JP4934069B2 - 光電気混載基板の製造方法 - Google Patents
光電気混載基板の製造方法 Download PDFInfo
- Publication number
- JP4934069B2 JP4934069B2 JP2008013874A JP2008013874A JP4934069B2 JP 4934069 B2 JP4934069 B2 JP 4934069B2 JP 2008013874 A JP2008013874 A JP 2008013874A JP 2008013874 A JP2008013874 A JP 2008013874A JP 4934069 B2 JP4934069 B2 JP 4934069B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- core
- opto
- thin film
- metal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0274—Optical details, e.g. printed circuits comprising integral optical means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/107—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by filling grooves in the support with conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
- H05K1/056—Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an organic insulating layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0723—Electroplating, e.g. finish plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0023—Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
- H05K3/046—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer
- H05K3/048—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching by selective transfer or selective detachment of a conductive layer using a lift-off resist pattern or a release layer pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/281—Applying non-metallic protective coatings by means of a preformed insulating foil
Description
下記の一般式(1)で示されるビスフェノキシエタノールフルオレンジグリシジルエーテル(成分A)35重量部、脂環式エポキシである3,4−エポキシシクロヘキセニルメチル−3’,4’−エポキシヘキセンカルボキシレート(ダイセル化学社製、セロキサイド2021P)(成分B)40重量部、シクロヘキセンオキシド骨格を有する脂環式エポキシ樹脂(ダイセル化学社製、セロキサイド2081)(成分C)25重量部、4,4’−ビス〔ジ(βヒドロキシエトキシ)フェニルスルフィニオ〕フェニルスルフィド−ビス−ヘキサフルオロアンチモネートの50%プロピオンカーボネート溶液(成分D)1重量部とを混合することにより、アンダークラッド層およびオーバークラッド層の形成材料を調製した。
上記成分A:70重量部、1,3,3−トリス{4−〔2−(3−オキセタニル)〕ブトキシフェニル}ブタン:30重量部、上記成分D:1重量部を乳酸エチル28重量部に溶解することにより、コアの形成材料を調製した。
ステンレス製基台(厚み20μm)の表面に、上記アンダークラッド層の形成材料をスピンコート法により塗布した後、100℃×15分間の加熱処理により乾燥させた。ついで、所望の開口パターンが形成されたフォトマスク(露光マスク)を介して、2000mJ/cm2 の紫外線照射による露光を行った。つぎに、100℃×15分間の加熱処理を行うことにより、アンダークラッド層を形成した。このアンダークラッド層の厚みを接触式膜厚計で測定すると25μmであった。また、このアンダークラッド層の、波長830nmにおける屈折率は、1.542であった。
3 コア
5 金属薄膜
6 溝部
7 電気配線
7a めっき層
Claims (3)
- アンダークラッド層上にコア用樹脂層を形成するコア用樹脂層形成工程と、そのコア用樹脂層上にレジスト層を形成するレジスト層形成工程と、パターン加工により上記レジスト層をコア用樹脂層と共に所定のパターンに形成し、上記コア用樹脂層をコア化するパターン加工工程と、パターン形成されたレジスト層とコアとを有するアンダークラッド層上に金属薄膜を、レジスト層およびコアを被覆した状態で形成する金属薄膜形成工程と、上記金属薄膜で被覆されているレジスト層を金属薄膜と共に除去するレジスト層除去工程と、パターン形成され突出状態になっているコアの側面の金属薄膜および、コアとコアとの間のアンダークラッド層上の金属薄膜に対して電解めっきを施すことにより、上記コアとそれに隣接するコアとの間の溝部をめっき層で埋め、そのめっき層を電気配線とする電解めっき工程と、上記コアおよび上記電気配線を被覆した状態でオーバークラッド層を形成するオーバークラッド層形成工程とを備えていることを特徴とする光電気混載基板の製造方法。
- アンダークラッド層が、金属製基台の上に形成される請求項1記載の光電気混載基板の製造方法。
- 金属製基台が、ステンレス製基台である請求項2記載の光電気混載基板の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008013874A JP4934069B2 (ja) | 2008-01-24 | 2008-01-24 | 光電気混載基板の製造方法 |
EP09000891A EP2083296B1 (en) | 2008-01-24 | 2009-01-22 | Manufacturing method of opto-electric hybrid board and opto-electric hybrid board obtained thereby |
KR1020090005403A KR101449765B1 (ko) | 2008-01-24 | 2009-01-22 | 광전기 혼재 기판의 제조 방법과 이에 의해 얻어진 광전기 혼재 기판 |
US12/358,528 US7747123B2 (en) | 2008-01-24 | 2009-01-23 | Manufacturing method of opto-electric hybrid board and opto-electric hybrid board obtained thereby |
CN2009100011861A CN101493547B (zh) | 2008-01-24 | 2009-01-23 | 光电混合基板的制造方法和由该方法获得的光电混合基板 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008013874A JP4934069B2 (ja) | 2008-01-24 | 2008-01-24 | 光電気混載基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009175430A JP2009175430A (ja) | 2009-08-06 |
JP4934069B2 true JP4934069B2 (ja) | 2012-05-16 |
Family
ID=40514111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008013874A Expired - Fee Related JP4934069B2 (ja) | 2008-01-24 | 2008-01-24 | 光電気混載基板の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7747123B2 (ja) |
EP (1) | EP2083296B1 (ja) |
JP (1) | JP4934069B2 (ja) |
KR (1) | KR101449765B1 (ja) |
CN (1) | CN101493547B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4934070B2 (ja) * | 2008-01-24 | 2012-05-16 | 日東電工株式会社 | 光電気混載基板の製造方法 |
