JP4917485B2 - 応力成分測定方法 - Google Patents
応力成分測定方法 Download PDFInfo
- Publication number
- JP4917485B2 JP4917485B2 JP2007171149A JP2007171149A JP4917485B2 JP 4917485 B2 JP4917485 B2 JP 4917485B2 JP 2007171149 A JP2007171149 A JP 2007171149A JP 2007171149 A JP2007171149 A JP 2007171149A JP 4917485 B2 JP4917485 B2 JP 4917485B2
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- stress
- measurement
- correlation data
- stress component
- region
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000691 measurement method Methods 0.000 title claims description 4
- 238000005259 measurement Methods 0.000 claims description 91
- 238000001228 spectrum Methods 0.000 claims description 44
- 238000001237 Raman spectrum Methods 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 29
- 238000000491 multivariate analysis Methods 0.000 claims description 15
- 238000004364 calculation method Methods 0.000 claims description 12
- 238000013500 data storage Methods 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 10
- 239000000523 sample Substances 0.000 description 67
- 238000001069 Raman spectroscopy Methods 0.000 description 28
- 230000003595 spectral effect Effects 0.000 description 14
- 230000007246 mechanism Effects 0.000 description 13
- 230000003287 optical effect Effects 0.000 description 12
- 230000006870 function Effects 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- 238000003841 Raman measurement Methods 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000011088 calibration curve Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000000572 ellipsometry Methods 0.000 description 4
- 230000010365 information processing Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000001066 destructive effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000013074 reference sample Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001887 electron backscatter diffraction Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000007726 management method Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000009864 tensile test Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910005883 NiSi Inorganic materials 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004154 testing of material Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0047—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to residual stresses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
Description
41・・・・・・相関データ格納部
413・・・・・応力成分比較部
414・・・・・相関データ生成部
43・・・・・・応力成分算出部
L・・・・・・・ラマンスペクトル(ラマン散乱光)
W(W’)・・・標準試料(測定試料)
W1(W1’)・所定領域(測定領域)
S13・・・・・応力成分比較ステップ
S14・・・・・相関データ生成ステップ
S15・・・・・相関データ格納ステップ
S22・・・・・応力成分算出ステップ
Claims (4)
- 既知の複数の応力成分が作用している標準試料の所定領域(以下標準領域と言う)から得られたラマンスペクトルと前記複数の応力成分とを比較する応力成分比較ステップと、
前記応力成分比較ステップを、互いに異なる複数の応力成分が作用している複数の標準領域に対してそれぞれ行い、その結果から、多変量解析法によって前記ラマンスペクトルと複数の応力成分との相関を示す相関データを生成する相関データ生成ステップと、
前記標準試料と組成が同じ測定試料の領域(以下測定領域と言う)から得られたラマンスペクトル及び前記相関データに基づいて、当該測定領域に作用している複数の応力成分を算出する応力成分算出ステップと、
を備えていることを特徴とする応力成分測定方法。 - 既知の複数の応力成分が作用している標準試料の所定領域(以下標準領域と言う)から得られたラマンスペクトルと前記複数の応力成分とを比較する応力成分比較部と、
互いに異なる複数の応力成分が作用している複数の標準領域に対して、前記応力成分比較部がそれぞれ行った比較結果を取得し、それに多変量解析法を適用して前記ラマンスペクトルと複数の応力成分との相関を示す相関データを生成する相関データ生成部と、
前記相関データを格納する相関データ格納部と、
前記標準試料と組成が同じ測定試料の領域(以下測定領域と言う)から得られたラマンスペクトル及び前記相関データに基づいて、当該測定領域に作用している複数の応力成分を算出する応力成分算出部と、
を備えていることを特徴とする応力成分測定装置。 - 前記相関データが、前記ラマンスペクトルのピークシフト値、ピーク強度値及びスペクトル半値幅と各応力成分との相関関係を示すものである請求項1記載の応力成分測定方法。
- 既知の複数の応力成分が作用している標準試料の所定領域(以下標準領域と言う)から得られたラマンスペクトルと前記複数の応力成分とを比較する応力成分比較部と、
互いに異なる複数の応力成分が作用している複数の標準領域に対して、前記応力成分比較部がそれぞれ行った比較結果を取得し、その比較結果から前記ラマンスペクトルと複数の応力成分との相関を示す相関データを生成する相関データ生成部と、
前記相関データを格納する相関データ格納部と、
前記標準試料と組成が同じ測定試料の領域(以下測定領域と言う)から得られたラマンスペクトル及び前記相関データに基づいて、当該測定領域に作用している複数の応力成分を算出する応力成分算出部と、
を備えていることを特徴とする応力成分測定装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007171149A JP4917485B2 (ja) | 2006-10-10 | 2007-06-28 | 応力成分測定方法 |
GB0719476A GB2442851B (en) | 2006-10-10 | 2007-10-05 | Stress component measurement method |
US11/869,224 US7668668B2 (en) | 2006-10-10 | 2007-10-09 | Stress component measurement method |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006277028 | 2006-10-10 | ||
JP2006277028 | 2006-10-10 | ||
JP2007171149A JP4917485B2 (ja) | 2006-10-10 | 2007-06-28 | 応力成分測定方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008116434A JP2008116434A (ja) | 2008-05-22 |
