JP4788892B2 - Manufacturing method of surface-coated cermet cutting tool that exhibits excellent chipping resistance in high-speed cutting of difficult-to-cut materials - Google Patents

Description

This invention has a high viscosity and high adhesion to the hard coating layer on the surface of the cutting tool during cutting. As a result, soft steel, stainless steel, and high manganese steel that have extremely high cutting resistance. in high-speed cutting of difficult-to-cut materials, shows the chipping resistance of the hard coating layer has excellent, manufacture of surface-coated cermet cutting tool which exhibits excellent wear resistance over a long period (hereinafter, referred to as coated cermet tools) It is about the method .

Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(1) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). A Ti compound layer having a total average layer thickness of 3 to 20 μm, including one or two or more of a layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer,
(2) The upper layer has an α-type crystal structure in the state of chemical vapor deposition, and using a field emission scanning electron microscope, as shown schematically in FIG. 2, is a polished surface parallel to the tool base surface. Each of the crystal grains having a hexagonal crystal lattice existing within the measurement range is irradiated with an electron beam, and the normal line of the (0001) plane that is the crystal plane of the crystal grain is relative to the normal line of the polished surface. Measure the inclination angle to be made, divide the measurement inclination angle within the range of 0-45 degrees out of the measurement inclination angle for each pitch of 0.25 degree, and totalize the frequency existing in each division In the inclination angle number distribution graph, as shown in FIG. 4, the highest peak exists in the inclination angle section in the range of 0 to 15 degrees, and the sum of the frequencies existing in the range of 0 to 15 degrees is as follows. , Accounting for 50% or more of the total frequency in the slope angle distribution graph It shows an inclination angle frequency distribution graph, and an aluminum oxide layer having an average layer thickness of 1.5～6Myuemu (hereinafter, referred to as modified α type the Al ₂ O ₃ layer),
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of the above (1) and (2), and the modified α-type Al ₂ O ₃ layer is an α-type Al. ₂ O ₃ itself has excellent high-temperature hardness and heat resistance, as well as excellent high-temperature strength, so it is excellent even when used for high-speed cutting such as various general steels and ordinary cast iron. It is also known to exhibit excellent chipping resistance and excellent cutting performance over a long period of time.

In general, the modified α-type Al ₂ O ₃ layer constituting the hard coating layer of the above-mentioned coated cermet tool uses a normal chemical vapor deposition apparatus,
Reaction gas composition: by _{volume%, AlCl 3: 1~5%,} CO 2: 0.1~2%, HCl: 0.3~3%, H 2 S: 0.5~1%, Ar: 20~ 35%, H ₂ : remaining,
Reaction atmosphere temperature: 1050 to 1100 ° C.
Reaction atmosphere pressure: 6 to 10 kPa,
It is also known that vapor deposition is performed under the following conditions.
Furthermore, the Ti compound layer and the modified α-type Al ₂ O ₃ layer that also constitute the hard coating layer have a granular crystal structure, and the TiCN layer that constitutes the Ti compound layer is intended to improve the strength of the layer itself. In a normal chemical vapor deposition apparatus, a gas mixture containing organic carbonitrides is used as a reaction gas, and it is formed by chemical vapor deposition at an intermediate temperature range of 700 to 950 ° C. so that it has a vertically grown crystal structure. It is also known to do.
JP-A-2005-205586 Japanese Patent Laid-Open No. 6-8010

In recent years, the performance of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting work, and along with this, cutting work tends to be further accelerated. For coated cermet tools, there is no problem when used for high-speed cutting of general steel such as low alloy steel and carbon steel, and ordinary cast iron such as gray cast iron. When used for high-speed cutting of difficult-to-cut materials such as manganese steel, the difficult-to-cut material itself has a high viscosity, and the adhesiveness to the hard coating layer on the surface of the cutting tool during cutting is also high. Combined with a further increase due to high heat generated during high-speed cutting, the cutting resistance becomes extremely high, while the high-temperature strength of the modified α-type Al ₂ O ₃ layer constituting the hard coating layer can withstand this. This is not sufficient, and as a result, chipping (slight chipping) is likely to occur at the cutting edge, and this causes the service life to be reached in a relatively short time.

