JP4930595B2 - 圧電共振子 - Google Patents
圧電共振子 Download PDFInfo
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- JP4930595B2 JP4930595B2 JP2009531158A JP2009531158A JP4930595B2 JP 4930595 B2 JP4930595 B2 JP 4930595B2 JP 2009531158 A JP2009531158 A JP 2009531158A JP 2009531158 A JP2009531158 A JP 2009531158A JP 4930595 B2 JP4930595 B2 JP 4930595B2
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- high acoustic
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- 239000000758 substrate Substances 0.000 claims description 33
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 11
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 8
- 239000011737 fluorine Substances 0.000 claims description 8
- 229910052731 fluorine Inorganic materials 0.000 claims description 8
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 claims 19
- 239000012790 adhesive layer Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 72
- 229910004298 SiO 2 Inorganic materials 0.000 description 26
- 238000005530 etching Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229910016570 AlCu Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
さらに、調整層がフッ素系ガスにエッチングされにくい材料からなる場合、高音響インピーダンス層のエッチングの際に、調整層でエッチングが止まり、その下の低音響インピーダンス層がエッチングされないようにすることができる。これによって、振動部の電極同士が対向する部分の周囲に形成される段差の高さを最小限に抑え、電極の断線を防ぐことができる。これにより、圧電共振子の品質がさらに安定する。
4,4a,4b,4c 音響反射器部
10,10a,10b,10c 圧電共振子
12 基板
13s,13t 調整層(窒化アルミニウム膜)
15,15a,15b,15c 下部電極
16,16a,16b,16c 圧電薄膜
17,17a,17b,17c 上部電極
20,20a,20b,20c 高音響インピーダンス層(タングステン膜)
22,22a,22b,22c 高音響インピーダンス層(タングステン膜)
30,30a,30b,30c 低音響インピーダンス層(酸化シリコン膜)
32,32a,32b,32c 低音響インピーダンス層(酸化シリコン膜)
34,34a,34b,34c 低音響インピーダンス層(酸化シリコン膜)
40,42 密着層(チタン膜)
(2)ベーキング(加熱)
(3)露光
(4)現像
(5)ベーキング2回目(加熱)
2回目のベーキングを行うことで、フォトレジストの端面に順テーパーが形成される。このフォトレジストを用いてエッチングすることにより、高音響インピーダンス層20c,22cのエッチング端面20k、22kを曲面状に加工することができる。
Claims (4)
- 基板と、
一対の電極の間に圧電薄膜が挟まれた振動部と、
前記基板と前記振動部との間に配置された音響反射器部と、
を備え、
前記音響反射器部は、
前記基板と前記振動部との間において交互に配置された、音響インピーダンスが相対的に低い材料からなる複数の低音響インピーダンス層及び音響インピーダンスが相対的に高い材料からなる複数の高音響インピーダンス層と、
前記高音響インピーダンス層と当該高音響インピーダンス層の前記基板側に当該高音響インピーダンス層の次に配置されている前記低音響インピーダンス層との間に配置され、前記高音響インピーダンス層の音響インピーダンスと前記低音響インピーダンス層の音響インピーダンスとの中間の値の音響インピーダンスを有する調整層と、
を含み、
前記低音響インピーダンス層と前記高音響インピーダンス層とは圧縮応力を有し、前記調整層は引張応力を有し、
前記調整層がフッ素系ガスにエッチングされにくい材料からなることを特徴とする圧電共振子。 - 前記低音響インピーダンス層に酸化シリコン、前記高音響インピーダンス層にタングステン、前記調整層に窒化アルミニウムを用いることを特徴とする、請求項1に記載の圧電共振子。
- 前記音響反射器部は、
前記基板と前記振動部との間において、前記高音響インピーダンス層と前記調整層との間に配置された密着層を含むことを特徴とする、請求項1又は2に記載の圧電共振子。 - 前記密着層にチタンを用いることを特徴とする、請求項3に記載の圧電共振子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009531158A JP4930595B2 (ja) | 2007-09-06 | 2008-07-10 | 圧電共振子 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007231854 | 2007-09-06 | ||
JP2007231854 | 2007-09-06 | ||
JP2009531158A JP4930595B2 (ja) | 2007-09-06 | 2008-07-10 | 圧電共振子 |
PCT/JP2008/062464 WO2009031358A1 (ja) | 2007-09-06 | 2008-07-10 | 圧電共振子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009031358A1 JPWO2009031358A1 (ja) | 2010-12-09 |
JP4930595B2 true JP4930595B2 (ja) | 2012-05-16 |
Family
ID=40428681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009531158A Active JP4930595B2 (ja) | 2007-09-06 | 2008-07-10 | 圧電共振子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7868519B2 (ja) |
JP (1) | JP4930595B2 (ja) |
DE (1) | DE112008002283B4 (ja) |
WO (1) | WO2009031358A1 (ja) |
Families Citing this family (86)
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FR2951024B1 (fr) * | 2009-10-01 | 2012-03-23 | St Microelectronics Sa | Procede de fabrication de resonateur baw a facteur de qualite eleve |
FR2951026B1 (fr) * | 2009-10-01 | 2011-12-02 | St Microelectronics Sa | Procede de fabrication de resonateurs baw sur une tranche semiconductrice |
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KR102157602B1 (ko) | 2015-10-23 | 2020-09-18 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 |
WO2017212774A1 (ja) * | 2016-06-07 | 2017-12-14 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
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