してなる、
硬質被覆層が高速切削ですぐれた耐摩耗性を発揮する被覆工具に特徴を有するものである。
This invention was made based on the above research results, and on the surface of the tool base,
(A) The lower layer is formed by chemical vapor deposition, and consists of one or more of TiC layer, TiN layer, TiCN layer, TiCO layer, and TiCNO layer, and an overall average of 3 to 20 μm A Ti compound layer having a layer thickness,
(B) an α-type Al 2 O 3 layer in which the intermediate layer is formed by chemical vapor deposition and has an average layer thickness of 1 to 15 μm;
(C) As an upper layer, it has an average layer thickness of 1 to 10 μm, and
Formula: (Ti 1-X-Y Al X M Y) N ( provided that an atomic ratio, 0.30 ≦ X ≦ 0.70, and, be Y = 0 or 0.01 ≦ Y ≦ 0.10 In addition, M represents one or more additive components selected from Si, Cr, V, Y, and B), and a composite nitride layer of Ti and Al formed by physical vapor deposition satisfying And a composite nitride layer of Al and M,
In the surface-coated cutting tool formed by vapor-depositing the hard coating layer composed of the above (a) to (c) with an overall average layer thickness of 5 to 30 μm,
The aluminum oxide layer constituting the intermediate layer is irradiated with an electron beam on each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope, The inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line, and the measurement inclination angle within the range of 45 to 90 degrees out of the measurement inclination angles is set to 0. When divided by 25-degree pitch and represented by an inclination angle distribution graph obtained by summing up the frequencies existing in each division, the highest peak exists in the inclination angle section within the range of 83 to 90 degrees. In addition, an aluminum oxide layer (modified α-type Al) showing a tilt angle number distribution graph in which the sum of the frequencies existing in the range of 83 to 90 degrees occupies a ratio of 45% or more of the entire frequencies in the tilt angle number distribution graph. constituted by 2 O 3 layer) That,
The hard coating layer is characterized by a coated tool that exhibits excellent wear resistance in high-speed cutting.
以下に、この発明の被覆工具の硬質被覆層の構成層に関し、上記の通りに数値限定した理由を説明する。
（ａ）Ｔｉ化合物層（下部層）
Ｔｉ化合物層は、基本的には改質α型Ａｌ２Ｏ３層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度を具備するようにするほか、工具基体と改質α型Ａｌ２Ｏ３層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用を有するが、その平均層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方その平均層厚が２０μｍを越えると、特に高熱発生を伴う高速切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を３〜２０μｍと定めた。
The reason why the numerical values of the constituent layers of the hard coating layer of the coated tool of the present invention are limited as described above will be described below.
(A) Ti compound layer (lower layer)
The Ti compound layer basically exists as a lower layer of the modified α-type Al 2 O 3 layer, and allows the hard coating layer to have high-temperature strength by its excellent high-temperature strength. And the modified α-type Al 2 O 3 layer firmly adheres to each other, and thus has an effect of improving the adhesion of the hard coating layer to the tool substrate. However, when the average layer thickness is less than 3 μm, On the other hand, when the average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation especially in high-speed cutting with high heat generation, which causes uneven wear. Was determined to be 3 to 20 μm.
