JP2007196355A - Surface coated cermet cutting tool having hard coating layer exhibiting excellent chipping resistance in cutting difficult-to-cut material - Google Patents

Surface coated cermet cutting tool having hard coating layer exhibiting excellent chipping resistance in cutting difficult-to-cut material Download PDF

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JP2007196355A
JP2007196355A JP2006020918A JP2006020918A JP2007196355A JP 2007196355 A JP2007196355 A JP 2007196355A JP 2006020918 A JP2006020918 A JP 2006020918A JP 2006020918 A JP2006020918 A JP 2006020918A JP 2007196355 A JP2007196355 A JP 2007196355A
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JP4788893B2 (en
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Makoto Nishida
西田  真
Hiroshi Hara
央 原
Kazuhiro Kono
和弘 河野
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Mitsubishi Materials Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface coated cermet cutting tool having a hard coating layer exhibiting excellent chipping resistance in cutting difficult-to-cut material. <P>SOLUTION: This cutting tool is a surface coated cermet tool formed by depositing the hard coating layer including: a lower layer formed of a Ti compound layer with an average layer thickness ranging from 3 to 20 μm; and an upper layer formed of a reformed α-type Al<SB>2</SB>O<SB>3</SB>layer with an average layer thickness ranging from 6 to 20 μm on the surface of a tool base. In the tool, as a reinforcement layer, an α-type Al<SB>2</SB>O<SB>3</SB>layer is interposed between the lower layer and the upper layer of the tool. In the case of measuring an angle of inclination made by a normal of (0001) face, which is a crystal plane of a crystal grain, using a field emission type scanning electron microscope to create an inclination angle frequency distribution graph, the α-type Al<SB>2</SB>O<SB>3</SB>layer shows an inclination angle frequency distribution graph in which the highest peak exists in an inclination angle section within the range of 75 to 90 degrees, and the total of frequencies existing in the range of 75 to 90 degrees occupies 50% or more of the whole frequency, and has an average layer thickness ranging from 0.1 to 1.9 μm. Further, the surface roughness of the reformed α-type Al<SB>2</SB>O<SB>3</SB>layer is set to Ra: 0.2 μm or less. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は、自身が高い粘性を有し、かつ切削時の切削工具表面部の硬質被覆層に対する粘着性も高く、この結果切削抵抗の高いものとなる軟鋼やステンレス鋼、さらに高マンガン鋼などの難削材の切削加工で、硬質被覆層がすぐれた耐チッピング性を示し、長期に亘ってすぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具(以下、被覆サーメット工具という)に関するものである。   This invention has a high viscosity and has high adhesion to the hard coating layer on the surface of the cutting tool during cutting. As a result, soft steel, stainless steel, and high manganese steel that have high cutting resistance The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance in hard-cutting materials and exhibits excellent wear resistance over a long period of time. .

従来、一般に、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層が、Tiの炭化物(以下、TiCで示す)層、窒化物(以下、同じくTiNで示す)層、炭窒化物(以下、TiCNで示す)層、炭酸化物(以下、TiCOで示す)層、および炭窒酸化物(以下、TiCNOで示す)層のうちの1層または2層以上からなり、かつ3〜20μmの合計平均層厚を有するTi化合物層、
(b)上部層が、化学蒸着した状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、図2に概略説明図で示される通り、上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、図4に例示される通り、0〜15度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜15度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の50%以上の割合を占める傾斜角度数分布グラフを示し、かつ6〜20μmの平均層厚を有する酸化アルミニウム層(以下、改質α型Al23層という)、
以上(a)および(b)で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具は、上記改質α型Al23層がα型Al23自身のもつすぐれた高温硬さおよび耐熱性に加えて、すぐれた高温強度を具備することから、例えば各種の一般鋼や普通鋳鉄などの切削加工などに用いた場合に、すぐれた耐チッピング性を発揮し、長期に亘ってすぐれた切削性能を発揮することが知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). A Ti compound layer having a total average layer thickness of 3 to 20 μm, including one or two or more of a layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer,
(B) The upper layer has an α-type crystal structure in the state of chemical vapor deposition, and using a field emission scanning electron microscope, as shown schematically in FIG. 2, is a polished surface parallel to the tool base surface. Each of the crystal grains having a hexagonal crystal lattice existing within the measurement range is irradiated with an electron beam, and the normal line of the (0001) plane that is the crystal plane of the crystal grain is relative to the normal line of the polished surface. Measure the inclination angle to be made, divide the measurement inclination angle within the range of 0-45 degrees out of the measurement inclination angle for each pitch of 0.25 degree, and totalize the frequency existing in each division In the inclination angle number distribution graph, as shown in FIG. 4, the highest peak exists in the inclination angle section in the range of 0 to 15 degrees, and the sum of the frequencies existing in the range of 0 to 15 degrees is as follows. , Accounting for 50% or more of the total frequency in the slope angle distribution graph Shows an inclination angle frequency distribution graph, and an aluminum oxide layer having an average layer thickness of 6 to 20 .mu.m (hereinafter, referred to as modified α type the Al 2 O 3 layer),
A coated cermet tool formed by vapor-depositing a hard coating layer composed of the above (a) and (b) is known, and this coated cermet tool has the modified α-type Al 2 O 3 layer formed of α-type Al. 2 O 3 itself has excellent high-temperature hardness and heat resistance, as well as excellent high-temperature strength, so it has excellent resistance when used for cutting of various general steels and ordinary cast iron, for example. It is known that it exhibits chipping properties and exhibits excellent cutting performance over a long period of time.

また、一般に、上記の被覆サーメット工具の硬質被覆層を構成する改質α型Al23層が、通常の化学蒸着装置を用い、
反応ガス組成:容量%で、AlCl3:1〜5%、CO2:0.1〜2%、HCl:0.3〜3%、H2S:0.5〜1%、Ar:20〜35%、H2:残り、
反応雰囲気温度:1050〜1100℃、
反応雰囲気圧力:6〜10kPa、
の条件で蒸着形成されることも知られている。
さらに、同じく硬質被覆層を構成するTi化合物層や改質α型Al23層が粒状結晶組織を有し、さらに、前記Ti化合物層を構成するTiCN層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、700〜950℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
特開2005−205586号公報 特開平6−8010号公報
In general, the modified α-type Al 2 O 3 layer constituting the hard coating layer of the above coated cermet tool uses a normal chemical vapor deposition apparatus,
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 0.1~2%, HCl: 0.3~3%, H 2 S: 0.5~1%, Ar: 20~ 35%, H 2 : remaining,
Reaction atmosphere temperature: 1050 to 1100 ° C.
Reaction atmosphere pressure: 6 to 10 kPa,
It is also known that vapor deposition is performed under the following conditions.
Furthermore, the Ti compound layer and the modified α-type Al 2 O 3 layer that also constitute the hard coating layer have a granular crystal structure, and the TiCN layer that constitutes the Ti compound layer is intended to improve the strength of the layer itself. In a normal chemical vapor deposition apparatus, a mixed gas containing organic carbonitride is used as a reaction gas, and it is formed by chemical vapor deposition at a medium temperature range of 700 to 950 ° C. so that it has a vertically grown crystal structure. It is also known to do.
JP-A-2005-205586 Japanese Patent Laid-Open No. 6-8010

