JP4793629B2 - Surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed cutting of difficult-to-cut materials - Google Patents

Surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed cutting of difficult-to-cut materials Download PDF

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JP4793629B2
JP4793629B2 JP2005294598A JP2005294598A JP4793629B2 JP 4793629 B2 JP4793629 B2 JP 4793629B2 JP 2005294598 A JP2005294598 A JP 2005294598A JP 2005294598 A JP2005294598 A JP 2005294598A JP 4793629 B2 JP4793629 B2 JP 4793629B2
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尚志 本間
晃 長田
惠滋 中村
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Mitsubishi Materials Corp
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Description

この発明は、硬質被覆層がすぐれた潤滑性を有し、したがって特に軟鋼やステンレス鋼、さらに高マンガン鋼などの粘性の高い難削材の高い発熱を伴う高速切削加工に用いた場合にも、切削時に切粉が切刃部に溶着することなく、すぐれた耐チッピング性を長期に亘って発揮する表面被覆サーメット製切削工具(以下、被覆サーメット工具という)に関するものである。   This invention has excellent lubricity of the hard coating layer, and therefore, even when used for high-speed cutting with high heat generation of difficult-to-cut materials with high viscosity such as mild steel, stainless steel, and even high manganese steel, The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance over a long period of time without cutting chips adhering to the cutting edge during cutting.

従来、一般に、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層として、炭化チタン(以下、TiCで示す)層、窒化チタン(以下、同じくTiNで示す)層、炭窒化チタン(以下、TiCNで示す)層、炭酸化チタン(以下、TiCOで示す)層、および炭窒酸化チタン(以下、TiCNOで示す)層のうちの1層または2層以上からなり、かつ3〜20μmの全体平均層厚を有するTi化合物層、
(b)上部層として、1〜15μmの平均層厚を有し、かつ化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム(以下、α型Al23層という)層、
以上(a)および(b)で構成された硬質被覆層を、化学蒸着装置で蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) As a lower layer, a titanium carbide (hereinafter referred to as TiC) layer, a titanium nitride (hereinafter also referred to as TiN) layer, a titanium carbonitride (hereinafter referred to as TiCN) layer, a titanium carbonate (hereinafter referred to as TiCO) A Ti compound layer consisting of one or two or more of the layers shown below and a titanium carbonitride oxide (hereinafter referred to as TiCNO) layer and having an overall average layer thickness of 3 to 20 μm,
(B) As an upper layer, an aluminum oxide (hereinafter referred to as α-type Al 2 O 3 layer) layer having an average layer thickness of 1 to 15 μm and having an α-type crystal structure in a chemical vapor deposited state;
There is known a coated cermet tool formed by vapor-depositing the hard coating layer constituted by the above (a) and (b) with a chemical vapor deposition apparatus, and this coated cermet tool is a continuous material such as various steels and cast irons. It is well known that it is used for cutting and intermittent cutting.

また、上記の被覆サーメット工具において、これの硬質被覆層の構成層は、一般に粒状結晶組織を有し、さらに、下部層であるTi化合物層を構成するTiCN層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、700〜950℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
特開平6−31503号公報 特開平6−8010号公報
Further, in the above-described coated cermet tool, the constituent layer of the hard coating layer generally has a granular crystal structure, and further, the TiCN layer constituting the Ti compound layer as the lower layer is intended to improve the strength of the layer itself. In a normal chemical vapor deposition apparatus, a gas mixture containing organic carbonitrides is used as a reaction gas, and it is formed by chemical vapor deposition at an intermediate temperature range of 700 to 950 ° C. so that it has a vertically grown crystal structure. It is also known to do.
Japanese Unexamined Patent Publication No. 6-31503 Japanese Patent Laid-Open No. 6-8010

近年の切削加工装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は高速化の傾向にあるが、上記の従来被覆サーメット工具においては、これを炭素鋼や低合金鋼、さらに普通鋳鉄などの切削を高速切削加工条件で行うのに用いた場合には、通常の切削性能を示し問題はないが、特に軟鋼やステンレス鋼、さらに高マンガン鋼などの粘性の高い難削材などの切削加工を、高熱発生を伴なう高速切削加工条件で行うのに用いた場合には、特に硬質被覆層の潤滑性不足が原因で、切粉が切刃部に溶着し易くなり、これが原因でチッピング(微少欠け)が発生し、この結果比較的短時間で使用寿命に至るのが現状である   In recent years, the performance of cutting devices has been dramatically improved, while on the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting, and with this, cutting tends to be faster. For coated cermet tools, when used for cutting carbon steel, low alloy steel, and ordinary cast iron under high-speed cutting conditions, there is no problem with normal cutting performance. Especially when cutting high viscosity difficult-to-cut materials such as stainless steel and high manganese steel under high-speed cutting conditions with high heat generation, the lubricity of the hard coating layer is insufficient. This makes it easier for chips to be welded to the cutting edge, which causes chipping (small chipping), resulting in a relatively short service life.