（ｂ）改質α型Ａｌ２Ｏ３層（中間層）
上記の通り、改質α型Ａｌ２Ｏ３層の傾斜角度数分布グラフにおける測定傾斜角の最高ピーク位置は、化学蒸着装置における反応雰囲気圧力を変化させることによって変化するが、試験結果によれば、前記反応雰囲気圧力を、５５〜８０ｋｐａとすると、最高ピークが、８３〜９０度の範囲内の傾斜角区分に現れると共に、前記８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記反応雰囲気圧力が前記範囲から低い方に外れても高い方に外れても、測定傾斜角の最高ピーク位置は８３〜９０度の範囲から外れてしまい、このような場合には所望のすぐれた耐摩耗性を確保することができないものである。
さらに、改質α型Ａｌ２Ｏ３層は、圧縮応力が残留する上部層と引張応力が残留する下部層の両層の境界面にあって、境界界面に発生する大きな残留内部応力を、そのクーリングクラックによって緩和する機能を果たし、その結果として、チッピングの発生を抑制するという作用も有する。
そして、改質α型Ａｌ２Ｏ３層全体の平均層厚が１μｍ未満では、これのもつすぐれた特性を十分に発揮させることができず、一方その平均層厚が１５μｍを越えて厚くなりすぎると、切刃部にチッピング（微少欠け）が発生し易くなることから、その全体平均層厚を１〜１５μｍと定めた。
(B) Modified α-type Al 2 O 3 layer (intermediate layer)
As described above, the highest peak position of the measured inclination angle in the inclination angle number distribution graph of the modified α-type Al 2 O 3 layer changes by changing the reaction atmosphere pressure in the chemical vapor deposition apparatus. When the reaction atmosphere pressure is 55 to 80 kpa, the highest peak appears in the inclination angle section in the range of 83 to 90 degrees, and the total of the frequencies existing in the range of 83 to 90 degrees is the inclination angle. An inclination angle number distribution graph occupying a ratio of 45% or more of the entire frequency in the number distribution graph is shown. Therefore, even if the reaction atmosphere pressure is out of the range, it is out of the range. The maximum peak position of the measured inclination angle is out of the range of 83 to 90 degrees, and in this case, the desired excellent wear resistance cannot be ensured.
Furthermore, the modified α-type Al 2 O 3 layer has a large residual internal stress generated at the boundary interface at the boundary surface between the upper layer where the compressive stress remains and the lower layer where the tensile stress remains. It has a function of mitigating by cooling cracks, and as a result, has the effect of suppressing the occurrence of chipping.
If the average layer thickness of the modified α-type Al 2 O 3 layer as a whole is less than 1 μm, the excellent characteristics of the modified α-type Al 2 O 3 layer cannot be exhibited sufficiently, while the average layer thickness exceeds 15 μm and becomes too thick. Then, since chipping (slight chipping) is likely to occur in the cutting edge portion, the overall average layer thickness is set to 1 to 15 μm.
（ｃ）ＴｉとＡｌ（とＭ）の複合窒化物層（上部層）
上部層を構成するＴｉとＡｌ（とＭ）の複合窒化物層（（Ｔｉ，Ａｌ，Ｍ）Ｎ層）の構成成分であるＡｌ成分には硬質被覆層における高温硬さと耐熱性を向上させ、また、同Ｔｉ成分には高温強度を向上させる作用がある。さらに、上記複合窒化物層に含有される添加成分ＭとしてのＳｉは、該層の耐熱性および耐熱塑性変形性向上に寄与し、Ｃｒは、耐熱性および高温強度の向上に寄与し、Ｖは、潤滑性向上に寄与し、Ｙは、高温耐酸化性の向上に寄与し、さらに、Ｂは、熱伝導性の向上に寄与し、いずれの添加成分も、上部層の特性を向上させる作用があることから、上部層の所望特性に応じて、添加成分Ｍとして、Ｓｉ、Ｃｒ、Ｖ、Ｙ、Ｂの１種または２種以上を上部層中に含有させることができる。
そして、Ａｌの割合を示すＸ値がＴｉとＭとの合量に占める割合（原子比、以下同じ）で０．３０未満になると、所定の高温硬さおよび耐熱性を確保することができず、これが耐摩耗性低下の原因となり、一方Ａｌの割合を示すＸ値が同０．７０を越えると、相対的にＴｉの割合が０．３０未満となってしまい、高い発熱を伴う高速切削加工で必要とされる高温強度を確保することができず、チッピングの発生を防止することが困難になることから、Ｘ値を０．３０〜０．７０と定めた。
また、添加成分ＭとしてのＳｉ、Ｃｒ、Ｖ、Ｙ、Ｂは、各成分の合計含有割合が、ＴｉとＡｌとの合量に占める割合で０．０１未満では、各成分元素を含有させたことによる効果が期待できず、一方、各成分の合計含有割合が、ＴｉとＡｌとの合量に占める割合で０．１を越えると、相対的に、ＴｉとＡｌの含有割合が低下してしまい、高い発熱を伴う高速切削加工で要求される上部層の高温硬さ、耐熱性、高温強度を維持できなくなるために、添加成分Ｍの合計含有割合を表すＹ値を０．０１〜０．１０と定めた。
また、上部層の平均層厚が１μｍ未満では、自身のもつすぐれた耐摩耗性を長期に亘って発揮するには不十分であり、一方その平均層厚が１０μｍを越えると、高速切削加工時にチッピングが発生し易くなることから、上部層の平均層厚を１〜１０μｍと定めた。