近年の切削装置のFA化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工には被削材の材種に関して、一層の汎用性をもった切削工具、すなわち1種の切削工具でできるだけ多くの種類の材種の被削材の切削が可能な切削工具が求められる傾向にあるが、上記の従来被覆サーメット工具においては、これを低合金鋼や炭素鋼などの一般鋼、さらにねずみ鋳鉄などの普通鋳鉄の切削加工に用いた場合には問題はないが、特にこれを軟鋼やステンレス鋼、さらに高マンガン鋼などの難削材の切削加工に用いた場合には、前記難削材自身が高い粘性を有し、かつ切削時の切削工具表面部の硬質被覆層に対する粘着性も高く、この傾向は切削時に発生する高熱によって増大することと相俟って、切削抵抗の高いものとなり、一方硬質被覆層を構成する改質α型Al23層の高温強度はこれに耐えるに十分なものではなく、この結果切刃部にチッピング(微少欠け)が発生し易くなり、これが原因で比較的短時間で使用寿命に至るのが現状である。 In recent years, the use of FA for cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting work. However, in the conventional coated cermet tool described above, there is a tendency to require a cutting tool that can cut as many kinds of work materials as possible with one kind of cutting tool. There is no problem when it is used for cutting general steel such as low alloy steel and carbon steel, and ordinary cast iron such as gray cast iron, but this is especially suitable for difficult-to-cut materials such as mild steel, stainless steel, and high manganese steel. When used for cutting, the difficult-to-cut material itself has a high viscosity and also has high adhesion to the hard coating layer on the surface of the cutting tool during cutting, and this tendency increases due to the high heat generated during cutting. This Coupled with I, it becomes having high cutting resistance, whereas the high temperature strength of the modified α type the Al 2 O 3 layer constituting the hard coating layer is not sufficient to withstand this, chipping result the cutting edge portion (Slight chipping) is likely to occur, and due to this, the service life is reached in a relatively short time.

そこで、本発明者等は、上述のような観点から、上記の改質α型Al23層が硬質被覆層の上部層を構成する被覆サーメット工具に着目し、特に前記改質α型Al23層の耐チッピング性向上を図るべく研究を行った結果、
(a)上記の従来被覆サーメット工具の硬質被覆層を構成するTi化合物層(下部層)と改質α型Al23層(上部層)の間に、通常の化学蒸着装置を用い、
反応ガス組成:容量%で、AlCl3:1〜5%、CO2:3〜7%、HCl:0.3〜3%、H2S:0.02〜0.4%、H2:残り、
反応雰囲気温度:750〜900℃、
反応雰囲気圧力:20〜30kPa、
の条件で酸化アルミニウム(以下、Al23で示す)層を0.1〜1.9μmの平均層厚で形成すると、この結果形成されたAl23層は、同じくα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、図1(a),(b)に示される通り、同じく上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、45〜90度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、図3に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、試験結果によれば、化学蒸着装置における反応雰囲気圧力を、上記の通り20〜30kPaの範囲内で変化させると、上記シャープな最高ピークの現れる位置が傾斜角区分の75〜90度の範囲内で変化すると共に、前記75〜90度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の50%以上の割合を占めるようになり、この結果の傾斜角度数分布グラフにおいて75〜90度の範囲内に傾斜角区分の最高ピークが現れるAl23層(以下、補強α型Al23層という)は、上記の改質α型Al23層(上部層)とTi化合物層(下部層)の間にあって、前記改質α型Al23層を十分に補強し、これの高温強度の向上に寄与することから、切削抵抗の高い上記の難削材の切削加工においても前記改質α型Al23層にチッピングが発生するのが抑制され、この結果被覆サーメット工具がすぐれた耐摩耗性を長期に亘って発揮するようになること。
In view of the above, the present inventors focused on the coated cermet tool in which the modified α-type Al 2 O 3 layer constitutes the upper layer of the hard coating layer, and in particular, the modified α-type Al As a result of research to improve chipping resistance of 2 O 3 layer,
(A) Between the Ti compound layer (lower layer) and the modified α-type Al 2 O 3 layer (upper layer) constituting the hard coating layer of the conventional coated cermet tool, using a normal chemical vapor deposition apparatus,
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2: remainder ,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 20-30 kPa,
When an aluminum oxide (hereinafter referred to as Al 2 O 3 ) layer is formed with an average layer thickness of 0.1 to 1.9 μm under the conditions of the above, the resulting Al 2 O 3 layer has the same α-type crystal structure. Using a field emission scanning electron microscope, as shown in FIGS. 1 (a) and 1 (b), it has a hexagonal crystal lattice that is also present in the measurement range of the polished surface parallel to the tool substrate surface. Each crystal grain is irradiated with an electron beam, an inclination angle formed by a normal line of the (0001) plane that is a crystal plane of the crystal grain is measured with respect to the normal line of the polished surface, When the measured inclination angle in the range of 45 to 90 degrees is divided into pitches of 0.25 degrees and the frequency existing in each of the divisions is represented by an inclination angle number distribution graph, FIG. As shown in Fig. 4, a sharp peak appears at a specific position in the tilt angle section, and According to the results, when the reaction atmosphere pressure in the chemical vapor deposition apparatus is changed within the range of 20 to 30 kPa as described above, the position where the sharpest peak appears changes within the range of 75 to 90 degrees of the inclination angle section. In addition, the sum of the frequencies existing within the range of 75 to 90 degrees occupies a ratio of 50% or more of the entire frequencies in the inclination angle distribution graph, and 75 to 75 in the inclination angle distribution graph as a result. An Al 2 O 3 layer (hereinafter referred to as a reinforced α-type Al 2 O 3 layer) in which the highest peak of the tilt angle section appears in the range of 90 degrees is referred to as the above-mentioned modified α-type Al 2 O 3 layer (upper layer). Since the modified α-type Al 2 O 3 layer is sufficiently reinforced between the Ti compound layers (lower layers) and contributes to the improvement of the high-temperature strength thereof, cutting of the above difficult-to-cut materials having high cutting resistance. Also in the processing, the modified α-type Al 2 Occurrence of chipping in the O 3 layer is suppressed, and as a result, the coated cermet tool exhibits excellent wear resistance over a long period of time.