そこで、本発明者等は、上述のような観点から、特に上記粘性の高い難削材の高速切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具を開発すべく、上記の従来被覆サーメット工具の硬質被覆層に着目し、研究を行った結果、
(a)従来、一般に、酸化クロム(以下、Crで示す)層(以下、従来Cr層という)は、通常の化学蒸着装置で、
反応ガス組成:容量%で、CrCl:2〜4%、CO:4.5〜7%、HCl:2.5〜5%、H:残り、
反応雰囲気温度:950〜1020℃、
反応雰囲気圧力:6〜10kPa、
の条件(通常条件という)で形成され、かつ、格子点にCrおよび酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造、すなわち図1にCrの単位格子の原子配列が模式図[(a)は斜視図、(b)は横断面1〜9の平面図]で示される結晶構造を有する結晶粒で構成されるが、黒鉛質材料と同等に潤滑性を有するものの、脆い材料であるために、被覆サーメット工具の硬質被覆層の表面層として適用し、高速切削加工に用いた場合、摩耗進行がきわめて速く、実用に供し得ないこと。
(b)一方、Cr層を、同じく通常の化学蒸着装置で、
反応ガス組成:容量%で、CrCl:2〜4%、CO:4.5〜7%、HCl:2.5〜5%、H:残り、
反応雰囲気温度:850〜920℃、
反応雰囲気圧力:12〜20kPa、
の条件、すなわち反応雰囲気温度および圧力を相対的に低温および高圧の条件で形成すると、この結果のCr23層(以下、改質Cr23層という)は、電界放出型走査電子顕微鏡を用い、図2(a),(b)に概略説明図で示される通り、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、45〜90度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記従来Cr23層は、図4に例示される通り、(0001)面の測定傾斜角の分布が45〜90度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記改質Cr23層は、図3に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、このシャープな最高ピークは、前記改質Cr23層の形成条件を変化させることによりグラフ横軸の傾斜角区分に現れる位置が変わること。
(c)上記の改質Cr23層は、上記従来Cr23層の具備する潤滑性と同等のすぐれた潤滑性を具備した状態で、一段と高温強度の向上したものであり、したがって、これを上記の硬質被覆層の表面層として蒸着形成してなる被覆サーメット工具は、上記の粘性の高い難削材の高い高熱発生を伴う高速切削加工でも、切刃部に切粉が溶着することがなく、この結果チッピングの発生なく、さらに具備するすぐれた高温強度によって摩耗進行が著しく抑制された状態を維持するので、すぐれた耐摩耗性を長期に亘って発揮するようになること。
(d)試験結果によれば、上記改質Cr23層の形成条件を調整することにより、上記シャープな最高ピークが傾斜角区分の80.00〜89.25度の範囲内に現れると共に、80〜90度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45〜80%の割合を占める傾斜角度数分布グラフを示すようにすると、この結果の傾斜角度数分布グラフで80.00〜89.25度の範囲内に傾斜角区分の最高ピークが現れ、かつ80〜90度の範囲内に存在する度数割合が45〜80%の割合を占める改質Cr23層を硬質被覆層の表面層として蒸着形成してなる被覆サーメット工具は、高い高熱発生を伴う上記難削材の高速切削加工でも、切刃部に切粉が溶着することがなく、この結果チッピングの発生なく、すぐれた高温強度を具備することと相俟って、すぐれた耐摩耗性を長期に亘って発揮するようになること。
以上(a)〜(d)に示される研究結果を得たのである。
In view of the above, the present inventors have developed the above-described coated cermet tool that exhibits excellent chipping resistance with a hard coating layer excellent in high-speed cutting of highly viscous difficult-to-cut materials. As a result of conducting research by focusing on the hard coating layer of conventional coated cermet tools,
(A) Conventionally, in general, a chromium oxide (hereinafter referred to as Cr 2 O 3 ) layer (hereinafter referred to as a conventional Cr 2 O 3 layer) is a normal chemical vapor deposition apparatus.
Reaction gas composition: volume%, CrCl 3 : 2 to 4%, CO 2 : 4.5 to 7%, HCl: 2.5 to 5%, H 2 : remaining,
Reaction atmosphere temperature: 950-1020 ° C.
Reaction atmosphere pressure: 6 to 10 kPa,
And a crystal structure of a corundum hexagonal close-packed crystal in which constituent atoms composed of Cr and oxygen are present at lattice points, that is, atoms of a unit cell of Cr 2 O 3 in FIG. The arrangement is composed of crystal grains having a crystal structure shown in a schematic diagram [(a) is a perspective view, (b) is a plan view of a cross section 1 to 9], but has lubricity equivalent to that of a graphite material. However, since it is a brittle material, when it is applied as a surface layer of a hard coating layer of a coated cermet tool and used for high-speed cutting, the wear progress is extremely fast and cannot be put to practical use.
(B) On the other hand, the Cr 2 O 3 layer is also a normal chemical vapor deposition device,
Reaction gas composition: volume%, CrCl 3 : 2 to 4%, CO 2 : 4.5 to 7%, HCl: 2.5 to 5%, H 2 : remaining,
Reaction atmosphere temperature: 850 to 920 ° C.
Reaction atmosphere pressure: 12-20 kPa,
In other words, the resulting Cr 2 O 3 layer (hereinafter referred to as a modified Cr 2 O 3 layer) is formed by a field emission scanning electron microscope. As shown in the schematic explanatory diagrams in FIGS. 2 (a) and 2 (b), each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and electron backscattering is performed. Using a diffraction image apparatus, the inclination angle formed by the normal of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the surface-polished surface at an interval of 0.1 μm / step in a predetermined region. And, among the measured tilt angles, the measured tilt angles within a range of 45 to 90 degrees are divided into pitches of 0.25 degrees, and the tilt angle number distribution is obtained by counting the frequencies existing in each section. when you create a graph, the conventional Cr 2 O 3 layer, in FIG. 4 As shown, whereas show the unbiased inclination angle frequency distribution graph in the range of distribution of 45 to 90 degrees measured tilt angle of the (0001) plane, the reforming Cr 2 O 3 layer, FIG. 3 As shown in Fig. 4, a sharp maximum peak appears at a specific position of the tilt angle section, and this sharp maximum peak is changed by changing the formation conditions of the modified Cr 2 O 3 layer. The position of appearing in changes.
(C) The above-mentioned modified Cr 2 O 3 layer has a further improved high-temperature strength in a state of having excellent lubricity equivalent to that of the conventional Cr 2 O 3 layer, and therefore In the coated cermet tool formed by vapor deposition as the surface layer of the hard coating layer, the chips adhere to the cutting edge portion even in the high-speed cutting with high heat generation of the highly viscous difficult-to-cut material. As a result, there is no occurrence of chipping, and since the progress of wear is remarkably suppressed by the excellent high-temperature strength provided, excellent wear resistance can be exhibited over a long period of time.
(D) According to the test results, by adjusting the formation conditions of the modified Cr 2 O 3 layer, the sharp maximum peak appears in the range of 80.00 to 89.25 degrees of the tilt angle section. When the inclination angle distribution graph in which the total of the frequencies existing in the range of 80 to 90 degrees occupies a ratio of 45 to 80% of the entire frequency in the inclination angle distribution distribution graph is shown, the resulting inclination angle number In the distribution graph, the modified Cr 2 in which the highest peak of the inclination angle section appears in the range of 80.00 to 89.25 degrees and the frequency ratio existing in the range of 80 to 90 degrees accounts for 45 to 80%. The coated cermet tool formed by vapor-depositing the O 3 layer as the surface layer of the hard coating layer does not cause chips to be deposited on the cutting edge portion even in high-speed cutting of the above difficult-to-cut material with high heat generation. No chipping results Excellent I cooperation with and be provided with a high-temperature strength, to become to exert over the superior wear resistance to long term.
The research results shown in (a) to (d) above were obtained.

