JP4922766B2 - 連続熱処理炉における板状被熱処理物の搬送装置 - Google Patents

連続熱処理炉における板状被熱処理物の搬送装置 Download PDF

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Publication number
JP4922766B2
JP4922766B2 JP2006546554A JP2006546554A JP4922766B2 JP 4922766 B2 JP4922766 B2 JP 4922766B2 JP 2006546554 A JP2006546554 A JP 2006546554A JP 2006546554 A JP2006546554 A JP 2006546554A JP 4922766 B2 JP4922766 B2 JP 4922766B2
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Japan
Prior art keywords
wire
wires
moving
vertical
longitudinally
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Active
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JP2006546554A
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English (en)
Japanese (ja)
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JPWO2006059387A1 (ja
Inventor
直仁 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Thermo Systems Co Ltd
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Koyo Thermo Systems Co Ltd
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Publication of JPWO2006059387A1 publication Critical patent/JPWO2006059387A1/ja
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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
    • C21D9/54—Furnaces for treating strips or wire
    • C21D9/663—Bell-type furnaces
    • C21D9/675—Arrangements of charging or discharging devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Especially adapted for treating semiconductor wafers
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/201—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace walking beam furnace
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/36—Arrangements of heating devices

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Tunnel Furnaces (AREA)
  • Structure Of Belt Conveyors (AREA)
JP2006546554A 2004-12-02 2004-12-02 連続熱処理炉における板状被熱処理物の搬送装置 Active JP4922766B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2004/017947 WO2006059387A1 (ja) 2004-12-02 2004-12-02 連続熱処理炉における板状被熱処理物の搬送装置

Publications (2)

Publication Number Publication Date
JPWO2006059387A1 JPWO2006059387A1 (ja) 2008-06-05
JP4922766B2 true JP4922766B2 (ja) 2012-04-25

Family

ID=36564831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006546554A Active JP4922766B2 (ja) 2004-12-02 2004-12-02 連続熱処理炉における板状被熱処理物の搬送装置

Country Status (4)

Country Link
JP (1) JP4922766B2 (ko)
KR (1) KR100933535B1 (ko)
CN (1) CN101072974B (ko)
WO (1) WO2006059387A1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5567869B2 (ja) * 2010-03-19 2014-08-06 光洋サーモシステム株式会社 連続熱処理装置
US20120181265A1 (en) * 2010-07-15 2012-07-19 Despatch Industries Limited Partnership Firing furnace configuration for thermal processing system
CN102382971B (zh) * 2010-08-31 2013-11-06 本田技研工业株式会社 金属环用搬送架和金属环的装载方法
CN103347313A (zh) * 2013-06-13 2013-10-09 浙江光普太阳能科技有限公司 硅片测试前加热装置
US10676847B2 (en) 2014-11-07 2020-06-09 Illinois Tool Works Inc. Discharge nozzle plate for center-to-ends fiber oxidation oven
US10458710B2 (en) 2014-11-07 2019-10-29 Illinois Tool Works Inc. Supply plenum for center-to-ends fiber oxidation oven

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6198993A (ja) * 1984-10-19 1986-05-17 Hitachi Ltd 遠心圧縮機
JPH023116Y2 (ko) * 1984-12-05 1990-01-24
JPH0367994A (ja) * 1989-08-07 1991-03-22 Daikin Ind Ltd 熱交換器及び空気調和機
JPH074470Y2 (ja) * 1989-10-31 1995-02-01 株式会社デンコー 搬送装置
CN2169829Y (zh) * 1993-10-06 1994-06-22 冶金工业部北京冶金设备研究院 窑车定位装置

Also Published As

Publication number Publication date
WO2006059387A1 (ja) 2006-06-08
CN101072974B (zh) 2011-11-16
JPWO2006059387A1 (ja) 2008-06-05
KR100933535B1 (ko) 2009-12-23
CN101072974A (zh) 2007-11-14
KR20070086069A (ko) 2007-08-27

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