(b)一方、上記の被覆サーメット工具の硬質被覆層の上部層を構成する改質α型Al23層は、相対的に蒸着表面が粗いのが現状である。そこで、前記改質α型Al23層の全面に、通常の化学蒸着装置を用い、通常の条件、例えば表3に示される条件で、いずれも0.1〜2.5μmの平均層厚を有する窒化チタン(以下、TiNで示す)層と炭窒化チタン(以下、TiCNで示す)層の2層以上の交互積層を、0.4〜5μmの全体平均層厚で蒸着形成した状態で、
ウエットブラストにて、噴射研磨材として、水との合量に占める割合で15〜60質量%の酸化アルミニウム微粒(以下、Al23微粒で示す)を配合した研磨液を噴射すると、上記TiN層とTiCN層の2層以上の交互積層(以下、個々にTiN研磨材層およびTiCN研磨材層と言い、これら全体をTiN/TiCN研磨材層で示す)は、前記Al23微粒によって粉砕微粒化し、TiN微粒およびTiCN微粒となって前記Al23微粒の共存下で研磨材として作用し、硬質被覆層の上部層を構成する改質α型Al23層の表面を研磨することになり、この結果研磨後の前記改質α型Al23層の表面は、準拠規格JIS・B0601−1994に基いた測定(以下の表面粗さは全てかかる準拠規格に基いた測定値を示す)で、Ra:0.2μm以下の表面粗さにまで平滑化されるようになり、この上部層である改質α型Al23層の表面がRa:0.2μm以下の表面粗さに平滑化した上記の被覆サーメット工具を用いて、難削材の切削加工を行った場合、前記表面粗さの平滑化によって前記改質α型Al23層の摩耗進行が抑制されるようになり、この結果工具の使用寿命の一段の延命化が可能となること。
なお、この場合、上記改質α型Al23層の表面に、上記のTiN/TiCN研磨材層を形成することなく、これに同じくウエットブラストにて、噴射研磨材として、水との合量に占める割合で15〜60質量%のAl23微粒を配合した研磨液を直接噴射して、研磨しても、前記改質α型Al23層の表面は、Ra:0.3〜0.6μmの表面粗さにしか研磨されず、この結果の表面粗さがRa:0.3〜0.6μmの改質α型Al23層で上部層を構成した被覆サーメット工具を用いても、難削材の切削加工では表面平滑化による十分な摩耗抑制効果は発揮されず、満足な使用寿命の延命化は図れないこと。
(B) On the other hand, the modified α-type Al 2 O 3 layer constituting the upper layer of the hard coating layer of the above-described coated cermet tool has a relatively rough deposition surface. Therefore, an average layer thickness of 0.1 to 2.5 μm is used on the entire surface of the modified α-type Al 2 O 3 layer using a normal chemical vapor deposition apparatus under normal conditions, for example, the conditions shown in Table 3. Two or more alternating layers of titanium nitride (hereinafter referred to as TiN) layers and titanium carbonitride (hereinafter referred to as TiCN) layers having a thickness of 0.4 to 5 μm are deposited and formed,
When a polishing liquid containing 15 to 60% by mass of aluminum oxide fine particles (hereinafter referred to as Al 2 O 3 fine particles) is injected as a polishing material by wet blasting as a proportion of the total amount with water, the above TiN Alternating layers of two or more layers of layers and TiCN layers (hereinafter referred to as TiN abrasive layer and TiCN abrasive layer, respectively, these are shown as TiN / TiCN abrasive layer) are pulverized by the Al 2 O 3 fine particles. Atomized into TiN fine particles and TiCN fine particles, acts as an abrasive in the presence of the Al 2 O 3 fine particles, and polishes the surface of the modified α-type Al 2 O 3 layer constituting the upper layer of the hard coating layer As a result, the surface of the modified α-type Al 2 O 3 layer after polishing was measured based on the compliant standard JIS B0601-1994 (the following surface roughness is all measured values based on the compliant standard) Indicate) Ra: now be smoothed to a surface roughness of less than 0.2 [mu] m, the surface of the a top layer modification α type the Al 2 O 3 layer is Ra: smoothing surface roughness of not more than 0.2 [mu] m When the above-described coated cermet tool is used to cut a difficult-to-cut material, the progress of wear of the modified α-type Al 2 O 3 layer is suppressed by smoothing the surface roughness, As a result, the life of the tool can be further extended.
In this case, the TiN / TiCN abrasive layer is not formed on the surface of the modified α-type Al 2 O 3 layer. Even if the polishing liquid containing 15 to 60% by mass of Al 2 O 3 fine particles is directly sprayed and polished, the surface of the modified α-type Al 2 O 3 layer has Ra: 0. A coated cermet tool that is polished only to a surface roughness of 3 to 0.6 μm, and that the resulting surface roughness is an upper layer of a modified α-type Al 2 O 3 layer with Ra: 0.3 to 0.6 μm However, when cutting difficult-to-cut materials, sufficient wear-inhibiting effect due to surface smoothing cannot be demonstrated, and satisfactory life span cannot be extended.

(c)以上の通り、上記補強α型Al23層が、上記の改質α型Al23層(上部層)とTi化合物層(下部層)の間にあって、前記改質α型Al23層を十分に補強し、これの高温強度向上に寄与し、さらに前記改質α型Al23層の少なくとも切刃稜線部を含むすくい面部分および逃げ面部分を研磨して、これら研磨面の表面粗さをRa:0.2μm以下としてなる被覆サーメット工具は、特に切刃部に高い切削抵抗が加わる難削材の切削加工でも、前記硬質被覆層の高温強度が向上し、かつ前記上部層の改質α型Al23層がすぐれた表面平滑性を具備することから、すぐれた耐チッピング性を発揮し、長期に亘ってすぐれた耐摩耗性を示すようになること。
以上(a)〜(c)に示される研究結果を得たのである。
(C) As described above, the reinforced α-type Al 2 O 3 layer is between the modified α-type Al 2 O 3 layer (upper layer) and the Ti compound layer (lower layer), and the modified α-type The Al 2 O 3 layer is sufficiently reinforced and contributes to the improvement of the high temperature strength thereof. Further, the rake face portion and the flank portion including at least the cutting edge ridge line portion of the modified α-type Al 2 O 3 layer are polished. These coated cermet tools having a polished surface with a surface roughness of Ra: 0.2 μm or less improve the high-temperature strength of the hard coating layer even when cutting difficult-to-cut materials in which high cutting resistance is applied to the cutting edge. And since the modified α-type Al 2 O 3 layer of the upper layer has excellent surface smoothness, it exhibits excellent chipping resistance and exhibits excellent wear resistance over a long period of time. thing.
The research results shown in (a) to (c) above were obtained.