In view of the above, the present inventors focused on the coated cermet tool in which the modified α-type Al ₂ O ₃ layer constitutes the upper layer of the hard coating layer, and in particular, the modified α-type Al As a result of research to improve chipping resistance of ₂ O ₃ layer,
(A) Between the Ti compound layer (lower layer) and the modified α-type Al ₂ O ₃ layer (upper layer) constituting the hard coating layer of the conventional coated cermet tool, using a normal chemical vapor deposition apparatus,
Reaction gas composition: by _{volume%, AlCl 3: 1~5%,} CO 2: 3~7%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2: remainder ,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 20-30 kPa,
When an aluminum oxide (hereinafter referred to as Al ₂ O ₃ ) layer is formed with an average layer thickness of 0.1 to 1.9 μm under the conditions of the above, the resulting Al ₂ O ₃ layer has the same α-type crystal structure. Using a field emission scanning electron microscope, as shown in FIGS. 1 (a) and 1 (b), it has a hexagonal crystal lattice that is also present in the measurement range of the polished surface parallel to the tool substrate surface. Each crystal grain is irradiated with an electron beam, an inclination angle formed by a normal line of the (0001) plane that is a crystal plane of the crystal grain is measured with respect to the normal line of the polished surface, When the measured inclination angle in the range of 45 to 90 degrees is divided into pitches of 0.25 degrees and the frequency existing in each of the divisions is represented by an inclination angle number distribution graph, FIG. As shown in Fig. 4, a sharp peak appears at a specific position in the tilt angle section, and According to the results, when the reaction atmosphere pressure in the chemical vapor deposition apparatus is changed within the range of 20 to 30 kPa as described above, the position where the sharpest peak appears changes within the range of 75 to 90 degrees of the inclination angle section. In addition, the sum of the frequencies existing within the range of 75 to 90 degrees occupies a ratio of 50% or more of the entire frequencies in the inclination angle distribution graph, and 75 to 75 in the inclination angle distribution graph as a result. An Al ₂ O ₃ layer (hereinafter referred to as a reinforced α-type Al ₂ O ₃ layer) in which the highest peak of the tilt angle section appears in the range of 90 degrees is referred to as the above-mentioned modified α-type Al ₂ O ₃ layer (upper layer). be between Ti compound layer (lower layer), the modified α type the Al ₂ O ₃ layer were sufficiently reinforced, the reforming α-type Al ₂ O even at high cutting with high cutting resistance above hard-to-cut materials _One step of chipping on ₃ layers And to contribute to improved wear resistance.

(B) On the other hand, the modified α-type Al ₂ O ₃ layer constituting the upper layer of the hard coating layer of the above-described coated cermet tool has a relatively rough deposition surface. Therefore, on the entire surface of the modified α-type Al ₂ O ₃ layer,
(B-1) First, as the lower layer, the reaction gas composition is in volume%,
TiCl ₄ : 0.2 to 10%,
CO ₂ : 0.1 to 10%,
Ar: 5 to 60%,
H ₂ : Remaining
And
Reaction atmosphere temperature: 800-1100 ° C.
Reaction atmosphere pressure: 4 to 70 kPa (30 to 525 torr),
And having an average layer thickness of 0.1 to 3 μm and a ratio of oxygen to Ti of 1.25 to 1.90 as measured by an Auger spectrometer,
Composition formula: TiO _W ,
In the case of
W: 1.25 to 1.90 in atomic ratio,
Forming a titanium oxide layer that satisfies
(B-2) Next, on the titanium oxide layer (lower layer), as an upper layer, the normal conditions, that is, the reaction gas composition in volume%,
TiCl ₄ : 0.2 to 10%,
N ₂ : 4-60%,
H ₂ : Remaining
And
Reaction atmosphere temperature: 800-1100 ° C.
Reaction atmosphere pressure: 4 to 90 kPa (30 to 675 torr),
When a TiN layer having an average layer thickness of 0.05 to 2 μm is formed under the conditions described above,
(B-3) When forming the TiN layer (upper layer), oxygen in the titanium oxide layer constituting the lower layer is diffused so that the upper layer (TiN layer) is composed of a titanium nitride oxide layer. In this case, the titanium oxide layer, which is the lower layer after the formation of the upper layer (the titanium oxynitride layer), is measured by an Auger spectroscopic analyzer at the center in the thickness direction. 1.2 to 1.7 in atomic ratio,
Composition formula: TiO _x ,
In the case of
X: 1.2 to 1.7 in atomic ratio,
Titanium oxide layer that satisfies
(B-4) Further, the upper layer composed of the above titanium oxynitride layer was also measured at the center in the thickness direction with an Auger spectroscopic analyzer, and the proportion of diffused oxygen was 0 in terms of atomic ratio with respect to nitrogen (N). .01-0.4, i.e.
Composition formula: TiN _1-Y (O) _Y ,
(Where, (O) represents diffused oxygen from the titanium oxide layer as the lower layer when the upper layer is deposited ),
Y: 0.01 to 0.4 in atomic ratio
Titanium nitride oxide layer that satisfies

