JP2009056562A - Surface-coated cutting tool - Google Patents
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この発明は、高熱発生を伴い、かつ、切刃部に大きな衝撃的・機械的負荷がかかる鋼や鋳鉄などの高速断続切削加工で、硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具（以下、被覆工具という）に関するものである。 This invention exhibits high chipping resistance and wear resistance with a hard coating layer in high-speed intermittent cutting of steel and cast iron that generate high heat and has a large impact and mechanical load on the cutting edge. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool).
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）いずれも化学蒸着形成された、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層以上からなり、かつ０．１〜１５μｍの合計平均層厚を有するＴｉ化合物層と、組成式：（Ｔｉ１−αＣｒα）ＣＮで表した場合、原子比で、α：０．００５〜０．０５を満足するＴｉとＣｒの複合炭窒化物層からなる下部層、
（ｂ）化学蒸着形成され１〜１５μｍの平均層厚を有するα型のＡｌ2Ｏ3層からなる上部層、
以上（ａ）、（ｂ）で構成された硬質被覆層を備える被覆工具において、
上記（ａ）のＴｉとＣｒの複合炭窒化物層を、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すＴｉとＣｒの複合炭窒化物（以下、改質（Ｔｉ，Ｃｒ）ＣＮで示す）層、
で構成することにより、高速重切削加工ですぐれた耐チッピング性を示すことが知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) Ti compound having a total average layer thickness of 0.1 to 15 μm, which is formed of one or more of TiC layer, TiN layer, TiCN layer, TiCO layer, and TiCNO layer, all formed by chemical vapor deposition And a lower layer composed of a composite carbonitride layer of Ti and Cr satisfying α: 0.005 to 0.05 in atomic ratio when represented by a composition formula: (Ti 1-α Cr α ) CN,
(B) an upper layer comprising an α-type Al 2 O 3 layer formed by chemical vapor deposition and having an average layer thickness of 1 to 15 μm;
In a coated tool provided with the hard coating layer comprised by the above (a) and (b),
Using a field emission scanning electron microscope, the Ti and Cr composite carbonitride layer in (a) above is irradiated with an electron beam on each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. Then, an inclination angle formed by a normal line of the {112} plane which is a crystal plane of the crystal grain is measured with respect to a normal line of the surface-polished surface, and is within a range of 0 to 45 degrees out of the measurement inclination angles. In the inclination angle distribution graph that is obtained by classifying the measured inclination angles in each of the pitches of 0.25 degrees and summing up the frequencies existing in each section, the inclination angle section in the range of 0 to 10 degrees is the highest. A composite of Ti and Cr showing a slope angle distribution graph in which a peak is present and the total number of frequencies within the range of 0 to 10 degrees occupies 45% or more of the whole frequency in the slope angle distribution graph Carbonitride (hereinafter referred to as modified (Ti, Cr) CN) ) Layer,
It is known that it exhibits excellent chipping resistance in high-speed heavy cutting.
そして、上記改質（Ｔｉ，Ｃｒ）ＣＮは、
反応ガス組成（容量％）：ＴｉＣｌ４：２〜１０％、ＣｒＣｌ３：０．０１〜０．５％、ＣＨ３ＣＮ：０．５〜３％、Ｎ2：３０〜４５％、Ａｒ：残り、
反応雰囲気温度：９００〜１０２０℃、
反応雰囲気圧力：６〜２０ｋＰａ、
の条件で化学蒸着することにより形成されることが知られている。
The modified (Ti, Cr) CN is
Reaction gas composition (volume%): TiCl 4 : 2 to 10%, CrCl 3 : 0.01 to 0.5%, CH 3 CN: 0.5 to 3%, N 2 : 30 to 45%, Ar: remaining ,
Reaction atmosphere temperature: 900-1020 ° C.
Reaction atmosphere pressure: 6-20 kPa,
It is known that it is formed by chemical vapor deposition under the following conditions.
また、ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、
（ａ）第１層として、化学蒸着形成されたＴｉＮ層、ＴｉＣＮ層からなり、０．１〜１μｍの平均層厚を有する第１密着接合層、
（ｂ）第２層として、化学蒸着形成され、
組成式：（Ｔｉ１−βＺｒβ）ＣＮで表した場合、原子比で、β：０．０２〜０．２５を満足し、かつ２．５〜１５μｍの平均層厚を有するＴｉとＺｒの複合炭窒化物［以下、（Ｔｉ，Ｚｒ）ＣＮで示す］層、
（ｃ）第３層として、ＴｉＣＯ層、ＴｉＣＮＯ層からなり、０．１〜１μｍの平均層厚を有する第２密着接合層、
（ｄ）第４層として、化学蒸着形成されたＡｌ2Ｏ3層からなり、かつ１〜１５μｍの平均層厚を有する高温硬質層、
以上（ａ）〜（ｄ）で構成された硬質被覆層を形成してなる被覆工具が知られており、この被覆工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられていることも知られている。
(A) As the first layer, a first adhesion bonding layer composed of a TiN layer formed by chemical vapor deposition and a TiCN layer, and having an average layer thickness of 0.1 to 1 μm,
(B) The second layer is formed by chemical vapor deposition,
When represented by the composition formula: (Ti 1-β Zr β ) CN, the atomic ratio of Ti and Zr satisfying β: 0.02 to 0.25 and an average layer thickness of 2.5 to 15 μm. A composite carbonitride [hereinafter referred to as (Ti, Zr) CN] layer;
(C) As the third layer, a second adhesive bonding layer comprising an TiCO layer and a TiCNO layer and having an average layer thickness of 0.1 to 1 μm,
(D) As the fourth layer, a high-temperature hard layer comprising an Al 2 O 3 layer formed by chemical vapor deposition and having an average layer thickness of 1 to 15 μm,
A coated tool formed by forming a hard coating layer composed of the above (a) to (d) is known, and this coated tool is used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is also known that
近年の切削装置の高性能化はめざましく、一方で切削加工における省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削効率の向上を目的として、切削速度を高速化する傾向にあるが、上記の従来被覆工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを、高熱発生を伴い、かつ、切刃部に大きな衝撃的・機械的負荷がかかる鋼や鋳鉄などの高速断続切削加工に用いた場合には、硬質被覆層の下部層を構成するＴｉ化合物層および改質（Ｔｉ，Ｃｒ）ＣＮ層が高温強度を有しチッピングの発生を抑制し、また、同上部層のＡｌ2Ｏ3層が高温硬さを具備するものの、耐摩耗性が十分であるとはいえず、また、前記従来の（Ｔｉ，Ｚｒ）ＣＮ層についても、耐熱性が不十分であるために切削加工時の高熱発生によって熱塑性変形、偏摩耗を生じやすく、そのため、耐摩耗性が低下し比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been remarkable, while there has been a strong demand for labor saving and energy saving in cutting, as well as cost reduction, and along with this, the tendency to increase cutting speed for the purpose of improving cutting efficiency However, in the above-mentioned conventional coated tool, there is no problem when it is used for continuous cutting or intermittent cutting under normal conditions such as steel or cast iron, but this is accompanied by high heat generation, and When used for high-speed intermittent cutting of steel or cast iron, which has a large impact and mechanical load on the cutting edge, Ti compound layer and modified (Ti, Cr) that constitute the lower layer of the hard coating layer The CN layer has high-temperature strength and suppresses the occurrence of chipping, and although the upper Al 2 O 3 layer has high-temperature hardness, it cannot be said that the wear resistance is sufficient. For the conventional (Ti, Zr) CN layer Thermal plastic deformation by high heat generation during cutting because the heat resistance is insufficient, prone to uneven wear, therefore, the wear resistance is at present, leads to reduced relatively short time service life.
