JP4747386B2 - Surface coated cermet cutting tool whose hard coating layer exhibits excellent wear resistance in high speed cutting - Google Patents
Surface coated cermet cutting tool whose hard coating layer exhibits excellent wear resistance in high speed cutting Download PDFInfo
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- 238000005520 cutting process Methods 0.000 title claims description 42
- 239000011195 cermet Substances 0.000 title claims description 39
- 239000011247 coating layer Substances 0.000 title claims description 28
- 239000010410 layer Substances 0.000 claims description 121
- 238000009826 distribution Methods 0.000 claims description 40
- 239000013078 crystal Substances 0.000 claims description 26
- 238000005259 measurement Methods 0.000 claims description 15
- 239000010936 titanium Substances 0.000 claims description 13
- 238000005229 chemical vapour deposition Methods 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 239000011295 pitch Substances 0.000 claims description 5
- 238000001887 electron backscatter diffraction Methods 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 46
- 239000000843 powder Substances 0.000 description 20
- 239000012298 atmosphere Substances 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 229910001018 Cast iron Inorganic materials 0.000 description 5
- 239000010730 cutting oil Substances 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 102220358403 c.89C>G Human genes 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 235000000396 iron Nutrition 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
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Description
この発明は、特に硬質被覆層の上部層を構成する酸化アルミニウム層（以下、Ａｌ2Ｏ3層で示す）が、各種の鋼や鋳鉄などの切削加工を、高速で行った場合にも、すぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 The present invention is excellent even when the aluminum oxide layer (hereinafter referred to as the Al 2 O 3 layer) constituting the upper layer of the hard coating layer is subjected to cutting of various steels and cast irons at a high speed. The present invention relates to a surface-coated cermet cutting tool that exhibits high wear resistance (hereinafter referred to as a coated cermet tool).
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、いずれも化学蒸着形成された、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ３〜２０μmの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、１〜１５μmの平均層厚を有し、かつ化学蒸着した状態でα型の結晶構造を有するＡｌ2Ｏ3層（以下、α型Ａｌ2Ｏ3層という）、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition of the lower layers. A Ti compound having one or more of carbon dioxide (hereinafter referred to as TiCO) layer and carbonitride oxide (hereinafter referred to as TiCNO) layer and having an overall average layer thickness of 3 to 20 μm layer,
(B) an Al 2 O 3 layer (hereinafter referred to as an α-type Al 2 O 3 layer) having an average layer thickness of 1 to 15 μm and having an α-type crystal structure in a state of chemical vapor deposition,
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of the above (a) and (b). It is well known to be used.
また、一般に、上記の被覆サーメット工具の硬質被覆層を構成するＴｉ化合物層や従来α型Ａｌ2Ｏ3層が粒状結晶組織を有し、さらに、前記Ｔｉ化合物層を構成するＴｉＣＮ層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、７００〜９５０℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化する傾向にあるが、上記の従来被覆サーメット工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを高速で、かつ切削油使用の湿式高速切削条件で用いた場合には、特に硬質被覆層を構成するα型Ａｌ2Ｏ3層の耐摩耗性が不十分であることから、摩耗が急速に進行するようになり、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting work, and along with this, cutting work tends to be further accelerated. For coated cermet tools, there is no problem when this is used for continuous cutting and interrupted cutting under normal conditions such as steel and cast iron, but this is especially true at high speeds and wet high speed cutting conditions using cutting oil. When used, the wear resistance of the α-type Al 2 O 3 layer that constitutes the hard coating layer is insufficient, so that the wear proceeds rapidly, and the service life is shortened in a relatively short time. This is the current situation.