(C) In a state where the titanium nitride oxide layer (upper layer) and the titanium oxide layer (lower layer) are formed by vapor deposition,
When a polishing liquid containing 15 to 60% by mass of aluminum oxide fine particles (hereinafter referred to as Al ₂ O ₃ fine particles) as a spraying abrasive in a proportion of the total amount with water is sprayed by wet blasting, the nitrogen The titanium oxide layer and the titanium oxide layer are pulverized and pulverized by the Al ₂ O ₃ fine particles, become titanium oxynitride fine particles and titanium oxide fine particles, and act as an abrasive in the presence of the Al ₂ O ₃ fine particles. of constituting the upper layer will be polishing the surface of the modified α type the Al ₂ O ₃ layer, the surface of the reformed α-type the Al ₂ O ₃ layer after the results polishing compliance JIS · B0601-1994 (The following surface roughness is a measured value based on such a compliant standard.) Ra: Smoothed to a surface roughness of 0.2 μm or less. This is the upper layer. surface of the modified α type the Al ₂ O ₃ layer Ra: 0.2 [mu] m using the above coated cermet tool obtained by smoothing the surface roughness of not more than, in the case of performing high-speed cutting of difficult-to-cut materials, 350 meters / min. Even at cutting speeds exceeding 1, the progress of wear of the modified α-type Al ₂ O ₃ layer can be suppressed by smoothing the surface roughness, and as a result, the life of the tool can be further increased. .
In this case, without forming the abrasive layer composed of the titanium nitride oxide layer (upper layer) and the titanium oxide layer (lower layer) on the surface of the modified α-type Al ₂ O ₃ layer, In the same way, even if wet polishing is performed by directly spraying and polishing a polishing liquid containing 15 to 60% by mass of Al ₂ O ₃ fine particles as a proportion of the total amount with water as the spray abrasive, The surface of the α-type Al ₂ O ₃ layer is polished only to a surface roughness of Ra: 0.3 to 0.6 μm, and the resulting surface roughness is modified to Ra: 0.3 to 0.6 μm. Even when a coated cermet tool having an upper layer composed of an α-type Al ₂ O ₃ layer is used, the cutting speed is 350 m / min. In high-speed cutting of difficult-to-cut materials that exceed the range, sufficient wear suppression effect due to surface smoothing cannot be demonstrated, and satisfactory service life cannot be extended.

(D) As described above, together with the upper layer of the hard coating layer is composed of the reformed α-type the Al ₂ O ₃ layer, the rake face including at least cutting ridge of the reformed α-type the Al ₂ O ₃ layer The coated cermet tool in which the portion and the flank portion are polished and the surface roughness of these polished surfaces is set to Ra: 0.2 μm or less is particularly suitable for high-speed cutting of difficult-to-cut materials in which extremely high cutting resistance is applied to the cutting edge. Since the high temperature strength of the hard coating layer is improved and the modified α-type Al ₂ O ₃ layer of the upper layer has excellent surface smoothness, it exhibits excellent chipping resistance and can be used for a long time. To show excellent wear resistance.
The research results shown in (a) to (d) above were obtained.

The present invention has been made based on the above research results, and ( 1 ) on the surface of the tool base,
(A -1 ) As a lower layer, a Ti compound layer composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, and having a total average layer thickness of 3 to 20 μm ,
(A -2 ) Using a field emission scanning electron microscope interposed as a reinforcing layer between the Ti compound layer as the lower layer and the modified α-type Al ₂ O ₃ layer as the upper layer, the tool An electron beam is irradiated to each crystal grain having a hexagonal crystal lattice existing within a measurement range of a polished surface parallel to the substrate surface, and is a crystal plane of the crystal grain with respect to a normal line of the polished surface ( The tilt angle formed by the normal line of the (0001) plane is measured, and among the measured tilt angles, the measured tilt angles within the range of 45 to 90 degrees are divided for each pitch of 0.25 degrees, and within each section In the inclination angle frequency distribution graph obtained by collecting the existing frequencies, the highest peak exists in the inclination angle section within the range of 75 to 90 degrees, and the total of the frequencies existing within the range of 75 to 90 degrees is Occupies 50% or more of the total frequency in the slope angle distribution graph That the inclination angle frequency distribution shows a graph, and the average layer thickness reinforcement α type the Al ₂ O ₃ layer having the 0.1～1.9Myuemu,
(A -3 ) A field emission scanning electron microscope is used as the upper layer, and each crystal grain having a hexagonal crystal lattice existing in the measurement range of the polished surface parallel to the tool base surface is irradiated with an electron beam. The inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line of the polished surface, and is within the range of 0 to 45 degrees of the measured inclination angle. In the inclination angle distribution graph obtained by dividing the measured inclination angle for each pitch of 0.25 degrees and totaling the frequencies existing in each section, the highest peak is in the inclination angle section within the range of 0 to 15 degrees. An inclination angle distribution graph that is present and occupies a ratio of 50% or more of the entire frequencies in the inclination angle distribution graph, and the total number of frequencies existing in the range of 0 to 15 degrees is 1.5 to 5 Modified α-type Al ₂ O having an average layer thickness of 9 μm ₃ layers,
Chemical vapor deposition of the hard coating layer composed of (a-1) to (a-3) above ,
( 2 ) Next , on the entire surface of the modified α-type Al ₂ O ₃ layer, which is the upper layer of the hard coating layer,
(B-1) The lower layer has an average layer thickness of 0.1 to 3 μm, and
Composition formula: TiO _x ,
, The central part in the thickness direction is measured with an Auger spectrometer, and the atomic ratio is
X: 1.2 to 1.7,
Satisfying titanium oxide layer,
(B-2) The upper layer has an average layer thickness of 0.05 to 2 μm, and
Composition formula: TiN _1-Y (O) _Y ,
(However, (O) indicates the diffused oxygen from the titanium oxide layer, which is the lower layer when the upper layer is formed by vapor deposition ). Similarly, the central portion in the thickness direction is measured with an Auger spectrometer. , Also in atomic ratio,
Y: 0.01 to 0.4
Satisfying titanium oxynitride layer,
In the state where the abrasive layer composed of (b-1) and (b-2) is formed by chemical vapor deposition,
In wet blasting, as a spraying abrasive, a polishing liquid containing 15 to 60% by mass of Al ₂ O ₃ fine particles in a proportion of the total amount with water is sprayed,
Abrasive layer and the Al ₂ O ₃ by atomization of injection formed by grinding atomized pulverized titanium oxide fine particles and pulverized oxynitride titanium particulate is injected abrasive above, coexistence of Al ₂ O ₃ fine as injection abrasive Below, the rake face portion and the flank face portion including at least the cutting edge ridge line portion of the modified α-type Al ₂ O ₃ layer constituting the upper layer of the hard coating layer are polished, and the surface roughness of these polished surfaces is reduced. Ra: 0.2 μm or less
It has a feature in a method for producing a coated cermet tool that exhibits excellent chipping resistance in a hard coating layer in high-speed cutting of difficult-to-cut materials.