そこで、本発明者等は、上述のような観点から、上記の被覆工具の硬質被覆層の特に耐摩耗性の向上をはかるべく、これの下部層である（Ｔｉ，Ｚｒ）ＣＮ層に着目し、研究を行った結果、
（ａ）従来被覆工具の硬質被覆層において、下部層を構成する一つの層である（Ｔｉ，Ｚｒ）ＣＮ層は、例えば、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＴｉＣｌ４：１〜５％、ＺｒＣｌ４：０．１〜１％、ＣＨ３ＣＮ：０．６〜５％、Ｎ2：２５〜４５％、Ｈ2：残り、
反応雰囲気温度：７５０〜９８０℃、
反応雰囲気圧力：２．７〜１３．５ｋＰａ、
の条件（通常条件という）で蒸着形成されるが、これを、
反応ガス組成：容量％で、ＴｉＣｌ４：１０〜１５％、ＺｒＣｌ４：０．５〜３．５％、ＣＨ３ＣＮ：３〜８％、Ｎ2：２０〜４０％、ＨＣｌ：０．５〜２％、Ｈ2：残り、
反応雰囲気温度：８００〜９００℃、
反応雰囲気圧力：５〜２０ｋＰａ、
の条件、すなわち上記の通常条件に比して、反応ガス成分のＴｉＣｌ４およびＣＨ３ＣＮの含有割合を多くし、さらに、ＨＣｌを加えた条件で蒸着形成して、
組成式：（Ｔｉ１−ＸＺｒＸ）ＣＮ（ただし、原子比で、Ｘ：０．０２〜０．２５）を満足する（Ｔｉ，Ｚｒ）ＣＮ層を形成すると、この結果の（Ｔｉ，Ｚｒ）ＣＮ層（以下、改質（Ｔｉ，Ｚｒ）ＣＮ層という）は、上記の従来（Ｔｉ，Ｚｒ）ＣＮ層に比して一段とすぐれた耐熱性を有すること。
In view of the above, the present inventors have focused on the (Ti, Zr) CN layer, which is the lower layer of the hard coating layer of the above-mentioned coated tool, in order to improve particularly the wear resistance. , As a result of research,
(A) In the hard coating layer of the conventional coated tool, the (Ti, Zr) CN layer which is one layer constituting the lower layer is, for example, in a normal chemical vapor deposition apparatus.
Reaction gas composition: by volume%, TiCl 4: 1~5%, ZrCl 4: 0.1~1%, CH 3 CN: 0.6~5%, N 2: 25~45%, H 2: remainder,
Reaction atmosphere temperature: 750-980 ° C.
Reaction atmosphere pressure: 2.7 to 13.5 kPa,
It is formed by vapor deposition under the conditions (called normal conditions).
Reaction gas composition: by volume%, TiCl 4: 10~15%, ZrCl 4: 0.5~3.5%, CH 3 CN: 3~8%, N 2: 20~40%, HCl: 0.5 ~2%, H 2: remainder,
Reaction atmosphere temperature: 800 to 900 ° C.
Reaction atmosphere pressure: 5 to 20 kPa,
In comparison with the above-mentioned conditions, that is, the above-mentioned normal conditions, the content ratio of the reaction gas components TiCl 4 and CH 3 CN is increased, and further, vapor deposition is performed under the condition of adding HCl,
When a (Ti, Zr) CN layer satisfying the composition formula: (Ti 1-X Zr X ) CN (wherein the atomic ratio is X: 0.02 to 0.25) is formed, the resulting (Ti, Zr ) The CN layer (hereinafter referred to as a modified (Ti, Zr) CN layer) has heat resistance that is much higher than that of the conventional (Ti, Zr) CN layer.
（ｂ）上記の従来（Ｔｉ，Ｚｒ）ＣＮ層と上記（ａ）の改質（Ｔｉ，Ｚｒ）ＣＮ層は、いずれも同様の結晶構造、すなわち格子点にＴｉ、Ｚｒ、炭素（Ｃ）、および窒素（Ｎ）からなる構成原子がそれぞれ存在するＮａＣｌ型面心立方晶の結晶構造を有するが、それぞれの層について、
電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に概略説明図で例示される通り、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１１｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記従来（Ｔｉ，Ｚｒ）ＣＮ層は、図４に例示される通り、｛１１１｝面の測定傾斜角の分布が０〜４５度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記改質（Ｔｉ，Ｚｒ）ＣＮ層は、図３に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、そしてこのような場合に、改質（Ｔｉ，Ｚｒ）ＣＮ層にはクーリングクラックが均一に分散し、これによって、Ｚｒ含有量を増加したことによる改質（Ｔｉ，Ｚｒ）ＣＮ層の高温強度の低下を抑制することができ、しかも、このシャープな最高ピークは、グラフ横軸の傾斜角区分に現れる高さおよび傾斜角区分位置が前記改質（Ｔｉ，Ｚｒ）ＣＮ層におけるＺｒの含有割合を調整することにより変化すること。
(B) The conventional (Ti, Zr) CN layer and the modified (Ti, Zr) CN layer of (a) have the same crystal structure, that is, Ti, Zr, carbon (C) at the lattice points, And a crystal structure of a NaCl type face centered cubic crystal in which constituent atoms composed of nitrogen (N) are present,
Using a field emission scanning electron microscope, as illustrated in the schematic explanatory diagrams of FIGS. 1A and 1B, the electron beam is individually applied to each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. Is measured with respect to the normal of the surface polished surface, and the tilt angle formed by the normal of the {111} plane that is the crystal plane of the crystal grain is measured. When the measured inclination angle in the range of 0.25 degrees is divided for each pitch of 0.25 degrees and the inclination angle number distribution graph is formed by counting the frequencies existing in each division, the conventional (Ti, Zr) As illustrated in FIG. 4, the CN layer exhibits an unbiased inclination angle number distribution graph within the range of the measured inclination angle of the {111} plane within the range of 0 to 45 degrees, whereas the modification ( As illustrated in FIG. 3, the Ti, Zr) CN layer has a sharp peak at a specific position in the tilt angle section. A peak appears, and in such a case, cooling cracks are uniformly dispersed in the modified (Ti, Zr) CN layer, and thereby the modified (Ti, Zr) CN layer due to an increase in the Zr content. In addition, the sharp maximum peak has a height that appears in the tilt angle section of the horizontal axis of the graph and the position of the tilt angle section in the Zr in the modified (Ti, Zr) CN layer. It changes by adjusting the content ratio.