この発明は、上記の研究結果に基づいてなされたものであって、WC基超硬合金またはTiCN基サーメットで構成された工具基体の表面に、
(a)下部層として、TiC層、TiN層、TiCN層、TiCO層、およびTiCNO層のうちの2層以上からなり、かつ3〜20μmの全体平均層厚を有するTi化合物層、
(b)上部層として、1〜15μmの平均層厚を有するα型Al23層、
以上(a)および(b)で構成された硬質被覆層を化学蒸着装置を用いて蒸着形成してなる、被覆サーメット工具において、
上記硬質被覆層の表面層として、2〜5μmの平均層厚を有すると共に、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、45〜90度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、80.00〜89.25度の範囲内の傾斜角区分に最高ピークが存在すると共に、80〜90度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45〜80%の割合を占める傾斜角度数分布グラフを示す改質Cr23層、
同じく化学蒸着装置を用いて蒸着形成してなる、難削材の高速切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) As a lower layer, a Ti compound layer composed of two or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer and having an overall average layer thickness of 3 to 20 μm,
(B) an α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm as an upper layer;
In the coated cermet tool formed by vapor- depositing the hard coating layer constituted by (a) and (b) using a chemical vapor deposition apparatus ,
The surface layer of the hard coating layer has an average layer thickness of 2 to 5 μm, and using a field emission scanning electron microscope, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface has electrons. A predetermined region is irradiated at an interval of 0.1 μm / step with respect to the normal line of the surface-polished surface, and the crystal plane of the (0001) plane is the crystal plane of the crystal grain. The inclination angle formed by the normal is measured, and among the measurement inclination angles, the measurement inclination angle within the range of 45 to 90 degrees is divided for each pitch of 0.25 degrees, and the frequency existing in each division is determined. In the inclination angle number distribution graph obtained by aggregation, the highest peak is present in the inclination angle section within the range of 80.00 to 89.25 degrees, and the total of the frequencies existing within the range of 80 to 90 degrees is the inclination. Of the whole frequency in the angle distribution graph 5-80% modifiers Cr 2 O 3 layer shows an inclination angle frequency distribution graph in a proportion of,
This is characterized by a coated cermet tool which is formed by vapor deposition using a chemical vapor deposition apparatus and exhibits excellent chipping resistance with a hard coating layer in high-speed cutting of difficult-to-cut materials.