Hereinafter, the reason why the hard coating layer, the abrasive layer, and the Al ₂ O ₃ fine particles of the polishing liquid used in the wet blasting in the method for producing the coated cermet tool of the present invention are numerically limited as described above will be described.
(A) Hard coating layer (a-1) Ti compound layer (lower layer)
The Ti compound layer basically exists as a lower layer of the modified α-type Al ₂ O ₃ layer, and allows the hard coating layer to have high-temperature strength by its excellent high-temperature strength. And the reinforcing α-type Al ₂ O ₃ layer firmly adhere to each other, and thus have an effect of improving the adhesion of the hard coating layer to the tool substrate. However, when the total average layer thickness is less than 3 μm, On the other hand, when the total average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation particularly in high-speed cutting accompanied by high heat generation, which causes uneven wear. The total average layer thickness was determined to be 3-20 μm.

(A-2) Modified α-type Al ₂ O ₃ layer (upper layer)
The maximum peak position of the measured inclination angle in the inclination angle number distribution graph of the modified α-type Al ₂ O ₃ layer is changed by changing the reaction atmosphere pressure in the chemical vapor deposition apparatus. When the reaction atmosphere pressure is 6 to 10 kpa, the highest peak appears in the inclination angle section in the range of 0 to 15 degrees, and the total of the frequencies existing in the range of 0 to 15 degrees is the inclination angle. An inclination angle number distribution graph occupying a ratio of 50% or more of the entire frequency in the number distribution graph is shown. Therefore, even if the reaction atmosphere pressure is out of the range, it is out of the range. However, the highest peak of the measured tilt angle does not appear within the range of 0 to 15 degrees, and in such a case, the desired excellent high-temperature strength cannot be provided.
The modified α-type Al ₂ O ₃ layer also has high-temperature strength in addition to the excellent high-temperature hardness and heat resistance of the α-type Al ₂ O ₃ itself, but the average layer thickness is 1 If the thickness is less than 5 μm, the above properties cannot be sufficiently provided in the hard coating layer, and if the average layer thickness exceeds 5.9 μm, chipping is likely to occur in high-speed cutting of difficult-to-cut materials. Therefore, the average layer thickness was determined to be 1.5 to 5.9 μm.

(A-3) Reinforced α-type Al ₂ O ₃ layer (reinforcing layer)
As described above, the highest peak position of the measured inclination angle in the inclination angle number distribution graph of the reinforced α-type Al ₂ O ₃ layer changes by changing the reaction atmosphere pressure in the chemical vapor deposition apparatus, but according to the test results, When the reaction atmosphere pressure in the above deposition conditions is 20 to 30 kPa, the maximum peak appears in the tilt angle section in the range of 75 to 90 degrees, and the total of the frequencies existing in the range of 75 to 90 degrees is The inclination angle number distribution graph occupies a ratio of 50% or more of the entire frequency in the inclination angle number distribution graph. Therefore, even if the reaction atmosphere pressure is out of the range, it is high. Even if it deviates, the maximum peak of the measured inclination angle does not appear within the range of 75 to 90 degrees, and in this case, the desired excellent reinforcing action cannot be exhibited. It is a thing.
Further, if the average layer thickness is less than 0.1 μm, the reinforcing action on the modified α-type Al ₂ O ₃ layer is insufficient, while if the average layer thickness exceeds 1.9 μm, the difficult-to-cut material Since high-speed cutting tends to cause chipping, the average layer thickness is set to 0.1 to 1.9 μm.

(B) Abrasive material layer As described above, the titanium oxynitride layer constituting the upper layer first forms a titanium oxide layer in which the oxygen ratio is 1.25 to 1.90 (W value) in terms of atomic ratio to Ti. Then, it is formed by depositing a TiN layer on the titanium oxide layer under normal conditions. Therefore, diffusion of oxygen from the titanium oxide layer during the formation of the TiN layer is indispensable. When the W value of the titanium oxide layer is less than 1.25, the diffusion reaction of oxygen into the TiN layer is drastically reduced, and the ratio of diffused oxygen (Y value) in the upper layer is 0.01 by atomic ratio. On the other hand, if the same W value exceeds 1.90, the ratio of diffused oxygen (Y value) in the upper layer will increase beyond 0.40 in terms of atomic ratio. The value is defined as 1.25 to 1.90 In this case, the oxygen ratio (X value) in the lower layer (titanium oxide layer) after forming the upper layer takes a value in the range of 1.2 to 1.7 in terms of atomic ratio, in other words, the upper layer. When the X value of the lower layer after formation satisfies 1.2 to 1.7, the Y value of the upper layer satisfies 0.01 to 0.40.
In this case, the X value of the lower layer and the Y value of the upper layer are set to 1.2 to 1.7 and 0.01 to 0.40, respectively. It is obtained from many test results that these abrasive layers are pulverized and atomized in a suitable state at the time of wet blasting, and exhibit an excellent polishing function sufficiently. Based on this. Therefore, if the X value and Y value are out of the range of 1.2 to 1.7 and 0.01 to 0.40, respectively, the pulverization and atomization at the time of wet blasting of the abrasive layer is not satisfactorily performed, which is excellent. The polishing function cannot be expected.
Further, the average layer thicknesses of the upper layer and the lower layer were set to 0.05 to 2 μm and 0.1 to 3 μm, respectively, when the average layer thickness was less than 0.05 μm and less than 0.1 μm. The ratio of the pulverized titanium oxide fine particles in the lower layer and the fine pulverized titanium oxynitride fine particles in the upper layer is too small to perform the polishing function sufficiently, while the average layer thickness is 2 μm and 3 μm, respectively. The reason is that the polishing function suddenly deteriorates even if the thickness exceeds the range, and in any case, the surface of the α-type Al ₂ O ₃ layer cannot be polished to a surface roughness of Ra: 0.2 μm or less. It is based.

(C) Polishing Al ₂ O ₃ Fine Particles In the polishing liquid Al ₂ O ₃ fine particles, the lower layer pulverized titanium oxide fine particles and the upper layer pulverized titanium oxynitride fine particles that constitute the abrasive layer during wet blasting In the coexisting state, the surface of the modified α-type Al ₂ O ₃ layer is polished, but even if the ratio is less than 15% by mass or more than 60% by mass with respect to the total amount with water, However, since the polishing function suddenly decreases, the ratio is determined to be 15 to 60% by mass.

The coated cermet tool manufactured by the method of the present invention includes a modified α-type Al ₂ O ₃ layer constituting an upper layer of a hard coating layer, and a gap between the modified α-type Al ₂ O ₃ layer and the Ti compound layer. the surface of the interposed allowed reinforcement α type the Al ₂ O ₃ layer is sufficiently reinforced, further wherein the modified α type the Al ₂ O ₃ layer to Ra: by polishing the surface roughness of less than 0.2 [mu] m, in particular switching Cutting of difficult-to-cut materials (work materials) such as stainless steel, high manganese steel, and mild steel, which have high powder viscosity and easily welded to the tool surface, under high-speed cutting conditions with high heat generation. Even if the chips are heated to a high temperature and the viscosity and weldability are further increased, and as a result, the cutting resistance to the surface of the hard coating layer increases, the excellent high-temperature strength and smoothness of the hard coating layer can be obtained. The chipping of the hard coating layer is noticeable due to the rough surface roughness. It is suppressed, and abrasion suppressing effect is also exerted, in which the result is shown excellent wear resistance for a long time.

Next, the method for producing a coated cermet tool according to the present invention will be specifically described with reference to examples.

As raw material powders, WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr ₃ C ₂ powder, TiN powder, and Co powder each having an average particle diameter of 1 to 3 μm are prepared. The raw material powder is blended in the blending composition shown in Table 1, added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and press-molded into a green compact of a predetermined shape at a pressure of 98 MPa. The green compact is vacuum-sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour. After sintering, the cutting edge is subjected to a honing process of R: 0.07 mm. Thus, a tool base made of a WC-based cemented carbide having a throwaway tip shape defined as CNMG12041 in the ISO standard in the form of having a tool mounting bolt through hole in the center. Each of the bodies A to F was produced.