（ｃ）上記の通り、上記改質（Ｔｉ，Ｚｒ）ＣＮ層の形成に際して、層中のＺｒ含有割合を、Ｔｉとの合量に占める割合（原子比）で０．０２〜０．２５とすることによって、前記改質（Ｔｉ，Ｚｒ）ＣＮ層の傾斜角度数分布グラフで、シャープな最高ピークが傾斜角区分の０〜１０度の範囲内に現れ、かつ、前記０〜１０度の範囲内に存在する度数割合が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すようになるのであり、したがって、前記改質（Ｔｉ，Ｚｒ）ＣＮ層中のＺｒ含有割合が前記の範囲から低い方に外れても、あるいは高い方に外れても、傾斜角度数分布グラフにおけるシャープな最高ピークが傾斜角区分の０〜１０度の範囲から外れ、かつ、前記０〜１０度の範囲内に存在する度数数割合も４５％未満になってしまい、この場合は一段の耐熱性向上効果を期待できないばかりか、Ｚｒ含有割合を増加したことによる高温強度の低下をクーリングクラックの均一分散によって抑制することはできないこと。
つまり、上記改質（Ｔｉ，Ｚｒ）ＣＮ層のＺｒ成分は、Ｔｉとの合量に占める割合（原子比）で０．０２（２原子％）以上で所望の耐熱性向上効果が現れるが、その含有割合が０．２５（２５原子％）を越えると、高熱発生を伴う高速切削加工では、改質（Ｔｉ，Ｚｒ）ＣＮ層は急激に軟化し、熱塑性変形、偏摩耗を生じやすくなることから、その含有割合は、Ｔｉとの合量に占める割合（原子比）で０．０２〜０．２５とする必要がある。
(C) As described above, when forming the modified (Ti, Zr) CN layer, the Zr content ratio in the layer is 0.02 to 0.25 as a ratio (atomic ratio) to the total amount with Ti. By doing this, in the gradient angle distribution graph of the modified (Ti, Zr) CN layer, a sharp maximum peak appears in the range of 0 to 10 degrees of the tilt angle section, and the range of 0 to 10 degrees In the modified (Ti, Zr) CN layer, the frequency ratio existing in the tilt angle frequency distribution graph occupies a ratio of 45% or more of the entire frequency in the tilt angle frequency distribution graph. Even if the Zr content ratio is out of the above range, the sharp maximum peak in the tilt angle distribution graph is out of the range of 0 to 10 degrees of the tilt angle section, and Within the range of 0 to 10 degrees The frequency ratio is also less than 45%. In this case, not only can the heat resistance improvement effect be further improved, but also the decrease in high-temperature strength due to the increase in the Zr content ratio should be suppressed by uniform distribution of cooling cracks. What you can't do.
That is, the Zr component of the modified (Ti, Zr) CN layer has a desired heat resistance improvement effect when the ratio (atomic ratio) to the total amount with Ti is 0.02 (2 atomic%) or more. When the content ratio exceeds 0.25 (25 atomic%), the modified (Ti, Zr) CN layer softens rapidly during high-speed cutting with high heat generation, and it is likely to cause thermoplastic deformation and uneven wear. Therefore, the content ratio needs to be 0.02 to 0.25 in the ratio (atomic ratio) to the total amount with Ti.
（ｄ）また、従来被覆工具の硬質被覆層において、（Ｔｉ，Ｚｒ）ＣＮ層と同様に下部層を構成する層である改質（Ｔｉ，Ｃｒ）ＣＮ層は、例えば、通常の蒸着装置にて、
反応ガス組成（容量％）：ＴｉＣｌ４：２〜１０％、ＣｒＣｌ３：０．０１〜０．５％、ＣＨ３ＣＮ：０．５〜３％、Ｎ2：３０〜４５％、Ａｒ：残り、
反応雰囲気温度：９００〜１０２０℃、
反応雰囲気圧力：６〜２０ｋＰａ、
の条件で化学蒸着することにより、
組成式：（Ｔｉ１−ＹＣｒＹ）ＣＮで表した場合、原子比で、Ｙ：０．００５〜０．０５、を満足する（Ｔｉ，Ｃｒ）ＣＮ層を形成することができ、この結果の（Ｔｉ，Ｃｒ）ＣＮ層（改質（Ｔｉ，Ｃｒ）ＣＮ層）は、すぐれた高温強度を有すること。
(D) Further, in the hard coating layer of the conventional coated tool, the modified (Ti, Cr) CN layer which is a layer constituting the lower layer in the same manner as the (Ti, Zr) CN layer is applied to, for example, a normal vapor deposition apparatus. And
Reaction gas composition (volume%): TiCl 4 : 2 to 10%, CrCl 3 : 0.01 to 0.5%, CH 3 CN: 0.5 to 3%, N 2 : 30 to 45%, Ar: remaining ,
Reaction atmosphere temperature: 900-1020 ° C.
Reaction atmosphere pressure: 6-20 kPa,
By chemical vapor deposition under the conditions of
When expressed by the composition formula: (Ti 1-Y Cr Y ) CN, a (Ti, Cr) CN layer satisfying Y: 0.005 to 0.05 in atomic ratio can be formed. The (Ti, Cr) CN layer (modified (Ti, Cr) CN layer) has excellent high-temperature strength.
（ｅ）そして、上記（ｄ）の改質（Ｔｉ，Ｃｒ）ＣＮ層は、格子点にＴｉ、Ｃｒ、炭素（Ｃ）、および窒素（Ｎ）からなる構成原子がそれぞれ存在するＮａＣｌ型面心立方晶の結晶構造を有し、図２（ａ），（ｂ）に概略説明図で示されるように、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すこと。 (E) The modified (Ti, Cr) CN layer of (d) is a NaCl-type face center in which constituent atoms composed of Ti, Cr, carbon (C), and nitrogen (N) are present at lattice points. Cubic crystals having a cubic crystal structure and existing within the measurement range of the surface polished surface using a field emission scanning electron microscope as shown in the schematic explanatory diagrams of FIGS. 2 (a) and 2 (b) The crystal grains having a lattice are irradiated with an electron beam, and the inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the surface-polished surface. In the inclination angle number distribution graph formed by dividing the measured inclination angles within the range of 0 to 45 degrees out of the inclination angles for each pitch of 0.25 degrees and totaling the frequencies existing in each section, 0 The highest peak exists in the tilt angle section within the range of -10 degrees, and the 0-10 The total of the frequencies present in the range of, to exhibit an inclination angle frequency distribution graph in a proportion of 45% or more of the total power at the inclination angle frequency distribution graph.
（ｆ）上記の改質（Ｔｉ，Ｃｒ）ＣＮ層の形成に際して、層中のＣｒ含有割合を、上記の通りＴｉとの合量に占める原子比で０．００５〜０．０５とすることによって、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占めるようになるのであり、したがって、前記（Ｔｉ，Ｃｒ）ＣＮ層中のＣｒ含有割合が前記の範囲から低い方に外れても、あるいは高い方に外れても、０〜１０度の範囲内に存在する度数の合計は４５％未満となってしまい、この場合は高温強度の向上を図ることができないこと。 (F) When forming the above-described modified (Ti, Cr) CN layer, the Cr content ratio in the layer is set to 0.005 to 0.05 as the atomic ratio in the total amount with Ti as described above. The total of the frequencies existing in the range of 0 to 10 degrees occupies a ratio of 45% or more of the total frequencies in the inclination angle frequency distribution graph. Therefore, in the (Ti, Cr) CN layer, Even if the Cr content ratio is out of the above range or out of the above range, the total frequency existing in the range of 0 to 10 degrees is less than 45%, and in this case, the temperature is high. Inability to improve strength.
