|
US6715352B2
(en)
*
|
2001-06-26 |
2004-04-06 |
Microsensors, Inc. |
Method of designing a flexure system for tuning the modal response of a decoupled micromachined gyroscope and a gyroscoped designed according to the method
|
|
KR100503472B1
(ko)
*
|
2003-03-06 |
2005-07-25 |
삼성전자주식회사 |
회전형 자이로스코프
|
|
US7514283B2
(en)
|
2003-03-20 |
2009-04-07 |
Robert Bosch Gmbh |
Method of fabricating electromechanical device having a controlled atmosphere
|
|
US6936491B2
(en)
|
2003-06-04 |
2005-08-30 |
Robert Bosch Gmbh |
Method of fabricating microelectromechanical systems and devices having trench isolated contacts
|
|
US7075160B2
(en)
|
2003-06-04 |
2006-07-11 |
Robert Bosch Gmbh |
Microelectromechanical systems and devices having thin film encapsulated mechanical structures
|
|
US6952041B2
(en)
|
2003-07-25 |
2005-10-04 |
Robert Bosch Gmbh |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
|
|
FR2864226B1
(fr)
|
2003-12-19 |
2006-06-09 |
Commissariat Energie Atomique |
Structure vibrante micro-usinee et microgyrometre associe
|
|
US7068125B2
(en)
|
2004-03-04 |
2006-06-27 |
Robert Bosch Gmbh |
Temperature controlled MEMS resonator and method for controlling resonator frequency
|
|
US7102467B2
(en)
|
2004-04-28 |
2006-09-05 |
Robert Bosch Gmbh |
Method for adjusting the frequency of a MEMS resonator
|
|
US7426859B2
(en)
*
|
2004-10-29 |
2008-09-23 |
Archangel Systems, Inc. |
Motion sensor and method for detecting motion
|
|
FI116544B
(fi)
*
|
2004-12-31 |
2005-12-15 |
Vti Technologies Oy |
Värähtelevä mikromekaaninen kulmanopeusanturi
|
|
US20070170528A1
(en)
|
2006-01-20 |
2007-07-26 |
Aaron Partridge |
Wafer encapsulated microelectromechanical structure and method of manufacturing same
|
|
US8087295B2
(en)
*
|
2006-03-13 |
2012-01-03 |
Yishay Sensors Ltd. |
Dual-axis resonator gyroscope
|
|
DE102008041028B4
(de)
*
|
2008-08-06 |
2017-05-24 |
Robert Bosch Gmbh |
Rotationssensorvorrichtung und Verfahren zum Betreiben einer Rotationssensorvorrichtung
|
|
JP4939671B2
(ja)
*
|
2010-07-05 |
2012-05-30 |
パイオニア株式会社 |
回転振動型ジャイロ
|
|
JP5884603B2
(ja)
|
2012-03-30 |
2016-03-15 |
株式会社デンソー |
ロールオーバージャイロセンサ
|
|
US20140013845A1
(en)
*
|
2012-07-13 |
2014-01-16 |
Robert E. Stewart |
Class ii coriolis vibratory rocking mode gyroscope with central fixed post
|
|
JP6176001B2
(ja)
|
2012-11-29 |
2017-08-09 |
株式会社デンソー |
ジャイロセンサ
|
|
WO2015106270A1
(en)
*
|
2014-01-13 |
2015-07-16 |
Qualtre, Inc. |
Method and apparatus for decoupling environmental and modal dependencies in inertial measurement devices
|
|
CN105043370B
(zh)
|
2014-04-29 |
2019-01-22 |
财团法人工业技术研究院 |
具有支点元件的微型电机装置
|
|
US11725941B2
(en)
|
2019-01-08 |
2023-08-15 |
Panasonic Intellectual Property Management Co., Ltd. |
Sensing device
|
|
RU2761764C1
(ru)
*
|
2021-01-28 |
2021-12-13 |
Акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" |
Микромеханический вибрационный гироскоп
|
|
DE102024207602A1
(de)
|
2024-08-09 |
2026-02-12 |
Robert Bosch Gesellschaft mit beschränkter Haftung |
Drehratensensor mit gestapelten Rotoren
|