Further, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo ₂ C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, blend these raw material powders into the composition shown in Table 2, wet mix with a ball mill for 24 hours, dry, and press-mold into a green compact at 98 MPa pressure The green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, the cutting edge portion is subjected to a honing process of R: 0.07 mm. Made of TiCN-based cermet with a throwaway tip shape that is defined as CNMN12041 in the ISO standard, with no holes attached to the tool body by clamping with clamp pieces To form a tool substrate a~f.

Then, each of these tool bases A to F and tool bases a to f is charged into a normal chemical vapor deposition apparatus,
(A) First, Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically elongated crystal structure described in JP-A-6-8010, and the other conditions are ordinary granularity. Under the conditions shown in Table 6), the Ti compound layer having the target layer thickness shown in Table 6 is deposited as the lower layer of the hard coating layer,
(B) Next, reaction gas composition: volume%, AlCl ₃ : 2.2%, CO ₂ : 5%, HCl: 2%, H ₂ S: 0.15%, H ₂ : remaining,
Reaction atmosphere temperature: 850 ° C.
Reaction atmosphere pressure: a predetermined pressure in the range of 20-30 kPa,
A reinforced α-type Al ₂ O ₃ layer is formed by vapor deposition at the target layer thickness shown in Table 6 under the conditions of
(C) Subsequently, reaction gas composition: volume%, AlCl ₃ : 2.2%, CO ₂ : 1.5%, HCl: 2%, H ₂ S: 0.75%, Ar: 26.5% , H ₂ : remaining,
Reaction atmosphere temperature: 1070 ° C.
Reaction atmosphere pressure: a predetermined pressure within a range of 6 to 10 kPa,
The modified α-type Al ₂ O ₃ layer is also formed by vapor deposition with the target layer thickness shown in Table 6 under the same conditions as above,
(D) Further, a titanium oxide layer for forming the lower layer of the abrasive layer [any one of TiO _W (1) to (6)] is deposited at the target layer thickness shown in Table 6 under the conditions shown in Table 4. After the formation, an upper layer forming titanium nitride layer (TiN layer) is vapor-deposited at the target layer thickness shown in Table 6 under the same conditions as shown in Table 3, and the composition shown in Table 6, ie, the thickness direction The central part is measured with an Auger spectroscopic analyzer, and an abrasive layer composed of a lower layer and an upper layer of the X value and Y value shown in Table 6 is formed.
(E) Subsequently, wet blasting is performed under the blasting conditions shown in Table 5 and in the combinations shown in Table 6, and the tool bases A to F are arranged at the periphery of the tool attachment bolt through-holes at the center. The state where the abrasive layer is left without being removed, and the state where the abrasive layer is left without being removed at the clamp piece abutting surface portion (the center portion of the rake face) for the tool bases a to f. Then, the rake face and flank face including the cutting edge ridge line portion of the modified α-type Al ₂ O ₃ layer (upper layer) are polished to the surface roughness shown in Table 6 to obtain the coated cermet tool 1 of the present invention. ~ 13 were produced respectively.

For comparison purposes, as shown in Table 7, a reinforced α-type Al ₂ O _{3 is provided} between the modified α-type Al ₂ O ₃ layer as the upper layer of the hard coating layer and the Ti compound layer as the lower layer. Conventionally coated cermet tools 1 to 13 were respectively manufactured under the same conditions except that the layer was not formed and the formation of the abrasive layer and the surface polishing treatment by wet blasting were not performed.

Subsequently, the modified α-type Al ₂ O ₃ layer constituting the upper layer of the hard coating layer of the present invention coated cermet tool 1-13 and the conventional coated cermet tool 1-13, and the present invention coated cermet tool 1-1 With respect to the 13 reinforced α-type Al ₂ O ₃ layers, inclination angle number distribution graphs were respectively prepared using a field emission scanning electron microscope.
That is, the inclination angle number distribution graph shows the modified α-type Al ₂ O ₃ layer of the present invention coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 and the reinforcement of the present coated cermet tools 1 to 13. The α-type Al ₂ O ₃ layer is set in a lens barrel of a field emission scanning electron microscope with each surface parallel to the surface of the tool base being a polished surface, and incident on the polished surface at an incident angle of 70 degrees. An electron backscatter diffraction image apparatus is used to irradiate an electron beam having an acceleration voltage of 15 kV with an irradiation current of 1 nA on each crystal grain having a hexagonal crystal lattice existing within the measurement range of each polished surface, The inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line of the polished surface at an interval of 0.1 μm / step in a region of × 50 μm. Based on before Among the measurement inclination angle, the 0-45 degrees for reforming α type the Al ₂ O ₃ layer, the measurement inclination angle is in the range of 45 to 90 degrees for the reinforcement α type the Al ₂ O ₃ layer 0.25 This was created by dividing the pitch for each degree and counting the frequencies existing in each division.