そこで、本発明者等は、上述のような観点から、上記のα型Ａｌ2Ｏ3層が硬質被覆層の上部層を構成する被覆サーメット工具に着目し、特に前記α型Ａｌ2Ｏ3層の耐摩耗性向上を図るべく研究を行った結果、
（ａ）上記の従来被覆サーメット工具の硬質被覆層としてのα型Ａｌ2Ｏ3層（以下、従来α型Ａｌ2Ｏ3層という）は、一般に、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ3：１〜５％、ＣＯ2：３〜７％、ＨＣｌ：０．３〜３％、Ｈ2Ｓ：０．０２〜０．４％、Ｈ2：残り、
反応雰囲気温度：９５０〜１１００℃、
反応雰囲気圧力：６〜１３ｋＰａ、
の条件（以下、通常条件という）で形成されるが、この通常条件形成の従来α型Ａｌ2Ｏ3層について、電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に概略説明図で示される通り、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成すると、図３に例示される通り、（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的な傾斜角度数分布グラフを示すこと。
The present inventors have, from the viewpoint as described above, focuses on coated cermet tool α type the Al 2 O 3 layer described above constituting the upper layer of the hard coating layer, in particular the α-type the Al 2 O 3 layer As a result of research to improve wear resistance,
(A) The α-type Al 2 O 3 layer (hereinafter referred to as a conventional α-type Al 2 O 3 layer) as a hard coating layer of the above-described conventional coated cermet tool is generally obtained by using a normal chemical vapor deposition apparatus.
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2: remainder ,
Reaction atmosphere temperature: 950-1100 ° C.
Reaction atmosphere pressure: 6-13 kPa,
The conventional α-type Al 2 O 3 layer formed under the normal conditions is schematically shown in FIGS. 1A and 1B using a field emission scanning electron microscope. As shown in the explanatory diagram, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam , and a predetermined region is set to 0.1 μm / step using an electron backscatter diffraction image apparatus. The inclination angle formed by the normal line of the (0001) plane that is the crystal plane of the crystal grain is measured with respect to the normal line of the polished surface at an interval of 45 to 90 degrees out of the measurement inclination angle. When the inclination angle distribution graph is formed by dividing the measured inclination angles in each of the pitches of 0.25 degrees and summing up the frequencies existing in each section, as illustrated in FIG. ) Uneven distribution within the range of 45-90 degrees measurement inclination angle of the surface To indicate an inclination angle frequency distribution graph.
（ｂ）一方、上記の従来α型Ａｌ2Ｏ3層に代って、同じく通常の化学蒸着装置を用い、
反応ガス組成：容量％で、ＡｌＣｌ3：１〜５％、ＣＯ2：３〜７％、ＨＣｌ：０．３〜３％、ＳＦ６：０．１〜１％、Ｈ2：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：５５〜８０ｋＰａ、
の相対的に低温高圧条件で、かつ反応ガスとして、Ｈ2Ｓに代ってＳＦ６を使用する条件で形成すると、この結果形成されたα型Ａｌ2Ｏ3層（以下、改質α型Ａｌ2Ｏ3層という）は、同じく電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に示される通り、同じく表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、図２に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、試験結果によれば、化学蒸着装置における反応雰囲気圧力を、上記の通り５５〜８０ｋＰａの範囲内で変化させると、上記シャープな最高ピークの現れる位置が傾斜角区分の８３〜８９度の範囲内で変化すると共に、８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜８０％の割合を占めるようになり、この結果の傾斜角度数分布グラフにおいて８３〜８９度の範囲内に傾斜角区分の最高ピークが現れる改質α型Ａｌ2Ｏ3層は、上記の通常条件形成の従来α型Ａｌ2Ｏ3層に比して、一段とすぐれた耐摩耗性を示すこと。
(B) On the other hand, instead of the conventional α-type Al 2 O 3 layer, a normal chemical vapor deposition apparatus is used,
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, SF 6: 0.1~1%, H 2: remainder,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 55-80 kPa,
The α-type Al 2 O 3 layer formed as a result (hereinafter referred to as the modified α-type) is formed under the conditions of using SF 6 instead of H 2 S as the reaction gas under relatively low temperature and high pressure conditions. The Al 2 O 3 layer) has a hexagonal crystal lattice that is also present in the measurement range of the surface polished surface, as shown in FIGS. 1A and 1B, using a field emission scanning electron microscope. Each crystal grain is irradiated with an electron beam and an electron backscatter diffraction image apparatus is used, and a predetermined region is a crystal plane of the crystal grain with respect to the normal line of the polished surface at an interval of 0.1 μm / step ( The tilt angle formed by the normal line of the (0001) plane is measured, and among the measured tilt angles, the measured tilt angles within the range of 45 to 90 degrees are divided for each pitch of 0.25 degrees, and within each section Fig. 2 shows an example of an inclination angle distribution graph that aggregates existing frequencies. As shown in the graph, a sharp maximum peak appears at a specific position in the tilt angle section. According to the test results, when the reaction atmosphere pressure in the chemical vapor deposition apparatus is changed within the range of 55 to 80 kPa as described above, the sharp maximum peak is obtained. The position at which the peak appears varies within the range of 83 to 89 degrees of the tilt angle section, and the total frequency existing within the range of 83 to 90 degrees is 45 to 80% of the total frequency in the tilt angle frequency distribution graph. The modified α-type Al 2 O 3 layer in which the highest peak of the tilt angle section appears in the range of 83 to 89 degrees in the tilt angle number distribution graph of the resulting tilt angle distribution graph is the conventional one for forming the above normal conditions Compared to the α-type Al 2 O 3 layer, it should have excellent wear resistance.