以下に、この発明の被覆サーメット工具の硬質被覆層の構成層において、上記の通りに数値限定した理由を説明する。
(a)下部層のTi化合物層
Ti化合物層は、α型Al23層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層の高温強度向上に寄与するほか、工具基体とα型Al23層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性を向上させる作用を有するが、その平均層厚が3μm未満では、前記作用を十分に発揮させることができず、一方その平均層厚が20μmを越えると、特に高熱発生を伴なう高速切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を3〜20μmと定めた。
(b)上部層のα型Al23
α型Al23層は、Al23自体のもつすぐれた高温硬さと耐熱性によって、硬質被覆層の耐摩耗性向上に寄与するが、その平均層厚が1μm未満では、所望のすぐれた耐摩耗性を十分に発揮させることができず、一方その平均層厚が15μmを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を1〜15μmと定めた。
(c)表面層の改質Cr23
改質Cr23層は、上記の通り、その形成条件を調整して、シャープな最高ピークが傾斜角区分の80.00〜89.25度の範囲内に現れると共に、80〜90度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45〜80%の割合を占める傾斜角度数分布グラフを示すようにした状態で、被覆サーメット工具の硬質被覆層の表面層として蒸着形成した場合に、高強度を具備した上で、すぐれた潤滑性を発揮し、高い高熱発生を伴う上記の難削材の高速切削加工でも、切刃部に切粉が溶着することがなく、この結果チッピングの発生なく、上記の硬質被覆層の表面層として従来Cr23層を形成した被覆サーメット工具に比して、すぐれた耐摩耗性を長期に亘って発揮するが、その平均層厚が2μm未満では、所望のすぐれた潤滑性を十分に発揮させることができず、一方その平均層厚が5μmを越えて厚くなりすぎると、チッピング発生の原因となることから、その平均層厚を2〜5μmと定めた。
Hereinafter, the reason why the constituent layers of the hard coating layer of the coated cermet tool of the present invention are numerically limited as described above will be described.
(A) Ti compound layer of the lower layer The Ti compound layer exists as a lower layer of the α-type Al 2 O 3 layer, and contributes to improving the high temperature strength of the hard coating layer by its excellent high temperature strength. The substrate and the α-type Al 2 O 3 layer are firmly adhered to each other, thereby improving the adhesion of the hard coating layer to the tool substrate. However, when the average layer thickness is less than 3 μm, the above-described operation is sufficiently achieved. On the other hand, if the average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation especially in high-speed cutting with high heat generation, which causes uneven wear. Was determined to be 3 to 20 μm.
(B) an upper layer α type the Al 2 O 3 layer α type the Al 2 O 3 layer of, by Al 2 O 3 hot hardness excellent with itself and heat resistance and contributes to improvement in wear resistance of the hard coating layer If the average layer thickness is less than 1 μm, the desired excellent wear resistance cannot be fully exhibited. On the other hand, if the average layer thickness exceeds 15 μm, chipping is likely to occur. The average layer thickness was determined to be 1 to 15 μm.
(C) a surface layer modification Cr 2 O 3 layer reforming Cr 2 O 3 layer, as described above, by adjusting its forming conditions, the highest peak of sharp inclination angle segment from 80.00 to 89.25 An inclination angle frequency distribution graph that appears in the range of degrees and in which the sum of the frequencies existing in the range of 80 to 90 degrees accounts for 45 to 80% of the entire frequency in the inclination angle frequency distribution graph is shown. In the state, when it is vapor-deposited as the surface layer of the hard coating layer of the coated cermet tool, it has high strength, exhibits excellent lubricity, and high-speed cutting of the above difficult-to-cut materials with high heat generation However, no chips were welded to the cutting edge, and as a result, no chipping occurred, which was superior to the conventional coated cermet tool in which a Cr 2 O 3 layer was formed as the surface layer of the hard coating layer. Demonstrate wear resistance over a long period of time If the average layer thickness is less than 2 μm, the desired excellent lubricity cannot be sufficiently exhibited. On the other hand, if the average layer thickness exceeds 5 μm, the chipping may occur. The average layer thickness was set to 2 to 5 μm.

なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するTiN層を、必要に応じて硬質被覆層の最表面層として蒸着形成してもよいが、この場合の平均層厚は0.1〜1μmでよく、これは0.1μm未満では、十分な識別効果が得られず、一方前記TiN層による前記識別効果は1μmまでの平均層厚で十分であるという理由からである。   In addition, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer as necessary, but the average layer thickness in this case is It may be 0.1 to 1 μm, and if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.

この発明被覆サーメット工具は、特に軟鋼やステンレス鋼、さらに高マンガン鋼などの粘性の高い難削材の高い発熱を伴う高速切削加工に用いた場合にも、硬質被覆層の表面層を構成する改質Cr23層が、Cr23自身のもつすぐれた潤滑性に加えて、一段とすぐれた高温強度を具備することから、長期に亘ってすぐれた潤滑性を保持し、硬質被覆層の耐チッピング性向上に寄与し、使用寿命の一層の延命化を可能とするものである。 The coated cermet tool of the present invention is a modified material that constitutes the surface layer of a hard coating layer even when used for high-speed cutting with high heat generation of difficult-to-cut materials with high viscosity such as mild steel, stainless steel, and high manganese steel. The high quality Cr 2 O 3 layer has excellent high temperature strength in addition to the excellent lubricity of Cr 2 O 3 itself, so it maintains excellent lubricity for a long period of time. It contributes to the improvement of chipping resistance and enables further extension of the service life.

つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。   Next, the coated cermet tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの範囲内の所定の平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr32粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で32時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.07mmのホーニング加工を施すことによりISO・CNMG120412に規定するスローアウエイチップ形状をもったWC基超硬合金製の工具基体A〜Fをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, all having a predetermined average particle diameter in the range of 1 to 3 μm, And Co powders, these raw material powders are blended in the blending composition shown in Table 1, further added with wax, ball mill mixed in acetone for 32 hours, dried under reduced pressure, and then pressed to a predetermined shape at a pressure of 98 MPa. The green compact is press-molded, and this green compact is vacuum-sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, R: By performing a honing process of 0.07 mm, tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape defined in ISO · CNMG120212 were manufactured.

また、原料粉末として、いずれも0.5〜2μmの範囲内の所定の平均粒径を有するTiCN(質量比でTiC/TiN=50/50)粉末、Mo2C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで32時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.07mmのホーニング加工を施すことによりISO規格・CNMG120412のチップ形状をもったTiCN基サーメット製の工具基体a,c〜fを形成した。 Further, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, all having a predetermined average particle diameter in the range of 0.5 to 2 μm, TaC powder, WC powder, Co powder, and Ni powder are prepared. These raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 32 hours, dried, and then compacted at a pressure of 98 MPa. The green compact is pressed into a body, and the green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour. After sintering, the cutting edge portion is subjected to a honing process of R: 0.07 mm. The tool bases a and c to f made of TiCN base cermet having a chip shape of ISO standard / CNMG120212 were formed.

ついで、これらの工具基体A〜Fおよび工具基体a,c〜fのそれぞれを、通常の化学蒸着装置に装入し、まず、表3(表3中のl−TiCNは特開平6−8010号公報に記載される縦長成長結晶組織をもつTiCN層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである)に示される条件にて、それぞれ表6に示される目標層厚のTi化合物層とα型Al23層を、同じく表6に示される組み合わせで、硬質被覆層の下部層および上部層として蒸着形成し、ついで、表4に示される条件で、表6に示される目標層厚の改質Cr23層を同じく表6に示される組み合わせで、硬質被覆層の表面層として蒸着形成することにより本発明被覆サーメット工具1〜12をそれぞれ製造した。 Next, each of the tool bases A to F and the tool bases a and c to f was charged into a normal chemical vapor deposition apparatus. First, Table 3 (l-TiCN in Table 3 is JP-A-6-8010). Table 6 shows the conditions for forming a TiCN layer having a vertically elongated crystal structure described in the publication, and other conditions for forming a normal granular crystal structure. The Ti compound layer and the α-type Al 2 O 3 layer having the target layer thicknesses shown are vapor-deposited as lower and upper layers of the hard coating layer in the same combination shown in Table 6, and then the conditions shown in Table 4 Thus, the coated cermet tools 1 to 12 of the present invention are formed by vapor-depositing the modified Cr 2 O 3 layer having the target layer thickness shown in Table 6 as the surface layer of the hard coating layer in the same combination shown in Table 6. Manufactured.

また、比較の目的で、改質Cr23層に代って、表5に示される条件で、表7に示される目標層厚の従来Cr23層を同じく表7に示される組み合わせで、硬質被覆層の表面層として蒸着形成する以外は同一の条件で比較被覆サーメット工具1〜12をそれぞれ製造した。 For comparison purposes, instead of the modified Cr 2 O 3 layer, the conventional Cr 2 O 3 layer having the target layer thickness shown in Table 7 under the conditions shown in Table 5 is also combined as shown in Table 7. Thus, comparative coated cermet tools 1 to 12 were produced under the same conditions except that vapor deposition was performed as the surface layer of the hard coating layer.