In the gradient angle distribution graphs of the various modified α-type Al ₂ O ₃ layers and reinforced α-type Al ₂ O ₃ layers obtained as a result, as shown in Tables 8 and 9, respectively, the coated cermet tools 1 to 1 of the present invention are used. 13 and the modified α-type Al ₂ O ₃ layer of the conventional coated cermet tools 1 to 13, the distribution of the measured inclination angle of the (0001) plane shows the highest peak in the inclination angle section within the range of 0 to 15 degrees, respectively. An inclination angle number distribution graph is shown. On the other hand, in the reinforcing α-type Al ₂ O ₃ layer of the coated cermet tools 1 to 13 of the present invention, an inclination angle number distribution graph in which the highest peak appears in the inclination angle section within the range of 75 to 90 degrees. Was shown.
Tables 8 and 9 show the ranges of 0 to 15 degrees and 75 to 90 degrees in the inclination angle number distribution graphs of the various modified α-type Al ₂ O ₃ layers and reinforced α-type Al ₂ O ₃ layers, respectively. The ratio of the total number of tilt angles existing in the tilt angle section to the entire tilt angle distribution graph is shown.
3 is a graph showing the inclination angle distribution of the reinforced α-type Al ₂ O ₃ layer of the coated cermet tool 4 of the present invention, and FIG. 4 is a graph showing the inclination angle distribution of the modified α-type Al ₂ O ₃ layer. It is.

  Moreover, when the thickness of the constituent layer of the hard coating layer of the present coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 obtained as a result was measured using a scanning electron microscope (longitudinal section measurement). , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.

Next, with respect to the above-described coated cermet tools 1 to 13 of the present invention and the various coated cermet tools 1 to 13 of the present invention, all of them are clamped and clamped to the tip of the tool steel tool by a bolt or a clamp piece. ,
Work material: JIS / SUS304 round bar,
Cutting speed: 360 m / min. ,
Incision: 1.5mm,
Feed: 0.35 mm / rev. ,
Dry continuous high-speed cutting test (normal cutting speed 150 m / min.) Of stainless steel under the following conditions (referred to as cutting conditions A),
Work material: JIS / SS400 lengthwise equidistant 4 round bars with flutes,
Cutting speed: 390 m / min. ,
Incision: 1.5mm,
Feed: 0.3 mm / rev. ,
Dry interrupted high-speed cutting test (normal cutting speed is 200 m / min.) Of mild steel under the conditions (referred to as cutting conditions B),
Work material: JIS / SCMnH1 round bar,
Cutting speed: 380 m / min. ,
Incision: 2.5mm,
Feed: 0.35 mm / rev. ,
The dry continuous high-speed cutting test (normal cutting speed is 250 m / min.) Of high manganese steel under the above conditions (referred to as cutting condition C), and the flank wear width of the cutting edge is generally a cutting tool in any cutting test. The cutting time up to 0.3 mm, which is regarded as a standard for the service life of the steel, was measured. The measurement results are shown in Table 10.

From the results shown in Tables 6 to 10, each of the coated cermet tools 1 to 13 of the present invention is between the Ti compound layer that is the lower layer of the hard coating layer and the modified α-type Al ₂ O ₃ layer that is the upper layer. The intervening reinforced α-type Al ₂ O ₃ layer shows the highest peak in the inclination angle section within the range of 75 to 90 degrees in the inclination angle number distribution graph of the (0001) plane, and this action makes the modified α type the Al ₂ O ₃ layer is sufficiently reinforced now with more excellent high temperature strength, furthermore, the rake face portion and flank portions including at least the cutting edge line portion of the reforming α type the Al ₂ O ₃ layer Combined with the fact that the surface is polished to a surface roughness of Ra: 0.2 μm or less and the effect of suppressing the progress of wear is exerted, especially in high-speed cutting of difficult-to-cut materials in which extremely high cutting resistance is applied to the cutting edge. Chipping at the cutting edge is remarkably suppressed and excellent resistance Whereas shown over a long period of time耗性, without intervening formation of the reinforcing α type the Al ₂ O ₃ layer to the hard coating layer, and a low reforming α-type surface smoothness upper layer the Al ₂ O ₃ layer In the conventional coated cermet tools 1 to 13 constituted by the above, since the high temperature strength of the hard coating layer is insufficient in high-speed cutting of difficult-to-cut materials, combined with the upper layer having low surface smoothness It is clear that chipping occurs at the cutting edge and the service life is reached in a relatively short time.

As described above, the coated cermet tool manufactured by the method of the present invention has a high viscosity in addition to high-speed cutting such as various steels and cast iron, and the cutting tool surface portion at the time of cutting is particularly high. High adhesion to hard coating layer, resulting in excellent wear resistance without chipping even in high-speed cutting of difficult-to-cut materials such as mild steel, stainless steel, and high manganese steel that have extremely high cutting resistance. Since it exhibits excellent cutting performance over a long period of time, it can sufficiently satisfactorily cope with higher performance of the cutting device, labor saving and energy saving of cutting, and lower cost.