(C) Ti and Al (and M) composite nitride layer (upper layer)
The Al component, which is a component of the composite nitride layer (Ti, Al, M) N layer of Ti and Al (and M) that constitutes the upper layer, improves the high temperature hardness and heat resistance of the hard coating layer, Further, the Ti component has an effect of improving the high temperature strength. Further, Si as additive component M contained in the composite nitride layer contributes to improvement in heat resistance and heat plastic deformation of the layer, Cr contributes to improvement in heat resistance and high temperature strength, and V is Contributes to improvement of lubricity, Y contributes to improvement of high temperature oxidation resistance, B further contributes to improvement of thermal conductivity, and any additive component has the effect of improving the characteristics of the upper layer. For this reason, one or more of Si, Cr, V, Y, and B can be contained in the upper layer as the additive component M depending on the desired characteristics of the upper layer.
And if the X value indicating the proportion of Al is less than 0.30 in the proportion of the total amount of Ti and M (atomic ratio, the same shall apply hereinafter), the predetermined high temperature hardness and heat resistance cannot be ensured. This causes a decrease in wear resistance. On the other hand, when the X value indicating the Al ratio exceeds 0.70, the Ti ratio is relatively less than 0.30, and high-speed cutting with high heat generation is caused. Since the high-temperature strength required in the above cannot be ensured and it becomes difficult to prevent the occurrence of chipping, the X value is determined to be 0.30 to 0.70.
In addition, Si, Cr, V, Y, and B as the additive component M included each component element when the total content ratio of each component was less than 0.01 in the total amount of Ti and Al. On the other hand, if the total content ratio of each component exceeds 0.1 in the total content of Ti and Al, the content ratio of Ti and Al is relatively decreased. Therefore, the high temperature hardness, heat resistance, and high temperature strength of the upper layer required for high-speed cutting with high heat generation cannot be maintained. 10 was determined.
Further, if the average layer thickness of the upper layer is less than 1 μm, it is insufficient to exhibit its excellent wear resistance over a long period of time, while if the average layer thickness exceeds 10 μm, it is difficult to perform high-speed cutting. Since chipping easily occurs, the average layer thickness of the upper layer is set to 1 to 10 μm.
なお、改質α型Ａｌ２Ｏ３層（中間層）上に、ＴｉとＡｌ（とＭ）の複合窒化物層（上部層）を形成するにあたり、改質α型Ａｌ２Ｏ３層（中間層）の表面上に、予め化学蒸着で０．１〜１．０μｍのＴｉＮ層を形成しておけば、より容易に物理蒸着で上部層を形成することができる。
さらに、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、必要に応じて硬質被覆層の最表面層として蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由による。
Incidentally, on reforming α type the Al 2 O 3 layer (intermediate layer), Ti and Al (as M) composite nitride layer of In forming (upper layer), modified α type the Al 2 O 3 layer (intermediate If a 0.1 to 1.0 μm TiN layer is previously formed on the surface of the layer) by chemical vapor deposition, the upper layer can be more easily formed by physical vapor deposition.