ついで、上記の本発明被覆サーメット工具および比較被覆サーメット工具の硬質被覆層の表面層を構成する改質Cr23層および従来Cr23層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。 Next, the modified Cr 2 O 3 layer and the conventional Cr 2 O 3 layer constituting the surface layer of the hard coating layer of the above-described coated cermet tool of the present invention and the comparative coated cermet tool, using a field emission scanning electron microscope, Each inclination angle number distribution graph was created.

すなわち、上記傾斜角度数分布グラフは、上記のCr23層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記表面研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、前記表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、30×50μmの領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜核のうち、45〜90度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。 That is, the tilt angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope with the surface of the Cr 2 O 3 layer as a polished surface, and incident at 70 degrees on the polished surface. Using an electron backscatter diffraction image apparatus, an electron beam with an acceleration voltage of 15 kV at an angle is irradiated to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface with an irradiation current of 1 nA, A 30 × 50 μm region is measured at an interval of 0.1 μm / step, and an inclination angle formed by a normal line of the (0001) plane that is a crystal plane of the crystal grain is measured with respect to a normal line of the polished surface. Based on the measurement results, by dividing the measurement inclination angle within the range of 45 to 90 degrees among the measurement inclination nuclei for each pitch of 0.25 degrees, and by counting the frequencies existing in each division Created.

この結果得られた各種のCr23層の傾斜角度数分布グラフにおいて、(0001)面が最高ピークを示す傾斜角区分、並びに45〜90度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合をそれぞれ表6,7にそれぞれ示した。 In the gradient angle distribution graphs of the various Cr 2 O 3 layers obtained as a result, the tilt existing in the tilt angle section where the (0001) plane shows the highest peak and the tilt angle section within the range of 45 to 90 degrees. The ratio of the number of angles to the number of inclination angles in the entire inclination angle distribution graph is shown in Tables 6 and 7, respectively.

上記の各種のCr23層の傾斜角度数分布グラフにおいて、表6,7にそれぞれ示される通り、本発明被覆サーメット工具の改質Cr23層は、いずれも(0001)面の測定傾斜角の分布が80.00〜89.25度の範囲内の傾斜角区分に最高ピークが現れ、かつ80〜90度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が45〜80%である傾斜角度数分布グラフを示すのに対して、比較被覆サーメット工具の従来Cr23層は、いずれも(0001)面の測定傾斜角の分布が45〜90度の範囲内で不偏的で、最高ピークが存在せず、80〜90度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も30%以下である傾斜角度数分布グラフを示すものであった。 In the gradient angle distribution graphs of the various Cr 2 O 3 layers described above, as shown in Tables 6 and 7, all of the modified Cr 2 O 3 layers of the coated cermet tool of the present invention were measured on the (0001) plane. The highest peak appears in the inclination angle section where the inclination angle distribution is in the range of 80.00 to 89.25 degrees, and the ratio of the number of inclination angles existing in the inclination angle section in the range of 80 to 90 degrees is 45 to While the inclination angle number distribution graph is 80% , the conventional Cr 2 O 3 layer of the comparative coated cermet tool has a distribution of measured inclination angles on the (0001) plane within a range of 45 to 90 degrees. An inclination angle distribution graph in which the ratio of the inclination angle existing in the inclination angle section in the range of 80 to 90 degrees is not more than 30% is unbiased.

なお、図3は、本発明被覆サーメット工具の硬質被覆層の表面層である改質Cr23層の傾斜角度数分布グラフ、図4は、比較被覆サーメット工具の硬質被覆層の表面層である従来Cr23層の傾斜角度数分布グラフをそれぞれ示すものである。 3 is a graph showing the distribution of the number of inclination angles of the modified Cr 2 O 3 layer, which is the surface layer of the hard coating layer of the coated cermet tool 6 of the present invention, and FIG. 4 is the surface of the hard coating layer of the comparative coated cermet tool 6. 2 shows an inclination angle number distribution graph of a conventional Cr 2 O 3 layer as a layer.

また、この結果得られた本発明被覆サーメット工具1〜12および比較被覆サーメット工具1〜12の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定(縦断面測定)したところ、いずれも目標層厚と実質的に同じ平均層厚(5点測定の平均値)を示した。 Further, when the thickness of the resulting present invention coated cermet tools 1 to 12 and Comparative coated cermet tool 1-12 layers constituting the hard layer of the, was measured using a scanning electron microscope (longitudinal sectional measurement) , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.