Is a schematic diagram illustrating a measurement range of the inclination angle in the case of measuring the crystal grains (0001) plane in the reinforcement α type the Al ₂ O ₃ layer constituting the hard layer of the present invention coated cermet tool. It is a schematic explanatory drawing which shows the measurement range of the inclination angle in the case of measuring the (0001) plane of the crystal grain in the modified α-type Al ₂ O ₃ layer constituting the hard coating layer. The inclination angle frequency distribution graph showing the tilt angle sections of 45 to 90 degrees to the present invention coated cermet reinforced α type constituting the hard layer of the tool 4 Al ₂ O ₃ layer. The inclination angle frequency distribution graph showing the tilt angle sections of 0 to 45 degrees of the modified α type the Al ₂ O ₃ layer constituting the hard layer of the present invention coated cermet tool 4.

Claims (1)

( 1 ) On the surface of a tool base made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
(A -1 ) As a lower layer, it is composed of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride layer, and 3 to 20 μm. A Ti compound layer having a total average layer thickness;
(A -2 ) An α-type crystal structure in a state of chemical vapor deposition interposed between the Ti compound layer as the lower layer and the modified α-type aluminum oxide layer as the upper layer described below as a reinforcing layer. And using a field emission scanning electron microscope, irradiating an electron beam to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the polished surface parallel to the surface of the tool substrate. The inclination angle formed by the normal line of the (0001) plane which is the crystal plane of the crystal grain is measured with respect to the line, and the measurement inclination angle within the range of 45 to 90 degrees out of the measurement inclination angles is set to 0. In the slope angle distribution graph obtained by dividing the pitch every 25 degrees and by counting the frequencies existing in each section, the highest peak exists in the slope angle section within the range of 75 to 90 degrees, and the 75 The sum of the frequencies existing in the range of ~ 90 degrees is the inclination angle The number distribution shows an inclination angle frequency distribution graph in a proportion of 50% or more of the total power in the graph, and the average layer thickness reinforcement α-type aluminum oxide layer having a 0.1～1.9Myuemu,
(A -3 ) Hexagonal crystal having an α-type crystal structure in the state of chemical vapor deposition as an upper layer and existing in a measurement range of a polished surface parallel to the tool substrate surface using a field emission scanning electron microscope By irradiating each crystal grain having a crystal lattice with an electron beam, the inclination angle formed by the normal line of the (0001) plane which is the crystal plane of the crystal grain is measured with respect to the normal line of the polished surface. In the inclination angle number distribution graph formed by dividing the measured inclination angles within the range of 0 to 45 degrees out of the inclination angles for each pitch of 0.25 degrees and totaling the frequencies existing in each section, 0 The highest peak exists in the inclination angle section within the range of -15 degrees, and the total of the frequencies existing within the range of 0-15 degrees occupies a ratio of 50% or more of the entire degrees in the inclination angle frequency distribution graph. An inclination angle number distribution graph is shown, and 1.5-5. A modified α-type aluminum oxide layer having an average layer thickness of 9 μm;
Chemical vapor deposition of the hard coating layer composed of (a-1) to (a-3) above ,
( 2 ) Next , on the entire surface of the modified α-type aluminum oxide layer which is the upper layer of the hard coating layer,
(B-1) The lower layer has an average layer thickness of 0.1 to 3 μm, and
Composition formula: TiO _x ,
, The central part in the thickness direction is measured with an Auger spectrometer, and the atomic ratio is
X: 1.2 to 1.7,
Satisfying titanium oxide layer,
(B-2) The upper layer has an average layer thickness of 0.05 to 2 μm, and
Composition formula: TiN _1-Y (O) _Y ,
[However, (O) indicates the diffused oxygen from the titanium oxide layer, which is the lower layer during the deposition of the upper layer ], and the central part in the thickness direction is also measured with an Auger spectrometer. , Also in atomic ratio,
Y: 0.01 to 0.4
Satisfying titanium oxynitride layer,
In the state where the abrasive layer composed of (b-1) and (b-2) is formed by chemical vapor deposition,
In wet blasting, as a spraying abrasive, a polishing liquid containing 15 to 60% by mass of aluminum oxide fine particles in a proportion of the total amount with water is sprayed,
In the coexistence of pulverized titanium oxide fine particles and pulverized titanium oxynitride fine particles obtained by pulverizing and atomizing the above-mentioned abrasive layer by spraying aluminum oxide fine particles that are spray abrasives, and the aluminum oxide fine particles as spray abrasives, The rake face portion and the flank face portion including at least the cutting edge ridge line portion of the modified α-type aluminum oxide layer constituting the upper layer of the hard coating layer are polished, and the surface roughness of these polished surfaces is compliant with JIS B0601- According to the measurement based on 1994, Ra: 0.2 μm or less,
A method of manufacturing a surface-coated cermet cutting tool that exhibits excellent chipping resistance in a high-speed cutting of difficult-to-cut materials characterized by

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