Furthermore, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer as necessary, but the average layer thickness in this case is It may be 0.1 to 1 μm, and if it is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient because an average layer thickness of up to 1 μm is sufficient.
この発明の被覆工具は、各種の鋼や鋳鉄などの切削加工を高速で行っても、硬質被覆層の下部層を構成するＴｉ化合物層がすぐれた高温強度を備えるとともに上部層を構成する（Ｔｉ，Ａｌ，Ｍ）Ｎ層がすぐれた高温硬さと高温強度を備え、さらに、硬質被覆層の中間層を構成する改質α型Ａｌ２Ｏ３層が、特に一段とすぐれた耐摩耗性を発揮することから、使用寿命の一層の延命化を可能とするものである。 The coated tool of the present invention has an excellent high temperature strength and a high layer of the Ti compound layer constituting the lower layer of the hard coating layer even when cutting various steels and cast iron at a high speed (Ti , Al, M) N layer has excellent high-temperature hardness and high-temperature strength, and the modified α-type Al 2 O 3 layer constituting the intermediate layer of the hard coating layer exhibits particularly superior wear resistance. Therefore, it is possible to further extend the service life.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも０．５〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０５ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, and Co powder all having an average particle diameter of 0.5 to 3 μm are prepared as raw material powders. These raw material powders are blended in the blending composition shown in Table 1, added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and then pressed into a green compact of a predetermined shape at a pressure of 98 MPa. The green compact was sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour, and after sintering, the cutting edge portion was subjected to a honing process of R: 0.05 mm. To produce tool bases A to F made of WC-base cemented carbide having a throwaway tip shape defined in ISO · CNMG120408.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比で、ＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 Further, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, blend these raw material powders into the composition shown in Table 2, wet mix with a ball mill for 24 hours, dry, and press-mold into a green compact at 98 MPa pressure The green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, the cutting edge portion is subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN base cermet having a chip shape of ISO standard / CNMG120408 were formed.
ついで、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆのそれぞれを、通常の化学蒸着装置に装入し、
（ａ）まず、表３（表３中のｌ−ＴｉＣ０．５Ｎ０．５層は特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表４に示される組み合わせおよび目標層厚のＴｉ化合物層を硬質被覆層の下部層として化学蒸着で形成し、
（ｂ）ついで、表３に示される低温高圧条件で、表４に示される組み合わせおよび目標層厚で、同じく中間層である改質α型Ａｌ２Ｏ３層を化学蒸着で形成し、
（ｃ）ついで、中間層である改質α型Ａｌ２Ｏ３層と、上部層となる（Ｔｉ，Ａｌ，Ｍ）Ｎ層との密着性を確保するために、表３に示される条件で０．１〜１．０μｍの目標層厚のＴｉＮ層を密着接合層として化学蒸着で形成し、
（ｄ）その後、下部層、中間層および密着接合層を化学蒸着した上記工具基体Ａ〜Ｆ、ａ〜ｆのそれぞれを、図１に概略示されるアークイオンプレーティング装置に装入し、装置内に反応ガスとして窒素ガスを導入して４Ｐａの反応雰囲気とすると共に、工具基体に−１００Ｖの直流バイアス電圧を印加し、かつカソード電極の上部層形成用Ｔｉ−Ａｌ−Ｍ合金とアノード電極との間に１２０Ａの電流を流してアーク放電を発生させ、前記工具基体の表面に、表４、表５に示される目標組成、目標層厚の（Ｔｉ，Ａｌ，Ｍ）Ｎ層からなる上部層を１〜１０μｍの平均層厚で蒸着形成することにより、本発明被覆工具１〜２６をそれぞれ製造した。
Then, each of these tool bases A to F and tool bases a to f is charged into a normal chemical vapor deposition apparatus,
(A) First, Table 3 (the 1-TiC 0.5 N 0.5 layer in Table 3 shows the conditions for forming a TiCN layer having a vertically grown crystal structure described in JP-A-6-8010. Other than this, it shows the formation conditions of the normal granular crystal structure). Chemical vapor deposition with the Ti compound layer of the combination and target layer thickness shown in Table 4 as the lower layer of the hard coating layer Formed with