つぎに、上記の本発明被覆サーメット工具1〜12および比較被覆サーメット工具1〜12各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材:JIS・SS400の長さ方向等間隔4本縦溝入り丸棒、
切削速度:330m/min、
切り込み:3mm、
送り:0.35mm/rev、
切削時間:10分、
の条件(切削条件Aという)での軟鋼の乾式断続高速切削試験(通常の切削速度は200m/min)、
被削材:JIS・SUS316の丸棒、
切削速度:280m/min、
切り込み:1.5mm、
送り:0.25mm/rev、
切削時間:10分、
の条件(切削条件Bという)でのステンレス鋼の乾式連続高速切削試験(通常の切削速度は150m/min)、さらに、
被削材:JIS・SMn438の丸棒、
切削速度:360m/min、
切り込み:2mm、
送り:0.4mm/rev、
切削時間:10分、
の条件(切削条件Cという)での高マンガン鋼の乾式連続高速切削試験(通常の切削速度は200m/min)を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表8に示した。
Next, for the various coated cermet tools of the present invention coated cermet tools 1 to 12 and comparative coated cermet tools 1 to 12 , all of which are screwed to the tip of the tool steel tool with a fixing jig,
Work material: JIS / SS400 lengthwise equidistant 4 round bars with flutes,
Cutting speed: 330 m / min,
Incision: 3mm,
Feed: 0.35mm / rev,
Cutting time: 10 minutes,
Dry interrupted high-speed cutting test (normal cutting speed is 200 m / min) of mild steel under the following conditions (referred to as cutting condition A),
Work material: JIS / SUS316 round bar,
Cutting speed: 280 m / min,
Incision: 1.5mm,
Feed: 0.25mm / rev,
Cutting time: 10 minutes,
In a dry continuous high-speed cutting test (normal cutting speed is 150 m / min) of stainless steel under the following conditions (referred to as cutting condition B),
Work material: JIS / SMn438 round bar,
Cutting speed: 360 m / min,
Cutting depth: 2mm,
Feed: 0.4mm / rev,
Cutting time: 10 minutes,
The dry continuous high-speed cutting test (normal cutting speed is 200 m / min) of high manganese steel under the above conditions (referred to as cutting condition C), the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 8.

Figure 0004793629
Figure 0004793629

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Figure 0004793629
Figure 0004793629

Figure 0004793629
Figure 0004793629

Figure 0004793629
Figure 0004793629

Figure 0004793629
Figure 0004793629

Figure 0004793629
Figure 0004793629

Figure 0004793629
Figure 0004793629

表6〜8に示される結果から、本発明被覆サーメット工具1〜12は、いずれも硬質被覆層の表面層が、(0001)面の傾斜角が80.00〜89.25度の範囲内の傾斜角区分で最高ピークを示すと共に、80〜90度の傾斜角区分範囲内に存在する度数の合計割合が45〜80%を占める傾斜角度数分布グラフを示す改質Cr23層で構成され、前記改質Cr23層は、すぐれた潤滑性と高温強度を有することから、上記の粘性の高い難削材の高い高熱発生を伴う高速切削加工でも、切刃部に切粉が溶着しないすぐれた潤滑性が長期に亘って持続され、この結果硬質被覆層のチッピング発生が防止され、長期に亘ってすぐれた耐摩耗性を発揮するのに対して、硬質被覆層の表面層が、(0001)面の測定傾斜角の分布が45〜90度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す従来Cr23層で構成された比較被覆サーメット工具1〜12においては、いずれも上記の高速切削加工では、表面層の従来Cr23層が、潤滑性を有するももの、高温強度不足が原因で、早期に摩滅し、前記従来Cr23層の存在しない状態で切削加工が行なわれるようになるので、切削加工開始後、短時間で硬質被覆層にチッピングが発生し、これが原因で使用寿命に至ることが明らかである。 From the results shown in Tables 6 to 8, in the coated cermet tools 1 to 12 of the present invention, the surface layer of the hard coating layer is in the range of the inclination angle of the (0001) plane of 80.00 to 89.25 degrees. It is composed of a modified Cr 2 O 3 layer showing the highest peak in the inclination angle section and showing an inclination angle distribution graph in which the total ratio of the frequencies existing in the inclination angle section range of 80 to 90 degrees occupies 45 to 80%. Since the modified Cr 2 O 3 layer has excellent lubricity and high temperature strength, even in high-speed cutting with high heat generation of the above highly viscous difficult-to-cut material, chips are generated on the cutting edge. Excellent lubricity without welding is maintained over a long period of time, and as a result, chipping of the hard coating layer is prevented, and excellent wear resistance is exhibited over a long period of time. , (0001) plane measurement inclination angle distribution is 45-9 Every unbiased manner in within, in a conventional Cr 2 O 3 layer compared coated cermet tool 1-12 constituted by showing the inclination angle frequency distribution graph in which the highest peak does not exist, both in high-speed cutting above, Although the conventional Cr 2 O 3 layer of the surface layer has lubricity, due to insufficient high-temperature strength, it wears out early, and cutting is performed in the absence of the conventional Cr 2 O 3 layer. Therefore, it is clear that chipping occurs in the hard coating layer in a short time after the start of cutting, which leads to the service life.