この発明は、上記の研究結果に基づいてなされたものであって、工具基体の表面に、
(1)下部層が、TiC層、TiN層、TiCN層、TiCO層、およびTiCNO層のうちの1層または2層以上からなり、かつ3〜20μmの合計平均層厚を有するTi化合物層、
(2)上部層が、電界放出型走査電子顕微鏡を用い、上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、0〜15度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜15度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の50%以上の割合を占める傾斜角度数分布グラフを示し、かつ6〜20μmの平均層厚を有する改質α型Al23層、
以上(1)および(2)で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具において、
(a)上記の下部層であるTi化合物層と上部層である改質α型Al23層の間に、補強層として、電界放出型走査電子顕微鏡を用い、上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、45〜90度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、
75〜90度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記75〜90度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の50%以上の割合を占める傾斜角度数分布グラフを示し、かつ0.1〜1.9μmの平均層厚を有する補強α型Al23層、
を介在させ、
(b)さらに、上記硬質被覆層の上部層である改質α型Al23層の全面に、
いずれも0.1〜2.5μmの平均層厚を有するTiN研磨材層とTiCN研磨材層の2層以上の交互積層で構成され、かつ、0.4〜5μmの全体平均層厚を有するTiN/TiCN研磨材層を蒸着形成した状態で、
ウエットブラストにて、噴射研磨材として、水との合量に占める割合で15〜60質量%のAl23微粒を配合した研磨液を噴射し、
上記のTiN/TiCN研磨材層のウエットブラストによる粉砕化TiN微粒および粉砕化TiCN微粒と、噴射研磨材としてのAl23微粒の共存下で、上記硬質被覆層の上部層を構成する改質α型Al23層の少なくとも切刃稜線部を含むすくい面部分および逃げ面部分を研磨して、これら研磨面の表面粗さをRa:0.2μm以下としてなる、
難削材の切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
This invention was made based on the above research results, and on the surface of the tool base,
(1) A Ti compound layer in which the lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, and has a total average layer thickness of 3 to 20 μm,
(2) The upper layer irradiates an electron beam to each crystal grain having a hexagonal crystal lattice existing in a measurement range of a polished surface parallel to the tool base surface using a field emission scanning electron microscope, The inclination angle formed by the normal line of the (0001) plane that is the crystal plane of the crystal grain is measured with respect to the normal line of the polished surface, and the measurement inclination in the range of 0 to 45 degrees out of the measurement inclination angle In the inclination angle distribution graph obtained by dividing the angle for each pitch of 0.25 degrees and counting the frequencies existing in each section, the highest peak exists in the inclination angle section within the range of 0 to 15 degrees. In addition, an inclination angle number distribution graph in which the sum of the frequencies existing in the range of 0 to 15 degrees occupies a ratio of 50% or more of the entire degrees in the inclination angle number distribution graph is shown, and an average layer thickness of 6 to 20 μm A modified α-type Al 2 O 3 layer having
In the coated cermet tool formed by vapor-depositing the hard coating layer composed of (1) and (2) above,
(A) A field emission scanning electron microscope is used as a reinforcing layer between the Ti compound layer as the lower layer and the modified α-type Al 2 O 3 layer as the upper layer, and is parallel to the tool base surface. The crystal grains having a hexagonal crystal lattice existing within the measurement range of the polished surface are irradiated with an electron beam, and the method of the (0001) plane that is the crystal plane of the crystal grains with respect to the normal line of the polished surface Measure the tilt angle formed by the line, and divide the measured tilt angle within the range of 45-90 degrees out of the measured tilt angle by pitch of 0.25 degrees, and count the frequency existing in each section In the inclination angle number distribution graph,
The highest peak exists in the inclination angle section in the range of 75 to 90 degrees, and the total of the frequencies existing in the range of 75 to 90 degrees represents a ratio of 50% or more of the entire degrees in the inclination angle frequency distribution graph. Reinforced α-type Al 2 O 3 layer showing an inclination angle number distribution graph and having an average layer thickness of 0.1 to 1.9 μm,
Intervene,
(B) Furthermore, on the entire surface of the modified α-type Al 2 O 3 layer that is the upper layer of the hard coating layer,
Each is composed of two or more alternating layers of TiN abrasive layer having an average layer thickness of 0.1 to 2.5 μm and TiCN abrasive layer, and TiN having an overall average layer thickness of 0.4 to 5 μm / With the TiCN abrasive layer deposited and formed,
In wet blasting, as a spraying abrasive, a polishing liquid containing 15 to 60% by mass of Al 2 O 3 fine particles in a proportion of the total amount with water is sprayed,
Modification of the upper layer of the hard coating layer in the presence of pulverized TiN fine particles and pulverized TiCN fine particles by wet blasting of the TiN / TiCN abrasive layer and Al 2 O 3 fine particles as a spray abrasive The rake face portion and the flank face portion including at least the cutting edge ridge line portion of the α-type Al 2 O 3 layer are polished, and the surface roughness of these polished surfaces is Ra: 0.2 μm or less.
It is characterized by a coated cermet tool that exhibits excellent chipping resistance in a hard coating layer when cutting difficult-to-cut materials.

以下に、この発明の被覆サーメット工具の硬質被覆層、研磨材層、さらにウエットブラストで用いられる研磨液のAl23微粒に関して、上記の通りに数値限定した理由を説明する。
(A)硬質被覆層
(a)Ti化合物層(下部層)
Ti化合物層は、基本的には改質α型Al23層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度を具備するようにするほか、工具基体と補強α型Al23層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用を有するが、その合計平均層厚が3μm未満では、前記作用を十分に発揮させることができず、一方その合計平均層厚が20μmを越えると、熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その合計平均層厚を3〜20μmと定めた。
The reason why the hard coating layer of the coated cermet tool of the present invention, the abrasive layer, and the Al 2 O 3 fine particles of the polishing liquid used in wet blasting are numerically limited as described above will be described below.
(A) Hard coating layer (a) Ti compound layer (lower layer)
The Ti compound layer basically exists as a lower layer of the modified α-type Al 2 O 3 layer, and allows the hard coating layer to have high-temperature strength by its excellent high-temperature strength. And the reinforcing α-type Al 2 O 3 layer firmly adhere to each other, and thus have an effect of improving the adhesion of the hard coating layer to the tool substrate. However, when the total average layer thickness is less than 3 μm, On the other hand, if the total average layer thickness exceeds 20 μm, thermoplastic deformation tends to occur and this causes uneven wear. Therefore, the total average layer thickness is set to 3 to 20 μm. It was.

(b)改質α型Al23層(上部層)
改質α型Al23層の傾斜角度数分布グラフにおける測定傾斜角の最高ピーク位置は、化学蒸着装置における反応雰囲気圧力を変化させることによって変化するが、試験結果によれば、上記蒸着条件のうちの反応雰囲気圧力を6〜10kPaとすると、最高ピークが、0〜15度の範囲内の傾斜角区分に現れると共に、前記0〜15度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の50%以上の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記反応雰囲気圧力が前記範囲から低い方に外れても、また高い方に外れても、前記0〜15度の範囲内に測定傾斜角の最高ピークが現れなくなり、このような場合には所望のすぐれた高温強度を具備することができないものである。
また、改質α型Al23層は、α型Al23自身のもつすぐれた高温硬さおよび耐熱性に加えて、高温強度も具備するようになるが、その平均層厚が6μm未満では、切削工具に十分な使用寿命を確保することができず、また、その平均層厚が20μmを越えると、難削材の切削加工ではチッピングが発生し易くなることから、その平均層厚を6〜20μmと定めた。
(B) modified α type the Al 2 O 3 layer (upper layer)
The maximum peak position of the measured inclination angle in the inclination angle number distribution graph of the modified α-type Al 2 O 3 layer is changed by changing the reaction atmosphere pressure in the chemical vapor deposition apparatus. When the reaction atmosphere pressure is 6 to 10 kPa, the highest peak appears in the inclination angle section within the range of 0 to 15 degrees, and the total of the frequencies existing within the range of 0 to 15 degrees is the inclination angle. An inclination angle number distribution graph occupying a ratio of 50% or more of the entire frequency in the number distribution graph is shown. Therefore, even if the reaction atmosphere pressure is out of the range, it is out of the range. However, the highest peak of the measured tilt angle does not appear within the range of 0 to 15 degrees, and in such a case, the desired excellent high-temperature strength cannot be provided.
The modified α-type Al 2 O 3 layer also has high-temperature strength in addition to the excellent high-temperature hardness and heat resistance of the α-type Al 2 O 3 itself, but the average layer thickness is 6 μm. If the average layer thickness is less than 20 μm, chipping is likely to occur in cutting of difficult-to-cut materials. Was determined to be 6 to 20 μm.