(B) Next, under the low temperature and high pressure conditions shown in Table 3, a modified α-type Al 2 O 3 layer, which is also an intermediate layer, is formed by chemical vapor deposition, with the combinations and target layer thicknesses shown in Table 4,
(C) Next, in order to ensure adhesion between the modified α-type Al 2 O 3 layer as the intermediate layer and the (Ti, Al, M) N layer as the upper layer, the conditions shown in Table 3 were used. A TiN layer having a target layer thickness of 0.1 to 1.0 μm is formed by chemical vapor deposition as an adhesive bonding layer,
(D) Thereafter, each of the tool bases A to F and a to f on which the lower layer, the intermediate layer, and the adhesive bonding layer are chemically vapor-deposited is loaded into the arc ion plating apparatus schematically shown in FIG. Introducing nitrogen gas as a reaction gas to a reaction atmosphere of 4 Pa, applying a DC bias voltage of −100 V to the tool base, and forming a cathode electrode upper layer forming Ti—Al—M alloy with the anode electrode A current of 120 A is passed between them to generate an arc discharge, and an upper layer composed of a (Ti, Al, M) N layer having the target composition and target layer thickness shown in Tables 4 and 5 is formed on the surface of the tool base. The coated tools 1 to 26 of the present invention were produced by vapor deposition with an average layer thickness of 1 to 10 μm.
また、比較の目的で、硬質被覆層の中間層として、表３に示される通常条件で、表６、表７に示される組み合わせおよび目標層厚で、従来α型Ａｌ２Ｏ３層を蒸着形成する以外は、上記の本発明被覆工具１〜２６のそれぞれと対応して同じ条件で従来被覆工具１〜２６をそれぞれ製造した。 For comparison purposes, a conventional α-type Al 2 O 3 layer is formed by vapor deposition as an intermediate layer of the hard coating layer under the normal conditions shown in Table 3 and the combinations and target layer thicknesses shown in Tables 6 and 7. Except for doing, conventionally the coated tools 1-26 were manufactured on the same conditions corresponding to each of this invention coated tools 1-26.
ついで、上記の本発明被覆工具１〜２６および従来被覆工具１〜２６の硬質被覆層の中間層を構成する改質α型Ａｌ２Ｏ３層および従来α型Ａｌ２Ｏ３層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記改質α型Ａｌ２Ｏ３層および従来α型Ａｌ２Ｏ３層のそれぞれの表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、それぞれの前記研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Next, the field emission of the modified α-type Al 2 O 3 layer and the conventional α-type Al 2 O 3 layer constituting the intermediate layer of the hard coating layer of the present invention-coated tools 1 to 26 and the conventional coated tools 1 to 26 is described. A tilt angle number distribution graph was prepared using a scanning electron microscope.
That is, the inclination angle number distribution graph shows the column of the field emission scanning electron microscope in a state where the surfaces of the modified α-type Al 2 O 3 layer and the conventional α-type Al 2 O 3 layer are polished surfaces. Each crystal grain having a hexagonal crystal lattice existing within the measurement range of each polished surface is irradiated with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees and an irradiation current of 1 nA on the polished surface. And a 30 × 50 μm region at a spacing of 0.1 μm / step is the crystal plane of the crystal grain with respect to the normal of the polished surface (0001) The inclination angle formed by the normal of the surface is measured, and based on the measurement result, the measurement inclination angle within the range of 45 to 90 degrees among the measurement inclination angles is divided for each pitch of 0.25 degrees. , Count the frequencies present in each category Created by.
