JP4898010B2 - 分離された多ディスク・ジャイロスコープ - Google Patents

分離された多ディスク・ジャイロスコープ Download PDF

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JP4898010B2
JP4898010B2 JP2001042440A JP2001042440A JP4898010B2 JP 4898010 B2 JP4898010 B2 JP 4898010B2 JP 2001042440 A JP2001042440 A JP 2001042440A JP 2001042440 A JP2001042440 A JP 2001042440A JP 4898010 B2 JP4898010 B2 JP 4898010B2
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Prior art keywords
disk
axis
spring
gyroscope system
gyroscope
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JP2001042440A
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Japanese (ja)
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JP2001255153A (ja
JP2001255153A5 (https=
Inventor
カールステン・フンク
マルクス・ルッツ
ヴィルヘルム・フレイ
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ロベルト ボッシュ ゲー．エム．ベー．ハー．
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2001042440A 2000-02-19 2001-02-19 分離された多ディスク・ジャイロスコープ Expired - Fee Related JP4898010B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/507.583 2000-02-19
US09/507,583 US6443008B1 (en) 2000-02-19 2000-02-19 Decoupled multi-disk gyroscope

Publications (3)

Publication Number Publication Date
JP2001255153A JP2001255153A (ja) 2001-09-21
JP2001255153A5 JP2001255153A5 (https=) 2008-05-08
JP4898010B2 true JP4898010B2 (ja) 2012-03-14

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JP2001042440A Expired - Fee Related JP4898010B2 (ja) 2000-02-19 2001-02-19 分離された多ディスク・ジャイロスコープ

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US (1) US6443008B1 (https=)
EP (1) EP1126242A3 (https=)
JP (1) JP4898010B2 (https=)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6715352B2 (en) * 2001-06-26 2004-04-06 Microsensors, Inc. Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method
KR100503472B1 (ko) * 2003-03-06 2005-07-25 삼성전자주식회사 회전형 자이로스코프
US7514283B2 (en) 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere
US6936491B2 (en) 2003-06-04 2005-08-30 Robert Bosch Gmbh Method of fabricating microelectromechanical systems and devices having trench isolated contacts
US7075160B2 (en) 2003-06-04 2006-07-11 Robert Bosch Gmbh Microelectromechanical systems and devices having thin film encapsulated mechanical structures
US6952041B2 (en) 2003-07-25 2005-10-04 Robert Bosch Gmbh Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
FR2864226B1 (fr) 2003-12-19 2006-06-09 Commissariat Energie Atomique Structure vibrante micro-usinee et microgyrometre associe
US7068125B2 (en) 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
US7102467B2 (en) 2004-04-28 2006-09-05 Robert Bosch Gmbh Method for adjusting the frequency of a MEMS resonator
US7426859B2 (en) * 2004-10-29 2008-09-23 Archangel Systems, Inc. Motion sensor and method for detecting motion
FI116544B (fi) * 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
US20070170528A1 (en) 2006-01-20 2007-07-26 Aaron Partridge Wafer encapsulated microelectromechanical structure and method of manufacturing same
US8087295B2 (en) * 2006-03-13 2012-01-03 Yishay Sensors Ltd. Dual-axis resonator gyroscope
DE102008041028B4 (de) * 2008-08-06 2017-05-24 Robert Bosch Gmbh Rotationssensorvorrichtung und Verfahren zum Betreiben einer Rotationssensorvorrichtung
JP4939671B2 (ja) * 2010-07-05 2012-05-30 パイオニア株式会社 回転振動型ジャイロ
JP5884603B2 (ja) 2012-03-30 2016-03-15 株式会社デンソー ロールオーバージャイロセンサ
US20140013845A1 (en) * 2012-07-13 2014-01-16 Robert E. Stewart Class ii coriolis vibratory rocking mode gyroscope with central fixed post
JP6176001B2 (ja) 2012-11-29 2017-08-09 株式会社デンソー ジャイロセンサ
WO2015106270A1 (en) * 2014-01-13 2015-07-16 Qualtre, Inc. Method and apparatus for decoupling environmental and modal dependencies in inertial measurement devices
CN105043370B (zh) 2014-04-29 2019-01-22 财团法人工业技术研究院 具有支点元件的微型电机装置
US11725941B2 (en) 2019-01-08 2023-08-15 Panasonic Intellectual Property Management Co., Ltd. Sensing device
RU2761764C1 (ru) * 2021-01-28 2021-12-13 Акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" Микромеханический вибрационный гироскоп
DE102024207602A1 (de) 2024-08-09 2026-02-12 Robert Bosch Gesellschaft mit beschränkter Haftung Drehratensensor mit gestapelten Rotoren

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113842B (en) * 1982-01-27 1985-07-24 Marconi Co Ltd A sensor for detecting rotational movement
JPH0711532B2 (ja) * 1988-07-27 1995-02-08 日本航空電子工業株式会社 角速度計
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
JP3332460B2 (ja) * 1993-04-16 2002-10-07 キヤノン株式会社 角速度検出方法および振動ジャイロ
US5987986A (en) * 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
JP3265138B2 (ja) * 1994-10-26 2002-03-11 キヤノン株式会社 振動ジャイロおよび補正装置
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
DE19523895A1 (de) * 1995-06-30 1997-01-02 Bosch Gmbh Robert Beschleunigungssensor
JP4011626B2 (ja) * 1996-07-10 2007-11-21 株式会社ワコー 角速度センサ
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
DE19831594C1 (de) * 1998-07-14 2000-01-27 Litef Gmbh Mikromechanischer Drehratensensor mit Koppelstruktur
AU5241599A (en) * 1998-07-31 2000-02-21 Litton Systems, Incorporated Micromachined rotation sensor with modular sensor elements

Also Published As

Publication number Publication date
US6443008B1 (en) 2002-09-03
EP1126242A3 (en) 2004-12-08
EP1126242A2 (en) 2001-08-22
JP2001255153A (ja) 2001-09-21

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