（ｇ）硬質被覆層の上部層がＡｌ2Ｏ3層、下部層がＴｉ化合物層と改質（Ｔｉ，Ｚｒ）ＣＮ層と改質（Ｔｉ，Ｃｒ）ＣＮ層からなり、かつ、該改質（Ｔｉ，Ｚｒ）ＣＮ層が、２〜１０μｍの平均層厚を有し、｛１１１｝面の測定傾斜角の分布が０〜１０度の範囲内に傾斜角区分の最高ピークが現れ、かつ前記０〜１０度の範囲内に存在する度数割合が４５％以上を占め、さらに、該改質（Ｔｉ，Ｃｒ）ＣＮ層が、２〜１０μｍの平均層厚を有し、｛１１２｝面の測定傾斜角の分布が０〜１０度の範囲内に傾斜角区分の最高ピークが現れ、かつ前記０〜１０度の範囲内に存在する度数割合が４５％以上を占める被覆工具は、特に、改質（Ｔｉ，Ｚｒ）ＣＮ層が従来（Ｔｉ，Ｚｒ）ＣＮ層に比して一段と高い耐熱性を有し、また、同下部層である改質（Ｔｉ，Ｃｒ）ＣＮ層がすぐれた高温強度と耐熱性を、また、同上部層であるＡｌ2Ｏ3層がすぐれた高温硬さを具備することと相俟って、特に高熱発生を伴い、切刃部に大きな衝撃的・機械的負荷がかかる高速断続切削加工でも、前記硬質被覆層がすぐれた耐熱性を発揮し、熱塑性変形、偏摩耗を生じることがないため、長期に亘ってすぐれた耐チッピング性と耐摩耗性を示すようになること。
以上（ａ）〜（ｇ）に示される研究結果を得たのである。
(G) The upper layer of the hard coating layer is an Al 2 O 3 layer, the lower layer is composed of a Ti compound layer, a modified (Ti, Zr) CN layer, and a modified (Ti, Cr) CN layer, and the modified layer The (Ti, Zr) CN layer has an average layer thickness of 2 to 10 μm, and the distribution of the measured inclination angle of the {111} plane has the highest peak of the inclination angle section within the range of 0 to 10 degrees, and The frequency ratio existing in the range of 0 to 10 degrees occupies 45% or more, and the modified (Ti, Cr) CN layer has an average layer thickness of 2 to 10 μm, and measurement of {112} plane The coated tool in which the highest peak of the tilt angle section appears in the range of the tilt angle distribution in the range of 0 to 10 degrees and the frequency ratio existing in the range of 0 to 10 degrees accounts for 45% or more is particularly improved. The (Ti, Zr) CN layer has a much higher heat resistance than the conventional (Ti, Zr) CN layer, and is also the lower layer. Quality (Ti, Cr) and high-temperature strength and heat resistance CN layer is excellent, also I cooperation with a can having a high-temperature hardness of the Al 2 O 3 layer is the top layer is excellent, especially high heat generation As a result, even in high-speed intermittent cutting where a large impact / mechanical load is applied to the cutting edge, the hard coating layer exhibits excellent heat resistance and does not cause thermoplastic deformation or uneven wear. To show excellent chipping resistance and wear resistance.
The research results shown in (a) to (g) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、
「 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に上部層と下部層とからなる硬質被覆層を蒸着形成した表面被覆切削工具において、
（ａ）上記上部層は、化学蒸着で形成された１〜１５μｍの平均層厚を有する酸化アルミニウム層からなり、
（ｂ）上記下部層は、４〜２０μｍの合計平均層厚を有し、いずれも化学蒸着で形成されたＴｉ化合物層と、ＴｉとＣｒの複合炭窒化物層と、ＴｉとＺｒの複合炭窒化物層とからなり、
（ｃ）上記Ｔｉ化合物層は、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、
（ｄ）上記ＴｉとＺｒの複合炭窒化物層は、２〜１０μｍの平均層厚を有し、かつ、
組成式：（Ｔｉ１−ＸＺｒＸ）ＣＮ
で表した場合、０．０２≦Ｘ≦０．２５（但し、原子比）を満足するＴｉとＺｒの複合炭窒化物層であり、
さらに、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１１｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すＴｉとＺｒの複合炭窒化物層で形成され、
（ｅ）上記ＴｉとＣｒの複合炭窒化物層は、２〜１０μｍの平均層厚を有し、かつ、
組成式：（Ｔｉ１−ＹＣｒＹ）ＣＮ
で表した場合、０．００５≦Ｙ≦０．０５（但し、原子比）を満足するＴｉとＣｒの複合炭窒化物層であり、
さらに、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すＴｉとＣｒの複合炭窒化物層で形成されている、
ことを特徴とする表面被覆切削工具（被覆工具）。」
に特徴を有するものである。
This invention was made based on the above research results,
In a surface-coated cutting tool in which a hard coating layer composed of an upper layer and a lower layer is vapor-deposited on the surface of a tool base composed of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
(A) The upper layer is made of an aluminum oxide layer having an average layer thickness of 1 to 15 μm formed by chemical vapor deposition,
(B) The lower layer has a total average layer thickness of 4 to 20 μm, all of which are a Ti compound layer formed by chemical vapor deposition, a composite carbonitride layer of Ti and Cr, and a composite carbon of Ti and Zr. A nitride layer,
(C) The Ti compound layer is composed of one or more of a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride layer,
(D) The Ti and Zr composite carbonitride layer has an average layer thickness of 2 to 10 μm, and
Composition formula: (Ti 1-X Zr X ) CN
Is a composite carbonitride layer of Ti and Zr that satisfies 0.02 ≦ X ≦ 0.25 (however, atomic ratio),
Further, by using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the normal line of the surface polishing surface is The inclination angle formed by the normal line of the {111} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set every pitch of 0.25 degrees. In the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak is present in the inclination angle section in the range of 0 to 10 degrees, and within the range of 0 to 10 degrees. Is formed of a composite carbonitride layer of Ti and Zr showing a tilt angle number distribution graph that occupies a ratio of 45% or more of the entire frequency in the tilt angle frequency distribution graph,
(E) The Ti and Cr composite carbonitride layer has an average layer thickness of 2 to 10 μm, and
Composition formula: (Ti 1-Y Cr Y ) CN
Is a composite carbonitride layer of Ti and Cr that satisfies 0.005 ≦ Y ≦ 0.05 (however, atomic ratio),
Further, by using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the normal line of the surface polishing surface is The inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set every pitch of 0.25 degrees. In the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak is present in the inclination angle section in the range of 0 to 10 degrees, and within the range of 0 to 10 degrees. Is formed of a composite carbonitride layer of Ti and Cr showing an inclination angle distribution graph that occupies a ratio of 45% or more of the entire frequency in the inclination angle distribution graph.
A surface-coated cutting tool (coated tool). "
It has the characteristics.
つぎに、この発明の被覆工具の硬質被覆層の構成層について、上記の通りに数値限定した理由を以下に説明する。
（ａ）下部層
下部層を構成するＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなるＴｉ化合物層は、それ自体が所定の高温強度を有し、これの存在によって硬質被覆層が高温強度を具備するようになるほか、工具基体と改質（Ｔｉ、Ｚｒ）ＣＮ層あるいは改質（Ｔｉ，Ｃｒ）ＣＮ層、さらには、上部層であるＡｌ2Ｏ3層のいずれとも強固に密着し、硬質被覆層の工具基体に対する密着性向上に寄与する作用をもつが、下部層の合計平均層厚が４μｍ未満では、前記作用を十分に発揮させることができず、一方その合計平均層厚が２０μｍを越えると、高速断続切削加工で熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、下部層の合計平均層厚を４〜２０μｍと定めた。
Next, the reason why the constituent layers of the hard coating layer of the coated tool of the present invention are numerically limited as described above will be described below.