(c)補強α型Al23層(補強層)
上記の通り、補強α型Al23層の傾斜角度数分布グラフにおける測定傾斜角の最高ピーク位置は、化学蒸着装置における反応雰囲気圧力を変化させることによって変化するが、試験結果によれば、上記蒸着条件のうちの反応雰囲気圧力を、20〜30kPaとすると、最高ピークが75〜90度の範囲内の傾斜角区分に現れると共に、前記75〜90度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の50%以上の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記反応雰囲気圧力が前記範囲から低い方に外れても、また高い方に外れても、75〜90度の範囲内に測定傾斜角の最高ピークが現れなくなり、このような場合には所望のすぐれた補強作用を発揮することができないものである。
また、その平均層厚が0.1μm未満では、上記改質α型Al23層に対する補強作用が不十分であり、一方、その平均層厚が1.9μmを越えると、これが難削材の切削加工ではチッピング発生の原因となることから、その平均層厚を0.1〜1.9μmと定めた。
(C) Reinforced α-type Al 2 O 3 layer (reinforcing layer)
As described above, the highest peak position of the measured inclination angle in the inclination angle number distribution graph of the reinforced α-type Al 2 O 3 layer changes by changing the reaction atmosphere pressure in the chemical vapor deposition apparatus, but according to the test results, When the reaction atmosphere pressure in the above deposition conditions is 20 to 30 kPa, the maximum peak appears in the tilt angle section in the range of 75 to 90 degrees, and the total of the frequencies existing in the range of 75 to 90 degrees is The inclination angle number distribution graph occupies a ratio of 50% or more of the entire frequency in the inclination angle number distribution graph. Therefore, even if the reaction atmosphere pressure is out of the range, it is high. Even if it deviates, the maximum peak of the measured inclination angle does not appear within the range of 75 to 90 degrees, and in this case, the desired excellent reinforcing action cannot be exhibited. It is a thing.
If the average layer thickness is less than 0.1 μm, the reinforcing action on the modified α-type Al 2 O 3 layer is insufficient. On the other hand, if the average layer thickness exceeds 1.9 μm, this is difficult to cut. In this cutting process, chipping occurs, so the average layer thickness is set to 0.1 to 1.9 μm.

(B)TiN/TiCN研磨材層
上記の通り、TiN/TiCN研磨材層は、ウエットブラスト時に、研磨液に噴射研磨材として配合したAl23微粒によって粉砕微粒化し、TiN微粒およびTiCN微粒となって前記Al23微粒との共存下で研磨材として作用し、硬質被覆層の上部層を構成する改質α型Al23層の表面を研磨するが、この場合、個々の研磨材層の平均層厚が0.1μm未満であったり、TiN/TiCN研磨材層の全体平均層厚が0.4μm未満であったりすると、ウエットブラスト時における粉砕化TiN微粒および粉砕化TiCN微粒の割合が少な過ぎて、研磨機能を十分に発揮することができず、一方、個々の研磨材層の平均層厚が2.5μmを越えたり、TiN/TiCN研磨材層の全体平均層厚が5μmを越えたりすると、研磨液に噴射研磨材として配合したAl23微粒とのバランスがくずれて、相対的に多くなり過ぎ、この場合も研磨機能が急激に低下するようになり、いずれの場合もα型Al23層の表面をRa:0.2μm以下の表面粗さに研磨することができなくなるという理由で、個々の研磨材層の平均層厚を0.1〜2.5μm、その全体平均層厚を0.4〜5μmと定めた。
(B) TiN / TiCN abrasive material layer As described above, the TiN / TiCN abrasive material layer is pulverized and atomized by Al 2 O 3 fine particles blended in the polishing liquid as an injection abrasive material during wet blasting, and TiN fine particles and TiCN fine particles It acts as an abrasive in the coexistence with the Al 2 O 3 fine particles, and polishes the surface of the modified α-type Al 2 O 3 layer constituting the upper layer of the hard coating layer. If the average layer thickness of the material layer is less than 0.1 μm, or if the overall average layer thickness of the TiN / TiCN abrasive layer is less than 0.4 μm, the pulverized TiN fine particles and the pulverized TiCN fine particles at the time of wet blasting When the ratio is too small, the polishing function cannot be sufficiently exhibited. On the other hand, the average layer thickness of each abrasive layer exceeds 2.5 μm, or the total average layer thickness of the TiN / TiCN abrasive layer is 5 μm. When or beyond, in unbalanced and Al 2 O 3 fine formulated as injection abrasive in the polishing liquid, too many relatively become Again polishing function is rapidly reduced, in any case In addition, the average layer thickness of each abrasive layer is 0.1 to 2.5 μm because the surface of the α-type Al 2 O 3 layer cannot be polished to a surface roughness of Ra: 0.2 μm or less. The total average layer thickness was determined to be 0.4 to 5 μm.

(C)研磨液のAl23微粒
研磨液のAl23微粒には、ウエットブラスト時にTiN/TiCN研磨材層の粉砕化TiN/TiCN微粒と共存した状態で、改質α型Al23層の表面を研磨する作用があるが、その割合が水との合量に占める割合で15質量%未満でも、また60質量%を越えても研磨機能が急激に低下するようになることから、その割合を15〜60質量%と定めた。
(C) The Al 2 O 3 fine of Al 2 O 3 fine polishing liquid of the polishing liquid, in a state where at the time of wet blast coexists with pulverized TiN / TiCN fine of TiN / TiCN abrasive layer, reforming α-type Al 2 Although it has an action of polishing the surface of the O 3 layer, the polishing function will be drastically lowered even if the ratio is less than 15% by mass or more than 60% by mass with respect to the total amount with water. Therefore, the ratio was determined to be 15 to 60% by mass.

この発明の被覆サーメット工具は、前記改質α型Al23層とTi化合物層との間に介在させた補強α型Al23層が、硬質被覆層の上部層を構成する改質α型Al23層を十分に補強すると共に、これの高温強度向上に寄与し、さらに前記改質α型Al23層の表面をRa:0.2μm以下の表面粗さに研磨することにより、特に切粉の粘性が高く、かつ工具表面に溶着し易いステンレス鋼や高マンガン鋼、さらに軟鋼などの難削材(被削材)の切削加工を行なっても、前記硬質被覆層のもつすぐれた高温強度および平滑な表面粗さによって前記硬質被覆層のチッピング発生が著しく抑制され、かつ摩耗抑制効果も発揮され、この結果長期に亘ってすぐれた耐摩耗性を示すようになるものである。 Coated cermet tool of the present invention, the reinforcing α-type Al 2 O 3 layer is interposed between the reforming α type the Al 2 O 3 layer and the Ti compound layer, reforming constituting the upper layer of the hard coating layer The α-type Al 2 O 3 layer is sufficiently reinforced and contributes to improving the high-temperature strength of the α-type Al 2 O 3 layer. Further, the surface of the modified α-type Al 2 O 3 layer is polished to a surface roughness of Ra: 0.2 μm or less. Therefore, even if cutting of difficult-to-cut materials (work materials) such as stainless steel, high manganese steel, and mild steel, which has a high chip viscosity and is easy to weld to the tool surface, The excellent high-temperature strength and smooth surface roughness significantly suppress the occurrence of chipping in the hard coating layer, and also exerts the effect of suppressing wear, resulting in excellent wear resistance over a long period of time. is there.

つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。   Next, the coated cermet tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr32粉末、TiN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.07mmのホーニング加工を施すことにより、中心部に工具取り付け用ボルト貫通孔を有する形式で、ISO規格にCNMG120412として規定されるスローアウエイチップ形状をもったWC基超硬合金製の工具基体A〜Fをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, and Co powder each having an average particle diameter of 1 to 3 μm are prepared. The raw material powder is blended in the blending composition shown in Table 1, added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and press-molded into a green compact of a predetermined shape at a pressure of 98 MPa. The green compact is vacuum-sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour. After sintering, the cutting edge is subjected to a honing process of R: 0.07 mm. Thus, a tool base made of a WC-based cemented carbide having a throwaway tip shape defined as CNMG12041 in the ISO standard in the form of having a tool mounting bolt through hole in the center. Each of the bodies A to F was produced.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比で、TiC/TiN=50/50)粉末、Mo2 C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.07mmのホーニング加工を施すことにより、工具本体にクランプ駒による挟み締めにより取り付けられる穴なし形式で、ISO規格にCNMN120412として規定されるスローアウエイチップ形状をもったTiCN基サーメット製の工具基体a〜fを形成した。 Further, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, blend these raw material powders into the composition shown in Table 2, wet mix with a ball mill for 24 hours, dry, and press-mold into a green compact at 98 MPa pressure The green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, the cutting edge portion is subjected to a honing process of R: 0.07 mm. Made of TiCN-based cermet with a throwaway tip shape that is defined as CNMN12041 in the ISO standard, with no holes attached to the tool body by clamping with clamp pieces To form a tool substrate a~f.

