JP4922766B2 - 連続熱処理炉における板状被熱処理物の搬送装置 - Google Patents
連続熱処理炉における板状被熱処理物の搬送装置 Download PDFInfo
- Publication number
- JP4922766B2 JP4922766B2 JP2006546554A JP2006546554A JP4922766B2 JP 4922766 B2 JP4922766 B2 JP 4922766B2 JP 2006546554 A JP2006546554 A JP 2006546554A JP 2006546554 A JP2006546554 A JP 2006546554A JP 4922766 B2 JP4922766 B2 JP 4922766B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- wires
- moving
- vertical
- longitudinally
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims description 21
- 239000000463 material Substances 0.000 title claims description 5
- 230000033001 locomotion Effects 0.000 claims description 164
- 239000012530 fluid Substances 0.000 claims description 28
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/663—Bell-type furnaces
- C21D9/675—Arrangements of charging or discharging devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
- F27B9/201—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace walking beam furnace
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
- F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Tunnel Furnaces (AREA)
- Structure Of Belt Conveyors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2004/017947 WO2006059387A1 (ja) | 2004-12-02 | 2004-12-02 | 連続熱処理炉における板状被熱処理物の搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2006059387A1 JPWO2006059387A1 (ja) | 2008-06-05 |
JP4922766B2 true JP4922766B2 (ja) | 2012-04-25 |
Family
ID=36564831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006546554A Active JP4922766B2 (ja) | 2004-12-02 | 2004-12-02 | 連続熱処理炉における板状被熱処理物の搬送装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4922766B2 (ko) |
KR (1) | KR100933535B1 (ko) |
CN (1) | CN101072974B (ko) |
WO (1) | WO2006059387A1 (ko) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5567869B2 (ja) * | 2010-03-19 | 2014-08-06 | 光洋サーモシステム株式会社 | 連続熱処理装置 |
WO2012009636A1 (en) * | 2010-07-15 | 2012-01-19 | Despatch Industries Limited Partnership | Firing furnace configuration for thermal processing system |
CN102382971B (zh) * | 2010-08-31 | 2013-11-06 | 本田技研工业株式会社 | 金属环用搬送架和金属环的装载方法 |
CN103347313A (zh) * | 2013-06-13 | 2013-10-09 | 浙江光普太阳能科技有限公司 | 硅片测试前加热装置 |
US10458710B2 (en) | 2014-11-07 | 2019-10-29 | Illinois Tool Works Inc. | Supply plenum for center-to-ends fiber oxidation oven |
US10676847B2 (en) | 2014-11-07 | 2020-06-09 | Illinois Tool Works Inc. | Discharge nozzle plate for center-to-ends fiber oxidation oven |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6198993A (ja) * | 1984-10-19 | 1986-05-17 | Hitachi Ltd | 遠心圧縮機 |
JPH023116Y2 (ko) * | 1984-12-05 | 1990-01-24 | ||
JPH0367994A (ja) * | 1989-08-07 | 1991-03-22 | Daikin Ind Ltd | 熱交換器及び空気調和機 |
JPH074470Y2 (ja) * | 1989-10-31 | 1995-02-01 | 株式会社デンコー | 搬送装置 |
CN2169829Y (zh) * | 1993-10-06 | 1994-06-22 | 冶金工业部北京冶金设备研究院 | 窑车定位装置 |
-
2004
- 2004-12-02 KR KR1020077013200A patent/KR100933535B1/ko not_active IP Right Cessation
- 2004-12-02 JP JP2006546554A patent/JP4922766B2/ja active Active
- 2004-12-02 CN CN2004800445279A patent/CN101072974B/zh not_active Expired - Fee Related
- 2004-12-02 WO PCT/JP2004/017947 patent/WO2006059387A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
CN101072974B (zh) | 2011-11-16 |
KR100933535B1 (ko) | 2009-12-23 |
KR20070086069A (ko) | 2007-08-27 |
JPWO2006059387A1 (ja) | 2008-06-05 |
WO2006059387A1 (ja) | 2006-06-08 |
CN101072974A (zh) | 2007-11-14 |
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