この結果得られた各種のα型Ａｌ２Ｏ３層の傾斜角度数分布グラフにおいて、表４、表５にそれぞれ示される通り、本発明被覆工具１〜２６の改質α型Ａｌ２Ｏ３層は、（０００１）面の測定傾斜角の分布が、８３〜９０度の範囲内の傾斜角区分に最高ピークが現れ、かつ前記８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すのに対して、表６、表７に示されるとおり、従来被覆工具１〜２６の従来α型Ａｌ２Ｏ３層は、（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的で、最高ピークが存在せず、かつ前記８０〜９０度の範囲内に存在する度数の合計が、度数全体の３０％以下である傾斜角度数分布グラフを示すものであった。
また表４〜表７には、上記の各種のα型Ａｌ２Ｏ３層の傾斜角度数分布グラフにおいて、それぞれ８３〜９０度の範囲内の傾斜角区分に存在する全傾斜角度数の傾斜角度数分布グラフ全体に占める割合を示した。
なお、図３は、本発明被覆工具１の改質α型Ａｌ２Ｏ３層の傾斜角度数分布グラフ、図４は、従来被覆工具１の従来α型Ａｌ２Ｏ３層の傾斜角区分を示す傾斜角度数分布グラフである。
In the inclination angle number distribution graphs of the various α-type Al 2 O 3 layers obtained as a result, as shown in Tables 4 and 5, respectively, the modified α-type Al 2 O 3 layers of the present coated tools 1 to 26 are shown. The distribution of the measured inclination angle of the (0001) plane has the highest peak in the inclination angle section within the range of 83 to 90 degrees, and the sum of the frequencies existing in the range of 83 to 90 degrees is the inclination angle. In contrast to the inclination angle number distribution graph occupying a ratio of 45% or more of the entire frequency in the number distribution graph, as shown in Tables 6 and 7, the conventional α-type Al 2 O 3 of the conventional coated tools 1 to 26 is shown. The layer has a measured inclination angle distribution on the (0001) plane that is unbiased within the range of 45 to 90 degrees, the highest peak does not exist, and the sum of the frequencies that are within the range of 80 to 90 degrees is An inclination angle distribution graph that is 30% or less of the entire frequency There was.
Tables 4 to 7 show the inclination angle numbers of all inclination angles existing in the inclination angle sections in the range of 83 to 90 degrees in the inclination angle number distribution graphs of the various α-type Al 2 O 3 layers. The percentage of the entire number distribution graph is shown.
3 is an inclination angle number distribution graph of the modified α-type Al 2 O 3 layer of the coated tool 1 of the present invention, and FIG. 4 is a graph showing the inclination angle classification of the conventional α-type Al 2 O 3 layer of the conventional coated tool 1. It is an inclination angle number distribution graph shown.
また、この結果得られた本発明被覆工具１〜２６および従来被覆工具１〜２６の硬質被覆層の構成層の各層厚および硬質被覆層の全体層厚を、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Moreover, each layer thickness of the hard coating layer of this invention coated tool 1-26 obtained as a result of this and the conventional coating tool 1-26 and the whole layer thickness of a hard coating layer were measured using the scanning electron microscope ( When the longitudinal section was measured), all showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.
