JP4918699B2 - レーザ装置 - Google Patents
レーザ装置 Download PDFInfo
- Publication number
- JP4918699B2 JP4918699B2 JP2006028390A JP2006028390A JP4918699B2 JP 4918699 B2 JP4918699 B2 JP 4918699B2 JP 2006028390 A JP2006028390 A JP 2006028390A JP 2006028390 A JP2006028390 A JP 2006028390A JP 4918699 B2 JP4918699 B2 JP 4918699B2
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- JP
- Japan
- Prior art keywords
- laser
- discharge space
- laser chamber
- acoustic wave
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
図1は、本発明を適用したパルス発振型ガスレーザ装置の一実施例を示しており、このレーザ装置1の基本的な構造は、図15に示した従来のレーザ装置Aに準ずるものである。
2…レーザチャンバ、
2T…上方壁、
2To…開口、
2R…凹部、
2Q…吸音材、
2G…隙間、
3…カソード(主電極)、
3B…カソードベース、
4…アノード(主電極)、
4B…アノードベース、
5…リターンプレート、
6…コロナバー(予備電離電極)、
7…板状端子、
8…ファン、
9…ラジエータ、
10…カバープレート(蓋部材)、
20…ガイドプレート(ガイド部材)、
S…放電空間。
Claims (1)
- レーザガスを封入したレーザチャンバの内部に相対向する一対の主電極を設け、前記主電極間の放電空間に生じさせたパルス状の主放電により前記レーザガスを励起してレーザ光を発振させる、2KHz以上の高繰り返しパルス発振するレーザ装置において、
前記放電空間と前記主電極に並行する予備電離電極との隙間を覆う態様で、透光性材料から形成される、前記放電空間からの音響波を案内するガイド部材を設けて成ることを特徴とするレーザ装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006028390A JP4918699B2 (ja) | 2006-02-06 | 2006-02-06 | レーザ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006028390A JP4918699B2 (ja) | 2006-02-06 | 2006-02-06 | レーザ装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011232544A Division JP5358645B2 (ja) | 2011-10-24 | 2011-10-24 | レーザ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007208183A JP2007208183A (ja) | 2007-08-16 |
JP4918699B2 true JP4918699B2 (ja) | 2012-04-18 |
Family
ID=38487354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006028390A Active JP4918699B2 (ja) | 2006-02-06 | 2006-02-06 | レーザ装置 |
Country Status (1)
Country | Link |
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JP (1) | JP4918699B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6701198B2 (ja) | 2015-08-05 | 2020-05-27 | ギガフォトン株式会社 | レーザチャンバ |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4894023A (en) * | 1988-09-06 | 1990-01-16 | Hall Harold E | Connector assembly for anode ring of cathode ray tube |
JPH0341790A (ja) * | 1989-07-10 | 1991-02-22 | Nikon Corp | ガスレーザ装置 |
JPH04328889A (ja) * | 1991-04-30 | 1992-11-17 | Komatsu Ltd | ガスレ−ザ装置 |
JPH06177472A (ja) * | 1992-12-04 | 1994-06-24 | Komatsu Ltd | ガスレーザ装置 |
JPH10256625A (ja) * | 1997-03-06 | 1998-09-25 | Toshiba Corp | ガスレーザ装置 |
US6317447B1 (en) * | 2000-01-25 | 2001-11-13 | Cymer, Inc. | Electric discharge laser with acoustic chirp correction |
JP4094762B2 (ja) * | 1999-03-01 | 2008-06-04 | 株式会社小松製作所 | 放電励起型レーザ装置 |
JP3664030B2 (ja) * | 2000-03-16 | 2005-06-22 | ウシオ電機株式会社 | 放電励起ガスレーザ装置 |
JP2003060270A (ja) * | 2001-08-10 | 2003-02-28 | Gigaphoton Inc | パルス発振ガスレーザ装置 |
JP2003298155A (ja) * | 2002-04-03 | 2003-10-17 | Gigaphoton Inc | パルス発振型放電励起レーザ装置 |
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2006
- 2006-02-06 JP JP2006028390A patent/JP4918699B2/ja active Active
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JP2007208183A (ja) | 2007-08-16 |
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