JP4929918B2 - 複合センサ - Google Patents
複合センサ Download PDFInfo
- Publication number
- JP4929918B2 JP4929918B2 JP2006223806A JP2006223806A JP4929918B2 JP 4929918 B2 JP4929918 B2 JP 4929918B2 JP 2006223806 A JP2006223806 A JP 2006223806A JP 2006223806 A JP2006223806 A JP 2006223806A JP 4929918 B2 JP4929918 B2 JP 4929918B2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- angular velocity
- acceleration
- detection element
- weight portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 150000001875 compounds Chemical class 0.000 title 1
- 238000001514 detection method Methods 0.000 claims description 81
- 230000001133 acceleration Effects 0.000 claims description 79
- 239000002131 composite material Substances 0.000 claims description 32
- 230000001629 suppression Effects 0.000 claims description 5
- 230000000452 restraining effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
- G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Pressure Sensors (AREA)
Description
4 角速度検出素子
6 複合検出素子
8 固定用アーム
10 連結用アーム
12 錘部
16 第1アーム
18 第2アーム
19 支持部
20 第3アーム
22 対向部
23 溝部
24 錘部
26 凹部
28 感知手段
30 駆動手段
32 感知手段
Claims (5)
- 角速度検出素子と加速度検出素子を有する複合検出素子を備え、
前記加速度検出素子は、錘部と、前記錘部に連結され前記錘部の可動に起因して撓むアー
ムとを有し、前記錘部の可動に起因して撓むアームの状態変化に基づき加速度を検出して
おり、
前記角速度検出素子と前記加速度検出素子とを互いに積層配置するとともに前記加速度検
出素子の錘部と離隔させて前記加速度検出素子の上方に前記角速度検出素子を配置し、か
つ、前記角速度検出素子には前記加速度検出素子の錘部の上方可動を抑制する抑制手段を
設けた複合センサ。 - 前記角速度検出素子は、駆動振動用のアームと、コリオリ力に起因して撓むアームとを有し、コリオリ力に起因して撓むアームの状態変化に基づき角速度を検出する
請求項1に記載の複合センサ。 - 前記角速度検出素子は、前記加速度検出素子の錘部と対向する対向面に、前記加速度検出
素子の錘部と離隔させる凹部を設けるとともに、前記凹部の少なくとも一部は前記錘部の
可動範囲を超えない深さを有する請求項1又は2に記載の複合センサ。 - 前記角速度検出素子は、第1アームを第2アームに略直交方向に連結して形成した2つの
直交アームと、2つの前記第1アームを支持した支持部と、前記第1アームに第3アーム
を略直交方向に連結して形成した2つの直交アームとを有し、前記第3アームにて前記加
速度検出素子に固定し、前記第3アームの厚みよりも前記錘部および前記第1、第2アー
ムの厚みを薄くするとともに前記第3アームの一部を切り欠いて前記凹部を設け、前記第
3アームの一部に設けた前記凹部は前記加速度検出素子の錘部の可動範囲を超えない深さ
を有する請求項3記載の複合センサ。 - 前記加速度検出素子は、前記錘部に連結され前記錘部の可動に起因して撓むアームを連結
するとともに実装基板に固定する固定用アームを有し、前記加速度検出素子の固定用アー
ム上に前記角速度検出素子の第3アームを積層配置して固定した請求項4記載の複合セン
サ。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006223806A JP4929918B2 (ja) | 2006-08-21 | 2006-08-21 | 複合センサ |
US12/375,109 US8061203B2 (en) | 2006-08-21 | 2007-08-09 | Combined sensor |
EP07805914A EP2037285A4 (en) | 2006-08-21 | 2007-08-09 | COMBINED SENSOR |
PCT/JP2007/065583 WO2008023573A1 (fr) | 2006-08-21 | 2007-08-09 | Capteur combiné |
CN2007800291005A CN101501505B (zh) | 2006-08-21 | 2007-08-09 | 复合传感器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006223806A JP4929918B2 (ja) | 2006-08-21 | 2006-08-21 | 複合センサ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008046057A JP2008046057A (ja) | 2008-02-28 |
JP2008046057A5 JP2008046057A5 (ja) | 2009-08-13 |
JP4929918B2 true JP4929918B2 (ja) | 2012-05-09 |
Family
ID=39106660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006223806A Expired - Fee Related JP4929918B2 (ja) | 2006-08-21 | 2006-08-21 | 複合センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US8061203B2 (ja) |
EP (1) | EP2037285A4 (ja) |
JP (1) | JP4929918B2 (ja) |
CN (1) | CN101501505B (ja) |
WO (1) | WO2008023573A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008190931A (ja) * | 2007-02-02 | 2008-08-21 | Wacoh Corp | 加速度と角速度との双方を検出するセンサ |
JP5789737B2 (ja) * | 2009-11-24 | 2015-10-07 | パナソニックIpマネジメント株式会社 | 加速度センサ |
CN101865933A (zh) * | 2010-06-07 | 2010-10-20 | 瑞声声学科技(深圳)有限公司 | 差分电容式加速度传感器 |
JP5505193B2 (ja) * | 2010-08-17 | 2014-05-28 | シンフォニアテクノロジー株式会社 | 複合センサ、センサユニット |