つぎに、上記の本発明被覆工具１〜２６および従来被覆工具１〜２６の各種の被覆工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＣＭ４４０の丸棒、
切削速度： ４５０ ｍ／ｍｉｎ．、
切り込み： ０．３ ｍｍ、
送り： １．５ ｍｍ／ｒｅｖ．、
切削時間： ９ 分、
の条件（切削条件Ａという）で、水溶性切削油使用の合金鋼の連続湿式高速切削試験（通常の切削速度は２５０ｍ／ｍｉｎ．）、
被削材：ＪＩＳ・ＦＣ３００の長さ方向等間隔４本縦溝入り丸棒、
切削速度： ５００ ｍ／ｍｉｎ．、
切り込み： １．５ ｍｍ、
送り： ０．３ ｍｍ／ｒｅｖ．、
切削時間： １０ 分、
の条件（切削条件Ｂという）で、水溶性切削油使用の鋳鉄の断続湿式高速切削試験（通常の切削速度は３５０ｍ／ｍｉｎ．）、さらに、
被削材：ＪＩＳ・Ｓ４５Ｃの丸棒、
切削速度： ４００ ｍ／ｍｉｎ．、
切り込み： １．５ ｍｍ、
送り： ０．３ ｍｍ／ｒｅｖ．、
切削時間： ８ 分、
の条件（切削条件Ｃという）で、炭素鋼の連続乾式高速切削試験（通常の切削速度は２００ｍ／ｍｉｎ．）を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表８、表９に示した。
Next, for the various coated tools of the present invention coated tools 1 to 26 and the conventional coated tools 1 to 26, both are screwed with a fixing jig to the tip of the tool steel tool,
Work material: JIS / SCM440 round bar,
Cutting speed: 450 m / min. ,
Cutting depth: 0.3 mm,
Feed: 1.5 mm / rev. ,
Cutting time: 9 minutes,
In a continuous wet high-speed cutting test (normal cutting speed is 250 m / min.) Of alloy steel using water-soluble cutting oil
Work material: JIS / FC300 lengthwise equidistant 4 bars with vertical grooves,
Cutting speed: 500 m / min. ,
Cutting depth: 1.5 mm,
Feed: 0.3 mm / rev. ,
Cutting time: 10 minutes,
In the above condition (referred to as cutting condition B), an intermittent wet high speed cutting test of a cast iron using a water-soluble cutting oil (normal cutting speed is 350 m / min.),
Work material: JIS / S45C round bar,
Cutting speed: 400 m / min. ,
Cutting depth: 1.5 mm,
Feed: 0.3 mm / rev. ,
Cutting time: 8 minutes,
Under these conditions (referred to as cutting condition C), a continuous dry high-speed cutting test (normal cutting speed is 200 m / min.) Of carbon steel was performed, and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Tables 8 and 9.
表４〜９に示される結果から、本発明被覆工具１〜２６は、いずれも硬質被覆層の中間層である改質α型Ａｌ２Ｏ３層が、（０００１）面の傾斜角度数分布グラフで、８３〜９０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示し、より一段とすぐれた耐摩耗性を具備するようになることから、鋼や鋳鉄の切削加工を、高速条件で行っても、チッピングの発生なく、すぐれた耐摩耗性を示すのに対して、硬質被覆層の中間層が、（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的で、最高ピークが存在せず、かつ前記８３〜９０度の範囲内に存在する度数の合計が、度数全体の３０％以下である傾斜角度数分布グラフを示す従来α型Ａｌ２Ｏ３層で構成された従来被覆工具１〜２６においては、いずれも前記従来α型Ａｌ２Ｏ３層の耐摩耗性不足が原因で、高速切削条件では硬質被覆層の摩耗が著しく促進し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4-9, the coated α-Al 2 O 3 layer, which is an intermediate layer of the hard coating layer, has a tilt angle number distribution graph of the (0001) plane. Thus, the highest peak is present in the inclination angle section within the range of 83 to 90 degrees, and the total of the frequencies existing within the range of 83 to 90 degrees is 45% or more of the entire degrees in the inclination angle frequency distribution graph. Since the graph shows the distribution of the number of inclination angles that occupy the ratio and it has better wear resistance, even when cutting steel and cast iron under high speed conditions, it has excellent chipping resistance and no chipping. In contrast to the wear property, the intermediate layer of the hard coating layer is unbiased in the distribution of the measured inclination angle of the (0001) plane within the range of 45 to 90 degrees, and has no highest peak. The sum of the frequencies existing in the range of ~ 90 degrees In the conventional coated tool 1 to 26 composed of a conventional α-type the Al 2 O 3 layer showing the inclination angle frequency distribution graph is not more than 30% of the total power, both the wear of the conventional α-type the Al 2 O 3 layer It is clear that the wear of the hard coating layer is remarkably accelerated under high-speed cutting conditions due to the lack of properties, and the service life is reached in a relatively short time.