ついで、これらの工具基体A〜Fおよび工具基体a〜fのそれぞれを、通常の化学蒸着装置に装入し、
(a)まず、表3(表3中のl−TiCNは特開平6−8010号公報に記載される縦長成長結晶組織をもつTiCN層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである)に示される条件にて、表5に示される目標層厚のTi化合物層を硬質被覆層の下部層として蒸着形成し、
(b)ついで、反応ガス組成:容量%で、AlCl3:2.2%、CO2:5%、HCl:2%、H2S:0.15%、H2:残り、
反応雰囲気温度:850℃、
反応雰囲気圧力:20〜30kPaの範囲内の所定の圧力、
の条件で表5に示される目標層厚で、補強α型Al23層を蒸着形成し、
(c)さらに、反応ガス組成:容量%で、AlCl3:2.2%、CO2:1.5%、HCl:2%、H2S:0.75%、Ar:26.5%、H2:残り、
反応雰囲気温度:1070℃、
反応雰囲気圧力:6〜10kPaの範囲内の所定の圧力、
の条件で同じく表5に示される目標層厚で、同じく上部層として改質α型Al23層を蒸着形成し、
(d)さらに、同じく表3に示される条件でTiN/TiCN研磨材層を、表6に示される目標層厚で蒸着形成し、
引き続いて、表4に示されるブラスト条件で、かつ表6に示される組み合わせでウエットブラストを施して、上記工具基体A〜Fについては、中心部の工具取り付け用ボルト貫通孔周辺部の上記TiN/TiCN研磨材層は除去せずに残した状態、また、上記の工具基体a〜fについては、クランプ駒当接面部分(すくい面中心部)の上記TiN/TiCN研磨材層は除去せずに残した状態で、前記改質α型Al23層(上部層)の切刃稜線部を含むすくい面および逃げ面を、同じく表6に示される表面粗さに研磨することにより本発明被覆サーメット工具1〜13をそれぞれ製造した。
Then, each of these tool bases A to F and tool bases a to f is charged into a normal chemical vapor deposition apparatus,
(A) First, Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically elongated crystal structure described in JP-A-6-8010, and the other conditions are ordinary granularity. Under the conditions shown in Table 5), the Ti compound layer having the target layer thickness shown in Table 5 is vapor-deposited as the lower layer of the hard coating layer,
(B) Next, reaction gas composition: volume%, AlCl 3 : 2.2%, CO 2 : 5%, HCl: 2%, H 2 S: 0.15%, H 2 : remaining,
Reaction atmosphere temperature: 850 ° C.
Reaction atmosphere pressure: a predetermined pressure in the range of 20-30 kPa,
A reinforced α-type Al 2 O 3 layer is formed by vapor deposition at the target layer thickness shown in Table 5 under the conditions of
(C) Furthermore, the reaction gas composition: volume%, AlCl 3 : 2.2%, CO 2 : 1.5%, HCl: 2%, H 2 S: 0.75%, Ar: 26.5%, H 2 : Remaining
Reaction atmosphere temperature: 1070 ° C.
Reaction atmosphere pressure: a predetermined pressure within a range of 6 to 10 kPa,
The modified α-type Al 2 O 3 layer is also formed by vapor deposition with the target layer thickness shown in Table 5 under the same conditions as above,
(D) Further, a TiN / TiCN abrasive material layer is formed by vapor deposition with a target layer thickness shown in Table 6 under the same conditions shown in Table 3.
Subsequently, wet blasting is performed under the blasting conditions shown in Table 4 and in the combinations shown in Table 6, and for the tool bases A to F, the TiN / In the state where the TiCN abrasive layer is left without being removed, and for the tool bases a to f, the TiN / TiCN abrasive layer on the clamp piece abutting surface portion (the center portion of the rake face) is not removed. In the remaining state, the rake face and the flank face including the cutting edge ridge line portion of the modified α-type Al 2 O 3 layer (upper layer) are polished to the surface roughness shown in Table 6 to cover the present invention. Cermet tools 1 to 13 were produced, respectively.

また、比較の目的で、表7に示される通り、硬質被覆層の上部層である改質α型Al23層と同下部層であるTi化合物層の間に補強α型Al23層の形成を行なわず、かつ、上記TiN/TiCN研磨材層の形成およびウエットブラストによる表面研磨処理を行わない以外は同一の条件で、従来被覆サーメット工具1〜13をそれぞれ製造した。 For comparison purposes, as shown in Table 7, a reinforced α-type Al 2 O 3 is provided between the modified α-type Al 2 O 3 layer as the upper layer of the hard coating layer and the Ti compound layer as the lower layer. Conventionally coated cermet tools 1 to 13 were manufactured under the same conditions except that the layer was not formed and the formation of the TiN / TiCN abrasive layer and the surface polishing treatment by wet blasting were not performed.

ついで、上記の本発明被覆サーメット工具1〜13と従来被覆サーメット工具1〜13の硬質被覆層の上部層を構成する改質α型Al23層、および上記の本発明被覆サーメット工具1〜13の補強α型Al23層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の本発明被覆サーメット工具1〜13と従来被覆サーメット工具1〜13の改質α型Al23層、および本発明被覆サーメット工具1〜13の補強α型Al23層について、それぞれ工具基体表面と平行な面をそれぞれ研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、それぞれの前記研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、30×50μmの領域を0.1μm/stepの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、前記改質α型Al23層については0〜45度、前記補強α型Al23層については45〜90度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Subsequently, the modified α-type Al 2 O 3 layer constituting the upper layer of the hard coating layer of the present invention coated cermet tool 1-13 and the conventional coated cermet tool 1-13, and the present invention coated cermet tool 1-1 With respect to the 13 reinforced α-type Al 2 O 3 layers, inclination angle number distribution graphs were respectively prepared using a field emission scanning electron microscope.
That is, the inclination angle number distribution graph shows the modified α-type Al 2 O 3 layer of the present invention coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 and the reinforcement of the present coated cermet tools 1 to 13. The α-type Al 2 O 3 layer is set in a lens barrel of a field emission scanning electron microscope with each surface parallel to the surface of the tool base being a polished surface, and incident on the polished surface at an incident angle of 70 degrees. An electron backscatter diffraction image apparatus is used to irradiate an electron beam having an acceleration voltage of 15 kV with an irradiation current of 1 nA on each crystal grain having a hexagonal crystal lattice existing within the measurement range of each polished surface, The inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line of the polished surface at an interval of 0.1 μm / step in a region of × 50 μm. Based on before Among the measurement inclination angle, the 0-45 degrees for reforming α type the Al 2 O 3 layer, the measurement inclination angle is in the range of 45 to 90 degrees for the reinforcement α type the Al 2 O 3 layer 0.25 This was created by dividing the pitch for each degree and counting the frequencies existing in each division.