JP4917485B2 true JP4917485B2 (ja) | 2012-04-18 |
Family
ID=38787825
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007171149A Expired - Fee Related JP4917485B2 (ja) | 2006-10-10 | 2007-06-28 | 応力成分測定方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7668668B2 (ja) |
JP (1) | JP4917485B2 (ja) |
GB (1) | GB2442851B (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9028550B2 (en) | 2005-09-26 | 2015-05-12 | Coalign Innovations, Inc. | Selectively expanding spine cage with enhanced bone graft infusion |
JP5281258B2 (ja) * | 2006-10-10 | 2013-09-04 | 株式会社堀場製作所 | 応力測定方法 |
US8992620B2 (en) | 2008-12-10 | 2015-03-31 | Coalign Innovations, Inc. | Adjustable distraction cage with linked locking mechanisms |
US8932355B2 (en) | 2008-02-22 | 2015-01-13 | Coalign Innovations, Inc. | Spinal implant with expandable fixation |
US20100145455A1 (en) | 2008-12-10 | 2010-06-10 | Innvotec Surgical, Inc. | Lockable spinal implant |
US7769134B1 (en) | 2009-02-17 | 2010-08-03 | International Business Machines Corporation | Measuring strain of epitaxial films using micro x-ray diffraction for in-line metrology |
JP5634306B2 (ja) * | 2011-03-08 | 2014-12-03 | 独立行政法人森林総合研究所 | 木材の非破壊乾燥応力測定による木材乾燥制御システム |
JP5506746B2 (ja) * | 2011-06-30 | 2014-05-28 | 株式会社半導体理工学研究センター | ラマン散乱による結晶内部応力または表面応力の測定法 |
EP3073969B1 (en) | 2013-11-27 | 2023-08-16 | Howmedica Osteonics Corp. | Structurally supporting insert for spinal fusion cage |
WO2015184162A1 (en) | 2014-05-29 | 2015-12-03 | Brown University | Optical system and methods for the determination of stress in a substrate |
KR20170012272A (ko) | 2014-05-30 | 2017-02-02 | 신닛테츠스미킹 마테리알즈 가부시키가이샤 | 벌크상 탄화 규소 단결정의 평가 방법, 및 그 방법에 사용되는 참조용 탄화 규소 단결정 |
EP3228282B1 (en) | 2016-04-07 | 2023-02-15 | Howmedica Osteonics Corp. | Expandable interbody implant |
AU2017203369B2 (en) | 2016-05-20 | 2022-04-28 | Howmedica Osteonics Corp. | Expandable interbody implant with lordosis correction |
AU2017228529B2 (en) | 2016-09-12 | 2022-03-10 | Howmedica Osteonics Corp. | Interbody implant with independent control of expansion at multiple locations |
AU2017251734B2 (en) | 2016-10-26 | 2022-10-20 | Howmedica Osteonics Corp. | Expandable interbody implant with lateral articulation |
CN106768512B (zh) * | 2017-02-08 | 2022-09-02 | 徐州工程学院 | 一种12点方位12点受力视频显示传感器装置的显示方法 |
EP3456294A1 (en) | 2017-09-15 | 2019-03-20 | Stryker European Holdings I, LLC | Intervertebral body fusion device expanded with hardening material |
CN110333219B (zh) * | 2019-07-15 | 2020-07-07 | 天津大学 | 应力分量的解耦检测方法与装置 |
CN113510726B (zh) * | 2021-07-13 | 2022-07-29 | 吉林大学 | 一种基于仿生刚柔耦合多维力感知的智能机械手 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2544428B2 (ja) | 1988-02-29 | 1996-10-16 | 株式会社日立製作所 | 応力測定方法及び応力測定装置 |
JPH0447254A (ja) * | 1990-06-15 | 1992-02-17 | Snow Brand Milk Prod Co Ltd | 近赤外線を用いて脱脂乳、牛乳、クリーム及びチーズの成分含量を測定する方法及び装置 |
JPH0626945A (ja) * | 1991-01-09 | 1994-02-04 | Sumitomo Metal Ind Ltd | 残留応力の測定方法及び該方法に使用する測定装置 |
US5999255A (en) * | 1997-10-09 | 1999-12-07 | Solutia Inc. | Method and apparatus for measuring Raman spectra and physical properties in-situ |
JP2000009664A (ja) | 1998-06-24 | 2000-01-14 | Nec Corp | 収束電子回折法 |
JP2005233928A (ja) * | 2004-01-23 | 2005-09-02 | Horiba Ltd | 基板検査装置 |
JP2005331386A (ja) * | 2004-05-20 | 2005-12-02 | Yokogawa Electric Corp | 検量線補正方法 |
GB0510497D0 (en) * | 2004-08-04 | 2005-06-29 | Horiba Ltd | Substrate examining device |
JP2006073866A (ja) | 2004-09-03 | 2006-03-16 | Horiba Ltd | 半導体材料の応力測定方法及びその装置 |
JP2006105599A (ja) * | 2004-09-30 | 2006-04-20 | Ngk Spark Plug Co Ltd | 温度測定方法、温度応力測定方法、高温時応力測定方法、温度測定装置、温度応力測定装置、及び高温時応力測定装置 |
US7553681B2 (en) * | 2006-03-24 | 2009-06-30 | Intel Corporation | Carbon nanotube-based stress sensor |
JP5281258B2 (ja) * | 2006-10-10 | 2013-09-04 | 株式会社堀場製作所 | 応力測定方法 |
-
2007
- 2007-06-28 JP JP2007171149A patent/JP4917485B2/ja not_active Expired - Fee Related
- 2007-10-05 GB GB0719476A patent/GB2442851B/en not_active Expired - Fee Related
- 2007-10-09 US US11/869,224 patent/US7668668B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20080086276A1 (en) | 2008-04-10 |
GB0719476D0 (en) | 2007-11-21 |
US7668668B2 (en) | 2010-02-23 |
GB2442851A (en) | 2008-04-16 |
GB2442851B (en) | 2011-08-10 |
JP2008116434A (ja) | 2008-05-22 |
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