WO2012098901A1 (ja) * | 2011-01-20 | 2012-07-26 | パナソニック株式会社 | 加速度センサ |
KR101299731B1 (ko) * | 2012-05-29 | 2013-08-22 | 삼성전기주식회사 | 각속도 센서 |
KR101388814B1 (ko) * | 2012-09-11 | 2014-04-23 | 삼성전기주식회사 | 각속도 센서 |
KR101366990B1 (ko) * | 2012-12-28 | 2014-02-24 | 삼성전기주식회사 | 각속도 센서 |
KR101531093B1 (ko) * | 2013-07-31 | 2015-06-23 | 삼성전기주식회사 | 가속도 센서 및 각속도 센서 |
JP6464749B2 (ja) | 2015-01-06 | 2019-02-06 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
JP6372361B2 (ja) * | 2015-01-16 | 2018-08-15 | 株式会社デンソー | 複合センサ |
JP5833790B2 (ja) * | 2015-07-03 | 2015-12-16 | 株式会社トライフォース・マネジメント | 発電素子 |
EP3358357A4 (en) * | 2015-09-30 | 2019-11-06 | Hitachi Automotive Systems, Ltd. | SENSOR OF INERTIA |
US11164197B2 (en) * | 2018-04-13 | 2021-11-02 | Shopper Scientist Llc | Shopping time allocated to product exposure in a shopping environment |
CN111780899B (zh) * | 2019-04-04 | 2022-04-12 | 武汉杰开科技有限公司 | 复合传感器及其制作方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09196682A (ja) * | 1996-01-19 | 1997-07-31 | Matsushita Electric Ind Co Ltd | 角速度センサと加速度センサ |
JPH10239064A (ja) * | 1997-02-27 | 1998-09-11 | Matsushita Electric Ind Co Ltd | 角速度と加速度の複合センサ |
JP2001074767A (ja) | 1999-09-03 | 2001-03-23 | Matsushita Electric Ind Co Ltd | 加速度センサおよびその製造方法 |
JP2001208546A (ja) | 1999-11-16 | 2001-08-03 | Matsushita Electric Ind Co Ltd | 角速度センサ |
JP2002005951A (ja) * | 2000-06-26 | 2002-01-09 | Denso Corp | 半導体力学量センサ及びその製造方法 |
CN1287733C (zh) * | 2001-03-06 | 2006-12-06 | 微石有限公司 | 身体动作检测装置 |
JP2003014778A (ja) * | 2001-04-26 | 2003-01-15 | Samsung Electronics Co Ltd | 垂直変位測定及び駆動構造体とその製造方法 |
US6725719B2 (en) * | 2002-04-17 | 2004-04-27 | Milli Sensor Systems And Actuators, Inc. | MEMS-integrated inertial measurement units on a common substrate |
CN1227535C (zh) * | 2002-07-02 | 2005-11-16 | 中国科学院合肥智能机械研究所 | 一种双e型圆膜片十字梁结构的六轴加速度传感器 |
US7335971B2 (en) * | 2003-03-31 | 2008-02-26 | Robert Bosch Gmbh | Method for protecting encapsulated sensor structures using stack packaging |
JP2005098891A (ja) * | 2003-09-25 | 2005-04-14 | Matsushita Electric Works Ltd | 静電容量式センサ |
JP2005283393A (ja) * | 2004-03-30 | 2005-10-13 | Fujitsu Media Device Kk | 慣性センサ |
JP2006125887A (ja) * | 2004-10-26 | 2006-05-18 | Fujitsu Media Device Kk | 加速度センサ |
JP2006133004A (ja) * | 2004-11-04 | 2006-05-25 | Matsushita Electric Ind Co Ltd | 角速度センサ |
JP4774733B2 (ja) * | 2004-12-03 | 2011-09-14 | パナソニック株式会社 | 複合センサ |
JP4702942B2 (ja) * | 2005-10-14 | 2011-06-15 | Necトーキン株式会社 | 振動ジャイロ用素子及び振動ジャイロ |
JP2007248328A (ja) * | 2006-03-17 | 2007-09-27 | Matsushita Electric Ind Co Ltd | 複合センサ |
-
2006
- 2006-08-21 JP JP2006223806A patent/JP4929918B2/ja not_active Expired - Fee Related
-
2007
- 2007-08-09 CN CN2007800291005A patent/CN101501505B/zh not_active Expired - Fee Related
- 2007-08-09 US US12/375,109 patent/US8061203B2/en not_active Expired - Fee Related
- 2007-08-09 EP EP07805914A patent/EP2037285A4/en not_active Withdrawn
- 2007-08-09 WO PCT/JP2007/065583 patent/WO2008023573A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
US20090183569A1 (en) | 2009-07-23 |
WO2008023573A1 (fr) | 2008-02-28 |
EP2037285A4 (en) | 2012-11-14 |
US8061203B2 (en) | 2011-11-22 |
EP2037285A1 (en) | 2009-03-18 |
JP2008046057A (ja) | 2008-02-28 |
CN101501505B (zh) | 2011-07-20 |
CN101501505A (zh) | 2009-08-05 |
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