この結果得られた各種の改質α型Al23層および補強α型Al23層の傾斜角度数分布グラフにおいて、表8,9にそれぞれ示される通り、本発明被覆サーメット工具1〜13および従来被覆サーメット工具1〜13の改質α型Al23層は、(0001)面の測定傾斜角の分布が、それぞれ0〜15度の範囲内の傾斜角区分に最高ピークが現れる傾斜角度数分布グラフを示し、一方本発明被覆サーメット工具1〜13の補強α型Al23層においては、75〜90度の範囲内の傾斜角区分に最高ピークが現れる傾斜角度数分布グラフを示すものであった。
また表8,9には、上記の各種の改質α型Al23層および補強α型Al23層の傾斜角度数分布グラフにおいて、それぞれ0〜15度および75〜90度の範囲内の傾斜角区分に存在する全傾斜角度数の傾斜角度数分布グラフ全体に占める割合を示した。
なお、図3は、本発明被覆サーメット工具2の補強α型Al23層の傾斜角度数分布グラフ、図4は同工具の改質α型Al23層の傾斜角度数分布グラフを示すものである。
In the gradient angle distribution graphs of the various modified α-type Al 2 O 3 layers and reinforced α-type Al 2 O 3 layers obtained as a result, as shown in Tables 8 and 9, respectively, the coated cermet tools 1 to 1 of the present invention are used. 13 and the modified α-type Al 2 O 3 layer of the conventional coated cermet tools 1 to 13, the distribution of the measured inclination angle of the (0001) plane shows the highest peak in the inclination angle section within the range of 0 to 15 degrees, respectively. An inclination angle number distribution graph is shown. On the other hand, in the reinforcing α-type Al 2 O 3 layer of the coated cermet tools 1 to 13 of the present invention, an inclination angle number distribution graph in which the highest peak appears in the inclination angle section within the range of 75 to 90 degrees. Was shown.
Tables 8 and 9 show the ranges of 0 to 15 degrees and 75 to 90 degrees in the inclination angle number distribution graphs of the various modified α-type Al 2 O 3 layers and reinforced α-type Al 2 O 3 layers, respectively. The ratio of the total number of tilt angles existing in the tilt angle section to the entire tilt angle distribution graph is shown.
3 is an inclination angle distribution graph of the reinforcing α-type Al 2 O 3 layer of the coated cermet tool 2 of the present invention, and FIG. 4 is an inclination angle distribution graph of the modified α-type Al 2 O 3 layer of the tool. It is shown.

また、この結果得られた本発明被覆サーメット工具1〜13および従来被覆サーメット工具1〜13の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定(縦断面測定)したところ、いずれも目標層厚と実質的に同じ平均層厚(5点測定の平均値)を示した。   Moreover, when the thickness of the constituent layer of the hard coating layer of the present coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 obtained as a result was measured using a scanning electron microscope (longitudinal section measurement). , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.

つぎに、上記の本発明被覆サーメット工具1〜13および従来被覆サーメット工具1〜13の各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部にボルト止めまたはクランプ駒による挟み締め止めした状態で、
被削材:JIS・SUS316の丸棒、
切削速度:330m/min.、
切り込み:2mm、
送り:0.2mm/rev.、
の条件(切削条件Aという)でのステンレス鋼の乾式連続切削試験、
被削材:JIS・SS300の長さ方向等間隔4本縦溝入り丸棒、
切削速度:310m/min.、
切り込み:2.5mm、
送り:0.4mm/rev.、
の条件(切削条件Bという)での軟鋼の乾式断続切削試験、さらに、
被削材:JIS・SMn433Hの長さ方向等間隔4本縦溝入り丸棒、
切削速度:320m/min.、
切り込み:2.5mm、
送り:0.35mm/rev.、
の条件(切削条件Cという)での高マンガン鋼の乾式断続切削試験を行い、いずれの切削試験でも切刃の逃げ面摩耗幅が、一般に切削工具の使用寿命の目安とされている0.3mmに至るまでの切削時間を測定した。この測定結果を表10に示した。
Next, with respect to the various coated cermet tools of the present invention coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13, all are clamped and clamped to the tip of the tool steel tool by a bolt or a clamp piece so,
Work material: JIS / SUS316 round bar,
Cutting speed: 330 m / min. ,
Cutting depth: 2mm,
Feed: 0.2 mm / rev. ,
Dry continuous cutting test of stainless steel under the conditions (cutting condition A),
Work material: JIS / SS300 lengthwise equidistant four round grooved round bars,
Cutting speed: 310 m / min. ,
Incision: 2.5mm,
Feed: 0.4 mm / rev. ,
Dry intermittent cutting test of mild steel under the conditions (cutting condition B),
Work material: JIS-SMn433H, 4 longitudinally spaced round bars with equal intervals in the length direction,
Cutting speed: 320 m / min. ,
Incision: 2.5mm,
Feed: 0.35 mm / rev. ,
A dry intermittent cutting test of high-manganese steel under the above conditions (referred to as cutting condition C), and the flank wear width of the cutting edge in any cutting test is generally 0.3 mm, which is generally regarded as a guide for the service life of cutting tools. The cutting time up to was measured. The measurement results are shown in Table 10.

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表5〜10に示される結果から、本発明被覆サーメット工具1〜13は、いずれも硬質被覆層の下部層であるTi化合物層と上部層である改質α型Al23層の間に介在させた補強α型Al23層が、(0001)面の傾斜角度数分布グラフで75〜90度の範囲内の傾斜角区分で最高ピークを示し、これの作用で前記改質α型Al23層が十分に補強されて一段とすぐれた高温強度をもつようになり、さらに、前記改質α型Al23層の少なくとも切刃稜線部を含むすくい面部分および逃げ面部分の表面がRa:0.2μm以下の表面粗さに研磨され、摩耗進行抑制効果が発揮されることと相俟って、特に切刃部に高い切削抵抗が加わる難削材の切削加工でも、切刃部におけるチッピング発生が著しく抑制され、すぐれた耐摩耗性を長期に亘って示すのに対して、硬質被覆層に前記補強α型Al23層の介在形成がなく、かつ上部層が表面平滑性の低い改質α型Al23層で構成された従来被覆サーメット工具1〜13においては、いずれも難削材の切削加工では硬質被覆層の高温強度が不十分であるために、表面平滑性の低い上部層と相俟って、切刃部にチッピングが発生し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 5 to 10, each of the coated cermet tools 1 to 13 of the present invention is between the Ti compound layer that is the lower layer of the hard coating layer and the modified α-type Al 2 O 3 layer that is the upper layer. The intervening reinforced α-type Al 2 O 3 layer shows the highest peak in the inclination angle section within the range of 75 to 90 degrees in the inclination angle number distribution graph of the (0001) plane, and this action makes the modified α type the Al 2 O 3 layer is sufficiently reinforced now with more excellent high temperature strength, furthermore, the rake face portion and flank portions including at least the cutting edge line portion of the reforming α type the Al 2 O 3 layer Combined with the fact that the surface is polished to a surface roughness of Ra: 0.2 μm or less and the effect of suppressing the progress of wear is exerted, especially in cutting of difficult-to-cut materials in which high cutting resistance is applied to the cutting edge, Chipping at the blade is remarkably suppressed, and excellent wear resistance is achieved for a long time. Whereas shown over, without intervening formation of the reinforcing α type the Al 2 O 3 layer to the hard coating layer, and conventional upper layer is constituted by a surface smoothness of less reformed α-type the Al 2 O 3 layer In the coated cermet tools 1 to 13, since the high temperature strength of the hard coating layer is insufficient in cutting difficult-to-cut materials, chipping is performed on the cutting edge portion together with the upper layer having low surface smoothness. It is clear that the service life is reached in a relatively short time.