(A) Lower layer The Ti compound layer composed of one or more of the TiC layer, TiN layer, TiCN layer, TiCO layer, and TiCNO layer constituting the lower layer itself has a predetermined high-temperature strength. In addition to the fact that the hard coating layer has high-temperature strength due to the presence thereof, the tool base and the modified (Ti, Zr) CN layer or modified (Ti, Cr) CN layer, and further the upper layer. It adheres firmly to any of the Al 2 O 3 layers and has an effect of improving the adhesion of the hard coating layer to the tool substrate. However, when the total average layer thickness of the lower layer is less than 4 μm, the above-described effect is sufficiently exhibited. On the other hand, if the total average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation by high-speed interrupted cutting, and this causes uneven wear. It was determined to be 20 μm.
（ｂ）下部層の改質（Ｔｉ，Ｚｒ）ＣＮ層
上記の改質（Ｔｉ，Ｚｒ）ＣＮ層の傾斜角度数分布グラフの傾斜角区分における最高ピーク位置および前記最高ピークが存在する所定の傾斜角区分内に存在する度数割合は、上記の通り層中のＺｒ含有割合（Ｘ値）をＴｉとの合量に占める原子比で、０．０２〜０．２５とすることによって、０〜１０度の範囲内の傾斜角区分に最高ピークを存在させ、かつ前記０〜１０度の範囲内に存在する度数割合を、傾斜角度数分布グラフにおける度数全体の４５％以上とすることができるものであり、したがって、その含有割合が０．０２未満でも、０．２５を越えても、前記最高ピーク位置の現れる傾斜角区分が０〜１０度の範囲内から外れ、さらに前記０〜１０度の範囲内に存在する度数割合は４５％未満となってしまい、そのため、高温強度の低下をクーリングクラックの均一分散により抑制することができなくなるばかりか、高速切削加工におけるすぐれた耐熱性向上効果を確保することができなくなり、熱塑性変形の発生あるいは偏摩耗の発生によって耐摩耗性の劣ったものとなる。
また、改質（Ｔｉ，Ｚｒ）ＣＮ層におけるＣ成分には層の硬さを向上させ、一方Ｎ成分には高温強度を向上させる作用があり、これら両成分を共存含有することにより高い硬さとすぐれた強度を具備するようになるものであり、したがって、層中のＮ成分の含有割合が、Ｃ成分との合量に占める原子比で０．３５未満では所望の強度を確保することができず、一方その含有割合が同じく０．５５を越えると、相対的にＣ成分の含有割合が少なくなり過ぎて、所望の高硬度が得られなくなることから、Ｃ成分との合量に占めるＮ成分の含有割合は、原子比で０．３５〜０．５５とすることが望ましい。
このように前記改質（Ｔｉ，Ｚｒ）ＣＮ層は、従来の（Ｔｉ，Ｚｒ）ＣＮ層に比して、一段とすぐれた耐熱性を有するようになるが、その平均層厚が２μｍ未満では所望のすぐれた耐熱性向上効果を硬質被覆層に十分に具備せしめることができず、一方その平均層厚が１０μｍを越えると、チッピングが発生し易くなることから、その平均層厚を２〜１０μｍと定めた。
(B) Modified (Ti, Zr) CN layer of lower layer The highest peak position in the inclination angle section of the inclination angle number distribution graph of the modified (Ti, Zr) CN layer and a predetermined inclination where the highest peak exists The frequency ratio existing in the corner section is 0 to 10 by adjusting the Zr content ratio (X value) in the layer to the total amount with Ti as 0.02 to 0.25 as described above. The highest peak exists in the inclination angle section within the range of degrees, and the frequency ratio existing in the range of 0 to 10 degrees can be 45% or more of the entire degrees in the inclination angle distribution graph. Therefore, even if the content ratio is less than 0.02 or exceeds 0.25, the inclination angle section at which the highest peak position appears is out of the range of 0 to 10 degrees, and further the range of 0 to 10 degrees. The frequency ratio that exists in is not 45% As a result, it is not only possible to suppress the decrease in high-temperature strength by uniform distribution of cooling cracks, but also it is impossible to ensure an excellent heat resistance improvement effect in high-speed cutting, and the occurrence of thermoplastic deformation. Alternatively, the wear resistance is inferior due to the occurrence of uneven wear.
In addition, the C component in the modified (Ti, Zr) CN layer improves the hardness of the layer, while the N component has the effect of improving the high-temperature strength. Therefore, if the content ratio of the N component in the layer is less than 0.35 in terms of the atomic ratio to the total amount with the C component, the desired strength can be secured. On the other hand, if the content ratio similarly exceeds 0.55, the content ratio of the C component is relatively decreased, and the desired high hardness cannot be obtained. Therefore, the N component occupies the total amount with the C component. The content ratio of is desirably 0.35 to 0.55 in atomic ratio.
As described above, the modified (Ti, Zr) CN layer has higher heat resistance than the conventional (Ti, Zr) CN layer. However, if the average layer thickness is less than 2 μm, it is desirable. However, if the average layer thickness exceeds 10 μm, chipping is likely to occur. Therefore, the average layer thickness is 2 to 10 μm. Determined.
（ｃ）下部層の改質（Ｔｉ，Ｃｒ）ＣＮ層
改質（Ｔｉ，Ｃｒ）ＣＮ層については、上記の通り、層中のＣｒ含有割合（Ｙ値）をＴｉとの合量に占める原子比で、０．００５〜０．０５とすることによって、｛１１２｝面の法線がなす傾斜角を集計してなる傾斜角度数分布グラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占め、かつ、すぐれた高温強度を具備する改質（Ｔｉ，Ｃｒ）ＣＮ層を蒸着形成することができるが、その平均層厚が２μｍ未満では所望のすぐれた高温強度向上効果を発揮することができず、一方その平均層厚が１０μｍを越えると、偏摩耗の原因となる熱塑性変形が発生し易くなり、摩耗が加速するようになることから、その平均層厚を２〜１０μｍと定めた。
(C) Lower layer modified (Ti, Cr) CN layer As for the modified (Ti, Cr) CN layer, as described above, the Cr content ratio (Y value) in the layer accounts for the total amount of Ti In the inclination angle number distribution graph obtained by summing up the inclination angles formed by the normal lines of the {112} plane by setting the ratio to 0.005 to 0.05, the inclination angle is in the range of 0 to 10 degrees. The highest peak is present, and the sum of the frequencies within the range of 0 to 10 degrees occupies a ratio of 45% or more of the entire frequencies in the inclination angle frequency distribution graph, and has a high temperature strength. (Ti, Cr) CN layer can be formed by vapor deposition, but if the average layer thickness is less than 2 μm, the desired excellent high-temperature strength improvement effect cannot be exhibited, while the average layer thickness exceeds 10 μm. And thermoplastic deformation that causes uneven wear Easily, since it becomes worn accelerates, it determined the average layer thickness and 2 to 10 [mu] m.
