JP4922396B2 - 基板の表面の検査用の測定装置および測定方法 - Google Patents

基板の表面の検査用の測定装置および測定方法 Download PDF

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Publication number
JP4922396B2
JP4922396B2 JP2009508395A JP2009508395A JP4922396B2 JP 4922396 B2 JP4922396 B2 JP 4922396B2 JP 2009508395 A JP2009508395 A JP 2009508395A JP 2009508395 A JP2009508395 A JP 2009508395A JP 4922396 B2 JP4922396 B2 JP 4922396B2
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Japan
Prior art keywords
air
substrate
sensor
mounted element
measuring device
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Expired - Fee Related
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JP2009508395A
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English (en)
Japanese (ja)
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JP2009535632A (ja
Inventor
クラウスマン ハーゲン
クラーグラー カール
ノイサー マルティン
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Siemens AG
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Siemens AG
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Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/304—Contactless testing of printed or hybrid circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/07—Non contact-making probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP2009508395A 2006-11-16 2007-11-06 基板の表面の検査用の測定装置および測定方法 Expired - Fee Related JP4922396B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006054088.3 2006-11-16
DE102006054088A DE102006054088A1 (de) 2006-11-16 2006-11-16 Messvorrichtung und Messverfahren zum Inspizieren einer Oberfläche eines Substrates
PCT/EP2007/061936 WO2008058869A2 (de) 2006-11-16 2007-11-06 Messvorrichtung und messverfahren zum inspizieren einer oberfläche eines substrates

Publications (2)

Publication Number Publication Date
JP2009535632A JP2009535632A (ja) 2009-10-01
JP4922396B2 true JP4922396B2 (ja) 2012-04-25

Family

ID=39311198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009508395A Expired - Fee Related JP4922396B2 (ja) 2006-11-16 2007-11-06 基板の表面の検査用の測定装置および測定方法

Country Status (6)

Country Link
EP (1) EP2092350A2 (zh)
JP (1) JP4922396B2 (zh)
KR (1) KR101014121B1 (zh)
CN (1) CN101432628B (zh)
DE (1) DE102006054088A1 (zh)
WO (1) WO2008058869A2 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010020011A1 (de) 2010-05-10 2011-11-10 Siemens Aktiengesellschaft Konstant-Spannungs-Sensor
CN102221354B (zh) * 2011-04-02 2013-01-09 中南大学 一种多测点浮动定位表面不平顺测量方法
WO2015010681A2 (de) * 2013-07-22 2015-01-29 Zs-Handling Gmbh Vorrichtung zur inspektion von werkstückoberflächen und bandmaterialien
CN108398114B (zh) * 2018-02-12 2020-09-18 武汉华星光电半导体显示技术有限公司 曲面盖板边缘曲率测量装置、测量系统及测量方法
CN108375608A (zh) * 2018-03-12 2018-08-07 昆山国显光电有限公司 基板检测装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6219752A (ja) * 1985-07-05 1987-01-28 チセンインダストリ−　ア−ゲ− 表面検査装置
JPH08233560A (ja) * 1995-02-23 1996-09-13 Hitachi Maxell Ltd 磁気記録媒体の表面検査方法とその装置
JP2001296278A (ja) * 2000-04-13 2001-10-26 Nkk Corp 金属体検査装置
JP2004191220A (ja) * 2002-12-12 2004-07-08 Nippon Steel Corp 鋼板の内部欠陥検出装置
JP2005043172A (ja) * 2003-07-28 2005-02-17 Jfe Steel Kk 探傷装置及びセンサ退避方法
JP2006242860A (ja) * 2005-03-04 2006-09-14 Oht Inc 検査装置および検査方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4824248A (en) * 1987-12-21 1989-04-25 Environmental Research Institute Of Michigan Stabilized sensor device
US5085517A (en) * 1989-10-31 1992-02-04 Chadwick Curt H Automatic high speed optical inspection system
US6046596A (en) * 1996-11-13 2000-04-04 Seagate Technology, Inc. Capacitance probe for magnetic recording head transducer to disc surface spacing measurement
SG117406A1 (en) * 2001-03-19 2005-12-29 Miconductor Energy Lab Co Ltd Method of manufacturing a semiconductor device
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP2006510772A (ja) * 2002-12-19 2006-03-30 チバ　スペシャルティ　ケミカルズ　ホールディング　インコーポレーテッド フタルイミジルアゾ染料、その製造方法、およびその使用
US7215133B2 (en) * 2004-01-30 2007-05-08 International Business Machines Corporation Contactless circuit testing for adaptive wafer processing
DE102005046154B4 (de) * 2005-09-27 2008-07-03 Siemens Ag Messvorrichtung und Messsystem zum Inspizieren einer Oberfläche eines Substrates

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6219752A (ja) * 1985-07-05 1987-01-28 チセンインダストリ−　ア−ゲ− 表面検査装置
JPH08233560A (ja) * 1995-02-23 1996-09-13 Hitachi Maxell Ltd 磁気記録媒体の表面検査方法とその装置
JP2001296278A (ja) * 2000-04-13 2001-10-26 Nkk Corp 金属体検査装置
JP2004191220A (ja) * 2002-12-12 2004-07-08 Nippon Steel Corp 鋼板の内部欠陥検出装置
JP2005043172A (ja) * 2003-07-28 2005-02-17 Jfe Steel Kk 探傷装置及びセンサ退避方法
JP2006242860A (ja) * 2005-03-04 2006-09-14 Oht Inc 検査装置および検査方法

Also Published As

Publication number Publication date
WO2008058869A3 (de) 2008-07-24
KR20090016449A (ko) 2009-02-13
JP2009535632A (ja) 2009-10-01
WO2008058869A2 (de) 2008-05-22
EP2092350A2 (de) 2009-08-26
KR101014121B1 (ko) 2011-02-14
CN101432628B (zh) 2012-10-03
CN101432628A (zh) 2009-05-13
DE102006054088A1 (de) 2008-05-21

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