（ｃ）したがって、下部層がＴｉ化合物層からなる硬質被覆層の上部層である従来α型Ａｌ2Ｏ3層に代って、表面研磨面の測定で、（０００１）面の測定傾斜角の分布が８３〜８９度の範囲内の傾斜角区分に最高ピークが存在すると共に、８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜８０％の割合を占める傾斜角度数分布グラフを示す改質α型Ａｌ2Ｏ3層で構成してなる被覆サーメット工具は、特に切削油使用の湿式高速切削条件で切削加工を行っても、前記硬質被覆層の上部層が、同じく（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的な傾斜角度数分布グラフを示す前記従来α型Ａｌ2Ｏ3層で構成された従来被覆サーメット工具に比して、一段とすぐれた耐摩耗性を長期に亘って発揮するようになること。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) Therefore, instead of the conventional α-type Al 2 O 3 layer, which is the upper layer of the hard coating layer whose lower layer is a Ti compound layer, the measured inclination angle of the (0001) plane is The highest peak exists in the inclination angle section in which the distribution is in the range of 83 to 89 degrees, and the sum of the frequencies existing in the range of 83 to 90 degrees is 45 to 80% of the entire frequency in the inclination angle frequency distribution graph. A coated cermet tool composed of a modified α-type Al 2 O 3 layer showing an inclination angle number distribution graph occupying a ratio, even if the hard coating layer is cut even under wet high-speed cutting conditions using cutting oil. A conventional coating comprising the conventional α-type Al 2 O 3 layer in which the upper layer of the same also exhibits an unbiased inclination angle number distribution graph within the range of 45 to 90 degrees of the measured inclination angle distribution of the (0001) plane Excellent wear resistance compared to cermet tools To become possible to exert over the sex-term.
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、工具基体の表面に、
（ａ）下部層が、いずれも化学蒸着形成された、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、１〜１５μmの平均層厚を有するα型Ａｌ2Ｏ3層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具において、
上記α型Ａｌ2Ｏ3層を、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、８３〜８９度の範囲内の傾斜角区分に最高ピークが存在すると共に、８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜８０％の割合を占める傾斜角度数分布グラフを示す改質α型Ａｌ2Ｏ3層で構成してなる、
硬質被覆層が高速切削ですぐれた耐摩耗性を発揮する被覆サーメット工具に特徴を有するものである。
This invention was made based on the above research results, and on the surface of the tool base,
(A) The lower layer is formed of one or more of TiC layer, TiN layer, TiCN layer, TiCO layer, and TiCNO layer, all formed by chemical vapor deposition, and an overall average layer of 3 to 20 μm A Ti compound layer having a thickness;
(B) an α-type Al 2 O 3 layer whose upper layer has an average layer thickness of 1 to 15 μm;
In the coated cermet tool formed by vapor-depositing the hard coating layer composed of (a) and (b) above,
The α-type Al 2 O 3 layer is irradiated with an electron beam to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface using a field emission scanning electron microscope, and an electron backscatter diffraction image Using an apparatus, the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the polished surface at an interval of 0.1 μm / step in a predetermined region , Of the measured tilt angles, the measured tilt angles within the range of 45 to 90 degrees are divided into pitches of 0.25 degrees, and the frequency existing in each section is tabulated as a tilt angle number distribution graph. In this case, the highest peak is present in the inclination angle section within the range of 83 to 89 degrees, and the total of the frequencies existing within the range of 83 to 90 degrees is 45 to 80% of the entire degrees in the inclination angle frequency distribution graph. Revision of the graph showing the distribution of the number of inclination angles becomes constituted by α type the Al 2 O 3 layer,
The hard coating layer is characterized by a coated cermet tool that exhibits excellent wear resistance in high-speed cutting.