上述のように、この発明の被覆サーメット工具は、各種の一般鋼や普通鋳鉄などの切削加工は勿論のこと、特に自身が高い粘性を有し、かつ切削時の切削工具表面部の硬質被覆層に対する粘着性も高く、この結果切削抵抗の高いものとなる軟鋼やステンレス鋼、さらに高マンガン鋼などの難削材の切削加工でも、チッピングの発生なく、すぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。   As described above, the coated cermet tool of the present invention is not only for cutting various general steels and ordinary cast iron, but also has a high viscosity, and the hard coating layer on the surface of the cutting tool at the time of cutting. Even when cutting difficult-to-cut materials such as mild steel, stainless steel, and high manganese steel, which have high cutting resistance, it has excellent wear resistance without chipping. Since it exhibits excellent cutting performance, it can sufficiently satisfy the high performance of the cutting device, the labor saving and energy saving of cutting, and the cost reduction.

本発明被覆サーメット工具の硬質被覆層を構成する補強α型Al23層における結晶粒の(0001)面を測定する場合の傾斜角の測定範囲を示す概略説明図である。Is a schematic diagram illustrating a measurement range of the inclination angle in the case of measuring the crystal grains (0001) plane in the reinforcement α type the Al 2 O 3 layer constituting the hard layer of the present invention coated cermet tool. 硬質被覆層を構成する改質α型Al23層における結晶粒の(0001)面を測定する場合の傾斜角の測定範囲を示す概略説明図である。It is a schematic explanatory drawing which shows the measurement range of the inclination angle in the case of measuring the (0001) plane of the crystal grain in the modified α-type Al 2 O 3 layer constituting the hard coating layer. 本発明被覆サーメット工具2の硬質被覆層を構成する補強α型Al23層の45〜90度の傾斜角区分を示す傾斜角度数分布グラフである。The inclination angle frequency distribution graph showing the tilt angle sections of 45 to 90 degrees to the present invention coated cermet reinforced α type constituting the hard layer of the tool 2 Al 2 O 3 layer. 本発明被覆サーメット工具2の硬質被覆層を構成する改質α型Al23層の0〜45度の傾斜角区分を示す傾斜角度数分布グラフである。The inclination angle frequency distribution graph showing the tilt angle sections of 0 to 45 degrees of the modified α type the Al 2 O 3 layer constituting the hard layer of the present invention coated cermet tool 2.

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(1)下部層が、Tiの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの1層または2層以上からなり、かつ3〜20μmの合計平均層厚を有するTi化合物層、
(2)上部層が、化学蒸着した状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、0〜15度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜15度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の50%以上の割合を占める傾斜角度数分布グラフを示し、かつ6〜20μmの平均層厚を有する改質α型酸化アルミニウム層、
以上(1)および(2)で構成された硬質被覆層を蒸着形成してなる表面被覆サーメット製切削工具において、
(a)上記の下部層であるTi化合物層と上部層である改質α型酸化アルミニウム層の間に、補強層として、同じく化学蒸着した状態でα型の結晶構造を有し、電界放出型走査電子顕微鏡を用い、上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である(0001)面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、45〜90度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、
75〜90度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記75〜90度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の50%以上の割合を占める傾斜角度数分布グラフを示し、かつ0.1〜1.9μmの平均層厚を有する補強α型酸化アルミニウム層、
を介在させ、
(b)さらに、上記硬質被覆層の上部層である改質α型酸化アルミニウム層の全面に、
いずれも0.1〜2.5μmの平均層厚を有する窒化チタン層と炭窒化チタン層の2層以上の交互積層で構成され、かつ、0.4〜5μmの全体平均層厚を有する研磨材層を蒸着形成した状態で、
ウエットブラストにて、噴射研磨材として、水との合量に占める割合で15〜60質量%の酸化アルミニウム微粒を配合した研磨液を噴射し、
上記の研磨材層のウエットブラストによる粉砕化窒化チタン微粒および粉砕化炭窒化チタン微粒と、噴射研磨材としての酸化アルミニウム微粒の共存下で、上記硬質被覆層の上部層を構成する改質α型酸化アルミニウム層の少なくとも切刃稜線部を含むすくい面部分および逃げ面部分を研磨して、これら研磨面の表面粗さを準拠規格JIS・B0601−1994に基いた測定で、Ra:0.2μm以下としたこと、
を特徴とする難削材の切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(1) The lower layer is composed of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride layer, and a total average of 3 to 20 μm A Ti compound layer having a layer thickness,
(2) A hexagonal crystal lattice in which the upper layer has an α-type crystal structure in the state of chemical vapor deposition and exists within a measurement range of a polished surface parallel to the tool substrate surface using a field emission scanning electron microscope And measuring the inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal line of the polished surface. In the inclination angle number distribution graph formed by dividing the measured inclination angles in the range of 0 to 45 degrees for each pitch of 0.25 degrees and totaling the frequencies existing in each section, 0 to 15 An inclination angle in which the highest peak exists in the inclination angle section within the range of degrees, and the total of the frequencies existing within the range of 0 to 15 degrees accounts for 50% or more of the entire degrees in the inclination angle frequency distribution graph Shows a number distribution graph and average layer thickness of 6-20 μm Modified α-type aluminum oxide layer having
In the surface-coated cermet cutting tool formed by vapor-depositing the hard coating layer composed of (1) and (2) above,
(A) Between the Ti compound layer as the lower layer and the modified α-type aluminum oxide layer as the upper layer, as a reinforcing layer, it has an α-type crystal structure in the same chemical vapor deposition state, and is a field emission type Using a scanning electron microscope, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the polished surface parallel to the tool substrate surface is irradiated with an electron beam, and the normal to the polished surface is The tilt angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured, and the measured tilt angle within the range of 45 to 90 degrees out of the measured tilt angles is set every pitch of 0.25 degrees. In the slope angle distribution graph, which is divided and counts the frequencies existing in each section,
The highest peak exists in the inclination angle section in the range of 75 to 90 degrees, and the total of the frequencies existing in the range of 75 to 90 degrees represents a ratio of 50% or more of the entire degrees in the inclination angle frequency distribution graph. Reinforced α-type aluminum oxide layer showing an inclination angle number distribution graph and having an average layer thickness of 0.1 to 1.9 μm,
Intervene,
(B) Furthermore, on the entire surface of the modified α-type aluminum oxide layer which is the upper layer of the hard coating layer,
Abrasive material having an overall average layer thickness of 0.4 to 5 μm, which is composed of two or more alternating layers of titanium nitride layers and titanium carbonitride layers having an average layer thickness of 0.1 to 2.5 μm. With the layer deposited,
In wet blasting, as a spraying abrasive, a polishing liquid containing 15 to 60% by mass of aluminum oxide fine particles in a proportion of the total amount with water is sprayed,
Modified α-type constituting the upper layer of the hard coating layer in the presence of the ground titanium nitride fine particles and ground titanium carbonitride fine particles by wet blasting of the abrasive layer and the aluminum oxide fine particles as the spray abrasive The rake face portion and the flank face portion including at least the cutting edge ridge line portion of the aluminum oxide layer are polished, and the surface roughness of these polished surfaces is measured based on the compliant standard JIS B0601-1994, Ra: 0.2 μm or less And
A surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in cutting difficult-to-cut materials characterized by
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