上述のように、この発明の被覆サーメット工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に粘性の高い難削材の高い高熱発生を伴う高速切削加工でも、すぐれた耐チッピング性を示し、長期に亘ってすぐれた耐摩耗性を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。   As described above, the coated cermet tool of the present invention is not only continuous cutting and intermittent cutting under normal conditions such as various steels and cast irons, but particularly high-speed cutting with high heat generation of highly viscous difficult-to-cut materials. However, since it exhibits excellent chipping resistance and excellent wear resistance over a long period of time, it is fully satisfied with high performance of cutting equipment, labor saving and energy saving of cutting work, and further cost reduction It can cope with.

Cr23層を構成するコランダム型六方最密晶の単位格子の原子配列を示す模式図にして、(a)は斜視図、(b)は横断面1〜9の平面図である。FIG. 2 is a schematic diagram showing an atomic arrangement of a unit cell of a corundum type hexagonal close-packed crystal constituting a Cr 2 O 3 layer, where (a) is a perspective view and (b) is a plan view of cross sections 1 to 9. 硬質被覆層の表面層を構成するCr23層における結晶粒の(0001)面の傾斜角の測定範囲を示す概略説明図である。It is a schematic diagram illustrating a measurement range of the inclination angle of the crystal grains (0001) plane in Cr 2 O 3 layer constituting the surface layer of the hard coating layer. 本発明被覆サーメット工具の硬質被覆層の表面層を構成する改質Cr23層の(0001)面の傾斜角度数分布グラフである。It is an inclination angle number distribution graph of the (0001) plane of the modified Cr 2 O 3 layer constituting the surface layer of the hard coating layer of the coated cermet tool 6 of the present invention. 比較被覆サーメット工具の硬質被覆層の表面層を構成する従来Cr23層の(0001)面の傾斜角度数分布グラフである。It is an inclination angle number distribution graph of the (0001) plane of the conventional Cr 2 O 3 layer constituting the surface layer of the hard coating layer of the comparative coated cermet tool 6 .

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(a)下部層として、炭化チタン層、窒化チタン層、炭窒化チタン層、炭酸化チタン層、および炭窒酸化チタン層のうちの2層以上からなり、かつ3〜20μmの全体平均層厚を有するTi化合物層、
(b)上部層として、1〜15μmの平均層厚を有し、かつ化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム層、
以上(a)および(b)で構成された硬質被覆層を化学蒸着装置を用いて蒸着形成してなる、表面被覆サーメット製切削工具において、
上記硬質被覆層の表面層として、2〜5μmの平均層厚を有すると共に、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射し、電子後方散乱回折像装置を用い、所定領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、45〜90度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、80.00〜89.25度の範囲内の傾斜角区分に最高ピークが存在すると共に、80〜90度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45〜80%の割合を占める傾斜角度数分布グラフを示す改質酸化クロム層、
同じく化学蒸着装置を用いて蒸着形成してなる、難削材の高速切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) As a lower layer, it is composed of two or more of a titanium carbide layer, a titanium nitride layer, a titanium carbonitride layer, a titanium carbonate layer, and a titanium carbonitride oxide layer, and has an overall average layer thickness of 3 to 20 μm. Having a Ti compound layer,
(B) As an upper layer, an aluminum oxide layer having an average layer thickness of 1 to 15 μm and having an α-type crystal structure in a state of chemical vapor deposition,
In the surface-coated cermet cutting tool formed by vapor- depositing the hard coating layer composed of (a) and (b) above using a chemical vapor deposition apparatus ,
The surface layer of the hard coating layer has an average layer thickness of 2 to 5 μm, and using a field emission scanning electron microscope, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polished surface has electrons. A predetermined region is irradiated at an interval of 0.1 μm / step with respect to the normal line of the surface-polished surface, and the crystal plane of the (0001) plane is the crystal plane of the crystal grain. The inclination angle formed by the normal is measured, and among the measurement inclination angles, the measurement inclination angle within the range of 45 to 90 degrees is divided for each pitch of 0.25 degrees, and the frequency existing in each division is determined. In the inclination angle number distribution graph obtained by aggregation, the highest peak is present in the inclination angle section within the range of 80.00 to 89.25 degrees, and the total of the frequencies existing within the range of 80 to 90 degrees is the inclination. Of the whole frequency in the angle distribution graph 5-80% modified chromium oxide layer exhibiting a tilt angle frequency distribution graph in a proportion of,
A surface-coated cermet cutting tool that exhibits excellent chipping resistance in high-speed cutting of difficult-to-cut materials, formed by vapor deposition using the same chemical vapor deposition equipment .
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