（ｄ）上部層のＡｌ2Ｏ3層
Ａｌ2Ｏ3層は、すぐれた高温硬さを有し、硬質被覆層の耐摩耗性向上に寄与するが、その平均層厚が１μｍ未満では、硬質被覆層に十分な耐摩耗性を発揮せしめることができず、一方その平均層厚が１５μｍを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を１〜１５μｍと定めた。
(D) the Al 2 O 3 layer the Al 2 O 3 layer of the upper layer has excellent high-temperature hardness, contributes to improvement in wear resistance of the hard coating layer, the average layer thickness is less than 1 [mu] m, hard Since the coating layer cannot exhibit sufficient wear resistance, on the other hand, if the average layer thickness exceeds 15 μm, chipping tends to occur. Therefore, the average layer thickness is set to 1 to 15 μm. It was.
なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を最表面層として、必要に応じて蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 In addition, for the purpose of identification before and after the use of the cutting tool, the TiN layer having a golden color tone may be vapor-deposited as necessary, but the average layer thickness in this case is 0.1 to 1 μm may be sufficient, and if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.
この発明の被覆工具は、高熱発生を伴い、かつ、切刃部に大きな衝撃的・機械的負荷がかかる鋼や鋳鉄などの高速断続切削加工でも、硬質被覆層の下部層のうちの改質（Ｔｉ，Ｃｒ）ＣＮ層が、すぐれた高温強度を有することによって耐チッピング性を向上させ、また、改質（Ｔｉ，Ｚｒ）ＣＮ層が一段とすぐれた耐熱性と高温強度を有し、熱塑性変形、偏摩耗の発生を抑制することによって、硬質被覆層はより一段とすぐれた耐摩耗性を示すものとなる。 The coated tool of the present invention is a modification of the lower layer of the hard coating layer even in high-speed intermittent cutting such as steel or cast iron that involves high heat generation and a large impact / mechanical load on the cutting edge ( (Ti, Cr) CN layer has excellent high temperature strength to improve chipping resistance, and modified (Ti, Zr) CN layer has much higher heat resistance and high temperature strength, thermoplastic deformation, By suppressing the occurrence of uneven wear, the hard coating layer exhibits even better wear resistance.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも０．５〜３．５μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で４０時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０８ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４１２に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, all having an average particle diameter of 0.5 to 3.5 μm, and Co powder is prepared, and these raw material powders are blended in the blending composition shown in Table 1. Further, wax is added, ball mill mixed in acetone for 40 hours, dried under reduced pressure, and then compacted in a predetermined shape at a pressure of 98 MPa. The green compact is press-molded into a body, vacuum-sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa, and after sintering, the cutting edge portion has R: 0 Tool bodies A to F made of a WC-base cemented carbide having a throwaway tip shape defined in ISO · CNMG12041 were manufactured by performing a honing process of 0.08 mm.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比で、ＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで４０時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０８ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 Further, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, mix these raw material powders with the composition shown in Table 2, wet mix for 40 hours with a ball mill, dry, and press-mold into green compact with 98 MPa pressure The green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion is subjected to a honing process of R: 0.08 mm. Tool bases a to f made of TiCN-based cermet having a chip shape conforming to ISO standards / CNMG 120212 were formed.
つぎに、これらの工具基体Ａ〜Ｅおよび工具基体ａ〜ｅの表面に、通常の化学蒸着装置を用い、硬質被覆層の下部層として、Ｔｉ化合物層、改質（Ｔｉ，Ｃｒ）ＣＮ層および改質（Ｔｉ，Ｚｒ）ＣＮ層からなる下部層を表３〜５に示される条件で、表６に示される組み合わせおよび目標層厚で蒸着形成し、ついで同じく表３に示される条件にて、上部層としてのＡｌ2Ｏ3層を同じく表６に示される組み合わせで、かつ目標層厚で蒸着形成することにより本発明被覆工具１〜１３をそれぞれ製造した。 Next, on the surfaces of these tool bases A to E and tool bases a to e, a normal chemical vapor deposition apparatus is used, and as a lower layer of the hard coating layer, a Ti compound layer, a modified (Ti, Cr) CN layer, and A lower layer composed of a modified (Ti, Zr) CN layer is formed by vapor deposition with the combinations and target layer thicknesses shown in Table 6 under the conditions shown in Tables 3 to 5, and then also under the conditions shown in Table 3. The coated tools 1 to 13 of the present invention were manufactured by vapor-depositing Al 2 O 3 layers as upper layers in the same combination as shown in Table 6 and with a target layer thickness.
また、比較の目的で、硬質被覆層の下部層として、Ｔｉ化合物層および従来（Ｔｉ，Ｚｒ）ＣＮ層を表３、５に示される条件で、表７に示される組み合わせおよび目標層厚で蒸着形成し、さらに上部層としてのＡｌ2Ｏ3層を、表３に示される条件で、かつ同じく表７に示される目標層厚で蒸着形成することにより比較被覆工具１〜１３をそれぞれ製造した。 For comparison, a Ti compound layer and a conventional (Ti, Zr) CN layer are deposited as the lower layer of the hard coating layer under the conditions shown in Tables 3 and 5 and combinations and target layer thicknesses shown in Table 7. Comparative coating tools 1 to 13 were manufactured by forming and further depositing an Al 2 O 3 layer as an upper layer under the conditions shown in Table 3 and with the target layer thicknesses also shown in Table 7.
ついで、上記の本発明被覆工具と比較被覆工具の硬質被覆層を構成する改質（Ｔｉ，Ｚｒ）ＣＮ層および従来（Ｔｉ，Ｚｒ）ＣＮ層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の改質（Ｔｉ，Ｚｒ）ＣＮ層および従来（Ｔｉ，Ｚｒ）ＣＮ層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１１｝面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Next, with respect to the modified (Ti, Zr) CN layer and the conventional (Ti, Zr) CN layer constituting the hard coating layer of the above-described coated tool of the present invention and the comparative coated tool, a gradient is obtained using a field emission scanning electron microscope. Each angle distribution graph was created.
That is, the inclination angle number distribution graph shows the inside of the column of the field emission scanning electron microscope in a state where the surfaces of the modified (Ti, Zr) CN layer and the conventional (Ti, Zr) CN layer are polished surfaces. Irradiating the polished surface with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees with an irradiation current of 1 nA on each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface Then, using an electron backscatter diffraction image apparatus, a {111} plane which is a crystal plane of the crystal grain with respect to a normal line of the surface-polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step The inclination angle formed by the normal line is measured, and based on the measurement result, among the measurement inclination angles, the measurement inclination angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, Created by counting the frequencies existing in each category It was.
この結果得られた各種の改質（Ｔｉ，Ｚｒ）ＣＮ層および従来（Ｔｉ，Ｚｒ）ＣＮ層の傾斜角度数分布グラフにおいて、｛１１１｝面が最高ピークを示す傾斜角区分、並びに０〜１０度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合を表６，７にそれぞれ示した。
なお、本発明被覆工具と比較被覆工具の硬質被覆層を構成する改質（Ｔｉ，Ｃｒ）ＣＮ層についても、前記と同様にして、結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成し、｛１１２｝面が最高ピークを示す傾斜角区分、並びに０〜１０度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合を表６，７にそれぞれ示した。
In the inclination angle number distribution graphs of the various modified (Ti, Zr) CN layers and conventional (Ti, Zr) CN layers obtained as a result, the inclination angle division in which the {111} plane shows the highest peak, and 0-10 Tables 6 and 7 show the ratio of the number of inclination angles existing in the inclination angle section within the range of degrees to the number of inclination angles in the entire inclination angle number distribution graph.