以下に、この発明の被覆サーメット工具の硬質被覆層の構成層に関し、上記の通りに数値限定した理由を説明する。
（ａ）Ｔｉ化合物層（下部層）
Ｔｉ化合物層は、基本的には改質α型Ａｌ2Ｏ3層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度を具備するようにするほか、工具基体と改質α型Ａｌ2Ｏ3層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用を有するが、その平均層厚が３μm未満では、前記作用を十分に発揮させることができず、一方その平均層厚が２０μmを越えると、特に高熱発生を伴なう高速切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を３〜２０μmと定めた。
The reason why the numerical values of the constituent layers of the hard coating layer of the coated cermet tool of the present invention are limited as described above will be described below.
(A) Ti compound layer (lower layer)
The Ti compound layer basically exists as a lower layer of the modified α-type Al 2 O 3 layer, and allows the hard coating layer to have high-temperature strength by its excellent high-temperature strength. And the modified α-type Al 2 O 3 layer firmly adhere to each other, thereby contributing to the improvement of the adhesion of the hard coating layer to the tool substrate, but when the average layer thickness is less than 3 μm, On the other hand, if the average layer thickness exceeds 20 μm, high-speed cutting with high heat generation tends to cause thermoplastic deformation, which causes uneven wear. The layer thickness was determined to be 3-20 μm.
（ｂ）改質α型Ａｌ2Ｏ3層（上部層）
上記の通り、改質α型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおける測定傾斜角の最高ピーク位置は、化学蒸着装置における反応雰囲気圧力を変化させることによって変化するが、試験結果によれば、前記反応雰囲気圧力を、５５〜８０ｋｐａとすると、最高ピークが、８３〜８９度の範囲内の傾斜角区分に現れると共に、８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜８０％の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記反応雰囲気圧力が前記範囲から低い方に外れても、また高い方に外れても、測定傾斜角の最高ピーク位置は８３〜８９度の範囲から外れてしまい、このような場合には所望のすぐれた耐摩耗性を確保することができない場合が生じるものである。
また、改質α型Ａｌ2Ｏ3層全体の平均層厚が１μm未満では、これのもつすぐれた特性を十分に発揮させることができず、一方その平均層厚が１５μmを越えて厚くなりすぎると、切刃部にチッピング（微少欠け）が発生し易くなることから、その全体平均層厚を１〜１５μmと定めた。
(B) Modified α-type Al 2 O 3 layer (upper layer)
As described above, the highest peak position of the measured inclination angle in the inclination angle number distribution graph of the modified α-type Al 2 O 3 layer is changed by changing the reaction atmosphere pressure in the chemical vapor deposition apparatus. When the reaction atmosphere pressure is 55 to 80 kpa, the highest peak appears in the inclination angle section in the range of 83 to 89 degrees, and the total of the frequencies existing in the range of 83 to 90 degrees is the inclination angle number. An inclination angle frequency distribution graph occupying a ratio of 45 to 80% of the entire frequency in the distribution graph is shown. Therefore, even if the reaction atmosphere pressure is out of the range, it is out of the range. even the highest peak position of the measurement inclination angle deviates from the range of 83 to 89 degrees, if such is the case it is impossible to ensure a desired excellent wear resistance raw It is a thing to tie .