KR100952478B1 (ko) * | 2008-02-19 | 2010-04-13 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
KR101074406B1 (ko) * | 2009-11-02 | 2011-10-17 | 삼성전기주식회사 | 광기판 및 그 제조방법 |
KR101086828B1 (ko) | 2009-11-30 | 2011-11-25 | 엘지이노텍 주식회사 | 매립형 인쇄회로기판, 다층 인쇄회로기판 및 이들의 제조방법 |
US8428401B2 (en) | 2009-12-16 | 2013-04-23 | Telefonaktiebolaget L M Ericsson (Publ) | On-chip optical waveguide |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2931048B2 (ja) * | 1990-07-04 | 1999-08-09 | 三井化学株式会社 | 高純度テレフタル酸の製造方法 |
JP3674061B2 (ja) * | 1994-10-31 | 2005-07-20 | 株式会社日立製作所 | 薄膜多層回路基板および光導波路の製造方法 |
AUPN258095A0 (en) | 1995-04-21 | 1995-05-18 | Unisearch Limited | Low temperature fabrication of silica-based pecvd channel waveguides |
JPH1075038A (ja) * | 1996-06-28 | 1998-03-17 | Ngk Spark Plug Co Ltd | 配線基板とその製造方法 |
US6477284B1 (en) | 1999-06-14 | 2002-11-05 | Nec Corporation | Photo-electric combined substrate, optical waveguide and manufacturing process therefor |
JP3491677B2 (ja) | 1999-06-24 | 2004-01-26 | 日本電気株式会社 | 光電気混載基板およびその製造方法 |
JP2001311846A (ja) * | 2000-04-28 | 2001-11-09 | Oki Printed Circuit Kk | 電気配線・光配線混載多層シートの製造方法及び電気配線・光配線混載多層基板の製造方法 |
JP3514443B2 (ja) * | 2000-10-10 | 2004-03-31 | 日本電信電話株式会社 | 光ファイバ布線板の製造方法 |
JP2002246744A (ja) * | 2001-02-20 | 2002-08-30 | Nec Corp | 導体形成方法およびこれを用いた多層配線基板製造方法 |
JP2003034680A (ja) * | 2001-07-19 | 2003-02-07 | Ajinomoto Co Inc | ピロリドンカルボン酸又はその塩の製造法 |
JP4703065B2 (ja) * | 2001-09-14 | 2011-06-15 | 大日本印刷株式会社 | 光導波路回路の製造方法 |
JP2003287636A (ja) * | 2002-03-28 | 2003-10-10 | Nec Corp | 光機能デバイスおよびその製造方法 |
JP2004012635A (ja) * | 2002-06-04 | 2004-01-15 | Nippon Paint Co Ltd | 光電気配線複合実装基板及びその製造方法 |
JP2006156439A (ja) * | 2004-11-25 | 2006-06-15 | Nitto Denko Corp | 光電気混載基板の製造方法 |
JP2006259361A (ja) * | 2005-03-17 | 2006-09-28 | Hitachi Chem Co Ltd | ポリマー光導波路の製造方法 |
JP2007033688A (ja) * | 2005-07-25 | 2007-02-08 | Fuji Xerox Co Ltd | 光導波路フィルム、及び光送受信モジュール |
JP2007194476A (ja) * | 2006-01-20 | 2007-08-02 | Shinko Electric Ind Co Ltd | 多層配線基板の製造方法 |
JP2007279237A (ja) * | 2006-04-04 | 2007-10-25 | Nitto Denko Corp | 光導波路の製法 |
JP2008276000A (ja) * | 2007-05-01 | 2008-11-13 | Nitto Denko Corp | 光導波路 |
-
2008
- 2008-01-24 JP JP2008013874A patent/JP4934069B2/ja not_active Expired - Fee Related
-
2009
- 2009-01-22 EP EP09000891A patent/EP2083296B1/en not_active Expired - Fee Related
- 2009-01-22 KR KR1020090005403A patent/KR101449765B1/ko not_active IP Right Cessation
- 2009-01-23 CN CN2009100011861A patent/CN101493547B/zh not_active Expired - Fee Related
- 2009-01-23 US US12/358,528 patent/US7747123B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20090082131A (ko) | 2009-07-29 |
US7747123B2 (en) | 2010-06-29 |
KR101449765B1 (ko) | 2014-10-13 |
JP2009175430A (ja) | 2009-08-06 |
CN101493547A (zh) | 2009-07-29 |
US20090190879A1 (en) | 2009-07-30 |
EP2083296B1 (en) | 2011-12-28 |
EP2083296A2 (en) | 2009-07-29 |
EP2083296A3 (en) | 2009-09-09 |
CN101493547B (zh) | 2012-10-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4934070B2 (ja) | 光電気混載基板の製造方法 | |
JP4934068B2 (ja) | 光電気混載基板の製造方法およびそれによって得られた光電気混載基板 | |
JP5160941B2 (ja) | 光導波路モジュールの製造方法 | |
US8055105B2 (en) | Opto-electric hybrid module | |
JP5055193B2 (ja) | 光電気混載基板の製造方法 | |
KR100751274B1 (ko) | 광·전기배선기판, 실장기판 및 광·전기배선기판의제조방법 | |
JP4754613B2 (ja) | 光電気混載基板およびその製造方法 | |
JP4934069B2 (ja) | 光電気混載基板の製造方法 | |
US7212700B2 (en) | Electro-optic hybrid circuit board | |
JP2008276000A (ja) | 光導波路 | |
JP2006156439A (ja) | 光電気混載基板の製造方法 | |
JP5820233B2 (ja) | 光導波路の製法 | |
JP2009015307A (ja) | 光導波路の製造方法 | |
JP4791409B2 (ja) | 光導波路の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20101122 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111122 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A132 Effective date: 20111206 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120119 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20120119 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120214 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120217 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150224 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |