Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
  • F27B17/00—Furnaces of a kind not covered by any preceding group
  • F27B17/0016—Chamber type furnaces
  • F27B17/0025—Especially adapted for treating semiconductor wafers
• • C—CHEMISTRY; METALLURGY
  • C21—METALLURGY OF IRON
  • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
  • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
  • C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
  • C21D9/54—Furnaces for treating strips or wire
  • C21D9/663—Bell-type furnaces
  • C21D9/675—Arrangements of charging or discharging devices
• • C—CHEMISTRY; METALLURGY
  • C21—METALLURGY OF IRON
  • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
  • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
  • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
  • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
  • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
  • F27B9/201—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace walking beam furnace
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
  • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
  • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
  • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
  • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F27—FURNACES; KILNS; OVENS; RETORTS
  • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
  • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
  • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
  • F27B9/36—Arrangements of heating devices

Definitions

• the present invention relates to a transfer device for transferring a plate-like heat-treated object such as a light-weight thin substrate such as a solar cell wafer in a continuous heat treatment furnace.
• the movable wire sways due to the walking operation. Wire swaying tends to occur when moving up and down, even during walking.
• the vibration generated by the up and down movement remains in the subsequent back-and-forth movement and stops the object to be heat-treated at an accurate position in the front-rear direction. It cannot be made, and a shift
• Patent Document 1 Japanese Patent Laid-Open No. 10-148473
• Patent Document 2 Japanese Utility Model Publication No. 4 67994
• An object of the present invention is to provide a plate-like heat treatment in a continuous heat treatment furnace that reduces the deviation of the stop position of the object to be heat treated, enables stable conveyance, and does not cause a change in wire tension.
• An object of the present invention is to provide an article transport device. Means for solving the problem
• the plate-shaped heat-treated article conveying device passes through the furnace in the front-rear direction so as to be placed across the heat-treated article and extends in parallel with each other! /
• a longitudinal motion wire a pair of vertical motion wires that run parallel to the outside or the inside of both longitudinal motion wires so that it can be placed across the object to be heat treated, and both longitudinal motion wires at a fixed level 1,
• a vertical movement mechanism for moving both the vertical movement wires up and down so as to intersect with the level of the vertical movement wire.
• the back-and-forth movement mechanism has two or one fluid pressure cylinders for adjusting the back-and-forth movement wire tension to individually or collectively apply tension to both the back-and-forth movement wires.
• both the vertical movement wires and the vertical movement wires are stretched. Even so, the elongation is absorbed by the hydraulic cylinder. Therefore, it is possible to prevent the wire tension from changing.
• the number of fluid pressure cylinders for adjusting the longitudinal motion wire tension can be one, and when there is a difference, the fluid pressure cylinder for longitudinal motion wire tension adjustment The number of is assumed to be two. Similarly, the number of hydraulic cylinders for adjusting the front vertical wire tension is selected depending on whether there is a difference in elongation between the two vertical motion wires.
• the fluid pressure cylinder for adjusting both longitudinal movement wires has a piston rod connecting one end of each longitudinal movement wire and is provided on the longitudinal movement body. The other end is connected, and each longitudinal movement wire is wound around a pulley so that each longitudinal movement wire can be moved in the length direction in a state where tension is applied to each longitudinal movement wire.
• both the vertical movement wire tension adjusting fluid pressure cylinders have a piston rod connecting one end of each vertical movement wire and supported at a fixed position, and the other end of each vertical movement wire has a first end.
• the second vertical moving body is arranged on the opposite side of the first vertical moving body across the furnace, the pulley is attached to the second vertical moving body, and each vertical moving wire is attached to the pulley.
• each vertical motion wire is wound so as to apply tension to the first vertical motion body and the second vertical motion body are driven synchronously by the vertical driving fluid electric cylinder,
• the first and second vertically moving bodies arranged on both sides of the furnace are moved up and down synchronously by the electric cylinder. As a result, it is difficult to cause the wire to sway and can be moved up and down in a stable posture.
• the shift of the stop position of the object to be heat-treated is reduced, stable conveyance is possible, and there is no change in the tension of the wire.
• front and rear refer to the right side of the figure as the front and the opposite side as the rear with reference to FIGS. 1 and 2, and left and right refer to the left and right as viewed from the rear.
• the sides are left and right.
• the continuous heat treatment furnace includes a tunnel-like furnace body 11 extending in the front-rear direction for heating and cooling the plate-shaped heat-treated object W, a gantry 12 that supports the furnace body 11 by means not shown, And a transfer device 13 having a transfer path for passing the object to be heat-treated W forward in a certain stroke through the body 11.
• the furnace body 11 has a heating chamber 23 having an inlet 21 at the rear end and a cooling chamber 24 communicated with the heating chamber 23 and having an outlet 22 at the front end.
• a heating lamp 25 is provided on the ceiling and floor of the heating chamber 23, respectively.
• the heating chamber 23 is shown in a form in which the central portion of the length is omitted, but has a length that allows the workpiece W to be conveyed at a plurality of pitches.
• the lengths of the heating chamber 23 and the cooling chamber 24 are not limited to those shown in the figure, and any combination may be used.
• the gantry 12 stands in the front-rear direction with a square pipe base frame 31, a pair of left and right rear posts 32 standing on the rear end of the base frame 31, and a front end of the base frame 31.
• a pair of left and right front posts 33 is provided.
• the transfer device 13 includes a pair of left and right front and rear moving wires 41 extending in parallel with each other through the furnace body 11 in the front-rear direction so as to be placed over the workpiece W to be processed.
• a pair of left and right motion wires 42 that extend parallel to the front and rear motion wires 41 with both front and rear motion wires 41 sandwiched between the heat-treated products W and the front and rear motion wires 41 are held at a certain level.
• a longitudinal movement mechanism 43 that moves back and forth and a vertical movement mechanism 44 that moves both the vertical movement wires 42 up and down so as to intersect with the level of the longitudinal movement wire 41 are provided.
• the forward / backward moving mechanism 43 includes a forward / backward driving single-axis robot 51 mounted on the upper surface of the base frame 31 so as to be positioned below the front part of the transport path.
• a single-axis robot 51 for longitudinal driving is a servo motor-driven positioning device, and includes a linear guide 52 extending in the front-rear direction and a slider 53 that is covered by this and forms a longitudinally moving body via a ball screw. It has.
• the slider 53 is equipped with a pair of longitudinally moving wire tension adjusting fluid pressure cylinders 54 horizontally and rearwardly through brackets at intervals in the vertical and horizontal directions.
• the distance in the left-right direction of the fluid pressure cylinders 54 for adjusting both the longitudinal wire tensions is shown as equivalent to that of the both longitudinal motion wires 41! /, But is not limited to this! /.
• the vertical movement mechanism 44 includes a rear vertical drive fluid pressure cylinder 61 mounted vertically upward so as to be positioned behind the rear post 32 on the upper surface of the base frame 31, and the upper surface of the base frame 31. And a front-side vertical drive fluid pressure cylinder 62 mounted vertically upward so as to be positioned in front of the front posts 33.
• a pair of vertically moving wire tension adjusting fluid pressure cylinders 63 are arranged via brackets so as to be positioned above the both longitudinal moving wire tension adjusting fluid pressure cylinders 54 at intervals in the vertical and horizontal directions. Is mounted on the upper surface of the base frame 31 in a horizontally forward direction.
• a first support shaft 71 for longitudinal movement is provided at the upper end of both rear posts 32, a second support shaft 72 for longitudinal movement is provided at the middle of the height, and a third support shaft 73 for forward and backward movement is provided near the lower end thereof.
• Each is secured via brackets.
• 5th support shaft for forward / backward movement 75 is blocked near the lower end via brackets. .
• These first, first, and fifth support shafts 71-75 all extend horizontally in the left-right direction.
• a pair of left and right first pulleys for longitudinal movement 81 is attached to the first longitudinal support shaft 71.
• a second pulley 82 for longitudinal movement is attached to the second support shaft 72 for longitudinal movement, and a third pulley 83 for longitudinal movement is attached to the third support shaft 73 for longitudinal movement, respectively.
• the mounting position of the second longitudinal pulley 82 corresponds to the position of the right longitudinal wire 41.
• the installation position of the third longitudinal pulley 83 for longitudinal movement corresponds to the position of the left longitudinal longitudinal movement wire 41.
• a pair of left and right fourth pulley 84 and fifth pulley 85 are attached to the fourth support shaft 74 and the fifth support shaft 75 for front and rear motion.
• Vertical rear guide rails 91 are provided on the rear side surfaces of both rear posts 32, respectively.
• a rear vertical moving body 93 is passed to both rear guide rails 91 via sliding guide members 92.
• the rear upper / lower moving body 93 is substantially U-shaped when viewed from the rear, and a piston rod of the rear vertical driving electric cylinder 61 is connected to the lower end thereof.
• Vertical front guide rails 94 are provided on the front side surfaces of both front posts 33, respectively.
• a front vertical moving body 96 is passed to both front guide rails 94 via sliding guide members 95.
• the front upper / lower moving body 96 is substantially U-shaped when viewed from the front, and a piston rod of a fluid pressure cylinder 62 for front vertical drive is connected to the lower end thereof.
• first and third support shafts 101 and 103 are blocked in order of increasing force.
• These first and third support shafts 101 and 103 for vertical movement all extend horizontally in the left-right direction.
• a pair of left and right vertical pulleys 111 are attached to the first vertical support shaft 101.
• a second pulley 112 for vertical movement is attached to the second support shaft 102 for vertical movement, and a third pulley 113 for vertical movement is attached to the third support shaft 103 for vertical movement, respectively.
• the attachment position of the second pulley 112 for vertical movement corresponds to the position of the vertical movement wire 42 on the right side.
• the mounting position of the third pulley 113 for vertical movement corresponds to the position of the left-right longitudinal movement wire 41.
• Both the longitudinally moving wire 41 and the vertically moving wire 42 are both a force in which a plurality of -chrome strands having an outer diameter of about 0.33 mm are twisted to an extent that the outer diameter is about 3 mm, etc.
• the material and composition may be used.
• one end of the left longitudinal motion wire 41 is connected to the left longitudinal motion wire tension. It is connected to the piston rod of the force adjusting fluid pressure cylinder 54, and one end of the right front / rear movement wire 41 is connected to the piston rod of the right front / rear movement wire tension adjusting fluid pressure cylinder 54.
• the other ends of both the longitudinal motion wires 41 are respectively connected to a slider 53, which is a longitudinal motion body, via a bracket.
• the left-right longitudinally moving wire 41 is wound around the third pulley 83 for the longitudinal motion, the first pulley 81, the fourth pulley 84, and the fifth pulley 85 in this order from one end to the other end.
• the right-and-left longitudinally moving wire 41 is wound around the second pulley 82, the first pulley 81, the fourth pulley 84, and the fifth pulley 85 in order, with one end force also applied to the other end.
• each of the vertical movement wires 42 is connected to the rear vertical movement body 93.
• one end of the left vertical movement wire 42 is connected to the piston rod of the left vertical movement wire tension adjusting fluid pressure cylinder 63
• one end of the right vertical movement wire 42 is connected to the right side. It is connected to the piston rod of the fluid pressure cylinder 63 for adjusting the vertical movement wire tension.
• the left vertical movement wire 42 is wound around the first vertical pulley 111 and the third pulley 113 in order, with one end force also applied to the other end.
• the right vertical motion wire 42 is wound around the first pulley 111 and the second pulley 112 for vertical motion in order from one end to the other end.
• Both the longitudinal motion wires 41 are individually subjected to tension by the fluid pressure cylinders 54 for adjusting the longitudinal motion wire tension, and the fluid pressure cylinders 63 for adjusting the vertical motion wire tension are applied to the both longitudinal motion wires 42.
• the tension can be applied individually.
• the tension is adjusted by numerically controlling the cylinder pressure with a precision digital regulator.
• Both the longitudinal movement wires 41 are moved with a constant stroke in the length direction between the backward limit and the forward limit by the single axis robot 51 for longitudinal driving.
• the stroke can be easily changed by numerical input, and it can be adapted to changes in workpiece size, required temperature profile, etc.
• Both vertical movement wires 42 are moved up and down with a constant stroke between upper and lower limits by electric cylinders 61 and 62 for vertical driving.
• the upper limit of the vertical movement stroke is an upper level than the longitudinal movement wire 41, and the lower limit thereof is a lower level than the longitudinal movement wire 41.
• the vertical movement stroke of the longitudinal movement wire 41 can be changed by inputting a numerical value or the like, so that it can respond to the sagging state of the wire 41.
• Both the longitudinal motion wires 41 and the vertical motion wires 42 perform the following walking motions. Are driven synchronously.
• the longitudinal movement wire 41 is positioned at the retreat limit and the vertical movement wire 42 is positioned at the lower limit.
• the workpiece W is placed on the longitudinal movement wire 41.
• the longitudinal motion wire 41 is advanced with the workpiece W placed thereon, and when the longitudinal motion wire 41 reaches the advance limit, the vertical motion wire 42 is raised.
• the up-and-down motion wire 42 that moves up the side of the front-rear motion wire 41 is passed, the workpiece W is transferred from the front-rear motion wire 41 to the up-down motion wire 42.
• the vertical movement wire 42 reaches the upper limit, the longitudinal movement wire 41 is retracted.
• the vertical movement wire 42 is lowered.
• the workpiece W that has been placed on the vertical motion wire 42 is also transferred to the longitudinal motion wire 41 when the vertical motion wire 42 that moves down the side of the longitudinal motion wire 41 is passed. . This completes one cycle of walking.
• the wires 41 and 42 a stranded wire is used over the entire length of the wire.
• the horizontal portion uses a round bar in the horizontal portion, and only the portion wound around the pulley is stranded. May be used.
• the wire may be coated or covered with a tube. If the vertical movement wire 42 is made of quartz or the like, it can be expected to prevent the unevenness of the object to be heat-treated W from being burned by transmitting the lamp light.
• the transfer apparatus according to the present invention is suitable for achieving conveyance of a plate-like heat-treated object such as a light-weight, thin substrate such as a solar cell wafer in a continuous heat treatment furnace.
• FIG. 1 is a vertical longitudinal sectional view of a transport apparatus according to the present invention.
• FIG. 2 is a plan view of the transfer device.

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• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Chemical & Material Sciences (AREA)
• General Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Thermal Sciences (AREA)
• Crystallography & Structural Chemistry (AREA)
• Materials Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• Tunnel Furnaces (AREA)
• Structure Of Belt Conveyors (AREA)

Priority Applications (4)

Applications Claiming Priority (1)

Publications (1)

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ID=36564831

Family Applications (1)

Country Status (4)

Cited By (5)

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• 2004
  • 2004-12-02 JP JP2006546554A patent/JP4922766B2/ja active Active
  • 2004-12-02 WO PCT/JP2004/017947 patent/WO2006059387A1/ja active Application Filing
  • 2004-12-02 CN CN2004800445279A patent/CN101072974B/zh not_active Expired - Fee Related
  • 2004-12-02 KR KR1020077013200A patent/KR100933535B1/ko not_active IP Right Cessation

Patent Citations (2)

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