Note that the modified (Ti, Cr) CN layer constituting the hard coating layer of the coated tool of the present invention and the comparative coated tool also has a normal of the {112} plane that is the crystal plane of the crystal grains in the same manner as described above. The measured inclination angle is measured, and based on the measurement result, the measurement inclination angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees among the measurement inclination angles, The entire inclination angle distribution graph of the inclination angle number that is created by counting the existing frequencies, and the inclination angle number that is present in the inclination angle section where the {112} plane has the highest peak, and the inclination angle section within the range of 0 to 10 degrees. Tables 6 and 7 show the ratio of the number of tilt angles to the number of tilt angles.
上記の各種の傾斜角度数分布グラフにおいて、表６に示される通り、本発明被覆工具１〜１３の改質（Ｔｉ，Ｚｒ）ＣＮ層は、いずれも｛１１１｝面の測定傾斜角の分布が０〜１０度の範囲内の傾斜角区分に最高ピークが現れ、かつ０〜１０度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が４５％以上である傾斜角度数分布グラフを示すのに対して、表７に示される通り、比較被覆工具１〜１３の従来（Ｔｉ，Ｚｒ）ＣＮ層は、いずれも｛１１１｝面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在せず、０〜１０度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も３０％以下である傾斜角度数分布グラフを示すものであった。
図３は、本発明被覆工具２の改質（Ｔｉ，Ｚｒ）ＣＮ層の傾斜角度数分布グラフ、図４は、比較被覆工具２の従来（Ｔｉ，Ｚｒ）ＣＮ層の傾斜角度数分布グラフをそれぞれ示すものである。
なお、本発明被覆工具１〜１３および比較被覆工具１〜１３の改質（Ｔｉ，Ｃｒ）ＣＮ層については、いずれも、｛１１２｝面の測定傾斜角の分布が０〜１０度の範囲内の傾斜角区分に最高ピークが現れ、かつ０〜１０度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が４５％以上である傾斜角度数分布グラフを示していた。
In the above-mentioned various inclination angle number distribution graphs, as shown in Table 6, the modified (Ti, Zr) CN layers of the present coated tools 1 to 13 all have a distribution of measured inclination angles on the {111} plane. An inclination angle number distribution graph in which the highest peak appears in the inclination angle section in the range of 0 to 10 degrees, and the ratio of the inclination angle numbers existing in the inclination angle section in the range of 0 to 10 degrees is 45% or more. On the other hand, as shown in Table 7, the conventional (Ti, Zr) CN layers of the comparative coated tools 1 to 13 all have a measured inclination angle distribution on the {111} plane within the range of 0 to 45 degrees. And the inclination angle number distribution graph in which the highest peak does not exist and the ratio of the inclination angle number existing in the inclination angle section within the range of 0 to 10 degrees is 30% or less.
FIG. 3 is a graph showing the distribution of inclination angle numbers of the modified (Ti, Zr) CN layer of the coated tool 2 of the present invention, and FIG. 4 is a graph showing the distribution of inclination angle numbers of the conventional (Ti, Zr) CN layer of the comparative coating tool 2. Each is shown.
For the modified (Ti, Cr) CN layers of the present coated tools 1 to 13 and the comparative coated tools 1 to 13, the distribution of measured inclination angles on the {112} plane is within the range of 0 to 10 degrees. The inclination angle number distribution graph in which the highest peak appears in the inclination angle section and the ratio of the inclination angle numbers existing in the inclination angle section within the range of 0 to 10 degrees is 45% or more is shown.
さらに、上記の本発明被覆工具１〜１３および比較被覆工具１〜１３について、これの硬質被覆層の構成層を電子線マイクロアナライザー（ＥＰＭＡ）およびオージェ分光分析装置を用いて観察（層の縦断面を観察）したところ、前者および後者とも目標組成と実質的に同じ組成を有するＴｉ化合物層、改質（Ｔｉ，Ｃｒ）ＣＮ層、改質（Ｔｉ，Ｚｒ）ＣＮ層および従来（Ｔｉ，Ｚｒ）ＣＮ層、さらにＡｌ2Ｏ3層からなることが確認された。また、これらの被覆工具の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（同じく縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Further, for the above-described coated tools 1 to 13 and comparative coated tools 1 to 13 described above, the constituent layers of the hard coating layer were observed using an electron beam microanalyzer (EPMA) and an Auger spectroscopic analyzer (longitudinal section of the layer). In the former and the latter, the Ti compound layer, the modified (Ti, Cr) CN layer, the modified (Ti, Zr) CN layer, and the conventional (Ti, Zr) having substantially the same composition as the target composition. It was confirmed to consist of a CN layer and an Al 2 O 3 layer. Moreover, when the thickness of the constituent layer of the hard coating layer of these coated tools was measured using a scanning electron microscope (similarly longitudinal section measurement), the average layer thickness (5 The average value of point measurement) was shown.
つぎに、上記の各種の被覆工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆工具１〜１３および比較被覆工具１〜１３について、
被削材：ＪＩＳ・ＳＣＭ４４０の長さ方向等間隔４本縦溝入り丸棒、
切削速度： ４１０ ｍ／ｍｉｎ、
切り込み： １．５ ｍｍ、
送り： ０．３ ｍｍ／ｒｅｖ、
切削時間： ８ 分、
の条件（切削条件Ａという）での合金鋼の湿式断続高速切削試験（通常の切削速度は、２５０ｍ／ｍｉｎ）、
被削材：ＪＩＳ・Ｓ４５Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度： ４１０ ｍ／ｍｉｎ、
切り込み： １．５ ｍｍ、
送り： ０．３５ ｍｍ／ｒｅｖ、
切削時間： １０ 分、
の条件（切削条件Ｂという）での炭素鋼の湿式断続高速切削試験（通常の切削速度は、３００ｍ／ｍｉｎ）、
被削材：ＪＩＳ・ＦＣＤ４５０の長さ方向等間隔４本縦溝入り丸棒、
切削速度： ４１０ ｍ／ｍｉｎ、
切り込み： １．５ ｍｍ、
送り： ０．２８ ｍｍ／ｒｅｖ、
切削時間： ８ 分、
の条件（切削条件Ｃという）でのダクタイル鋳鉄の湿式断続高速切削試験（通常の切削速度は、２５０ｍ／ｍｉｎ）、
を行い、いずれの切削試験（水溶性切削油使用）でも切刃の逃げ面摩耗幅を測定した。この測定結果を表８に示した。
Next, in the state where each of the above various coated tools is screwed to the tip of the tool steel tool with a fixing jig, the present coated tools 1 to 13 and the comparative coated tools 1 to 13 are as follows:
Work material: JIS · SCM440 lengthwise equidistant 4 vertical grooved round bar,
Cutting speed: 410 m / min,
Cutting depth: 1.5 mm,
Feed: 0.3 mm / rev,
Cutting time: 8 minutes,
Wet intermittent high-speed cutting test (normal cutting speed is 250 m / min) of alloy steel under the above conditions (referred to as cutting condition A),
Work material: JIS · S45C lengthwise equal 4 round grooved round bars,
Cutting speed: 410 m / min,
Cutting depth: 1.5 mm,
Feed: 0.35 mm / rev,
Cutting time: 10 minutes,
Wet intermittent high-speed cutting test (normal cutting speed is 300 m / min) of carbon steel under the conditions (referred to as cutting condition B),
Work material: JIS / FCD450 lengthwise equidistant round bars with 4 vertical grooves,
Cutting speed: 410 m / min,
Cutting depth: 1.5 mm,
Feed: 0.28 mm / rev,
Cutting time: 8 minutes,
Wet intermittent high-speed cutting test of ductile cast iron under the above conditions (referred to as cutting condition C) (normal cutting speed is 250 m / min),
The flank wear width of the cutting edge was measured in any cutting test (using water-soluble cutting oil). The measurement results are shown in Table 8.