Moreover, if the average layer thickness of the modified α-type Al 2 O 3 layer is less than 1 μm, the excellent characteristics of the modified α-type Al 2 O 3 layer cannot be exhibited sufficiently, while the average layer thickness exceeds 15 μm and becomes too thick. Then, since chipping (slight chipping) is likely to occur in the cutting edge portion, the overall average layer thickness is set to 1 to 15 μm.
なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、必要に応じて硬質被覆層の最表面層として蒸着形成してもよいが、この場合の平均層厚は０．１〜１μmでよく、これは０．１μm未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μmまでの平均層厚で十分であるという理由からである。 In addition, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer as necessary, but the average layer thickness in this case is The discriminating effect may not be obtained if the thickness is less than 0.1 μm, while the discriminating effect by the TiN layer is sufficient with an average layer thickness of up to 1 μm.
この発明の被覆サーメット工具は、各種の鋼や鋳鉄などの切削加工を高速で行っても、硬質被覆層の上部層を構成する改質α型Ａｌ2Ｏ3層が、すぐれた耐摩耗性を発揮することから、使用寿命の一層の延命化を可能とするものである。 The coated cermet tool of the present invention has excellent wear resistance due to the modified α-type Al 2 O 3 layer constituting the upper layer of the hard coating layer even when various types of steel and cast iron are cut at high speed. Because of this, it is possible to further extend the service life.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも０．５〜３μmの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3 Ｃ2 粉末、ＴｉＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０５ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｅをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, and Co powder all having an average particle diameter of 0.5 to 3 μm are prepared. The powder was blended into the blending composition shown in Table 1, further added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and then press-molded into a compact of a predetermined shape at a pressure of 98 MPa. The powder is sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour, and after sintering, the cutting edge is subjected to a honing process of R: 0.05 mm. Thus, tool bases A to E made of a WC-based cemented carbide having a throwaway tip shape specified in ISO · CNMG120408 were produced.
また、原料粉末として、いずれも０．５〜２μmの平均粒径を有するＴｉＣＮ（質量比で、ＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2 Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 Further, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, blend these raw material powders into the composition shown in Table 2, wet mix with a ball mill for 24 hours, dry, and press-mold into a green compact at 98 MPa pressure The green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, the cutting edge portion is subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN base cermet having a chip shape of ISO standard / CNMG120408 were formed.
ついで、これらの工具基体Ａ〜Ｅおよび工具基体ａ〜ｆのそれぞれを、通常の化学蒸着装置に装入し、
（ａ）まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表４に示される組み合わせおよび目標層厚のＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、
（ｂ）ついで、表３に示される低温高圧条件で、表４に示される組み合わせおよび目標層厚で、同じく上部層である改質α型Ａｌ2Ｏ3層を蒸着形成することにより本発明被覆サーメット工具１〜１２をそれぞれ製造した。
Next, each of the tool bases A to E and the tool bases a to f is charged into a normal chemical vapor deposition apparatus,
(A) First, Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically elongated crystal structure described in JP-A-6-8010, and the other conditions are ordinary granularity. Under the conditions shown in Table 4), the Ti compound layer having the combination shown in Table 4 and the target layer thickness is deposited as a lower layer of the hard coating layer.
(B) Next, under the low-temperature and high-pressure conditions shown in Table 3, the modified α-type Al 2 O 3 layer, which is also the upper layer, is formed by vapor deposition with the combinations and target layer thicknesses shown in Table 4. Cermet tools 1 to 12 were produced.
また、比較の目的で、硬質被覆層の上部層として、表３に示される通常条件で、表６に示される組み合わせおよび目標層厚で、従来α型Ａｌ2Ｏ3層を蒸着形成する以外は、上記の本発明被覆サーメット工具１〜１２のそれぞれと対応して同じ条件で従来被覆サーメット工具１〜１２をそれぞれ製造した。 For the purpose of comparison, except that the conventional α-type Al 2 O 3 layer is formed by vapor deposition as the upper layer of the hard coating layer under the normal conditions shown in Table 3 and the combinations and target layer thicknesses shown in Table 6. The conventional coated cermet tools 1 to 12 were produced under the same conditions corresponding to the above-described inventive coated cermet tools 1 to 12 , respectively.