上述のように、この発明の被覆工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、高熱の発生を伴う高速切削においても、チッピングの発生なく、すぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated tool of the present invention is excellent in the occurrence of chipping in high-speed cutting accompanied by generation of high heat as well as continuous cutting and intermittent cutting under normal conditions such as various steels and cast iron. Because it shows wear resistance and exhibits excellent cutting performance over a long period of time, it can sufficiently satisfy the high performance of cutting equipment, labor saving and energy saving of cutting processing, and cost reduction. is there.
Claims (1)
（ａ）下部層として、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有する化学蒸着により形成されたＴｉ化合物層、
（ｂ）中間層として、化学蒸着した状態でα型の結晶構造を有し、かつ１〜１５μｍの平均層厚を有する酸化アルミニウム層、
（ｃ）上部層として、１〜１０μｍの平均層厚を有し、かつ、
組成式：（Ｔｉ１−Ｘ−ＹＡｌＸＭＹ）Ｎ（ただし、原子比で、０．３０≦Ｘ≦０．７０、かつ、Ｙ＝０あるいは０．０１≦Ｙ≦０．１０であり、また、Ｍは、Ｓｉ、Ｃｒ、Ｖ、Ｙ、Ｂから選ばれた１種または２種以上の添加成分を示す）を満足する物理蒸着により形成されたＴｉとＡｌの複合窒化物層あるいはＴｉとＡｌとＭの複合窒化物層、
以上（ａ）〜（ｃ）で構成された硬質被覆層を５〜３０μｍの全体平均層厚で蒸着形成してなる表面被覆切削工具において、
中間層を構成する酸化アルミニウム層を、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表した場合、８３〜９０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示す酸化アルミニウム層で構成したこと、
を特徴とする硬質被覆層が高速切削ですぐれた耐摩耗性を発揮する表面被覆切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) As a lower layer, it consists of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride oxide layer, and has an overall average of 3 to 20 μm A Ti compound layer formed by chemical vapor deposition having a layer thickness;
(B) as an intermediate layer, an aluminum oxide layer having an α-type crystal structure in a chemical vapor deposited state and an average layer thickness of 1 to 15 μm;
(C) As an upper layer, it has an average layer thickness of 1 to 10 μm, and
Formula: (Ti 1-X-Y Al X M Y) N ( provided that an atomic ratio, 0.30 ≦ X ≦ 0.70, and, be Y = 0 or 0.01 ≦ Y ≦ 0.10 In addition, M represents one or more additive components selected from Si, Cr, V, Y, and B), and a composite nitride layer of Ti and Al formed by physical vapor deposition satisfying And a composite nitride layer of Al and M,
In the surface-coated cutting tool formed by vapor-depositing the hard coating layer composed of the above (a) to (c) with an overall average layer thickness of 5 to 30 μm,
The aluminum oxide layer constituting the intermediate layer is irradiated with an electron beam on each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope, The inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line, and the measurement inclination angle within the range of 45 to 90 degrees out of the measurement inclination angles is set to 0. When divided by 25-degree pitch and represented by an inclination angle distribution graph obtained by summing up the frequencies existing in each division, the highest peak exists in the inclination angle section within the range of 83 to 90 degrees. Along with the aluminum oxide layer showing an inclination angle number distribution graph in which the total of the frequencies existing in the range of 83 to 90 degrees occupies a ratio of 45% or more of the entire frequency in the inclination angle number distribution graph,
A surface-coated cutting tool with a hard coating layer featuring excellent wear resistance in high-speed cutting.
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