表６〜８に示される結果から、本発明被覆工具１〜１３は、いずれも硬質被覆層の下部層のうちの特に改質（Ｔｉ，Ｚｒ）ＣＮ層が、｛１１１｝面の傾斜角が０〜１０度の範囲内の傾斜角区分で最高ピークを示すと共に、前記０〜１０度の傾斜角区分範囲内に存在する度数の合計割合が４５％以上を占める傾斜角度数分布グラフを示し、高熱発生を伴い、かつ、切刃部に大きな衝撃的・機械的負荷がかかる高速断続切削加工でも、前記改質（Ｔｉ，Ｚｒ）ＣＮ層が一段とすぐれた耐熱性と高温強度を有し、熱塑性変形、偏摩耗の発生が防止されることから、硬質被覆層がすぐれた耐摩耗性を示すのに対して、硬質被覆層の下部層のうちの（Ｔｉ，Ｚｒ）ＣＮ層が、｛１１１｝面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す従来（Ｔｉ，Ｚｒ）ＣＮ層で構成された比較被覆工具１〜１３においては、高速断続切削加工では硬質被覆層の熱塑性変形あるいは偏摩耗の発生により、硬質被覆層の耐摩耗性は非常に劣ったものであり、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 6 to 8, all of the coated tools 1 to 13 of the present invention have a modified (Ti, Zr) CN layer in the lower layer of the hard coating layer, and an inclination angle of the {111} plane. An inclination angle distribution graph showing the highest peak in the inclination angle section within the range of 0 to 10 degrees and the total ratio of the frequencies existing in the inclination angle section range of 0 to 10 degrees occupying 45% or more, The modified (Ti, Zr) CN layer has excellent heat resistance and high-temperature strength even in high-speed intermittent cutting with high heat generation and large impact and mechanical load on the cutting edge, and is thermoplastic. Since deformation and uneven wear are prevented, the hard coating layer exhibits excellent wear resistance, whereas the (Ti, Zr) CN layer of the lower layer of the hard coating layer is {111}. The distribution of the measured inclination angle of the surface is unbiased within the range of 0 to 45 degrees, and the maximum peak In comparative coated tools 1 to 13 composed of conventional (Ti, Zr) CN layers showing a tilt angle number distribution graph in which no hard disk exists, in high-speed intermittent cutting, the hard coating layer is hardened due to the occurrence of thermoplastic deformation or uneven wear. It is clear that the wear resistance of the coating layer is very inferior and that the service life is reached in a relatively short time.
上述のように、この発明の被覆工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、高速断続切削加工でも硬質被覆層がすぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated tool of the present invention exhibits excellent wear resistance with a hard coating layer in high-speed intermittent cutting as well as continuous cutting and intermittent cutting under normal conditions such as various steels and cast iron. Since it exhibits excellent cutting performance over a long period of time, it can sufficiently satisfy the high performance of the cutting device, the labor saving and energy saving of cutting, and the cost reduction.
Claims (1)
（ａ）上記上部層は、化学蒸着で形成された１〜１５μｍの平均層厚を有する酸化アルミニウム層からなり、
（ｂ）上記下部層は、４〜２０μｍの合計平均層厚を有し、いずれも化学蒸着で形成されたＴｉ化合物層と、ＴｉとＣｒの複合炭窒化物層と、ＴｉとＺｒの複合炭窒化物層とからなり、
（ｃ）上記Ｔｉ化合物層は、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、
（ｄ）上記ＴｉとＺｒの複合炭窒化物層は、２〜１０μｍの平均層厚を有し、かつ、
組成式：（Ｔｉ１−ＸＺｒＸ）ＣＮ
で表した場合、０．０２≦Ｘ≦０．２５（但し、原子比）を満足するＴｉとＺｒの複合炭窒化物層であり、
さらに、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１１｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すＴｉとＺｒの複合炭窒化物層で形成され、
（ｅ）上記ＴｉとＣｒの複合炭窒化物層は、２〜１０μｍの平均層厚を有し、かつ、
組成式：（Ｔｉ１−ＹＣｒＹ）ＣＮ
で表した場合、０．００５≦Ｙ≦０．０５（但し、原子比）を満足するＴｉとＣｒの複合炭窒化物層であり、
さらに、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５％以上の割合を占める傾斜角度数分布グラフを示すＴｉとＣｒの複合炭窒化物層で形成されている、
ことを特徴とする表面被覆切削工具。 In a surface-coated cutting tool in which a hard coating layer composed of an upper layer and a lower layer is vapor-deposited on the surface of a tool base composed of a tungsten carbide-based cemented carbide or a titanium carbonitride-based cermet,
(A) The upper layer is made of an aluminum oxide layer having an average layer thickness of 1 to 15 μm formed by chemical vapor deposition,
(B) The lower layer has a total average layer thickness of 4 to 20 μm, all of which are a Ti compound layer formed by chemical vapor deposition, a composite carbonitride layer of Ti and Cr, and a composite carbon of Ti and Zr. A nitride layer,
(C) The Ti compound layer is composed of one or more of a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride layer,
(D) The Ti and Zr composite carbonitride layer has an average layer thickness of 2 to 10 μm, and
Composition formula: (Ti 1-X Zr X ) CN
Is a composite carbonitride layer of Ti and Zr that satisfies 0.02 ≦ X ≦ 0.25 (however, atomic ratio),
Further, by using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the normal line of the surface polishing surface is The inclination angle formed by the normal line of the {111} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set every pitch of 0.25 degrees. In the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak is present in the inclination angle section in the range of 0 to 10 degrees, and within the range of 0 to 10 degrees. Is formed of a composite carbonitride layer of Ti and Zr showing a tilt angle number distribution graph that occupies a ratio of 45% or more of the entire frequency in the tilt angle frequency distribution graph,
(E) The Ti and Cr composite carbonitride layer has an average layer thickness of 2 to 10 μm, and
Composition formula: (Ti 1-Y Cr Y ) CN
Is a composite carbonitride layer of Ti and Cr that satisfies 0.005 ≦ Y ≦ 0.05 (however, atomic ratio),
Further, by using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the normal line of the surface polishing surface is The inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set every pitch of 0.25 degrees. In the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak is present in the inclination angle section in the range of 0 to 10 degrees, and within the range of 0 to 10 degrees. Is formed of a composite carbonitride layer of Ti and Cr showing an inclination angle distribution graph that occupies a ratio of 45% or more of the entire frequency in the inclination angle distribution graph.
A surface-coated cutting tool characterized by that.
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| JP2009166194A (en) * | 2008-01-18 | 2009-07-30 | Mitsubishi Materials Corp | Surface coated cutting tool having hard coating layer exhibiting excellent wear resistance in high-speed cutting |
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