ついで、上記の本発明被覆サーメット工具１〜１２および従来被覆サーメット工具１〜１２の硬質被覆層の上部層を構成する改質α型Ａｌ2Ｏ3層および従来α型Ａｌ2Ｏ3層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記改質α型Ａｌ2Ｏ3層および従来α型Ａｌ2Ｏ3層のそれぞれの表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、それぞれの前記研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μmの領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Next, the modified α-type Al 2 O 3 layer and the conventional α-type Al 2 O 3 layer constituting the upper layer of the hard coating layer of the above-described coated cermet tools 1 to 12 of the present invention and the conventional coated cermet tools 1 to 12 , An inclination angle number distribution graph was prepared using a field emission scanning electron microscope.
That is, the inclination angle number distribution graph shows the column of the field emission scanning electron microscope in a state where the surfaces of the modified α-type Al 2 O 3 layer and the conventional α-type Al 2 O 3 layer are polished surfaces. Each crystal grain having a hexagonal crystal lattice existing within the measurement range of each polished surface is irradiated with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees and an irradiation current of 1 nA on the polished surface. And a 30 × 50 μm region at a spacing of 0.1 μm / step is the crystal plane of the crystal grain with respect to the normal of the polished surface (0001) The inclination angle formed by the normal of the surface is measured, and based on the measurement result, the measurement inclination angle within the range of 45 to 90 degrees among the measurement inclination angles is divided for each pitch of 0.25 degrees. By counting the frequency that exists in each category Form was.
この結果得られた各種のα型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、表４，５にそれぞれ示される通り、本発明被覆サーメット工具１〜１２の改質α型Ａｌ2Ｏ3層は、（０００１）面の測定傾斜角の分布が、８３〜８９度の範囲内の傾斜角区分に最高ピークが現れ、かつ８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜８０％の割合を占める傾斜角度数分布グラフを示すのに対して、従来被覆サーメット工具１〜１２の従来α型Ａｌ2Ｏ3層は、（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的で、最高ピークが存在せず、かつ８０〜９０度の範囲内に存在する度数の合計が、度数全体の３０％以下である傾斜角度数分布グラフを示すものであった。
また表４，５には、上記の各種のα型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、それぞれ８３〜９０度の範囲内の傾斜角区分に存在する全傾斜角度数の傾斜角度数分布グラフ全体に占める割合を示した。
なお、図２は、本発明被覆サーメット工具１の改質α型Ａｌ2Ｏ3層の傾斜角度数分布グラフ、図３は、従来被覆サーメット工具１の従来α型Ａｌ2Ｏ3層の傾斜角区分を示す傾斜角度数分布グラフである。
In the gradient angle distribution graphs of the various α-type Al 2 O 3 layers obtained as a result, as shown in Tables 4 and 5, modified α-type Al 2 O 3 layers of the coated cermet tools 1 to 12 of the present invention, respectively. Is the distribution of the measured inclination angle of the (0001) plane, the highest peak appears in the inclination angle section within the range of 83 to 89 degrees, and the sum of the frequencies existing within the range of 83 to 90 degrees is the inclination angle number. While the inclination angle frequency distribution graph occupying a ratio of 45 to 80% of the entire frequency in the distribution graph is shown, the conventional α-type Al 2 O 3 layers of the conventional coated cermet tools 1 to 12 are measured on the (0001) plane. An inclination angle in which the distribution of inclination angles is unbiased within the range of 45 to 90 degrees, the highest peak does not exist, and the sum of the frequencies existing within the range of 80 to 90 degrees is 30% or less of the entire degrees. A number distribution graph was shown.
Tables 4 and 5 show the inclination angle numbers of all inclination angle numbers existing in the inclination angle sections within the range of 83 to 90 degrees in the inclination angle number distribution graphs of the various α-type Al 2 O 3 layers. The percentage of the entire distribution graph is shown.
2 is an inclination angle number distribution graph of the modified α-type Al 2 O 3 layer of the coated cermet tool 1 of the present invention, and FIG. 3 is an inclination angle of the conventional α-type Al 2 O 3 layer of the conventional coated cermet tool 1. It is an inclination angle number distribution graph which shows a division.
また、この結果得られた本発明被覆サーメット工具１〜１２および従来被覆サーメット工具１〜１２の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Further, when the thickness of the resulting present invention coated cermet tools 1 to 12 and the hard coating layer of the layers constituting the conventional coated cermet tool 1-12 was measured using a scanning electron microscope (longitudinal sectional measurement) , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.
つぎに、上記の本発明被覆サーメット工具１〜１２および従来被覆サーメット工具１〜１２の各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＣＭ４４０の丸棒、
切削速度：４４０ｍ／ｍｉｎ．、
切り込み：１．５ｍｍ、
送り：０．３ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件（切削条件Ａという）で、水溶性切削油使用の合金鋼の連続湿式高速切削試験（通常の切削速度は２５０ｍ／ｍｉｎ．）、
被削材：ＪＩＳ・ＦＣ２５０の長さ方向等間隔４本縦溝入り丸棒、
切削速度：５００ｍ／ｍｉｎ．、
切り込み：１．５ｍｍ、
送り：０．３ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件（切削条件Ｂという）で、水溶性切削油使用の鋳鉄の断続湿式高速切削試験（通常の切削速度３００ｍ／ｍｉｎ．）、さらに、
被削材：ＪＩＳ・Ｓ３０Ｃの丸棒、
切削速度：４００ｍ／ｍｉｎ．、
切り込み：１．５ｍｍ、
送り：０．３ｍｍ／ｒｅｖ．、
切削時間：１０分、
の条件（切削条件Ｃという）で、水溶性切削油使用の炭素鋼の連続湿式高速切削試験（通常の切削速度は２００ｍ／ｍｉｎ．）を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表６に示した。
Next, for the various coated cermet tools of the present invention coated cermet tools 1 to 12 and the conventional coated cermet tools 1 to 12 , all of which are screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS / SCM440 round bar,
Cutting speed: 440 m / min. ,
Incision: 1.5mm,
Feed: 0.3 mm / rev. ,
Cutting time: 10 minutes,
In a continuous wet high-speed cutting test (normal cutting speed is 250 m / min.) Of alloy steel using water-soluble cutting oil
Work material: JIS / FC250 lengthwise equidistant round bars with 4 vertical grooves,
Cutting speed: 500 m / min. ,
Incision: 1.5mm,
Feed: 0.3 mm / rev. ,
Cutting time: 10 minutes,
In the above condition (referred to as cutting condition B), an intermittent wet high-speed cutting test (normal cutting speed 300 m / min.) Of cast iron using water-soluble cutting oil,
Work material: JIS / S30C round bar,
Cutting speed: 400 m / min. ,
Incision: 1.5mm,
Feed: 0.3 mm / rev. ,
Cutting time: 10 minutes,
Under the above conditions (referred to as cutting condition C), a continuous wet high-speed cutting test (normal cutting speed is 200 m / min.) Of carbon steel using a water-soluble cutting oil is performed. Was measured. The measurement results are shown in Table 6.
表４〜６に示される結果から、本発明被覆サーメット工具１〜１２は、いずれも硬質被覆層の上部層である改質α型Ａｌ2Ｏ3層が、（０００１）面の傾斜角度数分布グラフで、８３〜８９度の範囲内の傾斜角区分に最高ピークが存在すると共に、８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜８０％の割合を占める傾斜角度数分布グラフを示し、すぐれた耐摩耗性を具備するようになることから、鋼や鋳鉄の切削加工を、湿式高速条件で行っても、チッピングの発生なく、すぐれた耐摩耗性を示すのに対して、硬質被覆層の上部層が、（０００１）面の測定傾斜角の分布が４５〜９０度の範囲内で不偏的で、最高ピークが存在せず、かつ８３〜９０度の範囲内に存在する度数の合計が、度数全体の３０％以下である傾斜角度数分布グラフを示す従来α型Ａｌ2Ｏ3層で構成された従来被覆サーメット工具１〜１２においては、いずれも前記従来α型Ａｌ2Ｏ3層の耐摩耗性不足が原因で、高速切削条件では硬質被覆層の摩耗が著しく促進し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4-6, the present invention coated cermet tools 1 to 12 are all modified α-type Al 2 O 3 layer which is the upper layer of the hard coating layer, (0001) inclination angle frequency distribution of the surface In the graph, the highest peak exists in the inclination angle section in the range of 83 to 89 degrees, and the total of the frequencies existing in the range of 83 to 90 degrees is 45 to 80% of the entire degrees in the inclination angle distribution graph. The graph shows the distribution of the number of inclination angles that account for the percentage of the steel and has excellent wear resistance. Therefore, even when cutting steel and cast iron under wet high-speed conditions, chipping does not occur and excellent resistance is achieved. Whereas the upper layer of the hard coating layer is wearable, the distribution of measured inclination angles on the (0001) plane is unbiased within the range of 45 to 90 degrees, the highest peak does not exist, and 83 to 83 The total number of frequencies within the 90 degree range is In the conventional coated cermet tools 1 to 12 composed of the conventional α-type Al 2 O 3 layer showing an inclination angle number distribution graph that is 30% or less of the total number, the resistance of the conventional α-type Al 2 O 3 layer is all It is clear that due to the lack of wear, the wear of the hard coating layer is significantly accelerated under high-speed cutting conditions and the service life is reached in a relatively short time.
上述のように、この発明の被覆サーメット工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に湿式高速切削でもチッピングの発生なく、すぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool of the present invention has excellent wear resistance with no occurrence of chipping even in continuous cutting and intermittent cutting under normal conditions such as various steels and cast iron, especially wet high-speed cutting. Since it exhibits excellent cutting performance over a long period of time, it can sufficiently satisfactorily cope with higher performance of the cutting device, labor saving and energy saving of cutting, and lower cost.
Claims (1)
（ａ）下部層が、いずれも化学蒸着形成された、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μmの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、化学蒸着した状態でα型の結晶構造を有し、かつ１〜１５μmの平均層厚を有する酸化アルミニウム層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる表面被覆サーメット製切削工具において、
上記酸化アルミニウム層を、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、８３〜８９度の範囲内の傾斜角区分に最高ピークが存在すると共に、８３〜９０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜８０％の割合を占める傾斜角度数分布グラフを示す改質α型酸化アルミニウム層で構成したこと、
を特徴とする硬質被覆層が高速切削ですぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具。 On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) The lower layer is composed of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride oxide layer formed by chemical vapor deposition. And a Ti compound layer having an overall average layer thickness of 3 to 20 μm,
(B) an aluminum oxide layer in which the upper layer has an α-type crystal structure in the state of chemical vapor deposition and has an average layer thickness of 1 to 15 μm;
In the surface-coated cermet cutting tool formed by vapor-depositing the hard coating layer composed of (a) and (b) above,
Using the field emission scanning electron microscope, the aluminum oxide layer is irradiated with an electron beam on each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface, and an electron backscatter diffraction image apparatus is used. An inclination angle formed by a normal line of the (0001) plane, which is a crystal plane of the crystal grain, is measured with respect to a normal line of the polished surface at an interval of 0.1 μm / step in a predetermined region. Among them, when the measured inclination angle within the range of 45 to 90 degrees is divided into pitches of 0.25 degrees and the frequency existing in each division is represented by an inclination angle number distribution graph, 83 with the highest peak in the inclination section of the range of - 89 ° are present, the sum of the frequencies present in the range of 83-90 degrees, accounts for 45 to 80% of total power at the inclination angle frequency distribution graph An inclination angle number distribution graph is shown. Having a modified α-type aluminum oxide layer;
A surface-coated cermet cutting tool with a hard coating layer featuring excellent wear resistance in high-speed cutting.
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